KR101836853B1 - Puller, temperature controlling apparatus and method therefor - Google Patents

Abstract

The pulling apparatus according to the present invention includes: a wall for blocking the high-temperature chamber and the outside; A crucible in which the melt is accommodated; A heater for heating the crucible; A heater shield for protecting the heater; At least two glasses provided at the opening of the wall; And at least two temperature sensors for measuring an internal temperature of the high temperature chamber through each of the at least two glasses. According to the present invention, it is possible to cope with a temperature measurement error due to a malfunction of the sensor itself, contamination of peripheral equipment, etc., and to cope with a malfunction that may occur during temperature measurement, thereby enabling stable use of the lifting device. The efficiency of use can be increased, and the temperature sensing of the lifting device can be made possible, thereby improving the quality of the produced silicon ingot.

Description

TECHNICAL FIELD [0001] The present invention relates to a pull-up device, a temperature control device of a pull-up device, and a temperature control method of a pull-

The present invention relates to a pulling device, a temperature control device of a pulling device, and a temperature control method of a pulling device.

The pulling device is a device for producing a silicon ingot, and a typical Chakrasuki pulling device is exemplified.

The lifting device measures the internal temperature of the high-temperature chamber for the purpose of temperature control necessary during operation of the lifting device. For example, refer to Reference 1, Japanese Patent Application Publication No. 2010-37190. As can be seen in the cited document, a temperature sensor is provided on the wall of the lifting device in order to be able to accurately measure the internal temperature of the high-temperature chamber during the lifting operation. The lifting device is adapted to measure the internal temperature through an open portion of the lifting device. In the cited document, a heater 7 and a temperature sensor for monitoring the temperature of the heater 7 are provided. However, only one temperature sensor 18 is provided in the cited document.

On the other hand, if the internal temperature of the high-temperature chamber to be measured is not correct, the pulling process can not proceed correctly and many defects are caused in forming the silicon single crystal.

However, in the case where a temperature sensor is provided as shown in the cited document, there is a problem that the position where the temperature measurement is performed due to the operation such as pulling up the crucible can not be properly coped with. Further, when the noise of the temperature sensor itself or an error and contamination of peripheral equipment for measurement occur, there arises a problem that the ingot of the right quality can not be pulled up after that, and the temperature sensor must be replaced Therefore, there is a problem that the use efficiency of the lifting device is deteriorated.

This problem becomes a bigger problem in that the temperature sensor must be continuously operated during the time of pulling up the ingot by using the pulling device. For example, it takes about two days to stretch an ingot with a diameter of 300 millimeters. If a problem arises in the temperature sensor during this time, a harsh situation may arise, leading to the problem of discarding the silicon ingot being pulled have.

Japan National Agency 2010-37190

SUMMARY OF THE INVENTION The present invention has been proposed in order to solve the problems described above, and it is an object of the present invention to provide a lifting device capable of coping with a temperature measurement error due to a malfunction of the sensor itself or contamination of peripheral equipment, a temperature control device of the lifting device, Method.

The pulling apparatus according to the present invention includes: a wall for blocking the high-temperature chamber and the outside; A crucible in which the melt is accommodated; A heater for heating the crucible; A heater shield for protecting the heater; At least two glasses provided at the opening of the wall; And at least two temperature sensors for measuring an internal temperature of the high temperature chamber through each of the at least two glasses.

According to another aspect of the present invention, there is provided a temperature control apparatus for a pulling apparatus comprising at least two temperature sensors for measuring the temperature of an inner chamber of a pulling apparatus; A memory for storing information related to at least the operating temperature of the lifting device; A heater for heating the inner chamber; And a controller for controlling the heater so that the temperature of the inner chamber is controlled to the operating temperature of the lifting device stored in the memory by controlling the temperature measured by each of the at least two temperature sensors.

According to still another aspect of the present invention, there is provided a temperature control method of a pulling apparatus of the present invention, comprising: receiving temperature values measured by at least two temperature sensors; removing a temperature value judged as an error among the temperature values; And the average temperature value is obtained as the actual temperature value; Receiving a target temperature value stored in advance; And the heater is controlled so that the actual temperature value follows the target temperature value.

According to still another aspect of the present invention, there is provided a temperature control method of a pulling apparatus of the present invention, which comprises: receiving a temperature value measured by at least two temperature sensors and obtaining an average temperature value of each of the temperature values; A new average temperature value is obtained only by the error-free temperature value, and the actual temperature value is determined as the actual temperature value, or the temperature value of any one of the sensors having the higher priority is regarded as the actual temperature value. If it is determined that the respective temperature values are not error- , The temperature value of the main sensor to be used mainly is set as an actual temperature value; Receiving a target temperature value stored in advance; And the heater is controlled so that the actual temperature value follows the target temperature value.

According to still another aspect of the present invention, there is provided a temperature control method for a pulling apparatus, comprising: receiving a temperature value measured by at least two temperature sensors, wherein an average temperature value to which a weight is applied is set as an actual temperature value; Receiving a target temperature value stored in advance; And the heater is controlled so that the actual temperature value follows the target temperature value.

According to the present invention, it is possible to cope with a temperature measurement error due to a malfunction of the sensor itself, contamination of peripheral equipment, etc., and to cope with a malfunction that may occur during temperature measurement, The efficiency of use of the device can be increased and the temperature sensing of the lifting device can be accurately performed, thereby improving the quality of the produced silicon ingot.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view schematically illustrating the structure of a lifting device. FIG.
2 is a partial side view of the lifting device according to the first embodiment;
3 is a block diagram of an apparatus for controlling the temperature of the lifting apparatus according to the first embodiment;
4 is a flow chart for explaining a temperature control method of the lifting device according to the first embodiment;
5 is a flow chart for explaining a temperature control method of the pulling-up apparatus according to the second embodiment;
6 is a flowchart for explaining a temperature control method of the pulling apparatus according to the third embodiment;
7 is a partial side view of a pulling device according to a fourth embodiment;

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings. It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the inventive concept. But this is also included in the spirit of the present invention.

≪ Embodiment 1 >

FIG. 1 is a cross-sectional view schematically illustrating the structure of a pulling device, and FIG. 2 is a partial side view of a pulling device showing a structure and position of a sensor in detail.

Referring to FIGS. 1 and 2, the lifting device 1 has a wall 5 to form a high-temperature chamber of the lifting device. In the interior of the wall 5, a crucible 2 in which the melt 6 is accommodated, a heater 3 for heating the crucible 2, and a heater 3 for preventing the heat of the heater 3 from leaking to the outside A heater shield 4 is provided. The melt 6 is pulled up by the seed to grow into the ingot 7.

A sensor 9 is provided as a means for measuring the internal temperature of the chamber 5 and the sensor 9 is connected to the heater shield 7 via a glass 8 provided in an opening portion of the wall 5. [ 4) is measured. The sensor 9 may not necessarily measure the temperature of the heater shield 4 but may measure the temperature of the other part of the heater shield 4. In order to measure the accurate temperature of the melt 6, It may be desirable to measure the temperature.

Although only one sensor 9 is shown in FIG. 1, this is dependent on the direction of the cut surface in the figure, and three sensors are provided in the pull-up device according to the first embodiment, respectively. In Fig. 2, the installation position of the sensor is shown accurately.

2, a second sensor 95 for measuring the internal temperature of the lifting device via the second glass 85 provided at the central portion of the wall and the second glass 85, A first sensor 94 for measuring the internal temperature of the lifting device via the first glass 84 and the first glass 84 provided on the upper side of the wall, a third glass 86 provided on the upper side of the wall, And a third sensor 96 for measuring the internal temperature of the lifting device via the third glass 86 is provided. As the sensor, ATC (AUTO TEMPERATURE CONTROLLER) may be used as an infrared ray temperature sensor, and quartz glass may be used as the glass. The number of the sensors is exemplified as three, but not limited thereto, two or four or more sensors may be used.

As can be seen from the above description, the pulling apparatus according to the embodiment has three sensors and glass. As a result, when a problem occurs in any one of the sensors and the glass, another sensor can be used, thereby ensuring stable operation of the lifting device. For example, when a problem occurs in one of the sensors and the glass due to a noise or operation error of the sensor itself or deposition of a foreign substance exemplified as an oxidizing substance in the glass, another sensor is used to measure the internal temperature of the chamber You can do it. Specifically, the measurement temperature of the second sensor (95) is used as a main component. When a problem occurs in the second sensor (95) used as a main sensor, the second sensor (95) 1 sensor 94 or the second sensor 96 may be used as the sensor.

In addition, in the first embodiment, the installation positions of the sensors and the glass are provided in different positions in the lateral direction. This has a purpose of preventing the disturbance of the infrared sensor and measuring the temperature at different positions in the left and right direction, thereby measuring the correct temperature. The arrangement of the above-mentioned sensors is preferably expected because a more accurate internal temperature can be used when the temperature is measured by utilizing the average value of the sensors.

The three temperatures measured by the sensors 94, 95 and 96 are transmitted to the controller of the lifting device and can be used to measure the temperature required in the inner chamber of the lifting device.

3 is a block diagram of the temperature control apparatus of the pulling apparatus according to the first embodiment.

Referring to FIG. 3, there are shown three temperature sensors 94, 95 and 96 provided in the lifting device, a control unit 100 for reading the temperature read from the temperature sensor and performing a control process, A memory 101 for storing various information necessary for the operation of the controller 100, for example, temperature conditions required in the current lifting step, and the like, And a heater 102 for heating the chamber under the control of the heater 102. The heater 102 may be a heater provided on the lower side of the crucible in addition to the heater shown in FIG. 1, or may be various other heating means.

The control mode of the controller 100 may be variously described. Hereinafter, a method of controlling the temperature of the lifting device will be described.

4 is a flowchart for explaining a temperature control method of the pulling apparatus according to the first embodiment.

Referring to FIG. 4, a temperature value measured from each temperature sensor and an average temperature value with respect to the temperature value are obtained (S1), and a temperature value that can be determined as an error among the inputted temperature values is excluded S2). The determination of the error may be a temperature that deviates much from the average temperature value, or a temperature that exceeds a predetermined range of predetermined temperatures. Thereafter, the average temperature value of the temperature sensor, which is determined to be no problem, is input as the actual temperature value (S3). If there is a problem, the temperature value of the problematic temperature sensor may be excluded, and the average temperature value may be determined again to obtain the actual temperature value. The above process can be performed in the control unit 100 of FIG.

Meanwhile, the target temperature value stored in the memory 101 is input separately from the process of obtaining the actual temperature value based on the measured temperature values of the sensors (S4).

Thereafter, the actual temperature value is compared with the target temperature value to perform PID control (S5), the heater output value is determined, and the heater 102 is controlled to match the heater output value (S6).

According to the temperature control method of the lifting device, even if a problem occurs in one or two temperature sensors, temperature control of the lifting device can be performed utilizing the remaining correctly operated temperature sensor. Therefore, there is an advantage that the temperature of the lifting device can be stably controlled. In addition, since the average value of at least two temperature sensors is used as the actual temperature, a more accurate temperature can be inputted and the temperature inside the chamber can be controlled more accurately.

≪ Embodiment 2 >

The second embodiment of the present invention differs from the method of receiving input through three sensors and controlling the same. Therefore, in the device configuration, the description of the first embodiment is used as it is, and only the characteristic features of the present embodiment will be specifically described.

5 is a flowchart for explaining a temperature control method of the pulling-up apparatus according to the second embodiment.

Referring to FIG. 2, a temperature value measured from each temperature sensor and an average temperature value with respect to the temperature value are obtained (S11), and it is determined whether the difference between the temperature value and the average temperature value of each sensor is equal to or greater than a certain level S12). If it is determined that there is no error in the sensor in the error determination step S12 of the sensor, the temperature value of the main sensor used as the main sensor among the sensors is set as the actual temperature value (S15).

However, if it is determined that there is an error in any one of the sensors (S12), the temperature value that can be determined as an error among the inputted temperature values is excluded (S13). The determination of an error may be a temperature that deviates much from a predetermined temperature value, or a temperature that exceeds an error range of a predetermined temperature may be the case. Thereafter, the average temperature value of the temperature sensor determined to be no problem or the sensor temperature value determined to be normal is input as the actual temperature value (S14). At this stage, whether to use the average temperature value or the normal sensor temperature value may be different for each temperature control mode. For example, when the sensor having no problem is the main sensor, the temperature value of the main sensor can be used as the actual temperature value. If the sensor having no problem is not the main sensor, the average temperature value of the sensor temperature value of each auxiliary sensor can be used It is possible. If there is a priority related to the accuracy of the temperature among the auxiliary sensors, the temperature value of the auxiliary sensor having a higher priority may be used as the actual temperature value.

In addition, the target temperature value stored in the memory 101 is input separately from the process of obtaining the actual temperature value by using the measured temperature values of the respective sensors (S16). Thereafter, the actual temperature value is compared with the target temperature value to perform PID control (S17), the heater output value is found, and the heater 102 is controlled to match the heater output value (S18).

According to the temperature control method of the lifting device described above, it can be more preferably applied to the case where the priority of the sensor is determined according to the accuracy of the sensor or the like, and the installation position of the sensor indicating the accurate chamber temperature is determined. It is also conceivable to naturally retain the advantages of the first embodiment.

≪ Third Embodiment >

The third embodiment of the present invention differs in a method of receiving input through three sensors and controlling the same. Therefore, in the device configuration, the description of the first embodiment and the second embodiment is used as it is, and only the characteristic features of the present embodiment will be specifically described.

6 is a flowchart for explaining a temperature control method of the lifting apparatus according to the third embodiment.

Referring to FIG. 6, a temperature value measured from each temperature sensor is input (S21), a weight is given to the temperature measured by each sensor, and an average temperature value is calculated and received as an actual temperature value (S22).

For example, the first sensor 94 may have a weight of 50%, the second sensor 95 may have a weight of 30%, and the third sensor 96 may have a weight of 0.2% . The weight may also change during the pulling process. For example, entering the last stage of the impression, the first sensor 94 has a weight of 0.2, the second sensor 95 has a weight of 30%, the third sensor 96 has a weight of 50% As shown in FIG.

Such a control method has a purpose to change a position having a core temperature in the chamber to a more accurate temperature by reflecting the change in the position of the core in the chamber during the pulling process. As a practical example, the crucible is lowered in the initial stage of the pulling, but the crucible is moved to the upper side considerably in the final stage of pulling. In this case, it is preferable to increase the weight of the first sensor 94 located at the lowest position and decrease the weight of the third sensor 96 located at the uppermost position in the initial stage of pulling. However, it is preferable to increase the weight of the third sensor 96 and decrease the weight of the first sensor 94 in the final stage of the raising.

The average temperature value calculated in the above manner will be able to more accurately indicate the internal temperature of the chamber. Thereafter, the target temperature value stored in the memory 101 is input separately from the process of obtaining the actual temperature value using the measured temperature values of the respective sensors (S23). Thereafter, the actual temperature value is compared with the target temperature value to perform PID control (S24), the heater output value is found, and the heater 102 is controlled to match the heater output value (S25).

According to the temperature control method of the lifting device, it is possible to obtain an accurate temperature value according to the process progress of the lifting device, and to apply the temperature value to the lifting process.

<Fourth Embodiment>

The fourth embodiment of the present invention is the same as the above-described embodiment in the configuration for receiving input through three sensors and the other temperature control apparatus and temperature control method and the like. Therefore, in the device configuration, the description of the first embodiment and the second embodiment is used as it is, and only the characteristic features of the present embodiment will be specifically described.

7 is a partial side view of the lifting apparatus according to the fourth embodiment.

7, the glasses 81, 82, and 83 are provided and the sensors 91, 92, and 93 are provided, which is the same as the previously described embodiment. However, there is a difference between the installation position of the sensor and the shape of the glass.

In detail, the above embodiment is provided in a circular shape in each glass, but in the fourth embodiment, an elliptical shape or the like is provided in a long shape. Further, at least one pair of glasses is provided such that the extending directions of the glasses cross each other. That is, when one glass 83 is provided in a shape extending in the vertical direction, the other glass 82 is provided in a shape extending in the horizontal direction. When provided in this way, it is possible to obtain an effect that the temperature of the heater shield 4 can be measured over a wider range. In addition, since it is spaced apart in the vertical and horizontal directions, it is possible to obtain an effect that the deviation of the temperature measurement is reduced.

In addition, the sensors are provided to be arranged in a vertical direction. According to this structure, any one of the heater shields 4 can be measured in the same direction. The temperature measured in this way can be applied to the process of the lifting device by finding the state of change with respect to the temperature which is separated from each other in the vertical direction.

According to the present invention, it is possible to accurately determine the internal temperature of the lifting device, and it is possible to accurately determine the temperature only if there is a sensor that operates normally even if an error occurs in any of the sensors. Accordingly, it is possible to manufacture a silicon ingot of higher quality, and it is expected that the use efficiency of the lifting device can be increased.

8: Glass
9: Temperature sensor

Claims (16)

A wall for blocking the internal high-temperature chamber and the outside;
A crucible in which the melt is accommodated;
A heater for heating the crucible;
A heater shield for protecting the heater;
At least two glasses provided at the opening of the wall; And
And at least two temperature sensors for measuring an internal temperature of the high-temperature chamber through each of the at least two glasses,
Wherein the at least two temperature sensors are vertically and horizontally spaced apart from each other, and the temperature of at least two regions of the heater shield is measured and used as an average value. The method according to claim 1,
Wherein the glass is spaced apart from each other. delete delete delete The method according to claim 1,
Wherein the glass is circular or elliptical. The method according to claim 1,
Wherein the glass and the temperature sensor are provided in three. At least two temperature sensors for measuring the temperature of the inner chamber of the lifting device;
A memory for storing information related to at least the operating temperature of the lifting device;
A heater for heating the inner chamber; And
And a controller for controlling the heater so that the temperature of the inner chamber is controlled to the operating temperature of the lifting device stored in the memory by controlling the temperature measured by each of the at least two temperature sensors,
Wherein the at least two temperature sensors are vertically and horizontally spaced apart from each other, and the temperature of at least two regions of the heater shield is measured and an average value thereof is used. 9. The method of claim 8,
Wherein the at least two temperature sensors measure the temperature for different regions of the same part of the inner chamber. Wherein each of the temperature values measured by the at least two temperature sensors is input and an average temperature value is determined based on only an errorless temperature value after eliminating a temperature value judged to be erroneous among the respective temperature values,
Receiving a target temperature value stored in advance;
Controls the heater such that the actual temperature value follows the target temperature value,
Wherein the at least two temperature sensors are provided to be spaced apart from each other in the vertical direction and the left and right direction to measure the temperature of at least two regions inside the inner chamber of the pull-
Wherein the determination of the error among the temperature values measured for at least two regions is a temperature value at which the temperature is significantly different from the other temperatures or a temperature value deviating far from the average value. delete The temperature value of each of the temperature values measured by at least two temperature sensors is obtained,
A new average temperature value is determined based on only an error-free temperature value, and the detected temperature value is used as an actual temperature value, or the temperature value of any one of the sensors having a higher priority is set as an actual temperature value,
If it is determined that each of the temperature values is not erroneous, the temperature value of the main sensor is set as an actual temperature value;
Receiving a target temperature value stored in advance;
Controls the heater such that the actual temperature value follows the target temperature value,
Wherein the at least two temperature sensors are provided to be spaced apart from each other in the vertical direction and the left and right direction to measure the temperature of at least two regions inside the inner chamber of the pull-
The determination of the error among the temperature values measured for at least two regions is a temperature value at which the temperature is much different from the other temperature or a temperature value deviating far from the average value,
An average temperature value of the temperature measured by the auxiliary sensor is used when there is a problem with the main sensor and an impression that the temperature value of the auxiliary sensor having a higher priority is used as the actual temperature value when a priority related to the accuracy of the temperature is set in the auxiliary sensor A method of controlling a heater of a device. delete And a controller for receiving the respective temperature values measured by at least two temperature sensors,
An average temperature value to which a weight is applied for each of the temperature values is set as an actual temperature value;
Receiving a target temperature value stored in advance;
Controls the heater such that the actual temperature value follows the target temperature value,
Wherein the at least two temperature sensors are provided to be spaced apart from each other in the vertical direction and the left and right direction to measure the temperature of at least two regions inside the inner chamber of the pull-
The weights are obtained by adding a weight to the temperature sensor on the lower side in the initial stage of the pulling and a heater control of the pulling device for giving a weight to the temperature sensor on the upper side in addition to the other sensors Way. 15. The method of claim 14,
Wherein the weight is varied during the lifting process. delete

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