KR101937393B1 - Laser oscillator and laser designator - Google Patents

Abstract

A laser resonator for selectively emitting a laser beam according to a target is disclosed. The laser resonator of the present invention includes a laser beam generation part including a laser medium for generating a laser beam, a plurality of optical modulators for modulating the generated laser beam, a first optical path adjusting part for adjusting the optical path of the generated laser beam to allow the generated laser beam to be emitted to one of the plurality of optical modulators, a reflection part for reflecting the modulated laser beam by the laser medium and transmitting an energy-amplified laser beam; and a second optical path adjusting part for adjusting the optical path to output the transmitted laser beam. Therefore, the laser resonator can selectively emit the desired laser beam according to the target.

Description

[0001] LASER OSCILLATOR AND LASER DESIGNATOR [0002]

The present invention relates to a laser resonator and a laser irradiator. More particularly, the present invention relates to a laser resonator and a laser irradiator for selectively irradiating a laser beam according to a target.

Generally, a solid-state laser is used to generate a high-peak output laser beam in a single resonator. Solid-state lasers represent lasers in which a solid containing active atoms in a single crystal glass is used as a laser medium. Excitation of the solid-state laser is performed by optical excitation, and a flash lamp or an arc lamp is used as the excitation light source.

However, in general, a laser beam output in a single resonator is capable of outputting a laser beam having a low peak power but outputting a laser beam having a high peak power, or outputting a laser beam having a low peak but outputting a high peak power. There is a problem that it can not be output selectively. Therefore, there is a need for a technique capable of irradiating a laser beam to a specific application, such as for civil use or for residential use.

Also, an optical amplifier is used to increase the size of the laser beam in a single resonator. An excitation beam is incident on a crystal, which is a medium for an optical amplifier, and a laser beam is passed through the crystal to obtain an amplified laser beam. However, when a high excitation beam is incident on the crystal to increase the laser output, heat birefringence occurs inside the crystal, which causes a problem of reducing the laser output. Accordingly, there is a need for a technique for amplifying a laser beam by actively compensating for heat birefringence generated in a medium for an optical amplifier.

In addition, even when the laser beam is amplified by the optical amplifier, the size of the finally output laser beam is fixed. Therefore, there is a problem that the expandability is poor when a laser beam is irradiated to various targets.

The present invention is to actively compensate for the thermal birefringence phenomenon that occurs when a laser amplifier is used in order to irradiate an appropriate laser beam according to a target and amplify the laser beam. In order to oscillate a laser beam according to a target, a plurality of optical modulators And a laser beam is oscillated by adjusting the optical path of the laser beam so as to select one of the optical modulators. In order to amplify the laser oscillated by the laser resonator, the laser beam is amplified by a probe beam and a phase- The laser beam can be compensated actively.

According to an aspect of the present invention, there is provided a laser resonator comprising: a laser beam generator for generating a laser beam using a pumping laser beam source for emitting a pumping laser beam for pumping a laser medium; A plurality of optical modulators for modulating the generated laser beam; A first optical path control unit for controlling the first optical path such that a first optical path, which is an optical path of the generated laser beam, is directed to one of the plurality of optical modulators; And a reflector for reflecting the laser beam modulated by the optical modulator facing the adjusted first optical path to the pumped laser medium to amplify the energy of the modulated laser beam, ; ≪ / RTI >

Wherein the plurality of optical modulators include a first optical modulator that modulates the generated laser beam using a change in refractive index generated by ultrasonic vibration; And a second optical modulator for modulating the generated laser beam using a refractive index change caused by a voltage application.

The first optical path adjusting unit may include a first rotating mirror for reflecting or passing the generated laser beam using rotation to adjust the first optical path.

The first light path control unit may include a first rotation angle measuring unit for measuring a first rotation angle to be rotated such that the first rotating reflector reflects or passes the generated laser beam; And a first rotation angle adjuster for rotating the first rotary reflector at the measured first rotation angle.

The first rotation angle measuring device may measure the first rotation angle using the reflected light reflected by the projected parallel light.

Wherein the laser beam generator generates the laser beam by continuously operating the laser beam source when the first optical path is adjusted so that the generated laser beam is incident on the first optical modulator, When the first optical path is adjusted so as to be incident on the second optical modulator, the laser light source may be operated in a pulse type to generate the laser beam.

And a second optical path adjusting unit adjusting the second optical path, which is an optical path of the transmitted laser beam, to output the transmitted laser beam, and the second optical path adjusting unit adjusts the second optical path A second rotating reflector for reflecting or passing the transmitted laser beam using rotation; A second rotation angle measuring unit for measuring a second rotation angle to be rotated so that the second rotating reflector reflects or passes the transmitted laser beam; And a second rotation angle adjusting unit that rotates the second rotating mirror at the measured second rotation angle.

According to an aspect of the present invention, there is provided a laser irradiator including: a laser resonator for outputting a laser beam; And a laser amplifier for amplifying the output laser beam, wherein the laser resonator uses a first pumping laser light source for emitting a first pumping laser beam for pumping a first laser medium, A beam generator; A plurality of optical modulators for modulating the generated laser beam; A first optical path control unit for controlling the first optical path such that a first optical path, which is an optical path of the generated laser beam, is directed to one of the plurality of optical modulators; The laser beam modulated by the optical modulator facing the adjusted first optical path is reflected by the pumped first laser medium to amplify the energy of the modulated laser beam and reflected by the laser beam transmitted through the amplified laser beam part; And a second optical path adjusting unit adjusting the second optical path, which is an optical path of the transmitted laser beam, to output the transmitted laser beam.

Wherein the laser amplifier comprises: a second laser medium for amplifying the output laser beam; A second pumping laser light source for emitting a second pumping laser beam for pumping the second laser medium; A probe beam oscillation unit for oscillating a probe beam in a first polarization direction so as to be incident on the pumped second laser medium; Wherein the oscillating probe beam incident on the second laser medium is a probe beam phase difference measurement that measures a first phase difference indicative of a degree of conversion of a first polarization direction of the oscillated probe beam generated through the second laser medium part; And a phase difference compensation modulator for compensating for the measured first phase difference and converting the polarization direction of the probe beam having the polarization direction changed through the second laser medium to the first polarization direction, The compensated first phase difference may be used to compensate for the second phase difference generated when the output laser beam passes through the second laser medium.

Wherein the laser amplifier further comprises a laser beam position sensing detector for determining a position of the output laser beam, wherein the phase difference compensation modulator uses the compensated first phase difference according to the determined position of the output laser beam So that the output laser beam can compensate for the second phase difference generated when passing through the second laser medium.

The phase difference compensation modulator may compensate the first phase difference and the second phase difference using a refractive index change caused by voltage application.

Wherein the laser amplifier further comprises a lens for focusing the second pumping laser beam, the lens having a radius of curvature adjustable to focus the second pumping laser beam at a diameter equal to the diameter of the output laser beam have.

And a laser beam size controller for controlling the size of the amplified laser beam.

According to an embodiment of the present invention, a laser beam having a high pulse repetition rate but a low peak output is irradiated or a laser beam having a low pulse repetition rate but a high peak output is selectively irradiated according to a target, Can be selected and used.

In addition, since the thermal birefringence phenomenon of the laser amplifier can be actively controlled according to an embodiment of the present invention, even if the laser beam output from the laser resonator continuously changes from a low output to a high output, active birefringence is compensated actively, You can compensate.

Also, the size of the laser beam can be controlled according to the size and position of the target according to an embodiment of the present invention.

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned can be clearly understood to those of ordinary skill in the art from the following description.

1 is a block diagram schematically showing a configuration of a laser irradiation apparatus according to an embodiment of the present invention.
2 is a block diagram schematically showing the configuration of a laser resonator according to an embodiment of the present invention.
3 is a block diagram schematically illustrating the configuration of a first optical path control unit included in a laser resonator according to an embodiment of the present invention.
4 is a block diagram schematically illustrating the configuration of a plurality of optical modulators according to an embodiment of the present invention.
5 is a block diagram schematically illustrating a configuration of a second optical path control unit according to an embodiment of the present invention.
6A and 6B are views for explaining the operation of the laser resonator according to an embodiment of the present invention.
7 is a block diagram schematically showing the configuration of a laser amplifier according to an embodiment of the present invention.
8A to 8C are views for explaining the operation of the laser amplifier according to an embodiment of the present invention.
9A and 9B are views for explaining the operation of a laser irradiation apparatus according to an embodiment of the present invention.
Figures 10-12 illustrate a flow chart for illustrating a method of aiming a laser at a target in accordance with an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention and the manner of achieving them will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

Unless defined otherwise, all terms (including technical and scientific terms) used herein may be used in a sense commonly understood by one of ordinary skill in the art to which this invention belongs. Also, commonly used predefined terms are not ideally or excessively interpreted unless explicitly defined otherwise.

The terms " first ", " second ", and the like in the present specification are for distinguishing one element from another element, and the scope of the right should not be limited by these terms. For example, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

In the present description, the identification codes (e.g., a, b, c, etc.) in each step are used for convenience of explanation, and the identification codes do not describe the order of each step, Unless you specify a specific order, it can happen differently from the order specified. That is, each step may occur in the same order as described, may be performed substantially concurrently, or may be performed in reverse order.

As used herein, the expressions " have, " " comprise, " " comprise, " or " comprise may " refer to the presence of a feature (e.g., a numerical value, a function, And does not exclude the presence of additional features.

In addition, the term 'portion' as used herein refers to a hardware component such as software or a field-programmable gate array (FPGA) or an ASIC, and 'part' performs certain roles. However, 'part' is not meant to be limited to software or hardware. &Quot; to " may be configured to reside on an addressable storage medium and may be configured to play one or more processors. Thus, by way of example, 'parts' may refer to components such as software components, object-oriented software components, class components and task components, and processes, functions, , Subroutines, segments of program code, drivers, firmware, microcode, circuitry, data structures and variables. The functions provided in the components and components may be further combined with a smaller number of components and components or further components and components.

1 is a block diagram schematically showing a configuration of a laser irradiation apparatus according to an embodiment of the present invention.

Referring to FIG. 1, a laser irradiator 10 according to an embodiment of the present invention may include a laser resonator 100, a laser amplifier 200, and a laser beam size adjuster 300.

The laser resonator 100 according to an embodiment of the present invention can output a laser beam. The laser resonator 100 may include a laser beam generator, a first optical path controller, a plurality of optical modulators, a reflector, and a second optical path controller to output a laser beam.

The laser resonator 100 according to the embodiment of the present invention can change the state of atoms included in the laser medium to output a laser beam. Specifically, each of the atoms contained in the laser medium can be excited from the outside at a stable energy level state (bottom state) to become an excited state in which the energy level is high, and atoms in the excited state are in an extremely unstable state, The laser resonator 100 can output a laser beam using the principle that light is emitted to return to a low-level stable state. A detailed description thereof will be given in Figs. 2 to 5.

The laser resonator 100 using the above-described principle can generate and output a Q-switched laser beam.

The quality factor represents the ratio of the energy loss to the stored energy in the laser resonator 100. That is, the Q value represents the reciprocal of the partial energy loss rate per oscillation period. Therefore, the smaller the energy loss rate of the laser resonator 100 is, the smaller the Q value becomes, and the reverse ratio of the threshold voltage at which the oscillation starts is reduced.

The cue-switching method is a method of releasing the energy stored in the laser medium in an increasingly short period of time. The laser beam generated by the laser medium pumped by the cue-switching method has a short pulse and a high peak power It can be a giant pulse. The peak power of the laser beam represents the energy of the laser beam divided by the pulse width.

When the laser medium included in the laser resonator 100 is continuously excited by the pumping laser light source according to an embodiment of the present invention, the density inversion becomes large, so that the laser resonator 100 oscillates the laser beam, ). Therefore, although the density reversal of the laser medium increases, the loss of the laser resonator 100 becomes larger, and the laser resonator 100 can not oscillate the laser beam.

Accordingly, the cue-switching method is a method of periodically changing the loss ratio of the laser resonator 100 in order to make the output of the laser beam into a pulse, so that a high loss ratio in the laser resonator 100 having a low Q value When the laser resonator 100 is switched to a low-loss, high-Q state again, energy is rapidly released from the laser medium, so that the laser resonator 100 has a short pulse and a high peak output power laser beam of a large pulse.

The laser resonator 100 according to an embodiment of the present invention can output a laser beam using the above-described principle.

In addition, the laser irradiator 10 according to an embodiment of the present invention may further include a control unit. The control unit can control the laser resonator 100 to output a laser beam.

The laser resonator 100 for outputting a laser beam will be described with reference to Fig. 1 with reference to Figs. 2 to 5. Fig.

2 is a block diagram schematically showing the configuration of a laser resonator according to an embodiment of the present invention.

2, a laser resonator 100 according to an exemplary embodiment of the present invention includes a laser beam generator 110, a first optical path controller 120, a plurality of optical modulators 130, 140 and a second optical path control unit 150. [

The laser beam generator 110 according to an exemplary embodiment of the present invention may include a first laser medium and a first pumping laser light source 110. The laser beam generator 110 may include a first pumping unit 110 for pumping the first laser medium, A laser beam can be generated using a first pumping laser light source that emits a laser beam.

The first pumping laser light source according to an embodiment of the present invention can change the state of atoms included in the first laser medium by emitting a pumping laser beam to the first laser medium. Specifically, each of the atoms contained in the first laser medium by the first pumping laser light source may be excited, and the first laser medium may emit a laser beam as the excited atoms emit energy.

The first pumping laser light source according to an embodiment of the present invention is a light source that excites atoms included in the first laser medium by supplying external energy to the first laser medium. The first pumping laser light source includes a laser diode, a flash lamp, a tungsten- An arc ramp, and the like may be used, but the present invention is not limited thereto.

In the laser diode, the electro-optic conversion efficiency of the laser beam is about 30% higher than that of the conventional excitation method. Therefore, the lifetime is also longer than other laser light sources. In addition, there is an advantage that the voltage for operation is different from that of the conventional laser.

The first laser medium according to an embodiment of the present invention corresponds to a material for determining the wavelength of a laser beam, and may be a solid, a liquid, a gas or a semiconductor. (Nd: YAG), ruby, glass, KCl, or RbCl may be used as the solid state laser medium. However, the present invention is not limited thereto. Various laser media for generating a laser beam by determining the wavelength of the laser beam may be used.

The plurality of optical modulators 130 according to an embodiment of the present invention can modulate the laser beam so that the laser beam generated from the laser beam generator 110 is oscillated in a pulse shape.

An optical modulator according to an embodiment of the present invention can modulate the amplitude, phase, frequency, polarization plane, or traveling direction of a laser beam signal. In particular, when the laser resonator 100 described above oscillates a laser beam without an optical modulator, each mode of the laser beam has an arbitrary phase, so that the output of the laser beam Indicates irregular fluctuations in time. Therefore, if the phase of the laser beam is the same and the mode synchronization is performed such that the interval between the respective modes is constant, the laser beam can be output at a constant time interval. When the mode of the laser beam is synchronized, a laser pulse having a short pulse width can be obtained. Therefore, the laser resonator 100 according to an embodiment of the present invention may include an optical modulator to oscillate a laser beam so that the above-described mode locking occurs. Therefore, the laser resonator 100 described above can oscillate the laser beam by applying the cue-switching method described in FIG. 1 by the optical modulator.

The laser irradiator according to an embodiment of the present invention may select one of the plurality of optical modulators 130 according to the target. Therefore, the first optical path control unit 120 controls the first optical path such that the first optical path, which is the optical path of the laser beam generated by the laser beam generating unit 110, is directed to the selected optical modulator among the plurality of optical modulators 130 The light path can be adjusted. The first optical path control unit 120 for controlling the first optical path of the laser beam generated by the laser beam generating unit 110 will be described with reference to FIG.

3 is a block diagram schematically illustrating the configuration of a first optical path control unit included in a laser resonator according to an embodiment of the present invention.

3, the first optical path adjusting unit 120 includes a first rotating reflector 121, a first rotating angle measuring unit 122, and a first rotating angle adjusting unit 123 .

The first rotating reflector 121 according to an embodiment of the present invention reflects the laser beam generated by the laser beam generator using rotation to adjust the first optical path of the laser beam generated in the laser beam generator Can pass.

Specifically, the first rotating reflector 121 may be rotated so as to reflect the laser beam generated in the laser beam generating portion such that the first optical path is directed to the selected first optical modulator among the plurality of optical modulators, The first rotating reflector 121 can rotate so that the laser beam generated in the laser beam generating unit passes through the first rotating mirror 121 so that one optical path is directed to the selected second optical modulator among the plurality of optical modulators .

Specifically, the rotation of the first rotary reflector 121 may be performed by the first rotation angle measuring unit 122 and the first rotation angle adjusting unit 123. [ The first rotation angle measuring device 122 can measure a first rotation angle at which the first rotating reflector 121 should be rotated to reflect or pass the laser beam generated in the laser beam generating portion. The first rotation angle measuring device 122 can measure the first rotation angle at which the first rotation reflector 121 rotates so as to prevent the first optical path from being changed every time the first rotation reflector 121 rotates .

The first rotation angle measuring device 122 according to the embodiment of the present invention can project parallel light to the first rotating reflector 121 and parallel light projected to the first rotating reflector 121 can be reflected by the first rotating angle & And may be reflected by the measuring device 122. The first rotation angle measuring device 122 can measure the first rotation angle of the first rotating reflector 121 using the reflected light reflected from the first rotating reflector 121. [ Accordingly, the first rotation angle measuring device 122 can detect the position of the measurement beam reflected by the reflector in a non-contact manner by using an automatic collimator Autocollimator), but the present invention is not limited thereto.

The first rotation angle adjuster 123 may adjust the first rotation reflector 121 to rotate at a first rotation angle measured by the first rotation angle meter 122. Specifically, the first rotation angle adjuster 123 controls the first rotation reflector 121 to rotate at a first rotation angle measured by the first rotation angle measurer 122 so as to align the laser beam generated by the laser beam generator Can be adjusted.

Accordingly, as the generated laser beam is reflected on the first rotating reflector 121 or the laser beam generated by rotating the first rotating reflector 121 by a predetermined angle passes through the rotated first rotating reflector 121 The generated laser beam may be incident on one of the plurality of optical modulators. Thus, the laser beam incident on the optical modulator can be modulated to oscillate in the form of a pulse.

Referring again to FIG. 2, the optical modulator whose first optical path is controlled by the first optical path control unit 120, which is a selected optical modulator among the plurality of optical modulators 130, The generated laser beam can be modulated. This will be described below with reference to FIG.

4 is a block diagram schematically illustrating the configuration of a plurality of optical modulators according to an embodiment of the present invention.

The plurality of optical modulators 130 may include a first optical modulator 131 and a second optical modulator 132 according to an exemplary embodiment of the present invention.

The first optical modulator 131 according to an embodiment of the present invention can modulate the laser beam generated in the laser beam generator using the refractive index change generated by the ultrasonic vibration. The first optical modulator 131 can modulate the laser beam generated by the laser beam generator into a laser beam having a low peak output but a high repetition rate.

The first optical modulator 131 according to an embodiment of the present invention may be an acousto-optic modulator (AOM). The acoustooptic modulator may include a predetermined medium in a path through which the laser beam generated by the laser beam generating unit passes, and may generate ultrasonic waves with respect to the above-mentioned medium. The acoustooptic modulator can modulate the laser beam by using the diffraction phenomenon of light by the diffraction grating caused by the periodic change of the refractive index due to the sound wave generated in the medium in which the ultrasonic wave is generated. Therefore, by using the above-described principle, the acousto-optic modulator can modulate the laser beam generated by the laser beam generator by precisely adjusting the transmittance by adjusting the ultrasonic wave to the medium in which the laser beam generated from the laser beam generator is incident .

The first optical modulator 131 according to an embodiment of the present invention can operate at several tens of kHz.

Also, the second optical modulator 132 according to an embodiment of the present invention can modulate the laser beam generated in the laser beam generator using the change in refractive index generated by voltage application. The second optical modulator 132 can modulate the laser beam generated by the laser beam generator into a laser beam having a high peak output but a low repetition rate.

The second optical modulator 132 according to an exemplary embodiment of the present invention may be an electro-optic modulator (EOM). The electro-optic modulator is a modulator that uses an electro-optic effect, which is an effect of changing the refractive index of a material by applying an electrostatic field to the electrostatic material. The modulator modulates the intensity by using the rotation of the polarization plane of the light due to the change in the refractive index of the medium. Lt; / RTI > Therefore, an electro-optical modulator including a voltage applying device for applying a voltage to a medium and a medium can modulate the laser beam generated in the laser beam generating portion by using a refractive index change occurring in the medium by applying a voltage to the medium.

The second optical modulator 132 according to an embodiment of the present invention can operate at several tens of Hz. Thus, the second optical modulator 132 is capable of precise operation control over time.

Whether to select the first optical modulator 131 or the second optical modulator 132 among the plurality of optical modulators 130 according to an embodiment of the present invention can be selected according to the target. However, the number of the plurality of optical modulators 130 described above is only an example for illustrating one embodiment of the present invention, and the present invention is not limited thereto. The laser resonator may include only one optical modulator, and the laser resonator may include three or more Optical modulators may be included.

If the first optical modulator of the plurality of optical modulators 130 is selected in accordance with the target according to the embodiment of the present invention, the controller can operate the first pumping laser light source continuously . If the second optical modulator of the plurality of optical modulators 130 is selected according to the target, the controller may operate the first pumping laser light source in a pulse type.

Referring to FIG. 2 again, the laser beam generated by the laser beam generator 110 may be modulated by the first optical path controller 120 to generate a plurality of optical modulators 130 When incident on the selected one optical modulator, the laser beam incident on the optical modulator can be modulated by the optical modulator, and the reflector 140 reflects the laser beam modulated by the optical modulator to the pumped first laser medium The energy of the modulated laser beam can be amplified, and the energy beam can be transmitted through the amplified laser beam.

The reflector 140 according to an embodiment of the present invention may include first and second reflectors to induce a round trip of the modulated laser beam to oscillate the laser beam.

The first reflector according to an embodiment of the present invention can totally reflect the incident laser beam, and the second reflector can reflect part of the incident laser beam and transmit a part of the laser beam.

The laser resonator 100 according to an exemplary embodiment of the present invention may oscillate a laser beam using a first laser medium, a first pumping laser light source for pumping the first laser medium, a first reflector, and a second reflector. Specifically, the laser beam can not be oscillated by only the laser beam excited by a small number of atoms included in the first laser medium by the first pumping laser light source and induced and discharged. Accordingly, the laser beam generated through the first and second reflectors can be oscillated by inducing the feedback of the laser beam. The feedback of the laser beam causes light having different wavelengths, phases and polarizations to propagate in all directions from here and there due to the spontaneous emission of the small number of atoms excited in the first active region. The emission of the natural light becomes an instrument and gradually induced emission occurs, and the laser beam generated in the first laser medium can be amplified. Among them, the laser beam proceeding in the axial direction reaches the first reflector or the second reflector and is reflected, and the reflected laser beam returns again to the active region included in the first laser medium. Therefore, while the laser beam generated in the first laser medium travels through the first and second mirrors repeatedly in the active region included in the first laser medium, the density of the electrons is inverted to amplify the energy of the laser beam . Thus, the energy-amplified laser beam can be transmitted through a second reflector that partially reflects and partially transmits.

Therefore, by the above-described method, the laser resonator 100 can oscillate the laser beam generated in the first laser medium using the reflection unit 140. [

The second optical path adjusting unit 150 according to an embodiment of the present invention can adjust the second optical path of the laser beam transmitted by the reflecting unit 140 to output the laser beam transmitted from the reflecting unit 140 . This will be described with reference to FIG.

5 is a block diagram schematically illustrating a configuration of a second optical path control unit according to an embodiment of the present invention.

Referring to FIG. 5, the second optical path adjusting unit 150 may include a second rotating reflector 151, a second rotating angle measuring unit 152, and a second rotating angle adjusting unit 153.

The second rotating reflector 151 according to an embodiment of the present invention may reflect or pass the transmitted laser beam using rotation to adjust the second optical path of the laser beam transmitted through the reflecting portion.

Specifically, the reflector reflects the laser beam modulated by the selected first optical modulator among the plurality of optical modulators to the pumped first laser medium to amplify the energy of the laser beam modulated by the first optical modulator, The second rotating reflector 151 can be rotated to reflect and output the laser beam transmitted by the reflecting portion, or the reflecting portion can be rotated by the selected second optical modulator among the plurality of optical modulators, When the energy of the laser beam modulated by the second optical modulator is amplified to reflect the energy of the laser beam reflected by the first laser medium, the second rotating reflector 151 reflects the laser beam So that the transmitted laser beam passes through the second rotary reflector 151 and is output.

The second rotary reflector 151 according to an embodiment of the present invention can rotate so that the optical path of the laser beam transmitted through the reflective portion is directed to the laser amplifier.

Specifically, the reflector reflects the laser beam modulated by the selected first optical modulator among the plurality of optical modulators to the pumped first laser medium to amplify the energy of the laser beam modulated by the first optical modulator, The second rotating reflector 151 can be rotated to reflect the laser beam transmitted by the reflecting portion and output the laser beam to the laser amplifier, or the reflecting portion can be rotated to output the selected second optical modulator When the energy of the laser beam modulated by the second optical modulator is amplified so as to transmit the laser beam amplified by the second optical modulator, the second rotating reflector 151 So that the laser beam transmitted through the reflective portion passes through the second rotary reflector 151 and is output to the laser amplifier.

Specifically, the rotation of the second rotary reflector 151 may be performed by the second rotation angle measuring unit 152 and the second rotation angle adjusting unit 153. The second rotation angle measuring device 152 can measure a second rotation angle at which the second rotating reflector 151 should be rotated to reflect or pass the laser beam transmitted through the reflecting portion. The second rotation angle measuring device 152 measures the second rotation angle of the second rotating reflector 151 so as to prevent the second optical path of the transmitted laser beam from being changed each time the second rotating reflector 151 rotates, Can be measured.

The second rotation angle measuring device 152 according to the embodiment of the present invention can project parallel light to the second rotating reflector 151 and the parallel light projected to the second rotating reflector 151 can be reflected by the second rotation angle & And can be reflected by the measuring device 152. The second rotation angle measuring device 152 can measure the second rotation angle of the second rotary reflector 151 using the reflected light reflected by the second rotary reflector 151. [ Therefore, the second rotation angle measuring device 152 can detect the position of the measurement beam reflected by the reflector in a non-contact manner due to the inclination, Autocollimator), but the present invention is not limited thereto.

The second rotation angle adjusting unit 153 may adjust the second rotation angle of the second rotating mirror 151 to the second rotation angle measured by the second rotation angle measuring unit 152. Specifically, the second rotation angle adjusting unit 153 may adjust the second rotation angle of the second rotating mirror 151 to the second rotation angle measured by the second rotation angle measuring unit 152 so as to align the laser beam transmitted through the reflection unit. have.

Therefore, when the laser beam transmitted through the reflective portion is reflected by the second rotary reflector 151 or the second rotary reflector 151 rotates by a predetermined angle and the laser beam transmitted through the reflective portion is rotated, 151). ≪ / RTI >

According to an embodiment of the present invention, the output laser beam may have a predetermined wavelength and may have a constant beam divergence angle. The predetermined wavelength of the laser beam output from the laser resonator 100 may be 1064 nm, but it is not limited thereto and may vary depending on the type of the first laser medium. In the following description, it is assumed that the laser resonator 100 outputs a laser beam having a wavelength of 1064 nm.

The second optical path control unit 150 according to an embodiment of the present invention can operate in synchronization with the first optical path control unit 120 described with reference to FIGS. This will be described later with reference to FIGS. 6A and 6B.

1, the laser resonator 100 may output a laser beam, and the laser amplifier 200 may amplify the laser beam output from the laser resonator 100, . The laser beam size adjuster 300 adjusts the size of the laser beam amplified by the laser amplifier 200 to irradiate the target with a laser. The laser amplifier 200 will be described with reference to FIGS. 7 to 8C to be described later.

6A and 6B are views for explaining the operation of the laser resonator according to an embodiment of the present invention.

The laser irradiator according to an embodiment of the present invention may include a laser resonator 100 and a control unit (not shown). The controller may control the laser resonator 100 such that a laser beam is output from the laser resonator 100.

2 to 5, the laser resonator 100 according to an embodiment of the present invention includes a laser beam generator 110, a first optical path controller 120, a first optical modulator 131, A second optical modulator 132, a reflector 140, and a second optical path adjuster 150. [

Referring to FIG. 6A, the laser beam generator 110 may generate a laser beam using a first pumping laser light source 111 that emits a first laser beam to pump the first laser medium 112.

The first pumping laser light source 111 according to an embodiment of the present invention can change the state of atoms included in the first laser medium 112 by emitting a pumping laser beam to the first laser medium 112. [ Specifically, each of the atoms contained in the first laser medium 112 can be excited, and the first laser medium 112 can emit a laser beam as the excited atoms emit energy.

The first pumping laser light source 111 according to an exemplary embodiment of the present invention is a light source that excites atoms included in the first laser medium 112 by supplying external energy to the first laser medium 112. The first pumping laser light source 111 includes a laser diode, A flash lamp, a tungsten-halogen lamp, or an arc lamp, but the present invention is not limited thereto.

Among the types of the first pumping laser light source 111 described above, the electro-optic conversion efficiency of the laser beam of the laser diode is about 30% higher than that of the conventional excitation method. Therefore, the lifetime is also longer than other laser light sources. In addition, there is an advantage that the voltage for operation is different from that of the conventional laser.

The first laser medium 112 according to an embodiment of the present invention corresponds to a material for determining the wavelength of a laser beam, and may be a solid, a liquid, a gas or a semiconductor. (Nd: YAG), ruby, glass, KCl, or RbCl may be used as the solid state laser medium. However, the present invention is not limited thereto. Various laser media for generating a laser beam by determining the wavelength of the laser beam may be used.

The laser resonator 100 according to an embodiment of the present invention shows a case where the first optical modulator 131 is selected by a target. Accordingly, the first optical path control unit 120 can adjust the first optical path such that the laser beam generated from the first laser medium 112 is incident on the first optical modulator 131. [

When the first optical modulator 131 is selected according to an embodiment of the present invention, the controller may operate the first pumping laser light source 111 continuously.

The first light path adjusting unit 120 may include a first rotating reflector 121, a first rotating angle measuring unit 122, and a first rotating angle adjusting unit 123.

The first rotating reflector 121 reflects the laser beam generated by the first laser medium 112 to be incident on the first optical modulator 131 by a predetermined angle . The first rotation angle measuring device 122 can measure the first rotation angle of the first rotary reflector 121 to rotate the first rotary reflector 121 to reflect the generated laser beam at a predetermined angle, The first rotation angle adjusting unit 123 may adjust the first rotation angle measured by the first rotation angle measuring unit 122 so that the generated laser beam is reflected at a predetermined angle. Accordingly, the generated laser beam can be reflected by the first rotating reflector 121 at a predetermined angle and incident on the first optical modulator 131.

The first rotation angle measuring device 122 according to the embodiment of the present invention can project parallel light to the first rotating reflector 121 and parallel light projected to the first rotating reflector 121 can be reflected by the first rotating angle & And may be reflected by the measuring device 122. The first rotation angle measuring device 122 reflects the laser beam so that the laser beam generated from the first laser medium 112 is incident on the first optical modulator 131 using the reflected light reflected from the first rotating reflector 121. [ It is possible to measure the first rotation angle of the first rotating mirror 121 that reflects the light with the set angle.

Therefore, the laser beam reflected by the first rotating mirror 121 and generated by the first laser medium 112 can be incident on the first optical modulator 131. The laser beam incident on the first optical modulator 131 can be modulated to oscillate in a pulse form.

The first optical modulator 131 according to an embodiment of the present invention can modulate the laser beam generated from the first laser medium 112 by using a refractive index change generated by the ultrasonic vibration. The first optical modulator 131 can modulate a laser beam generated from the first laser medium 112 into a laser beam having a low peak output but a high repetition rate.

The reflector 140 according to an exemplary embodiment of the present invention includes a first optical modulator 131 and a second optical modulator 131. The reflector 140 guides a round trip of the laser beam modulated by the first optical modulator 131 to oscillate the modulated laser beam. (141, 142).

The first reflector 141 according to an embodiment of the present invention can totally reflect the incident laser beam and the second reflector 142 can reflect a part of the incident laser beam and partially transmit the laser beam.

The laser beam modulated by the first optical modulator 131 may be incident on the second reflector 142.

The laser beam incident on the second reflector 142 may be reflected and incident on the first reflector 141. More specifically, the laser beam reflected by the second reflector 142 may be reflected by the first reflector 121, transmitted through the first laser medium 112, and incident on the first reflector 141. The first reflector 141 may reflect the laser beam reflected from the second reflector 142 again. Therefore, the laser beam reflected by the first reflector 141 can be transmitted through the first laser medium 112 and incident on the second reflector 142. [ The laser beam modulated by the first optical modulator 131 by the above-described method can induce density inversion of electrons while amplifying the energy of the laser beam while reciprocating the first laser medium 112. Therefore, the energy-amplified laser beam can be transmitted through the second reflector 142, which partially reflects and partially transmits.

The second optical path control unit 150 according to an embodiment of the present invention can adjust the second optical path to output the laser beam transmitted through the second reflector 142. [ The second optical path adjusting unit 150 may include a second rotating reflector 151, a second rotating angle measuring unit 152, and a second rotating angle adjusting unit 153.

The second optical path adjusting unit 150 according to an embodiment of the present invention includes a third reflector 154a so that the laser beam transmitted through the second reflector 142 can be incident on the second rotational reflector 151, And a fourth reflector 154b. More specifically, the laser beam transmitted through the second reflector 142 can be reflected by the first and second reflectors 154a and 154b and incident on the second rotary reflector 151, And can be rotated to reflect the incident laser beam at a predetermined angle.

The second rotary reflector 151 according to an embodiment of the present invention may be rotated so that the incident laser beam is directed to the laser amplifier 200. [

The second rotational angle measuring device 152 includes a second rotational reflecting mirror 151 for reflecting a laser beam reflected by the first and second reflecting mirrors 154a and 154b and incident on the second rotational reflecting mirror 151 at a predetermined angle The second rotation angle adjusting unit 153 can adjust the second rotation angle measured by the second rotation angle measuring unit 152. [

Therefore, the laser beam 101 output from the laser resonator 100 according to an embodiment of the present invention can represent the laser beam 101 reflected by the second rotary reflector 151. [

The second rotation angle measuring device 152 according to the embodiment of the present invention can project parallel light to the second rotating reflector 151 and the parallel light projected to the second rotating reflector 151 can be reflected by the second rotation angle & And can be reflected by the measuring device 152. The second rotation angle measuring device 152 can measure the second rotation angle of the second rotary reflector 151 using the reflected light reflected by the second rotary reflector 151. [

Therefore, the laser beam 101 can be output from the laser resonator 100 by the above-described method.

Referring to FIG. 6B, the laser beam generator 110 may generate a laser beam using a first pumping laser light source 111 that emits a first laser beam to pump the first laser medium 112. The first laser medium 112 and the first pumping laser light source 111 described above are the same as those described with reference to FIG.

The laser resonator 100 according to an embodiment of the present invention shows a case where the second optical modulator 132 is selected by the target. The first optical path control unit 120 controls the optical path of the laser beam generated from the first laser medium 112 so that the laser beam generated from the first laser medium 112 is incident on the second optical modulator 132. [ The first light path can be controlled.

When the second optical modulator 132 is selected according to an embodiment of the present invention, the controller may operate the first pumping laser light source 111 in a pulse-like manner.

The first light path adjusting unit 120 may include a first rotating reflector 121, a first rotating angle measuring unit 122, and a first rotating angle adjusting unit 123.

The first rotating mirror 121 according to the embodiment of the present invention may be rotated by a predetermined angle so that the generated laser beam is incident on the second optical modulator 132. Accordingly, the generated laser beam may be incident on the second optical modulator 132 through the first rotating mirror 121 rotated by a predetermined angle.

The first rotation angle measuring device 122 can measure a first rotation angle of the first rotating reflector 121 to rotate so that the generated laser beam can pass through the first rotating mirror 121, The adjusting unit 123 may adjust the first rotation angle measured by the first rotation angle measuring unit 122. [ Accordingly, the generated laser beam may be incident on the second optical modulator 132 through the first rotating mirror, which is rotated at a predetermined angle differently from FIG. 6A.

The first rotation angle measuring device 122 according to the embodiment of the present invention can project parallel light to the first rotating reflector 121 and parallel light projected to the first rotating reflector 121 can be reflected by the first rotating angle & And may be reflected by the measuring device 122. The first rotation angle measuring device 122 can measure the first rotation angle of the first rotating reflector 121 using the reflected light reflected from the first rotating reflector 121. [

According to an embodiment of the present invention, the laser beam having passed through the first rotating reflector may be incident on the first polarizer 132a, and the polarized laser beam passing through the first polarizer 132a may be incident on the second optical modulator 132, respectively. The second optical modulator 132 may modulate the incident laser beam to oscillate in the form of a pulse.

The second optical modulator 132 according to an embodiment of the present invention can modulate the laser beam generated in the first laser medium 112 by using a refractive index change generated by voltage application. The second optical modulator 132 described above can modulate the laser beam generated from the first laser medium 112 into a laser beam having a high peak output but a low repetition rate.

The second optical modulator 132 described above is an optical element using polarization, and thus the first polarizer 132a is used together, but the present invention is not limited thereto.

The reflector 140 according to an exemplary embodiment of the present invention may include first and fifth reflectors 141 and 143 to induce a round trip of the modulated laser beam to oscillate the modulated laser beam. have.

The first reflector 141 according to one embodiment of the present invention can totally reflect the incident laser beam, and the fifth reflector 143 can reflect part of the incident laser beam and partially transmit the laser beam.

The modulated laser beam incident on the fifth reflector 143 may be reflected and transmitted through the first laser medium 112 to be incident on the first reflector 141. The first reflector 141 may reflect the laser beam reflected by the fifth reflector 143 again. The laser beam reflected by the first reflector 141 may be incident on the fifth reflector 143 through the first laser medium 112. The laser beam modulated in the second optical modulator 132 by the above-described method can induce density inversion of electrons while amplifying the energy of the laser beam while reciprocating the first laser medium 112. Therefore, the energy beam can be transmitted through the fifth reflector 143, which reflects a part of the laser beam and partially transmits the laser beam.

The second optical path control unit 150 according to an embodiment of the present invention may control the second optical path adjusting unit 150 to output the laser beam transmitted through the fifth reflector 143, The light path can be adjusted. The second optical path adjusting unit 150 may include a second rotating reflector 151, a second rotating angle measuring unit 152, and a second rotating angle adjusting unit 153.

The second rotating reflector 151 can be rotated such that the laser beam 102 transmitted through the fifth reflecting mirror 143 passes through the second rotating reflecting mirror 151 like the first rotating reflector 121. [ The second rotation angle measuring device 152 measures a second rotation angle for rotating the second rotating reflector 151 so that the laser beam 102 transmitted through the fifth reflector 143 passes through the second rotating reflector 151 And the second rotation angle adjuster 153 can adjust the second rotation reflector 151 at the second rotation angle measured by the second rotation angle measurer 152.

The second rotation angle measuring device 152 according to the embodiment of the present invention can project parallel light to the second rotating reflector 151 and the parallel light projected to the second rotating reflector 151 can be reflected by the second rotation angle & And can be reflected by the measuring device 152. The second rotation angle measuring device 152 can measure the second rotation angle of the second rotary reflector 151 using the reflected light reflected by the second rotary reflector 151. [

The laser beam 102 output from the laser resonator 100 according to an embodiment of the present invention may represent the laser beam 102 that has passed through the second rotating reflector 151. [

Therefore, the laser beam 102 can be output from the laser resonator 100 by the above-described method.

7 is a block diagram schematically showing the configuration of a laser amplifier according to an embodiment of the present invention.

Referring to FIG. 7, the laser amplifier 200 according to an embodiment of the present invention can amplify the laser beam output from the laser resonator 100.

The laser amplifier 200 according to an exemplary embodiment of the present invention includes a probe beam oscillation unit 210, a second pumping laser source 220, a lens 230, a second laser medium 240, a probe beam phase difference measurement unit 250 ), A phase difference compensation modulator 260, and a laser beam position sensing detector 270.

The second laser medium 240 may be a medium through which the laser beam output from the laser resonator 100 passes and the second pumping laser source 220 may be a medium passing through the second pumping laser beam 240, Lt; / RTI >

The second laser medium 240 according to an embodiment of the present invention corresponds to a material for determining the wavelength of the laser beam, and may be a solid, a liquid, a gas or a semiconductor. (Nd: YAG), ruby, glass, KCl or RbCl may be used as the solid state laser medium, but not limited thereto, the second laser medium 240 may be pumped and various laser media for generating a laser beam may be used . The second pumping laser light source 220 according to an embodiment of the present invention may be a laser diode, a flash lamp, a tungsten-halogen lamp, or an arc ramp, but is not limited thereto.

When the second pumping laser light source 220 emits a pumping laser beam with a high energy to pump the second laser medium 240 by the above-described method, the laser beam passing through the second laser medium 240 by the high- A heat birefringence phenomenon may occur in the beam.

The thermal birefringence phenomenon is a phenomenon that occurs when a pumping laser light source enters a laser medium with a high excitation beam. This phenomenon changes the polarization state of the laser beam incident on the laser medium due to heat stress and strain. That is, the heat birefringence represents a birefringence produced by photoelastic effect due to thermal organic deformation. When the birefringence phenomenon proceeds from an isotropic medium to an anisotropic medium, the refraction waves are divided into two and refracted at the interface.

Therefore, in order to compensate for the thermal birefringence phenomenon, the laser amplifier 200 compensates for the thermal birefringence phenomenon generated by the laser beam output from the laser resonator 100 through the second laser medium 240 using the probe beam can do. Hereinafter, it will be described in detail.

The laser beam output from the laser resonator 100 may have a predetermined wavelength, and the predetermined wavelength may be 1064 nm.

The probe beam oscillator 210 may oscillate the probe beam to be incident on the second laser medium 240 pumped by the second pumping laser light source 220.

According to an embodiment of the present invention, the probe beam oscillated in the probe beam oscillator 210 may have a predetermined wavelength. The predetermined wavelength of the probe beam may be 632.8 nm so as not to interfere with the wavelength (1064 nm) of the laser beam output from the laser resonator 100, but is not limited thereto.

In addition, the laser amplifier 200 according to an embodiment of the present invention may further include a polarizer such that a probe beam emitted from the probe beam oscillator 210 has a predetermined polarization direction. This will be described later with reference to FIG. 8A.

The probe beam oscillated by the probe beam oscillator 210 according to an embodiment of the present invention may be incident on the second laser medium 240 through the polarizer and having a predetermined polarization direction. When the probe beam having the predetermined polarization direction passes through the second laser medium 240, the predetermined polarization direction of the oscillated probe beam can be changed. The probe beam phase difference measuring unit 250 may measure a phase difference between the probe beam and the second laser medium 240. The probe beam phase difference measuring unit 250 may measure the polarization direction of the probe beam, It is possible to measure the first phase difference indicating the degree of conversion of the predetermined polarization direction.

The probe beam phase difference measuring unit 250 according to an embodiment of the present invention may be implemented with a polarimeter. A polarimeter is a device that shines plane-polarized light by a polarizer on an optically active material, and measures the optical rotation that occurs at that time. A polarizer is a film that can pass or block vertical or horizontal polarized waves of incident light separately.

The phase difference compensating modulator 260 may modulate the polarization direction of the probe beam converted in the polarization direction again to a predetermined polarization direction through the second laser medium 240 so as to compensate the measured first phase difference.

The phase difference compensation modulator 260 according to an exemplary embodiment of the present invention can compensate the first phase difference using a change in refractive index generated by voltage application. Accordingly, the phase difference compensation modulator 260 according to an exemplary embodiment of the present invention may be implemented as an electro-optical modulator.

Therefore, the above-described thermal birefringence phenomenon can be compensated by the probe beam phase difference measuring unit 250 and the phase difference compensating modulator 260.

The laser beam position sensing detector 270 according to an embodiment of the present invention can determine the position of the laser beam output from the laser resonator 100 and whether or not the laser beam is incident.

The phase difference compensation modulator 260 can compensate the thermal birefringence generated by passing the laser beam output from the laser resonator 100 through the second laser medium 240 using the first phase difference compensated by the method described above . Specifically, the phase difference compensation modulator 260 modulates the laser beam output from the laser resonator 100 using the first phase difference compensated using the probe beam according to the position of the laser beam determined by the laser beam position sensing unit 270, The second phase difference generated by the second laser medium 240 can be compensated. That is, the laser beam position sensing detector 270 may serve as a trigger for the operation of the phase difference compensation modulator 260.

The controller according to the embodiment of the present invention can control the probe beam phase difference measuring unit 250 and the phase difference compensating modulator 260 to operate synchronously with the laser beam position sensing unit 270 in time synchronization. This will be described in detail in Figs. 9A and 9B.

The phase difference compensation modulator 260 according to an exemplary embodiment of the present invention may compensate the second phase difference using a change in refractive index generated by applying a voltage in the same manner as compensating the first phase difference.

When the laser beam output from the laser resonator 100 passes through the second laser medium 240 and the diameter of the second pumping laser beam emitted from the second pumping laser source 220 is the same, The size of the laser beam can be amplified.

The laser amplifier 200 according to an exemplary embodiment of the present invention may further include a lens 230 for focusing a second pumping laser beam emitted from the second pumping laser source 220. The radius of curvature of the above-described lens 230 can be adjusted. The radius of curvature of the lens 230 can be adjusted so that the diameter of the second pumping laser beam focused by the lens 230 and the diameter of the laser beam output from the laser resonator 100 are equal. Accordingly, when the radius of curvature of the lens 230 is adjusted, the size of the laser beam output from the laser resonator 100 can be further amplified.

Therefore, the laser beam outputted from the laser resonator 100 by the above-described method can be amplified in the laser amplifier 200. [ Hereinafter, an operation method of the laser amplifier 200 will be described with reference to FIGS. 8A to 8C.

8A to 8C are views for explaining the operation of the laser amplifier according to an embodiment of the present invention.

Referring to FIG. 8A, a probe beam oscillator 211 according to an embodiment of the present invention may oscillate a probe beam 211-1 having a predetermined wavelength. The predetermined wavelength may be 632.8 nm, but is not limited thereto.

The laser amplifier 200 according to an exemplary embodiment of the present invention divides the polarization of the probe beam 211-1 having a predetermined wavelength emitted from the probe beam oscillator 211 and outputs the probe beam 211- And a wavelength plate 213 for converting the probe beam 212-1 in the linearly polarized light direction passed by the second polarizer 212 into a predetermined polarized light.

The second polarizer 212 according to an embodiment of the present invention divides vertical or horizontal polarized waves of the probe beam 211-1 having a predetermined wavelength emitted from the probe beam oscillation unit 211 and outputs only the direction of predetermined linearly polarized light The film is of a nature capable of passing.

The wave plate 213 according to an embodiment of the present invention is an optical element that changes the polarization state of light. In an embodiment of the present invention, the wave plate 213 includes a quarter wave plate 213, Lt; / RTI > Specifically, a quarter wave plate represents a birefringent plate whose thickness is determined so as to cause an optical path difference of a quarter wavelength between linearly polarized lights vibrating in mutually perpendicular directions. The quarter-wave plate converts the optical axis into circularly polarized light by aligning the optic axis in the direction of 45 degrees relative to the direction of the linearly polarized light.

Thus, according to an embodiment of the present invention, the wave plate 213 can convert the probe beam 212-1 in the linear polarization direction passed through the second polarizer 212 into circularly polarized light and output the circularly polarized light.

The laser amplifier 200 according to an exemplary embodiment of the present invention may be configured such that the probe beam 213-1 having a predetermined wavelength converted into circularly polarized light by the wave plate 213 is incident on the second laser medium 240, And a first beam splitter 250a that reflects the probe beam 213-1 having a predetermined wavelength converted into circularly polarized light by the first beam splitter 213. [

Therefore, the probe beam 213-1 having a predetermined wavelength which is converted into the circularly polarized light by the wave plate 213 can be incident on the first beam splitter 250a, and the first beam splitter 250a can receive the incident beam The probe beam 213-1 having a predetermined wavelength converted into the polarized light can be reflected and incident on the second laser medium 240. [

The probe beam 213-1 having the direction of the circularly polarized light incident on the second laser medium 240 can transmit the second laser medium 240 and the polarization direction of the transmitted probe beam 214-1 is And can be converted into elliptically polarized light based on the circularly polarized light by the thermal birefringence phenomenon generated in the second laser medium 240. A part of the probe beam 214-1 whose polarization direction is converted from circularly polarized light to elliptically polarized light can be transmitted through the sixth reflector 281 and incident on the first probe beam phase difference measurement unit 250-1, And may be reflected by the sixth mirror 281 to be incident on the first retardation compensator 261.

The sixth reflector 281 according to an embodiment of the present invention can reflect a laser beam having a predetermined wavelength outputted from the laser resonator and a probe beam having a predetermined wavelength and a probe beam having a predetermined wavelength, And can transmit the sixth mirror 281.

The predetermined wavelength of the laser beam having the preset wavelength may be 1064 nm and the predetermined wavelength of the probe beam having the predetermined wavelength may be 632.8 nm. Therefore, there is no interference between the wavelength of the laser beam and the wavelength of the probe beam. It should be noted, however, that the above-described exemplary embodiments are merely examples for illustrating one embodiment of the present invention, but the present invention is not limited thereto.

The first probe beam phase difference measuring unit 250-1 may measure the first phase difference of the probe beam 214-1 converted into the incident elliptically polarized light. The first phase difference may indicate the degree to which the probe beam 213-1 of the circularly polarized light is converted into the elliptically polarized light with reference to the circularly polarized light while passing through the second laser medium 240. [

The first phase difference compensating modulator 261 according to an embodiment of the present invention is configured to compensate the first phase difference measured by the first probe beam phase difference measuring unit 250-1 by using the elliptically polarized light beam reflected by the sixth reflector 281 The probe beam 214-1 having a circular polarization can be modulated into a probe beam of circularly polarized light.

Therefore, the probe beam having the circularly polarized direction with the first phase difference compensated by the first phase difference compensating modulator 261 can be incident on the second laser medium 240 pumped by the third pumping laser light source 222 again have. Therefore, the probe beam of the circularly polarized light modulated by the first phase difference compensating modulator 261 is again transmitted through the second laser medium 240 pumped by the third pumping laser light source 222 to generate elliptically polarized light And the probe beam 214-2 converted into the elliptically polarized light while transmitting through the second laser medium 240 pumped by the third pumping laser light source 222 is transmitted through the seventh reflector 282 And may be incident on the second probe beam phase difference measuring unit 250-2. The probe beam 214-2 converted into the elliptically polarized light while passing through the second laser medium 240 pumped by the third pumping laser light source 222 is reflected by the seventh reflector 282, And may be incident on the modulator 262.

The seventh reflector 282 according to an embodiment of the present invention can reflect a laser beam having a predetermined wavelength outputted from the laser resonator and a probe beam having a predetermined wavelength and a probe beam having a predetermined wavelength, And can transmit the seventh reflector 282.

The second probe beam phase difference measuring unit 250-2 measures the second probe beam phase difference of the probe beam 214-2 converted into the elliptically polarized light while transmitting the second laser medium 240 pumped by the third pumping laser source 222 The phase difference can be measured. The second phase difference may indicate the extent to which the probe beam of circularly polarized light is converted into elliptically polarized light based on the circularly polarized light while passing through the second laser medium 240 pumped by the third pumping laser light source 222. [

The second phase difference compensation modulator 262 according to an embodiment of the present invention may be configured to compensate for the second phase difference measured by the second probe beam phase difference measuring unit 250-2 by using elliptically polarized light reflected by the seventh reflecting mirror 282 And the converted probe beam 214-2 can be modulated into a probe beam of circularly polarized light again.

The probe beam of circularly polarized light modulated by the second phase difference compensation modulator 262 passes through the second laser medium 240 pumped by the fourth pumping laser light source 223, The probe beam 214-3 converted into the elliptically polarized light may be transmitted through the sixth reflector 281 and incident on the third probe beam phase difference measuring unit 250-3 and the fourth pumping laser light source 223 may be incident on the third probe beam phase difference measuring unit 250-3. The probe beam 214-3 converted from the circularly polarized light into the elliptically polarized light passes through the second laser medium 240 pumped by the second laser medium 240 and is reflected by the sixth reflector 281 to be incident on the third retardation compensator 263 .

The third probe beam phase difference measuring unit 250-3 measures the third probe beam phase difference between the third probe beam phase difference measuring unit 250-3 and the third probe beam phase difference measuring unit 250-3 through the second laser medium 240 pumped by the fourth pumping laser light source 223, The third phase difference compensating modulator 263 may convert the elliptically polarized light reflected by the sixth reflector 281 to compensate the third phase difference measured by the third probe beam phase difference measuring unit 250-3 The probe beam 214-3 can be modulated into a probe beam of circularly polarized light.

The probe beam of circularly polarized light modulated by the third phase difference compensation modulator 263 passes through the second laser medium 240 pumped by the fifth pumping laser light source 224 and travels through the probe beam 214- 4 may be incident on the fourth probe beam phase difference measuring unit 250-5 through the seventh reflector 282 and may be incident on the second laser medium 240 pumped by the fifth pumping laser light source 224, The probe beam 214-4 having the fourth retardation may be reflected by the seventh reflector 282 and may be incident on the fourth retardation compensator 264. [

The fourth probe beam phase difference measuring unit 250-5 can measure the fourth phase difference and the fourth phase difference compensating modulator 264 can measure the fourth phase difference measured by the fourth probe beam phase difference measuring unit 250-5 You can compensate.

The probe beam having the fourth phase difference compensated by the above-described method passes through the second laser medium 240 pumped by the sixth pumping laser light source 225, so that the probe beam 214-5, 6 reflector 281 to be incident on the fifth probe beam phase difference measuring unit 250-5 and the fifth probe beam phase difference measuring unit 250-5 can measure the fifth phase difference. The probe beam 214-5 having the fifth phase difference is reflected by the sixth reflector 281 through the second laser medium 240 pumped by the sixth pumping laser light source 225, Modulator 265 and the fifth phase difference compensating modulator 265 may compensate the fifth phase difference measured by the fifth probe beam phase difference measuring unit 250-5.

The probe beam having the fifth phase difference compensated by the method described above passes through the second laser medium 240 pumped by the seventh pumping laser light source 226, 7 reflector 282 to be incident on the sixth probe beam phase difference measuring unit 250-6 and the sixth probe beam phase difference measuring unit 250-6 can measure the sixth phase difference, The phase difference compensation modulator 266 can compensate the measured phase difference.

The probe beam having the sixth phase difference compensated by the above-described method passes through the second laser medium 240 pumped by the eighth pumping laser beam source 227, so that the probe beam 214-7, 6 reflector 281 and may be incident on the seventh probe beam phase difference measuring unit 250-7. The seventh probe beam phase difference measuring unit 250-7 may measure the seventh phase difference, The first phase difference 267 can compensate the measured phase difference.

The probe beam compensated for the seventh phase difference by the method described above passes through the second laser medium 240 pumped by the ninth pumping laser source 228 to cause the probe beam 214-8, 7 reflector 282 and may be incident on the eighth probe beam phase difference measuring unit 250-8 and the eighth probe beam phase difference measuring unit 250-8 may measure the eighth phase difference, (268) can compensate for the measured eighth phase difference.

The probe beam having the eighth phase difference compensated by the method described above passes through the second laser medium 240 pumped by the tenth pumping laser source 229, 6 reflector 281 to be incident on the ninth probe beam phase difference measuring unit 250-9 and the ninth probe beam phase difference measuring unit 250-9 can measure the ninth phase difference. The probe beam 214-9 having the ninth phase difference is reflected by the sixth reflector 281 through the second laser medium 240 pumped by the tenth pumping laser light source 229, Modulator 269 and the ninth phase difference compensating modulator 269 may compensate the ninth phase difference measured by the ninth probe beam phase difference measuring unit 250-9.

The first to ninth phase difference compensating modulators 261 to 269 according to an embodiment of the present invention can compensate for the first to ninth phase differences using a change in refractive index generated by voltage application. Accordingly, each of the first to ninth retardation compensating modulators 261 to 269 according to an embodiment of the present invention may be implemented as an electro-optical modulator.

The ninth phase difference compensated probe beam 215 may finally be incident on the tenth probe beam phase difference measurement unit 250-10.

The laser amplifier 200 according to an embodiment of the present invention may include a beam profiler 250-11 for confirming the final beam state of the ninth phase-compensated probe beam 215. [ The above-described beam profiler 250-11 can measure the distribution and divergence angle of the ninth phase-compensated probe beam 215, and the like.

 In addition, the laser amplifier 200 according to an embodiment of the present invention may be configured such that the ninth phase-compensated probe beam 215 is incident on the tenth probe beam phase difference measuring unit 250-10 and the beam profiler 250-11 And may include second and third beam splitters 250b and 250c to be incident thereon. The laser amplifier 200 according to an embodiment of the present invention further includes a probe beam condensing lens 250d for condensing the ninth phase-compensated probe beam 215 and entering the beam profiler 250-11 .

Specifically, the ninth phase difference compensated probe beam 215 can be reflected to the second beam splitter 250b, and the ninth phase difference compensated probe beam 215 reflected by the second beam splitter 250b can be reflected, May be incident on the third beam splitter 250c.

The probe beam 215a transmitted through the third beam splitter 250c can be incident on the tenth probe beam phase difference measuring unit 250-10 and the probe beam 215b reflected from the third beam splitter 250c. May be incident on the probe beam condensing lens 250d. The probe beam 216 condensed on the probe beam condensing lens 250d may be incident on the beam profiler 250-11.

Accordingly, the laser amplifier 200 generates the second laser medium 240 (FIG. 2) pumped by the second to tenth pumping laser light sources 221 to 229 using the probe beam 211-1 generated by the probe beam oscillation unit 211, And the laser beam outputted from the laser resonator 100 can be amplified by using the compensated thermal birefringence. However, the numbers of the pumping laser beam source, the probe beam phase difference measurement unit, and the phase difference compensation modulator are only examples for explaining one embodiment of the present invention, but the present invention is not limited thereto.

Referring to FIG. 8B, the laser amplifier 200 amplifies the laser beam output from the laser resonator, and outputs the amplified laser beam 100b.

The second laser medium 240 according to an embodiment of the present invention may be pumped by a plurality of pumping laser light sources 221a to 229a and 221b to 229b and the laser beam output from the laser resonator may be pumped by the pumped second laser And can be amplified step by step through the medium 240.

According to an embodiment of the present invention, the laser beam output from the laser resonator can be amplified by passing through the second laser medium 240 nine times. However, the present invention is not limited thereto. The laser beam output from the laser resonator may be amplified by passing the second laser medium 240 more than 10 times , But may be amplified by passing through the second laser medium 240 less than nine times.

The second laser medium 240 according to an embodiment of the present invention may be pumped by two pumping laser light sources that are a 2-1 pumping laser light source 221a and a 2-2 pumping laser light source 221b. At this time, when the second-1 pumping laser light source 221a is located at one side of the second laser medium 240 to pump the second laser medium 240, the second- -1 pumping laser light source 221a and the second laser medium 240. As shown in FIG. Accordingly, the second laser medium 240 can be pumped by the second-1 pumping laser light source 221a and the second-2 pumping laser light source 221b located on both sides of the second laser medium 240, The laser beam output from the laser resonator can be amplified through the second laser medium 240 pumped by the second-1 pumping laser light source 221a and the second-2 pumping laser light source 221b. However, the present invention is not limited thereto. The pumping laser light source may pump the second laser medium 240 from one side.

The second-1 and second-2 pumping laser beams, which are emitted while the second-1 pumping laser light source 221a and the second-2 pumping laser light source 221b operate to amplify the laser beam output from the laser resonator, 2-1 and 2-2 lenses 231a and 231b and may be incident on the second laser medium 240 and the second laser medium 240 may be focused by the focused second- 2 pumping laser beam.

The laser beam output from the laser resonator can be amplified in one stage through the second laser medium 240 and the laser beam 100a amplified in the first stage can be gradually amplified in the second stage to the 3-2, 4-1, 4-2, 5-1, 5-2, 6-1, 6-2, 7-1 Pumping laser light sources 222a through 229a and 222b through 229b, respectively, that are pumped by the pumping laser light sources 222a through 229a, 22b, 22b, 22b, The laser beam 100b amplified in the ninth step may be output.

In addition, it is also possible to use the first, second, third, fourth, fifth, fifth, sixth, seventh, eighth, , 9-1, 9-2, 10-1 and 10-2 pumping laser light sources 222a through 229a and 222b through 229b are arranged to pump a plurality of lenses 232a through 239a and 232b To 239b so that the focused pumping laser light source may be incident on the second laser medium 240. [

The laser beam output from the laser resonator according to an embodiment of the present invention may be repeatedly reflected by the sixth reflector and the seventh reflector described in FIG. 8A to pass through the second laser medium 240, The output laser beam can be amplified.

In addition, since the laser beam output from the laser resonator has a constant beam divergence angle, the laser beams emitted from the laser resonator are the same as the diameter of the laser beam output from the laser resonator in the order of 2-1, 2-2, 3-1, 3-2, , 4-2, 5-1, 5-2, 6-1, 6-2, 7-1, 7-2, 8-1, 8-2, 9-1, 9-2, 10-1 and 10 2 pumping laser light sources 221a to 229a and 221b to 229b, the laser amplification efficiency can be increased. Therefore, in order to improve laser amplification efficiency, the laser amplifier 200 according to another exemplary embodiment of the present invention may include a laser diode 2-1, 2-2, 3-1, 3-2, 4-1, 4-2, 5-1, 5-2, 6-1, 6-2, 7-1, 7-2, 8-1, 8-2, 9-1, 9-2, 10-1 and 10-2 pumping laser light sources The radius of curvature of each of the plurality of lenses 231a to 239a and 231b to 239b for focusing each of the pumping laser beams emitted from the plurality of lenses 221a to 229a and 221b to 229b is controlled by a plurality of lenses 231a to 239a and 231b to 239b The diameter of each of the focused pumping laser beams may be adjusted to be equal to the diameter of the laser beam passing through the second laser medium 240. Specifically, when the laser beam output from the laser resonator passes through the second laser medium 240 pumped by the 2-1 and 2-2 pumping laser light sources 221a and 221b, -1 and 2-2 pumping laser light sources 221a and 221b radiate the 2-1 and 2-2 pumping laser beams to the 2-1 and 2-2 lenses 231a and 231b, 2-1 and 2-2 lenses 231a and 231b can focus the emitted second-and-second and second-order pumping laser beams to have the same diameter as the diameter of the laser beam output from the laser resonator .

Referring to FIG. 8C, the second laser medium 240 includes a plurality of pumping laser light sources 220a and 220b, and a plurality of pumping laser light sources 220a and 220b. Can be pumped by using a plurality of pumping laser beams 220-1 and 220-2 which emit while operating. More specifically, each of the plurality of pumping laser light sources 220a and 220b is operated to emit a plurality of pumping laser beams 220-1 and 220-2 with a plurality of lenses 230a and 230b, 230b converge each of the plurality of pumped laser beams 220-1 and 220-2 and cause the focused laser beams 230-1 and 230-2 to enter the second laser medium 240, The laser medium 240 can be pumped. The laser beam 100-1 output from the laser resonator can be amplified by passing through the pumped second laser medium 240. [ Specifically, the laser beam 100-1 output from the laser resonator is repeatedly reflected to the sixth mirror 281 and the seventh mirror 282, and passes through the pumped second laser medium 240 in a stepwise manner Can be amplified.

In order for the laser beam 100-1 output from the laser resonator to be amplified step by step through the second laser medium 240, a plurality of pumping radiation sources It is necessary to compensate for heat birefringence occurring in the pumped second laser medium 240 using the laser beam.

In order to compensate for the above-mentioned heat birefringence, a probe beam emitted from the probe beam oscillation portion may be repeatedly reflected to the sixth mirror 281 and the seventh mirror 282, and the repeatedly reflected probe beam may be reflected by the second laser medium 240 and the transmitted probe beams 214a and 214b may be incident on the plurality of probe beam phase difference measurement units 250a and 250b. When the repeatedly reflected probe beams 214a and 214b are incident on the plurality of probe beam phase difference measuring units 250a and 250b, the plurality of probe beam phase difference measuring units 250a and 250b detect 2 laser medium 240 and the plurality of phase difference compensation modulators 260a and 260b can compensate each of the phase differences measured by the plurality of probe beam phase difference measurement units 250a and 250b .

The plurality of phase difference compensation modulators 260a and 260b according to an embodiment of the present invention may be configured such that the probe beam is transmitted through the laser beam 100- 1 can pass through the second laser medium 240 to compensate for the phase difference. Specifically, the plurality of probe beam phase difference measuring units 250a and 250b measure the phase difference generated when the probe beam having the second wavelength passes through the second laser medium 240, and the plurality of phase difference compensating modulators 260a and 260b Compensates the measured phase difference and makes a phase difference corresponding to the first wavelength of the laser beam 100-1 output from the laser resonator using the measured phase difference to generate a laser beam output from the laser resonator in the second laser medium 240).

The first wavelength may be 1064 nm and the second wavelength may be 632.8 nm, but the present invention is not limited thereto.

9A and 9B are views for explaining the operation of a laser irradiation apparatus according to an embodiment of the present invention.

Referring to FIG. 9A, a laser irradiator 10 according to an embodiment of the present invention includes a first optical modulator (not shown) for modulating a laser beam generated in a laser beam generator using a refractive index change generated by ultrasonic vibration according to a target, A laser beam is generated when the laser beam 131 is selected and a laser is aimed at a target.

The laser irradiator 10 according to an embodiment of the present invention includes a laser resonator 100, a laser amplifier 200, a laser beam size adjuster 300, and a controller (not shown) As the optical modulator 131 is selected, the first rotary reflector and the second rotary reflectors 121 and 151 are turned on. The control unit can also operate the first pumping laser light source 111 continuously. Accordingly, the first pumping laser light source 111 operated in a continuous mode can emit a first pumping laser beam to pump the first laser medium 112, and the pumped first laser medium 112 emits a laser beam And can be incident on the first rotating mirror 121. The first rotating mirror 121 may reflect the incident laser beam and adjust the optical path so that the laser beam is directed to the first optical modulator 131. Therefore, the control unit can operate the first optical modulator 131 to modulate the laser beam reflected by the first rotating reflector 121. The modulated laser beam can be reflected by the second reflector 142 and incident on the first reflector 141. The modulated laser beam is further reflected by the first reflector 141 and then incident on the second reflector 142 The laser beam having a predetermined wavelength can be transmitted through the second reflector 142 and oscillated. The oscillated laser beam having a predetermined wavelength may be incident on the second rotating reflector 151 through the third reflector 154a and the fourth reflector 154b. The predetermined wavelength of the above-described oscillated laser beam may be 1064 nm, but is not limited thereto. The second rotary reflector 151 can output the incident oscillated laser beam to the laser amplifier 200.

The first and second rotary reflectors 121 and 151 are disposed in parallel with the first and second rotation angle meters 122 and 122 so as to adjust the optical path of the laser beam generated from the first laser medium 112 and the oscillated laser beam, 152 may measure the first and second rotational angles for rotating the first and second rotating mirrors 121, 151, respectively, and the first and second rotational angle adjusters 123, 153 may measure the first and second rotational angles, The first and second rotary reflectors 121 and 151 may be aligned by adjusting the first and second rotation angles measured by the second rotation angle measurers 122 and 152. [

The laser beam 101 outputted from the laser resonator 100 can be incident on the laser amplifier 200. The laser amplifier 200 amplifies the output laser beam 101 and outputs the amplified laser beam 101c to the output can do.

The control unit may operate the second to tenth pumping laser light sources 221 to 229 for respectively pumping the second laser medium 240 included in the laser amplifier 200 step by step. Accordingly, the second laser medium 240 can be pumped by the second to tenth pumping laser light sources 221 to 229. [

In order for the laser beam 101 output from the laser resonator 100 to be amplified while passing through the second laser medium 240, the control unit controls the probe beam to compensate for thermal birefringence generated in the second laser medium 240. [ Can be performed first. The method of compensating thermal birefringence using the above-described probe beam is the same as that described above with reference to FIG. 8A, and thus a detailed description thereof will be omitted.

8A, the laser amplifier 200 uses the probe beam 211-1 oscillated in the probe beam oscillation section 211 to generate the second pumped laser light from the second to tenth pumping laser light sources 221 to 229, The thermal birefringence generated in the laser medium 240 can be measured and compensated and the laser beam 101 output from the laser resonator 100 can be amplified using the compensated thermal birefringence. That is, the first to ninth phase difference compensation modulators 261 to 269 measure the polarization state and the beam state of the final probe beams 215a and 216 having a predetermined wavelength, which is the ninth phase difference compensated probe beam 215, The phase difference compensation value for the laser beam 101 having the preset wavelength outputted from the resonator 100 can be calculated.

The laser amplifier 200 according to an exemplary embodiment of the present invention may further include a laser beam position sensing unit 270 for determining the position of the laser beam 101 output from the laser resonator 100. The laser beam position sensing detector 270 may be implemented as an element for confirming the position of the laser beam 101 output from the laser resonator 100. The operation of the first to ninth phase difference compensation modulators 261 to 269 Can act as a trigger. Specifically, while the laser beam is not output from the laser resonator 100, the laser beam position sensing unit 270 does not output the position signal of the laser beam output from the laser resonator 100. In this case, The first to ninth phase difference compensating modulators 261 to 269 can compensate the phase difference of the probe beam measured at the first to ninth probe beam phase difference measuring units 250-1 to 250-9, The laser beam position sensing detector 270 can confirm the position of the laser beam outputted from the laser resonator 100. The first to ninth phase difference compensation modulators 261 to 269 can detect the position of the laser beam, Can compensate for the phase difference generated when the laser beam 101 having a predetermined wavelength outputted from the laser resonator 100 passes through the second laser medium 240. [ Therefore, the first to ninth probe beam phase difference measuring units 250-1 to 250-9 and the first to ninth phase difference compensating modulators 261 to 269 synchronize with the laser beam position sensing unit 270 in time Can operate.

The laser beam 101 output from the laser resonator 100 is incident on the first beam splitter 101a and the laser beam 101a reflected by the first beam splitter 101a is incident on the laser beam position sensing detector 270 Lt; / RTI > The laser beam 101b transmitted through the first beam splitter 101a may be incident on the second laser medium 240 pumped by the second pumping laser light source 221. [

The laser beam transmitted through the second laser medium 240 pumped by the second pumping laser source 221 may be reflected by the sixth reflector 281 and may be incident on the first retardation compensator 261. When the laser beam position sensing detector 270 confirms the position of the laser beam 101 output from the laser resonator 100, the first phase difference compensation modulator 261 calculates the phase difference compensation value using the probe beam, The phase difference of the laser beam reflected by the third reflector 281 can be compensated by passing through the second laser medium 240 pumped by the laser light source 221.

Similarly, the laser beam whose phase difference is modulated by the first phase difference compensating modulator 261 may be incident on the second laser medium 240 pumped by the third pumping laser light source 222 again, The laser beam transmitted through the second laser medium 240 pumped by the second laser medium 222 may be reflected by the seventh reflector 282 and may be incident on the second phase difference compensating modulator 262. The second phase difference compensation modulator 262 can compensate the phase difference of the laser beam by the same process as the first phase difference compensation modulator 261.

The second phase difference compensated laser beam passes through the second laser medium 240 pumped by the fourth to 10th pumping laser light sources 223 to 229 in the same manner as the above- The modulators 263 to 269 can compensate the phase difference of the laser beam step by step and the laser beam 101 output from the laser resonator 100 at first while passing through the second laser medium 240 is amplified .

Therefore, the laser beam 101c amplified by the laser amplifier 200 can be incident on the laser beam size controller 300. [ The laser beam size adjusting unit 300 may adjust the size of the amplified laser beam 101c and output the adjusted size.

The laser beam size controller 300 may include an eighth reflector 310, a ninth reflector 320, and a laser beam size expander 330. The laser beam 101c amplified by the laser amplifier 200 may be incident on the eighth reflector 310 and the eighth reflector 310 may reflect the laser beam 101c amplified by the laser amplifier 200, 9 reflector 320. In this case, The ninth reflector 320 may reflect the incident laser beam to the laser beam size expander 330. Accordingly, the size of the laser beam reflected by the ninth reflector 320 can be expanded in the laser beam size expander 330. Accordingly, the laser beam 101d whose size has been enlarged in the laser beam size expander 330 can be finally outputted and aimed at the target.

However, the present invention is not limited thereto. The laser beam size adjuster 300 may be configured to increase the size of the laser beam, The size may be reduced.

Referring to FIG. 9B, the laser irradiator 10 according to an embodiment of the present invention includes a second optical modulator (not shown) for modulating a laser beam generated in a laser beam generator using a refractive index change generated by a voltage application according to a target, (132) is selected, a laser beam is irradiated.

The laser irradiator 10 according to an embodiment of the present invention includes a laser resonator 100, a laser amplifier 200, a laser beam size adjuster 300, and a controller (not shown) As the optical modulator 132 is selected, the first and second rotating mirrors 121 and 151 are turned off. That is, the first and second rotating mirrors 121 and 151 can be rotated so that the laser beam generated from the first laser medium 112 is incident on the second optical modulator 132. The control unit may also operate the first pumping laser light source 111 in a pulsed manner. Accordingly, the first pumping laser light source 111 operated in a continuous mode can emit a first pumping laser beam to pump the first laser medium 112, and the pumped first laser medium 112 emits a laser beam And can be incident on the second optical modulator 132. Accordingly, the control unit can operate the second optical modulator 132 to modulate the laser beam incident on the second optical modulator 132. [ The laser beam modulated by the second optical modulator 132 may be reflected by the fifth reflector 143 and incident on the first reflector 141. The laser beam incident on the first reflector 141 may be reflected again The energy of the laser beam is amplified while repeating the process of being incident on the fifth reflector 143 so that the laser beam having the predetermined wavelength can be transmitted through the fifth reflector 143 and oscillated. The laser beam 102 having a predetermined oscillation wavelength may be incident on the laser amplifier 200. The predetermined wavelength of the laser beam may be 1064 nm, but is not limited thereto.

Since the process of calculating the phase difference compensation value of the laser beam 102 oscillated using the probe beam in the laser amplifier 200 having a predetermined wavelength is the same as described in FIG. 8A, a detailed description will be omitted.

Therefore, the laser beam 102 having a predetermined wavelength oscillated in the laser resonator 100 can be incident on the first beam splitter 101a, and the first beam splitter 101a can be excited by the laser oscillator 100 It is possible to reflect the laser beam 102 having a predetermined wavelength. Therefore, the laser beam 102a reflected by the first beam splitter 101a can be incident on the laser beam position sensing detector 270, and the laser beam 102 having a predetermined wavelength oscillated by the laser resonator 100, Can transmit the first beam splitter 101a. The laser beam 102b transmitted through the first beam splitter 101a may be incident on the second laser medium 240. [ Since the process of amplifying the second laser medium 240 step by step is the same as that described with reference to FIG. 9A, a detailed description will be omitted.

Therefore, the laser beam finally transmitted through the second laser medium 240 can be transmitted through the second beam splitter 250b, and the laser beam 102c transmitted through the second beam splitter 250b can be transmitted through the second laser beam And may be incident on the size adjustment unit 300. The laser beam 102d whose size has been enlarged in the laser beam size adjuster 300 may be finally output and aimed at the target.

However, the present invention is not limited thereto. The laser beam size adjuster 300 may be configured to increase the size of the laser beam, The size may be reduced.

Figures 10-12 illustrate a flow chart for illustrating a method of aiming a laser at a target in accordance with an embodiment of the present invention.

The laser irradiator according to an embodiment of the present invention may include a laser resonator, a laser amplifier, a laser beam size controller, and a controller.

The laser resonator according to an exemplary embodiment of the present invention may include a laser beam generator, a first optical path controller, a first optical modulator, a second optical modulator, a reflector, and a second optical path controller.

Also, the laser beam generator according to an embodiment of the present invention may include a first laser medium and a first pumping laser light source, wherein the first light path controller includes a first rotating reflector, a first rotating angle meter, And the second optical path adjusting unit may include a second rotating reflector, a second rotating angle measuring unit, and a second rotating angle adjusting unit.

Also, the laser amplifier according to an embodiment of the present invention may include a probe beam oscillation unit, a second pumping laser source, a lens, a second laser medium, a probe beam phase difference measurement unit, a phase difference compensation modulator, and a laser beam position sensing detection unit .

Referring to FIG. 10, the control unit initializes the laser irradiation apparatus (S1010).

The control unit selects either the first optical modulator or the second optical modulator according to the target (S1020).

The first optical modulator according to an embodiment of the present invention can modulate the laser beam generated in the first laser medium by using the refractive index change generated by the ultrasonic vibration. The first optical modulator described above can modulate the laser beam generated in the first laser medium into a laser beam having a low peak output but a high repetition rate.

The second optical modulator according to an embodiment of the present invention can modulate the laser beam generated in the first laser medium using a refractive index change generated by voltage application. The second optical modulator described above can modulate a laser beam generated in the first laser medium into a laser beam having a high peak output but a low repetition rate.

When the above-mentioned second optical modulator is selected, step A is reached. This will be described later in Fig.

When the first optical modulator is selected, the control unit turns ON the first rotary reflector (S1030). In addition, the control unit operates the second rotary reflector to ON (S1040). The control unit operates the first pumping laser light source continuously (S1050). Thus, the first pumping laser light source can operate continuously to pump the first laser medium, and the first laser medium can emit a laser beam.

The control unit operates the first optical modulator (S1060).

The first rotating reflector may be rotated to cause the laser beam generated in the first laser medium to enter the above-described first optical modulator.

The control unit controls the first rotation angle measuring unit to measure a first rotation angle at which the first rotating reflector should rotate so as to control the position of the first rotating reflector, and uses the first rotation angle measured by the first rotation angle measuring unit The first rotation angle adjusting unit is controlled to adjust the first rotating mirror (S1601).

Further, the laser beam incident on the first optical modulator by the first rotating mirror is modulated by the first optical modulator, the reflecting portion reflects the modulated laser beam by the first optical modulator to the pumped first laser medium, The energy of the beam can be amplified and the energy-amplified laser beam can be transmitted through the reflector and incident on the second rotary reflector. The second rotary reflector can be rotated to reflect the incident laser beam and output the laser beam.

The control unit controls the second rotation angle measuring unit to measure the second rotation angle at which the second rotating reflector should rotate so as to control the position of the second rotating reflector and uses the second rotation angle measured by the second rotation angle measuring unit And controls the second rotation angle adjusting unit to adjust the first rotating mirror (S1603).

The controller determines whether the first rotary reflector whose first rotation angle is adjusted is aligned (S1602). In addition, the controller determines whether the second rotary reflector whose second rotation angle is adjusted is aligned (S1604). If it is determined that the first rotary reflector is not aligned, the position of the first rotary reflector is controlled and aligned by the first rotary angle measuring unit and the first rotary angle adjusting unit. If it is determined that the second rotary reflector is not aligned, the position of the second rotary reflector is controlled and aligned by the second rotary angle measuring unit and the second rotary angle adjusting unit.

If it is determined that the first rotating mirror and the second rotating mirror are aligned, the process proceeds to the B step. That is, the laser beam generated by the laser beam generator can be reflected by the first rotary reflector and incident on the first optical modulator, the laser beam modulated by the first optical modulator can be incident on the reflector, The energy of the modulated laser beam is amplified so that the amplified laser beam can be transmitted through the reflection part and the transmitted laser beam can be reflected to the second rotary reflector and output to the laser amplifier. The step B described later is a step for explaining the process of amplifying the laser beam outputted from the laser resonator in the laser amplifier, which will be described later with reference to FIG.

Referring to FIG. 11, in FIG. 10, the first rotating mirror and the second rotating mirror are aligned so that the laser beam generated in the laser beam generating unit can be reflected by the first rotating mirror and incident on the first optical modulator, The laser beam modulated by the one optical modulator may be incident on the reflection section and the reflection section may amplify the energy of the modulated laser beam so that the laser beam whose energy is amplified may transmit the reflection section, If the laser beam can be reflected by the rotating reflector and output to the laser amplifier, the control unit operates the second to ninth pumping laser sources that pump the second laser medium to amplify the laser beam output from the laser resonator (S1110).

It is possible to compensate for the thermal birefringence phenomenon generated when the second laser medium is pumped by the second to ninth pumping laser light sources so that it can be amplified without heat birefringence phenomenon when the laser beam output from the laser resonator transmits through the second laser medium The probe beam oscillation unit oscillates the probe beam (S1120). The plurality of probe beam phase difference measuring units measure the phase difference of the oscillated probe beam (S1121). Specifically, the probe beam emitted from the probe beam oscillation section may be incident on the second laser medium pumped by the second to ninth pumping laser light sources, and the probe beam may be incident on the second pumping laser source pumped by the second through ninth pumping laser light sources. 2 laser medium, a phase difference indicating the degree of polarization direction variation may occur. Therefore, the probe beam transmitted through the second laser medium pumped by the second through ninth pumping laser sources can be incident on the plurality of probe beam phase difference measurement units, and each of the plurality of probe beam phase difference measurement units can detect 2 to the ninth pumping laser light source through the second laser medium pumped by the second laser medium. One probe beam phase difference measuring unit may be used, but the present invention is not limited thereto.

Each of the plurality of phase difference compensating modulators operates to compensate the phase difference of the probe beam measured by the plurality of probe beam phase difference measuring units (S1122).

Each of the plurality of phase difference compensation modulators according to an embodiment of the present invention can compensate for the phase difference using a change in refractive index generated by voltage application. However, the number of phase difference compensation modulators may be one, but is not limited thereto.

Further, the probe beam phase difference measuring unit measures the phase difference and the polarization state of the final probe beam (S1123). The beam profiler measures the beam state of the final probe beam (S1124). The probe beam phase difference measuring unit for measuring the phase difference and the polarization state of the final probe beam and the beam profiler for measuring the beam state of the final probe beam have been described with reference to FIG. 8A.

Each of the plurality of phase difference compensation modulators calculates a phase difference compensation value for the laser beam output from the laser resonator (S1130). In particular, each of the plurality of phase difference compensating modulators can compensate for the thermal birefringence generated when the laser beam output from the laser resonator passes through the second laser medium using the phase difference compensated by the above-described method.

The laser beam position sensing detector determines whether the laser beam output from the laser resonator is incident or not (S1140).

If the laser beam position sensing detector determines that the laser beam output from the laser resonator is not incident and the position of the laser beam can not be confirmed, the plurality of probe beam phase difference measuring units repeat the process of measuring the phase difference of the probe beam.

When the laser beam is output from the laser resonator and is incident on the laser beam position sensing detector, the laser beam position sensing detector can determine the position of the laser beam output from the laser resonator, and the laser beam output from the laser resonator, Can be amplified through the second laser medium. In this case, when the laser beam output from the laser resonator passes through the second laser medium, the phase difference can be converted, and the plurality of phase difference compensating modulators described above can detect the phase difference that the laser beam output from the laser resonator passes through the second laser medium (S1141).

That is, each of the plurality of phase difference compensating modulators generates a laser beam output from the laser resonator through the second laser medium using the compensated phase difference according to the position of the laser beam determined by the laser beam position sensing detector Can be compensated for. The laser beam position sensing detector may serve as a trigger for the operation of the plurality of phase difference compensation modulators.

Therefore, the laser beam output from the laser resonator can be amplified through the second laser medium, because the phase difference is compensated even when the laser beam output from the laser resonator passes through the second laser medium. The laser beam amplified by the laser amplifier may be incident on the laser beam size controller.

The laser beam scaling unit controls the magnification of the amplified laser beam and operates to output the laser beam at a controlled magnification (S1150). Accordingly, the laser beam whose size has been adjusted from the laser beam size adjuster is irradiated onto the aimed target, and laser irradiation is completed (S1160). In an embodiment of the present invention, the size of the laser beam amplified by the laser amplifier may be enlarged, but the size of the laser beam amplified by the laser amplifier may be reduced according to the target.

Referring to FIG. 12, when the second optical modulator is selected in FIG. 10, the controller operates the first rotary reflector to OFF (S1210) and turns off the second rotary reflector (S1211). The control unit operates the first pumping laser light source in a pulse type (S1220).

Thus, the first pumping laser source can operate in a pulsed manner to pump the first laser medium, and the first laser medium can generate a laser beam.

The control unit operates the second optical modulator (S1230).

The first rotary reflector may be operated in the OFF state while being rotated so that the laser beam generated in the first laser medium is passed so that the laser beam generated in the first laser medium is incident on the second optical modulator. have.

Therefore, the laser beam generated in the first laser medium can be incident on the second optical modulator through the first rotating mirror, and the second optical modulator can modulate the incident laser beam. The laser beam modulated to the second optical modulator may be incident on the reflection portion, and the reflection portion may reflect the laser beam modulated by the second optical modulator to the first laser medium to amplify the energy, Can transmit the reflection portion. And the laser beam transmitted through the reflecting portion can pass through the second rotating mirror. And the second rotating mirror can be operated to be OFF in a state rotated so that the laser beam transmitted by the reflecting portion passes. Therefore, the laser beam transmitted through the reflecting portion can be output to the laser amplifier through the second rotating reflector.

The control unit operates the second to ninth pumping laser light sources that pump the second laser medium to amplify the laser beam output from the laser resonator (S1240).

It is possible to compensate for the thermal birefringence phenomenon generated when the second laser medium is pumped by the second to ninth pumping laser light sources so that it can be amplified without heat birefringence phenomenon when the laser beam output from the laser resonator transmits through the second laser medium The probe beam oscillation unit oscillates the probe beam (S1250). The plurality of probe beam phase difference measuring units measure the phase difference of the oscillated probe beam (S1251). Specifically, the probe beam emitted from the probe beam oscillation portion may be incident on the second laser medium pumped by the second to ninth pumping laser light sources, and the probe beam may be incident on the second pumped laser light source A phase difference indicating the degree of change of the polarization direction may occur when the laser medium is transmitted. Therefore, the probe beam transmitted through the second laser medium pumped by the second through ninth pumping laser sources can be incident on the plurality of probe beam phase difference measurement units, and each of the plurality of probe beam phase difference measurement units can detect 2 to the ninth pumping laser light source through the second laser medium pumped by the second laser medium. The above-described probe beam phase difference measuring unit may be used as one, but is not limited thereto.

Each of the plurality of phase difference compensating modulators operates to compensate the phase difference of the probe beam measured by the plurality of probe beam phase difference measuring units (S1252).

Each of the plurality of phase difference compensation modulators according to an embodiment of the present invention can compensate for the phase difference using a change in refractive index generated by voltage application. The number of phase difference compensation modulators may be one, but is not limited thereto.

The probe beam phase difference measuring unit measures the phase difference and the polarization state of the final probe beam (S1253). Further, the beam profiler measures the beam state of the final probe beam (S1254). The probe beam phase difference measuring unit for measuring the phase difference and the polarization state of the final probe beam and the beam profiler for measuring the beam state of the final probe beam have been described with reference to FIG. 8A.

Each of the plurality of phase difference compensation modulators calculates a phase difference compensation value for the laser beam output from the laser resonator (S1260). In particular, each of the plurality of phase difference compensating modulators can compensate for the thermal birefringence generated when the laser beam output from the laser resonator passes through the second laser medium using the phase difference compensated by the above-described method.

The laser beam position sensing detector determines whether the laser beam output from the laser resonator is incident or not (S1270).

If the laser beam position sensing detector determines that the laser beam output from the laser resonator is not incident and the position of the laser beam can not be confirmed, the plurality of probe beam phase difference measuring units repeat the process of measuring the phase difference of the probe beam.

When the laser beam is output from the laser resonator and is incident on the laser beam position sensing detector, the laser beam position sensing detector can determine the position of the laser beam output from the laser resonator, and the laser beam output from the laser resonator, Can be amplified through the second laser medium. In this case, when the laser beam output from the laser resonator passes through the second laser medium, the phase difference can be converted, and the plurality of phase difference compensating modulators described above can detect the phase difference that the laser beam output from the laser resonator passes through the second laser medium (S1271).

That is, each of the plurality of phase difference compensating modulators generates a laser beam output from the laser resonator through the second laser medium using the compensated phase difference according to the position of the laser beam determined by the laser beam position sensing detector Can be compensated for. The laser beam position sensing detector may serve as a trigger for the operation of the plurality of phase difference compensation modulators.

Therefore, the laser beam output from the laser resonator can be amplified through the second laser medium, because the phase difference is compensated even when the laser beam output from the laser resonator passes through the second laser medium. The laser beam amplified by the laser amplifier may be incident on the laser beam size controller.

The laser beam scaling unit controls the magnification of the amplified laser beam and operates to output the laser beam at a controlled magnification (S1280). Accordingly, the laser beam whose size has been adjusted from the laser beam size adjuster is irradiated onto the collimated target, and the laser irradiation is completed (S1290). In an embodiment of the present invention, the size of the laser beam amplified by the laser amplifier may be enlarged, but the size of the laser beam amplified by the laser amplifier may be reduced according to the target.

Therefore, the laser irradiator according to an embodiment of the present invention can selectively irradiate a laser beam having a high pulse repetition rate but a low peak output, or a laser beam having a low peak repetition rate but a high peak output according to a target. In addition, the thermal birefringence phenomenon of the laser amplifier can be actively controlled. Therefore, even if the laser beam output from the laser resonator continuously changes from a low output to a high output, the output degradation can be compensated by actively compensating the heat birefringence. Finally, the laser irradiator according to an embodiment of the present invention can control the size of the laser beam according to the size and position of the target.

It is to be understood that the present invention is not limited to these embodiments, and all elements constituting the embodiment of the present invention described above are described as being combined or operated in one operation. That is, within the scope of the present invention, all of the components may be selectively coupled to one or more of them. In addition, although all of the components may be implemented as one independent hardware, some or all of the components may be selectively combined to perform a part or all of the functions in one or a plurality of hardware. As shown in FIG. In addition, such a computer program may be stored in a computer readable medium such as a USB memory, a CD disk, a flash memory, etc., and read and executed by a computer to implement an embodiment of the present invention. As the recording medium of the computer program, a magnetic recording medium, an optical recording medium, or the like can be included.

It will be apparent to those skilled in the art that various modifications, substitutions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims. will be. Therefore, the embodiments disclosed in the present invention and the accompanying drawings are intended to illustrate and not to limit the technical spirit of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments and the accompanying drawings . The scope of protection of the present invention should be construed according to the following claims, and all technical ideas within the scope of equivalents should be construed as falling within the scope of the present invention.

10: Laser Irradiator
100: laser resonator
200: laser amplifier
300: Laser beam size adjusting section

Claims (13)

A laser beam generator for generating a laser beam using a pumping laser light source for emitting a pumping laser beam for pumping the laser medium;
A plurality of optical modulators for modulating the generated laser beam;
A first optical path adjusting unit adjusting the first optical path, which is an optical path of the generated laser beam, such that the generated laser beam is incident on one of the plurality of optical modulators; And
A reflector for reflecting the laser beam modulated by the optical modulator facing the adjusted first optical path to the pumped laser medium to amplify energy of the modulated laser beam and transmitting the laser beam amplified; Lt; / RTI >
Wherein the plurality of optical modulators comprise:
A first optical modulator for modulating the generated laser beam using a change in refractive index generated by ultrasonic vibration; And
And a second optical modulator for modulating the generated laser beam using a refractive index change caused by a voltage application,
The first light path control unit includes:
The generated laser beam is reflected to adjust the first optical path so that the generated laser beam is incident on only one of the first optical modulator and the second optical modulator according to the target, And a first rotating mirror for rotating the first optical path and passing the generated laser beam to adjust the first optical path. delete delete The method according to claim 1,
The first light path control unit includes:
A first rotation angle meter for measuring the first rotation angle; And
And a first rotation angle adjusting unit for rotating the first rotating mirror at the first rotation angle measured by the first rotation angle adjusting unit. 5. The method of claim 4,
Wherein the first rotation angle measuring device measures the first rotation angle using the reflected light reflected by the projected parallel light, and projects the parallel light to the rotating reflector. The method according to claim 1,
Wherein the laser beam generator comprises:
If the first optical path is adjusted so that the generated laser beam is incident on the first optical modulator, the laser beam source is continuously operated to generate the laser beam, and the generated laser beam is transmitted to the second optical modulator Wherein when the first optical path is adjusted to be incident, the laser light source is operated in a pulse-like manner to generate the laser beam. The method according to claim 1,
And a second optical path adjusting unit adjusting the second optical path, which is an optical path of the transmitted laser beam, to output the transmitted laser beam,
Wherein the second light path control unit comprises:
A second rotating reflector that reflects the transmitted laser beam to adjust the second optical path or rotate at a second rotation angle to pass the transmitted laser beam to adjust the second optical path;
A second rotation angle measuring unit for measuring the second rotation angle; And
And a second rotation angle adjusting unit for rotating the second rotating mirror at the second rotation angle measured by the second rotation angle adjusting unit. A laser resonator for outputting a laser beam; And
And a laser amplifier for amplifying the output laser beam,
The laser resonator includes:
A laser beam generator for generating the laser beam using a first pumping laser beam source for emitting a first pumping laser beam for pumping a first laser medium;
A plurality of optical modulators for modulating the generated laser beam;
A first optical path adjusting unit adjusting the first optical path, which is an optical path of the generated laser beam, such that the generated laser beam is incident on one of the plurality of optical modulators;
The laser beam modulated by the optical modulator facing the adjusted first optical path is reflected by the pumped first laser medium to amplify the energy of the modulated laser beam and reflected by the laser beam transmitted through the amplified laser beam part; And
And a second optical path adjusting unit adjusting the second optical path, which is an optical path of the transmitted laser beam, to output the transmitted laser beam,
Wherein the plurality of optical modulators comprise:
A first optical modulator for modulating the generated laser beam using a change in refractive index generated by ultrasonic vibration; And
And a second optical modulator for modulating the generated laser beam using a refractive index change caused by a voltage application,
The first light path control unit includes:
The generated laser beam is reflected to adjust the first optical path so that the generated laser beam is incident on only one of the first optical modulator and the second optical modulator according to the target, And a first rotating mirror for rotating the first optical path and passing the generated laser beam to adjust the first optical path. 9. The method of claim 8,
The laser amplifier includes:
A second laser medium for amplifying the output laser beam;
A second pumping laser light source for emitting a second pumping laser beam for pumping the second laser medium;
A probe beam oscillation unit for oscillating a probe beam in a first polarization direction so as to be incident on the pumped second laser medium;
Wherein the oscillating probe beam incident on the second laser medium is a probe beam phase difference measurement that measures a first phase difference indicative of a degree of conversion of a first polarization direction of the oscillated probe beam generated through the second laser medium part; And
And a phase difference compensation modulator for compensating for the measured first phase difference and converting the polarization direction of the probe beam whose polarization direction is changed through the second laser medium to the first polarization direction,
Wherein the phase difference compensating modulator compensates for a second phase difference generated when the output laser beam passes through the second laser medium using the compensated first phase difference. 10. The method of claim 9,
The laser amplifier includes:
And a laser beam position sensing detector for determining a position of the output laser beam,
And the phase difference compensating modulator compensates the second phase difference generated by the output laser beam passing through the second laser medium using the compensated first phase difference according to the determined position of the output laser beam . 10. The method of claim 9,
Wherein the phase difference compensation modulator compensates the first phase difference and the second phase difference using a change in refractive index caused by a voltage application. 10. The method of claim 9,
The laser amplifier includes:
And a lens for focusing the second pumping laser beam,
Wherein the lens has a radius of curvature adjusted to focus the second pumping laser beam at a diameter equal to the diameter of the output laser beam. 9. The method of claim 8,
And a laser beam size controller for controlling the size of the amplified laser beam.

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