KR102026741B1 - Optical zoom probe - Google Patents

Abstract

An optical zoom probe is disclosed. The disclosed optical zoom probe includes an aperture adjuster for adjusting an opening through which light transmitted from a transmitter passes, and a curvature independently controlled to focus the light passing through the aperture and to adjust a focal length to a super near and proximal position. A focusing unit including first and second liquid lenses, a center region through which incident light passes unchanged, and a filter region positioned to surround the center region and to enlarge the depth of focus of the light focused to the super-close proximity position; It includes a filter unit to include.

Description

Optical zoom probe

The present invention relates to an optical zoom probe, and to an optical zoom probe capable of scanning near and ultra close distances.

In the field of medical imaging, there is an increasing demand for technology to precisely photograph the lower tomography along with information on the surface of the tissue (human body, skin). In particular, most cancers occur in the lower epithelial cells and propagate inside the dermal cells in which blood vessels are present. Thus, early detection can significantly reduce the damage caused by cancer. Conventional imaging techniques, such as magnetic resonance imaging (MRI), x-ray computed tomography (CT), and ultrasound, can penetrate the skin to capture internal tomography, but the low resolution prevents the detection of small early cancers. On the other hand, the recently introduced optical coherence tomography (OCT) technology uses light unlike the conventional method, so the penetration depth in the skin is about 2 to 3 mm, but the resolution is about 10 times higher than that of ultrasound. It is expected to be useful for diagnosis. However, these OCT techniques do not replace the biopsy and histology used to determine the actual cancer because the resolution is lower than the microscope level.

In recent years, some OCT researchers have been researching the convergence of OCT and high-resolution surface imaging methods, such as confocal microscopes, to perform real-time diagnosis of cancer inside tissue without biopsy. In the process. However, objectives in microscopes require a high numerical aperture (NA) optics for horizontal high resolution, while OCT has a relative spot size in the depth direction to obtain depth information. This requires a low numerical aperture optical system that is uniformly uniform, that is, having a large depth of focus (DOF). In addition, unlike the OCT mode, in the OCM mode, the depth of focus is short in the z-axis direction, and it is necessary to make the depth of focus longer.

The optical zoom probe provides high resolution scanning while moving the focus in the super near and near distances, and enables a longer depth of focus in the ultra close range.

An optical zoom probe according to an exemplary embodiment of the present invention includes an opening adjuster for adjusting an opening through which light transmitted from a light transmitting unit passes; A focus adjusting unit which focuses the light passing through the opening and adjusts the focal length to a super near position and a near position; And a filter unit including a center region through which incident light passes without change, and a filter region positioned to surround the center region and configured to enlarge a depth of focus of the light focused to the super-proximity position.

The center area may be provided to be equal to or larger than the size of the incident light beam by adjusting the size to a relatively small size by the opening controller in the proximity mode.

The central region may have a radius size of 0.2 to 0.5 times the opening radius of the opening regulator in the super close mode, and the minimum diameter may include the opening diameter of the opening regulator in the proximity mode.

The minimum radius size of the filter area may be formed to be equal to or larger than the opening radius of the opening regulator in the proximity mode.

The filter region may be formed in a ring structure.

The central region may be an opening or may have a transparent flat plate structure.

의 식을 만족하는 큐빅 필터로 형성되며, 이때 α값은 0.0001~0.02, β값은 2.6~3.1 값을 갖도록 형성될 수 있다.The filter area is

It is formed as a cubic filter that satisfies the equation, wherein α value is 0.0001 ~ 0.02, β value may be formed to have a value of 2.6 ~ 3.1.

의 식을 만족하는 큐빅 페달 필터로 형성되며, 이때 α값은 -0.005 ~ 0.005, β값은 -0.015 ~ 0.015값을 가지도록 형성될 수 있다.The filter area is

It is formed as a cubic pedal filter that satisfies the equation, wherein α value is -0.005 ~ 0.005, β value can be formed to have a value of -0.015 ~ 0.015.

The filter unit may be provided in the aperture adjuster or may be formed as a phase filter on a traveling path of parallel light before and after the aperture adjuster.

The filter part may be formed in an aspherical shape or a hybrid type on the last lens surface through which the parallel light passing through the opening regulator proceeds.

It may further include an aspherical lens having a positive power between the focusing unit and the object.

The focus adjusting unit may include first and second liquid lenses in which curvatures are independently controlled.

In the proximity scanning mode, the first and second liquid lenses may be driven to have concave lens surfaces.

In the super near scanning mode, the first and second liquid lenses may be driven such that at least one liquid lens has a convex lens surface.

In the super near scanning mode, the liquid lens close to the object among the first and second liquid lenses may be driven to have a convex lens surface.

At least one of the first and second liquid lenses further includes a transparent film having a curved surface, wherein the curved surface of the transparent film serves as a lens surface in the proximity scanning mode, and the curved surface of the transparent film is a lens in the super near scanning mode. It may be provided so as not to act as a surface.

Each of the first and second liquid lenses may be provided to form a lens surface with a fluid surface, and adjust a focal length by adjusting a shape of the lens surface by using a fluid flow.

The first and second liquid lenses may be provided to allow fluid movement in opposite directions.

The fluid flow occurs according to an electrowetting method, wherein at least one of the first and second liquid lenses comprises: a first fluid that is translucent; A second fluid having a property of not being mixed with the first fluid and being transparent; A chamber having an interior space accommodating the first fluid and the second fluid; A first surface constituting the lens surface as an interface between the first fluid and the second fluid; A second surface inducing a curvature change of the lens surface to an interface between the first fluid and the second fluid; A first intermediate plate provided in the chamber and having a first through hole having a diameter corresponding to the lens surface and a second through hole forming a passage of the second fluid; It may include; an electrode unit for forming an electric field for changing the position of the second surface.

The first fluid may be a polar liquid, and the second fluid may be a gas or a nonpolar liquid.

The fluid flow may occur pressure.

A first lens unit collimating the light transmitted from the light transmitting unit to be transmitted to the opening regulator; And a second lens unit disposed between the aperture adjuster and the focus adjustment unit. It may further include at least one of.

The filter unit may be formed in an aspherical shape or a hybrid type on the last lens surface where the parallel light of the second lens unit travels.

The opening regulator may be a liquid iris in which the opening size is adjusted in a microelectric fluid manner.

The opening regulator may include a chamber constituting a space in which the fluid flows; A first fluid and a second fluid provided in the chamber and having a property of not being mixed with each other, one of which is light-transmissive and the other that is light-shielding or light-absorbing material; An electrode part provided on an inner side of the chamber and having one or more electrodes arranged thereon to which a voltage is applied to form an electric field in the chamber; wherein the interface position changes between the first fluid and the second fluid according to the electric field It may be provided to adjust the opening through which the light is transmitted.

One of the first fluid and the second fluid may be a liquid metal or a polar liquid, and the other may be a gas or a nonpolar liquid.

The filter portion may be formed as a phase filter on the output side of the opening regulator.

The optical transmission unit may include an optical fiber.

Imaging system according to an embodiment of the present invention, the light source; An optical zoom probe according to an embodiment of the present invention for irradiating an object to be inspected with light from the light source unit; And a detector configured to detect an image of the object from the light reflected from the object.

In the optical zoom probe according to the exemplary embodiment of the present invention, a high resolution scan can be performed while moving a focus in a super close range and a near distance range, and a longer depth of focus can be realized in a super close range. Therefore, the ultra close distance, that is, the distance accuracy of the scan in the OCM mode can be increased.

1 is a conceptual diagram illustrating a relationship between horizontal resolution and depth of focus (DOF).
2 schematically shows the overall optical configuration of an optical zoom probe according to an embodiment of the present invention.
3A and 3B show an example of an aperture adjuster that may be employed in the optical zoom probe of FIG. 2, FIG. 3A shows an aperture A1 sized to be suitable for proximity mode, and in FIG. 3B The opening A2 is shown sized to fit the proximity mode.
4 shows another example of an aperture adjuster that may be employed in the optical zoom probe of FIG. 2.
FIG. 5 shows an example of a liquid lens that may be employed as the first liquid lens or the second liquid lens in the focusing unit in the optical zoom probe of FIG. 2.
FIG. 6 shows another example of a liquid lens that may be employed as the first liquid lens or the second liquid lens in the focusing unit in the optical zoom probe of FIG. 2.
FIG. 7 illustrates an example in which a focus adjusting unit including the first and second liquid lenses is configured by symmetrically coupling the liquid lenses of FIG. 5 to each other.
FIG. 8 shows another example of a liquid lens that may be employed as the first liquid lens or the second liquid lens in the focusing unit in the optical zoom probe of FIG. 2.
9A and 9B show an operating state of an optical zoom probe according to an embodiment of the present invention when scanning tissue to a relatively shallow depth from an object such as a tissue surface.
10 shows an operating state of the optical zoom probe according to an embodiment of the present invention when scanning at a longer focal length.
11 schematically shows the overall optical configuration of an optical zoom probe according to another embodiment of the present invention.
12 schematically shows an imaging system to which an optical zoom probe is applied according to an exemplary embodiment of the present invention.
13 to 15 schematically show various optical systems that can be applied to match the optical path length of the reference light when used in the OCM mode and the OCT mode.

Hereinafter, an optical zoom probe according to an exemplary embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, like reference numerals refer to like elements, and the size of each element in the drawings may be exaggerated for clarity and convenience of description.

1 is a conceptual diagram illustrating a relationship between horizontal resolution and depth of focus (DOF).

When the Gaussian beam is focused, it has a beam waist of finite size, Δx, rather than a point, and Δx is determined by the aperture D and the focal length f as follows.

(1)

(One)

Δx is related to the horizontal resolution. In other words, the smaller Δx, the higher the horizontal resolution. As shown in Equation (1), Δx is proportional to f / D, and the numerical aperture NA of the focusing lens FE is proportional to D / f, so that Δx is obtained to obtain a high horizontal resolution. An optical system with a large numerical aperture is required to be small.

The depth of focus (DOF) is determined as follows in a range where the beam diameter becomes √2Δx.

(2)

(2)

Depth of focus (DOF) refers to a range where the beam spot size is relatively uniform along the depth direction. When obtaining image information according to depth, for example, a tomography image of human tissue, an optical system having a large depth of focus (DOF), that is, an optical system having a small numerical aperture (NA) is required.

As such, the horizontal resolution and the depth of focus (DOF) have a trade off relationship.

The optical zoom probe according to an exemplary embodiment of the present invention may implement a horizontal resolution and a depth of focus required to scan an object at a high resolution at a super close range or a close range. Here, the super-proximity is the distance from the last lens of the optical zoom probe to the surface of the object, such as tissue, for example approximately 2 mm or less, the proximity distance is the distance of the object, such as tissue, to the last lens of the optical zoom probe. This means that the distance to the surface is, for example, about 30 mm or less.

2 schematically shows the overall optical configuration of an optical zoom probe 10 according to an embodiment of the present invention.

Referring to FIG. 2, the optical zoom probe 10 includes an opening adjuster 50 for adjusting an opening through which light transmitted from the light transmitting unit 20 passes, and first and second independent curvatures. The focus adjusting unit 70 including the liquid lenses 71 and 75, and the filter unit 40 provided to enlarge the depth of focus DOF of the light focused to the super close-up position. The optical zoom probe 10 may further include a lens 80 having a positive power to optimize focus between the focus adjusting unit 70 and an object such as a tissue to be examined. The lens 80 may be an aspheric lens. The optical zoom probe 10 includes a first lens unit 30, an aperture adjuster 50, and a focus adjusting unit 70 collimating light transmitted from the light transmitting unit 20 to be transmitted to the aperture adjuster 50. At least one of the second lens unit 60 disposed therebetween may be further included. 2 and the remaining drawings exemplarily show a case in which the optical zoom probe 10 includes both the first lens unit 30 and the second lens unit 60. Hereinafter, an optical zoom probe 10 according to an embodiment of the present invention will be described with reference to the optical system shown in FIG. 2, but embodiments of the present invention are not limited thereto, and various modifications and other equivalent embodiments are possible. to be.

The optical transmission unit 20 may further include a scanner 23 including an optical fiber 21 and assembled to one end of the optical fiber 21. The scanner 23 is an actuator that induces deformation of the optical fiber 21 to change the optical path. For example, the scanner 23 may be formed in the form of a cantilever using a piezo actuator or a piezoelectric or shape memory alloy. In addition to the above, various materials may be formed using various methods.

The end of the optical fiber 21 to be scanned may be formed to have an inclination of about 12 degrees or less, an anti-reflective coating, or include both of these complex characteristics so as to remove noise by the reflected light.

The first lens unit 30 collimates the light transmitted from the light transmission unit 20 so that the light incident to the aperture controller 50 is parallel light or approximately parallel light. 31,35). 2 and the following drawings show an example in which the first lens unit 30 has a configuration including a single lens 31 and a double bonded lens 35 spaced therefrom, which is exemplary, and the first lens. The lens configuration of the unit 30 may be variously modified.

The aperture adjuster 50 is for changing the numerical aperture of the focus adjustment unit 70 by adjusting the size of the light beam incident on the focus adjustment unit 70. For example, the aperture adjuster 50 may have a relative diameter of about 2 mm or less. In the OCM mode requiring a uniform high resolution within a section of approximately 2 mm in the depth direction at the ultra-close distance, the size of the light beam incident on the focus adjusting unit 70 is increased to realize a relatively high number of apertures. In addition, in the OCT mode requiring a uniform spot size within a section of approximately 2 mm in the depth direction at a close distance within approximately 2 mm to 30 mm, the aperture adjuster 50 reduces the size of the light beam incident on the focus adjusting unit 70 to reduce the relative size. To realize a low number of apertures.

The opening regulator 50 may be a liquid iris in which the opening size is adjusted in a micro electric fluid manner. In addition, the opening regulator 50 may be an aperture in which the opening size is mechanically adjusted, or may be a liquid aperture in which the opening size is adjusted using a hydraulic pressure such as a pump.

As the opening regulator 50, for example, opening regulators 101 and 102 having a structure as shown in FIGS. 3A, 3B, and 4 may be employed.

3A and 3B show an example of an aperture adjuster 101 that may be employed in the optical zoom probe 10 of FIG. 2. 3A shows the opening A1 sized to be suitable in proximity mode, ie in OCT mode. FIG. 3B shows the aperture A2 sized to be suitable in the super close mode, ie in the OCM mode.

Referring to FIGS. 3A and 3B, the opening regulator 101 has an opening size through which fluid flows and light passes according to the fluid wetting principle, for example, A1 in OCT mode, A2 in OCM mode, and the like. It can be configured to be adjusted to. The opening regulator 101 is provided in a chamber constituting a space in which the fluid flows, and is provided in the chamber, and has a property of not being mixed with each other. F1) and the second fluid (F2), and the electrode portion is provided on the inner side of the chamber and one or more electrodes are arranged to apply a voltage to form an electric field in the chamber. According to the electric field, the opening through which light is transmitted is adjusted by changing the position of the interface between the first fluid F1 and the second fluid F2.

For example, the region of the chamber includes a first channel C1 and a second channel C2 arranged to be connected to the first channel C1 on the first channel C1 and to the first channel C1. ) And the opening range may be determined by a change in the position of the interface between the first fluid F1 and the second fluid F2 occurring in each of the second channel and the second channel C2. The first channel (C1) has an internal space between the first substrate 110, the second substrate 150 spaced apart from the first substrate 110, and the first substrate 110 and the second substrate 150. It may be formed by the first spacer 130 forming a. In this case, the second substrate 150 may have a first through hole TH1 formed at a central portion thereof, and a second through hole TH2 formed at a peripheral portion thereof. In addition, the second channel C2 is disposed between the second substrate 150, the third substrate 190 provided to be spaced apart from the second substrate 150, and the second substrate 150 and the third substrate 190. It may be formed by the second spacer 170 provided to form the internal space.

One of the first fluid F1 and the second fluid F2 may be a liquid metal or a polar liquid, and the other may be a gas or a nonpolar liquid.

The electrode part is formed on the first substrate 110 and is formed of one or more electrodes E coated with the insulating material I, and the first electrode part 120 and the third substrate 190 are formed on the insulating material ( It may include a second electrode portion 180 consisting of one or more electrodes (E) coated with I).

The first electrode unit 120 may be configured to include a plurality of electrodes to digitally control the opening A. FIG.

The ground electrode part R may be provided to maintain contact with the polar fluid at one or more places inside the chamber. For example, the ground electrode part R may be provided to maintain contact with the first fluid F1 having a polarity. For this purpose, as shown in FIGS. 3A and 3B, the ground electrode part R may be disposed on the first substrate 110. And its position can be changed.

The electrode E constituting the first electrode 120 and the second electrode 180 may be formed of a transparent conductive material. For example, the electrode E constituting the first electrode unit 120 and the second electrode unit 180 may be a metal oxide such as indium tin oxide (ITO) or indium zinc oxide (IZO), or a metal such as Au or Ag. Nanoparticle dispersion thin film, carbon nanostructures such as carbon nanotube (CNT), graphene, poly (3,4-ethylenedioxythiophene) (PEDOT), polypyrrole (PPy), poly (3-hexylthiophene) (P3HT) It may be formed of a conductive polymer and the like.

Since the ground electrode part R is not required to transmit light in the arrangement position, it may be formed of, for example, a metal thin film of Au, Ag, Al, Cr, Ti, or the like.

Electrowetting refers to a phenomenon in which the contact angle of droplets changes when a voltage is applied to electrolyte droplets on an electrode coated with an insulator. That is, in the three-phase contact line (TCL) where the fluid, droplet, and insulator meet, the contact angle changes according to the respective interfacial tension. When using the electrowetting phenomenon, low voltage can be used to control the flow of the fluid quickly and effectively, and reversible transfer and control of the fluid is possible.

When an appropriate voltage is applied to any one electrode E of the first electrode unit 120, the three-phase contact line TCL on the activated driving electrode, that is, the first fluid F1, The electromechanical force acts at the tangent where the fluid F2 and the insulating material I meet so that the first fluid F1 moves to the center through the first channel C1 and the opening A is opened as shown in FIG. 3A. Can be reduced. In addition, when an appropriate voltage is applied to the second electrode unit 180, the first fluid F1 moves to the center through the second channel C2, and the TCL of the first channel C1 is pushed to the edge of FIG. 3B. The opening A2 can be expanded as in. When the first electrode unit 120 is configured of the plurality of electrodes E, the opening size can be digitally controlled by changing the activated electrode.

In the OCT mode, as shown in FIG. 3A, the opening size is A1, and in the OCM mode, the opening size is A2 as shown in FIG. 3B, which is shown as an example. The size of each opening A1 and A2 is determined according to the design conditions. Can vary.

Referring back to FIG. 2, the opening regulator 50 may include a cover glass 51 at at least one of an input terminal and an output terminal. 2 shows an example in which the opening regulator 50 includes a cover glass 51 at the input end. In FIG. 2, reference numeral 55 denotes a portion where the opening adjustment of the opening regulator 50 is made.

3A and 3B, when the fluid is flowed by the electrowetting principle to adjust the size of the openings A1 and A2, the first substrate 110 or the third substrate 190 of the opening regulator 101 is covered. It may be used as glass or may further include a separate cover glass.

2, 3A and 3B, the filter unit 40 is a center region 41 for passing incident light without change, and a focal point of the light positioned to surround the center region and focused at a super near position. It includes a filter area 45 provided to enlarge the depth (DOF).

The central area 41 may be an open opening or may have a transparent flat plate structure. As can be seen from the comparison of FIGS. 3A and 3B, the central region 41 is adjusted to a relatively small size by the opening controller 101 in the proximity mode, that is, in the OCT mode. It may be provided to be equal to or larger in size. In this case, the central region 41 may be formed to have a radius of about 0.2 times to about 0.5 times the radius of the opening A2 of the opening regulators 101 and 102 in the super close mode, that is, in the OCM mode. The minimum diameter may comprise the opening diameter A1 of the opening regulators 101, 102 in proximity mode, ie in OCT mode. 3A illustrates a case in which the central region 41 is formed to have a size corresponding to the opening A1 in the OCT mode.

The filter region 45 may be formed as a phase filter and may have a ring structure surrounding the central region 41. In this case, the minimum radius of the filter area may be formed to be equal to or larger than the radius of the opening A1 of the opening regulators 101 and 102 in the proximity mode, that is, in the OCT mode.

의 식을 만족하는 큐빅(Cubic) 필터로 형성될 수 있다. 이때 α값은 약 0.0001~0.02, β값은 약 2.6~3.1 값을 가질 수 있다.The filter area 45 is

It may be formed as a cubic filter that satisfies the equation. At this time, the α value may be about 0.0001 to 0.02, and the β value is about 2.6 to 3.1.

의 식을 만족하는 큐빅 페달(Cubic-petal) 필터로 형성될 수 있다. 이때 α값은 약 -0.005 내지 약 +0.005, β값은 약 -0.015 내지 약 +0.015값을 가지도록 형성될 수 있다.In addition, the filter area 45 is

Cubic pedal (Cubic-petal) filter that satisfies the equation. In this case, the α value may be formed to have a value of about −0.005 to about +0.005, and a β value of about −0.015 to about +0.015.

The filter unit 40 as described above may be provided in the opening regulator 50 or may be formed as a phase filter on the path of parallel light before and after the opening regulator 101.

That is, the filter part 40 may be provided in the opening regulators 50, 101, and 102 as shown in FIGS. 2 to 11.

In addition, the filter unit 40 may be formed as a phase filter on the path of parallel light before and after the opening regulator 50, instead of being provided in the opening regulator 50. Here, as described above, in the optical zoom probe 10 according to the embodiment of the present invention, the light incident by the first lens unit 30 to the aperture regulator 50 is parallel light or approximately parallel light. As can be seen from FIGS. 9A to 10 to be described later, the light passing through the opening regulator 50 proceeds in the form of parallel light to a predetermined position.

On the other hand, the optical zoom probe 10 according to the embodiment of the present invention may employ the aperture adjuster 102 as shown in FIG. 4 instead of the aperture adjuster 101 of FIG. 3 as the aperture adjuster 50.

4 shows another example of an aperture adjuster 102 that may be employed in the optical zoom probe 10 of FIG. 2.

The opening regulator 102 shown in FIG. 4 includes a third electrode portion 320 and a fourth electrode portion 380 formed of at least one electrode E coated with an insulating material I on both surfaces of the second substrate 150. ) Is different from the opening adjuster 101 of FIG. 3. The third electrode part 320 increases the driving force generated in the first channel C1 together with the first electrode part 120, and the fourth electrode part 380 together with the second electrode part 180. The driving force generated in the second channel C2 may be increased. The number of electrodes forming the third electrode portion 320 and the fourth electrode portion 380 is not limited to the illustrated number, and may be variously modified. In addition, although the third electrode portion 320 and the fourth electrode portion 380 are respectively described and illustrated on both surfaces of the second substrate 150, this is merely an example, and any one surface of the second substrate 150 is provided. Only the third electrode portion 320 or the fourth electrode portion 380 may be provided.

Referring to FIG. 2 again, the second lens unit 60 is for transmitting the light passing through the aperture adjuster 50 to the focus adjusting unit 70 and may include at least one lens.

The focus adjusting unit 70 includes first and second liquid lenses 71 and 75 whose curvatures are independently controlled from each other to focus the light passing through the opening of the opening adjuster 50 and to adjust the focal length. can do.

The first liquid lens 71 and the second liquid lens 75 may have a transparent medium 73 therebetween, and the first liquid lens 71 and the second liquid lens 75 may have the transparent medium. It can be formed in a single body with (73) in between. At this time, in order to optimize the focusing unit 70 in the longitudinal direction, the first and second liquid lenses 71 and 75 have one transparent medium 73 and behave in opposite directions to each other during the focusing operation. This can be arranged to be done. In this case, when the curvature of the first and second liquid lenses 71 and 75 is adjusted, the protrusion change amount of each liquid lens 71 or 75 may be driven not to exceed 400 μm in order to minimize the distance.

Each of the first and second liquid lenses 71 and 75 may be provided to form a lens surface with a fluid surface, and adjust a focal length by adjusting a shape of the lens surface using a fluid flow.

The distance between the last lens of the optical zoom probe 10 (lens 80 in FIG. 2) and the object, such as a tissue, is super close, for example, in a depth range, for example, in a depth direction at a super near position of about 2 mm or less. In x, y scanning in the range of 2 mm to 4 mm, that is, in the OCM mode, the first and second liquid lenses 71 and 75 may have at least one convex lens, as shown in FIGS. 9A and 9B described later. It can be driven to have a lens surface. At this time, in the super near scanning, that is, in the OCM mode, the liquid lens near the tissue of the first and second liquid lenses 71 and 75, that is, the second liquid lens 75 may be driven to have a convex lens surface. have.

In addition, the distance between the last lens of the optical zoom probe 10 (lens 80 in FIG. 2) and the object such as a tissue is close to, for example, in a predetermined range in the depth direction at a proximity position of about 30 mm or less. In the y scanning, that is, in the OCT mode, the first and second liquid lenses 71 and 75 may be driven to have concave lens surfaces, as shown in FIG. 10 to be described later.

The first and second liquid lenses 71 and 75 may be provided such that, for example, fluid flow occurs according to an electrowetting method.

FIG. 5 shows an example of a liquid lens 201 that may be employed as the first liquid lens 71 or the second liquid lens 75 in the focus adjusting unit 70 in the optical zoom probe 10 of FIG. 2.

Referring to FIG. 5, a translucent and polar first fluid TF1 and a second fluid TF2 that are translucent and do not mix with the first fluid TF1 and the first fluid TF1 are accommodated in the chamber interior of the liquid lens 201. do. The interface between the first fluid TF1 and the second fluid TF2 includes a first surface LS constituting the lens surface and a second surface IS for inducing a change in curvature of the lens surface. In addition, an electrode portion for forming an electric field for changing the position of the second surface IS is formed in the chamber. The lens so that the interface between the first fluid TF1 and the second fluid TF2 can form the first surface LS forming the lens surface and the second surface IS inducing a change in curvature of the lens surface. The first intermediate plate 250 having the first through hole TH1 forming the diameter of the lens corresponding to the surface and the second through hole TH2 forming the passage of the second fluid TF2 is formed in the chamber. Prepared.

A lower substrate 210 and an upper substrate 290 may be provided at the lower and upper portions of the first intermediate plate 250, respectively, to form an internal space between the lower substrate 210 and the first intermediate plate 250. The spacer part may be provided between the first intermediate plate 250 and the upper substrate 290. The spacer part may include a first spacer 230 between the lower substrate 210 and the first intermediate plate 250, and a second spacer 270 between the first intermediate plate 250 and the upper substrate 290.

The lower substrate 210, the first intermediate plate 250, and the upper substrate 290 may be formed of a light transmissive material.

The first fluid TF1 and the second fluid TF2 may be formed of a translucent fluid having different refractive indices. In this case, the first fluid TF1 may be a polar liquid, and the second fluid TF2 may be a gas or a nonpolar liquid.

As shown in the drawing, the lower surface of the first electrode portion 220 and the first intermediate plate 250 are formed on the upper surface of the lower substrate 210 and the surface is coated with an insulating material (I). And a second electrode portion 280 formed on the surface thereof and having an electrode E coated with an insulating material I. Here, only one of the first electrode portion 220 and the second electrode portion 280 may be provided.

In addition, the semiconductor device may further include a ground electrode R provided to contact the first fluid TF1. Although the ground electrode R is illustrated as being disposed on the first substrate 210, the ground electrode R may be disposed at any position where the ground electrode R may come into contact with the first fluid TF1 in a state where no voltage is applied. The ground electrode R may be selectively provided, and when the ground electrode R is provided, the driving voltage may be lowered.

The electrodes forming the first electrode part 220 and the second electrode part 280 may be formed of a transparent conductive material. For example, metal oxide particles such as indium tin oxide (ITO), indium zinc oxide (IZO), metal nanoparticle dispersion thin films such as Au and Ag, carbon nanostructures such as carbon nanotube (CNT), graphene (graphene), Conductive polymers such as poly (3,4-ethylenedioxythiophene) (PEDOT), polypyrrole (PPy), poly (3-hexylthiophene) (P3HT) and the like can be used. The ground electrode R may be formed of the above-described transparent conductive material, and may be formed of a metal thin film such as Au, Ag, Al, Cr, Ti, or the like, when light transmittance is not required according to an arrangement position.

The pressure acting on the second surface IS of the liquid lens 201 is changed by the electrowetting driving, and accordingly, the curvature of the first surface LS, which is the lens surface, is adjusted. When the voltage is not applied or the magnitude of the applied voltage decreases, the second surface IS moves to the center side, and the first surface LS serving as the lens surface may become more convex. When the magnitude of the applied voltage is increased, the second surface IS moves to both sides, and the curvature of the first surface LS is smaller, and when the applied voltage is maximum, the first surface LS is concave curvature. Can have

In FIG. 5, the first electrode part 220 and the second electrode part 280 each consist of one electrode E, and the voltage level applied to the electrode E is adjusted to adjust the voltage of the second surface IS. Show an example of changing the position.

The first electrode part 220 and the second electrode part 280 may be formed of a plurality of electrodes E coated with an insulating material I. In this case, the first electrode part 220 and the first electrode part 280 may be formed. The curvature of the first surface LS, which becomes the lens surface, may be digitally controlled by selecting a part of the electrodes E constituting the second electrode unit 280. That is, among the electrodes E When one of them is selected and an appropriate voltage is applied, a three-phase contact line (TCL) of the activated driving electrode, that is, a second surface which is an interface between the first fluid F1 and the second fluid F2 Electromechanical force is applied at the tangential point where the IS and the insulating material I meet to form the position of the second surface IS, thereby determining the curvature of the first surface LS. When the disposed electrode E is selected and an appropriate voltage is applied, the position of the second surface IS may move to the center side as much as possible, thereby increasing the curvature of the first surface LS. When the electrode E disposed outside is selected and an appropriate voltage is applied, the position of the second surface IS moves to both sides to the maximum, and the curvature of the second surface LS may be increased, or the concave curvature may be increased. It may be formed.

6 shows another example of a liquid lens 202 that may be employed as the first liquid lens 71 or the second liquid lens 75 in the focusing unit 70 in the optical zoom probe 10 of FIG. 2. .

Referring to FIG. 6, the liquid lens 202 has a liquid such that the focal length is approximately 30 mm so that the shape control is unnecessary in the z-axis direction or the lens surface that minimizes the shape deformation has a lens shape with the transparent film 203. It can form between. The liquid lens 202 of FIG. 6 differs from the liquid lens 201 of FIG. 5 in that it further includes a transparent film 203 having a curved surface. The curved surface of the transparent film 203 may be formed to form a concave curved surface.

In this case, for example, in the proximity mode, the first fluid TF1 and the second fluid TF2 are moved such that the first surface LS corresponds to the curved surface of the transparent film 203, so that the transparent film 203 is moved. The curved surface of may act as a concave lens surface, and in the super close-up mode, the first surface LS may exist above the transparent film 203 so that the curved surface of the transparent film 203 may not act as a lens surface. . A through hole 203a may be formed in the transparent film 203 so that the first fluid TF1 or the second fluid TF2 can be moved. 6 illustrates a case in which the first fluid TF1 is also present on the transparent film 203, and the convex interface between the first fluid TF1 and the second fluid TF2 acts as a lens surface. When all the fluids TF1 existing on the transparent film 203 come out of the transparent film 203, the concave curved surface of the transparent film 203 serves as the concave lens surface.

Even in this case, the pressure acting on the second surface IS of the liquid lens 202 may be changed by the electrowetting driving, and thus the curvature of the first surface LS, which is the lens surface, may be adjusted.

In FIGS. 5 and 6, the first electrode part 220 and the second electrode part 280 each consist of one electrode E, and the second surface (by adjusting the magnitude of the voltage applied to the electrode E). An example of changing the position of IS is shown, wherein the first electrode portion 220 and the second electrode portion 280 may be formed of a plurality of electrodes E coated with an insulating material I, respectively. In this case, the curvature of the first surface LS serving as the lens surface may be digitally controlled by selecting a part of the electrodes E constituting the first electrode 220 and the second electrode 280 and applying a voltage. Can be.

FIG. 7 illustrates an example in which the focusing unit 70 including the first and second liquid lenses 71 and 75 is symmetrically coupled to the liquid lens 201 of FIG. 5. The focus adjusting unit 70 including the first and second liquid lenses 71 and 75 may have a structure by symmetrically coupling the liquid lenses 202 of FIG. 6 to each other. In this case, the first liquid lens 71 and the second liquid lens 75 may be independently controlled to adjust the curvature.

In this case, the transparent medium 73 existing between the first liquid lens 71 and the second liquid lens 75 may correspond to the lower substrate 210, and the first liquid lens 71 and the second liquid lens may be used. A separate transparent medium may be further provided between the 75. 7 illustrates an example in which two lower substrates 210 are coupled to each other by combining a pair of liquid lenses, and a focus adjusting unit 70 is provided between the first liquid lens 71 and the second liquid lens 75. It may be formed so that only the lower substrate 210 of the.

Referring back to FIG. 2, the focus adjusting unit 70 may include cover glasses 77 and 79 at at least one of an input terminal and an output terminal. FIG. 2 shows an example in which cover glasses 77 and 79 are included at input and output ends of the focus control unit 70, respectively.

As shown in FIG. 7, when the two liquid lenses are symmetrically coupled to each other to configure the focus adjusting unit 70 including the first and second liquid lenses 71 and 75, the upper and lower parts of the focus adjusting unit 70 are formed. The upper substrates 290 positioned in the may be used as cover glass, or may further include a separate cover glass.

In the above, the case where the first and second liquid lenses 71 and 75 of the focusing unit 70 are provided so that the fluid flow occurs according to the electrowetting method has been described as an example, but embodiments of the present invention are limited thereto. At least one of the first and second liquid lenses 71 and 75 may also apply a liquid lens 205 provided such that the fluid flow is pressurized as shown in FIG. 8.

8 shows another example of a liquid lens 205 that may be employed as the first liquid lens 71 or the second liquid lens 75 in the focusing unit 70 in the optical zoom probe 10 of FIG. 2. .

Referring to FIG. 8, the liquid lens 205 has a configuration in which the fluid flow for changing the curvature of the lens surface is pressure-sensitive. The liquid lens 205 includes a translucent fluid TF3 provided in the interior space of the chamber. The internal space 380 of the chamber is formed by the substrate 310 and the frame 330 formed on the substrate 310, and may include an oil chamber 382, a flow path 384, and a lens chamber 386. The membrane 350 may be disposed on the frame 330, and the actuator 370 may be provided at a position on the membrane 350 corresponding to the upper portion of the oil chamber 382. One surface of the membrane 350 at a position corresponding to the upper portion of the lens chamber 386 may be the lens surface 350a.

The membrane 350 may be made of a transparent and elastic material, for example, a silicone elastomer. In addition, polydimethylsiloxane (PDMS) having excellent durability and flexibility may be employed.

The actuator 370 is provided to apply pressure to the translucent fluid TF3, and various types of actuators that are commonly used may be used. For example, a conventional polymer actuator made of an electro active polymer (EAP) with a very thin thickness and low power consumption may be used, such as P (VDF-TrFE_CFE) and P (VDF-TrFE-CTFE). Relaxed ferroelectric polymer actuators made of interpolymers may be employed. The actuator 370 causes electrostrictive strain as a voltage is applied to apply pressure to an adjacent light transmitting fluid TF3.

As the optical fluid TF3, for example, silicone oil may be employed.

When pressure is applied to the translucent fluid TF3 in the oil chamber 382 according to the driving of the actuator 370, the translucent fluid TF3 moves to the lens chamber 386 along the flow path 384 so that the lens surface 350a may be moved. The shape is changed.

A liquid lens that can be employed as the first liquid lens 71 or the second liquid lens 75 in the focusing unit 70 in the optical zoom probe 10 of FIG. 2 may be employed in addition to the above examples. For example, it may be formed of a liquid crystal lens that forms an electric field gradient in the liquid crystal and induces a refractive index gradient to adjust the focal length.

In the optical zoom probe 10 according to the embodiment of the present invention as described above, the focal length is varied by adjusting the curvature of the first and second liquid lenses 71 and 75, and the size of the opening is adjusted. As the resolution is adjusted. In addition, the depth of focus may be longer in the OCM mode by the filter region 45 of the filter unit 40.

9A to 9B and 10 illustrate a depth scanning method using the optical zoom probe 10 according to an embodiment of the present invention. 9A to 9B and 10, according to the optical zoom probe 10 according to the exemplary embodiment of the present invention, scanning may be performed while maintaining the horizontal resolution even if the depth within the object is changed.

9A and 9B show an operating state of the optical zoom probe 10 according to an embodiment of the present invention when scanning a tissue to a relatively shallow depth from an object such as a tissue surface with a short focal length. 10 shows an operating state of the optical zoom probe 10 according to an embodiment of the present invention when scanning at a longer focal length.

As shown in FIG. 9A, when the opening size of the opening regulator 50 is set to an appropriate size, and the lens surfaces of the first liquid lens 71 and the second liquid lens 75 are convex, the light is approximately second. When the light focused on an object such as a tissue surface at a close distance and focused at an ultra-close distance by the filter 45 of the filter unit 40 does not use the depth of focus of the filter unit 40. It can be at least several times longer. In this case, the distance between the last lens 80 and the tissue of the optical zoom probe 10 may be, for example, about 2 mm or less. In this case, when the optical transmission unit 20 induces deformation of the optical fiber 21 by the scanner 23 to change the optical path, the tissue surface may be scanned within a predetermined range in the x and y planes.

As shown in FIG. 9B, the opening size of the opening regulator 50 is made larger than that of FIG. 9A, and the first liquid lens 71 has a slightly concave curved surface, and the second liquid lens relatively close to the tissue ( 75) allows the lens surface to be convex, allowing the light spot to form at a certain depth from the tissue surface while maintaining the horizontal resolution of the light spot. For example, the light spots may build up about 2 mm deep from the tissue surface. In this case, too, the optical transmission part 20 induces the deformation of the optical fiber 21 by the scanner 23 to change the optical path while forming the light spot at a predetermined depth. You can scan inside the tissue.

The opening size of the opening regulator 50 in FIGS. 9A and 9B may be a value within a range of the opening size A2 in FIG. 3B.

In this OCM mode, the scan in the z-axis direction is approximately within the range of about 2 mm to about 4 mm. In this case, for example, in the OCM mode, the depth of focus in the z-axis direction is short as about 10 μm when the filter unit 40 is not provided, and in the optical zoom probe 10 according to the embodiment of the present invention, Similarly, when providing the filter part 40, it can lengthen about 50 micrometers. Therefore, according to the optical zoom probe 10 according to the embodiment of the present invention, in the OCM mode, since the depth of focus is not necessary to precisely move the position of the focus, the super close-up scanning can be made more easily and accurately. Here, in the optical zoom probe 10 according to the embodiment of the present invention, the focal depth of about 50 μm obtained in the OCM mode is shown as an example, and the embodiment of the present invention is not limited thereto. Can vary.

By the operation of the optical zoom probe 10 according to the embodiment of the present invention, it is possible to implement the OCM mode of high-resolution ultra-close proximity (the distance from the last lens to the tissue surface is approximately 2mm or less) scanning. That is, the tissue can be optically scanned with a uniform in-dimensional resolution within a section of approximately 2 mm in the depth direction at an ultra-contiguous position of about 2 mm or less. At this time, since the depth of focus can be lengthened by the filter area 45, it is not necessary to precisely move the position of the focus, and super close-up scanning can be made more easily and accurately.

As shown in FIG. 10, the opening size of the opening regulator 50 is smaller than that of FIGS. 9A and 9B (for example, A1 in FIG. 3A), and the first liquid lens 71 and the second liquid lens 75 are formed. By making the lens surface of the concave curved surface, the light can be focused at a relatively long distance from the last lens, for example, in the range of approximately 30 mm. In this case, the focusing position of the light spot may be changed by adjusting the opening size of the opening controller 50 and adjusting the curvature of the concave curved surfaces of the first and second liquid lenses 71 and 75. Even in this case, when the optical transmission unit 20 induces the deformation of the optical fiber 21 by the scanner 23 to change the optical path, scanning is performed while changing the horizontal position of the light spot within a predetermined range in the x and y planes. Can be.

 By the operation of the optical zoom probe 10 according to the embodiment of the present invention as shown in FIG. 10, it is possible to implement the OCT mode scanning in proximity (the distance from the last lens to the tissue surface is approximately 30mm or less). That is, the tissue can be optically scanned with a uniform in-dimensional resolution within a section of approximately 2 mm in the depth direction at a proximity position of about 30 mm or less.

In this way, while adjusting the aperture size of the aperture adjuster 50, the curvature direction and curvature of the lens surfaces of the first liquid lens 71 and the second liquid lens 75 are adjusted to adjust the focus adjustment unit 70. By adjusting the focal length of, the tissue can be optically scanned to a certain depth while maintaining the horizontal resolution at high resolution.

Here, at the time of ultra close scanning, at least one of the first and second liquid lenses 71 and 75 at least relatively close to the object forms a convex curved surface. The liquid lenses 71 and 75 are all described and illustrated as forming a concave curved surface, which is illustratively illustrated and illustrated, and embodiments of the present invention are not limited thereto, and various modifications and other equivalent embodiments are possible. Do.

On the other hand, the optical zoom probe 10 according to an embodiment of the present invention, to remove the noise due to the reflected light may be disposed to have a predetermined slope or anti-reflective coating of the component having a surface perpendicular to the optical path.

For example, as shown in FIG. 11, the cover glass 51 of the opening adjuster 50 or the cover glasses 77 and 79 of the focus adjusting unit 70 are inclined with respect to the optical axis by a predetermined angle θ1 (θ2). Can be arranged. 11 shows an example in which both the opening adjuster 50 and the focus adjusting unit 70 are inclined, but any one of them may be disposed inclined.

In this case, the inclined angle may be 12 degrees or less. That is, the cover glass 51 of the opening regulator 50 or the cover glasses 77 and 79 of the focus adjusting unit 70 have an inclination of about 12 degrees or less, for example, about 4 degrees or more and about 12 degrees or less with respect to the optical axis. It may be arranged to have. For example, the cover glass 51 of the opening adjuster 50 or the cover glasses 77 and 79 of the focus adjusting unit 70 may be arranged to have an inclination of about 8 degrees with respect to the optical axis.

12 schematically shows an imaging system to which an optical zoom probe is applied according to an exemplary embodiment of the present invention.

Referring to FIG. 12, the image diagnosis system 3000 may include a light source unit, an optical zoom probe 10 that scans light from the light source unit to an object S, for example, a tissue to be examined, and an image of the object from light reflected from the object. It includes a detection unit for detecting the image.

As the optical zoom probe, the optical zoom probe 10 according to the embodiment of the present invention may be employed, and according to the inspection purpose, the size of the aperture, the focal length, and the like may be appropriately adjusted. The detector may include an image sensor such as a CCD for sensing an image of the object.

Here, the image diagnosis system 3000 is a beam splitter for separating a path of light irradiated toward the object S from the light source unit and the light reflected from the object S, and an image for processing and displaying a signal detected by the detector as an image signal. It may further include a signal processor.

The image diagnosis system 3000 may be provided to scan a tissue to be examined with the optical zoom probe 10 to interfere with the light reflected from the object with the reference light to detect the signal as signal light. To this end, the optical zoom probe 10 splits the light emitted from the same light source as the light irradiated onto the object S, that is, the light emitted from the light source unit, and uses one branched light as the light irradiated to the object S and separates it. The light may be used as the reference light, and may further include an optical system for interfering the light reflected from the object S with the reference light.

In this case, when scanning the object S while moving the focal point in the ultra-close and near distance distances, that is, when the OCM mode and the OCT mode are switched, the length of the light path of the light irradiated onto the object S is changed. The path length should also be changed accordingly.

13 through 15 show schematically various optical systems 500, 600, 700 that can be applied to match the optical path length of the reference light when used in the OCM mode and the OCT mode.

13 and 14 show an example in which the optical system 500 or 600 is provided to use the coupler 510 and 610 to propagate reference light according to modes with different lengths of optical fibers.

Referring to FIG. 13, one end of the coupler 510 is provided with one optical fiber 520, and the other end is provided with a structure in which two optical fibers 530 and 540 having different lengths are combined. Collimating the reference light output from the optical fiber 530, 540 at the input / output terminal of the optical fiber (530, 540), focusing the reference light reflected from the reflection mirror 560 to input to the optical fiber (530, 540) The collimating lens 535 and 545 may be provided. A shutter 550 may be provided between the optical fibers 530 and 540 and the reflective mirror 560.

For example, when the optical path length of the reference light is to be relatively long, the shutter 550 passes the reference light output from the long optical fiber 530, and the reference light output from the short optical fiber 540 is It can be operated so as not to pass. The reference light output from the optical fiber 530 and passed through the shutter 550 is reflected by the reflective mirror 560, and then passes through the shutter 550 to be input to the optical fiber 530.

In addition, when the optical path length of the reference light is relatively short, the shutter 550 passes the reference light output from the shorter optical fiber 540 and does not pass the reference light output from the long optical fiber 530. Can be operated so as not to. The reference light output from the optical fiber 540 and passed through the shutter 550 is reflected by the reflective mirror 560, and then passes through the shutter 550 to be input to the optical fiber 540.

Referring to FIG. 14, one end of the coupler 610 is provided with a structure in which one optical fiber 620 and the other end are combined with two optical fibers 630 and 640 having different lengths. The input / output terminals 630a and 640a of the optical fibers 630 and 640 reflect the reference light output from the optical fibers 630 and 640 as they are, so that the optical fibers 630 and 640 are moved in the opposite direction again. The reflective coating may be performed using a reflective material such as the like. It may be provided to selectively block the light passing through the two optical fibers (630, 640) of different lengths by the action of an external force in accordance with the application of a voltage.

15 shows that the optical system 700 uses the optical switch 710 to advance the reference light from one set of optical fibers 720 to one of the optical fibers 730 and 740 of different lengths, depending on the mode. An example is provided. The input / output terminals 730a and 740a of the optical fibers 730 and 740 reflect the reference light output from the optical fibers 730 and 740 as they are so that the optical fibers 730 and 740 proceed in the opposite direction again. Reflective coating may be used using a reflecting material such as.

10 ... optical zoom probe 20 ... optical transmitter
21 ... optical fiber 23 ... scanner
30 ... First lens unit 40 ... Filter unit
41 ... center area 45 ... filter area
50,101,102 ... opening adjuster 60 ... second lens unit
70 ... Focus adjustment unit 71,75 ... First and second liquid lenses
80 ... lens

Claims (23)

An opening adjuster for adjusting an opening through which the light transmitted from the light transmitting unit passes;
A focus adjusting unit focusing the light passing through the opening and adjusting the focal length to a super near position of 2 mm or less and a proximity position within 2 mm to 30 mm;
And a filter unit including a center region through which incident light passes without change, and a filter region positioned to surround the center region and configured to enlarge a depth of focus of the light focused to the super-proximity position.
The aperture adjuster increases the size of the beam incident to the focus adjusting unit when the focal length is in the super near position, reduces the size of the incident beam when the focal length is in the proximal position,
The central area of the filter part has a radius size of 0.2 to 0.5 times the opening radius of the opening regulator in the super close mode in which the focal length is adjusted to the super close position, and the minimum diameter of the center area is the focal length of the filter. Including the aperture diameter of the aperture adjuster in the proximity mode to be adjusted to the proximity position, so that the depth of focus of the light focused in the super-adjacent position of 2 mm or less in the super-close mode to increase the focus depth so that the precise movement of the focus position is unnecessary ,
And the center area is adjusted to a relatively small size by the aperture adjuster in proximity mode so as to be equal to or larger than the size of an incident light beam. The optical zoom probe of claim 1, wherein the minimum radius size of the filter area is equal to or greater than the opening radius of the opening regulator in proximity mode. The method of claim 1, wherein the filter region is formed in a ring structure,
And the center area is an opening or a transparent flat plate structure. The method of claim 1, wherein the filter region is

The optical zoom probe is formed as a cubic filter satisfying the equation, wherein α value is 0.0001 ~ 0.02, β value is 2.6 ~ 3.1. The method of claim 1, wherein the filter region is

And a cubic pedal filter that satisfies the equation, wherein α is -0.005 to 0.005 and β is -0.015 to 0.015. The optical zoom probe according to claim 1, wherein the filter part is provided as the phase filter on the traveling path of parallel light before or after the opening adjuster. The optical zoom probe of claim 1, wherein the filter part is formed in an aspheric shape or in a hybrid type on the last lens surface through which the parallel light passing through the aperture adjuster travels. The optical zoom probe of claim 1, further comprising an aspherical lens having a positive power between the focusing unit and the object. The apparatus of claim 1, wherein the focus adjusting unit comprises first and second liquid lenses whose curvatures are independently controlled from each other,
The first and second liquid lenses,
And the first and second liquid lenses are driven to have a concave lens surface in the proximity mode, and the at least one liquid lens is driven to have a convex lens surface in the super close mode. 10. The optical zoom probe of claim 9, wherein, in the super close-up mode, the liquid lens close to the object among the first and second liquid lenses is driven to have a convex lens surface. The method of claim 9, wherein at least one of the first and second liquid lenses further comprises a transparent film having a curved surface,
The optical zoom probe in which the curved surface of the transparent film acts as the lens surface in the proximity mode, and the curved surface of the transparent film does not act as the lens surface in the super near mode. The method of claim 9, wherein each of the first and second liquid lenses,
The lens surface is formed by the fluid surface, and the focal length is adjusted by adjusting the shape of the lens surface by using the fluid flow.
Fluid movement of the first and second liquid lenses are in the opposite direction to each other. The method of claim 12, wherein the fluid flow occurs according to an electrowetting method,
At least one of the first and second liquid lenses,
A first fluid which is translucent;
A second fluid having a property of not being mixed with the first fluid and being transparent;
A chamber having an interior space accommodating the first fluid and the second fluid;
A first surface constituting the lens surface as an interface between the first fluid and the second fluid;
A second surface inducing a curvature change of the lens surface to an interface between the first fluid and the second fluid;
A first intermediate plate provided in the chamber and having a first through hole having a diameter corresponding to the lens surface and a second through hole forming a passage of the second fluid;
And an electrode unit for forming an electric field for changing the position of the second surface. The optical zoom probe of claim 13, wherein the first fluid is a polar liquid and the second fluid is a gas or a nonpolar liquid. 13. The optical zoom probe of claim 12 wherein the fluid flow is pressured. The display apparatus of claim 1, further comprising: a first lens unit collimating the light transmitted from the light transmitting unit to be transmitted to the opening regulator; And
A second lens unit disposed between the aperture adjuster and the focus adjustment unit; The optical zoom probe further comprises at least one of. The optical zoom probe of claim 16, wherein the filter unit is formed in an aspheric shape or in a hybrid type on the last lens surface through which parallel light of the second lens unit travels. The method of claim 1, wherein the opening regulator,
Liquid aperture optical zoom probe with microscopic electrofluidic aperture size adjustment. The method of claim 18, wherein the opening regulator,
A chamber constituting a space in which the fluid flows;
A first fluid and a second fluid provided in the chamber and having a property of not being mixed with each other, one of which is light-transmissive and the other that is light-shielding or light-absorbing;
An electrode part provided on an inner side of the chamber and having one or more electrodes arranged thereon to which a voltage is applied to form an electric field in the chamber;
And an opening through which light is transmitted by changing a position of an interface between the first fluid and the second fluid according to an electric field. 20. The optical zoom probe of claim 19, wherein either the first fluid or the second fluid is a liquid metal or a polar liquid and the other is a gas or a nonpolar liquid. 20. The optical zoom probe according to claim 19, wherein the filter portion is formed as a phase filter on the output side of the opening regulator. The optical zoom probe of claim 1, wherein the optical transmitter comprises an optical fiber. A light source unit;
Claim 1 to 22 of any one of the optical zoom probe for irradiating the object to be inspected light from the light source unit;
And a detector configured to detect an image of the object from the light reflected from the object.

Images