KR102022767B1 - Controled Flow Velocity for Chemical Liquid Supply Control Device - Google Patents

Abstract

The present invention relates to a chemical liquid supply amount adjusting device for adjusting the flow rate, the chemical liquid supply amount adjusting device, comprising: an adjusting unit for adjusting the supply amount of the chemical liquid by a rotation operation; A chemical liquid control unit including an operation plate coupled to the control unit, and a supply amount control unit integrally formed at a lower portion of the operation plate and having a plurality of chemical liquid inlet holes formed along the outer circumferential surface to be spaced apart at regular intervals; The chemical liquid control unit is configured to be rotatably coupled to the rotating shaft, the chemical liquid inlet hole, a plurality of chemical liquid supply pipe for supplying a chemical liquid injected in different amounts of chemical liquid in a plurality of positions, and is configured on the lower inner peripheral surface, A chemical liquid supplying part including a chemical liquid moving hole for unidirectionally moving the chemical liquid introduced through the chemical liquid inlet hole and a chemical liquid discharge port connected to the chemical liquid moving hole to discharge the chemical liquid; And the chemical liquid is disposed on one side to supply the chemical liquid to the chemical liquid supply part, and the chemical liquid is supplied to supply different chemical liquids at each position in a branched state so that the chemical liquid is injected into each of the chemical liquid inlet holes formed in a plurality of positions. A plurality of flow paths having a predetermined width according to the inner diameter to be passed are stacked and arranged in a longitudinal direction so as to have a length determined according to a flow rate controlled in a zigzag shape, and both ends of the width direction are alternately connected to one flow path to pass the chemical liquid. It includes; and a flow rate control injection unit for adjusting the flow rate respectively.

Description

Controlled Flow Velocity for Chemical Liquid Supply Control Device

The present invention relates to a chemical liquid supply amount adjusting device for adjusting the flow rate, and more particularly, by improving the structure for adjusting the supply amount of the chemical liquid in accordance with the operation of the control unit different from each other by the control of the flow rate in a plurality of positions in accordance with the operation of the control unit The supply of chemical liquid amount can be adjusted by selectively combining each other chemical liquid amount by rotating the position supplied as chemical liquid amount, thereby improving the supply amount adjusting efficiency, and manufacturing the chemical liquid supply amount adjusting device as configured by a simple rotation coupling. The present invention relates to a chemical liquid supply control device in which a flow rate is easily controlled for mass production because the cost can be significantly reduced.

In general, the patient has a reduced ability to ingest and digest food by ingesting the stomach, thereby injecting necessary nutrients such as glucose into the blood vessels of the patient. In addition, various drugs such as anticancer drugs, antibiotics, painkillers, etc. for the treatment of diseases are also injected into the blood vessels of the patient. At this time, it is important that the nutrients or medicines injected into the blood vessels of the patient are constantly injected with the correct amount necessary according to the condition of the patient.

To this end, a microfluidic supply control device such as an infusion pump has been developed and used, but it is expensive and has a rechargeable electric device, which may cause malfunction, and due to its volume and weight, There are many difficulties.

On the other hand, Patent Publication No. 10-0468222 discloses a technology that can replace the infusion pump as a low-cost consumables, but this is a method of adjusting the amount of the chemical liquid by gradually changing the length, width or depth of the flow passage Subsequently, it is difficult to know the exact change of the chemical amount according to the change of the flow path. Even if the scale is displayed using the data obtained through the experiment and the experiment, the accuracy is lowered.

Accordingly, the present applicant, as shown in Figure 1, the lower case 10, three chemical liquid inlet holes (21, 22, 23) and the chemical liquid inlet holes (21, 22, 23) into which the different amount of chemical liquid is introduced The fixed member 20 including the chemical liquid discharge hole 24 for discharging the incoming chemical liquid, the first leakage preventing member 30 and the fixing member 20 are combined with the chemical liquid inlet hole 21 according to a user operation. The chemical liquid control member 40, the second leakage preventing member 50, the cover 60, the upper case 70, and the adjusting member 80 which selectively open 22 and 23 to guide the chemical liquid discharge hole 24 are opened. It is configured to include).

However, according to the above-described prior art, there is a problem in that mass production is difficult at low cost as the manufacturing cost increases due to the complicated structure and coupling relationship between the fixing member 20 and the chemical liquid control member 40.

In addition, since the precise control of the plurality of inflow holes and flow paths formed in the fixing member 20 and the chemical liquid control member 40 is not easy, there is a problem that precise quantitative supply control of the chemical liquid is difficult.

In addition, the flow rate control unit is connected to the three chemical liquid inlet holes (21, 22, 23) into which the different chemical liquid amount is introduced to form a capillary tube of a fine inner diameter in a position at which the chemical liquid is passed to a predetermined flow rate so that the chemical liquid is a capillary tube It is installed to be supplied with the flow rate adjusted while passing through.

Such, the flow rate control unit is to adjust the flow rate while the chemical liquid passes through a plurality of fine capillaries, the capillary tube length is determined according to the degree of control of the flow rate to increase the straightness so that the flow rate does not change the hole of the fine size to control the flow rate As it is to be processed so that the processing is difficult, there is a problem in that there is a limit in reducing the flow rate because there is a limit in the length of the processing of the fine holes.

In addition, when the temperature change and the injection time become longer due to the characteristics of the chemical liquid, particles that are foreign substances from the reacting chemicals are generated inside the apparatus, and the generated particles are blocked by a capillary tube having a fine inner diameter. There was a problem that should be replaced while checking as often as the supply of the chemical solution is stopped.

The present invention has been made to solve the above-mentioned problems, an object of the present invention is a through-hole communicating with the chemical solution supply unit is provided to differently inject the supply amount of the chemical solution at a plurality of different positions to the chemical liquid control unit coupled to the control unit By differently combining the positions of the chemical liquid control unit is rotated together by the rotation of the injection unit can be adjusted in a plurality of stages so that the supply amount of different chemical liquids are supplied according to the combined pore position improves the supply amount adjustment efficiency, simple rotation It is possible to significantly reduce the manufacturing cost of the chemical liquid supply control device as configured by the combination to provide a chemical liquid supply control device that is easy to adjust the flow rate for mass production.

The objects of the present invention are not limited to the above-mentioned objects, and other objects that are not mentioned will be clearly understood from the following description.

In order to achieve the above object, the present invention provides a chemical liquid supply amount adjusting apparatus according to an embodiment of the present invention, the chemical liquid supply amount adjusting apparatus, comprising: an adjusting unit for adjusting the supply amount of the chemical liquid by a rotation operation; A chemical liquid control unit including an operation plate coupled to the control unit, and a supply amount control unit integrally formed at a lower portion of the operation plate and having a plurality of chemical liquid inlet holes formed along the outer circumferential surface to be spaced apart at regular intervals; The chemical liquid control unit is configured to be rotatably coupled to the rotating shaft, the chemical liquid inlet hole, a plurality of chemical liquid supply pipe for supplying a chemical liquid injected in different amounts of chemical liquid in a plurality of positions, and is configured on the lower inner peripheral surface, A chemical liquid supplying part including a chemical liquid moving hole for unidirectionally moving the chemical liquid introduced through the chemical liquid inlet hole and a chemical liquid discharge port connected to the chemical liquid moving hole to discharge the chemical liquid; A chemical liquid injection part connected to supply the chemical liquid of the chemical liquid supply part and branched to inject the chemical liquid into each of the chemical liquid inlet holes formed at a plurality of positions to inject the chemical liquid into each of the chemical liquid inlet holes; And are disposed at respective branched positions of the chemical liquid injecting unit, and are provided at a plurality of positions branched from the chemical liquid injecting unit and supplied to the chemical liquid supplying unit, so that the chemical liquid passes in order to supply different amount of chemical liquid for each of the plurality of positions. A plurality of flow paths having a predetermined width according to the inner diameter to be laminated are arranged in a longitudinal direction so as to have a length determined according to a flow rate adjusted in a zigzag shape, and both ends of the width direction are alternately connected to one flow path to allow the chemical liquid to pass. It includes; a flow rate control unit for adjusting the flow rate respectively.

In addition, the operation plate may be adjusted in one step to eight steps by supplying the chemical liquid by rotating the supply amount control unit according to the rotation operation amount of the control unit.

In addition, the supply regulator is formed in the form of a polygonal shape consisting of 1 to 8 zones so that the outer surface forms a circular shape, the inner surface is the same area, the chemical liquid inlet hole is a constant interval in 2 to 8 zones It may be configured to at least one or more than three to maintain.

In addition, the inner side of the supply amount regulator may be further configured with a chemical liquid discharge groove which is connected to the chemical liquid inlet hole to discharge the introduced chemical liquid to the chemical liquid supply side.

In addition, the supply amount adjusting body further comprises an insertion groove into which the rotary shaft of the chemical liquid supply unit is inserted, and is in close contact with the inner circumferential surface of the rotary shaft, and further comprising a support shaft to allow the chemical liquid control unit to be rotatably coupled to the chemical liquid supply unit. Flow rate can be adjusted.

In addition, the chemical liquid supply pipe is composed of first to third chemical liquid supply pipe to be configured to communicate with the chemical liquid inlet hole, it may be configured in each of the compartments of the supply amount regulator.

The chemical liquid movement hole may be inclined to form a predetermined angle from the chemical liquid supply pipe side toward the chemical liquid discharge port side.

In addition, the flow rate control injection portion is connected to be injected into the chemical liquid supply, the injection supply pipe of the tubular form connected to the position where the chemical liquid is supplied to be injected into the chemical liquid supply; It is disposed between the injection supply pipe and the plurality of chemical liquid supply pipe, the chemical liquid is connected to the injection supply pipe branched to a position to be supplied to the plurality of chemical liquid supply pipe to supply the chemical liquid of different flow rate for each branched position A flow rate adjusting body in which a flow path whose length is adjusted in a zigzag shape is formed therein; And a flow rate control body and a plurality of the chemical solution supply pipes, respectively, branched according to the positions of the plurality of the chemical solution supply pipes in the flow rate control body, and the chemical liquids installed to be injected at different flow rates, respectively. It may include an injection tube.

In addition, an injection branch flow path formed in the form of a flow path in which one side is connected to the injection supply pipe inside the flow rate control body and branches the chemical liquid supplied to the other side in three directions; Control of the flow rate of the chemical liquid supplied to one side is connected to the chemical liquid injection pipe on one side of the flow direction control body is connected to the one side in one direction of the three branches branched into the injection branch flow path in the center in one direction A first flow rate adjusting passage formed in the form of a zigzag flow passage to adjust the supply amount of the furnace; One side of the flow rate control body is connected so that one side is supplied with the chemical liquid in the other direction except the one connected to the first flow rate control passage in the three directions branched into the injection branch flow passage in one direction in the center, and the chemical liquid injection to the other side A second flow rate control flow passage formed in the form of a zigzag flow path to control the supply amount by controlling the flow rate of the chemical liquid supplied to the pipe; And a flow rate of the chemical liquid supplied to the other side of the flow rate control body so that one side is supplied with the chemical liquid in one of the three directions branched into the injection branch flow passage in one direction at the center, and connected to the chemical liquid injection pipe to the other side. A third flow rate control passage formed in the form of a zigzag flow path to adjust the supply amount by adjusting the, including the first flow rate control flow path, the second flow rate control flow path, and the third flow rate control flow path zigzag-shaped flow path Formed to different lengths in the form can be supplied to the chemical liquid in which the flow rate is adjusted to each of the chemical liquid injection pipe at different flow rates.

The first flow rate control flow passage may include: a first inflow flow passage connected to one of three directions branched from the injection branch flow passage, the first inflow flow passage configured to temporarily store the chemical liquid supplied through the injection branch flow passage; A first inflow protrusion protruding inside the first inflow passage, each of which is disposed at a plurality of positions spaced apart from each other at a predetermined interval, to which particles of foreign matter of the inflowed chemical are caught, and protruded to pass through the chemical; A plurality of flow paths having a predetermined width according to the inner diameter through which the chemical liquid passes to the other side of the first inflow path are stacked and disposed so as to have a length determined according to the flow rate adjusted in a zigzag shape in the longitudinal direction, and both ends of the width direction are alternately arranged. A first control flow passage connected to one flow path and configured to control the flow rate while the chemical liquid passes through the flow path; A first outflow passage connected to the other side of the first control passage, one side of which is connected to the first control passage, and the other side connected to the chemical injection tube, the outlet being formed to be temporarily stored so that the chemical liquid is temporarily stored; And a first outflow protrusion protruding inside the first outflow passage and disposed at a plurality of locations spaced apart from each other at predetermined intervals to catch particles, which are foreign matters of the inflowing chemical liquid, and protruding the chemical liquid to pass therethrough. have.

The second flow rate control flow passage is connected to the other direction except one connected to the first flow rate control flow passage among the three branched directions of the injection branch flow passage, and a position at which the chemical liquid supplied through the injection branch flow passage flows. A second inflow passage configured to temporarily store in the air; A second inflow protrusion which protrudes inside the second inflow passage and is disposed at a plurality of positions spaced apart from each other at predetermined intervals to catch particles, which are foreign matters of the introduced chemical liquid, and protrude so that the chemical liquid passes through the second inflow passage; A plurality of flow paths having a predetermined width according to the inner diameter through which the chemical liquid passes to the other side of the second inflow path are arranged in a plurality of layers so as to have a length determined according to the flow rate adjusted in a zigzag shape in the longitudinal direction, and both ends of the width direction are alternately arranged. A second control passage formed to connect the one passage to adjust the flow rate while the chemical liquid passes; A second outflow passage connected to the other side of the second control passage, one side of which is connected to the second control passage, and the other side of the second control passage connected to the chemical injecting tube to be discharged to temporarily store the chemical liquid; And a second outflow protrusion protruding inside the second outflow passage and disposed at a plurality of locations spaced apart from each other at predetermined intervals to catch particles, which are foreign matters of the inflowing chemical liquid, and protruding the chemical liquid to pass therethrough. have.

In addition, the third flow rate control flow passage is connected to the other one of the branched three directions of the injection branch flow path, the third inflow is formed to be temporarily stored in the position where the chemical liquid supplied through the injection branch flow path Euro; A third inflow protrusion which protrudes inside the third inflow passage and is disposed at a plurality of locations spaced apart from each other at predetermined intervals to catch particles, which are foreign matters of the introduced chemical liquid, and protrude so that the chemical liquid passes through the third inflow passage; A plurality of flow paths having a predetermined width according to the inner diameter through which the chemical liquid passes to the other side of the third inflow passage are stacked and arranged in a plurality of lengths so as to have a length determined according to the flow rate adjusted in a zigzag shape in the longitudinal direction, and both ends of the width direction are alternately arranged. A third control passage connected to one flow passage so as to adjust the flow rate while the chemical liquid passes; A third outflow passage connected to the other side of the third control passage, one side of which is connected to the second control passage, and the other side of the third control passage connected to the chemical injecting tube to be discharged to temporarily store the chemical liquid; And a third outflow protrusion protruding inside the third outflow passage and disposed at a plurality of positions spaced apart from each other at predetermined intervals to catch particles, which are foreign matters of the inflowing chemical liquid, and protruding the chemical liquid to pass therethrough. have.

In addition, the chemical liquid injection tube is composed of a first chemical liquid injection tube, a second chemical liquid injection tube, and a third chemical liquid injection tube divided into three parts to connect the plurality of the chemical liquid supply pipe and the flow rate control body, the flow rate control The body may be provided so that the chemical liquid is supplied at different feed rates by adjusting at different flow rates.

Specific details for achieving the above object will be apparent with reference to the embodiments described below in detail with the accompanying drawings.

However, the present invention is not limited to the embodiments disclosed below, but may be configured in different forms, and the present embodiments are intended to complete the disclosure of the present invention and to provide general knowledge in the technical field to which the present invention belongs. It is provided to fully inform those who have the scope of the invention.

According to one of the problem solving means of the present invention described above, the chemical liquid supply amount adjusting device according to the embodiment of the present invention is controlled to supply the amount of chemical liquid different from the plurality of different positions in the chemical liquid control unit coupled to the control unit By varying the positions of the through-holes communicated with the chemical liquid supply unit provided to be injected, the supply amount can be adjusted in a plurality of stages such that the supply of different chemical liquids is supplied according to the combined through position by rotating the chemical-control unit together with the rotation of the injection unit. This provides the effect of improving the supply regulation efficiency.

In addition, the chemical liquid supply amount adjusting device according to an embodiment of the present invention is manufactured so that the chemical liquid control unit and the chemical liquid supply unit is configured by a simple rotational combination can significantly reduce the manufacturing cost and easy effect on mass production To provide.

In addition, the chemical liquid supply amount adjusting device according to the embodiment of the present invention can adjust the supply amount of the chemical liquid by the rotational operation of the chemical liquid control unit to the first to eight stages as well as to control the precise amount of chemical liquid supply, The effect of precise control of the supply amount is provided.

In addition, the chemical liquid supply amount adjusting device according to an embodiment of the present invention is installed at positions supplied at different flow rates so that the chemical liquid is selectively supplied by rotation control, the flow rate control unit is extended to the maximum movement length per unit area The zigzag shape is connected to the mutually alternating positions on both sides and is provided in the form of a single flow path so that the moving distance of the flow path can be increased to the minimum area even when the diameter of the flow path is enlarged. Minimizes the shape of the jam by providing the effect of improving the flow rate control efficiency.

In addition, the chemical liquid supply amount adjusting device according to the embodiment of the present invention is adjusted to a different flow rate of the chemical liquid supply portion while adjusting the flow rate of the chemical liquid supplied to the length in consideration of the size of the inner diameter of the flow path according to the flow rate of the chemical liquid is adjusted The length is increased according to the quantity wound in a zigzag form according to the determined length, and the ratio of the increase in the installation area decreases as the length is increased as the length is increased by overlapping with each other by the size of the inner diameter. Therefore, the length of the flow path can be extended in a small area, thereby providing an effect of reducing the installation area and miniaturization.

In addition, the chemical liquid supply amount adjusting device according to the embodiment of the present invention is controlled to the flow rate control injection portion is supplied to the chemical liquid while being controlled at different flow rate to the chemical liquid supply unit to increase the moving length of the chemical liquid in a small area in the position where the chemical liquid is supplied The diameter of the flow path can be enlarged, and a plurality of protrusion-like protrusions spaced at predetermined intervals are formed in the enlarged flow path, so that the chemical liquid is separated between the other protrusions while particles generated in the chemical liquid are caught between the protrusions. As the chemical liquid can be supplied through the particles through the particles, the shape of the particles is minimized, thereby providing an effect of improving the flow rate control efficiency.

1 is a perspective view showing a chemical liquid supply amount adjusting apparatus according to the prior art.
Figure 2 is a perspective view showing a chemical liquid supply amount adjusting device for adjusting the flow rate according to an embodiment of the present invention.
3 is a front view illustrating a chemical liquid supply amount adjusting device of which the flow rate of FIG. 2 is adjusted.
Figure 4 is a side view showing a chemical liquid supply amount adjusting device of the flow rate of FIG.
FIG. 5 is an exploded perspective view illustrating a chemical liquid control unit and a chemical liquid supply unit, which are main components of the chemical liquid supply amount adjusting device of FIG. 2.
FIG. 6 is a cross-sectional view illustrating a chemical liquid control unit and a chemical liquid supply unit which are main components of the chemical liquid supply amount adjusting device of FIG. 2.
FIG. 7 is an enlarged view of a part of a chemical liquid controller and a chemical liquid supplier, which are main components of the chemical liquid supply amount adjusting device of FIG. 6.
FIG. 8 is a cross-sectional view illustrating a first chemical inflow hole of the chemical liquid control unit in a combined state of the chemical liquid control unit and the chemical liquid supply unit, which is a main configuration of the chemical liquid supply amount adjusting device of FIG. 2.
FIG. 9 is a cross-sectional view illustrating a second chemical liquid inflow hole of the chemical liquid control unit in a combined state of the chemical liquid control unit and the chemical liquid supply unit, which is a main component of the chemical liquid supply amount adjusting device of FIG. 2.
FIG. 10 is a cross-sectional view illustrating a third chemical liquid inflow hole of the chemical liquid control unit in a combined state of the chemical liquid control unit and the chemical liquid supply unit, which is a main configuration of the chemical liquid supply amount adjusting device of FIG. 2.
FIG. 11 is an exploded view illustrating an operation principle of a supply regulator of a chemical liquid controller, which is a main component of the chemical liquid supply amount regulating device of FIG. 2.
12 and 13 are exploded views illustrating the operating principle of adjusting the supply amount of the chemical liquid by the rotational operation of the supply regulator of the chemical liquid control unit, which is the main configuration of the chemical liquid supply amount adjusting device for adjusting the flow rate.
FIG. 14 is an enlarged front view of a partially cutaway view illustrating a flow rate control injecting unit, which is a main configuration of the chemical liquid supply amount adjusting device of FIG. 2.

The present invention may be variously modified and have various embodiments, and specific embodiments will be illustrated in the drawings and described in detail with reference to the accompanying drawings. However, this is not intended to limit the present invention to specific embodiments, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention.

In the following description of the present invention, if it is determined that the detailed description of the related known technology may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted. In addition, numerals (eg, first, second, etc.) used in the description process of the present specification are merely identification symbols for distinguishing one component from another component.

In addition, in the present specification, when one component is referred to as "connected" or "connected" with another component, the one component may be directly connected or directly connected to the other component, but in particular It is to be understood that, unless there is an opposite substrate, it may be connected or connected via another component in the middle.

The suffixes "module" and "unit" for components used in the following description are given or used in consideration of ease of specification, and do not have distinct meanings or roles from each other. In addition, in order to clearly describe the present invention, parts irrelevant to the description are omitted in the drawings, and the width, length, thickness, etc. of the components in the drawings may be exaggerated for convenience. Like reference numerals denote like elements throughout the specification.

Hereinafter, with reference to the accompanying drawings will be described in detail for the practice of the present invention.

Figure 2 is a perspective view showing a chemical liquid supply amount adjusting device for adjusting the flow rate according to an embodiment of the present invention, Figure 3 is a front view showing a chemical liquid supply amount adjusting device for adjusting the flow rate of Figure 2, Figure 4 is a flow rate of Figure 2 This is a side view showing a chemical liquid supply amount adjusting device, Figure 5 is an exploded perspective view showing a chemical liquid control unit and a chemical liquid supply unit which is the main configuration of the chemical liquid supply amount adjusting device of Figure 2, Figure 6 is a flow rate of FIG. A combined sectional view showing a chemical liquid control unit and a chemical liquid supply unit, which are main components of the chemical liquid supply adjusting device, and FIG. 7 is an enlarged part of the chemical liquid control unit and a chemical liquid supply unit, which are main components of the chemical liquid supply control unit of FIG. 8 is an enlarged view, and FIG. 8 is a chemical liquid tank in a state in which a chemical liquid control unit and a chemical liquid supply unit, which are main components of the chemical liquid supply amount adjusting device of FIG. 9 is a cross-sectional view showing a first chemical liquid inlet hole of a cutout, and FIG. 9 illustrates a second chemical liquid inlet hole of a chemical liquid control unit in a state in which a chemical liquid control unit and a chemical liquid supply unit, which are main components of the chemical liquid supply amount adjusting device of FIG. Figure 10 is a cross-sectional view, Figure 10 is a cross-sectional view showing a third chemical liquid inlet hole of the chemical liquid control unit in the state combined with the chemical liquid control unit and the chemical liquid supply unit of the main configuration of the chemical liquid supply amount control device of the flow rate of Figure 2, Figure 11 2 is an exploded view illustrating the operation principle of the supply regulator of the chemical liquid control unit which is the main configuration of the chemical liquid supply amount adjusting device of which the flow rate is controlled, and FIGS. 12 and 13 are chemical liquid adjusting units that are the main components of the chemical liquid supply adjusting device whose flow rate is adjusted. It is an exploded view for explaining the principle of operation of adjusting the supply amount of the chemical liquid by the rotation operation of the supply regulator, Figure 14 is a chemical liquid supply amount control cabinet in which the flow rate of FIG. A front view of a part section enlarged view showing the main configuration of a flow rate controlled infusion section.

2 to 14, the chemical liquid supply amount adjusting device 100 in which the flow rate is adjusted according to an embodiment of the present invention is a device for adjusting the supply amount of the chemical liquid supplied to the patient by a rotation operation of the user.

As shown, the chemical liquid supply amount adjusting device 100 of the flow rate of the present invention is installed in the means (not shown) for supplying the chemical liquid to the patient adjusting unit 110 for adjusting the supply amount by the rotation operation of the user , A chemical liquid control unit 120, a chemical liquid supply unit 130, and a flow rate control injection unit 140.

The adjusting unit 110 is a knob for adjusting the supply amount of the chemical liquid by rotating in the center of the chemical liquid control unit 120, and the chemical liquid supply unit 130 is installed inside the housing 111 installed in the means for supplying the chemical liquid The control case 112 is supported, the rotation control member 113 of the form is installed.

The chemical liquid control unit 120 is coupled to rotate together to adjust the amount of the chemical liquid supplied by the rotation of the rotation control unit 113 described above, the flow rate is adjusted by the flow rate control injection unit 140 to each other at different positions The position of the chemical liquid supply unit 130 having a plurality of chemical liquid supply pipes 135 supplied with different chemical liquid amounts is controlled by the rotation of the chemical liquid control unit 120 to adjust the amount of the chemical liquid supplied in a plurality of stages. It is provided.

The chemical liquid control unit 120 is integrally formed at the lower portion of the operation plate 121 and the operation plate 121 in which a rotation operation groove 121a is formed so as to be rotatably coupled with the rotation control body 113 on the front surface. It is configured to form a circular shape, it consists of a supply amount adjusting body 122 is formed with a plurality of chemical liquid inlet hole 123 is configured to be spaced apart at regular intervals along the outer circumferential surface.

Here, the operation plate 121 is composed of a circular panel is coupled to the rotation control unit 113 is rotated the supply amount control unit 122 according to the rotation operation amount of the rotation control unit 113 to supply the amount of the chemical liquid in one step It is a component that can be adjusted to eight steps.

The supply amount adjusting body 122 is to supply a fixed amount of the chemical liquid which is inserted into the chemical liquid supply unit 130, and the chemical liquid supply pipe 135 configured in the chemical liquid supply unit 130 according to the rotation amount of the operation plate 121. ) Is formed in plural chemical liquid inlet hole 123 in which a predetermined amount of chemical liquid is introduced.

One to three chemical liquid inlet holes 123 are formed at the same interval in the axial direction of the feed amount regulator 122, and a plurality of chemical liquid inlet holes 123 are formed at the same interval along the outer circumferential surface of the feed amount regulator 122.

That is, as shown in Figure 11, the chemical liquid inlet hole 123 of the present invention is divided into 1 to 8 zones so that the supply amount regulator 122 to have the same area, 2 to 8 of each zone The first to third chemical liquid inlet holes (123a, 123b, 123c) to be configured so that at least one or more than three so as to maintain a constant interval.

In other words, the plurality of chemical liquid inlet holes 123 of the supply regulator 122 of the present invention are formed with first and third chemical liquid inlet holes 123a and 123c in two zones, and the second and second chemical liquid inlet holes 123c in three zones. Third chemical liquid inflow holes 123b and 123c and the first to third chemical liquid inflow holes 123a, 123b and 123c are formed in the fourth region, and the third chemical liquid inflow holes 1 are respectively formed in the fifth, sixth and seventh regions. ), Only the first chemical liquid inlet hole 123a and the second chemical liquid inlet hole 123b are formed, and only the first and second chemical liquid inlet holes 123a and 123b are formed in the eighth zone.

The supply amount regulator 122 communicates with the chemical liquid inlet hole 123 on the inner surface thereof, and is connected to any one of the first to third chemical liquid inlet holes 123a, 123b, and 123c of the chemical liquid inlet hole 123. A chemical liquid discharge groove 124 for discharging the chemical liquid supplied from the supply pipe 135 to the chemical liquid movement hole 136 side of the chemical liquid supply unit 130 to be described later is formed.

In addition, the supply regulator 122 of the present invention may be formed in the form of a polygonal inner surface, it is preferably formed in the shape of an octagon corresponding to each partitioned area.

Here, the chemical liquid discharge groove 124 is all formed in each of the compartments of the supply regulator 122, it is preferable that the chemical liquid inlet hole 123 formed in each of the same number is formed.

In addition, the supply amount adjusting body 122 of the present invention is in close contact with the inner circumferential surface of the insertion groove 132 is inserted into the rotary shaft 131 configured in the chemical liquid supply unit 130 into the chemical liquid discharge groove 124, the rotary shaft 131. It is configured to, the chemical liquid control unit 120 is formed to support the shaft 125 to be rotatably coupled with the chemical liquid supply unit 130.

Here, the inner circumference of the support shaft 125 may be configured in such a way that one surface is open and coupled with the housing 111 together with the chemical liquid supply unit 130.

That is, the supply amount adjusting body 122 of the present invention is inserted into the insertion groove 132 formed between the chemical liquid discharge groove 124 and the support shaft 125, the rotary shaft 131 of the chemical liquid supply unit 130, the rotation regulator When the supply amount adjusting body 122 rotates about the rotation shaft 131 during the rotation operation of the 113, any one of the plurality of chemical liquid inlet holes 123 and one of the plurality of chemical liquid supply pipes 135 communicate with each other. It is configured to be injected while the flow rate is adjusted in the flow rate control injection unit 140 is configured to be a quantitative supply of the chemical liquid.

On the other hand, the chemical liquid supply unit 130 of the present invention is fixed to the housing 111, the flow rate is controlled while adjusting the flow rate in the injection unit 140 is connected to the chemical liquid supply pipe 135 for supplying a predetermined amount of the chemical liquid at a predetermined interval along the outer peripheral surface A plurality of spaced apart, the inner circumferential surface is a rotating shaft 131 protrudes so that the chemical liquid control unit 120 is rotatably coupled.

Here, the chemical liquid supply pipe 135 is formed on one side of the outer circumferential surface of the chemical liquid supply unit 130, and is composed of the first to third chemical liquid supply pipes (123a, 123b, 123c) to be in communication with the chemical liquid inlet hole 123, Each of the compartments of the feed regulator 122 is configured.

For example, a third chemical liquid supply pipe 135c is formed in one zone of each of the sections of the supply regulator 122, a second chemical liquid supply pipe 135b is formed in the second zone, and a first chemical liquid supply pipe 135a is located in the third zone. Each of these arrangements may be configured.

In addition, the present invention is preferably configured to allow easier control of the amount of the chemical liquid supply by varying the amount of the chemical liquid injected through each chemical liquid supply pipe 135.

That is, the reference chemical liquid amount is injected into the first chemical liquid supply pipe 135a through which the flow rate is controlled by the flow rate control injection unit 140 and the chemical liquid is injected, and the chemical liquid amount twice the standard chemical liquid amount is injected into the second chemical liquid supply pipe 135b. The third chemical solution supply pipe 135c may be configured to inject four times the amount of the chemical solution into the standard chemical solution, but is not limited thereto.

Here, the chemical solution supply unit 130 may be further formed with a coupling groove 133 in which the housing 10 is inserted and coupled to the housing 10 so as to be fixedly coupled to the housing 111.

In addition, the hollow shaft 131 is configured to extend so that the support shaft 125 of the chemical control unit 120 is rotatably inserted into the outer circumferential surface of the coupling groove 133, the support shaft 125 in the rotary shaft 131 Of course, the rotation hole 134 is further formed to support the insertion operation of the rotation is made.

In addition, a predetermined amount of the chemical liquid is introduced into the chemical liquid supply unit 130 of the chemical liquid control unit 120 through the chemical liquid inlet hole 123 and the chemical liquid discharge groove 124, so that the chemical liquid flows in one direction. The chemical liquid movement hole 136 is formed, and at the end of the chemical liquid movement hole 136 is formed in a direction opposite to the chemical liquid supply pipe 135, the chemical liquid discharge port for discharging the chemical liquid moved through the chemical liquid movement hole 136 ( 137 is configured.

Here, the chemical liquid movement hole 136 is formed along the lower inner circumferential surface of the chemical liquid supply unit 130, is formed below the chemical liquid supply pipe 135, so as to be connected to the chemical liquid discharge groove 124 of the chemical liquid control unit 120 Is formed.

The chemical liquid movement hole 136 may be configured to be inclined to form a predetermined angle from the chemical liquid supply pipe 135 side toward the chemical liquid discharge port 137 side so that the chemical liquid may be more easily moved.

12 and 13, the chemical liquid supply amount control device 100 of the present invention configured as described above is injected while the flow rate is adjusted to the flow rate control injection unit 140 by the rotation operation of the rotation regulator 113. It will be possible to precisely control the supply amount of the chemical liquid.

For example, when the rotation control body 113 is rotated in steps 1 to 8 is a step 1 operation, as shown in Figure 12 (a), the flow rate to the flow rate control injection unit 140 The first to third chemical liquid supply pipes (135a, 135b, 135c) connected to be adjusted while being controlled is not in communication with all of the first to third chemical liquid inlet holes (123a, 123b, 123c) formed in the supply amount adjusting body 122 It can be configured to stop the supply amount of the chemical liquid.

In addition, when the rotation regulator 113 performs a two-stage operation, as shown in Figure 12 (b), the first to third chemical liquid supply pipe (135a, 135b, 135c) of the supply amount regulator 122 Located in each of the 2 to 4 zones, thereby communicating with all the first to third chemical liquid inlet holes (123a, 123b, 123c) formed in the respective zones, thereby supplying the corresponding chemical liquid.

And, when the rotation regulator 113 performs a three-step operation, as shown in Figure 12 (c), the first to third chemical liquid supply pipe (135a, 135b, 135c) of the supply amount regulator 122 Located in each of the 3 to 5 zones, the communication is made only to the first and second chemical liquid inlet hole 123 formed in the respective zones, thereby, through the first and second chemical liquid inlet hole 123 Only the incoming chemical liquid is to be supplied through the chemical liquid discharge groove 124, the chemical liquid moving hole 136 and the chemical liquid discharge port 137.

As such, the first to third chemical liquid inlet holes 123a, 123b, and 123c formed in the respective zones of the supply controller 122 rotate while the rotation controller 113 rotates for each step. To the third chemical solution supply pipe (135a, 135b, 135c) are in communication with each other, and thus the supply of the chemical liquid only in the communication part, so that different chemical liquids can be supplied according to the respective zones Precise supply can be controlled.

The flow rate control injection unit 140 includes an injection supply pipe 141, a flow rate control body 142, and a chemical solution injection tube 147 connected to be injected into the chemical solution supply pipe 135 from the supply means of the chemical solution.

The injection supply pipe 141 is connected to be injected into the chemical liquid supply pipe 135 and is connected to a position where the chemical liquid is supplied and is provided in the form of a tube connected to be injected into the chemical liquid supply pipe 135.

The flow rate adjusting body 142 is disposed between the injection supply pipe 141 and the plurality of chemical liquid supply pipes 135, and is connected to the injection supply tube 141 to a position where the chemical liquid injected is supplied to the plurality of chemical liquid supply pipes 135. A branch having a length adjusted in a zigzag shape is formed therein to branch and supply chemical liquids having different flow rates for each branched position.

The flow path formed inside the flow rate control body 142 includes an injection branch passage 143 for branching the chemical liquid, a first flow rate control passage 144, a second flow rate control passage 145, and a third flow rate control passage 146. It includes.

The injection branch flow passage 143 is formed in a flow path shape in which one side is connected to the injection supply pipe 141 inside the flow rate control body 142 and branches the chemical liquid supplied to the other side in three directions. The injection branch flow passage 143 is formed in the form of a flow path branching in three directions to supply the chemical liquid to the first to third chemical liquid supply pipes 135a, 135b, and 135c, respectively.

The first flow rate control passage 144 is supplied with a chemical solution in a direction connected to the first chemical liquid supply pipe 135a in three directions branched to the injection branch passage 143 in one direction at the inner center of the flow rate control body 142. It is connected to the other side, and connected to the chemical liquid injection pipe 147 to the other side is formed in the form of a zigzag flow path to control the supply amount by adjusting the flow rate of the chemical liquid supplied.

The first flow rate control passage 144 is connected to the injection branch passage 143, the first inflow passage 144a, the first inflow protrusion 144b, the first control passage 144c, the first outflow passage in which the chemical liquid is introduced 144d, and the first outflow protrusion 144e.

The first inflow channel 144a is connected in one direction, which is a direction to be injected into the first chemical liquid supply pipe 135a among the three branched directions of the injection branch channel 143, and the chemical liquid flows through the injection branch channel 143. It is formed to temporarily store the chemical liquid at the location.

The first inflow protrusion 144b protrudes inside the first inflow passage 144a and is provided at a plurality of positions spaced apart from each other at predetermined intervals so that particles, which are foreign substances of the introduced chemical liquid, are caught, and the chemical liquid protrudes to pass. do. The first inflow protrusion 144b may prevent the particles from being closed by being supplied at another open interval even if the stored chemical liquid is delayed by a predetermined time when the stored chemical liquid is delayed by a plurality of intervals. Can be.

The first adjustment passage 144c is stacked in plural so as to have a length determined according to a flow rate adjusted in a zigzag shape in a longitudinal direction with a passage having a predetermined width according to the inner diameter through which the chemical liquid passes to the other side of the first inflow passage 144a. Arranged to connect both ends of the width direction alternately in one flow path is formed to adjust the flow rate while the chemical liquid passes. This, the first control passage 144c is to be adjusted to the flow rate according to the length, it is provided with a length to adjust the amount of the reference chemical liquid supplied to the first chemical liquid supply pipe 135a as described above.

The first outflow passage (144d) is connected to the other side of the first control passage (144c), one side is connected to the first control passage (144c), the other side is the first chemical supply pipe (147) through the chemical liquid injection pipe (147) 135a) is formed in the outflow position so that the chemical liquid is temporarily stored.

The first outflow protrusion 144e protrudes inside the first outflow passage 144d, and is provided at a plurality of positions spaced apart from each other at predetermined intervals so that particles, which are foreign substances of the introduced chemical liquid, are caught, and the chemical liquid protrudes to pass. do.

The second flow rate control passage 145 is supplied with the chemical liquid in a direction connected to the second chemical liquid supply pipe 135 in three directions branched to the injection branch passage 143 in one direction at the inner center of the flow rate control body 142. It is connected to the other side, and connected to the chemical liquid injection pipe 147 to the other side is formed in the form of a zigzag flow path to control the supply amount by adjusting the flow rate of the chemical liquid supplied.

The second flow rate control passage 145 is connected to the injection branch passage 143, the second inflow passage 145a, the second inflow protrusion 145b, the second control passage 145c, the second outflow passage into which the chemical liquid is introduced. 145d, and a second outflow protrusion 145e.

The second inflow passage 145a is connected in one direction which is a direction to be injected into the second chemical liquid supply pipe 135b among the three branched directions of the injection branch passage 143, and the chemical liquid flows through the injection branch passage 143. It is formed to temporarily store the chemical liquid at the location.

The second inflow protrusion 145b protrudes inside the second inflow passage 145a, and is provided at a plurality of positions spaced apart from each other at predetermined intervals so that particles, which are foreign matters of the introduced chemical liquid, are caught, and the chemical liquid protrudes to pass. do. The second inflow protrusion 145b prevents the closing of particles by supplying particles stored by condensation at a plurality of intervals when the stored chemical liquid is delayed due to the characteristics of the chemical liquid and being supplied at different open intervals even when the particles are closed at a plurality of intervals. Can be.

The second adjustment passage 145c is stacked in plural so as to have a length determined according to the flow rate adjusted in a zigzag shape in the longitudinal direction with a passage having a predetermined width in accordance with an inner diameter through which the chemical liquid passes to the other side of the second inflow passage 145a. Arranged to connect both ends of the width direction alternately in one flow path is formed to adjust the flow rate while the chemical liquid passes. Such a second control passage 145c is a flow rate is adjusted according to the length, and as described above, the chemical liquid amount of twice the reference chemical liquid amount of the first control passage 144c supplied to the first chemical liquid supply pipe 135a is supplied. The second control passage 145c is formed to have a length of 1/2 of the first control passage 144c so as to supply twice the amount of the chemical liquid to the second chemical liquid supply pipe 135b as the first chemical liquid supply pipe 135a.

The second outflow channel 145d is connected to the other side of the second control channel 145c, one side of which is connected to the second control channel 145c, and the other side of the second outlet channel 145c is temporarily connected to the second chemical solution supply pipe 135b. It is formed in the outflow position to be stored as.

The second outflow protrusion 145e protrudes inside the second outflow passage 145d, and is provided at a plurality of positions spaced apart from each other at predetermined intervals so that particles, which are foreign matters of the introduced chemical liquid, are caught, and the chemical liquid protrudes to pass. do.

The third flow rate control passage 146 supplies the chemical liquid in a direction connected to the third chemical liquid supply pipe 135 in three directions branched to the injection branch passage 143 in one direction at the inner center of the flow rate control body 142. It is connected to the other side, and connected to the chemical liquid injection pipe 147 to the other side is formed in the form of a zigzag flow path to control the supply amount by adjusting the flow rate of the chemical liquid supplied.

The third flow rate control passage 146 is connected to the injection branch passage 143, the third inflow passage 146a, the third inflow protrusion 146b, the third control passage 146c, the third outflow passage into which the chemical liquid is introduced 146d, and the third outflow protrusion 146e.

The third inflow channel 146a is connected in one direction, which is a direction to be injected into the third chemical liquid supply pipe 135c among the three branched directions of the injection branch channel 143, and the chemical liquid flows through the injection branch channel 143. It is formed to temporarily store the chemical liquid at the location.

The third inflow protrusion 146b protrudes inside the third inflow passage 146a, and is provided at a plurality of positions spaced apart from each other at predetermined intervals so that particles, which are foreign matters of the introduced chemical liquid, are locked, and the chemical liquid protrudes to pass. do. The third inflow protrusion 146b prevents the closing of particles by supplying particles stored by condensation at a plurality of intervals when the stored chemical liquid is delayed due to the nature of the chemical liquid and being supplied at different open intervals even when the particles are closed at a plurality of intervals. Can be.

The third adjustment passage 146c is stacked in plural so as to have a length determined according to a flow rate adjusted in a zigzag shape in a longitudinal direction with a passage having a predetermined width according to the inner diameter through which the chemical liquid passes to the other side of the third inflow passage 146a. Arranged to connect both ends of the width direction alternately in one flow path is formed to adjust the flow rate while the chemical liquid passes.

Such a third control passage 146c is a flow rate is adjusted according to the length, as described above, the amount of the chemical liquid four times the amount of the standard chemical liquid of the first control passage 144c supplied to the first chemical liquid supply pipe 135a The third control passage 146c is formed to have a 1/4 length of the first control passage 144c to supply the chemical liquid four times as large as the first chemical liquid supply tube 135a to the third chemical liquid supply tube 135c.

The third outflow channel 146d is connected to the other side of the third control channel 146c, and one side is connected to the third control channel 146c, and the other side is connected to the third chemical solution supply pipe 135c to temporarily turn the chemical liquid. It is formed in the outflow position to be stored as.

The third outflow protrusion 146e protrudes inside the first outflow passage 144d, and is provided at a plurality of positions spaced apart from each other at predetermined intervals so that particles, which are foreign matters of the introduced chemical liquid, are caught, and the chemical liquid protrudes to pass. do.

As described above, the first to third chemical liquid supply pipes 135a, 135b, and 135c are provided to supply different chemical liquid amounts, and flow rates to be supplied to the first chemical liquid supply pipe 135a through the chemical liquid injection pipe 147. The flow rate is adjusted to the first flow rate control passage 144 of the adjusting body 142 is presented based on the supply amount of the chemical liquid. Installed in a state in which the length is adjusted to supply twice the standard amount of the chemical solution of the first flow rate control passage 144 through the second flow rate control passage 145 for adjusting the flow rate to supply the chemical liquid to the second chemical liquid supply pipe (135b) do.

In addition, the length is adjusted to supply four times the amount of the reference chemical of the first flow rate control passage 144 through the third flow rate control passage 146 to adjust the flow rate to supply the chemical liquid to the third chemical liquid supply pipe (135c) Is installed.

Accordingly, the chemical liquids supplied in different chemical liquid amounts through the first to third chemical liquid supply pipes 135a, 135b, and 135c pass through the first to third flow rate control passages 144, 145, and 146, respectively, and have different chemical liquid amounts. Is supplied. Thus, when the first to third chemical liquid supply pipe (135a, 135b, 135c) is supplied through the different chemical liquid amount through the operation of the rotary regulator 113, the first to third selectively formed at different positions for each of the eight zones 3 The first to third chemical liquid inlet holes 123a, 123b, and 123c of different quantities are rotated through the supply amount adjusting body 122 in which the chemical liquid inlet holes 123a, 123b, and 123c are formed. 135a, 135b, and 135c) are provided to supply different chemical liquids in eight stages. Therefore, the first to third chemical liquid inlet holes 123a, 123b, and 123c combined in different quantities for each zone by the rotation operation and the first to third chemical liquid supply pipes 135a, 135b and 135c supplied in different chemical liquid amounts. ) Can be controlled and the amount of chemical can be adjusted by rotating operation in eight steps.

The chemical liquid injection pipe 147 is branched inside the plurality of chemical liquid supply pipes 135 and the flow rate control body 142 and connected to the first to third flow rate control passages 144, 145, and 146, respectively, to adjust the flow rate. It is installed to inject chemical liquids of different flow rates.

Such, the chemical injection pipe 147 is the first chemical injection pipe 147a for connecting the first flow rate control passage 144 and the first chemical supply pipe 135a for adjusting the flow rate inside the flow rate control body 142, A second chemical liquid injection pipe 147b connecting the second flow rate control channel 145 and the second chemical liquid supply pipe 135b, and a third connecting the third flow rate control channel 146 and the third chemical liquid supply pipe 135c; The chemical liquid injection pipes 147c are connected to each other and are installed to inject the chemical liquids adjusted at different flow rates.

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and changes without departing from the essential characteristics of the present invention.

Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments.

The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

<Description of the symbols for the main parts of the drawings>
100: adjusting unit 110: adjusting unit
111 housing 112 adjustment case
113: rotation regulator 120: chemical control unit
121: operation plate 121a: rotation operation groove
122: supply regulator 123: chemical inlet hole
123a: first chemical inlet hole 123b: second chemical inlet hole
123c: third chemical liquid inlet hole 124: chemical liquid discharge groove
125: support shaft 130: chemical supply unit
131: rotating shaft 132: insertion groove
133: coupling groove 134: rotating hole
135: chemical liquid supply pipe 135a: first chemical liquid supply pipe
135b: second chemical liquid supply pipe 135c: third chemical liquid supply pipe
136: chemical liquid movement hole 137: chemical liquid discharge outlet
140: flow rate control injection unit 141: injection supply pipe
142: flow rate control body 143: injection branch euro
144: first flow rate control passage 144a: first inflow passage
144b: first inflow protrusion 144c: first control channel
144d: first outflow passage 144e: first outflow protrusion
145: second flow rate control passage 145a: second inflow passage
145b: second inflow protrusion 145c: second control channel
145d: second outflow passage 145e: second outflow protrusion
146: third flow rate control passage 146a: third inflow passage
146b: third inflow protrusion 146c: third control channel
146d: third outflow passage 146e: third outflow protrusion
147: chemical injection tube 147a: first chemical injection tube
147b: second chemical injection tube 147c: third chemical injection tube

Claims (13)

In the chemical liquid supply device,
Adjusting unit for adjusting the supply amount of the chemical liquid by the rotation operation;
A chemical liquid control unit including an operation plate coupled to the control unit, and a supply amount control unit integrally formed at a lower portion of the operation plate and having a plurality of chemical liquid inlet holes formed along the outer circumferential surface to be spaced apart at regular intervals;
The chemical liquid control unit is rotatably coupled to the rotating shaft, and provided with a chemical liquid supply pipe at a plurality of positions so as to be in communication with the chemical liquid inlet hole, and a different amount of chemical liquid is injected. A chemical liquid supply unit which is moved from the hole and discharged to the chemical liquid discharge port; And
When the chemical liquid is connected at the position where the chemical liquid is supplied, the chemical liquid is branched from the injection branch flow passage in three directions and the flow rate is adjusted while passing the zigzag through the zigzag shape. The first, second, and third chemical liquid injections connected to the three directions after the first, second, and third flow rate control passages for removing particles secondary to the projections formed by the outflow portions pass through the flow rate control bodies respectively formed in the three directions. It includes; a flow rate control injection unit for injecting the chemical liquid of different flow rate to each of the chemical liquid supply pipe through the pipe;
Chemical supply regulator that regulates the flow rate.
The method of claim 1,
The operation plate is to adjust the supply amount of the chemical liquid by 1 to 8 by rotating the control unit according to the rotation operation amount of the control unit
Chemical supply regulator that regulates the flow rate.
The method of claim 1,
The supply regulator has a circular shape on the outer surface, and is configured in the form of a polygon divided into 1 to 8 zones so that the inner surface is the same area, the chemical liquid inlet hole maintains a constant interval in 2 to 8 zones Composed of at least one and three or less
Chemical supply regulator that regulates the flow rate.
The method of claim 1,
A chemical liquid discharge groove is further formed at an inner surface of the supply regulator to discharge the chemical liquid introduced into the chemical liquid supplying part to the chemical liquid inlet hole.
Chemical supply regulator that regulates the flow rate.
The method of claim 1,
The supply regulator
An insertion groove into which the rotating shaft of the chemical supply unit is inserted;
Is configured to be in close contact with the inner circumferential surface of the rotating shaft, the chemical liquid supply amount adjusting device further comprises a support shaft to be rotatably coupled to the chemical liquid supply portion and the chemical liquid supply.
The method of claim 1,
The chemical liquid supply pipe is composed of first to third chemical liquid supply pipes to be configured to communicate with the chemical liquid inlet hole, each of which is configured in each of the compartments of the supply regulator
Chemical supply regulator that regulates the flow rate.
The method of claim 1,
The chemical liquid movement hole is formed to be inclined to form a predetermined angle toward the chemical liquid discharge port side from the chemical liquid supply pipe side
Chemical supply regulator that regulates the flow rate.
delete delete The method of claim 1,
The first flow rate control passage,
A first inflow channel connected to one of three branched directions of the injection branch channel and temporarily stored at a position at which the chemical liquid supplied through the injection branch channel flows;
A first inflow protrusion protruding inside the first inflow passage, each of which is disposed at a plurality of positions spaced apart from each other at a predetermined interval, to which particles of foreign matter of the inflowed chemical are caught, and protruded to pass through the chemical;
A plurality of flow paths having a predetermined width according to the inner diameter through which the chemical liquid passes to the other side of the first inflow path are stacked and disposed so as to have a length determined according to the flow rate adjusted in a zigzag shape in the longitudinal direction, and both ends of the width direction are alternately arranged. A first control flow passage connected to one flow path and configured to control the flow rate while the chemical liquid passes through the flow path;
A first outflow passage connected to the other side of the first control passage, one side of which is connected to the first control passage, and the other side connected to the chemical injection tube, the outlet being formed to be temporarily stored so that the chemical liquid is temporarily stored; And
And a first outflow protrusion protruding inside the first outflow passage and disposed at a plurality of positions spaced apart from each other at predetermined intervals so that particles, which are foreign matters of the inflowing chemical solution, are protruded to pass through the chemical solution.
Chemical supply regulator that regulates the flow rate.
The method of claim 1,
The second flow rate control flow passage,
A second inflow passage is connected to the other direction except the one connected to the first flow rate control flow passage of the branched three directions of the injection branch flow passage, the second inflow passage formed to temporarily store at the position where the chemical liquid supplied through the injection branch flow passage ;
A second inflow protrusion which protrudes inside the second inflow passage and is disposed at a plurality of positions spaced apart from each other at predetermined intervals to catch particles, which are foreign matters of the introduced chemical liquid, and protrude so that the chemical liquid passes through the second inflow passage;
A plurality of flow paths having a predetermined width according to the inner diameter through which the chemical liquid passes to the other side of the second inflow path are arranged in a plurality of layers so as to have a length determined according to the flow rate adjusted in a zigzag shape in the longitudinal direction, and both ends of the width direction are alternately arranged. A second control passage formed to connect the one passage to adjust the flow rate while the chemical liquid passes;
A second outflow passage connected to the other side of the second control passage, one side of which is connected to the second control passage, and the other side of the second control passage connected to the chemical injecting tube to be discharged to temporarily store the chemical liquid; And
And a second outflow protrusion protruding inside the second outflow passage and disposed at a plurality of positions spaced apart from each other at predetermined intervals to catch particles, which are foreign matters of the inflowing chemical solution, and protruding the chemical liquid to pass therethrough.
Chemical supply regulator that regulates the flow rate.
The method of claim 1,
The third flow rate control flow passage,
A third inflow channel connected to the other one of the three branched directions of the injection branch channel, and configured to temporarily store at a position at which the chemical liquid supplied through the injection branch channel flows;
A third inflow protrusion which protrudes inside the third inflow passage and is disposed at a plurality of locations spaced apart from each other at predetermined intervals to catch particles, which are foreign matters of the introduced chemical liquid, and protrude so that the chemical liquid passes through the third inflow passage;
A plurality of flow paths having a predetermined width according to the inner diameter through which the chemical liquid passes to the other side of the third inflow passage are stacked and arranged in a plurality of lengths so as to have a length determined according to the flow rate adjusted in a zigzag shape in the longitudinal direction, and both ends of the width direction are alternately arranged. A third control passage connected to one flow passage so as to adjust the flow rate while the chemical liquid passes;
A third outflow passage connected to the other side of the third control passage, one side of which is connected to the third control passage, and the other side connected to the chemical injection tube, the outlet being formed to be temporarily stored so that the chemical liquid is temporarily stored; And
And a third outflow protrusion protruding inside the third outflow passage and disposed at a plurality of positions spaced apart from each other at predetermined intervals to catch particles, which are foreign matters of the inflowing chemical liquid, and protruding the chemical liquid to pass therethrough.
Chemical supply regulator that regulates the flow rate.
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