KR101855298B1 - Optical microscope for irradiating light to enlarge within working distance and method therefor - Google Patents

Abstract

An optical microscope for illuminating light by magnifying an angle within a working distance is proposed. An optical microscope that irradiates light by magnifying an angle within a working distance includes a light source for irradiating light toward a sample; An angle control unit for controlling an angle of irradiation of the light emitted from the light source; An angle enlarging unit for enlarging an irradiation angle of the light whose irradiation angle is controlled by the angle control unit; And a light converging unit that collects the light having an enlarged irradiation angle in the angle expanding unit and makes the light incident on the sample, wherein the angle control unit and the angle expanding unit adjust the predetermined working distance between the light converging unit and the sample the irradiation angle of the light can be enlarged within the working distance of the sample.

Description

TECHNICAL FIELD [0001] The present invention relates to an optical microscope and an optical microscope for illuminating light by expanding an angle within a working distance,

The following embodiments relate to an optical microscope and an optical microscope for illuminating light by enlarging an angle within a working distance, and more particularly to an optical microscope for illuminating a sample by enlarging an angle of light irradiation within a limited working distance An optical microscope and a method thereof.

An optical system is an image of an object using reflection or refraction of light, or transmits light energy, and is made up of a combination of a reflective mirror, a lens, and a prism.

Recently, it is possible to measure the shape and optical properties of a sample by measuring a three-dimensional refractive index distribution such as a microscopic specimen (sample) or a semiconductor processing product as well as a one-dimensional and two-dimensional image of a sample using an optical system such as a microscope .

For example, several 2D holographic images (including light absorption images and phase retardation images of light), which are measured by varying the incident angle of a plane wave incident on a sample for measurement of a three-dimensional refractive index distribution, Dimensional scattering potential from the two-dimensional images of the three-dimensional image.

The conventional method can directly move the configuration of the sample or the device to change the angle of incidence of the plane wave, but in this case, it has a problem in the measurement speed and accuracy. For example, in the case of directly moving the sample, it is difficult to fix the rotation axis of the sample, a problem due to vibration occurs, and if the biological cell such as a cell is directly rotated, the sample may be deformed. Further, when the structure of the apparatus is moved, it is difficult to stably control the angle of incidence due to the fine vibration or the like, and precise optical alignment is impossible.

E. Wolf, "Three-dimensional structure determination of semi-transparent objects from holographic data," Optics Communications Vol. 1, Issue 4, 153-156 (1969). A. F. Fercher et al., Image formation by inversion of scattered field data: experiments and computational simulation, Applied Optics Vol. 18 (4), Issue 14, 2427-2439 (1979).

Embodiments describe an optical microscope and its method for illuminating light by magnifying an angle within a working distance and more specifically to a method for magnifying an angle of illumination of light without mechanical movement of the configuration within a limited working distance, And the like.

Embodiments provide a method and system that magnify an angle of illumination of light passing through a digital micromirror device (DMD) or a microelectromechanical system (MEMS) using a plurality of lenses and then incident on the sample, An optical microscope for irradiating light with an enlarged angle within a working distance capable of obtaining a precise image, and a method thereof.

An optical microscope that irradiates light by magnifying an angle within a working distance according to an exemplary embodiment includes a light source for irradiating light toward a sample; An angle control unit for controlling an angle of irradiation of the light emitted from the light source; An angle enlarging unit for enlarging an irradiation angle of the light whose irradiation angle is controlled by the angle control unit; And a light converging unit that collects the light having an enlarged irradiation angle in the angle expanding unit and makes the light incident on the sample, wherein the angle control unit and the angle expanding unit adjust the predetermined working distance between the light converging unit and the sample the irradiation angle of the light is enlarged in the working distance to irradiate the sample.

The angle control unit may include a digital micromirror device (DMD) to adjust the diffraction angle, and may change the pattern of the DMD to irradiate the light at a specific position.

The angle control unit may be formed of a micro electro mechanical system (MEMS).

Wherein the angle enlargement unit includes a first lens disposed on the angle control unit side and incident with the light whose irradiation angle is controlled, And a second lens that is disposed between the first lens and the light converging portion and through which the light having passed through the first lens is incident and passes light through the light converging portion, And a distance between the first lens and the second lens is a sum of a focal length of the first lens and a focal length of the second lens.

The angular enlargement unit may include a combination of a convex lens and a concave lens, thereby enlarging the irradiation angle of the light.

The light converging unit may include a tube-shaped mirror to refract the light and to enter the sample.

The light converging unit may include a holographic grating to diffract the light and to enter the sample.

A method of irradiating light in an enlarged angle within a working distance according to another embodiment includes irradiating light from a light source toward a sample; Controlling an irradiation angle of the light irradiated from the light source; Enlarging an irradiation angle of the light whose irradiation angle is controlled using at least one lens; And irradiating the sample with the light having the increased irradiation angle gathered and entering the sample, wherein the irradiation angle of the light is increased within a predetermined working distance.

The step of controlling the irradiation angle of the light emitted from the light source may include a digital micromirror device (DMD) or a micro electro mechanical system (MEMS) to adjust the diffraction angle, Wherein the step of enlarging the angle of irradiation of the angle-controlled light comprises the steps of: irradiating the first lens with the irradiation angle controlled first lens and the second lens through which the light having passed through the first lens is incident, Wherein the focal length of the first lens is larger than the focal length of the second lens and the distance between the first lens and the second lens is larger than the focal length of the first lens and the focal length of the second lens, And the focal length of the second lens.

The step of collecting the light having the increased irradiation angle and entering the sample may include a tube mirror or a holographic grating to diffract the light and enter the sample.

According to embodiments, an angle of irradiation of light passing through a digital micromirror device (DMD) or a micro-electromechanical system (MEMS) is enlarged using a plurality of lenses and then incident on a sample, An optical microscope for irradiating light by enlarging an angle within a working distance at which an accurate image can be obtained can be provided.

In addition, according to the embodiments, the angle of irradiation of light passing through the digital micromirror device (DMD) or the microelectromechanical system (MEMS) is enlarged using a plurality of lenses, and then incident on the sample, It is possible to improve the measurement speed and accuracy since no vibration and noises are generated.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view for explaining an optical microscope for irradiating light by magnifying an angle within a working distance according to an embodiment. FIG.
FIG. 2 is a schematic view of an optical microscope for illuminating light by magnifying an angle within a working distance according to an embodiment. FIG.
3 is a block diagram illustrating an optical microscope for illuminating light by magnifying an angle within a working distance according to an embodiment.
4 is a view for explaining an angular enlargement unit according to an embodiment.
5 is a view showing an example of an angular enlargement unit according to an embodiment.
6 is a diagram showing an example of a light converging unit according to an embodiment.
FIG. 7 is a flow chart illustrating a method of illuminating light by magnifying an angle within a working distance according to an embodiment.

Hereinafter, embodiments will be described with reference to the accompanying drawings. However, the embodiments described may be modified in various other forms, and the scope of the present invention is not limited by the embodiments described below. In addition, various embodiments are provided to more fully describe the present invention to those skilled in the art. The shape and size of elements in the drawings may be exaggerated for clarity.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view for explaining an optical microscope for irradiating light by magnifying an angle within a working distance according to an embodiment. FIG.

Referring to FIG. 1, an optical microscope for exposing light in an enlarged working distance according to an exemplary embodiment, or an optical microscope for exposing light in an enlarged angle within a working distance according to an embodiment The optical system including the light source 10 may include a DMD / MEMS mirror 20, and two lenses 40 and 50. In addition, according to the embodiment, the optical microscope that expands the angle within the working distance and irradiates light may further include a camera, which is a photographing device for photographing an image, and at least one mirror for transmitting light to the camera .

A sample is placed in the space 60 between the two lenses 40 and 50 and a plane wave can be incident on the DMD / MEMS mirror 20 when the sample 10 is irradiated with light. Here, the pattern of the DMD / MEMS mirror 20 is adjusted to exhibit the same effect as the mirror is rotated, so that the mirror can be precisely scanned at high speed without moving.

Here, the two lenses 40 and 50 may be composed of a condenser lens 40 and an objective lens 50.

The condenser lens 40 passes the light emitted from the light source 10 and is adjustable in the Z-axis direction. Accordingly, the position of the optimum condensing lens 40 can be automatically found by examining the amount of change in the position of the region irradiated with the light according to the height of the condensing lens 40.

Here, the condenser lens 40 is a lens for collecting light in one place. It is used to concentrate the light in a desired direction and place. In addition to collecting light simply according to purposes and purposes, it may increase the resolution of the image or refract light have.

The objective lens 50 is spaced apart from the condenser lens 40 by a predetermined distance and allows light passing through the condenser lens 40 to pass therethrough.

Here, the objective lens 50 is a lens near the object in the optical system and can be used to form an image of an object. At this time, the objective lens 50 may include a reflection mirror used for the same purpose.

In other words, in an optical microscope that irradiates light by magnifying an angle within a working distance according to an embodiment, a focusing lens and an objective lens are disposed one above and one below, respectively, and the light irradiated from the light source is transmitted to the camera, Can be obtained.

On the other hand, when the DMD / MEMS mirror 20 is used, high precision scanning is possible but the working distance 70 is short.

Thus, the angle of light that has passed through the DMD / MEMS mirror 20 can be increased by using the angle expandable lens 30. Here, the angle expandable lens 30 may be formed of at least one lens.

In particular, the angle-expandable lens 30 is composed of two lenses to enlarge the irradiation angle of the light, and the focal length of the lens disposed on the DMD / MEMS mirror 20 side is made larger, Can be enlarged.

For example, the angle-magnifiable lens 30 may be a combination of a convex lens and a concave lens.

Conventionally, a method of rotating a disk-shaped lens and scanning the laser through an inner hole is used. However, in this case, vibration or noise is generated due to the rotation of the lens, and precise measurement is difficult.

Accordingly, an optical microscope for illuminating light by magnifying an angle within a working distance according to an embodiment may use an illumination angle of light passing through a digital micromirror device (DMD) or a microelectromechanical system (MEMS) By zooming in and then entering the sample, high speed and precise image measurement within a limited working distance is possible. The measured image may be a 1D, 2D, or 3D image, and may be a 3D refractive index distribution measurement image.

FIG. 2 is a schematic view of an optical microscope for illuminating light by magnifying an angle within a working distance according to an embodiment. FIG.

2, an optical microscope for exposing light in an enlarged angle within a working distance according to an exemplary embodiment includes a light source 210, an angle control unit 220, an angle increasing unit 230, and a light converging unit 240 ).

A light source 210 can irradiate light toward a sample (sample 250).

For example, a laser may be used as the light source 210, and the light source 210 may irradiate the sample 250, such as a cell to be measured, with a laser beam. The sample (sample 250) may be an object to be measured, for example, a cell, a bacterium or a microorganism, or may be an object including a cell or the like.

The angle control unit 220 controls the angle of irradiation of the light emitted from the light source 210 and is controlled by using a digital micromirror device (DMD) or a micro electromechanical system (MEMS) The irradiation angle of the light emitted from the light source 210 can be adjusted.

The angle expanding unit 230 enlarges the angle of irradiation of the light whose angle of illumination is controlled by the angle control unit 220, and can enlarge the angle of light irradiation using a plurality of lenses or a polymer mirror, for example.

In particular, the angular enlargement unit 230 may include two lenses to enlarge the irradiation angle of light. At this time, the focal distance of the lens disposed on the side of the angle control unit 220 is larger than the focal distance of the lens disposed on the side of the light converging unit 240, so that the light irradiation angle can be enlarged. And the distance between the two lenses may be the sum of the focal lengths of the two lenses.

For example, the angle enlargement unit 230 may include a plurality of lenses, and may be formed of a combination of a convex lens and a concave lens, thereby enlarging the irradiation angle of light.

As another example, the angular enlargement unit 230 may be formed of a combination of a cone-shaped lens and a dome-shaped lens, thereby enlarging the irradiation angle of light. The light having passed through the angle control unit 220 is reflected by the cone-shaped lens, and then the plane wave can be irradiated by the dome-shaped lens.

As another example, the angular enlargement unit 230 can perform tomography by measuring a 1D image by enlarging an irradiation angle of light using a polymer mirror or the like.

The light converging unit 240 collects the light having the increased irradiation angle from the angle enlarging unit 230 into one place and enters the sample 250. The light converging unit 240 may be a tube mirror or a holographic grating, So that light can be diffracted and incident on the sample 250.

The angular control unit 220 and the angular enlargement unit 230 are configured as described above to secure the working distance 260 between the light converging unit 240 and the sample 250, It is possible to acquire high-speed and precise image by enlarging the irradiation angle of light.

An optical microscope for magnifying an angle within a working distance according to one embodiment of the present invention or an optical microscope for illuminating light or an optical microscope for magnifying an angle within a working distance according to an embodiment to irradiate light may be realized by a microscope And may be an apparatus that includes at least a portion of a microscope.

An optical microscope for illuminating light by magnifying an angle within a working distance according to an embodiment will be described in more detail below.

3 is a block diagram illustrating an optical microscope for illuminating light by magnifying an angle within a working distance according to an embodiment.

3, an optical microscope 300 for exposing light in an enlarged angle within a working distance according to an embodiment includes a light source 310, an angle control unit 320, an angle expanding unit 330, (340). ≪ / RTI > In addition, according to the embodiment, the optical microscope 300 that expands the angle within the working distance and irradiates light further includes a camera, which is a photographing device for photographing an image, and at least one mirror for transmitting light to the camera Lt; / RTI >

A light source 310 can irradiate light toward a sample 350.

For example, a laser may be used as the light source 310, and the light source 310 may irradiate the sample 350, such as a cell to be measured, with a laser beam. Here, the light source 310 can be used without being limited by the wavelength and intensity of the light source 310, and the position of the light source 310 is not limited.

The sample (sample) 350 may be an object to be measured, for example, a cell, a bacterium or a microorganism, or may be an object including a cell or the like.

The angle control unit 320 may control the angle of the light emitted from the light source 310.

The angle control unit 320 may control an angle of light emitted from the light source 310 using a digital micromirror device (DMD) or a micro electro mechanical system (MEMS).

More specifically, the angle control unit 320 may include a digital micromirror device (DMD) to adjust a diffraction angle, and change the pattern of the DMD to irradiate light at a specific position .

Here, a digital micromirror device (DMD) can control the refractive index of light using a pattern. For example, by using a digital micromirror device (DMD) as a periodically controllable reflection type amplitude diffraction grating, incident light is controlled so as to have different angles, and stable high-speed and precise measurement is possible by controlling the incident light stably and quickly. Also, the digital micromirror device (DMD) is reduced to the diffraction limit so that the pixels constituting the superpixel formed by grouping a plurality of pixels of the digital micromirror device can not be distinguished, A pixel array can be formed and the phase angle of the super pixel array can be controlled to control the plane wave propagation angle of incident light having a linear phase slope. Moreover, the digital micromirror device (DMD) may be an individual source controllable laser array (310), positioned on a Fourier plane of the optical alignment of the system, It is possible to control the irradiation angle of the light incident on the sample 350 by changing the position of the reflecting micromirror.

The angle control unit 320 may be a micro electro mechanical system (MEMS), and may control an angle of irradiation of the light emitted from the light source 310.

Unlike a conventional optical system in which a micro-electromechanical system (MEMS) is used to move and focus, each mirror moves in two-axis or three-axis in focus, thereby enabling fast focus speed and focal distance fine control . In addition, when an optical system is constructed using a microelectromechanical system (MEMS), a wide range of images can be captured more quickly than an existing optical system, and the size of the optical system can be reduced.

On the other hand, in the case of a digital micromirror device (DMD) or a micro electromechanical system (MEMS), the maximum angle range that can be scanned is about 1 to 2 degrees. Therefore, after the light passing through the digital micromirror device (DMD) or the microelectromechanical system (MEMS) is expanded by the angular enlargement unit 330, the sample 350 is irradiated with light The correct image can be obtained within a limited working distance.

The angle enlarging unit 330 can enlarge the irradiation angle of the light whose irradiation angle is controlled by the angle control unit 320. [

The angular enlargement unit 330 may include a plurality of lenses. For example, the angular enlargement unit 330 may include a first lens and a second lens.

The first lens may be disposed on the side of the angle control unit 320 so that the light whose irradiation angle is controlled may be incident.

The second lens is disposed between the first lens and the light converging unit 340 so that the light passing through the first lens is incident on the second lens and allows light to pass through the light converging unit 340.

At this time, the focal length of the first lens is formed larger than the focal length of the second lens, so that the irradiation angle of the light can be enlarged.

The distance between the first lens and the second lens may be the sum of the focal length of the first lens and the focal length of the second lens.

For example, the angle enlargement unit 330 may be formed of a plurality of lenses, and may be formed of a combination of a convex lens and a concave lens, thereby enlarging the irradiation angle of light. At this time, the focal length of the convex lens can be represented by a positive number (+), and the focal distance of the concave lens can be represented by a negative number (-).

As another example, the angular enlargement unit 330 may be formed of a combination of a cone-shaped lens and a dome-shaped lens, thereby enlarging the irradiation angle of light. After the light passing through the angle control unit 320 is reflected by the cone-shaped lens, the plane wave can be irradiated by the dome-shaped lens.

As another example, the angular enlargement unit 330 can perform tomography by measuring a 1D image by enlarging an irradiation angle of light using a polymer mirror or the like.

The light converging unit 340 may collect the light having the increased irradiation angle at the angle enlarging unit 330 into one place and enter the sample 350.

For example, the light converging unit 340 may include a tube-shaped mirror to refract light to be incident on the sample 350.

As another example, the light converging unit 340 may be a holographic grating to diffract light and enter the sample 350.

Here, the holographic grating is a kind of diffraction grating, the diffraction grating is a grating using a diamond cutter, and the holographic grating is a photolithography diffraction grating. A photosensitive resin (for example, a photoresist) is uniformly applied on the glass surface, the surface is lightly irradiated with interference fringes to sensitize the resin, and the unphotosensitive portion or the photosensitive portion is washed to deposit aluminum on the surface to form a holographic grating Can be obtained. Such a holographic grating is often used in laser scanners.

The angle of the light is increased within a predetermined working distance between the light converging unit 340 and the sample 350 by the angle control unit 320 and the angle enlarging unit 330, .

An optical microscope for magnifying an angle within a working distance according to one embodiment of the present invention or an optical microscope for illuminating light or an optical microscope for magnifying an angle within a working distance according to an embodiment to irradiate light may be realized by a microscope have.

According to embodiments, the angle of irradiation of light passing through a digital micromirror device (DMD) or a microelectromechanical system (MEMS) is enlarged using a plurality of lenses and then incident on the sample 350, Vibration and noise are not generated because there is no movement, so the measurement speed and precision can be improved.

4 is a view for explaining an angular enlargement unit according to an embodiment.

The angular enlargement unit according to an embodiment can enlarge an irradiation angle of the light whose irradiation angle is controlled by the angle control unit.

4, the angular enlargement unit may include a plurality of lenses. For example, the angular enlargement unit may include a first lens 411 and a first lens 412.

The first lens 411 may be disposed on the angle control unit side so that the light whose irradiation angle is controlled may be incident.

The first lens 412 is disposed between the first lens 411 and the light converging portion so that light passing through the first lens 411 is incident and allows light to pass through the light converging portion.

At this time, the focal length of the first lens 411 is formed larger than the focal length of the first lens 412, so that the irradiation angle of the light can be enlarged.

The distance between the first lens 411 and the first lens 412 may be the sum of the focal length of the first lens 411 and the focal length of the first lens 412.

That is, the distance d between the first lens 411 and the first lens 412 can be expressed by the following equation.

Here, f ₁ is the focal length of the first lens 411 f ₂ is the focal length of the first lens 412.

For example, the angle enlargement unit is composed of a plurality of lenses, and is formed of a combination of a convex lens and a concave lens, so that the irradiation angle of light can be increased. At this time, the focal length of the convex lens can be represented by a positive number (+), and the focal distance of the concave lens can be represented by a negative number (-).

5 is a view showing an example of an angular enlargement unit according to an embodiment.

As shown in FIG. 5, the angular enlargement unit according to an exemplary embodiment may include a plurality of lenses to enlarge an irradiation angle of light whose angle of irradiation is controlled by the angle control unit. For example, the angular enlargement unit may include a first lens and a second lens.

The first lens is disposed on the side of the angle control unit, and light whose irradiation angle is controlled can be incident.

The second lens is disposed between the first lens and the light converging portion, and light passing through the first lens is incident on the second lens and allows light to pass through the light converging portion.

At this time, the focal length of the first lens is formed larger than the focal length of the second lens, so that the irradiation angle of the light can be enlarged. The distance between the first lens and the second lens may be the sum of the focal length of the first lens and the focal length of the second lens.

The angular enlargement unit is composed of a plurality of lenses, and is formed of a combination of a convex lens and a concave lens, so that the angle of light irradiation can be enlarged and the angle of light irradiation of about 45 degrees can be enlarged.

For example, as shown in FIG. 5A, the first lens 511 may be formed of a concave lens and the second lens may be formed of a convex lens 512 to enlarge an irradiation angle of light.

As another example, as shown in FIG. 5B, the first lens 521 may be formed of a convex lens, and the second lens 522 may be formed of a concave lens to enlarge an irradiation angle of light.

In addition, the angle enlargement section may be formed of a cone-shaped lens and a dome-shaped lens, or may be formed of a combination of two lenses to enlarge the irradiation angle of the light, or enlarge the irradiation angle of the light by using a polymer mirror or the like, ).

For example, as shown in FIG. 5C, the angle enlarging unit may include a convex axicon 531 to enlarge an angle of light irradiation. As shown in FIG. 5D, the angle enlarging unit may be a concave axicon 541) so that the light irradiation angle can be enlarged. Here, the angular enlargement section may replace one lens with the first lens and the second lens. For example, when the angle of incidence of light is about 10 degrees, the light passes through the convex axicon 531 and the light can be refracted and the irradiation angle can be enlarged to about 30 degrees.

6 is a diagram showing an example of a light converging unit according to an embodiment.

Referring to FIG. 6, the light converging unit collects the light having the increased irradiation angle in the angle enlargement unit into one place, and may be made of a tube-shaped mirror or a holographic grating.

For example, as shown in FIG. 6A, the light converging unit may include a tube-shaped mirror 610 to refract light to be incident on a sample. For example, the angle of refraction may be a right angle, but is not limited thereto.

As another example, as shown in FIG. 6B, the light converging unit may be a holographic grating 620 to diffract light to be incident on a sample.

Here, the holographic grating is a kind of diffraction grating, the diffraction grating is a grating using a diamond cutter, and the holographic grating is a photolithography diffraction grating. A photosensitive resin (for example, a photoresist) is uniformly applied on the glass surface, the surface is lightly irradiated with interference fringes to sensitize the resin, and the unphotosensitive portion or the photosensitive portion is washed to deposit aluminum on the surface to form a holographic grating Can be obtained. Such a holographic grating is often used in laser scanners.

As described above, the angle control section and the angle expanding section can enlarge the irradiation angle of the light within a predetermined working distance between the light converging section and the sample and irradiate the sample.

FIG. 7 is a flow chart illustrating a method of illuminating light by magnifying an angle within a working distance according to an embodiment.

Referring to FIG. 7, a method of irradiating light in an enlarged angle in a working distance according to another embodiment includes a step 710 of irradiating light toward a sample in a light source, a step 710 of irradiating the sample with light, A step 730 of enlarging an angle of irradiation of the light whose irradiation angle is controlled using at least one lens, and a step 740 of collecting the enlarged light and entering the sample as a sample And the irradiation angle of the light can be enlarged within a predetermined working distance to illuminate the sample.

According to the embodiments, the angle of irradiation of light passing through the digital micromirror device (DMD) or the micro electromechanical system (MEMS) is enlarged by using a plurality of lenses, and then incident on the sample to secure a working distance So that the angle can be enlarged and the light can be irradiated.

In addition, since the angle of irradiation of light passing through the digital micromirror device (DMD) or the microelectromechanical system (MEMS) is enlarged by using a plurality of lenses and then incident on the sample, there is no mechanical movement of the lens or the like, The measurement speed and accuracy can be improved.

Hereinafter, each step of the method of irradiating light by enlarging an angle within a working distance according to an embodiment will be described in detail.

A method of irradiating light by enlarging an angle within a working distance according to an embodiment will be described in more detail using an optical microscope that expands the angle within a working distance according to the embodiment described with reference to FIG. . Here, the optical microscope 300 for enlarging the angle within the working distance according to an embodiment includes a light source 310, an angle control unit 320, an angle expanding unit 330, and a light converging unit 340, . ≪ / RTI > In addition, according to the embodiment, the optical microscope 300 that expands the angle within the working distance and irradiates the light further includes a camera, which is a photographing optical microscope for photographing an image, and at least one mirror for transmitting light to the camera .

At step 710, the light source 310 may illuminate the sample 350 with light. For example, the light source 310 may be a laser or the like, and may irradiate a laser beam to the sample 350 to be measured.

In step 720, the angle control unit 320 may control the angle of the light emitted from the light source 310.

The angle control unit 320 may control an angle of light emitted from the light source 310 using a digital micromirror device (DMD) or a micro electro mechanical system (MEMS).

More specifically, the angle control unit 320 may include a digital micromirror device (DMD) to adjust the diffraction angle, and may change the pattern of the digital micromirror device (DMD) to irradiate light at a specific position.

The angle control unit 320 may be a micro electro mechanical system (MEMS), and may control an angle of irradiation of the light emitted from the light source 310.

In step 730, the angle enlarging unit 330 may enlarge the angle of irradiation of the light whose angle of illumination is controlled by the angle control unit 320.

The angular enlargement unit 330 may include a plurality of lenses. For example, the angular enlargement unit 330 may include a first lens and a second lens.

The first lens may be disposed on the side of the angle control unit 320 so that the light whose irradiation angle is controlled may be incident.

The second lens is disposed between the first lens and the light converging unit 340 so that the light passing through the first lens is incident on the second lens and allows light to pass through the light converging unit 340.

At this time, the focal length of the first lens is formed larger than the focal length of the second lens, so that the irradiation angle of the light can be enlarged. The distance between the first lens and the second lens may be the sum of the focal length of the first lens and the focal length of the second lens.

For example, the angle enlargement unit 330 may be formed of a plurality of lenses, and may be formed of a combination of a convex lens and a concave lens, thereby enlarging the irradiation angle of light.

In step 740, the light converging unit 340 collects the light having the increased irradiation angle at the angle enlarging unit 330 into one place and enters the sample 350.

For example, the light converging unit 340 may include a tube-shaped mirror to refract light to be incident on the sample 350.

As another example, the light converging unit 340 may be a holographic grating to diffract light and enter the sample 350.

The angle of the light is increased within a predetermined working distance between the light converging unit 340 and the sample 350 by the angle control unit 320 and the angle enlarging unit 330, .

Embodiments are techniques for exposing a sample to an enlarged angle of illumination of light without mechanical movement of the configuration within a limited working distance, and it is possible to measure the angle of irradiation of light passing through a digital micromirror device (DMD) or a microelectromechanical system (MEMS) By zooming in using a plurality of lenses and then entering the sample, it is possible to obtain high-speed and precise images within a limited working distance.

Hereinafter, a method of controlling light incident using a digital micromirror device (DMD) will be described in detail by way of example.

The digital micromirror device (DMD) can be used as a periodically controllable reflective amplitude grating. The digital micromirror element DMD can change the irradiation angle of the incident light and enter the sample. Thereafter, a three-dimensional refractive index image can be obtained through the information of the two-dimensional optical field measured using a camera.

A digital micromirror device (DMD) may include an array including a plurality of micromirrors as a wavefront controller.

를 갖는 레이저 평면파의 x축 y축 방향의 각도를 각각

로 한다면, 이에 해당하는 파면 위상정보

는 다음 식과 같이 표현 가능하다.However, since the hologram including the phase to be expressed can be expressed by the intensity of light, it is possible to use a digital micromirror device (DMD) It is possible to express the phase corresponding to the phase. Specifically, the optical axis is defined as the z- axis and the wavelength

The angle of the x axis y axis of each laser plane wave having

, The corresponding wavefront phase information

Can be expressed as the following expression.

In order to form such a wavefront light from a digital micromirror device (DMD), a hologram pattern such as the following mathematical expression can be input to a digital micromirror device (DMD).

를 디지털 마이크로미러 소자(DMD) 상에서 직접 제어가 가능하여, 원하는 방향의 평면파를 형성할 수 있다. In this case, if only the reflected light corresponding to the second term in the second equation is irradiated onto the sample and the remaining light is shielded,

Can be directly controlled on the digital micromirror device (DMD), so that a plane wave in a desired direction can be formed.

 Since the phase of each pixel can be controlled from 0 to 2, the slope of the phase controllable by the digital micromirror device (DMD) is limited by the size of the pixel. Generally, when the device is fabricated with a micromirror of several micrometers in length, the maximum controllable angle is about 1 to 2 degrees. The two-dimensional optical field information is photographed by the angle of the incident light after enlarging the angle by adding two lenses and entering the sample, thereby obtaining a three-dimensional scattering potential.

By using the DMD as a periodically controllable reflection type diffraction grating for ultra-high speed optical tomography, incident light is controlled so as to have different angles, and stable, The refractive index can be measured.

In addition, the digital micromirror device (DMD) can use the superpixel method.

Such a digital micromirror device (DMD) is reduced to the diffraction limit so that the pixels constituting the superpixel formed by grouping a plurality of pixels of the digital micromirror device can not be distinguished, and the superpixel And the phase angle of the superpixel array can be controlled to control the plane wave propagation angle of incident light having a linear phase slope.

It is possible to use a method of phase modulation of light using super pixels by bundling pixels of a digital micromirror device. More specifically, it is a method of aligning the lenses that transmit the optical field reflected from the digital micromirror device slightly off the optical axis so that the phase of light is represented differently according to the position of the micromirror. Thus, by placing a spatial filter between the lenses and reducing them to the diffraction limit to make it impossible to distinguish the pixels that make up the superpixel, a superpixel array with phase adjustable from 0 to 2π is created. By using this method to express the slope of the linear phase, it becomes possible to express a plane wave that proceeds at a desired angle. Likewise, since the slope of the phase that can be represented is limited by the size of the super pixel, the angle represented by adding two lenses can be applied to the enlarged sample to be used for three-dimensional optical tomography.

By using a digital micromirror device using the super pixel method for ultra-high speed optical tomography, incident light is controlled so as to have different angles, and stable and fast incident light is controlled, so that a high-precision three-dimensional refractive index can be measured.

Furthermore, digital micromirror devices (DMDs) can be utilized as individual source controllable laser arrays.

A plurality of micromirrors for positioning a digital micromirror device on a Fourier plane of the optical alignment to form a laser array capable of controlling the position of a plurality of micromirrors with an individual light source, The position of the plane wave can be controlled by controlling the position of the plane wave. To this end, a flat polarized wave is irradiated onto a digital micromirror element located on a Fourier plane, and only a specific digital micromirror element is operated to reflect only light corresponding to the element, whereby light incident on the sample is a light having only a specific spatial frequency A plane wave incident only at a specific angle can be generated.

In other words, by positioning the digital micromirror device on the Fourier plane of the optical alignment of the system and changing the position of the micromirror that reflects the light, the angle of irradiation of the light incident on the sample can be controlled. At this time, the magnification of the lenses can be appropriately adjusted so that the size of the digital micromirror device corresponds to the size of the numerical aperture of the condenser lens.

The apparatus described above may be implemented as a hardware component, a software component, and / or a combination of hardware components and software components. For example, the apparatus and components described in the embodiments may be implemented within a computer system, such as, for example, a processor, controller, arithmetic logic unit (ALU), digital signal processor, microcomputer, field programmable array (FPA) A programmable logic unit (PLU), a microprocessor, or any other device capable of executing and responding to instructions. The processing device may execute an operating system (OS) and one or more software applications running on the operating system. The processing device may also access, store, manipulate, process, and generate data in response to execution of the software. For ease of understanding, the processing apparatus may be described as being used singly, but those skilled in the art will recognize that the processing apparatus may have a plurality of processing elements and / As shown in FIG. For example, the processing apparatus may comprise a plurality of processors or one processor and one controller. Other processing configurations are also possible, such as a parallel processor.

The software may include a computer program, code, instructions, or a combination of one or more of the foregoing, and may be configured to configure the processing device to operate as desired or to process it collectively or collectively Device can be commanded. The software and / or data may be in the form of any type of machine, component, physical device, virtual equipment, computer storage media, or device , Or may be permanently or temporarily embodied in a transmitted signal wave. The software may be distributed over a networked computer system and stored or executed in a distributed manner. The software and data may be stored on one or more computer readable recording media.

The method according to an embodiment may be implemented in the form of a program command that can be executed through various computer means and recorded in a computer-readable medium. The computer-readable medium may include program instructions, data files, data structures, and the like, alone or in combination. The program instructions to be recorded on the medium may be those specially designed and configured for the embodiments or may be available to those skilled in the art of computer software. Examples of computer-readable media include magnetic media such as hard disks, floppy disks, and magnetic tape; optical media such as CD-ROMs and DVDs; magnetic media such as floppy disks; Magneto-optical media, and hardware devices specifically configured to store and execute program instructions such as ROM, RAM, flash memory, and the like. Examples of program instructions include machine language code such as those produced by a compiler, as well as high-level language code that can be executed by a computer using an interpreter or the like. The hardware devices described above may be configured to operate as one or more software modules to perform the operations of the embodiments, and vice versa.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. For example, it is to be understood that the techniques described may be performed in a different order than the described methods, and / or that components of the described systems, structures, devices, circuits, Lt; / RTI > or equivalents, even if it is replaced or replaced.

Therefore, other implementations, other embodiments, and equivalents to the claims are also within the scope of the following claims.

210, 310: Light source
220, and 320:
230, and 330:
240, 340: Light converging part
250, 350: Samples

Claims (10)

An optical microscope for irradiating light with an enlarged angle within a working distance,
A light source for irradiating light toward a sample;
An angle control unit for controlling an angle of irradiation of the light emitted from the light source;
An angle enlarging unit for enlarging an irradiation angle of the light whose irradiation angle is controlled by the angle control unit; And
And a light converging unit for converging the light having an enlarged irradiation angle at the angle expanding unit and making the light enter the sample,
Lt; / RTI >
The angle control unit and the angle expanding unit enlarge an irradiation angle of the light within a working distance corresponding to a distance between the light converging unit and the sample,
Wherein the angle-
A first lens disposed on the angle control unit side and incident with the light whose irradiation angle is controlled; And
A second lens that is disposed between the first lens and the light converging unit and through which the light having passed through the first lens is incident,
Lt; / RTI >
Wherein a focal length of the first lens is larger than a focal length of the second lens so as to enlarge an irradiation angle of the light within the working distance, and a distance between the first lens and the second lens is larger than a focal distance of the first lens And the focal length of the second lens
Which magnifies the angle within the working distance to illuminate the light. The method according to claim 1,
Wherein the angle control unit includes:
A digital micromirror device (DMD), which adjusts a diffraction angle, and changes the pattern of the DMD to irradiate the light at a specific position
Which magnifies the angle within the working distance to illuminate the light. The method according to claim 1,
Wherein the angle control unit includes:
Composed of micro electro mechanical systems (MEMS)
Which magnifies the angle within the working distance to illuminate the light. delete The method according to claim 1,
Wherein the angle-
A combination of a convex lens and a concave lens to enlarge an irradiation angle of the light
Which magnifies the angle within the working distance to illuminate the light. The method according to claim 1,
The light-
A tube-shaped mirror which reflects the light and makes the light incident on the sample
Which magnifies the angle within the working distance to illuminate the light. The method according to claim 1,
The light-
And a holographic grating for diffracting the light to enter the sample
Which magnifies the angle within the working distance to illuminate the light. A method for illuminating light by magnifying an angle within a working distance,
Irradiating light from a light source toward a sample;
Controlling an irradiation angle of the light irradiated from the light source;
Enlarging an irradiation angle of the light whose irradiation angle is controlled using at least one lens; And
Collecting the light having an enlarged irradiation angle and causing it to be incident on the sample
Lt; / RTI >
Irradiating the sample with a light converging part for gathering the light and entering the sample, and enlarging an irradiation angle of the light in a working distance corresponding to a distance between the sample and the sample,
Wherein the step of enlarging the irradiation angle of the light whose irradiation angle is controlled comprises:
A first lens for controlling the irradiation angle of the light and a second lens for receiving the light passing through the first lens,
Wherein a focal length of the first lens is larger than a focal length of the second lens so as to enlarge an irradiation angle of the light within the working distance, and a distance between the first lens and the second lens is larger than a focal distance of the first lens And the focal length of the second lens
Wherein the angle is enlarged within the working distance to illuminate the light. 9. The method of claim 8,
Wherein the step of controlling the angle of light irradiation of the light source comprises:
A digital micromirror device (DMD) or a microelectromechanical system (MEMS) to adjust the diffraction angle
Wherein the angle is enlarged within the working distance to illuminate the light. 9. The method of claim 8,
The step of collecting the light having the enlarged irradiation angle and entering the sample,
A tube-shaped mirror or a holographic grating to diffract the light and to enter the sample
Wherein the angle is enlarged within the working distance to illuminate the light.

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