KR101879769B1 - Modular saste gas scrubber - Google Patents

Abstract

The present invention provides a module type waste gas treating device, capable of largely reducing an installation space by accommodating multiple scrubber bodies in a single integrated treatment tank and minimizing hunting phenomenon in accordance with difference of an exhaust pressure. The module type waste gas treating device enables a powder ingredient in processing gas to equally flow inside the multiple scrubber bodies. The module type waste gas treating device is useful for facility extension by being installed in a module type in which a treatment tank and a water storage tank are separated. According to the present invention, the module type waste gas treating device for purifying waste gas using a cleaning solution includes: a scrubber body unit formed of an FRP material and having multiple outlets from which the waste gas is discharged and multiple inlets which the waste gas flows inside; a gas treatment filter unit installed in the scrubber body unit and treating the waste gas using the cleaning solution; the water storage tank formed of concrete in a rectangular shape with an open upper part to collect the cleaning solution, wherein the water storage tank is installed to accommodate the lower part of the scrubber body unit; a circulation pump unit installed on one side of the water storage tank and including a circulation pump for normal operation and a circulation pump for emergency operation; and a DIKE formed of the concrete and integrally formed with the water storage tank, wherein the DIKE is installed in the lower part of the water storage tank and has a center unit of a highland shape evenly uplifted and an edge unit of a valley shape.

Description

{MODULAR SASTE GAS SCRUBBER}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a modular waste gas treatment apparatus, and more particularly, to a modular waste gas treatment apparatus for treating waste gas discharged from a semiconductor factory, a chemical plant, and a chemical plant.

Exhaust gases emitted from semiconductor manufacturing plants, chemical plants, and chemical plants are not only harmful to human bodies because they are highly toxic, explosive, and corrosive, but also cause environmental pollution if they are released into the atmosphere. Therefore, it is necessary that a purification process for reducing the content of harmful components or the like below the allowable concentration is required for such an exhaust gas, and it is legally required to release only harmless gases through the purification process to the atmosphere.

For example, semiconductors are manufactured through various manufacturing processes such as oxidation, etching, deposition, and photolithography. To these semiconductor manufacturing processes, various types of toxic chemical agents and chemical gases are used as reactive gases, , A burning component, a toxic component, and the like.

Accordingly, it has been found that in the various stages of the semiconductor manufacturing process, gaseous toxic substances represented by arsine, phosphine, diborane, monosilane, ammonia, nitrogen oxide, boron trichloride, fluorine compounds and silica, Waste gas is generated.

In order to remove toxic substances and dust contained in such waste gas, various types of waste gas treatment devices are installed in an exhaust line of a semiconductor facility.

At present, there are burning method and wetting method to treat waste gas. The dry type is a method of treating an exhaust gas by decomposing, reacting or burning an ignitable gas mainly containing a hydrogen group or the like in a high temperature combustion chamber, and the wet type is a method in which waste gas is passed through and dissolved in a cleaning liquid such as water.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view showing an example of a wet waste gas treatment apparatus according to the prior art.

1, a wet waste gas treatment apparatus according to the related art includes a body 110, a blower 130, a circulation pump 140, a circulation pipe 150, a spray box 160, a water reservoir 170, a damper 180 And a DIKE 190 for supporting the body 110 and the like.

The waste gas flows into the body 110 through the damper 180 and the circulation pump 140 supplies the washing liquid of the water storage tank 170 into the spray box 160 through the circulation pipe 150, So that harmful substances and dusts are deposited in the filling material.

However, such a wet waste gas disposal apparatus is very large in size and requires a large area because it requires a peripheral space for maintenance. However, since it is installed on the roof of a manufacturing facility, installation space is limited. In addition, the FRP body 110 and the water storage tank 170 are integrally formed to remove all the existing apparatuses and install a new apparatus when the waste gas treatment apparatus is installed.

On the other hand, according to the prior art, even if two or three wet waste gas processing apparatuses are connected to the same duct header (for example, EXHAUST GAS HEADER, MAIN HEADER, etc.), these devices are completely separated from each other, There is a risk that hunting due to the pressure difference will occur. Particularly, in the case of a semiconductor facility, a hunting due to a pressure difference of a wet waste gas treatment device due to the characteristics of a semiconductor process may cause a great loss.

In addition, even if connected to the same duct header, it is completely separated from the individual wet waste gas treatment devices to maintain a space for maintenance between the devices. Therefore, if the POWDER component of the process gas flows into one of the devices, Problems such as valve clogging may occur. In this case, due to the characteristics of the waste gas treatment apparatus in which the gas or dust is collected and accumulated in the packing and the circulating water is reused, the salt concentration of the circulating water is increased, so that the waste gas treatment efficiency is gradually decreased and the pressure loss is increased beyond the designed value.

Registration Utility Model No. 0248212 (Sep. 14, 2001) Patent Registration No. 1175003 (Aug. 10, 2012)

The present invention can drastically reduce the installation space by accommodating a plurality of scrubber bodies in a single integrated treatment tank, minimize the hunting phenomenon according to the difference in exhaust pressure, and prevent the POWDER component in the process gas from flowing into a plurality of scrubber bodies The present invention has been made in view of the above problems, and it is an object of the present invention to provide a modular waste gas treatment apparatus capable of uniformly flowing the waste gas.

It is another object of the present invention to provide a modular waste gas treatment apparatus which is advantageous for facility expansion by installing a treatment tank and a water tank in a module type separated from each other.

A modular waste gas treatment apparatus according to the present invention is a waste gas treatment apparatus for purifying a waste gas using a cleaning liquid, the waste gas treatment apparatus comprising: a scrubber of FRP material having a plurality of inlets through which the waste gas flows and a plurality of outlets through which the waste gas is discharged; A body portion; A gas treatment filter unit disposed in the scrubber body and treating the waste gas using the cleaning liquid; A water tank of a concrete material installed to receive the lower portion of the scrubber body portion and having a rectangular parallelepiped shape opened at an upper portion thereof so as to collect the cleaning liquid; A circulation pump unit disposed at one side of the water storage tank and including a circulation pump for normal operation and a circulation pump for emergency operation; And a DIKE made of a concrete material formed integrally with the water storage tank, the water storage tank being disposed at a lower portion of the water storage tank, the central portion of the water storage tank having a flat raised ridge shape,

The scrubber body may include a plurality of scrubber bodies, and each of the plurality of scrubber bodies may be separated from each other by a partitioning damper disposed therebetween, the fluid flowing through the plurality of scrubber bodies.

The reservoir may include: a lattice-like structure formed to bear the load of the scrubber body directly under the plurality of scrubber bodies; And a partition installed under the partitioning damper and between the lattice-like structures.

In addition, the water storage tank may further include a partitioning valve provided at a lower side of the partition.

In addition, the bottom surface and the inner wall surface of the inside of the water reservoir are lined with FRP material.

The gas processing filter unit may include a box-shaped cartridge containing a filler to collect impurities contained in the waste gas; At least one main spraying pipe having a passage through which the waste gas can flow, and spraying a cleaning liquid to the cartridge; And a rinse solution supply pump connected to the main spray pipe having a main nozzle for supplying the rinse solution.

The modular waste gas treatment apparatus of the present invention can drastically reduce the installation area, and since the plurality of scrubber body parts constitute one body part differently from the conventional device, the risk of exhaust pressure hunting can be remarkably reduced. In addition, the materials of the water tank and the scrubber body are different and it is easy to separate them, so it is easy to expand the equipment. Also, since the packing material in the gas treatment filter unit is installed in a cartridge manner, it is easy to clean or replace the packing material.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an example of a wet waste gas treatment apparatus according to the prior art,
2 is a schematic diagram of a modular waste gas treatment apparatus according to an embodiment of the present invention,
FIG. 3 is a schematic diagram of a modular waste gas treating apparatus water tank and DIKE drawing according to an embodiment of the present invention,
4A and 4B are a plan view of a modular waste gas treatment apparatus according to an embodiment of the present invention,
FIG. 5 is a detailed connection diagram of a modular waste gas treatment apparatus according to an embodiment of the present invention,
6 is a front view of a main portion of a modular waste gas treatment apparatus according to an embodiment of the present invention,
7 is a side view of a main portion of a modular waste gas treatment apparatus according to an embodiment of the present invention,
8 is a plan view of a modular waste gas treatment apparatus according to an embodiment of the present invention,
9 is a front view of a main portion of a modular waste gas treatment apparatus according to an embodiment of the present invention,
10 is a side view of a main part of a modular waste gas treatment apparatus according to an embodiment of the present invention,
11 is a detailed view (plan view) of a variable partition according to an embodiment of the present invention, and
12 is a detail view (front view) of a variable partition according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, terms and words used in the present specification and claims should not be construed as limited to ordinary or dictionary terms, and the inventor should appropriately interpret the concepts of the terms appropriately It should be interpreted in accordance with the meaning and concept consistent with the technical idea of the present invention based on the principle that it can be defined. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not intended to limit the invention to the particular embodiments, It is to be understood that the invention includes all modifications, equivalents, and alternatives falling within the scope. It should also be understood that various equivalents and modifications may be substituted for those at the time of the present application.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, the terms "comprises" or "having" and the like refer to the presence of stated features, integers, steps, operations, elements, components, or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

In the following description of the present invention with reference to the accompanying drawings, the same components are denoted by the same reference numerals regardless of the reference numerals, and redundant explanations thereof will be omitted. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail.

FIG. 2 is a schematic diagram of a modular waste gas treatment apparatus according to an embodiment of the present invention, FIGS. 4A, 4B, and 8 are plan views of a modular waste gas treatment apparatus according to an embodiment of the present invention, 6 and 9 are a front view of a main portion of a modular waste gas treatment apparatus according to an embodiment of the present invention, and Figs. 7 and 10 are schematic views of an embodiment of the present invention FIGS. 11 and 12 are detailed views of a gate type variable partition according to an embodiment of the present invention. FIG.

The apparatus for treating a modular waste gas according to an embodiment of the present invention includes a scrubber body 110, a chimney 120, a blower 130, a circulation pump 140, a circulation pipe 150, a spray box 160, A water tank 170, a damper 180, a DIKE 190, and a partition damper 260.

An inlet 112 is formed at one side of the tubular scrubber body 110 and a damper 180 is disposed between the inlet 112 and the waste gas duct 613. The damper 180 is supplied with waste gas A guide vane (not shown) or a rectifying plate (not shown) may be installed so as to flow uniformly. A discharge port (113) is formed on the other side of the scrubber body part (110) so that gas can be discharged. An exhaust fan (130) is provided on the discharge port (113) side so that gas can be forcedly flowed.

A plurality of scrubber bodies 110-1, 110-2, and 110-3 are disposed in the scrubber body 110 and a plurality of scrubber bodies 110-1, 110-2, (Operation: operation), the partitioning damper 260 installed between the scrubber bodies 110-1, 110-2, and 110-3, when required for maintenance, Some or all of the scrubber bodies 110-1, 110-2, and 110-3 of the scrubber 110 may be separated. Here, the variable partition may be the damper system of FIGS. 4A and 4B or the gate system of FIGS. 8 to 12. However, the present invention is not limited thereto. For example, when the maintenance is performed, the scrubber body 110 may be divided into a plurality of scrubber bodies 110-1, 110-2, and 110-3), any structure may be used as long as it can be partially or wholly separated.

As shown in Figs. 11 and 12, the gate type variable partition shown in Figs. 8 to 10 is provided with a partitioning rail 264 and a partitioning blind 265 between the scrubber bodies 262 to 263 The blind blind 265 is lowered to the floor along the partitioning rail 264 to separate the scrubber body 110 into a plurality of scrubber bodies 110-1, 110-2 and 110-3.

At least one gas processing filter portion 270 is disposed in the scrubber body portion 110 and a demister 280 for removing droplets in the gas flow is disposed between the gas processing filter portion 270 and the exhaust port 113 . Filters such as RANDOM PACKING, STRUCTURED PACKING, CHEVRON and WIRE MESH are arranged in a BOX form in the gas processing filter unit 270 and the demister 280. The gas processing filter unit 270 and the demister 280 are provided with ladders A manhole 250 is installed so that an operator can access the workhole.

When the demister 280 is filled with contaminants and the pressure rises, the demister 280 is cleaned by spraying the cleaning liquid through the injection nozzle of the cleaning pipe 220.

A circulation pump unit 140 is installed at one side of the reservoir 170 below the scrubber bodies 110-1, 110-2 and 110-3 and the circulation pump unit 140 is connected to a plurality of circulation pumps 140-1 and 140-2 And the circulation pumps 140-1, 140-2, and 140-3 are connected to each other through the circulation supply pipe 150. The circulation pipes 150-1, 140-2, The cleaning liquid of the water storage tank 170 is supplied to the spray pipe 210 through the circulation pumps 140-1, 140-2 and 140-3 and the circulation supply pipe 150 and is supplied through the nozzle of the spray pipe 210 And may be injected into the bodies 110-1, 110-2, and 110-3.

Some of the circulation pumps 140-1, 140-2 and 140-3 in the circulation pump unit 140 may be for normal operation, and at least one of the circulation pumps 140-1, 140-2 and 140-3 may be for emergency operation. Meanwhile, although not shown, the cleaning liquid discharged from the plurality of circulation pumps 140-1, 140-2, and 140-3 is supplied to the plurality of circulation supply pipes 150 through a header (not shown). Accordingly, the cleaning liquid can be constantly supplied to the circulation supply pipe 150 irrespective of the normal operation or the emergency operation.

At this time, a level transmitter 414 for checking the level of the cleaning liquid is installed at a predetermined position of the water storage tank 170, and idling of the circulation pumps 140-1, 140-2, and 140-3 due to the low water level of the water storage tank 170 Can be prevented. The water tank 170 is connected to the water pipe 610 and a water supply valve 413 is provided between the water tank 170 and the water pipe 610. When the water level of the water tank 170 is lower than a predetermined level Constants can be supplied.

A drain port 119 for discharging a cleaning liquid is formed on one side of the water storage tank 170. A bottom surface 118 of the water storage tank 170 is connected to a drain port 119 so that the cleaning liquid can be collected and discharged toward the drain port 119. [ (119). The drain port 119 is connected to the cleaning liquid waste tube 117 communicating with the sewage pipe 611 through the drain pipe and the waste valve 416. The water storage tank 170 is connected to the medicine supply pipe 612 and the medicine supply valve 415 is provided between the medicine supply pipe 612 and the water storage tank 170.

The pH and electrical conductivity of the cleaning liquid of the circulation supply pipe 150 can be measured by the pH sensor 412 and the ORP sensor 411, respectively, and when the pH of the cleaning liquid falls below a predetermined value or rises above a predetermined value The medicine supply valve 415 is operated and the medicine can be supplied from the medicine supply pipe 612 to the cleaning liquid. In addition, when the electrical conductivity of the cleaning liquid rises above a predetermined value, the discard valve 416 operates and part or all of the cleaning liquid of the water storage tank 170 may be discharged to the cleaning liquid waste engine 117.

the pH of the cleaning liquid can be maintained at or above a predetermined value by using the pH sensor 412 and the ORP sensor 411 and the electric conductivity can be kept below a predetermined value to prevent the waste treatment efficiency from being lowered.

The disk filter unit 511, which is one of the filtration units of the self-cleaning waste gas treatment apparatus according to an embodiment of the present invention, is interlocked with the first three-way valve 512 and the second three-way valve 513. According to an embodiment of the present invention, the disk filter unit 511 may include a filter. However, the disk filter unit 511 may be a disk filter in which a plurality of disk filters are stacked, but the present invention is not limited thereto. Can also be used.

A first three-way valve 512 is connected to the housing side of the disk filter unit 511 and a second three-way valve 513 is connected to a lower portion of the housing of the disk filter unit 511. The washing liquid inlet pipe 520 and the reverse water discharge pipe 519 are connected to the first three-way valve 512 and the reverse osmosis water inlet pipe 521 and the ultra-membrane inlet pipe 530 are connected to the second three- do. Therefore, the flow path can be changed by adjusting the first three-way valve 512 and the second three-way valve 513.

The washing liquid inlet pipe 520 and the washing liquid recovery pipe 522 are connected to the water storage tank 170 and the reverse water washing inlet pipe 521 is connected to the water supply pipe 610 through the reverse water washing water supply valve 514, The discharge tube 519 is connected to the cleaning liquid waste tube 117. The cleaning liquid inlet pipe 520 is provided with a filtration pump 510 for forced flow of the cleaning liquid and a pressure gauge 515 is installed in the cleaning liquid inlet pipe 520 and the cleaning liquid recovery pipe 522. Here, the filtration pump 510, the first three-way valve 512, the second three-way valve 513, the pressure gauge 515, the reverse water supply valve 514, etc. may be connected to the control panel 700 and controlled .

The cleaning liquid of the water storage tank 170 can be supplied to the disk filter portion 511 through the cleaning liquid inlet pipe 520 by the filtration pump 510 and the cleaning liquid filtered and washed by the disk filter portion 511, And is returned to the water storage tank 170 through the recovery pipe 522. At this time, the filtration pump 510 may be commanded through the control panel 700 or automatically operated by the timer or pressure gauge 515.

2, reference numeral 610 denotes a water pipe, 611 denotes a sewer pipe, 612 denotes a chemical supply pipe, and 613 denotes a waste gas pipe. The water pipe 610, the sewage pipe 611, have.

As the cleaning of the cleaning liquid proceeds in the filter unit 234, the contaminants accumulate in the filter unit 234, so that the pressure rises and the filtering ability decreases. Therefore, it can be controlled by the control panel 700 to operate in the backwash mode when the pressure value detected by the pressure gauge 515 becomes equal to or higher than the set value.

It is desirable that the performance of the disk filter unit 511 be capable of filtering particles having an average diameter of 2 μm to 5 μm or more, which is a main cause of clogging of the scrubber among contaminants contained in the cleaning liquid to be treated.

FIG. 3 is a DIKE diagram of a storage tank for a modular waste gas treatment apparatus according to an embodiment of the present invention.

A water reservoir 170 made of concrete and a DIKE 190 made of concrete are installed under the tubular scrubber body 110. Unlike the scrubber body 110 of the FRP material, the water reservoir 170 is formed of a concrete material. In this case, when the maintenance or the like is required, the scrubber body 110 is easily separated from the water reservoir 170, The bonding force between the water storage tank 170 and the DIKE 190 can be enhanced by forming the water storage tank 170 and the DIKE 190 from the same material.

The water storage tank 170 is provided with a concrete partition 240 or 242 below the partitioning damper 260 so that the water storage tank 170 can be separated and operated when necessary (e.g., MAINTENANCE, And a partitioning valve 249 may be installed in the lower portion.

The water storage tank 170 is provided with horizontal and vertical gratings 110-1, 110-2 and 110-3 on the lower parts of the individual scrubber bodies 110-1, 110-2 and 110-3 so as to withstand the loads of the individual scrubber bodies 110-1, 110-2 and 110-3. 243 and 243 may be formed in the same size as that of the concrete partition 240 or 242. In this case,

The water reservoir 170 is formed by lining the liquid contact portions 244 to 247 in the reservoir with FRP material and circulating water from the scrubber bodies 110-1, 110-2 and 110-3, that is, All water can be stored and water can be made.

6). The DIKE height 245 corresponds to the height of the dike 190, which can be temporarily stored when the circulating water is discharged from the scrubber. It can be determined by capacity. Here, the reason why the DIKE 190 has a plateau shape that rises flat compared to the rim of the bony shape is to keep the circulation pump 130 stand, etc., dry, except in an emergency.

The waste gas treatment process of the modular waste gas treatment apparatus according to an embodiment of the present invention is as follows.

The washing liquid of the water storage tank 170 is injected into the scrubber body 110 through the nozzle of the spray tube 311 and the gas flow rate controller 111 is opened and the exhaust fan 114 The waste gas flows into the scrubber body 110 from the waste gas duct 613 through the inlet 112. The incoming waste gas passes through the gas treatment filter unit 270, and contaminants, solid matter, dust, dust, etc. contained in the waste gas are adhered to the filler plate together with the cleaning liquid.

Contaminants adhering to the filling plate may be collected and collected in the water storage tank 170 and recycled by the circulation pump 140. [ When the amount of the cleaning liquid is small, the circulation of the cleaning liquid is not smooth. Therefore, the level of the reservoir 170 is lowered by the level transmitter 414 and the constant supply valve 413 The cleaning liquid can be supplied from the water pipe 610.

The waste gas treated in the gas treatment filter unit 270 flows into the demister 280. The demister 280 removes the moisture contained in the waste gas and the moisture-removed gas passes through the blower 130 to the outside .

The degree of contamination of the gas processing filter unit 270 and the demister 280 is measured using a differential pressure meter 410 that detects a pressure difference between the inlet and outlet of the scrubber body 110, And the demister 280 are required to be cleaned, the water can be sprayed into the cleaning liquid through the spray tubes 311 and 312 to be cleaned.

The contamination degree detection sensor 516 connected to the water storage tank 170 detects the degree of contamination of the cleaning liquid and when the degree of contamination of the cleaning liquid in the water storage tank 170 reaches a predetermined value, the solid matters in the cleaning liquid are removed through the filtration units 511, 800, can do. That is, when the first three-way valve 512 and the second three-way valve 513 are adjusted so that the cleaning liquid flows through the disk filter unit 511 and the filtration pump 510 is operated, Is introduced into the disk filter unit 511 through the rinse solution inlet pipe 520 and the first three-way valve 512. The cleaning liquid filtered by the disk filter unit 511 passes through the second membrane filter unit 800 and the activated carbon cartridge filter 820 via the second three-way valve 513 and then through the cleaning liquid recovery pipe 522 to the storage tank And the filtered cleaning liquid can be reused. Accordingly, various particulate pollutants contained in the contaminated cleaning liquid can be effectively treated, clogging of the airflow due to contamination of the filling plate can be minimized, and consumption of the constant water as the cleaning liquid can be reduced. Here, the particulate pollutant to be removed may be various pollutants such as SiO ₂ , various insoluble substances and microorganisms.

When the disk filter unit 511 is contaminated due to the filtration process of the cleaning liquid, the disk filter unit 511 can be cleaned. That is, the first three-way valve 512 and the second three-way valve 513 are adjusted to form a flow passage so that the constants of the water supply pipe 610 pass through the disk filter portion 511 and the reverse water supply valve 514 The water in the water pipe 610 flows into the disk filter unit 511 through the reverse water inflow pipe 520 and the second three-way valve 513. The contaminated constant passing through the disk filter unit 511 flows into the cleaning liquid waste tube 117 through the first three-way valve 513 and the reverse water discharge pipe 519 and can be discarded. Here, the cleaning time of the disk filter unit 511 can be known through the pressure gauge 515, and the pressure difference between the inflow pressure and the inflow pressure of the cleaning liquid into the activated carbon cartridge filter unit 820 is detected. When the pressure difference reaches a predetermined value The disk filter unit 511 can be cleaned.

When the cleaning liquid is to be replaced, the cleaning liquid of the water storage tank 170 is discharged to the sewage pipe 611 through the drain nozzle 119 and the cleaning liquid waste tube 117.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. Various modifications and variations are possible within the scope of the appended claims.

110: scrubber body part 112: inlet
113: exhaust port 120: chimney
130: FAN (blower) 140: circulation pump unit
150: circulation supply pipe 160: spray box
170: Water tank 180: Damper
190: DIKE 210: Distributor
231: Filtration pump 232: Cleaning liquid inlet pipe
233: first three-way valve 234: disk filter
235: second three-way valve 236: flushing water piping
237: Station water inflow pipe 240: Concrete partition
241: Vertical grid 242: Concrete partition
243: Horizontal grid 244-246: Bone morphology in DIKE
260: partitioning damper 270: gas processing filter section
280: Demister

Claims (6)

A waste gas treatment apparatus for purifying waste gas using a cleaning liquid,
An FRP material scrubber body having a plurality of inlets through which the waste gas flows and a plurality of outlets through which the waste gas is discharged;
A gas treatment filter unit disposed in the scrubber body and treating the waste gas using the cleaning liquid;
A water tank of a concrete material installed to receive the lower portion of the scrubber body portion and having a rectangular parallelepiped shape opened at an upper portion thereof so as to collect the cleaning liquid;
A circulation pump unit disposed at one side of the water storage tank and including a circulation pump for normal operation and a circulation pump for emergency operation; And
A DIKE high-quality concrete material which is formed integrally with the water storage tank,
Wherein the scrubber body includes a plurality of scrubber bodies and each of the plurality of scrubber bodies is capable of separating fluids flowing in the plurality of scrubber bodies from each other by a partitioning damper disposed therebetween.
delete The water treatment system according to claim 1,
A lattice-like structure formed to bear the load of the scrubber body directly under the plurality of scrubber bodies; And
A partition provided below the partition damper and between the lattice-
And a control unit for controlling the operation of the modular exhaust gas treating apparatus.
The water treatment system according to claim 3,
A partitioning valve provided at the lower side of the partition,
Further comprising: a control unit for controlling the operation of the modular exhaust gas treating apparatus.
The method of claim 4,
Wherein the bottom surface and the inner wall surface of the inside of the water storage tank are lined with FRP material.
The gas processing apparatus according to claim 1,
A BOX-shaped cartridge containing a filler to collect impurities contained in the waste gas;
At least one main spraying pipe having a passage through which the waste gas can flow, and spraying a cleaning liquid to the cartridge; And
A cleaning liquid supply pump connected to the main spray pipe having a main nozzle for supplying the cleaning liquid,
And a control unit for controlling the operation of the modular exhaust gas treating apparatus.

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