KR101880077B1 - Embedded meta-structure manufacturing method - Google Patents

Abstract

The present invention relates to a method of manufacturing a built-in meta-structure capable of manufacturing an artificial structure whose electromagnetic characteristics are artificially adjusted so that it is not exposed to the outside, and includes a property changing step, an etching step, and a coating step. The physical property changing step is a step of changing physical properties of a virtual meta-structure region by moving a laser beam along a virtual meta-structure region having a predetermined pattern inside a workpiece made of a transparent material. The etching step is a step of selectively removing a part of the workpiece corresponding to the virtual meta-structure region by injecting an etchant into the virtual meta-structure region. The coating step is a step of coating the metal thin film layer on the inner wall surface of the microchannel formed by selectively removing a part of the workpiece. The virtual meta-structure region is converted into a meta-structure within the workpiece by the physical property changing step, the etching step, and the coating step, and the meta structure is not exposed to the outside.

Description

[0001] Embedded meta-structure manufacturing method [0002]

The present invention relates to a method of manufacturing a built-in meta-structure, and more particularly, to a method of manufacturing a built-in meta-structure capable of manufacturing an artificial structure having an electromagnetic property that is not artificially adjusted.

A meta-structure is a structure having a complex and repetitive pattern formed from a general material such as plastic or metal. The meta-structure is an inherent property of a general material depending on the characteristics of the meta-structure such as pattern shape, geometry, size, It has a physical property that goes beyond.

The meta-structure can be used to control optical properties such as scattering parameter, refractive index, permittivity, and permeability, and thus can be used for biophysics, medical, spectroscopy, researches have been actively conducted in various fields such as spectroscopy, imaging, and security.

As a method for producing such a meta structure, a photoresist having a photosensitive property is thinly applied on a workpiece, a desired mask pattern is placed on the workpiece, and a photolithography A nanoimprint method in which a stamp on which a pattern is formed by an electron beam is photographed on the surface of a workpiece and the pattern is repeatedly copied is used.

However, since all of the conventional methods for manufacturing a meta structure have a meta structure formed on the surface of a workpiece and exposed to the outside, the meta structure is easily damaged by an external force and is vulnerable to corrosion. Also, if the meta structure is damaged, the size of the meta structure (usually, nano unit) is very small and it is difficult to reconstruct the damaged part. Therefore, a meta structure that can be protected from the external environment has been required.

Korean Patent Registration No. 10-1472682, entitled "Metamaterials Fabrication Method, Metamaterial Structure Film Produced Therefrom and Optical Imaging System Using the Same", filed on December 15, 2014,

SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above-mentioned problems occurring in the prior art, and it is an object of the present invention to provide a method of manufacturing a built-in meta-structure which can be protected from the external environment and can be easily and simply performed.

According to an aspect of the present invention, there is provided a method of manufacturing a built-in meta-structure, comprising: moving a laser beam along a virtual meta-structure area having a predetermined pattern inside a workpiece made of a transparent material, A physical property changing step of changing physical properties; An etching step of injecting an etchant into the virtual meta-structure area to selectively remove a part of the work piece corresponding to the virtual meta-structure area; And a coating step of coating a metal thin film layer on an inner wall surface of a microchannel formed by selectively removing a part of the workpiece, wherein the physical property changing step, the etching step, Region is converted into a meta-structure within the workpiece, and the meta-structure is not exposed to the outside.

In the method of manufacturing a built-in meta-structure according to the present invention, the material to be processed is an amorphous material, and physical properties of the virtual meta-structure region are changed by the laser beam in the physical property changing step, Only a part of the workpiece whose physical properties are changed by the etching liquid can be selectively removed.

In the method of manufacturing a built-in meta-structure according to the present invention, the virtual meta-structure region is connected to the outside, and the inlet region is supplied with the etchant, and the other side of the virtual meta- Wherein the etchant injected into the inlet region is discharged into the outlet region via the virtual meta-structure region, and wherein the outlet port region is formed in the outlet region, A portion of the workpiece corresponding to the meta-structure region can be selectively removed.

In the method of manufacturing a built-in meta-structure according to the present invention, the material to be processed is a material containing metal ions, and in the physical property changing step, a plurality of metal ions existing in the imaginary meta- Wherein in the etching step, metal atoms other than metal atoms existing on the inner wall surface of the microchannel among the metal atoms are removed, and in the coating step, the metal atoms remaining on the inner wall surface of the microchannel are removed The mutual adhesive force between the metal thin film layer and the inner wall surface of the microchannel can be increased.

In the method of manufacturing a built-in meta-structure according to the present invention, the material to be processed is a crystalline material, and the material of the imaginary meta-structure region is changed from crystalline to amorphous by the laser beam in the property changing step, Only a part of the workpiece which has been changed to amorphous by the etching liquid can be selectively removed.

In the method of manufacturing a built-in meta-structure according to the present invention, the physical property changing step may be performed with a femtosecond laser beam having a laser pulse width in a femtosecond range.

According to an aspect of the present invention, there is provided a method of manufacturing a built-in meta-structure, including: preparing a workpiece made of a transparent material containing metal ions; And moving a laser beam along a virtual meta-structure region having a predetermined pattern in the workpiece to reduce metal ions present in the virtual meta-structure region to metal atoms, and reducing metal atoms in the virtual meta- Wherein the virtual meta-structure region is converted into a meta-structure in the inside of the member to be processed by the preparing step and the reducing step, and that the meta-structure is not exposed to the outside .

In the method of manufacturing a built-in meta-structure according to the present invention, the material to be processed may be a special glass that contains metal ions at a predetermined ratio and is photo-structurable.

In the built-in meta-structure manufacturing method of the present invention, the laser beam may be a femtosecond laser beam having a laser pulse width in a femtosecond range.

According to the method for manufacturing a built-in meta-structure of the present invention, it is possible to prevent the meta-structure from being damaged by an external environment (external force, corrosion, etc.), and thereby the meta-structure can be used repeatedly.

In addition, according to the method of manufacturing a built-in meta-structure of the present invention, it is possible to easily and simply perform the manufacturing process by changing the physical properties of the workpiece using a universal laser beam and selectively removing only the regions where physical properties have changed.

Further, according to the method of manufacturing a built-in meta-structure of the present invention, the mutual adhesive force between the metal thin film layer and the inner wall surface of the microchannel can be increased, and the quality and production speed of the metal thin film layer can be improved.

Further, according to the built-in meta-structure manufacturing method of the present invention, by using the femtosecond laser beam having a femtosecond range in which the laser pulse width is shorter than the thermal diffusion time, it is possible to improve machining accuracy and prevent micro- have.

In addition, according to the method of manufacturing a built-in meta-structure of the present invention, it is possible to perform the process more easily and simply by omitting the etching step and the coating step, and the manpower, time, have.

FIG. 1 is a schematic view illustrating a process of manufacturing a built-in meta-structure according to an embodiment of the present invention.
FIG. 2 is a block diagram of a method of manufacturing the built-in meta-structure of FIG. 1,
FIG. 3 illustrates that the mutual adhesive force between the metal thin film layer and the inner wall surface of the microchannel is increased by the metal particles remaining on the inner wall surface of the microchannel in the course of performing the built-in meta-structure manufacturing method according to the embodiment of the present invention FIG.
FIG. 4 is a schematic view illustrating a process of fabricating a built-in meta-structure according to another embodiment of the present invention.
5 is a block diagram of a method of manufacturing the embedded meta-structure of FIG.

Hereinafter, embodiments of a method of manufacturing a built-in meta-structure according to the present invention will be described in detail with reference to the accompanying drawings. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail.

FIG. 2 is a block diagram of a method of manufacturing a built-in meta-structure according to an embodiment of the present invention. FIG. 3 is a cross- FIG. 5 is a view for explaining how the mutual adhesive force between the metal thin film layer and the inner wall surface of the microchannel is increased by the metal particles remaining on the inner wall surface of the microchannel in the process of manufacturing the built-in meta structure according to the embodiment.

1 to 3, a method (1) for manufacturing a built-in meta-structure according to an embodiment of the present invention relates to a method for manufacturing an artificial structure having an electromagnetic property Which includes a physical property changing step S1, an etching step S2 and a coating step S3.

1, the physical property changing step S1 moves the laser beam L along a virtual meta-structure area A1 having a certain pattern inside a workpiece F made of a transparent material Thereby changing the physical properties of the virtual meta-structure area A1.

The workpiece F may be made of a transparent material such as glass, sapphire, quartz, silica, etc., which can transmit light and has a certain strength or more. Here, the transparent material refers to a material having high transmittance through which both kinds of light having different wavelengths can be transmitted. That is, both a writing beam for fabricating the meta-structure and a probe beam for utilizing the manufactured built-in meta-structure can be transmitted while drawing along a predetermined path in the workpiece (F) It refers to the material.

The virtual meta-structure area A1 is configured to be located at a certain depth from the inside of the workpiece F, specifically, from both sides of the workpiece. The virtual meta-structure area A1 can be defined as a space in which a large number of unit structures (artificial atoms) are gathered to form a specific structure, which is repeatedly arranged to form a specific pattern, Is formed to be smaller than the amplitude of the wavelength, new electromagnetic / physical properties (for example, negative refractive index) that do not exist in the natural world are expressed.

The property change step S1 is preferably performed with a femtosecond laser beam. Because the femtosecond laser beam has a high output intensity capable of multi-photon absorption, only the imaginary meta-structured region A1 can locally change the physical properties and does not affect the periphery thereof to be. When the focal point of the laser beam L is irradiated on the workpiece F in the physical property changing step S1, vibrations are generated in the electrons present in the workpiece F, and this vibration is transmitted to the grating (not shown) So that heat is generated in the workpiece (F). It is known that the thermal relaxation time until the vibration is transmitted to the lattice and generates heat is usually several tens of picoseconds. If the laser pulse width is longer than the thermal diffusion time, the heat generated by the laser beam L propagates to the periphery of the focal point, making it impossible to perform precise processing. Especially, in the case of a material having high brittleness, . Therefore, the property change step S1 is preferably performed with a femtosecond laser beam having a femtosecond range in which the laser pulse width is shorter than the thermal diffusion time.

The physical properties in the physical property changing step S1 are factors determining the possibility of etching (etching or corrosion), and specifically, density, molecular arrangement, atomic bonding, hardness, chemical resistance, chemical resistance, Young's modulus, Cracking, solubility, yield strength and the like.

The etching step S2 is a step of selectively removing a part of the workpiece F corresponding to the virtual meta-structure area A1 by injecting the etching liquid Q into the virtual meta-structure area A1. The etching solution (Q) may be a solution of a strong corrosive such as nitric acid or hydrofluoric acid, and may be added with iodine or iodide to increase the etching rate.

In the present embodiment, the workpiece (F) can be made of an amorphous material having a uniform composition but an irregular lattice shape in which the atomic arrangement is disordered like a liquid. The physical property of the virtual meta-structure area A1 is changed by the laser beam L in the physical property changing step S1 and the physical property of the virtual meta-structure area A1 is changed by the etching liquid Q in the etching step S2 Only a part of the workpiece (F) whose physical properties have been changed can be selectively removed. In FIG. 3, the physical properties of the imaginary meta-structure region A1 are depicted as if a crack (K) is generated by changing density, molecular arrangement, atomic bonding, and the like.

Alternatively, the workpiece (F) may be made of a material having a regular composition in composition and atomic arrangement. The material of the imaginary meta-structured area A1 is changed from crystalline to amorphous by the laser beam L in the physical property changing step S1 and the etching solution S2 in the etching step S2 It is also possible to selectively remove only a part of the workpiece (F) which has been changed to an amorphous state by the workpiece (Q).

The coating step S3 is a step of coating the metal thin film layer T on the inner wall surface Ca of the microchannel C formed by selectively removing a part of the workpiece F as shown in Figs. . The properties of the meta-structure (M) depend on electromagnetic characteristics such as dielectric constant or the like, which indicates the degree of conduction or electrical polarization, and the metal thin film layer (T) has such an electromagnetic property.

The metal thin film layer T is coated by pulsed electroplating using an electric current of a pulse waveform and an atomic layer to be adsorbed one atomic layer on the inner wall surface Ca of the microchannel C by alternately supplying the elements necessary for forming the thin film layer Evaporation method (ALD), liquid metal cooling, and the like.

Here, it is advantageous in terms of coating strength of the metal thin film layer (T) that the material to be processed (F) contains a metal ion (I) as shown in Fig. A plurality of metal ions I existing in the imaginary meta-structure region A1 in the physical property changing step S1 are included in the laser beam L when the workpiece F contains metal ions I The metal atoms P existing in the inner wall surface of the microchannel C of the metal particles except for the metal atoms P are removed in the etching step S2, The mutual adhesive force between the metal thin film layer T and the inner wall surface Ca of the microchannel C is increased by the metal atoms P remaining in the inner wall surface Ca of the microchannel C in the coating step S3 will be.

The metal atoms P remaining in the inner wall surface Ca of the microchannel C can be used for the growth of the metal thin film crystal (not shown) The quality and the production rate of the metal thin film layer T can be improved.

The virtual meta structure area A1 is converted into the meta structure M in the inside of the workpiece F by the physical property changing step S1, the etching step S2 and the coating step S3, (M) is not exposed to the outside. That is, the meta-structure M is formed at a certain depth in the inside of the workpiece F so that the workpiece F surrounds and protects the meta-structure M, thereby protecting it from the external environment.

Conventionally, the meta structure M is formed on the surface of the workpiece F and is exposed to the outside. Since the thickness of the meta structure M is very thin, it is easily damaged by external force. In addition, since the material of the meta-structure (M) is metallic, it is also vulnerable to corrosion, and it is practically impossible to restore the meta-structure (M) Therefore, if the meta-structure M is damaged, it has to be replaced with a new meta-structure M, so that the material and processing cost have increased accordingly.

In the meantime, the method (1) for manufacturing a built-in meta-structure according to the present embodiment can solve all of these problems, and can change the physical properties of the workpiece (F) by using a universal laser beam By selectively removing only the changed area, the manufacturing process can be easily and simply performed.

The method (1) for manufacturing a built-in meta-structure according to the present embodiment may further include a step of changing the physical properties of the inlet and outlet.

As shown in FIG. 1 or FIG. 2, the inlet / outlet physical property changing step S4 may include an inlet area A2 in which one side of the virtual meta structure area A1 is connected to the outside to supply the etching liquid Q, The other side of the meta structure area A1 is connected to the outside to change physical properties of the outlet area A3 through which the etching liquid Q is discharged. If the unit structures constituting the meta-structure M are formed independently of each other without being communicated with each other, the physical properties of the passage area A4 connecting the unit structures with each other may be further changed as shown in the figure.

The etchant Q injected into the inlet area A2 in the etching step S2 is discharged to the outlet area A3 via the virtual meta structure area A1 after the inlet / outlet physical property changing step S4, A part of the workpiece F corresponding to the structure area A1 is selectively removed. The inlet / outlet physical property changing step S4 may be performed separately from the physical property changing step S1, but is preferably performed simultaneously in the physical property changing step S1 in terms of process efficiency.

Hereinafter, a method (2) for manufacturing a built-in meta-structure according to another embodiment of the present invention will be described. The same reference numerals as in the method (1) for manufacturing a built-in meta-structure according to an embodiment of the present invention are given the same reference numerals and a description thereof will be omitted do.

FIG. 4 is a schematic view illustrating a process of fabricating a built-in meta-structure according to another embodiment of the present invention, and FIG. 5 is a block diagram of a method of manufacturing the built-in meta-structure of FIG.

Referring to FIG. 4 or 5, a method (2) for manufacturing a built-in meta-structure according to another embodiment of the present invention includes a preparation step (S5) and a reduction step (S6).

The preparing step S5 is a step of preparing a workpiece F 'containing a metal ion (I') and made of a transparent material. Typically, special glasses containing a predetermined proportion of metal ions and photo-structurable can be used.

In the reducing step S6, the laser beam L is moved along the imaginary meta-structure area A1 'having a certain pattern inside the workpiece F' to form a virtual meta- (I ') is reduced to a metal atom (P') and reduced metal atoms (P ') are arranged along a virtual meta-structure region (A1').

Electrons e freely activated by the laser beam L in the reducing step S6 are coupled to the metal ions I 'and the reduced metal atoms P' gather together to form metal particles (not shown) (M ') in the inside of the workpiece (F').

Accordingly, in this embodiment, since the meta structure M 'is not exposed to the outside as well as the etching step S2 and the coating step S3 which are performed in one embodiment are omitted, Can be performed. As the process is simplified, it is possible to obtain additional effects that can reduce manpower, time, material cost, etc. required for the process.

In the reducing step S6, it is preferable that the laser beam L be processed using the femtosecond laser beam having the laser pulse width in the femtosecond range, as in the embodiment of the present invention.

The method of manufacturing a built-in type meta-structure of the present invention configured as described above can prevent the meta-structure from being damaged by an external environment (external force, corrosion, etc.) A usable effect can be obtained.

In addition, the method of manufacturing a built-in meta-structure according to the present invention configured as described above can easily and simply perform the process by changing the physical properties of the workpiece using a universal laser beam and selectively removing only the regions where physical properties have changed The effect can be obtained.

Further, in the built-in meta-structure manufacturing method of the present invention constructed as described above, by working the meta-structure using the workpiece containing metal ions, the mutual adhesive force between the metal thin film layer and the inner wall surface of the microchannel can be increased And the metal particles serve as seeds for inducing the growth of the metal thin film crystal, whereby the quality and the production rate of the metal thin film layer can be improved.

The method of manufacturing a built-in meta-structure according to the present invention configured as described above uses a femtosecond laser beam having a femtosecond range in which the laser pulse width is shorter than the thermal diffusion time, thereby improving the processing accuracy and causing micro- Can be obtained.

Further, in the method of manufacturing a built-in meta-structure of the present invention configured as described above, metal ions existing in a virtual meta-structure region are reduced to metallic atoms by moving a laser beam inside a workpiece made of a transparent material containing metal ions As a result, it is possible to perform the process more easily and simply by omitting the etching step and the coating step, and it is possible to reduce manpower, time, material cost, etc. have.

The scope of the present invention is not limited to the above-described embodiments and modifications, but can be implemented in various forms of embodiments within the scope of the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims.

S1: Physical property change step
S2: etching step
S3: coating step
S4: Step of changing the physical properties of the inlet and outlet
S5: Preparation phase
S6: Reduction step

Claims (9)

A physical property changing step of changing physical properties of the virtual meta-structure region by moving a laser beam along a virtual meta-structure region having a predetermined pattern in a workpiece made of a transparent material;
An etching step of injecting an etchant into the virtual meta-structure area to selectively remove a part of the work piece corresponding to the virtual meta-structure area; And
And a coating step of coating a metal thin film layer on the inner wall surface of the microchannel formed by selectively removing a part of the work piece,
Wherein the virtual meta-structure region is converted into a meta-structure within the workpiece by the physical property changing step, the etching step, and the coating step, and the meta-structure is not exposed to the outside,
The workpiece is made of a material containing metal ions,
In the physical property changing step, a plurality of metal ions existing in the virtual meta-structure region are reduced to metal atoms by the laser beam,
In the etching step, metal atoms other than the metal atoms existing on the inner wall surface of the microchannel among the metal atoms are removed,
Wherein the mutual adhesive force between the metal thin film layer and the inner wall surface of the microchannel is increased by the metal atoms remaining on the inner wall surface of the microchannel in the coating step. The method according to claim 1,
Wherein the work piece is made of an amorphous material,
In the physical property changing step, physical properties of the virtual meta-structure region are changed by the laser beam,
Wherein in the etching step, only a part of the workpiece whose physical properties are changed by the etchant is selectively removed. The method according to claim 1,
An inlet region in which one side of the virtual meta-structure region is connected to the outside to supply the etching liquid, and an outlet region where the other side of the virtual meta-structure region is connected to the outside to change physical properties of an outlet region through which the etchant is discharged. Further comprising:
In the etching step, an etchant injected into the inlet region is discharged to the outlet region via the virtual meta structure region, and a portion of the workpiece corresponding to the virtual meta structure region is selectively removed Wherein said method comprises the steps of: delete delete The method according to claim 1,
Wherein the physical property changing step is performed with a femtosecond laser beam having a laser pulse width in a femtosecond range. delete delete delete

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