KR101891401B1 - 미세유체 소자 및 이의 제조방법 - Google Patents

미세유체 소자 및 이의 제조방법 Download PDF

Info

Publication number
KR101891401B1
KR101891401B1 KR1020160116705A KR20160116705A KR101891401B1 KR 101891401 B1 KR101891401 B1 KR 101891401B1 KR 1020160116705 A KR1020160116705 A KR 1020160116705A KR 20160116705 A KR20160116705 A KR 20160116705A KR 101891401 B1 KR101891401 B1 KR 101891401B1
Authority
KR
South Korea
Prior art keywords
substrate
channel
conductive
transducer
microfluidic device
Prior art date
Application number
KR1020160116705A
Other languages
English (en)
Korean (ko)
Other versions
KR20180018233A (ko
Inventor
임채승
남정훈
Original Assignee
고려대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 고려대학교 산학협력단 filed Critical 고려대학교 산학협력단
Priority to PCT/KR2017/003865 priority Critical patent/WO2018030609A1/ko
Priority to CN201780049472.8A priority patent/CN109641210B/zh
Priority to US16/323,163 priority patent/US11213821B2/en
Priority to EP17839627.1A priority patent/EP3498373A4/de
Publication of KR20180018233A publication Critical patent/KR20180018233A/ko
Application granted granted Critical
Publication of KR101891401B1 publication Critical patent/KR101891401B1/ko

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502753—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by bulk separation arrangements on lab-on-a-chip devices, e.g. for filtration or centrifugation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502761—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0647—Handling flowable solids, e.g. microscopic beads, cells, particles
    • B01L2200/0652—Sorting or classification of particles or molecules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/12—Specific details about materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
    • B01L2400/0436—Moving fluids with specific forces or mechanical means specific forces vibrational forces acoustic forces, e.g. surface acoustic waves [SAW]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0493—Specific techniques used

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
KR1020160116705A 2016-08-12 2016-09-09 미세유체 소자 및 이의 제조방법 KR101891401B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
PCT/KR2017/003865 WO2018030609A1 (ko) 2016-08-12 2017-04-10 미세유체 소자 및 이의 제조방법
CN201780049472.8A CN109641210B (zh) 2016-08-12 2017-04-10 微流体元件及其制造方法
US16/323,163 US11213821B2 (en) 2016-08-12 2017-04-10 Microfluidic device and manufacturing method therefor
EP17839627.1A EP3498373A4 (de) 2016-08-12 2017-04-10 Mikrofluidische vorrichtung und herstellungsverfahren dafür

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20160102883 2016-08-12
KR1020160102883 2016-08-12

Publications (2)

Publication Number Publication Date
KR20180018233A KR20180018233A (ko) 2018-02-21
KR101891401B1 true KR101891401B1 (ko) 2018-08-23

Family

ID=61524990

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160116705A KR101891401B1 (ko) 2016-08-12 2016-09-09 미세유체 소자 및 이의 제조방법

Country Status (3)

Country Link
EP (1) EP3498373A4 (de)
KR (1) KR101891401B1 (de)
CN (1) CN109641210B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102218278B1 (ko) 2019-11-08 2021-02-19 울산과학기술원 습도 제어를 통한 나노채널의 물질전달 제어장치

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3795252A1 (de) * 2019-09-19 2021-03-24 Sharp Life Science (EU) Limited Leitfähiger abstandshalter für eine mikrofluidische vorrichtung
CN112019185A (zh) * 2020-09-03 2020-12-01 杨欣 全覆盖式声表面波叉指换能器

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101356933B1 (ko) 2012-12-28 2014-01-29 고려대학교 산학협력단 표면탄성파를 이용한 미세유동 크로마토 그래피 기반 미세입자 분리 장치 및 방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080052296A (ko) * 2006-12-05 2008-06-11 한국전자통신연구원 미세 유체 이송 장치 및 그 제조 방법
KR100862379B1 (ko) * 2007-04-25 2008-10-13 삼성전기주식회사 표면탄성파 디바이스 패키지 및 그 제조방법
ITTO20070554A1 (it) * 2007-07-26 2009-01-27 Fond Istituto Italiano Di Tec Dispositivo per il controllo del moto di fluidi in micro o nanocanali tramite onde acustiche superficiali.
BRPI0907148B1 (pt) * 2008-02-27 2021-01-12 Boehringer Ingelheim Microparts Gmbh dispositivo para a separação do plasma
US20100140185A1 (en) * 2008-12-05 2010-06-10 John Hill Wastewater treatment
CN101497006B (zh) * 2009-01-15 2011-04-20 宁波大学 一种数字微流体微混合器及混合方法
KR101183436B1 (ko) * 2010-03-15 2012-09-14 연세대학교 산학협력단 미세유체 칩 및 그 제조방법, 상기 미세유체칩의 미세채널 구조 및 그 제조방법
GB201103211D0 (en) * 2011-02-24 2011-04-13 Univ Glasgow Fluidics apparatus, use of fluidics apparatus and process for the manufacture of fluidics apparatus
CN102284265B (zh) * 2011-06-10 2014-03-12 宁波大学 一种以声表面波为能量源的微反应器及其反应方法
ITTO20110900A1 (it) * 2011-10-10 2013-04-11 Consiglio Nazionale Ricerche Controllo automatico passivo del posizionamento di liquidi in chip microfluidici
WO2013116311A1 (en) * 2012-01-31 2013-08-08 The Penn State Research Foundation Microfluidic manipulation and sorting of particles using tunable standing surface acoustic wave
BR112014032727B1 (pt) * 2012-06-27 2021-12-14 Illumina France Método e sistema para realizar operações de gotícula em uma gotícula em um atuador de gotículas para redução da formação de bolhas
US10266397B2 (en) * 2014-08-13 2019-04-23 University Of South Carolina III-V nitride resonate structure based photoacoustic sensor
FR3027672B1 (fr) * 2014-10-24 2018-11-23 Biomerieux Methode et dispositifs de traitement d'echantillons biologiques

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101356933B1 (ko) 2012-12-28 2014-01-29 고려대학교 산학협력단 표면탄성파를 이용한 미세유동 크로마토 그래피 기반 미세입자 분리 장치 및 방법

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Pressure sensors and electrical circuits made with liquids(Yi-Chung Tung, SPIE, 2012)*
Separation of Escherichia coli Bacteria from Peripheral Blood Mononuclear Cells Using Standing Surface Acoustic Waves(Ye Ai, Anal Chem, Vol.85(19), 2013)*

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102218278B1 (ko) 2019-11-08 2021-02-19 울산과학기술원 습도 제어를 통한 나노채널의 물질전달 제어장치

Also Published As

Publication number Publication date
CN109641210A (zh) 2019-04-16
EP3498373A4 (de) 2020-02-26
EP3498373A1 (de) 2019-06-19
CN109641210B (zh) 2021-03-30
KR20180018233A (ko) 2018-02-21

Similar Documents

Publication Publication Date Title
Loget et al. Bipolar electrochemistry: from materials science to motion and beyond
Martinez‐Duarte Microfabrication technologies in dielectrophoresis applications—A review
Lewpiriyawong et al. Microfluidic characterization and continuous separation of cells and particles using conducting poly (dimethyl siloxane) electrode induced alternating current-dielectrophoresis
Li et al. A review of microfabrication techniques and dielectrophoretic microdevices for particle manipulation and separation
Chen et al. Tunable nanowire patterning using standing surface acoustic waves
US9608547B2 (en) Microfluidic manipulation and sorting of particles using tunable standing surface acoustic wave
KR101891401B1 (ko) 미세유체 소자 및 이의 제조방법
Xiang et al. Inertial microfluidics: current status, challenges, and future opportunities
Li et al. A novel method to construct 3D electrodes at the sidewall of microfluidic channel
US20160250637A1 (en) Virtual deterministic lateral displacement for particle separation using surface acoustic waves
US10717081B2 (en) Manipulation of objects in microfluidic devices using external electrodes
CN101301990A (zh) 用于芯片实验室的声表面波微流体驱动器及其制造方法
DE112017001898T5 (de) Beeinflussen und Einfangen von Partikeln in mikrofluidischen Einheiten unter Verwendung von zweidimensionalen Materialien
KR102060099B1 (ko) 수직 나노갭 유전영동 전극, 이의 제조방법 및 이를 이용한 입자 포집 및 분리 방법
Annabestani et al. Ionic electro active polymer-based soft actuators and their applications in microfluidic micropumps, microvalves, and micromixers: a review
US11213821B2 (en) Microfluidic device and manufacturing method therefor
Ghomian et al. Review of dielectrophoretic manipulation of micro and nanomaterials: Fundamentals, recent developments, and challenges
Puttaswamy et al. Versatile microfluidic platform embedded with sidewall three-dimensional electrodes for cell manipulation
Ilami et al. Magnetically actuated tunable soft electronics
US9702507B2 (en) Device for controlling particles
CN110938534B (zh) 一种无源无线细胞分选系统
Witte et al. Channel integrated optoelectronic tweezer chip for microfluidic particle manipulation
CN117062904A (zh) 用于自动化生物系统工程的可扩展系统及方法
Guan et al. Fabrication and Separation of EGaIn Microparticles from Human Blood Based on Dielectrophoresis Force and a W-Type Electrode
KR102443561B1 (ko) 독립형 부유 전극 구조의 입자 포집 장치 및 이를 이용한 입자 포집 방법

Legal Events

Date Code Title Description
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right