KR101874226B1 - Flexible device and method for manufacturing of flexible inductor - Google Patents

Flexible device and method for manufacturing of flexible inductor Download PDF

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Publication number
KR101874226B1
KR101874226B1 KR1020170008564A KR20170008564A KR101874226B1 KR 101874226 B1 KR101874226 B1 KR 101874226B1 KR 1020170008564 A KR1020170008564 A KR 1020170008564A KR 20170008564 A KR20170008564 A KR 20170008564A KR 101874226 B1 KR101874226 B1 KR 101874226B1
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KR
South Korea
Prior art keywords
temperature
inductor
temperature sensor
sacrificial layer
flexible
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KR1020170008564A
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Korean (ko)
Inventor
김선국
이성호
이민구
정의현
Original Assignee
경희대학교 산학협력단
전자부품연구원
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Priority to KR1020170008564A priority Critical patent/KR101874226B1/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/40Structural association with built-in electric component, e.g. fuse
    • H01F27/402Association of measuring or protective means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F38/00Adaptations of transformers or inductances for specific applications or functions
    • H01F38/14Inductive couplings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • H01F2017/006Printed inductances flexible printed inductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/40Structural association with built-in electric component, e.g. fuse
    • H01F27/402Association of measuring or protective means
    • H01F2027/406Temperature sensor or protection

Abstract

The present invention relates to a flexible device including a temperature sensor array and an inductor formed on a flexible substrate, and a method of manufacturing an inductor in which a neutral plane is formed by transfer films attached on upper and lower sides, Electroplating can be used to supply power from a wireless power transmission module. By measuring the average temperature of a measurement object through a temperature sensor array, errors of different resistance values of the temperature sensors can be reduced have.

Description

TECHNICAL FIELD [0001] The present invention relates to a flexible device and a method of manufacturing a flexible inductor,

More particularly, the present invention relates to a flexible device including a temperature sensor array and an inductor formed on a flexible substrate, and a method of manufacturing a flexible device having a neutral plane To a method of manufacturing an inductor formed thereon.

An electronic device (electronic device) includes one or more circuit boards, and a typical circuit board uses a planar substrate that mechanically supports the electronic components.

Electronic components may include, for example, resistors, capacitors, switches, batteries and other more complex integrated circuit components, i. E., A microprocessor, and the circuit board generally includes a plastic substrate and a glass substrate.

Since a conventional electronic device uses a plastic substrate or a glass substrate, there is a limitation in the application range because of the flexibility. Therefore, in recent years, flexible devices fabricated to be bent by using a flexible substrate instead of a plastic substrate or a glass substrate have been developed.

 In general, an inductor is used in a flexible device. In particular, recently, with the emergence of System-on-Chip (SoC) related technology, a packaging technology that unifies various devices into a single chip has been developed, and an inductor having a small structure, low manufacturing cost, and excellent characteristics is required .

In order to meet such a necessity, Korean Patent Laid-Open Publication No. 10-2014-0089595 entitled " Method of manufacturing an electric inductor and related inductor device "is disclosed.

However, the prior art discloses a structure in which a conductive layer is formed on a dielectric layer and adjacent metal portions of the conductive layer are bonded together to form an electric inductor. In the case of using for a wireless power communication requiring a thick metal thickness, There is a disadvantage that the metal can be peeled off because the substrate is not resistant to heat. In addition, it is not suitable for supplying power to a flexible device because it is easily damaged when an impact is applied.

Korean Patent Publication No. 10-2014-0089595 (published on July 15, 2014), "Manufacturing Method of Electric Inductor and Related Inductor Device" Korean Patent Publication No. 10-2016-0052467 (published on May 12, 2016), "sheet type inductor" Korean Registered Patent No. 10-1634665 (June 23, 2016), "Flexible inductor and manufacturing method thereof" Korean Patent Publication No. 10-2014-0021095 (published on February 20, 2014), "Wireless Power Transmission Device for Enhancing User's Convenience in Use of Mobile Devices &

An object of the present invention is to provide a method of manufacturing a flexible device and a flexible inductor capable of receiving and supplying power from a wireless power transmission module by producing an electronic device using electroplating on a flexible substrate.

Another object of the present invention is to provide a method of manufacturing a flexible device and a flexible inductor in which an inductor is manufactured on a flexible substrate to supply power received from an external wireless power communication system wirelessly to the flexible device to charge the battery will be.

It is another object of the present invention to provide a flexible device and a method of manufacturing a flexible inductor, which can mitigate external stress due to bending by forming a neutral plane using transfer films on the upper and lower portions of the inductor.

It is another object of the present invention to provide a method and apparatus for measuring an average temperature for a measurement object requiring temperature control from a temperature sensor array including a plurality of temperature sensors formed in multi-channels, And a manufacturing method of the flexible device and the flexible inductor.

A flexible device according to an embodiment of the present invention includes a plurality of temperature sensors formed on a flexible substrate and a plurality of channels, wherein the temperature sensor includes a terminal for measuring a resistance value with respect to a temperature of a measurement object, Which is formed on the flexible substrate by forming a neutral plane by a temperature sensor array formed on upper and lower portions and a transfer film attached to upper and lower portions thereof and receiving power wirelessly from an external device to supply the temperature sensor array to the temperature sensor array, .

The inductor can be patterned by depositing metal on the flexible substrate formed on the sacrificial layer through electroplating.

The inductor may be fabricated by patterning the flexible substrate and then forming the neutral film by the transfer film attached to the upper portion and the transfer film attached to the lower portion after the sacrificial layer is removed.

The sacrificial layer can be separated from the rigid substrate by contact with water.

Wherein each of the plurality of temperature sensors is formed by transferring the multi-channel patterned by a photolithography process onto the flexible substrate, wherein the multi-channel is formed by depositing a platinum (Pt) film on a film formed of a polyimide solution Pt) thin film.

Each of the plurality of temperature sensors may include the multi-channel formed in a meander pattern.

The temperature sensor array may be formed in a patch-like structure by being connected to an IC circuit formed on the flexible substrate.

A method of manufacturing an inductor according to an embodiment of the present invention includes the steps of forming a sacrificial layer on a hard substrate, forming a flexible substrate on the sacrificial layer, patterning the inductor on the flexible substrate, Attaching a transfer film to an upper portion of the substrate, separating the sacrificial layer, and attaching the transfer film to a lower portion of the flexible substrate on which the sacrificial layer is separated to form a neutral plane.

The sacrificial layer may be formed by spin-coating any one of water-soluble polyvinyl alcohol and germanium oxide (Ge 2 O 3 ) on the hard substrate to form the sacrificial layer.

The patterning may include depositing a metal on the flexible substrate through electroplating to pattern the inductor.

The step of separating the sacrificial layer may separate the sacrificial layer from the rigid substrate through contact with water.

According to an embodiment of the present invention, an electronic device is manufactured using electroplating on a flexible substrate to receive and supply power from a wireless power transmission module.

According to an embodiment of the present invention, an inductor may be fabricated on a flexible substrate to supply power received from an external wireless power communication system wirelessly to the flexible device to charge the battery.

Also, according to the embodiment of the present invention, a neutral surface using a transfer film is formed on the upper and lower portions of the inductor, thereby alleviating external stress caused by bending.

According to an embodiment of the present invention, an average temperature for a measurement object requiring temperature control is measured from a temperature sensor array including a plurality of temperature sensors formed in multi-channels, and an error Can be reduced.

1 shows an embodiment of a flexible device according to an embodiment of the present invention.
2 is a view for explaining an embodiment of a temperature sensor array according to an embodiment of the present invention.
3A and 3B show the results of the resistance value according to the temperature change of the measurement object measured from one temperature sensor.
4A and 4B show the results of the average value according to the temperature change of the measurement object measured from the temperature sensor array formed of a plurality of temperature sensors.
5 shows a result of a deviation of a measured object from a temperature sensor array formed of a plurality of temperature sensors according to a temperature change.
6 is a flowchart illustrating a method of manufacturing an inductor according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings and accompanying drawings, but the present invention is not limited to or limited by the embodiments.

The terminology used herein is for the purpose of illustrating embodiments and is not intended to be limiting of the present invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. It is noted that the terms "comprises" and / or "comprising" used in the specification are intended to be inclusive in a manner similar to the components, steps, operations, and / Or additions.

As used herein, the terms "embodiment," "example," "side," "example," and the like should be construed as advantageous or advantageous over any other aspect or design It does not.

Also, the term 'or' implies an inclusive or 'inclusive' rather than an exclusive or 'exclusive'. That is, unless expressly stated otherwise or clear from the context, the expression 'x uses a or b' means any of the natural inclusive permutations.

Also, the phrase "a" or "an ", as used in the specification and claims, unless the context clearly dictates otherwise, or to the singular form, .

Furthermore, the terms first, second, etc. used in the specification and claims may be used to describe various elements, but the elements should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.

Unless defined otherwise, all terms (including technical and scientific terms) used herein may be used in a sense commonly understood by one of ordinary skill in the art to which this invention belongs. Also, commonly used predefined terms are not ideally or excessively interpreted unless explicitly defined otherwise.

In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. The terminology used herein is a term used for appropriately expressing an embodiment of the present invention, which may vary depending on the user, the intent of the operator, or the practice of the field to which the present invention belongs. Therefore, the definitions of these terms should be based on the contents throughout this specification.

1 shows an embodiment of a flexible device according to an embodiment of the present invention.

Referring to FIG. 1, a flexible device 100 according to an embodiment of the present invention includes an inductor 130 patterned on a flexible substrate 110 on which a temperature sensor array 120 is formed.

To this end, the flexible device 100 according to the embodiment of the present invention includes a flexible substrate 110, a temperature sensor array 120, and an inductor 130.

The flexible substrate 110 may be formed of, for example, polyimide, polycarbonate, polyacylate, polyether imide, polyether sulfone, polyether sulfone, And may be made of at least one material selected from the group consisting of polyethylene terephthalate and polyethylene naphthalate.

In addition, the flexible substrate 110 may be formed of a material of at least one of paper, polymer, woven fabric, and insulated metal foil.

Accordingly, the flexible substrate 110 is flexible and can be attached to the surface of the measurement object including the skin. In addition, since the polyimide has a melting point as high as 600 DEG C, thermal stability can be ensured and electroplating is possible, making it suitable for manufacturing the inductor 130 for wireless power transmission.

The temperature sensor array 120 is formed on the flexible substrate 110 including a plurality of sensors formed in multi-channels. Here, the temperature sensor includes a terminal for measuring a resistance value with respect to the temperature of the measurement object.

According to the embodiment, the temperature sensor array 120 may be formed in a patch-like structure by being connected to an IC circuit formed on the flexible substrate 110. [

IC circuits can process signal filtering, amplification, digitization, and processing functions by using integration techniques, and in some embodiments may be integrated and multi-functional integrated circuit sensors have.

Hereinafter, the temperature sensor array 120 included in the flexible device 100 according to the embodiment of the present invention will be described in detail with reference to FIG.

2 is a view for explaining an embodiment of a temperature sensor array according to an embodiment of the present invention.

2, a temperature sensor array 120 according to an embodiment of the present invention includes a plurality of temperature sensors 121, and a plurality of temperature sensors 121 includes a plurality of temperature sensors 121, .

Each of the plurality of temperature sensors 121 is formed by transferring the multichannel 122 and the terminal 123 patterned by a photolithography process to the flexible substrate 110 and the multichannel 122 is formed by transferring the polyimide solution (Pt) thin film on a film formed of a polyimide solution.

The multichannel 122 may be formed in a meander pattern that is meandering to cover a relatively large area.

According to an embodiment, the multi-channel 122 may be a meander pattern with a helical, rectangular loop, a pair of intermeshed meander patterns, a pair of separate concentric circular patterns formed in the outer helix, A meander pattern with a small rectangular loop formed in a large loop, a meander pattern with a small circular or tapered loop formed in a large loop, and a series of spiral patterns with a common central axis The pattern may be formed in any one of the patterns, and the patterns of the above-described types may be arranged in a matrix form in series or parallel, so that the shape, the type, and the number of the patterns are not limited thereto.

In addition, the multi-channel 122 may be a negative temperature coefficient thermistor.

For example, the multi-channel 122 may use a printed NTC (Negative Temperature Coefficient) thermistor, but is not limited to a printed NTC thermistor.

According to an embodiment, the multi-channel 122 is equally applicable to any flexible temperature sensor in which the resistance varies with temperature and can be a PTC (Positive Temperature Coefficient) thermistor, a Resistance Temperature Device (RTD) Or any device fabricated on a substrate material.

The temperature sensor array 120 according to the embodiment of the present invention includes a terminal 123 for measuring a resistance value with respect to a temperature of a measurement object.

The terminal 123 may be connected to both ends of the multi-channel 122 and may measure the resistance value of the measurement object.

For example, the terminal 123 may be formed on each of the plurality of temperature sensors 121 to measure a resistance value of the temperature sensor array 120 composed of a plurality of temperature sensors 121.

The temperature sensor array 120 may be implemented in a patch shape to measure an accurate temperature of the contact surface of the measurement object.

More specifically, the temperature sensor array 120 may be implemented in the form of a patch to come into close contact with the measurement object, and the shape of the temperature sensor array 120 may be formed according to the area or characteristics of the measurement object, To the object to be measured. That is, the temperature sensor array 120 can measure different resistance values for a plurality of regions of a measurement object having a large area.

The temperature sensor array 120 according to the embodiment of the present invention measures the temperature of a plurality of regions of the measurement object in accordance with the position where each of the plurality of temperature sensors 121 is disposed and calculates an average temperature (Not shown).

For example, the average temperature calculating unit may be included in the flexible device 100 according to the embodiment of the present invention. The average temperature calculating unit may be formed outside the flexible device 100, and based on the resistance value received from the temperature sensor array 120, May be calculated.

According to an embodiment, the average temperature calculator may measure an average temperature of a plurality of temperature sensors after excluding a specific temperature sensor among the plurality of temperature sensors 121 based on the resistance value sensed through the temperature sensor array 120 can do.

For example, when the measurement object has a large area or a temperature difference largely occurs in a part of the property of the object to be measured, the average temperature calculator receives a resistance value having a different value from each of the plurality of temperature sensors 121 can do. Accordingly, the average temperature calculator can measure the accurate temperature of the measurement object by calculating the average temperature with respect to the resistance value and the temperatures having different values, and improve the temperature accuracy.

As another example, the average temperature calculator may calculate the average temperature of the remaining temperature sensors 121, except for the temperature sensor which indicates the highest temperature (resistance value) or the lowest temperature (resistance value) among the plurality of temperature sensors 121 based on the measured resistance value The average value of the temperature can be calculated from the resistance value measured from the resistance value.

As another example, the average temperature calculator may calculate the average value of the temperature (e.g., the average value of the temperature) based on the resistance value sensed from the remaining temperature sensors after excluding the temperature sensor showing a sudden temperature change exceeding a predetermined reference among the plurality of temperature sensors 121 May be calculated.

1, an inductor 130 in a flexible device 100 according to an embodiment of the present invention forms a neutral plane by a transfer film adhered on upper and lower sides, and forms a neutral plane on a flexible substrate 110, And wirelessly receives power from an external device and supplies the power to the temperature sensor array 120.

The inductor 130 can be formed by depositing metal on the flexible substrate 110 formed on the sacrificial layer through electroplating and patterning the metal film. The inductor 130 is patterned on the flexible substrate 110, And then the neutral film is formed by the transfer film attached to the lower part.

For example, a sacrificial layer is formed on a hard substrate, a flexible substrate 110 is formed on the sacrificial layer, and a metal is deposited on the flexible substrate 110 through electroplating to pattern the inductor 130 have. Here, the metal may be a metal generally used for manufacturing an inductor for wireless power transmission, and the type of metal is not limited.

Thereafter, a transfer film is formed on the patterned flexible substrate 110, a sacrificial layer is separated through contact with water, and a transfer film is adhered to a lower portion of the flexible substrate 110 to produce a neutral surface.

For example, the rigid substrate may be a glass substrate, and the sacrificial layer may be a germanium (Ge) material. Since germanium materials are easily soluble in water, they can be immersed in water to separate the sacrificial layer.

The inductor 130 may receive power from the external inductor 210 of the wireless power communication system 200 to charge the battery wirelessly.

For example, the inductor 130 can supply the driving power of the temperature sensor array 120 and the flexible device 100, and in accordance with the embodiment, the electronic device (not shown) included in the flexible device 100 .

3A and 3B show the results of the resistance value according to the temperature change of the measurement object measured from one temperature sensor.

More specifically, FIG. 3A is a graph showing a resistance value of a measurement object measured at intervals of 10 DEG C from 30 DEG C to 80 DEG C using a temperature sensor array including one temperature sensor, FIG. And the resistance value of the object to be measured is measured at intervals of 1 占 폚 from 30 占 폚 to 40 占 폚 at intervals of 0.5 占 폚 from 36 占 폚 to 38 占 폚 using a temperature sensor array including a sensor.

Referring to FIGS. 3A and 3B, it can be seen that the resistance value also increases in proportion to an increase in temperature, and it is possible to more accurately detect a change in the resistance value as the measurement interval becomes narrower (or the measurement time becomes shorter) .

Also, it can be seen that the temperature sensor array including one temperature sensor has a limit to measure an accurate temperature for a measurement object to be measured, because the temperature accuracy varies with the attachment position or area of the measurement object.

4A and 4B show the results of the average value according to the temperature change of the measurement object measured from the temperature sensor array formed of a plurality of temperature sensors.

FIG. 4A is a graph showing a result of a resistance according to a temperature change of a measurement object using a temperature sensor array including one temperature sensor, and FIG. 4B is a graph showing a result of using a temperature sensor array including four temperature sensors And the results of the resistance value and the average value of each sensor according to the temperature change of the measurement object.

4A and 4B, it is confirmed that the accuracy and reliability of the average value of the temperatures calculated from the temperature sensor arrays constituted by four temperature sensors is higher than that of the temperature sensor array constituted by one temperature sensor as shown in FIG. 4A .

5 shows a result of a deviation of a measured object from a temperature sensor array formed of a plurality of temperature sensors according to a temperature change.

More specifically, FIG. 5 is a graph showing a deviation result measured at a temperature change from 0 DEG C to 50 DEG C using a temperature sensor array including one temperature sensor and a temperature sensor array including four temperature sensors to be.

Referring to FIG. 5, when measuring the average value of the temperature of the measurement object based on the resistance value measured from the temperature sensor array including four temperature sensors, the temperature of the measurement object is measured using one temperature sensor It can be seen that the deviation is smaller than when.

Accordingly, in the case of calculating the average temperature of a measurement object using a temperature sensor array formed of a plurality of temperature sensors, as compared with a temperature sensor array including one temperature sensor, errors due to external factors are small, A high accuracy temperature can be measured constantly.

6 is a flowchart illustrating a method of manufacturing an inductor according to an embodiment of the present invention.

Referring to FIG. 6, a sacrificial layer is formed on a rigid substrate in step 610.

Step 610 may be a step of spin-coating any one of water-soluble polyvinyl alcohol and germanium oxide (Ge 2 O 3 ) on the hard substrate to form the sacrificial layer.

The hard substrate may be a glass substrate, and the sacrificial layer may be a substrate (layer) formed of a germanium (Ge) material.

At step 620, a flexible substrate is formed on the sacrificial layer.

The flexible substrate may be a flexible substrate made of a solution type polyimide material. The polyimide has a high melting point of 600 ° C, which ensures thermal stability and is suitable for producing inductors for wireless power transmission by electroplating.

In step 630, the inductor is patterned on the flexible substrate.

Step 630 may be a step of patterning the inductor by depositing metal on the flexible substrate through electroplating.

According to the embodiment, the inductor may be patterned on a flexible substrate on which the temperature sensor array is formed.

In step 640, the transfer film is attached to the top of the patterned flexible substrate, and the sacrificial layer is separated.

Step 640 may be the step of separating the sacrificial layer from the hard substrate through contact with water.

The sacrificial layer is formed of a germanium material, and since the germanium material easily dissolves in water, it can be immersed in water to separate the sacrificial layer.

If not a sacrificial layer of germanium material, according to an embodiment, step 640 may be a step of separating the sacrificial layer through mechanical exfoliation.

At step 650, a transfer film is attached to the lower portion of the flexible substrate from which the sacrificial layer is separated to form a neutral plane.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. For example, it is to be understood that the techniques described may be performed in a different order than the described methods, and / or that components of the described systems, structures, devices, circuits, Lt; / RTI > or equivalents, even if it is replaced or replaced.

Therefore, other implementations, other embodiments, and equivalents to the claims are also within the scope of the following claims.

100: Flexible device
110: Flexible substrate
120: Temperature sensor array
121: Temperature sensor
122: Multi-channel
123: Terminal
130: Inductor
200: Wireless power communication system
210: external inductor

Claims (11)

delete delete delete delete delete delete delete Forming a sacrificial layer on the hard substrate;
Forming a flexible substrate on the sacrificial layer using a polyimide solution;
Patterning the inductor on the flexible substrate;
Attaching a transfer film on top of the patterned flexible substrate and separating the sacrificial layer; And
And attaching the transfer film to a lower portion of the flexible substrate on which the sacrificial layer is separated to form a neutral plane,
The step of forming the sacrificial layer
Forming a sacrificial layer by spin-coating any one of water-soluble polyvinyl alcohol and germanium oxide (Ge 2 O 3 ) on the hard substrate
Wherein the inductor is made of a metal.
delete 9. The method of claim 8,
The step of patterning
And depositing a metal on the flexible substrate through electroplating to pattern the inductor.
9. The method of claim 8,
The step of separating the sacrificial layer
And separating the sacrificial layer from the rigid substrate through contact with water.
KR1020170008564A 2017-01-18 2017-01-18 Flexible device and method for manufacturing of flexible inductor KR101874226B1 (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101635135B1 (en) * 2013-12-04 2016-06-30 이병정 Wireless charging receiver module

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101635135B1 (en) * 2013-12-04 2016-06-30 이병정 Wireless charging receiver module

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