KR101873689B1

KR101873689B1 - Sterilizer caninet using plasma

Info

Publication number: KR101873689B1
Application number: KR1020170113327A
Authority: KR
Inventors: 은하 최; 배준형; 상학 이; 영준 홍; 진성 최
Original assignee: 배준형; 광운대학교 산학협력단
Priority date: 2017-03-13
Filing date: 2017-09-05
Publication date: 2018-07-02

Abstract

Disclosed is a plasma sterilizing module having a dielectric barrier discharge plasma source, a plasma sterilizing module having a fan for adding an impulse to the flow of plasma discharged from the plasma source, and an active species. The plasma sterilizing module is disposed on one side of the cabinet, An elongated duct is provided within the cabinet, said duct having a plurality of nozzles to provide a disinfection cabinet from which active species are radiated into the cabinet.

Description

{STERILIZER CANINET USING PLASMA}

The present invention relates to a disinfecting apparatus for disinfecting an article placed inside a cabinet by supplying active species into a cabinet in which various articles such as dishes are stored by using plasma.

Plasma has long contributed to the domestic industry as a key technology in semiconductor manufacturing technology. In recent years, plasma technology has been fused with the medical industry, the beauty industry, and the food industry. Various types of therapeutic apparatuses using plasma have been emerging. In particular, various bio-application technologies have been developed in which a low-temperature plasma at atmospheric pressure is generated to generate a large amount of active radicals in the vicinity of a plasma generating apparatus, thereby exhibiting sterilizing action.

When firefighters help patients, clothes and accessories may be exposed to various hospitals that can be contacted, so it is necessary to disinfect them and it is necessary to continuously sterilize the dishes used in restaurants and homes. In addition, there are various kinds of articles requiring sanitization and disinfection such as various medical tools and medical clothes. The disinfection of such articles is performed by disinfecting devices such as an ozone sterilizer, an ion sterilizer, and an ultraviolet sterilizer, but the sterilizing effect is insufficient. For example, in the case of disinfecting dishes using an ultraviolet sterilizer, ultraviolet rays are installed in the upper part of the cabinet and sterilized only when the utensils such as cups are placed on the uppermost shelf. In addition, sterilization by an ultraviolet lamp alone may not provide a sufficient sterilization effect.

Korean Patent No. 10-1273888 discloses a multipurpose sterilization sterilizer to which a dielectric barrier plasma discharge source is applied. The plasma source of the publication includes a power supply electrode and a ground electrode, and a cooling fan is disposed thereon. A linear ground electrode is wrapped with an insulator under the flat plate type power source electrode and disposed closely to the power source electrode. In this source structure, the discharge efficiency of the plasma itself discharged between the two electrodes is not high, and the flow of generated plasma may be reversed by the cooling fan, so that the sterilizing power may not be utilized. In particular, the above publication may be equipped with a somewhat inefficient source because the sterilization chamber is disposed in the sterilization chamber, but it is not suitable when the sterilization area is wide.

That is, in the case of sterilizing the entire items in the cabinet using a plasma sterilizer, it is necessary to construct a sterilizer which has a better discharge efficiency and has sterilizing power to every place where each article is placed. In addition, if the article to be sterilized is a boot or a glove, it is necessary to sterilize both the inside and the outside of the article, and if the article is sterilized by sterilization means, the sterilization is not performed.

On the other hand, if the sterilization cabinet is housed in the room, when the door is opened after sterilization, sterilization materials such as ozone may be harmful to the human body if released. To solve this problem, it is necessary to have a compact and efficient ozone removing means as much as possible.

Accordingly, an object of the present invention is to provide a cabinet disinfector capable of sufficiently sterilizing staphylococci, E. coli, and the like for all articles placed in a cabinet by applying a plasma source to a cabinet disinfecting apparatus for disinfecting and placing articles in a cabinet.

In addition, the present invention intends to sufficiently sterilize the inner and outer sides of articles of various shapes, so that the air flowing out from the cabinet when the cabinet door is opened after sterilization is in a state of lowering the ozone concentration.

In addition, the present invention intends to provide a cabinet that is simple and compact.

According to the above object, the present invention provides a plasma sterilizing module including a dielectric barrier discharge plasma source, a plasma sterilizing module having a fan for adding a driving force to the flow of plasma and active species discharged from the plasma source, A tubing extending from the retaining housing is provided within the cabinet and the duct provides a plurality of nozzles to dispense active species from the nozzles into the cabinet.

In the cabinet, a horizontal partition is provided at an appropriate height according to need, so that the object to be processed can be placed on the partition. A hose is connected to a part of the nozzles of the installed duct to put the other end of the hose inside the article such as boots and gloves Allow internal disinfection.

Since the internal air of the cabinet includes ozone for sterilization, it is necessary to lower the concentration of ozone according to safety standards before opening the cabinet door. To this end, the present invention is characterized in that an exhaust pipe extending to the outside of the cabinet is installed, And the ozone was removed by placing activated carbon and heater.

Although the exhaust pipe may be drawn out to the outside, the exhaust pipe may be connected to the inside of the cabinet again for the compact and convenient use without piping work, and the air can be supplied in a circulating manner. According to this, after the disinfection, the air in which the ozone has been removed by the action of the activated carbon and the heater is supplied to the inside of the cabinet while the plasma is no longer discharged, and the activated carbon and the heater are repeatedly operated. It is possible to maintain the indoor environment safely because the ozone sufficiently removed air remains when the cabinet door is opened.

Further, a plasma sterilizing module disposed in the cabinet without a duct so that the plasma can be directly treated in the cabinet can be further provided, and an ultraviolet lamp and a heater can be further installed.

In the above,

Forming a first electrode in the form of a fork on a first substrate made of an insulator, covering the power supply electrode with a dielectric, forming a fork-shaped second electrode on a second substrate made of an insulator, covering the ground electrode with a dielectric, Wherein the first substrate and the second substrate are disposed in parallel to each other so that the fork-shaped first electrode and the second electrode are in a state in which the fork blades are staggered and interlocked with each other.

In the plasma source according to the present invention, the first electrode formed on the first substrate and the second electrode formed on the second substrate are spaced apart from each other, and the arrangement thereof is such that the first substrate / the first electrode / / Protective film / spacing / second substrate / second electrode / dielectric / protective film.

That is, the first electrodes and the second electrodes are arranged in such a manner that they face the same upward or downward direction with respect to the substrate rather than directly facing each other.

In this case, the protective film may be omitted.

In the plasma source, a front electrode having one plane is disposed on the upper surface of the dielectric substrate, a fork-shaped electrode is disposed on the lower surface of the dielectric substrate, and the electrodes are covered with a dielectric. This type of plasma source is advantageous because the plasma and the active species flow downward when the plasma is predominantly discharged from the forked electrode side and installed on the top of the cabinet.

Further, in the present invention, in order to lower the discharge voltage, the thickness of the substrate or the dielectric layer can be thinned.

Further, the present invention provides a plasma sterilizer in which a sterilizer is enhanced by further connecting a humidifier to the plasma sterilizer.

According to the present invention,

In a cabinet for disinfecting the object to be treated,

A plasma sterilization module having a dielectric barrier discharge plasma source and a fan for adding propulsion to the flow of plasma and active species discharged from the plasma source;

A conduit extending from a housing holding said sterilization module; And

And an exhaust pipe extending outwardly from the cabinet body,

The conduit having a plurality of nozzles to cause active species to be radiated from the nozzles into the cabinet,

Wherein the activated carbon and the heater are provided in the exhaust pipe so that ozone contained in the active species is removed from the air discharged to the outside of the cabinet after the disinfection.

The end of the exhaust pipe is connected to the inside of the cabinet so that the activated carbon in the exhaust pipe and the air having the lowered ozone concentration by the heater are re-supplied into the cabinet. After completion of the disinfection, Is repeatedly performed to clean the inside air before the cabinet is opened.

The duct may include a plurality of nozzles to supply active species to the entire interior of the cabinet, one end of the hose to the nozzle, and the other end of the hose to the inside of the object to be treated, A disinfection cabinet characterized by being sterilized and disinfected.

The cabinets may further include a plasma sterilizing module disposed in the cabinet without a pipe so as to process plasma directly to the object to be processed in the cabinet, further comprising an ultraviolet lamp or a heater .

The plasma source may further include:

A front electrode on one plane on the upper surface of the dielectric substrate and a fork electrode on the lower surface of the dielectric substrate; And

And a dielectric covering each of the electrodes, wherein the forked electrode is disposed to face the inside of the cabinet.

According to the present invention, active species generated due to plasma discharge flow through a pipe by a fan and are uniformly radiated into a cabinet through a plurality of nozzles to increase the disinfecting effect on a material to be treated. A hose is connected to a nozzle, By disposing the inner end of the hose such as a glove, internal disinfection can be performed, and thorough disinfection can be achieved.

In addition, the exhaust pipe is installed so that the ozone generating the sterilizing effect is not released when the cabinet door is opened after the disinfection, and the activated carbon and the heater are disposed thereon. Thus, ozone is removed by the activated carbon, So that the door can be opened after sufficiently lowering it.

In addition, when the end of the exhaust pipe is connected to the inside of the cabinet and the air is re-circulated, after the disinfection, the ozone-removed air is removed from the cabinet by the action of the activated carbon and the heater, And then the activated carbon and the heater are repeatedly operated. When the cabinet door is opened after a predetermined time has elapsed after the disinfection, the ozone almost completely removed is remained, so that the indoor environment can be safely maintained. This circulation configuration does not require a plumbing facility and is conveniently installed and has a compact advantage.

According to the present invention, there is provided a sterilizer having a high sterilizing power by producing a large amount of active radicals with high plasma discharge efficiency due to a thin substrate and a dielectric thickness.

In addition, the plasma and active radicals can travel a considerable distance by the fan, which can evenly disinfect the cabinet space.

In addition, according to the plasma source structure of the present invention, the discharge voltage can be lowered by controlling the thickness of the dielectric layer or the substrate to be thin, thereby increasing the discharge efficiency and extending the lifetime of the plasma source.

Further, the plasma sterilizer of the present invention can utilize a low voltage and is electrically safe.

In addition, when the humidifying device is combined with the plasma sterilization of the present invention, the generated ozone is reduced, thereby becoming a safer sterilizer.

1 is a schematic perspective view of a cabinet of the present invention.
2 is a schematic cross-sectional view showing an internal construction for sterilizing action of the cabinet of the present invention.
Fig. 3 illustrates the disinfection of the inside of the object to be treated by disposing the object to be processed on a partition (shelf) installed in the cabinet and connecting a duct nozzle with a hose.
4 shows the exhaust pipe structure of the cabinet of the present invention.
5 shows a circulation type exhaust pipe of the cabinet of the present invention.
6 shows an example of the plasma source of the present invention.
Fig. 7 shows a modified embodiment of the plasma source of the present invention.
8 is a transparent perspective view of a plasma generating apparatus capable of charging particles according to a modified embodiment of the plasma source of the present invention.
9 is a cross-sectional view of the plasma generating apparatus of Fig.
10 is a cross-sectional view showing an alternative embodiment of the plasma generating apparatus of FIG.
11 is a cross-sectional view showing another modified embodiment of the plasma generating apparatus of Fig.
FIG. 12 is a conceptual diagram showing the production of an active species by charging water vapor particles using the plasma generating apparatus shown in FIGS. 9 to 11. FIG.
13 is a graph of voltage applied to the plasma generating apparatus of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic perspective view of a disinfecting cabinet 100 of the present invention.

There is a door on the front, a sterilizing module 200 on the upper surface, and an exhaust pipe 300 on the rear surface. Various kinds of objects to be processed are placed in the cabinet 100 and the sterilizing module 200 is operated for a predetermined time to generate active species including plasma and ozone to perform sterilization and disinfection. After disinfection, And then the door is opened to take out the object to be treated.

2 is a schematic cross-sectional view showing an internal construction for sterilizing action of the cabinet of the present invention. The cabinet can be configured with shelves to place objects on, and a mesh shelf can be placed to allow more active spreading of active species.

The sterilization module 200 includes a plasma source 210 and a fan 220 so that the plasma 220 and the active species discharged from the plasma source are operated by the fan 220 to spread out. The sterilization module 200 is inserted into the housing, and the housing is connected to the duct 250 at the lower end to flow active species through the duct 250. A plurality of nozzles 255 are provided in the conduit 250 so that active species are radiated throughout the cabinet. The channel 250 may have a cylindrical shape, but may have a rectangular parallelepiped shape having an area covering the wall surface of the cabinet. In the case of the ceiling of the cabinet 100, a sterilization module 200 not connected to the pipeline is further added, so that direct plasma treatment can be performed. Further, the heater 230 and the ultraviolet lamp 240 may be further provided. The heater 230 is used for removing ozone after completing the plasma discharge, and the ultraviolet lamp generates a synergistic effect for sterilization.

Fig. 3 illustrates the disinfection of the inside of the object to be treated by disposing the object to be processed on a partition (shelf) installed in the cabinet and connecting a duct nozzle with a hose. Items such as boots and gloves are hose connected to the nozzle 255 so as to sterilize the inner surface, and the other end of the hose is placed in a glove or boots. With this configuration, the inner and outer surfaces of the article are simultaneously sterilized and disinfected.

4 shows the exhaust pipe structure of the cabinet of the present invention.

Activated carbon (310) and a heater (320) are disposed in the exhaust pipe (300) to remove ozone from exhausted air. The ozone removal effect of the activated carbon and the ozone removal effect by the heating of the heater generate synergy and almost completely eliminate the ozone.

It is preferable that a valve is provided at the body connection portion of the exhaust pipe 300 and the cabinet 100 so as not to exhaust the exhaust pipe 300 during the disinfection operation. After the disinfection is completed, that is, the plasma discharge is terminated and the valve is opened to pass through the activated carbon 310 of the exhaust pipe 300 and the heater 320, thereby exhausting the ozone-depleted air. The ozone concentration is low even when the door of the cabinet 100 is opened.

5 shows a circulation type exhaust pipe of the cabinet of the present invention.

The end of the exhaust pipe 300 may be connected to the inside of the cabinet 100 for the compact and convenient use without piping, and the air may be supplied again. One end of the exhaust pipe 300 protrudes from one of the bodies of the cabinet 100 and the other end thereof is connected to a place where the fan 220 of the sterilization module 200 is located. After the disinfection is completed, the ozone-depleted air is supplied into the cabinet 100 by the action of the activated carbon 310 and the heater 320 contained in the exhaust pipe 300 in a state in which the plasma is no longer discharged The operation of the activated carbon 310 and the heater 320 is repeatedly performed. When the door of the cabinet 100 is opened after a predetermined time has elapsed after the disinfection, sufficiently removed ozone is left, so that the indoor environment can be safely maintained . This circulation configuration does not require a plumbing facility and is conveniently installed and has a compact advantage.

6 shows an example of the plasma source of the present invention.

The electrodes consist of a pair of upper and lower plates, and an AC voltage is applied to discharge the plasma. That is, the first electrode 400 is formed as a power supply electrode on the surface of the first substrate 420, and the first electrode 400 is covered with the dielectric 440. Aluminum oxide is deposited as a protective film 450 on the dielectric body 440 in order to protect the dielectric and hydration. The second electrode 410 is formed as a ground electrode on the surface of the second substrate 430 and covered with the dielectric 440. Aluminum oxide is deposited as a protective film 450 on the dielectric body 440 in order to protect the dielectric and hydration.

The plasma source is constructed by arranging these two electrodes side by side. In this case, the first electrode 400 and the second electrode 410 do not directly face each other, but the second substrate 430 faces the first electrode 400 directly. Therefore, the arrangement order in the plasma source module is as follows. The first substrate / the first electrode / the dielectric / the protective film / the gap / the second substrate / the second electrode / the dielectric / the protective film. This arrangement makes it easy to adjust the interval between electrodes when real products are implemented, increases safety, and lengthens electrode life. The protective film is preferably formed as described above, but the plasma source may be formed in a state in which it is omitted.

Fig. 7 shows a modified embodiment of the plasma source of the present invention.

7, the front electrode 510 is disposed on one surface (upper surface) of the dielectric substrate 500 and the fork-shaped electrode 520 is disposed on the other surface (lower surface) And is covered with the dielectric body 530. Such an electrode configuration causes plasma discharge at the side where the forked electrode 520 is present and hardly occurs at the side of the front electrode 510. [ Therefore, the plasma discharged by the applied voltage occurs on almost one side. In the case of disposing a plasma source on a ceiling surface or a wall surface of the disinfecting cabinet 100 of the present invention, it is preferable that the discharged plasma should flow to the inside of the cabinet, . The dielectric 530 can be thinned for abundant plasma discharge while lowering the plasma discharge voltage.

The substrate is made of an insulator and may be made of a flexible material having heat resistance such as glass, polyethylene terephthalate (PET), polyimide (PI), polyolefin (PO), polyether sulfone It is possible.

By adjusting the thickness of the dielectric and the substrate, the discharge start voltage magnitude required for plasma and active species generation can be controlled. If these thicknesses are made thinner, the discharge voltage can be lowered, and the dielectric life is prolonged efficiently and, consequently, the plasma source life is prolonged.

The dielectric thickness may be from about 50 to several hundreds of um (less than 1000 um) and the substrate thickness from 0.5 mm to several mm (less than 10 mm).

The aluminum oxide protective film may be formed to a thickness of 1 to 5 μm.

The plasma sterilizing module of the present invention can use a 9 to 12V battery as well as a general domestic power source for convenience of disposition. The battery may be built into the sterilizer itself, or may be used by connecting an adapter to a household power source if the room is indoors. The power source for the plasma source includes a DC / AC high voltage inverter since the plasma must be driven by a 9-12 volt battery voltage. The pulse-like driving current generated at this time has a considerably low value of several mA. Therefore, it is very safe electrically.

In addition, a humidifier may be added to the cabinet 100 to cause the reaction of ozone to become hydrogen peroxide through steam, thereby reducing ozone and enhancing sterilizing power, but this is not essential.

Hereinafter, the plasma generating apparatus included in the cabinet will be more efficiently constructed.

8 is a transparent perspective view of the plasma generating apparatus according to the present invention.

The structure of the electrode is as follows.

An X electrode 20 and a Y electrode 30 are provided on the back surface and the upper surface of the substrate 10, respectively, and each electrode is covered with a dielectric 40. [ The X electrode 20 and the Y electrode 30 are electrically opposite in polarity to each other. The substrate is made of a dielectric material such as glass, polymer, ceramic, or quartz.

8, the Y electrode 30 of the plasma source (first plasma source) on the upper side is formed in a plate shape and disposed on the upper surface of the substrate 10, and the X electrode 20 is formed as a patterned electrode which is spaced apart from each other. Here, the Y electrode 30 may be formed in the same pattern as the X electrode 20.

The first plasma source 50 including both the X electrode 20 and the Y electrode 30 has a second plasma source 60 constructed in the same manner as the first plasma source 60, . The second plasma source 60 is made of a patterned electrode in which the Y electrodes 30 arranged on the upper surface of the substrate 10 are spaced apart from each other and the X electrode 20 arranged on the back surface of the substrate 10 is formed into a plate do.

The X electrode 20 and the Y electrode 30 are designed to have opposite polarities and the first plasma source 50 and the second plasma source 60 are connected to the X electrode 20 and the Y electrode 30, Are arranged to face each other. That is, the patterned electrode faces are disposed facing each other with an interval therebetween.

When alternating current power is applied to the first plasma source 50 and the second plasma source 60 for the plasma discharge, a plasma discharge occurs in each of the sources themselves. That is, as shown in FIG. 9, a plasma discharge occurs on the surface of the X electrode 20 of the first plasma source, which is a patterned electrode, and on the surface of the Y electrode 30 of the second plasma source. In other words, a plasma discharge occurs in a space between two planar electrodes.

On the other hand, the X electrode 20 of the first plasma source and the Y electrode 30 of the second plasma source, which are patterned electrodes, face each other vertically and are spaced apart from each other. Since voltages of opposite polarities are applied to each other, an electric field is formed in the space formed by d. At this time, if the interval d between the two plasma sources is too close to each other, a plasma discharge may occur. Therefore, the plasma discharge should not occur by appropriately spacing d. The electric field formed in the space between the two sources forces on the electrons generated by the plasma discharge. These electrons can charge the particles through interaction with the particles that exist between the two plasma sources. The oscillation of the electric field due to the alternating voltage applied to the electrode causes an up-down vibration of electrons and plays an additional effective role in charging the particles.

10 is a cross-sectional view of an embodiment in which the configuration of the second plasma source 60 is modified.

1 and the second plasma source 60 constitutes a Y electrode 30 as a planar electrode on the upper surface of the substrate 10 and is covered with a dielectric 40, No electrodes were placed on the backside of the substrate. The plasma discharge occurs on the surface of the X electrode 20 which is the patterned electrode of the first plasma source 50 and the Y electrode 30 as the plate electrode of the second plasma source 60 and the X electrode 20 as the patterned electrode ) Face each other with an interval, and an electric field is formed in the space between them to charge the particles. That is, since the X electrode 20, which is a patterned electrode of the first plasma source 50, and the Y electrode 30, which is a plate-shaped electrode of the second plasma source 60, are electrically opposite to each other, So that electrons generated at the time of plasma discharge oscillate and charge the surrounding particles.

Fig. 11 is a modified embodiment of Figs. 8 and 10, in which the arrangement of the second plasma source 60 of Fig. 10 is reversed. That is, the substrate 10 side of the second plasma source 60 is arranged with the X electrode 20 of the first plasma source 50 facing the substrate 10 of the second plasma source 60. The Y electrode 30 of the second plasma source 60 is disposed on the backside of the substrate 10 but is electrically opposite to the X electrode 20 of the first plasma source 50, An electric field is formed in a space between the X electrode 20 and the Y electrode 30 of the second plasma source 60. The electric field causes electron oscillation generated by the plasma discharge to charge the particles.

The patterned electrode functions as a plasma discharge electrode, and the electrode (patterned electrode or flat plate-shaped electrode) facing up and down with respect to the patterned electrode is for forming an electric field instead of plasma discharge. Electrostatic oscillation and particle charging are caused by electric field formation.

On the other hand, the Y electrodes arranged on the upper surface or the rear surface of the second plasma source 60 may be formed of patterned electrodes.

12 shows an application example to the above-described plasma generating apparatus.

When vaporized water vapor (H ₂ O) is put into the plasma generator, it is decomposed into hydrogen (H ₂ ) and atomic oxygen (O) by plasma discharge. Then, the chemical reaction between molecules and atoms generates H ₂ O ₂ and OH. As a result, highly reactive and active species with bactericidal effects can be produced. Accordingly, the treatment effect can be enhanced by introducing water vapor (H ₂ O) during the plasma treatment of particles including dust, polymer, vaporized liquid, or noxious gas.

In this case, the gap between the opposing electrodes of the first plasma source and the second plasma source may be differently adjusted depending on the object to be processed, and the applied voltage may vary depending on the gap between the electrodes, . The on / off time of the high voltage may also depend on the type and amount of active species required. Also, the spacing between the two rod electrodes in the patterned electrode of the first plasma source may be adjusted in conjunction with the amplitude and on / off time of the high voltage. For example, the interval between the rod electrodes is 50 to 500 μm, the amplitude of the applied high voltage is 1 to 10 kV, the on / off time is 20 to 150 msec, the interval between the first plasma source and the second plasma source is 5 to 15 mm, The undervoltage can be applied from 1/2 to 1/3 of the amplitude of the high voltage.

Further, as described above, an electric field is formed between the two plasma sources by the electric field forming electrode, and ozone can be decomposed due to collision with electrons oscillated by the electric field. That is, in the conventional plasma source, removal of ozone, which is a byproduct when using the sterilizing power of the active species by the plasma, was a serious problem. To this end, additional facilities such as activated carbon were used, but according to the present invention, The ozone can be removed, thereby simplifying the structure.

Fig. 13 shows a voltage driving waveform for driving the previously described plasma generator for particulate charging. In order to regulate the temperature of the plasma source and to regulate the generation amount of the active species, it is generally possible to operate by applying the burst mode as shown in the left waveform. The burst mode method is a method in which the plasma is turned on and the discharge on / off time is controlled as shown in the waveform of FIG.

However, the driving waveform applied to the plasma generator for particulate charging according to the present invention may be implemented as a graph shown on the right side in addition to the basic burst mode. That is, the plasma driving waveform for particle charging generates a plasma discharge (dark discharge) or a townsend discharge (discharge in the high voltage region) to generate anions and electrons. In the next low voltage region, as described above, an electric field for charging particles is generated. The voltage at a low voltage has a magnitude (intensity) of about 40 to 60% (preferably 50%) as compared with a voltage at a high voltage, and the voltage at this time is low to cause a plasma discharge At low voltage, discharge does not occur but only electric field is formed. In the general drive waveform shown on the left side, an electric field is applied only when the voltage is applied on time to charge the particles. However, in the right drive waveform newly constructed according to the present invention, there is an electric field continuously in addition to the discharge The time for charging the particles is greatly increased. That is, when a high voltage is applied and a plasma discharge occurs, as well as during a period in which no discharge occurs, a low voltage is applied and an electric field is continuously formed, so that charging of particles can be actively generated.

In summary, the present invention has a structure in which the discharge regions of the first plasma source and the second plasma source are disposed opposite to each other, and the electrons generated in the plasma discharge and the electric field generated between the first plasma source and the second plasma source Can be used for particle charging and activation. The present invention can be applied to any plasma source and electrode structure capable of performing the above functions, and it is possible to control variables such as the interval between the first plasma source and the second plasma source, the intensity of the applied voltage, .

The types of particles that can be treated by the plasma generating apparatus of the present invention are various. It is possible to treat many kinds of particles including dust, polymer, vaporized liquid and harmful gas which is contaminated biologically / chemically. By applying a plasma generating device capable of charging particles, disinfection of the articles placed in the cabinet, ozone, fine dust and fine harmful substances are filtered again by the activated carbon, so that more thorough disinfection effect can be obtained.

It is apparent that the present invention is not limited to the above-described embodiment, and that various applications and modifications can be made by those skilled in the art to which the present invention belongs.

100: Cabinet
200: sterilization module
210: plasma source
220: Fan
230: heater
240: ultraviolet lamp
250: channel
225: Nozzle
300: Exhaust pipe
310: activated carbon
10: substrate
20: X electrode
30: Y electrode
40: Dielectric
50: first plasma source
60: a second plasma source

Claims

In a cabinet for disinfecting the object to be treated,
A plasma sterilizing module having a dielectric barrier discharge plasma generator and a fan for adding a driving force to the flow of plasma and active species discharged from the plasma generator;
A conduit extending from a housing holding said sterilization module; And
And an exhaust pipe extending outwardly from the cabinet body,
The conduit having a plurality of nozzles to cause active species to be radiated from the nozzles into the cabinet,
The exhaust pipe is provided with activated carbon and a heater so that ozone contained in the active species is removed from air exhausted to the outside of the cabinet after disinfection by sterilizing the exhaust gas. The end of the exhaust pipe is connected to the inside of the cabinet again, Wherein the air having a low ozone concentration is supplied to the inside of the cabinet, and after the disinfection, the activated carbon and the heater are repeatedly operated to purify the inside air before opening the cabinet.

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[2] The apparatus according to claim 1, wherein the duct comprises a plurality of nozzles to supply active species to the entire interior of the cabinet, one end of the hose is connected to the nozzle, and the other end of the hose is placed inside the object to be treated, Wherein said disinfecting cabinet is a disinfection cabinet.

The cabinet according to claim 1, further comprising a plasma sterilizing module disposed in the cabinet without a duct so that plasma can be directly applied to the object in the cabinet, and further comprises an ultraviolet lamp or a heater.

The plasma processing apparatus according to any one of claims 1, 3, and 4,
A front electrode on one plane on the upper surface of the dielectric substrate and a fork electrode on the lower surface of the dielectric substrate; And
And a dielectric covering each of the electrodes, wherein the forked electrode side is disposed to face the inside of the cabinet.

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