KR101851697B1 - A Heater Structure Using Surface Heater with High Heating Performance and Uniformity - Google Patents

Abstract

The present invention relates to a heater structure of a thermocompression bonding apparatus in which an area heating element (30) is provided between upper and lower metal plates (10, 20) for thermocompression of a workpiece, 10 and a pattern 40 of a negative or positive embossed pattern is formed on the lower metal plate 20 coupled with the lower part to ensure uniformity of temperature by convection and conduction. By using the thermocompression bonding apparatus of the present invention, It is possible to achieve a high degree of temperature uniformity while maintaining a precise temperature control and pressure control environment required for the production of composite materials such as a carbon nanotube, It is effective.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a heater structure for obtaining heat efficiency and uniformity of heat applied to a surface heating element,

The present invention relates to a method of manufacturing a pressurizing heater utilizing an area heating element, and more particularly, to a method of manufacturing a pressurizing heater using an area heating element, To a heater structure for securing heat generation efficiency and uniformity of heat applied to an area heating element that can improve the quality and productivity of a composite product to which a pressing heater is applied.

Since the surface heating element generates radiant heat by electric current, there is no air pollution, and it is sanitary, and there is no electromagnetic wave generation, no noise, and it is applied in various fields.

For example, the surface heating element can be applied to various heating devices such as residential heating devices such as floor heating of apartments and general houses, industrial heating devices such as offices and work places, agricultural heating devices such as printing drying and painting drying, Equipment, freeze prevention devices for melting snow on roads and parking lots, leisure, cold weather, household appliances, shoes, and so on.

As an example, Patent Registration No. 10-1360786 discloses a method of manufacturing a plasma display panel, comprising: forming a pair of electrodes on an outer circumferential surface of a substrate so as to face each other;

Forming a heating layer including a transparent conductive oxide on the substrate including the electrode;

Forming a patterned heat generating layer so that a part of the substrate is exposed to the outside by scribing the heat generating layer with a laser;

And forming an insulating layer over the entire surface of the substrate so as to include the patterned heat generating layer.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view of a conventional planar heating element, and FIG.

1 (a), a planar heating element has a pair of electrodes 3 formed on an outer peripheral surface of a substrate 1, and a heating layer 5 and an insulating layer 7 are formed on the electrodes 3 And have sequentially stacked structures. As the electrode 3 is formed only on both sides of the planar heating element having the above-described structure, the degree of heat generation at the time of enlargement is different between the central portion and the outer circumferential surface, so that the uniformity of heat generation is not good and the temperature can not be maintained constant.

In order to control the exothermic characteristic of such an area heating element, it is mainly formed by a method of changing the material constituting the heating layer and a non-uniform shape of the heating pattern of the area heating element.

However, when the planar heating element is intended to be large, the current can not be sufficiently applied to the central portion of the heating layer only by the electrode formed on the outer circumferential surface of the substrate as shown in FIG. 1, There has been a problem that the temperature uniformity is lowered, for example, the temperature difference between the central portion and the outer peripheral surface of the heat generating element is severely generated.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and it is an object of the present invention to secure the temperature uniformity of a portion of the heater structure used for thermocompression bonding,

 Accordingly, conduction and convection are generated through a negative or positive pattern formed on a metal plate attached to the upper or lower surface of the planar heating element, and a part of the pattern is applied to a structure for increasing the strength of the heater and the planar heating element, It is an object of the present invention to provide a transparent surface heating element having a high heat generating efficiency and uniform heat generation at the time of enlargement.

In order to achieve the above object, the present invention provides an upper metal plate attached to a lower portion and an upper portion of a heating element, wherein a convex portion, which is concentrated at a central portion of the heater, Thereby forming a pattern.

In addition, this pattern is characterized in that it has a structure for supporting the pressure applied to the heater portion in the process of thermocompression, and is capable of conducting heat of the surface heat emission element through conduction.

Therefore, a high degree of temperature uniformity can be achieved while maintaining the precise temperature control and pressure control environment required for the production of composite materials such as carbon fibers by the thermocompression bonding apparatus to which the structure of the present invention is applied. And there is a remarkable effect that high quality and productivity improvement can be expected.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front view showing a heater structure to which a planar heating element according to the related art is applied, and Fig.
2 is a view showing a heater structure to which a planar heating element according to a conventional technique is applied.
3 is a perspective view illustrating a thermally press-contact heater according to the present invention.
4 is a perspective view showing a pattern for convection and conduction formed on the upper metal plate of the thermocompression heater according to the present invention.
Fig. 5 is an infrared photograph (four heaters are arranged in 2x2) showing the concentration of heat occurring in the conventional structure. Fig.
6 is an infrared photograph showing the uniformity of the heat generated in the structure according to the present invention.

The present invention relates to a heater structure of a thermocompression bonding apparatus in which an area heating element (30) is provided between upper and lower metal plates (10, 20) for thermocompression of a workpiece, 10 and a pattern 40 of a negative or positive angle formed on the lower metal plate 20 coupled with the lower portion to ensure uniformity of temperature by convection and conduction.

A plurality of protrusions 41 are formed in a part of the pattern 40 so that the pressure applied to the upper metal plate 10, the lower metal plate 20 and the area heating element 30 can be dispersed .

The pattern 40 includes a central concave groove 42 and a heat discharge groove 43 connected to the central concave groove 42 so that heat gathering in the central concave groove 42 is formed in the heat discharge groove 43 to the outside easily.

The present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a front view, FIG. 2 (b) is a view showing a heater structure to which a planar heating element according to a conventional technique is applied, and FIG. 3 FIG. 4 is a perspective view showing a convection and conduction pattern formed on an upper metal plate of a thermo-compression heater according to the present invention, and FIG. 5 is a perspective view showing an infrared photograph . (Four heaters are arranged in 2x2), and Fig. 6 is an infrared photograph showing the uniformity of heat generated in the structure according to the present invention.

The present invention is a heater structure of a thermocompression bonding apparatus in which an area heating element (30) is provided between upper and lower metal plates (10, 20) for thermocompression of a workpiece. The upper metal plate 10 coupled to the upper surface of the planar heating element 30 and the lower metal plate 20 connected to the lower plate 20 are formed with a pattern 40 having a negative or positive angle to ensure uniformity of temperature by convection and conduction will be.

A plurality of circular protrusions 41 are formed in a part of the pattern 40 so that the pressure applied to the upper metal plate 10, the lower metal plate 20 and the area heating element 30 can be dispersed .

The pattern 40 includes a central concave groove 42 and a heat discharge groove 43 connected to the central concave groove 42 so that heat gathering in the central concave groove 42 is formed in the heat discharge groove 43 to the outside easily.

The present invention relates to a structure of a heater for a thermocompression bonding apparatus, and more particularly, it relates to a structure of a heater for a thermocompression bonding apparatus, in which heat generated in a central portion in heat generation of a surface heating element and other heaters is discharged by conduction and convection to secure a high degree of temperature uniformity, A corresponding pattern is formed on the lower or upper metal plate so as to ensure a flatness at a high pressure generated at the time when the metal plate is formed.

In order to use the heater to which the planar heating element is applied, the flatness of the surface of the heater must be ensured with high pressure and heat as well as securing uniformity of heat generation.

A metal plate is attached to the upper and lower surfaces of the planar heating element to secure the strength against high pressure and at the same time to prevent the heat of the planar heating element from accumulating on the central portion of the heater, one surface of the upper metal plate or the lower metal plate, A convex or concave pattern is formed on the contact portion of the heater so as to discharge heat accumulated in the center portion of the heater through convection.

At the same time, a part of the embossed or embossed pattern is prevented from being deformed by the pressure applied at the top and bottom of the heater, so that the flatness of the surface of the heater can be maintained.

A pattern formed on one surface of the upper metal plate or the lower metal plate forms a central concave groove at the center, the central concave groove is connected to a heat discharge groove communicating with the front, rear, right and left sides of the metal plate, So that the heat gathered at the center is smoothly discharged to the outside through the front and rear heat exhaust grooves, and the pressure applied to the bottom metal plate, the top metal plate, and the surface heating element is dispersed in the process of pressing.

”형상이 된다.Particularly, each of the heat-discharging grooves forms three at the front, rear, right and left sides, and the portion where the central concave groove and the heat-discharging groove are connected is narrowly formed from the center toward the heat- The groove is formed in a straight line. Therefore, the pattern as a whole is "

"It becomes a form.

According to another aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: forming a pair of electrodes on an outer circumferential surface of a heating element so as to face each other;

Fixing the heater including the electrode and the heating layer including the conductive oxide;

Attaching a metal plate having a predetermined pattern to the bottom of the planar heating element to increase the strength of the heater portion and to provide uniform heating through conduction and convection;

And attaching a metal plate having a predetermined pattern formed on the surface heating element to increase the strength of the heater portion and to provide uniform heating through conduction and convection;

Wherein the heat-resistant layer is formed by a method for producing a press-bonding heater.

Therefore, the heater structure of the thermocompression bonding apparatus to which the above-described structure of the present invention is applied can achieve a high degree of uniformity in heat generation while maintaining a precise temperature control and pressure control environment required for producing a composite material such as carbon fiber, It is suitable for mass production of products through uniformity of temperature by structure, so that high quality and productivity can be expected.

It is possible to modify the technical idea of the present invention in various forms. Accordingly, such improvements and modifications will fall within the scope of the present invention as long as they are obvious to those skilled in the art.

10: upper metal plate 20: lower metal plate
30: plane heating element 40: pattern
41: projection 42: central concave groove
43: Heat exhaust groove

Claims (3)

An upper plate 10 coupled to the upper portion of the planar heating element 30 and a lower plate 10 joined to the lower plate 10 are provided between the upper and lower plates 10 and 20 to thermally compress the work, The present invention relates to a heater structure for securing heat generation efficiency and uniformity of heat generation by applying a planar heating element which forms an intaglio or a relief pattern (40) on a substrate (20) to ensure uniformity of temperature by convection and conduction,
A plurality of protrusions 41 are formed in a part of the pattern 40 so that the pressure applied to the upper metal plate 10, the lower metal plate 20, and the area heating element 30 can be dispersed However,
The pattern 40 comprises a central concave groove 42 and a heat discharge groove 43 connected to the central concave groove 42 so that heat gathering in the central concave groove 42 is formed in the heat discharge groove 43, So that it can easily escape to the outside,
The pattern 40 formed on one surface of the upper metal plate 10 or the lower metal plate 20 forms a central concave groove 42 at the center and the central concave groove 42 is communicated with the front, And a plurality of circular protrusions 41 are formed in the center concave groove 42 so that the heat gathered at the center is smoothly discharged to the outside through the front and rear left and right heat discharge grooves 43, The pressure applied to the lower metal plate 20, the upper metal plate 10, and the area heating element 30 is dispersed in the process of pressing,
The central recessed groove 42 and the heat discharge groove 43 are connected to each other in a streamlined manner from the center toward the heat discharge groove 43 And the heat discharge groove 43 is formed in a linear shape, so that the pattern as a whole is "

≪ / RTI > and a heater structure for securing uniform heat generation efficiency
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