KR101959497B1 - An Ultraviolet Light Sensor Module and an Ultraviolet Light Emitting Assembly Using the Same - Google Patents

Abstract

The present invention provides a sensor module (30) installed near a plurality of unit light emitting parts (20) installed on a base (10) to accurately measure intensities of ultraviolet light emitted by corresponding individual unit light emitting parts and an ultraviolet light emitting device assembly. The sensor module (30) comprises: sensor parts (50) to sense intensities of ultraviolet light; optical fiber (60) to transfer ultraviolet light emitted by unit light emitting parts (20) to the sensor parts (50); and a module housing (40) to support the sensor parts (50) and the optical fiber (60). Front ends (61) of the optical fiber (60) are exposed on a connection housing (45) to face the individual unit light emitting parts and rear ends (63) of the optical fiber (60) are connected to the sensor parts (50). The front ends (61) of the optical fiber (60) face the individual unit light emitting parts. A front surface (48) of the connection housing (45) protrudes forwards more than the front ends (61) of the optical fiber (60). The front ends (61) of the optical fiber (60) are positioned on first positions within an emitting angle range of individual unit light emitting parts (20) to be measured and out of an emitting angle range of unit light emitting parts (20) neighboring the individual unit light emitting parts (20) to be measured.

Description

TECHNICAL FIELD [0001] The present invention relates to an ultraviolet sensor module and an ultraviolet light sensor module using the same,

The present invention relates to an ultraviolet sensor module and an ultraviolet irradiator assembly using the same.

Ultraviolet light is widely used in sterilization or curing processes. There is a high possibility that defects will occur if ultraviolet light is not uniformly irradiated on the surface of an object to be cured in the curing process. Particularly in the field of ultra-precision processing such as semiconductors, there is a problem in that the yield is lowered if the irradiation intensity of ultraviolet rays is uneven.

BACKGROUND ART [0002] As technologies for light emitting diodes have been developed, UV LEDs (ultraviolet light emitting diodes) have been widely used as light sources for generating ultraviolet rays. Since the UV LED has a low luminous efficiency, it generates more heat than the LED in the visible light region. Also, as the heating value increases and the temperature of the UV LED increases, the luminous efficiency becomes lower. Therefore, the amount of light emitted by the UV LED can not be predicted only by the amount of power supplied to each device.

Conventionally, in order to confirm the intensity of ultraviolet rays irradiated from UV LED, a method of directly measuring the intensity of ultraviolet ray in a space where UV LED is installed and irradiated with ultraviolet ray has been used.

Fig. 1 shows a structure in which a sensor for measuring ultraviolet light intensity is installed in an ultraviolet irradiating apparatus. A plurality of unit light emitting portions 20 are provided on the base 10 in a pattern having a predetermined interval so that the light receiving object can receive ultraviolet rays of uniform intensity. An ultraviolet illuminance sensor 52 is provided in each individual unit light emitting portion 20 to measure the intensity (illumination) of the ultraviolet light emitted from the individual unit light emitting portion 20.

The farther the distance between the light-receiving object and the individual unit light-emitting portion 20 is, the more the ultraviolet rays irradiated from the plurality of unit light-emitting portions 20 are overlapped with each other, so that the intensity of ultraviolet light reaching the light- However, the farther from the unit light emitting portion 20 the light receiving object is, the stronger the intensity of the ultraviolet ray reaching the light receiving object, and the larger the size of the chamber.

In order to minimize the distance between the light-receiving object and the unit light-emitting portion 20 so that the size of the chamber does not increase, a method of increasing the ultraviolet light-irradiation angle of the unit light-emitting portion is utilized in order to uniform the intensity of the ultraviolet light received by the light- Accordingly, the ultraviolet irradiation angle of the unit light emitting portion is usually set to 130 degrees or more.

However, when the ultraviolet irradiation angle of the unit light emitting portion increases, the ultraviolet rays of the neighboring unit light emitting portions are also incident on the illuminance sensor 52 provided for measuring the ultraviolet intensity of any one unit light emitting portion, There is a problem that the ultraviolet intensity measured in the unit light emitting unit does not represent the ultraviolet intensity of the unit light emitting unit.

Based on such ultraviolet ray measurement data, the control of each individual unit light emitting unit 20 can not be accurately performed. For example, even if a unit light emitting unit 20 having a weakened ultraviolet intensity is supplied with the theoretical power, which is to be further supplied for irradiating ultraviolet rays of the same intensity as the other unit light emitting units, to the corresponding unit light emitting unit 20, The intensities of the ultraviolet rays irradiated by the unit light emitting units 20 can be approximated but can not be accurately controlled.

If the illuminance sensor 52 is disposed closer to the unit light emitting portion 20 so that only the ultraviolet rays of the unit light emitting portion 20 to be measured can be received without being influenced by the other unit light emitting portions 20, The heat of the unit light emitting portion 20 having a large heat generation amount is transmitted to the light intensity sensor 52 to cause an error in the light intensity sensor 52. In addition to the fact that the unit light emitting portion 20 is covered with the unit light emitting portion 20,

Accordingly, in the present invention, an optical fiber is introduced in order to arrange the illuminance sensor far from the unit light emitting portion while sufficiently securing the amount of ultraviolet light used for measurement. However, since the amount of light transmitted to the optical fiber, It is impossible to exclude the possibility that a deviation occurs due to the angle. This also applies to ultraviolet rays incident on the illuminance sensor at the distal end of the optical fiber.

Meanwhile, when the ultraviolet unit light emitting units, the illuminance sensors respectively provided here and the light intensity correction modules for controlling the illuminance sensors are integrally manufactured, they can be independently manufactured.

SUMMARY OF THE INVENTION The present invention has been conceived to solve the problems described above, and it is an object of the present invention to provide a sensor module capable of accurately measuring intensity of ultraviolet rays of a unit light emitting unit to be measured without being influenced by other unit light emitting units, And an ultraviolet irradiator assembly to which the same is applied.

Another object of the present invention is to provide a sensor module which is not affected by heat generated in the unit light emitting portion, and an ultraviolet irradiator assembly to which the sensor module is applied.

Another object of the present invention is to provide a sensor module capable of further securing the received light amount of the ultraviolet light emitted from the unit light emitting portion and further securing the reliability of the measured ultraviolet light intensity, and an ultraviolet light irradiating apparatus assembly using the sensor module.

In order to solve the above problems, the present invention provides a sensor module (30) installed near a plurality of unit light emitting portions (20) provided on a base (10) and accurately measuring the intensity of ultraviolet light emitted from the individual unit light emitting portions, .

The sensor module 30 includes: a sensor unit 50 for sensing intensity of ultraviolet light; An optical fiber 60 for transmitting ultraviolet light emitted from the unit light emitting unit 20 to the sensor unit 50; And a module housing 40 supporting the sensor unit 50 and the optical fiber 60.

The module housing 40 includes a sensor substrate mounting portion 412 on which the sensor portion 50 is mounted and a support portion 411 for providing a structure for fixing the sensor module 30 to a predetermined position A body housing (41); And an extension housing 45 extending from the body housing 41 in a direction approaching the unit light emitting portion and having a hollow hole 46 for receiving the optical fiber 60 in an extending direction thereof.

The distal end portion 61 of the optical fiber 60 is exposed in the elongated housing 45 so as to face the individual unit light emitting portion and the distal end portion 63 of the optical fiber 60 is connected to the sensor portion 50. Since the optical fiber 60 and the extension housing 45 having the optical fiber 60 have a very compact volume, even if the optical fiber 60 is disposed close to the unit light emitting portion 20, more ultraviolet light is introduced into the optical fiber 40 .

The distal end central axis 633 of the distal end portion 63 of the optical fiber 60 intersects the light receiving surface 522 of the UV sensor 52 of the sensor portion 50. The distal central axis 633 is orthogonal to the center of the light receiving surface 522. In this case, the area of the UV sensor 52 can be reduced to a very small size and a high light receiving amount can be secured.

The hollow hole (46) includes a direction switching portion (466) in which the extending direction is switched. Since the direction switching unit 466 is provided, the direction in which the distal end 61 of the optical fiber is viewed can be accurately fixed.

The distal end portion 61 of the optical fiber 60 is located at a position more embedded than the front surface 48 of the elongate housing 45. The front surface 48 of the extension housing 45 projects further forward than the front end portion 61 of the optical fiber 60. Accordingly, the ultraviolet light irradiated from the unit light emitting portion other than the unit light emitting portion viewed by the optical fiber 60 is not introduced into the optical fiber.

The inner surface of the hollow hole 46 comprises aluminum. Aluminum has a very high ultraviolet reflectance. Even if a part of ultraviolet rays guided by the optical fiber 60 leaks, if the inner surface of the hollow hole 46 contains aluminum, it can be reintroduced into the optical fiber 60 .

The present invention is characterized in that an ultraviolet ray incident on the incidence cross-sectional area of the optical fiber (60) is provided on the front opening (47) further forward than the tip end of the optical fiber (60) Converging lens 70 that converges the light beam to the front end of the light source 60.

The present invention is characterized in that the module housing 40 is provided between the distal end portion 63 of the optical fiber 60 and the sensor portion 50 and concentrates ultraviolet rays emitted from the optical fiber 60 onto the sensor portion 50 Converging lens 80. [0033] FIG.

The two condenser lenses 70 and 80 may be included either selectively or both.

The end condensing lens 70 may include a double-sided convex lens exposed to the individual unit light emitting portion at the front end opening 47.

The center axis 71 of the distal end condensing lens 70 and the distal center axis 611 of the optical fiber 60 may intersect with each other. Accordingly, even if the optical fiber 60 does not look at the unit light emitting portion 20, the light collecting lens 70 can be installed to look at the unit light emitting portion 20.

The end condenser lens 80 includes a cylindrical lens and the distal end portion 63 of the optical fiber 60 and the sensor portion 50 may face each other to face the cylindrical portion.

When the distal center axis 633 of the optical fiber 60 is offset from the center axis 81 of the distal focusing lens 80 in the direction that coincides with the distal center axis 611, The cylindrical center axis 81 of the optical fiber 60 may be disposed on the same plane as the center axis 71 of the front end condensing lens 70 and the distal center axis 611 of the optical fiber 60. [

The present invention also provides an ultraviolet irradiator assembly to which the sensor module 30 is applied.

The ultraviolet irradiator assembly comprises: a base (10); A plurality of unit light emitting units 20 mounted on the base; And the sensor module (30) provided around the plurality of unit light emitting units (20).

The sensor module 30 may be installed in two or more individual unit light emitting units 20. The sensor module 30 may be installed in all the individual unit light emitting units 20. The sensor module 30 may be installed at a predetermined ratio, for example, one unit light emitting portion 20 randomly designated for each of the unit light emitting portions 20.

The distal end portion 61 of the optical fiber 60 of the sensor module 30 is positioned within the irradiation angle range of the individual unit light emitting portion 20 to be measured and the unit light emitting portion 20 adjacent to the individual unit light emitting portion 20 to be measured Is located at a first position out of the irradiation angle range of the light source (20). The distal end portion 61 of the optical fiber 60 or the distal end condensing lens 70 is directed to the individual unit light emitting portion 20 to be measured. The distal end portion 61 of the optical fiber 60 of the sensor module 30 and the front end condensing lens 70 are viewed from the first position to the individual unit light emitting portion 20 to be measured. Accordingly, a considerable amount of ultraviolet light is introduced into the sensor module 30 from the measurement target unit light emitting portion 20, and ultraviolet light from the other unit light emitting portion 20 is not received.

The distal end central axis 611 of the distal end portion 61 of the optical fiber 60 or the central axis 71 of the distal end condensing lens 70 intersects the light emitting surface 21 of the individual unit light emitting portion 20 to be measured .

The body housing 41 is disposed further away from the unit light emitting portion 20 to be measured than the extension housing 45 extending from the body housing 41. The body housing 41 has a unit light emitting portion 20, Are disposed closer to the individual unit light emitting units (20) to be measured among the neighboring unit light emitting units (20). According to this arrangement, it is possible to minimize the influence of the heat generated by the unit light emitting portion 20 in the module housing in which the sensor portion is provided.

The sensor module 30 may be detachably installed or the unit light emitting unit 20 to be measured may be provided so as to be accessible and retractable. Accordingly, the sensor module can be made to approach the unit light emitting unit only when measurement is required, and can be separated for maintenance.

The individual unit light emitting units 20 may be individually replaceable or individually controlled, and the individual unit light emitting units 20 may be UV LED chips or UV LED arrays.

The extending direction of the extension housing 45 may intersect with the light emitting axis 22 of the unit light emitting unit 20 and be parallel to the base 10. The extension housing 45 may extend in the cantilever structure with respect to the body housing 41 and may be disposed close to the base 10 to minimize the possibility of covering the ultraviolet ray irradiated by the unit light emitting portion.

The inner diameter of the optical fiber installed close to the unit light emitting portion may be 0.1 to 1 mm. Even if the diameter of the optical fiber is set to be close to the unit light emitting portion, the amount of light to be introduced into the optical fiber can be sufficiently secured and the covering of the unit light emitting portion can be minimized.

An interface module 90 for controlling the power supplied to the unit light emitting unit 20 may be installed on the rear surface of the unit base 10 based on ultraviolet ray measurement values measured by the sensor module 30.

The base 10 may be provided with cooling lines for cooling the plurality of unit light emitting units 20 to prevent heat generated in the unit light emitting units 20 from being transmitted to the interface module 90.

According to the sensor module and the ultraviolet irradiator assembly of the present invention, in a plurality of unit light emitters arranged adjacent to each other, the intensity of the ultraviolet light of the unit light emitter to be measured can be accurately measured without being influenced by other unit light emitters.

Further, it is possible to secure a sufficient amount of light from the unit light emitting portion, to measure the intensity of the ultraviolet light more reliably, and to prevent the phenomenon that the UV sensor is deteriorated by heat.

The above and other objects, features and advantages of the present invention will be more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which: FIG.

1 is a view showing a structure in which a sensor for measuring ultraviolet light intensity is installed in a conventional ultraviolet ray irradiating apparatus.
2 is a view showing an ultraviolet irradiator assembly to which the first embodiment of the sensor module according to the present invention is applied.
3 is a perspective view of a sensor module according to a first embodiment of the present invention.
4 is a side sectional view of the first embodiment of the sensor module according to the present invention.
FIG. 5 is an enlarged view of the tip end portion of the sensor module and the unit light emitting portion of FIG. 2;
6 is a perspective view of a sensor module according to a second embodiment of the present invention.
7 is a side sectional view of a second embodiment of the sensor module according to the present invention.
8 is a graph showing the uniformity of the intensity of ultraviolet light detected by the UV sensor when the sensor module of the first embodiment and the sensor module of the second embodiment are respectively applied.
FIGS. 9 and 10 are a side view and a plan view, respectively, of a sensor module according to an embodiment of the present invention, which is mounted on a unit light emitting unit including an LED chip array.
11 is a perspective view of an ultraviolet irradiator assembly to which the sensor module of the second embodiment is applied.
Fig. 12 is a side view of Fig. 11. Fig.
13 is a control flowchart of an interface module applied to an ultraviolet irradiator assembly according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

It is to be understood that the present invention is not limited to the disclosed embodiments, but may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, It is provided to inform.

In the present invention, one optical fiber does not necessarily mean one optical fiber but may be a concept including two or more bundles together.

It is needless to say that the configurations of different embodiments of the present invention can be applied to cross, substitute, and omit.

[First Embodiment]

Hereinafter, a first embodiment of a sensor module according to the present invention and an embodiment of an ultraviolet irradiator assembly using the same will be described with reference to FIGS. 2 to 5. FIG.

Referring to FIG. 2, the ultraviolet irradiator according to the present invention includes a flat plate-shaped base 10, a plurality of unit light emitting units 20 arranged in a regular pattern at predetermined intervals, And a sensor module 30 for measuring the intensity of ultraviolet light radiated from the unit light emitting unit 20, respectively.

The base 10 may be a substrate on which the unit light emitting portion 20 is mounted. The plurality of unit light emitting units 20 may be arranged in a line at predetermined intervals. The unit light emitting unit 20 can be individually powered by the control unit. In addition, the voltage and current of each of the unit light emitting units 20 can be individually controlled by the control unit. As the power supplied to the unit light emitting unit 20 is increased, the intensity of the ultraviolet light irradiated from the unit light emitting unit 20 becomes higher.

The unit light emitting unit 20 may be a UV LED chip. As another example, the unit light emitting portion 20 may be a one-dimensional or two-dimensionally arranged UV LED array. The ultraviolet light emitted from the unit light emitting unit 20 may be near-ultraviolet light. The wavelength of near ultraviolet ray UVA may be from 340 nm to 400 nm. The ultraviolet light emitted from the unit light emitting portion 20 may have a wavelength suitable for the curing process.

The light emitting surface 21 of the unit light emitting portion 20 may be parallel to the base 10. The light emitting axis 22 of the unit light emitting unit 20 may be perpendicular to the light emitting surface 21 or the base 10. [ The light emitting axis 22 means an axis passing through the center of the angle range where ultraviolet rays are irradiated from the unit light emitting portion.

The plurality of unit light emitting units 20 individually measure the intensity of ultraviolet light. To this end, a plurality of optical fibers 60 and a sensor unit 50 for measuring the intensity of ultraviolet light guided by the optical fiber 60 may be provided near the plurality of unit light emitting units 20. The plurality of unit light emitting units 20 may be individually irradiated with ultraviolet light intensity. Alternatively, only the unit light emitting units arbitrarily selected among the plurality of unit light emitting units 20 may be individually measured for the intensity of ultraviolet light. For example, the intensity of ultraviolet light can be measured in one of 10 unit light emitting units.

The distal ends 61 of the optical fibers 60 provided in the plurality of unit light emitting units 20 are installed to face the unit light emitting units 20. Accordingly, the ultraviolet light emitted from the unit light emitting portion 20 is introduced into the optical fiber 50. According to the present invention, the ultraviolet light irradiated from the unit light emitting portion is directly introduced into the front end portion of the optical fiber provided in the unit light emitting portion.

The sensor unit 50 is connected to the end portions 63 of the plurality of optical fibers 60. The sensor unit 50 receives the ultraviolet light guided from the distal end of the optical fiber 60 and guided to the distal end of the optical fiber 60 to sense the intensity thereof. The plurality of optical fibers 60 may be individually connected to the corresponding sensor unit 50. Alternatively, two or more optical fibers 60 provided in different unit light emitting units 20 may be connected to one sensor unit 50.

The optical fiber 60 and the sensor unit 50 may be installed in the module housing 40. In the embodiment of the present invention, one optical fiber 60 and one sensor unit 50 are installed in one module housing. However, it is also possible that two or more optical fibers 60 and one sensor section 50, or two or more optical fibers 60 and two or more sensor sections 50 are provided in one module housing.

The module housing (40) includes a body housing (41) and an extension housing (45). The body housing 41 may be the skeleton of the overall module housing 40. A lower portion of the body housing 41 may be provided with a support portion 411 for fixing the body housing 41 to other components. The support portion 411 may be detachably coupled to another component. The support 411 may be detachably coupled to other components. The sensor module 30 can be easily installed and removed.

The support portion 411 may be installed to be movable under the guidance of a guide rail (not shown). The guide rails may guide the sensor module 30 in a direction approaching the unit light emitting portion 20 and in a direction away from the unit light emitting portion 20. [ The approach and withdrawal directions may be parallel to the extending direction of the extension housing.

The module housing 40 may be made entirely of aluminum alloy. The module housing 40 may also be partially aluminum alloy.

A sensor substrate mounting part 412 is provided on the upper part of the support part 411 in the body housing 41 to mount the sensor part 50 thereon. The sensor substrate 51 of the sensor unit 50 can be received and fixed in the accommodation space 4122 of the sensor substrate mounting unit 412. The mounting portion 412 of the body housing 41 can be separated from the supporting portion 411 and the receiving space 4122 can be opened toward the surface separated from the supporting portion 411. [ The sensor unit 50 can be inserted into the accommodation space 4122 through the opened portion.

The sensor substrate 51 of the sensor unit 50 may be installed in a standing manner. The UV sensor 52 mounted on the sensor substrate 51 can be installed to view the direction in which the extension housing 45 is provided.

The body housing 41 may have a rectangular parallelepiped shape as a whole. An extension housing 45 extending toward the unit light emitting unit 20 is provided on one side of the body housing 41. The extension housing 45 may be connected to the body housing 41 in the form of a cantilever. The extending direction of the extension housing is parallel to the plane including the base 10 and perpendicular to the light emitting axis of the unit light emitting portion.

The extension housing 45 may be divided into a first extension housing 451 and a second extension housing 452. The first extension housing 451 may be integrally connected to the body housing 41. The second extension housing 452 may be separately manufactured and assembled to the upper portion of the first extension housing 451.

The first extension housing 451 and the body housing 41 may be provided with a hollow hole 46 extending in a direction parallel to the first extension housing 451. The portion of the hollow hole 46 provided in the body housing 41 may be opened in the longitudinal direction and closed in the circumferential direction. The portion of the hollow hole 46 provided in the body housing 41 can extend to the receiving space 4122 and communicate therewith.

The portion of the hollow hole 46 provided in the first extension housing 451 may be shaped like a groove that is open in the longitudinal direction and closed at the side and the bottom, but open at the top. In the state where the second extension housing 452 is coupled to the upper portion of the first extension housing 451, the portion of the hollow hole 46 provided in the extension housing 45 is opened in the longitudinal direction and closed .

The front end opening 47 of the hollow hole 46 is provided on the front surface 48 of the extension housing 45. The hollow hole 46 has a direction switching portion 466 in which the extending direction is switched. The direction switching unit 466 may be provided near the opening of the hollow hole 46. The tip opening 47 of the hollow hole 46 may be inclined downward by the direction switching unit 466. [

The inner wall surface of the hollow hole 46 may be made of aluminum. Aluminum may be coated on the inner wall surface of the hollow hole 46 while the extension housing 45 is made of a material having a low thermal conductivity. Accordingly, the heat generated in the unit light emitting unit can be prevented from being transmitted to the body housing 41 in which the sensor unit 50 is installed.

The hollow hole 46 may include an optical fiber 60. The optical fiber 60 may be received in parallel with the longitudinal direction of the hollow hole 46. The optical fiber 60 is seated in the hollow hole 46 from the upper portion of the first extension housing 451 and inserted into the body housing 41 along the longitudinal direction of the hollow hole 46, 2 extension housing 452. In this way,

In the embodiment of the present invention, the body housing 41 and the first extension housing 451 are integrally formed and the second extension housing 452 is formed as a separate component.

However, the body housing 41, the first extension housing 451, and the second extension housing 452 may be separately manufactured and then assembled. The first extension housing 451 and the second extension housing 452 may have a shape of a long rectangular parallelepiped including the hollow hole 46 and the body housing 41 may be formed in a shape And may have a space for inserting the first extension housing 451 and the second extension housing 452.

The extension housing 45 may be made in a form that is not divided into the first extension housing and the second extension housing.

The end portion 63 of the optical fiber 60 embedded in the hollow hole 46 can be seen through the UV sensor 52 of the sensor unit 50. The axis 633 passing through the center of the distal end portion 63 may be perpendicular to the center of the light receiving surface 522 of the UV sensor 52. Therefore, the UV sensor 52 can completely receive ultraviolet rays transmitted by the optical fiber 60 even with a minimum area.

Since the optical fiber 60 is flexible, the optical fiber 60 may include a direction switching unit 62 whose direction is switched to correspond to the shape of the direction switching unit 466 of the hollow hole 46. As the optical fiber 60 is changed in direction, the front end portion 61 of the optical fiber 60 can be seen from the front lower portion. The distal end portion 61 of the optical fiber 60 can be seen from the light emitting surface 21 of the unit light emitting portion 20 in a state where the sensor module 30 is installed in the ultraviolet ray irradiating device assembly. The distal end central axis 611 passing through the center of the distal end portion 61 can be directed to the front lower portion. The center axis 611 of the distal end of the optical fiber 60 may cross the light emitting surface 21 of the unit light emitting portion 20.

The front end 61 of the optical fiber 60 is exposed when the front face of the extending housing 48 is viewed from the front of the front face 48 of the extending housing 45. [ The distal end portion 61 of the optical fiber 60 is located at a position more embedded than the front surface of the elongate housing 48 when viewed from the side of the elongated housing 48. That is, the extension housing 45 extends forward more than the optical fiber 60, and the front surface of the extension housing 45 protrudes forward more than the optical fiber 60.

Accordingly, the region where the distal end 61 of the optical fiber 60 is viewed is narrowly defined by the extended housing 45 extending further forward than the optical fiber 60. Therefore, ultraviolet rays introduced into the optical fiber 60 may be limited to ultraviolet rays irradiated from the unit light emitting portion 20 viewed by the optical fiber 60.

The direction in which a plurality of the unit light emitting portions 20 are arranged and the direction of the tip central axis 611 of the optical fiber 60 may be perpendicular to each other. The extension housing 45 may extend further forward than the distal end of the optical fiber. Therefore, ultraviolet rays irradiated from the unit light emitting units other than the unit light emitting unit viewed by the optical fiber 60 are not introduced into the optical fiber 60, or are hardly introduced.

The distal end portion 61 of the optical fiber 60 is disposed in the irradiation angle range of the unit light emitting portion 20 viewed by the optical fiber 60 and the unit light emitting portion 20 other than the measurement target unit light emitting portion 20 20). Specifically, the distal end portion 61 of the optical fiber 60 may be disposed at a position deviated from the irradiation angle range of the other light emitting portion 20 adjacent to the unit light emitting portion 20 to be measured.

If the position of the sensor module in which the distal end portion 61 of the optical fiber is located within the irradiation angle range of the measurement target unit light emitting portion 20 is defined as the first position, when the sensor module 30 is in the first position, The distal end portion 61 of the optical fiber can be viewed from the unit light emitting portion 20 to be measured and the distal end central axis 611 of the optical fiber crosses the light emitting surface 21 of the measurement target unit light emitting portion 20 .

According to the present invention, each of the unit light emitting portions 20 becomes a heat source. The sensor unit 50 is preferably disposed away from the heat sources. Accordingly, the present invention provides an effective arrangement in which the body housing 41 provided with the sensor portion 50 is disposed away from the heat sources.

The body housing 41 is disposed farther from the unit light emitting unit 20 than the extension housing 45 in terms of the unit light emitting unit to be measured and the sensor module for measuring the unit light emitting unit.

The body housing 41 of the sensor module 30, which measures the intensity of ultraviolet rays of a unit light emitting portion 20 from the viewpoint of the plurality of unit light emitting portions and the sensor module arranged here, Emitting unit 20 among the unit light-emitting units 20 and the unit light-emitting units 20 adjacent thereto.

2, the body housings 41 of the sensor modules can be arranged side by side in the same manner as the unit light emitting units 20 are arranged side by side. The extension housing 45 extending from the body housing 41 may be arranged to extend from the body housing 41 to the unit light emitting unit 20 corresponding thereto.

In the drawing, the extension housing 45 is shown in a greatly exaggerated size, but the extension housing 45 can be made finer than shown. Even if the inner diameter of the optical fiber is about 0.1 mm to 1 mm, the distal end portion 61 of the optical fiber may be very close to the unit light emitting portion 20, so that the amount of ultraviolet light introduced into the distal end portion 61 of the optical fiber is equivalent So that the intensity of ultraviolet light measured by the sensor unit 50 can be counted.

The fact that the intensity of the ultraviolet rays measured by the sensor part is high means that the amount of ultraviolet light irradiated from the unit light emitting part 20 can be more reliably detected when the amount of ultraviolet light is reduced. For example, if the illuminance at 100 lux is detected as 70 lux and the illuminance detected at 1 lux is detected as 0.7 lux, the former case can be detected clearly, Since the degree of difference in the case may be a degree of difference from the noise of the sensor, it may be difficult to detect that the illuminance is reduced.

In the present invention, since the ultraviolet rays are introduced closer to the unit light emitting portion by using the optical fiber, it is possible to monitor the change of the ultraviolet intensity in more detail in that the amount of ultraviolet light of higher order can be measured.

According to the sensor module and the ultraviolet irradiator assembly to which the same is applied, it is possible to measure intensity by receiving only a large amount of ultraviolet rays of the unit light emitting portion 20 to be measured while minimizing the area covering the unit light emitting portion 20, It is possible to minimize the influence of the sensor on the heat generation of the unit light emitting unit to be measured and to accurately detect the ultraviolet light intensity of the unit light emitting unit to be monitored with high resolution. Therefore, it is possible to accurately monitor the unit light emitting units in which the ultraviolet ray irradiation amount is nonuniform among the plurality of unit light emitting units, and thereby, the ultraviolet light irradiation amounts of the plurality of unit light emitting units can be controlled very precisely.

[Second Embodiment]

Hereinafter, a second embodiment of the sensor module according to the present invention and an embodiment of the ultraviolet irradiator assembly applying the same will be described with reference to FIGS. 6 to 8. FIG. The second embodiment described below mainly focuses on the differences from the first embodiment, and therefore, even if not described directly below, it can be substituted from the description of the first embodiment or the like.

When ultraviolet light is directly introduced into the distal end portion 61 of the optical fiber 60 as in the first embodiment, the uniform incidence is not obtained due to the deviation of the reflection angle, which may lead to deviation of data received for each sensor. In the second embodiment, a collimation condensing lens is applied to maximize the uniformity (parallelism) of the incident ultraviolet light so that the ultraviolet light can be uniformly incident on the sensor unit.

A plurality of optical fibers 60 and a sensor unit 50 for measuring the intensity of ultraviolet light guided by the optical fiber 60 may be provided near the plurality of unit light emitting units 20. [ According to the second embodiment, the front end condensing lens 70 is provided in front of the front end portion 61 of the optical fiber 60.

The tip condensing lens 70 may be in the form of a convex condenser lens having convex curved surfaces having spherical surfaces on both surfaces. As an example, the convex curved surface may have a curvature diameter of 1.5 to 2.5 mm and a diameter of 2 mm. The sectional area defined by the diameter of the front end condensing lens 70 is larger than the sectional area of the optical fiber.

The outer peripheral surface of the convex condenser lens has a cylindrical surface that can fix and fix the condenser lens to the tip opening 47 provided in the front surface 48 of the extension housing 45. [ The distal end opening 47 may also be a hole having a cylindrical inner circumferential surface and the cylindrical outer circumferential surface of the distal end focusing lens 70 may be fitted and fitted to the inner circumferential surface of the distal end opening 47. Accordingly, not only the installation of the end condenser lens 70 is simple, but also all the ultraviolet rays introduced into all the optical fibers can be condensed through the end condenser lens 70.

The center axis 71 of the front end condensing lens 70 can be seen from the light emitting surface 21 of the unit light emitting portion 20. Specifically, the center axis 71 of the converging lens 70 may intersect the light emitting surface 21 of the unit light emitting portion 20.

The distal end portion 61 of the optical fiber 60 may not be aligned or aligned with the distal focusing lens 70. Although not shown, the distal end portion of the optical fiber and the front end condensing lens can be aligned with each other such that the distal end central axis 611 and the central axis 71 overlap each other.

In the second embodiment, the distal end central axis 611 of the optical fiber extends in the horizontal direction, and the central axis 71 of the distal end condensing lens 70 is arranged so as to intersect with the distal end central axis 611 slightly downward do. The downward angle of the central axis 71 may be about 10 to 30 degrees, and it is 20 degrees in the embodiment.

The tip condenser lens 70 functions not only to condense ultraviolet light irradiated to a larger area but also to further increase the uniformity of ultraviolet light introduced into the optical fiber together with the end condenser lens 80 to be described later.

A distal condenser lens 80 is interposed between the distal end portion 63 of the optical fiber 60 and the sensor portion 50. The above-mentioned end condenser lens 70 and the end condenser lens 80 may be a PMMA material having a high ratio of quartz or monomer having a high ultraviolet transmittance. When the uniformity of the ultraviolet light guided to the distal end of the optical fiber 60 is low, the sensor unit 50 detects the intensity of the ultraviolet light guided to the distal end of the optical fiber 60 by receiving the ultraviolet light guided from the distal end of the optical fiber 60, The intensity of the ultraviolet light sensed by the sensor unit 50 becomes weak.

According to the present invention, a spherical convex lens or a cylindrical convex lens can be used as the end condensing lens 80. [ In the second embodiment of the present invention, it is exemplified that the cylindrical convex lens is used as the end condensing lens 80. [ The cylindrical convex lens may have a diameter of 2 mm and a height of about 3 mm. The end condenser lens 80 may be positioned within 1 mm forward of the illuminance sensor 52.

The distal end portion 63 of the optical fiber 60 and the illuminance sensor 52 are opposed to each other with the cylindrical curved surface of the end condenser lens 80 interposed therebetween. The end condenser lens 80 may be interposed between the optical fiber 60 and the illuminance sensor 52 through a hole provided in the upper part of the module housing 40, specifically, the body housing 41.

The cylindrical center axis 81 of the end condensing lens 80 may be disposed in parallel with the light emitting axis 22 of the unit light emitting unit 20. [

The cylindrical center axis 81 of the end condensing lens 80 may be perpendicular to the distal center axis 633 of the optical fiber 60.

Referring to FIG. 7, the ultraviolet light is introduced upward slightly upward with respect to the optical fiber 60. To this end, the center axis 71 of the front end condensing lens 70 is slightly inclined downward and crosses with respect to the distal center axis 611 of the optical fiber 60. At this time, the end condenser lens 80 is attached to a plane including the center axis 71 of the tip condenser lens 70 and the tip central axis 611 of the optical fiber 60 And a cylindrical central axis 81 is included.

This is based on the premise that the distal end central axis 611 and the distal end central axis 633 of the optical fiber 60 are on the same straight line. Since the optical fiber 60 guides the light introduced once to the distal end to the distal end, the pattern of the light emitted from the distal end when viewed from the distal central axis 633 is similar.

Therefore, even if the alignment of the distal end central axis 611 and the distal end central axis 633 of the optical fiber 60 is changed due to the bent optical fiber 60, the distal end central axis 633 of the optical fiber 60 When the relative positional relationship of the cylindrical center axis 81 of the end condensing lens 80 is maintained, there is no difference in the amount of ultraviolet light measured by the illuminance sensor 52.

The cylindrical center axis 81 of the end condensing lens 80 is rotated and moved in the direction in which the distal central axis 633 of the optical fiber 60 coincides with the distal center axial axis 611. In other words, The cylindrical center axis 81 of the end condensing lens 80 is located at the center of the center axis 71 of the front end condensing lens 70 and the center axis of the distal end 611 of the optical fiber 60 It can be said that they are arranged on the same plane.

In Table 1, spherical convex lenses having different curvatures are used as the tip converging lenses, but the angle of inclination of the center axis of the tip converging lens is different from that of the horizontally extended optical fibers, It indicates the amount of light measured using a cylindrical convex lens as a lens or using a spherical convex lens. Conditions other than the conditions described in the table were measured in the same manner.

No. End focusing lens End focusing lens Light quantity (mW / cm ² ) One Reference none 1214.5 2 Angle: 30 degrees,
Curvature: 1.5mm on both sides none 1223.4 3 Angle: 20 degrees, Curvature: Both sides 1.5mm none 1565.2 4 Angle: 20 degrees, Curvature: 2mm on both sides none 1437.0 5 Angle: 10 degrees, curvature: both sides 1.5mm none 1234.6 6 Angle: 20 degrees, Curvature: Both sides 1.5mm Cylindrical
Diameter 2mm 2749.5 7 Angle: 20 degrees, Curvature: Both sides 1.5mm Convex
Curvature: 1.5mm on both sides 2531.7

It is highly expected that the spherical convex lens used as the tip focusing lens is higher in condensing efficiency than the cylindrical condensing lens. However, as a result of the measurement, the cylindrical convex lens is arranged in the direction of the central axis of the end, 7 shows that the ultraviolet rays introduced into the optical fiber 60 have a directivity in which they are concentrated in a specific direction As a result.

8A shows the intensity distribution of the ultraviolet rays reaching the illuminance sensor 52 according to the first embodiment. Fig. 8B shows the intensity distribution of ultraviolet rays reaching the illuminance sensor 52 according to the second embodiment. The intensity distribution is shown. It can be seen that the amount of ultraviolet rays introduced into the optical fiber 60 increases and the uniformity of the ultraviolet rays reaching the illuminance sensor 52 becomes higher according to the end condensing lens and the end condensing lens.

That is, No. 1 in Table 1 above. 6 and 8 (b) show the case where the distal end central axis 633 of the optical fiber 60 is aligned with the distal end central axis 611 as described above, The cylindrical central axis 81 of the end condensing lens 80 is located at the center of the center axis 71 of the converging lens 70 and the center axis of the optical fiber 60 Under the condition that they are disposed on the same plane as the tip center axis 611.

On the other hand, the hollow hole of the second embodiment communicates with the tip opening 47 like the hollow hole 46 of the first embodiment, and the tip opening and the hollow hole are inclined at a predetermined angle. However, in the second embodiment, the optical fiber 60 is not redirected in response to the inclined angle. It goes without saying that the structure combining the first and second embodiments, for example, the structure in which the optical fiber 60 is redirected and the end condensing lens is installed, is also applicable.

The portion where the end converging lens 70 is exposed more forward than the front surface 48 of the extension housing 45 may be one of the two curved surfaces of the double curved surface lens as shown in the figure. Accordingly, the ultraviolet light incident on the tip condenser lens 70 may be limited to the ultraviolet light emitted from the unit light emitter 20 viewed by the tip condenser lens 70.

The exposed portion of the distal end condensing lens 70 is disposed in the irradiation angle range of the unit light emitting portion 20 viewed by the optical fiber 60 and the unit light emitting portion 20 other than the measurement target light emitting portion 20 20).

If the position of the sensor module in which the exposed portion of the end condensing lens 70 is located within the irradiation angle range of the measurement target unit light emitting portion 20 is the first position, The center axis 71 of the end condensing lens 70 may intersect with the light emitting surface 21 of the unit light emitting unit 20 to be measured.

Hereinafter, another embodiment of the ultraviolet irradiator assembly according to the second embodiment of the sensor module according to the present invention will be described with reference to FIGS. 9 and 10. FIG.

Unlike the unit light emitting portion described above, the unit light emitting portion 20 shown in FIGS. 9 and 10 includes a plurality of LED chip arrays having a plurality of rows and columns. It is exemplified that the array has a 6 * 12 array of LED chips. The sensor module 30 for measuring ultraviolet rays is located at a central portion of the unit light emitting portion 20 and does not block the light emitting axis of each LED chip so as not to block the path of ultraviolet light irradiated to the irradiated object as shown in FIG.

The front end condensing lens 70 disposed at the front end of the sensor module 30 is disposed so as to be inclined downward so as to intersect near the center of the light emitting surface 21 as shown in Fig.

The unit light emitting unit 20 and the ultraviolet light irradiating apparatus assembly of the sensor module 30 shown in Figs. 9 and 10 are arranged such that, as shown in Figs. 11 and 12, And an interface module 90 for controlling the power of the unit light emitting unit 20 may be provided together.

The unit light emitting portions 20 may be disposed on the surface of the base 10. The unit light emitting units 20 may be in the form of a chip on board module and a sensor module 30 may be installed on the side thereof. In the illustrated assembly, a structure in which six unit light emitting portions 20 and six sensor modules 30 are installed is illustrated.

The interface module 90 is installed in the inner space of the housing provided on the back surface of the base 10. The interface module may be a circuit, and the circuit is connected to each sensor module and the unit light emitting unit by a cable 91 to exchange signals and power. The cable 91 may be separately connected to each sensor module and the unit light emitting unit. 11 and 12) in the direction in which the light source and the sensor module are installed in the enclosure.

Inside the base 10, a cooling line 11 through which refrigerant flows is provided. The cooling line 11 is located between the unit light emitting portion and the interface module to prevent the heat generated by the unit light emitting portion, which causes heat generation, from affecting the interface module.

The interface module 90 may include a controller for controlling power supplied to the unit light emitting unit 20 based on the intensity of ultraviolet light measured by the sensor module. In addition, the interface module 90 may function as an intermediate terminal for connecting the ultraviolet ray detection signal of the sensor module with the power cable of the unit light emitting unit, and the controller for controlling the unit light emitting unit may be separately provided.

If the light source, the sensor module and the interface module are integrally formed as described above, the light source, the sensor module and the interface module are modularized into one, and the usability is greatly increased.

Hereinafter, with reference to FIG. 13, a control method of the ultraviolet irradiation apparatus to which the sensor module according to the present invention is applied will be described.

A controller (control unit) supplies predetermined power to a plurality of (six channels) unit light emitting units 20 of the ultraviolet ray irradiating apparatus assembly. The plurality of (six channels) sensor modules 30 measure ultraviolet light intensity of each unit light emitting portion 20. [ The data of the ultraviolet intensity measured by the sensor module 30 is as described above for the ultraviolet radiation amount of each unit light emitting portion 20 to be highly reliable.

The controller checks the deviation of light quantity of each channel. If the deviation is within a predetermined range (for example, 10%), it is determined that the uniform ultraviolet light intensity is maintained within an allowable deviation range, and monitoring is continued.

If the deviation is equal to or greater than the predetermined range, a channel having the lowest light amount or the highest light amount among the plurality of unit light emitting units is searched and a command to raise or lower the power (current) supplied to the corresponding channel is performed.

Based on the ultraviolet intensity of each channel measured again, the controller confirms the deviation of the luminous intensity of each channel and continues the monitoring process as described above.

According to the present invention, the ultraviolet irradiation amount of each of the unit light emitting units 20 can be kept very uniform by finely adjusting the power supplied to each of the unit light emitting units 20 according to the measurement result of the ultraviolet intensity with high resolution.

That is, the sensor module 30 can monitor the ultraviolet irradiation amount of each unit light emitting unit 20 in real time with high resolution. Also, it is possible to continuously control the power supply to the unit light emitting unit 20 whose ultraviolet ray irradiation amount is less than a uniform value as a result of real-time monitoring.

On the other hand, if the amount of ultraviolet radiation is not increased even though a larger amount of power is supplied to the unit light emitting unit 20 in which the ultraviolet ray irradiation amount is decreased, it is determined that the UV LED chip of the unit light emitting unit 20 is deteriorated, It can be determined that the amount of heat generated by the light emitting portion 20 is extremely high and the ultraviolet light emission efficiency is lowered.

If the uniformity of the ultraviolet light intensity is important, the power supplied to the other unit light emitting portions may be reduced to control the intensity of the ultraviolet light to be uniform but low. On the other hand, if both the uniformity and the intensity of ultraviolet intensity are important processes, an error signal can be generated immediately after completion of the process, so that the maintenance can be performed by the administrator.

A feature of the present invention is that the ultraviolet light intensity measurement result of the sensor module 30 described above reflects the ultraviolet light irradiation amount of the measurement target unit light emitting portion with high reliability. Therefore, the control of the unit light emitting unit based on such measured values can bring about a very precise control result, and thus it is possible to maintain the ultraviolet intensity very uniformly.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the invention is not limited to the disclosed exemplary embodiments. It is obvious that a transformation can be made. Although the embodiments of the present invention have been described in detail above, the effects of the present invention are not explicitly described and described, but it is needless to say that the effects that can be predicted by the configurations should also be recognized.

10: Base
11: Cooling line
20: Unit emitting part (UV LED chip, UV LED array)
21:
22: Light emitting axis
30: Sensor module
40: Module housings
41: Body housing
411:
412: Sensor substrate mounting part
4122: accommodation space
45: Extension housing
451: first extension housing
452: second extension housing
46: hollow hole
466:
47:
48: Front
50:
51: sensor substrate
52: UV sensor (illuminance sensor)
522: light receiving surface
60: Optical fiber
61:
611:
62:
63:
633:
70: end focusing lens
71: center axis
80: end focusing lens
81: Cylindrical central axis
90: Interface module
91: Cable

Claims (20)

A sensor module (30) provided at a side of a plurality of unit light emitting units (20) provided on a base (10) for measuring the intensity of ultraviolet light emitted from individual unit light emitting units,
The sensor module (30) comprises:
A sensor unit 50 for sensing intensity of ultraviolet rays;
An optical fiber 60 for transmitting ultraviolet light emitted from the unit light emitting unit 20 to the sensor unit 50;
And a module housing (40) supporting the sensor unit (50) and the optical fiber (60)
The module housing (40) comprises:
A body housing 41 including a sensor substrate mounting part 412 on which the sensor part 50 is mounted and a supporting part 411 for providing a structure for fixing the sensor module 30 to a predetermined position;
And an extension housing 45 extending from the body housing 41 in a direction approaching the unit light emitting unit and having a hollow hole 46 for receiving the optical fiber 60 in an extending direction thereof,
The distal end portion 61 of the optical fiber 60 is exposed through the front end opening 47 of the elongated housing 45 so as to face the individual unit light emitting portion and the distal end portion 63 of the optical fiber 60 is exposed to the sensor portion 50).
The method according to claim 1,
Wherein a terminal central axis 633 of the distal end portion 63 of the optical fiber 60 intersects the light receiving surface 522 of the UV sensor 52 of the sensor portion 50. [
The method according to claim 1,
And the hollow hole (46) includes a direction switching portion (466) in which the extending direction is switched.
The method according to claim 1,
Wherein the distal end portion (61) of the optical fiber (60) is located inside the housing extending beyond the front surface (48) of the elongate housing (45).
The method according to claim 1,
Wherein the front surface (48) of the extension housing (45) projects further forward than the tip (61) of the optical fiber (60).
The method according to claim 1,
Wherein the inner surface of the hollow hole (46) comprises aluminum.
A sensor module (30) provided at a side of a plurality of unit light emitting units (20) provided on a base (10) for measuring the intensity of ultraviolet light emitted from individual unit light emitting units,
The sensor module (30) comprises:
A sensor unit 50 for sensing intensity of ultraviolet rays;
An optical fiber 60 for transmitting ultraviolet light emitted from the unit light emitting unit 20 to the sensor unit 50;
And a module housing (40) supporting the sensor unit (50) and the optical fiber (60)
The module housing (40) includes a front opening (47) serving as a passage through which the ultraviolet light is incident to the optical fiber (60)
Wherein the optical fiber has an incident cross-sectional area larger than a cross-sectional area of the optical fiber, the ultraviolet light being incident on the optical fiber through the incident cross- And the optical fiber 60 is provided between the distal end portion 63 of the optical fiber 60 and the sensor portion 50 in the module housing 40 or the end condensing lens 70 that condenses the ultraviolet light emitted from the optical fiber 60, And a condenser lens (80) for condensing light to the sensor unit (50).
The method of claim 7,
And the front end condensing lens (70) includes a double-sided convex lens exposed to the individual unit light emitting portion at the front end opening (47).
The method of claim 8,
Wherein a center axis (71) of the end condensing lens (70) and a distal center axis (611) of the optical fiber (60) intersect each other.
The method of claim 7,
The end condenser lens 80 includes a cylindrical lens,
Wherein the distal end portion (63) of the optical fiber (60) and the sensor portion (50) face each other to face the cylindrical portion of the cylindrical lens.
The method of claim 10,
When the distal center axis 633 of the optical fiber 60 is offset from the center axis 81 of the distal focusing lens 80 in the direction that coincides with the distal center axis 611, And the cylindrical center axis 81 of the optical fiber 60 is disposed on the same plane as the center axis 71 of the front end condensing lens 70 and the distal center axis 611 of the optical fiber 60. [
A base 10;
A plurality of unit light emitting units 20 mounted on the base; And
And a sensor module (30) according to any one of claims 1 to 11, provided at a side of the plurality of unit light emitting portions (20)
The distal end portion 61 of the optical fiber 60 of the sensor module 30 is positioned within the irradiation angle range of the individual unit light emitting portion 20 to be measured and the unit light emitting portion 20 adjacent to the individual unit light emitting portion 20 to be measured Is located at a first position out of the irradiation angle range of the light source (20)
The front opening (47) of the sensor module (30) looks at the individual unit light emitting portion (20) to be measured at the first position.
The method of claim 12,
The distal end central axis 611 of the distal end portion 61 of the optical fiber 60 or the central axis 71 of the distal end condensing lens 70 intersects the light emitting surface 21 of the individual unit light emitting portion 20 to be measured Wherein said ultraviolet irradiator assembly comprises:
The method of claim 12,
The sensor module 30 is installed in two or more individual unit light emitting units 20,
The module housing 40 includes a body housing 41 in which the sensor unit 50 is installed and an extension housing 45 in which the optical fiber 60 is installed,
The body housing 41 is disposed farther from the unit light emitting portion 20 to be measured than the extension housing 45 extending from the body housing 41,
Wherein the body housing (41) is disposed closer to the individual unit light emitting portion (20) to be measured out of the individual unit light emitting portions (20) to be measured and the unit light emitting portions (20) adjacent thereto.
The method of claim 12,
Wherein the sensor module (30) is provided so as to be capable of approaching and retreating from the individual unit light emitting portion (20) to be measured.
The method of claim 12,
Wherein the individual unit light emitting portion (20) is a UV LED chip or a UV LED array.
The method of claim 12,
Wherein the individual unit light emitting units (20) are individually replaceable or individually controlled to be powered.
The method of claim 12,
The module housing 40 includes a body housing 41 in which the sensor unit 50 is installed and an extension housing 45 in which the optical fiber 60 is installed,
Wherein the extending direction of the extension housing (45) intersects the light emitting axis (22) of the unit light emitting portion (20) and is parallel to the base (10).
The method of claim 12,
An interface module 90 for controlling the power supplied to the unit light emitting unit 20 is installed on the back surface of the base 10 based on the ultraviolet ray measurement value measured by the sensor module 30
Ultraviolet irradiator assembly.
The method of claim 19,
The base 10 is provided with a cooling line 11 for cooling the plurality of unit light emitting units 20 so as to prevent the heat generated in the unit light emitting units 20 from being transmitted to the interface module 90. [ Irradiation device assembly.

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