KR101950027B1 - Remote plasma generator - Google Patents

Abstract

The present invention relates to a remote plasma generator capable of preventing noise. The remote plasma generator comprises: a reactor transforming a gas introduced from the outside into a plasma state by using a transformer coupled plasma (TCP); a magnetic core formed to surround at least a part of the reactor; a winding coil surrounding at least a part of the magnetic core to induce a magnetic field in the magnetic core; a plurality of circuit boards mounted around the reactor to control power applied to the winding coil in order to control the transformer coupled plasma; and at least one link card including a printed circuit board on which a wiring circuit is formed to electrically connect at least one pair of circuit boards of the plurality of circuit boards wherein at least one pair of connection terminals capable of being coupled to the at least one pair of circuit boards are formed on the printed circuit board.

Description

A remote plasma generator

The present invention relates to a plasma apparatus, and more particularly, to a plasma apparatus for generating plasma of an active gas containing ions, free radicals, atoms and molecules by a plasma discharge, and plasma processing of solids, powders, To a plasma generator.

Generally, plasma discharges are used for gas excitation to generate active gases including ions, free radicals, atoms, and molecules. Active gases are widely used in various fields and are typically used in a variety of semiconductor manufacturing processes such as etching, deposition, cleaning, and etching.

The conventional remote plasma generator generally comprises a tube-shaped plasma chamber, a magnetic core configured to surround the tube-shaped plasma chamber, a transformer primary winding supplied with power from the AC power source, a plasma from the plasma chamber And a process chamber to which the process gas is supplied.

At this time, in order to control devices for supplying plasma to the process chamber, such as supplying power to the transformer, controlling the opening and closing of the chamber, and controlling the frequency, a main control board, a tank board, Inverter board and Rectifier board are usually connected to each board by using cables. These cable connections cause vibration or noise in the equipment. There is a problem that noise may be included in power supply and data transmission.

Further, there is a problem that when the plasma is generated, the temperature of the reactor becomes high and the plasma state becomes unstable.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and it is an object of the present invention to provide a printed circuit board capable of transmitting power and data, .

In addition, in order to prevent unstable plasma state due to the heat generation of the reactor, to prevent an abnormality of the apparatus, to change the apparatus, and to facilitate maintenance and repair, a plate- So that cooling can be performed between the reactor and each board. However, these problems are exemplary and do not limit the scope of the present invention.

According to one aspect of the invention, a remote plasma generator is provided. The remote plasma generator includes a reactor for transforming a gas introduced from the outside into a plasma state using a transformer coupled plasma (TCP); A magnetic core formed to surround at least a portion of the reactor; A winding coil surrounding at least a portion of the magnetic core to induce a magnetic field in the magnetic core; A plurality of circuit boards mounted around the reactor to control power applied to the winding coil to control the transformer coupled plasma; And a printed circuit board formed with a wiring circuit for electrically connecting at least a pair of circuit boards of the plurality of circuit boards, wherein at least one pair And at least one link card having connection terminals of the link card.

In the remote plasma generator, the at least one pair of connection terminals of the at least one link card may include: a first connection terminal formed at one end of the printed circuit board; And a second connection terminal formed at the other end of the printed circuit board.

In the remote plasma generator, the at least one pair of circuit boards are each provided with a socket portion for electrical connection at positions facing each other, and the at least one pair of connection terminals are connected to the socket portion of the at least one pair of circuit boards The inserts can be combined.

In the remote plasma generator, the plurality of circuit boards may include: a main control board for controlling a main power supply; A first auxiliary circuit board electrically connected to the main control board and including a resonant network circuit; A second auxiliary circuit board electrically connected to the main control board and including a rectifying circuit portion; And a third auxiliary circuit board electrically connected to the main control board and including an inverter circuit portion, wherein the at least one link card includes a first auxiliary circuit board electrically connecting the main control board and the first auxiliary circuit board 1 link card; A second link card electrically connecting the main control board and the second auxiliary circuit board; And a third link card electrically connecting the main control board and the third auxiliary circuit board.

In the remote plasma generator, the main control board is installed on a front surface of the reactor and has a first socket portion for connecting to the first link card, a second socket portion for connecting to the second link card, And third socket portions for connection to the third link card.

In the remote plasma generator, the first auxiliary circuit board is provided between the main control board and the front surface of the reactor, and has a fourth socket portion to be connected to the first link card on one surface thereof, And the fourth socket portion may be disposed to face each other so that the first link card can be inserted with the insert.

Wherein the second auxiliary circuit board is provided on one side of the reactor and has a fifth socket portion for connecting to the second link card on a side thereof, And a sixth socket portion to be connected to the third link card on a side of the second socket portion and the fifth socket portion, wherein the second socket portion and the fifth socket portion are provided on opposite sides of the second link card so as to insert the insert, And the third socket portion and the sixth socket portion may be disposed so as to face each other so that the third link card can be inserted into the insert.

The remote plasma generator may further include a reactor cooling channel formed on an outer wall of the reactor to lower the temperature of the reactor.

A first cooling panel formed between the magnetic core and the second auxiliary circuit board and having a first cooling channel therein for cooling the second auxiliary circuit board in the remote plasma generator; And a second cooling panel formed between the magnetic core and the third auxiliary circuit board and having a second cooling channel therein for cooling the third auxiliary circuit board.

In the remote plasma generator, the first cooling channel and the second cooling channel have respective cooling water outlets so that the first cooling panel and the second cooling panel are heat-exchanged respectively, or the first cooling channel and the second cooling channel are heat- The second cooling passage has a common cooling water inlet and outlet, and the cooling water flows in and circulates through the first cooling panel and the second cooling panel to perform heat exchange and flow out.

The remote plasma generator may further include a third cooling panel formed outside the magnetic core for cooling the magnetic core and having a third cooling channel therein.

According to an embodiment of the present invention as described above, the link card capable of transmitting power and data can be used as a cable to prevent vibration and noise generated by the cable, thereby preventing occurrence of noise. , It is easy to assemble the chamber and the board or each of the boards, and maintenance can be facilitated.

Further, in addition to the reactor cooling channels used in the past, the plate-shaped cooling panel is cooled between the reactor and the respective boards, thereby preventing the apparatus from malfunctioning due to heat generation, and facilitating maintenance and repair. Of course, the scope of the present invention is not limited by these effects.

1 is an assembled perspective view illustrating a remote plasma generator according to an embodiment of the present invention.
2 is a perspective view illustrating a remote plasma generator according to an embodiment of the present invention.
3 is a perspective view showing a link card according to an embodiment of the present invention.
4 is a conceptual diagram illustrating a connection structure between a main control board and each board according to an embodiment of the present invention.
5 is a conceptual diagram illustrating a connection structure between a main control board and each board according to another embodiment of the present invention.
6 is a perspective view illustrating a cooling panel according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are described in order to more fully explain the present invention to those skilled in the art, and the following embodiments may be modified into various other forms, It is not limited to the embodiment. Rather, these embodiments are provided so that this disclosure will be more thorough and complete, and will fully convey the concept of the invention to those skilled in the art. In the drawings, the thickness and size of each layer are exaggerated for convenience and clarity of explanation.

It is to be understood that throughout the specification, when an element such as a film, region or substrate is referred to as being "on", "connected to", "laminated" or "coupled to" another element, It will be appreciated that elements may be directly "on", "connected", "laminated" or "coupled" to another element, or there may be other elements intervening therebetween. On the other hand, when one element is referred to as being "directly on", "directly connected", or "directly coupled" to another element, it is interpreted that there are no other components intervening therebetween do. Like numbers refer to like elements. As used herein, the term "and / or" includes any and all combinations of one or more of the listed items.

Although the terms first, second, etc. are used herein to describe various elements, components, regions, layers and / or portions, these members, components, regions, layers and / It is obvious that no. These terms are only used to distinguish one member, component, region, layer or section from another region, layer or section. Thus, a first member, component, region, layer or section described below may refer to a second member, component, region, layer or section without departing from the teachings of the present invention.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a," "an," and "the" include singular forms unless the context clearly dictates otherwise. Also, " comprise "and / or" comprising "when used herein should be interpreted as specifying the presence of stated shapes, numbers, steps, operations, elements, elements, and / And does not preclude the presence or addition of one or more other features, integers, operations, elements, elements, and / or groups.

Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically showing ideal embodiments of the present invention. In the figures, for example, variations in the shape shown may be expected, depending on manufacturing techniques and / or tolerances. Accordingly, the embodiments of the present invention should not be construed as limited to the particular shapes of the regions shown herein, but should include, for example, changes in shape resulting from manufacturing.

FIG. 1 is an exploded perspective view showing a remote plasma generator 1000 according to an embodiment of the present invention, and FIG. 2 is an assembled perspective view of FIG.

1 and 2, a remote plasma generator 1000 includes a reactor 100, a magnetic core 200, a winding coil 300, a plurality of circuit boards 400, a link card (not shown) 500).

The reactor 100 may be a transformer coupled plasma (TCP) to convert the gas introduced from the outside into a plasma state. More specifically, for example, the reactor may include a plasma reactor assembled into a vertical chamber and a horizontal chamber, and since each of the vertical chambers can be equipped with a magnetic core 200 having a primary winding, Of the active gas. Reactor 100 may be recycled to a metal material, such as aluminum, stainless steel, copper, or a coated metal, such as anodized aluminum or nickel plated aluminum.

In addition, although not shown in the drawing, an insulating gap (not shown) may be formed at a proper position when the reactor 100 is made of a metal material as a whole, and the structure of the reactor 100 may be changed depending on the substrate to be processed, It may have a suitable structure for uniform generation, for example, a circular structure or a rectangular structure, and any other type of structure.

The magnetic core 200 may be formed to enclose at least a portion of the reactor 100. Specifically, for example, the magnetic core 200 may be formed in a shape that surrounds a portion of the reactor 100 to provide an electromotive force for forming a plasma in a plasma discharge space formed in the reactor 100.

The winding coil (not shown) may be formed to surround at least a part of the magnetic core 200 so that a magnetic field is induced in the magnetic core 200. More specifically, the winding coil can be formed so that a portion of the magnetic core 200 is wound once more, so that when a power is applied to the winding coil, a magnetic field is induced in the magnetic core 200, 0.0 > 100). ≪ / RTI >

The plurality of circuit boards 400 may be installed around the reactor 100 to control the power applied to the winding coils to control such transformer coupled plasma, for example, the first auxiliary circuit board 410, An auxiliary circuit board 420, and a third auxiliary circuit board 430.

More specifically, for example, the circuit boards 400 include a main control board 410 for controlling the main power supply, a first auxiliary circuit 410 electrically connected to the main control board 410 and including a resonant network circuit, A second auxiliary circuit board 430 electrically connected to the main control board 410 and including a rectifying circuit part and a third auxiliary circuit board 430 electrically connected to the main control board 410 and including an inverter circuit part, Circuit board 440 as shown in FIG.

For example, the main control board 410 can control the operation of at least one of the reactor 100, the magnetic core 200, the winding coil 300, and the reactor cooling flow passage 400 by controlling the main power source have.

The first auxiliary circuit board 420 may be a tank board including a resonant network circuit portion. The tank board may be connected between the main control board 410 to which the main power is connected and the winding coils to which power is applied, and may be added for impedance matching so as to increase the power efficiency applied to the magnetic core 200.

The second auxiliary circuit board 430 may be an inverter board including an inverter circuit portion. The third auxiliary circuit board 440 may be a rectifier board including a rectifier circuit portion. The inverter board and the rectifier board may be used to rectify AC power input from the main control board 410 to generate RF switching mode power at a predetermined frequency. The thus generated switching mode power source can be applied to the winding coils wound around the magnetic core 200.

At least one pair of these circuit boards 400 may be electrically connected to each other using at least one link card 500. The link card 500 includes a printed circuit board 510 on which a wiring circuit is formed to electrically connect at least a pair of circuit boards of the plurality of circuit boards 400, At least one pair of connection terminals 520, each of which can be coupled to the circuit boards, may be formed. For example, the link card 500 may be provided as a printed circuit board (PCB) in which conductive wirings are formed on an insulating core.

The link card 500 includes a first link card 500a for electrically connecting the main control board 410 and the first auxiliary circuit board 420 and a second link card 500b for electrically connecting the main control board 410 and the second auxiliary circuit board 430 And a third link card 500c for electrically connecting the main control board 410 and the third auxiliary circuit board 440 to each other.

A pair of connection terminals 520 of the link card 500 are connected to the socket portions of the circuit boards 400 by inserts .

For example, the main control board 410 is installed on the front surface of the reactor 100 and includes a first socket portion 600a, a second link card 500b, A second socket portion 600b to be connected to the third link card 500c, and a third socket portion 600c to be connected to the third link card 500c.

The first auxiliary circuit board 420 includes a fourth socket portion 600d provided between the main control board 410 and the front surface of the reactor 100 and connected to the first link card 500a on one side thereof The first socket portion 600a and the fourth socket portion 600d may be disposed so as to face each other so that the first link card 500a can be insert-inserted.

3, the at least one pair of connection terminals 520 of the first link card 500 includes a first connection terminal 521 formed at one end of the printed circuit board 510, 510 may include a second connection terminal 522 formed at the other end thereof.

The second auxiliary circuit board 430 is provided on one side of the reactor 100 and includes a fifth socket portion 600e for connecting to the second link card 500b on the side surface thereof, 600b and the fifth socket portion 600e may be disposed to face each other so that the second link card 500b can be inserted. Although not shown, the second link card 500b may include a first connection terminal and a second connection terminal as connection terminals, similar to the first link card 500a shown in FIG.

The third auxiliary circuit board 440 is provided on the other side of the reactor 100 and includes a sixth socket portion 600f to be connected to the third link card 500c on the side surface thereof, 600c and the sixth socket portion 600f may be arranged so as to face each other so that the third link card 500c can be insert-inserted. Although not shown, the third link card 500c may include a first connection terminal and a second connection terminal as connection terminals, similar to the first link card 500a shown in FIG.

The above-described link card 500 is for transmitting pre-stored data through data transmission at a predetermined speed. The link card 500 is easier to assemble than a conventional cable, has a high communication speed, is simple in use, And can be used as a connection device for various circuit boards 400 inside the remote plasma generator.

4 and 5 are conceptual diagrams illustrating a connection structure between a main control board and each board according to various embodiments of the present invention.

4, the first auxiliary circuit board 420 may be formed on one side of the reactor 100 to be electrically connected to the main control board 410, and the second auxiliary circuit board 430 may be electrically connected to the reactor The third auxiliary circuit board 440 may be formed on one side of the reactor 100 and electrically connected to the main control board 410. The third auxiliary circuit board 440 may be formed on the other side of the reactor 100 and electrically connected to the main control board 410 have.

The first link card 500a may be formed of a printed circuit board to connect the main control board 410 and the first auxiliary circuit board 420 and the second link card 500b may be formed of a main control board 410, And the third link card 500c may be formed as a printed circuit board so as to be able to connect the main control board 410 and the third auxiliary circuit board 430, Circuit board.

More specifically, for example, the first auxiliary circuit board 420, the second auxiliary circuit board 430, and the third auxiliary circuit board 440 may include a first link card 500a, a second link card 500b, And may be connected to the main control board 410 using the third link card 500c.

5, the second auxiliary circuit board 430 and the third auxiliary circuit board 440 are connected to the first and second auxiliary circuit boards 500a and 500b using the second link card 500b and the third link card 500c, The first auxiliary circuit board 420 may be connected to the main control board 410 by using the first link card 500a and may be connected to the first auxiliary circuit board 420 through the main control board 410. [ 420 can be operated.

The main control board 410 may be formed on the cover of the remote plasma generator and may include the reactor, the magnetic core, the winding coil, the second auxiliary circuit board 430, And the first auxiliary circuit board 420 coupled to the third auxiliary circuit board 440 is connected and replaced only with the first link card 500a to test and operate.

As shown in FIG. 1, the reactor cooling channel 700 may be formed on the outer wall of the reactor 100 to lower the temperature of the reactor.

More specifically, for example, the reactor cooling channel 700 may be formed by forming a channel and an oil / gas outlet so that the fluid flows in order to lower the temperature of the reactor 100 along the plasma generation region outside the reactor 100, Can be circulated. Although not shown, the reactor cooling channel 700 is formed inside the reactor 100 along the plasma generating region, so that the cooling water is circulated along the reactor cooling channel 700 to increase the temperature at the time of plasma generation Can be prevented.

That is, the reactor cooling passage 700 may be formed outside the reactor 100 so as to absorb heat from all sides of the reactor 100 as well as the reactor 100, or may be provided with a hollow wall, .

6 is a perspective view illustrating a cooling panel according to an embodiment of the present invention.

As shown in FIGS. 1 and 6, the remote plasma generator may include a first cooling panel 810, a second cooling panel 820, and a third cooling panel 830.

The first cooling panel 810 is formed between the magnetic core 200 and the second auxiliary circuit board 430 for cooling the second auxiliary circuit board 430 and includes a first cooling channel 811 And the second cooling panel 820 may be formed between the magnetic core 200 and the third auxiliary circuit board 440 for cooling the third auxiliary circuit board 440, And the third cooling panel 830 may be formed outside the magnetic core 200 for cooling the magnetic core 200 and have a third cooling channel 831 therein.

6, the first cooling passage 811 and the second cooling passage 821 have respective cooling water outlets, so that the first cooling panel 810 and the second cooling panel 820 perform heat exchange Or the first cooling passage and the second cooling passage have a common cooling water inlet and outlet so that the cooling water flows in and circulates through the first cooling panel 810 and the second cooling panel 820 to perform heat exchange, .

More specifically, for example, the first cooling passage 811, the second cooling passage 821, and the third cooling passage 823 are connected to each other through a connection pipe, and the first cooling panel 810, Cooling water flows into the first cooling passage 811, the second cooling passage 821 and the third cooling passage 823 through the inlet formed in any one of the first cooling passage 820 and the third cooling panel 830, The cooling water may flow out through an outlet formed in any one of the first cooling panel 810, the second cooling panel 820, and the third cooling panel 830.

The first cooling panel 810, the second cooling panel 820, and the third cooling panel 830 form one integrated inlet and one integrated outlet, so that the cooling circulation can be performed.

The first cooling panel 810, the second cooling panel 820, and the third cooling panel 830 include an inlet port and an outlet port formed in the respective cooling panels, and the first cooling panel 810, the second cooling panel 820, The second cooling flow path 821, and the third cooling flow path 823 can individually inflow and outflow the cooling water, thereby further enhancing the cooling effect.

Although not shown, the first cooling passage 811, the second cooling passage 821 and the third cooling passage 823 are connected to the reactor cooling passage 400 so that the inflow and outflow of the cooling water are one inlet and one As shown in FIG.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

100: Reactor
200: magnetic core
400: a plurality of circuit boards
410: Control board
420: first auxiliary circuit board
430: second auxiliary circuit board
440: Third auxiliary circuit board
500, 500a, 500b, 500c: Link card
510: printed circuit board
520: a pair of connection terminals
521: first connection terminal
522: second connection terminal
600, 600a, 600b, 600c, 600d, 600e, 600f:
700: Reactor cooling channel
810: first cooling panel
811: first cooling flow passage
820: Second cooling panel
821: second cooling flow passage
830: third cooling panel
831: Third cooling flow path

Claims (11)

A reactor for transforming a gas introduced from the outside into a plasma state by using a transformer coupled plasma (TCP: Transformer Coupled Plasma);
A magnetic core formed to surround at least a portion of the reactor;
A winding coil surrounding at least a portion of the magnetic core to induce a magnetic field in the magnetic core;
A plurality of circuit boards mounted around the reactor to control power applied to the winding coil to control the transformer coupled plasma; And
And a printed circuit board on which a wiring circuit is formed to electrically connect at least a pair of circuit boards of the plurality of circuit boards, wherein at least one pair of circuit boards each capable of being coupled to the at least one pair of circuit boards At least one link card having connection terminals formed therein;
Lt; / RTI >
The plurality of circuit boards may include:
A main control board for controlling main power;
A first auxiliary circuit board electrically connected to the main control board and including a resonant network circuit;
A second auxiliary circuit board electrically connected to the main control board and including a rectifying circuit portion; And
And a third auxiliary circuit board electrically connected to the main control board and including an inverter circuit portion,
Wherein the at least one link card comprises:
A first link card electrically connecting the main control board and the first auxiliary circuit board;
A second link card electrically connecting the main control board and the second auxiliary circuit board; And
A third link card electrically connecting the main control board and the third auxiliary circuit board;
And a remote plasma generator. The method according to claim 1,
The at least one pair of connection terminals of the at least one link card,
A first connection terminal formed at one end of the printed circuit board; And
A second connection terminal formed at the other end of the printed circuit board;
And a remote plasma generator. The method according to claim 1,
Wherein at least a pair of circuit boards are provided with socket portions for electrical connection at positions opposite to each other,
Wherein the at least one pair of connection terminals are insert bonded to the socket portion of the at least one pair of circuit boards. delete The method according to claim 1,
The main control board is installed on the front surface of the reactor and has a first socket portion for connecting to the first link card, a second socket portion for connecting to the second link card, Wherein the first and second sockets are configured to receive the first and second sockets. The method according to claim 1,
Wherein the first auxiliary circuit board is provided between the main control board and the front surface of the reactor and has a fourth socket portion on one surface thereof for connecting to the first link card,
Wherein the first socket portion and the fourth socket portion are disposed opposite to each other so that the first link card can be insert-inserted. 6. The method of claim 5,
The second auxiliary circuit board is provided on one side of the reactor and includes a fifth socket portion on a side surface thereof for connecting to the second link card,
The third auxiliary circuit board is provided on the other side of the reactor and includes a sixth socket portion on a side surface thereof for connecting to the third link card,
The second socket portion and the fifth socket portion are disposed so as to face each other so that the second link card can be inserted therein, and the third socket portion and the sixth socket portion are provided so as to insert the third link card A remote plasma generator positioned opposite to each other. The method according to claim 1,
A reactor cooling passage formed on the outer wall of the reactor to lower the temperature of the reactor;
Further comprising: a remote plasma generator. 9. The method of claim 8,
A first cooling panel formed between the magnetic core and the second auxiliary circuit board for cooling the second auxiliary circuit board and having a first cooling channel therein; And
A second cooling panel formed between the magnetic core and the third auxiliary circuit board and having a second cooling channel therein for cooling the third auxiliary circuit board;
Further comprising a remote plasma generator. 9. The method of claim 8,
Wherein the first cooling channel and the second cooling channel have respective cooling water outlets so that heat exchange is performed between the first cooling panel and the second cooling panel or the first cooling channel and the second cooling channel Wherein the first cooling panel and the second cooling panel circulate through the first cooling panel and the second cooling panel to exchange heat and flow out. The method according to claim 1,
A third cooling panel formed outside the magnetic core for cooling the magnetic core and having a third cooling channel therein;
Further comprising a remote plasma generator.

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