KR102006469B1 - Apparatus System for Monitoring liquid Chemical Material Using Probe type Leak Detecting Sensor - Google Patents

Abstract

The present invention relates to an apparatus system for monitoring a liquid chemical using a probe-type leak detecting sensor, comprising: a probe-type leak detecting sensor unit which consecutively applies a plurality of predetermined alternating current (AC) signals to have different amplitudes and frequencies to repeatedly measure the impedance of a liquid chemical, which is the subject to be measured, and to transmit measurement data, which are information on the real and imaginary parts of the measured impedance for each of the plurality of AC signals to the outside via a wireless communication network; a reference data storage unit which stores reference data, which are information on the real and imaginary parts of the measured impedance for each of the plurality of AC signals on the plurality of liquid chemicals by the leak detecting sensor unit; and an apparatus control unit which compares the measurement data transmitted by the leak detecting sensor unit with the reference data to specify the types of liquid chemicals which are the subject to be measured. The apparatus control unit compares the measurement data on one of the AC signals with the reference data on the relevant AC signal to specify the type of liquid chemical, and to, if the type of the liquid chemical specified is plural, additionally compare the measurement data on the other AC signals with the reference data on the relevant AC signals, thereby specifying the type of liquid chemical as one of them.

Description

[0001] The present invention relates to a liquid chemical monitoring system using a probe type leak detection sensor,

The present invention relates to a system for monitoring a liquid chemical substance using a probe type leakage detection sensor, and more particularly, to a system for monitoring a liquid chemical substance using a probe type leakage detection sensor, And the imaginary part are compared with reference data stored in advance for a plurality of liquid chemical substances to specify the type of the liquid chemical substance so that a probe type that can be universally applied to the leakage test of a plurality of liquid chemical substances The present invention relates to a liquid chemical substance monitoring system using a leakage detection sensor of the present invention.

The liquid leakage sensor for liquid fluid detects cracks due to aging, corrosion, impact, temperature change, and liquid leakage inside the pipe. .

As an example of a leak detection sensor for a liquid fluid sensing leaked chemicals according to the prior art, a method of measuring the electrical conductivity of a leaked solution is useful for detecting leakage of a strong acid or strong basic substance, The accuracy of leak detection is significantly lowered for similar weakly acidic, weakly basic and organic solvents, and oils having no electrical properties are excluded from the measurement object.

Other prior art liquid leakage sensors for liquid fluids can be classified by permittivity or capacity measurement methods of materials, but since most of the chemicals are mixed materials with water, leakage detection for liquid fluids Since it is difficult to distinguish the permittivity of water from the result of the measurement by the sensor, pure chemicals which are not mixed with water should be targeted.

Therefore, there is a need for a new liquid leakage sensor for liquid fluid to solve these problems.

In view of the problems of the prior art described above, the present invention provides an electrochemical device which has an impedance indicating an electrochemical characteristic of a liquid chemical substance widely used in a high-purity chemical process such as a liquid crystal display device, a semiconductor, solar light, a heavy chemical and a plant, A new liquid leakage sensor for detecting liquid leakage according to the size of the liquid is proposed and based on the measurement data obtained by this liquid leakage sensor for liquid fluid, We present a monitoring system for hazardous chemicals.

[Patent Document 1] Korean Patent No. 10-1571398 (Announcement of Nov. 21, 2015) [Patent Literature 2] Korean Patent No. 10-1623537 (Bulletin of May 23, 2016)

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An object of the present invention is to measure impedance of a liquid chemical substance to be measured using a probe type leak detection sensor and to store measurement data, which is information on the real part and the imaginary part of the measured impedance, A liquid type chemical substance monitoring system using a probe type leak detection sensor that can be universally applied to leak test of a plurality of liquid chemical substances by specifying the type of the liquid chemical substance in contrast to data.

In order to achieve the above object, a system for monitoring a liquid chemical substance using a probe-type leakage detection sensor according to the present invention comprises: a plurality of AC signals sequentially predetermined to have different amplitudes and frequencies, A leakage detection sensor unit of a probe type for repeatedly measuring the impedance of each of the plurality of AC signals and transmitting measurement data which is information on the real part and the imaginary part of the measured impedance to the outside via a wireless communication network, A reference data storage section for storing reference data which is information on a real part and an imaginary part of an impedance measured for each of the plurality of AC signals by the leakage detection sensor section with respect to a chemical substance; And comparing the measured data with the reference data, Wherein the apparatus controller identifies the type of the liquid chemical substance by comparing the measurement data for one AC signal with the reference data for the AC signal, And the measurement data for the other AC signals is additionally checked against the reference data for the AC signal to identify the type of the liquid chemical substance.

The leakage detection sensor unit may include a tubular sensor housing and a sensing module exposed at one end of the sensor housing. The sensing module may include a substrate, An electrode layer formed on the upper surface of the substrate, and a protective layer formed on the upper surface of the electrode layer and the rear surface of the substrate, respectively.

The leakage detection sensor unit may include a signal input module for applying the plurality of AC signals to the electrode layer, an impedance measurement module for measuring the impedance of the liquid chemical substance through the electrode layer when applying the AC signal, And a communication module for transmitting the derived measurement data to the device controller, wherein the signal input module, the impedance measurement module, and the communication module are built in the sensor housing.

Also, for each of the plurality of AC signals, the reference data is separately stored into a first group liquid chemical substance database, a second group liquid chemical substance database, and a third group liquid chemical substance database, wherein the first group liquid chemical substance database The material database stores each reference data for a group of liquid chemicals that can be identified only by the imaginary part, and the second group of liquid chemical databases stores the data for one group of liquid chemicals Each reference data is stored, and the third group of liquid chemical substance databases stores respective reference data for a group of liquid chemical substances which can be identified as an imaginary part and a real part.

According to the present invention, it is possible to repeatedly measure the impedance of the liquid chemical substance to be measured by sequentially applying a plurality of predetermined AC signals so that the leakage detecting sensor unit has different amplitudes and frequencies, Which is information about the real part and the imaginary part of the impedance, can be universally applied to the leakage test of a plurality of liquid chemical substances.

According to the present invention, when a plurality of AC signals whose amplitudes and periods are sequentially increased are applied, the leaky sensor portion sequentially amplifies the real part and the imaginary part of the measured impedance, and thus the electric conductivity and the dielectric constant are different It is possible to accurately specify the kind of the liquid chemical substance.

In addition, according to the present invention, a leak-detecting sensor can be manufactured as a probe of a small size and can be easily carried by a user.

1 is a block diagram of a system for monitoring a liquid chemical substance using a probe type leakage detection sensor according to the present invention;
FIG. 2 is a schematic perspective view showing the structure of a probe type leakage detection unit according to the present invention;
3 is a cross-sectional view of the sensing module shown in Fig. 2,
FIG. 4 is a view showing an image of the probe type leakage detection sensor unit according to the present invention,
5 is a flowchart for explaining a liquid chemical monitoring method in a liquid chemical monitoring system using a probe type leakage detection sensor according to the present invention, and
FIG. 6 is a flowchart for explaining a method of specifying a kind of liquid chemical substance to be measured using a liquid chemical substance monitoring system using a probe type leakage detection sensor according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Like reference symbols in the drawings denote like elements. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. Also, when an element is referred to as "comprising ", it means that it can include other elements as well, without departing from the other elements unless specifically stated otherwise.

In view of the fact that various types of liquid chemical substances used in the industrial field can be classified into three groups of the first group, the second group and the third group according to the impedance characteristics, And the type of the liquid chemical substance to be measured is specified based on the impedance data measured for the liquid chemical substance.

In this case, the liquid chemical substance of the first group can be identified only by the permittivity. For example, when the impedance is measured through the leakage detection sensor unit 100 to be described later, when comparing with the impedance measured in the reference state, This is the chemical (for example, oil) in which the imaginary part changes.

Here, the 'impedance measured in the reference state' means an impedance in a state in which no liquid chemical substance is in contact with the sensing module of the leakage sensor unit 100 described later, that is, an impedance measured by the air as a medium Which are used interchangeably throughout this specification.

In addition, the liquid chemical substance of the second group can be identified only by electrical conductivity. For example, when impedance is measured through a leakage detection sensor unit 100 to be described later, when impedance is compared with the impedance measured in the reference state, (For example, strongly acidic or strongly basic chemicals) in which a change in the real part of the chemical occurs.

In addition, the liquid chemical substance of the third group can be identified by the dielectric constant and the electric conductivity. For example, when the impedance is measured through the leakage detection sensor unit 100 to be described later, the impedance is compared with the impedance measured in the reference state This is the case with chemicals (for example, organic solvents) in which the real and imaginary parts of the impedance change.

FIG. 1 is a block diagram of a system for monitoring a liquid chemical substance using a probe type leak detection sensor according to the present invention, FIG. 2 is a schematic perspective view showing the configuration of a probe type leakage detection unit according to the present invention, 2 is a cross-sectional view of a sensing module shown in FIG. 2, and FIG. 4 is an image of a probe-type leakage detection sensor according to the present invention.

1, a liquid chemical monitoring system using a probe type leakage detection sensor according to the present invention includes a probe type leakage detection sensor unit 100, a leakage detection sensor unit 100, and a device control unit 200, a reference data storage unit 300, and a user terminal 400.

The leakage detecting sensor unit 100 according to the present invention senses the occurrence of leaks in various types of liquid chemical substances widely used in high-purity chemical processes such as liquid crystal display, semiconductor, and sunlight, heavy chemical and plant, .

At this time, the leakage detection sensor unit 100 measures the impedance of the liquid chemical leaked out of the fluid storage tank installed at the production site, and derives the measurement data, which is information on the real part and the imaginary part of the measured impedance, (In the case of this embodiment, the device control section) through the wireless communication network.

The leakage sensing unit 100 includes a tubular sensor housing 101 and a sensing module 110 exposed at one end of the sensor housing 101. The sensor housing 101 includes a sensor housing 101, A power cable 102 for power supply may be formed at the other end of the cable.

The sensing module 110 includes a substrate 111, an electrode layer 112 formed on an upper surface of the substrate 111 to measure an impedance of the liquid chemical substance to be measured, And protective layers 113 and 114 formed on the rear surface of the substrate 111, respectively.

The electrode layer 112 is formed by sputtering with a metal material having a small resistance value such as Au, Pt, Cu, or Ni, but the method of forming the electrode layer is not limited thereto.

The protective layers 113 and 114 function to prevent the substrate 111 and the electrode layer 112 from being damaged, damaged or corroded by direct contact with the liquid chemical when the impedance of the liquid chemical substance is measured. For this, the protective layers 113 and 114 may be formed by coating with any one of a silicone resin, a fluororesin, and an epoxy resin, which are resistant to chemicals, or may be formed by laminating with a chemical resistant film.

Since the leakage detection sensor unit 100 according to the present invention is formed of the non-contact type sensor due to the protection layers 113 and 114 as described above, the durability of the substrate 111 and the electrode layer 112 can be greatly improved, Even after the measurement of the impedance of the liquid chemical substance is completed, the sensor module can be cleaned with distilled water without having to replace the sensing module, and the sensor module can be repeatedly reused.

The leakage detection sensor unit 100 includes a signal input module 120 for applying an AC signal for measuring impedance to the electrode layer 112, An impedance measurement module 130 for measuring the impedance of the material and deriving the measurement data, and a communication module 140 for transmitting the derived measurement data to the device control unit 200.

At this time, the signal input module 120, the impedance measurement module 130, and the communication module 140 are installed on one circuit board PB such as a PCB and built in the sensor housing 101 .

The signal input module 120 generates an AC signal having a predetermined amplitude and frequency and applies the AC signal to the electrode layer 112. The impedance measurement module 130 detects the impedance of the electrode layer 112 , The impedance of the liquid chemical substance which is in contact with the electrode layer through the protective layer is measured.

At this time, the impedance measurement module 130 clamps the measured impedance signal by a clamping circuit unit (not shown), removes the noise mixed in the clamped signal by using a low-pass filter (LPF) Which is the information on the real part and the imaginary part of the impedance signal, is derived by the computer. Since the technique of deriving the real part and the imaginary part of the measured impedance is a known technology, a detailed description thereof will be omitted here do.

On the other hand, when performing the noise elimination and digital conversion operations on the impedance signal measured in this way, in the case of different liquid chemical substances having similar electric conductivity or permittivity due to the filter performance limit and the digital converter's calculation limit, Or the imaginary part or the imaginary part has the same value, the kind of the liquid chemical substance can not be specified.

Accordingly, in order to solve such a problem, in the present invention, a plurality of AC signals predetermined in advance are sequentially applied so that the leakage detection sensor unit 100 has different amplitudes and frequencies, and the impedance of the liquid chemical substance to be measured is repeatedly measured And derive measurement data which is information on the real part and imaginary part of the measured impedance for each of the plurality of AC signals.

At this time, it is preferable that the plurality of AC signals are configured so as to sequentially increase (or decrease) the amplitude and the period (the inverse number of the frequency). When a plurality of AC signals whose amplitudes and periods are sequentially increased are applied Since the real part and the imaginary part of the measured impedance are sequentially amplified, it is possible to accurately identify the kinds of the different liquid chemical substances having similar electric conductivity and dielectric constant.

To this end, the signal input module 120 includes a first AC signal having an amplitude of 0.99 Vpp and a frequency of 200 kHz, a second AC signal having an amplitude of 1.98 Vpp and a frequency of 100 kHz, an amplitude of 3,98 Vpp, And sequentially apply a third AC signal having a frequency of 50 kHz to the electrode layer 112.

In this case, the impedance measurement module 130 repeatedly measures the impedance of the liquid chemical substance to be measured when the first AC signal, the second AC signal, and the third AC signal are sequentially applied, The first measurement data, the second measurement data, and the third measurement data, which are information on the real part and the imaginary part of the impedance measured for each of the signal, the second AC signal, and the third AC signal.

In addition, the communication module 140 transmits the first measured data, the second measured data, and the third measured data to the device controller 200 through the low-power long-distance communication network LoRa. In this case, The wireless communication method of the communication module 140 is not limited thereto.

On the other hand, the device control unit 200 controls the liquid chemical material to be measured based on the information about the real part and the imaginary part of the impedance measured by the leakage liquid sensor part (that is, the measurement data) The measurement data is firstly determined as to which one of the first to third groups the substance belongs to, and then the measurement data is compared with reference data of a liquid chemical substance belonging to an arbitrary group specified first, .

If it is determined that the kind of the liquid chemical substance finally identified is the same as the liquid chemical substance determined as the object of management, the device control unit 200 controls the user terminal 400, Alarm information may be transmitted to inform the occurrence of leakage of liquid chemicals.

Here, the user terminal 400 generally refers to a portable mobile device, and is a cellular phone, a smart phone, a notebook PC, a personal digital assistant device, a personal digital assistant device, and a personal digital assistant having a communication function for communicating with the device control unit 200 through a mobile communication network. Player, a navigation device, a wearable electronic device, and the like.

To this end, the apparatus control unit 200 collates the measurement data received from the leakage detection sensor unit 100 with the reference data stored in the reference data storage unit 300 to be described later to specify the type of the liquid chemical substance to be measured .

The reference data storage unit 300 may store first to third group liquid chemical substances database storing reference data for the imaginary part and the real part of the impedance indicating the unique electrochemical characteristic of each of the plurality of liquid chemical substances. .

In this case, the reference data is generated by the leakage detection sensor unit 100 for a plurality of different liquid chemical substances, and the plurality of AC signals (in the present embodiment, the first AC signal, the second AC signal, 3 AC signals) are information about the real and imaginary parts of the impedance measured through preliminary test measurements.

The measurement data and the reference data may be information on the real part and the imaginary part of the impedance measured by the leakage sensor part 100 for the liquid chemical substance, 100 may be information on the difference between the real part and the imaginary part obtained by comparing the measured impedance with the impedance measured in the reference state described above.

In the present embodiment, for convenience of explanation, the measurement data and the reference data are compared with the impedance measured in the reference state with respect to the impedance measured by the leakage sensor unit 100 for the liquid chemical substance, The case of information on the difference value will be described as an example.

Also, the first group of liquid chemicals database stores respective reference data for a group of liquid chemicals which can be discerned only by imaginary parts. For example, the reference data for the first AC signal is stored in the first group liquid chemical The reference data for the second AC signal is stored in the first group of liquid chemicals second database and the reference data for the third AC signal is stored in the third group liquid chemicals third database do.

In addition, the second group of liquid chemicals database stores respective reference data for a group of liquid chemicals which can be identified only by the real part, for example, the reference data for the first AC signal is the second group liquid chemical And the reference data for the second AC signal is stored in the second group liquid chemical second database and the reference data for the third AC signal is stored in the second group liquid chemical third database do.

In addition, the third group of liquid chemical substance databases stores respective reference data for a group of liquid chemical substances that can be discerned as an imaginary part and a real part. For example, the reference data for the first AC signal is stored in the third group The reference data for the second AC signal is stored in the third group liquid chemical substance second database and the reference data for the third AC signal is stored in the third group liquid chemical substance third database / RTI >

As described above, when the measurement data and the reference data are obtained for each of a plurality of AC signals, the apparatus controller 200 according to the present invention transmits the measurement data for any one of the AC signals to the reference data for the AC signal And comparing the measurement data for the remaining AC signals with the reference data for the AC signal in the case where there are a plurality of types of the specified liquid chemical substances, And to specify the type of the substance as any one of them.

Hereinafter, a method for specifying the type of the liquid chemical substance to be measured using the liquid chemical substance monitoring system using the probe leakage type sensor according to the present invention will be described in detail with reference to FIGS. 5 and 6 .

FIG. 5 is a flowchart illustrating a method of monitoring a liquid chemical substance in a liquid chemical monitoring system using a probe leakage type sensor according to the present invention. FIG. 6 is a flow chart A flow chart for explaining a method for specifying the kind of the liquid chemical substance to be measured by using the chemical substance monitoring system.

In the present embodiment, the case where the plurality of AC signals are composed of three kinds of the first AC signal, the second AC signal, and the third AC signal having different amplitudes and frequencies is described as an example, For convenience, the description will be limited to the case where the plurality of AC signals are composed of the first AC signal and the second AC signal.

First, after preparing a leakage detection sensor unit 100 for detecting a liquid chemical substance manufactured in the form of a probe of a small size as shown in FIG. 2 (S10), the liquid chemical substance to be measured by the user is added to the leakage detection sensor unit The sensing module 110 of the portable terminal 100 is contacted (S20).

When the operation switch (not shown) is turned on by the user after step S20 is completed, the leakage sensor unit 100 applies a first AC signal to the electrode layer 112 of the sensing module 110 S31), the impedance of the liquid chemical substance to be measured is measured, and first measurement data which is information on the real part and the imaginary part of the measured impedance is derived (S32, S33).

When the step S33 is completed, the leakage detection sensor unit 100 applies a second AC signal to the electrode layer 112 of the sensing module 110 (S34), measures the impedance of the liquid chemical substance to be measured, (S35, S36), which is information on the real part and the imaginary part of the impedance.

When the step S36 is completed, the leakage sensor unit 100 transmits the first measured data and the second measured data to the device controller 200 through the communication module 140 (S40).

Upon completion of step S40, the device controller 200 collates the first and second measurement data received from the leakage detection sensor unit 100 with the reference data stored in the reference data storage unit 300, (S50). If the specified liquid chemical substance is the same as the liquid chemical substance to be managed, the leakage of the liquid chemical substance is transmitted to the user terminal (S60).

A method of specifying the kind of the liquid chemical substance in the step S50 will be described in detail with reference to FIG.

First, the device control unit 200 determines whether there is a change in the real part of the first measurement data (S161), and determines whether there is a change in the imaginary part of the first measurement data when there is a change in the real part (S162) .

Here, the change of the real part, the change and the imaginary part means the change of the real part and the imaginary part when the first measurement data is compared with the impedance measured in the reference state as described above.

If it is determined in step S161 and step S162 that there is no change in the real part and the imaginary part of the first measurement data, the device controller 200 recognizes that there is no detected liquid chemical substance and ends the procedure (S163).

On the other hand, if it is determined in step S161 and step S162 that there is no change in the real part of the first measurement data and there is only imaginary part change, the device control unit 200 determines that the liquid chemical substance to be measured belongs to the first group liquid chemical substance (S163), and the first measurement data is searched in the first group liquid chemical substance first database (S164).

On the other hand, if it is determined in step S161 that there is a change in the real part of the first measurement data, the device controller 200 determines whether or not there is a change in the imaginary part of the first measurement data (step S165) The liquid chemical substance to be measured is first specified to belong to the second group liquid chemical substance (S166), and the first measurement data is searched in the first group liquid chemical substance first database (S167).

If it is determined in step S165 that there is an imaginary part change of the first measurement data, the device controller 200 firstly specifies that the liquid chemical substance to be measured belongs to the third group liquid chemical substance (S168) The first measurement data is searched in the third group liquid chemical substance first database (S169).

When either step S164, step S167, or step S169 is completed, the device control unit 200 determines whether the reference data corresponding to the first measurement data is present in the corresponding database, that is, whether the type of the liquid chemical substance to be measured is specified (S170). If there is no reference data corresponding to the first measurement data, the procedure is terminated.

On the other hand, if it is determined in step S170 that there is reference data corresponding to the first measurement data, the device controller 200 determines whether there are a plurality of reference data corresponding to the first measurement data (S171) .

If it is determined in step S171 that the number of reference data corresponding to the first measurement data is not plural (that is, 1), the kind of the liquid chemical substance to be measured is specified as the liquid chemical substance having the reference data, (S173).

On the other hand, if it is determined in step S171 that there are a plurality of reference data corresponding to the first measurement data, the device control unit 200 stores the second measurement data in the group of the group specified in step S163, S166, (S172), the liquid chemical substance having the retrieved reference data is identified as the kind of the liquid chemical substance to be measured, and the step S60 is performed (S173).

In the present embodiment, for convenience of description, the case where a plurality of reference data corresponding to the first measurement data is determined as a result of the determination in step S171 has been described as an example by a chemical substance by searching for second measurement data The third measurement data, the fourth measurement data, and the fifth measurement data are sequentially used to specify the type of the liquid chemical substance to be measured, if the type of the liquid chemical substance to be measured is not specified by the second measurement data .

In the above-described embodiment, the user carries the leakage sensor for the liquid fluid, monitors the leakage of the harmful chemical substance by measuring the impedance by directly contacting the uncured liquid fluid of the measurement object with the sensing unit. It is possible to monitor leakage occurrence of toxic chemicals at all times by fixing the leakage sensor for liquid fluid adjacent to the pipe of the fluid storage tank installed at the production site differently from this embodiment.

It will be understood by those skilled in the art that the foregoing description of the present invention is for illustrative purposes only and that those of ordinary skill in the art can readily understand that various changes and modifications may be made without departing from the spirit or essential characteristics of the present invention. will be.

100: leakage detection sensor unit 101: sensor housing
102: power cable 110: sensing module
111: substrate 112: electrode layer
113, 114: protection layer 120: signal input module
130: Impedance measurement module 140: Communication module
200: device control unit 300: reference data storage unit
400: User terminal

Claims (4)

A plurality of AC signals which are predetermined so as to have different amplitudes and frequencies are sequentially applied to repeatedly measure the impedance of the liquid chemical substance to be measured and the impedance of each of the real and imaginary parts of the impedance measured for each of the plurality of AC signals A leakage type sensor of a probe type for transmitting a plurality of measurement data, which is information, to the outside via a wireless communication network;
A reference data storage section for storing reference data which is information on a real part and an imaginary part of a measured impedance measured beforehand by each of the plurality of AC signals by the leakage detection sensor section for a plurality of liquid chemical substances; And
And a device control unit for identifying the type of the liquid chemical substance to be measured by collating the plurality of measurement data transmitted from the leakage detection sensor unit with reference data of the reference data storage unit,
Wherein the plurality of AC signals are configured to sequentially increase or decrease in amplitude and period,
Wherein the reference data storage comprises a first group of liquid chemical databases in which respective reference data for a group of liquid chemical substances identifiable by the imaginary part of the impedance are stored, a first group of liquid chemical substance identifiable only by the real part of the impedance, And a third group of liquid chemical substances database in which respective reference data for a group of liquid chemical substances that can be identified by the imaginary part and the real part of the impedance are stored are stored in the second group liquid chemical substance database However,
Wherein the reference data for each of the plurality of AC signals is separately stored in each of the first group to the third group of liquid chemical substances database,
The apparatus control unit determines that there is no detected liquid chemical substance when there is no change in the imaginary part and the real part of the first measurement data with respect to the first applied AC signal among the plurality of AC signals,
Wherein when the first measurement data is changed only in the imaginary part, the liquid chemical substance to be measured is a liquid chemical substance belonging to the first group liquid chemical substance database, and if the first measurement data changes only in the real part, Is a liquid chemical substance belonging to the second group liquid chemical substance database, and when the first measurement data is changed in both the imaginary part and the real part, the liquid chemical substance to be measured is a liquid chemical substance belonging to the third group liquid chemical substance database After the first specific,
Comparing said first measurement data with reference data for an AC signal first applied to said first grouped liquid chemical substance database,
If the reference data corresponding to the first measurement data is one, the liquid chemical substance to be measured is specified to be a liquid chemical substance of a kind corresponding to the reference data,
When the reference data corresponding to the first measurement data is two or more, the second measurement data for the next AC signal to be sequentially applied is compared with the reference data for the next AC signal Wherein the type of the liquid chemical substance is specified by comparing the plurality of measurement data sequentially with the reference data until the reference data corresponding to the measurement data is specified as one, Liquid chemical monitoring system using sensing sensor. The method according to claim 1,
The leakage detection sensor unit,
A sensor housing having a tubular shape and a sensing module exposed at one end of the sensor housing,
Wherein the sensing module includes a substrate, an electrode layer formed on an upper surface of the substrate to measure an impedance of the liquid chemical substance to be measured, and a protective layer formed on the upper surface of the electrode layer and the rear surface of the substrate. Monitoring System of Liquid Chemical Substances Using Leakage Sensors. 3. The method of claim 2,
The leakage detection sensor unit,
A signal input module for applying the plurality of AC signals to the electrode layer, an impedance measurement module for measuring the impedance of the liquid chemical substance through the electrode layer when applying the AC signal and deriving the measurement data, And a communication module for transmitting the data to the device control unit,
Wherein the signal input module, the impedance measurement module, and the communication module are built in the sensor housing. delete

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