KR101836364B1 - Frequency Detection Chemical Sensor by Reacting Chemical Material - Google Patents

Abstract

The present invention relates to a frequency detection chemical sensor by a chemical material reaction. The frequency detection chemical sensor can identify a type of chemical materials through a varied frequency output by an electronic reaction between an electronic wave transferred from the outside and a chemical material injected into a fluid injection channel, thereby having excellent sensitivity, and being reusable even if the chemical sensor is small and has a small amount of chemical materials.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a frequency sensitive chemical sensor,

The present invention relates to a frequency-sensitive chemical sensor by a chemical reaction, and more particularly, to a frequency-sensitive chemical sensor by a chemical reaction in which an electromagnetic wave transmitted from the outside electronically reacts with a chemical substance injected into a fluid- To a chemical sensor.

Fluid chemicals are consumed in a variety of industries. A large number of chemicals are unsafe for health and the human body and can cause severe death. Therefore, accurate selection or detection of chemicals used in many applications is very important. To this end, chemical sensors have been used to detect a variety of chemicals in a wide range of industrial applications. Conventional chemical sensors require large quantities of chemicals to fill a valve or tube, and most of them are not used at all and are wasted or discarded.

In order to solve the problem of waste of such chemicals, introduction of a system capable of exhibiting excellent detection ability while using a small amount of liquid material is urgently required.

Korean Patent Publication No. 10-1378477

In order to solve the above-described problem, the chemical sensor of the present invention is characterized in that a fluid injection channel corresponding to a frequency measurement metal pattern for measuring the frequency of an electromagnetic wave transmitted from the outside is formed to inject a chemical substance, The type of chemical substance can be determined through a variable frequency. The chemical sensor according to the present invention can exhibit excellent sensitivity even in the amount of nanoliter of chemical substance, thereby achieving an inexpensive production cost, simple structure, excellent sensitivity and miniaturization.

It is therefore an object of the present invention to provide a chemical sensor having an increased sensitivity to a small amount of chemical substance by increasing the frequency variation.

In order to achieve the above object, a frequency sensitive chemical sensor according to the technical idea of the present invention is a sensor for detecting a frequency of a chemical reaction, comprising: an electromagnetic wave passing metal pattern; and a frequency measuring metal pattern for measuring a frequency of an electromagnetic wave transmitted through the electromagnetic wave passing metal pattern A second substrate having the same structure as that of the first substrate, a fluid injection channel through which a chemical substance to be measured is injected, and formed between the two substrates in a wider area than the first substrate and the second substrate Wherein the frequency measuring metal pattern measures a frequency that is variable by an electronic reaction with a chemical substance to be measured. The present invention also relates to a frequency sensitive chemical sensor based on a chemical reaction.

In one embodiment of the present invention, the frequency measuring metal pattern may have the strongest electric field intensity in the central region.

In one embodiment of the present invention, the fluid injection channel may be located in a central region of the frequency measuring metal pattern.

According to an embodiment of the present invention, at both ends of the fluid injection channel, an injection port for injecting a chemical substance is formed in an outer region of the first substrate and the second substrate, and is formed to be opened in the vertical direction of the chemical substance injection pattern .

In one embodiment of the present invention, the fluid injection channel may have a curved shape similar to the alphabet (E).

In one embodiment of the present invention, the fluid injection channel and the chemical injection pattern may be made of polydimethylsiloxane (PDMS).

In one embodiment of the present invention, the chemical injection pattern having the fluid injection channel formed between the first substrate and the second substrate and between the substrates may be bonded together through an adhesive film.

On the other hand,

A chemical sensor system for sensing the frequency of a chemical substance,

An electromagnetic wave oscillating unit for generating a constant electromagnetic wave,

A frequency receiver for receiving electromagnetic waves generated from the electromagnetic wave oscillating unit and receiving a variable frequency that is output by electronically reacting with a chemical injected into a fluid injection channel of the chemical sensor,

A digital converter for digitally converting the frequency received by the frequency receiver,

A determination unit for comparing the digitally converted frequency with frequency data stored in a data storage unit;

And a display unit for displaying a result of the determination by the determination unit.

The frequency-sensitive chemical sensor based on the chemical reaction according to the present invention can detect the kind of chemical substance through a variable frequency outputted by electromagnetic reaction with the chemical substance injected into the fluid injection channel from the electromagnetic wave transmitted from the outside. In addition, a small amount of chemical substance can increase the amount of change in frequency, thereby exhibiting excellent sensitivity.

1 is a view showing a first substrate according to an embodiment of the present invention.
2 is a view showing a chemical injection pattern according to an embodiment of the present invention.
3 is a view showing a frequency sensing chemical sensor by a chemical reaction according to an embodiment of the present invention.
4 is a view showing an electric field (E-field) inside a frequency measuring metal pattern according to an embodiment of the present invention.
FIG. 5 is a diagram illustrating a frequency sensing chemical sensor structure by a chemical reaction according to an embodiment of the present invention. FIG.
6 is a photograph of a frequency sensitive chemical sensor by a chemical reaction according to an embodiment of the present invention.
FIG. 7 is a graph showing simulated measured reflection coefficients of ethanol, distilled water, and voids of a microfluidic channel according to an embodiment of the present invention. FIG.
8 is a graph showing the reflection coefficient of each chemical substance measured through a chemical sensor according to an embodiment of the present invention.
9 is a graph showing sensitivity of a frequency sensitive chemical sensor by a chemical reaction according to an embodiment of the present invention.
10 is a flowchart illustrating a frequency-sensitive chemical sensor system by a chemical reaction according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A frequency-sensitive chemical sensor according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It is to be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but on the contrary, is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention, and are actually shown in a smaller scale than the actual dimensions in order to understand the schematic structure.

Also, the terms first and second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component. On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

In the frequency-sensitive chemical sensor according to an embodiment of the present invention, electromagnetic waves transmitted from outside are electronically reacted with a chemical substance injected into a fluid injection channel, and the kind of a chemical substance is detected through a variable frequency .

Hereinafter, the present invention will be described in more detail.

1 is a view showing a first substrate according to an embodiment of the present invention. 2 is a view showing a chemical injection pattern according to an embodiment of the present invention. 3 is a view showing a frequency sensing chemical sensor by a chemical reaction according to an embodiment of the present invention. 4 is a view showing an electric field (E-field) inside a frequency measuring metal pattern according to an embodiment of the present invention. FIG. 5 is a diagram illustrating a frequency sensing chemical sensor structure by a chemical reaction according to an embodiment of the present invention. FIG. 6 is a photograph of a frequency sensitive chemical sensor by a chemical reaction according to an embodiment of the present invention.

1 to 5, a chemical reaction-based frequency-sensitive chemical sensor 1 according to an embodiment of the present invention includes a first substrate 100 including a frequency-measuring metal pattern 120, A second substrate 300 formed in the same manner as the first substrate 300, and a chemical injection pattern 200.

The frequency measuring metal pattern 120 is formed to measure the frequency of an electromagnetic wave transmitted through the electromagnetic wave passing metal pattern 130 formed on the substrate.

Next, the fluid injection channel 220 is formed so that the frequency of the electromagnetic wave transmitted through the electromagnetic wave passing metal pattern 130 can be precisely varied by the electronic reaction with the chemical material injected into the fluid injection channel 220 And is formed at a position corresponding to the center of the frequency measuring metal pattern 120.

To this end, the fluid injection channel 220 formed in the chemical injection pattern 200 is arranged in a shape similar to the alphabet 'E' at a portion corresponding to the center of the frequency measurement metal pattern 120 . At this time, disposing the shape of the alphabet 'E' and the area corresponding to the center of the frequency metal pattern 120 prevents the empty space in the area where the electric field (E-field) inside the frequency measuring metal pattern 120 is the strongest And is the preferred form and location when considering fluid flow and space efficiency. Sensitivity can be further improved if the electric field is located in the highest area, allowing more accurate measurement and detection.

The types of the first substrate 100 and the second substrate 300 are not particularly limited, but Rogers / Duroid 5870 having a dielectric constant of 2.33 and a thickness of 0.79 mm is preferable because of a low dielectric loss.

In one embodiment of the present invention, the frequency can be varied by disturbing a fringing field between a chemical injected into the fluid injection channel 220 and an electromagnetic wave transmitted from the outside.

Referring to FIGS. 3, 5 and 6, a chemical injection pattern 200 is formed between the first substrate 100 and the second substrate 300. The first substrate 100, the second substrate 300, and the chemical injection pattern 200 are bonded together using an adhesive film. The kind of the adhesive film is not limited, but ARcare? 92561 is preferable. After all the layers are bonded, the vias of the first substrate 100 and the second substrate 300 are formed using a drill, and the vias are assembled by soldering. In this case, the chemical injection pattern 200 is formed to have a larger area than the two substrates 100 and 300, and the chemical injection pattern 200 and the fluid injection channel 220 are formed of polydimethylsiloxane (PDMS) do. The chemical injection pattern 200 and the fluid injection channel 220 may be formed by etching polydimethylsiloxane using a laser etcher.

Polydimethylsiloxane has high elasticity, low modulus and low surface energy, low dielectric constant (2.67) and high dielectric loss tangent (0.0375). The fluid injection channel 220 is formed on the polydimethylsiloxane and is formed between the first substrate 100 and the second substrate 300 to achieve a high frequency transfer function. Therefore, the fluid injection channel 220 is located in the frequency measuring metal pattern 120, and the resonance frequency is varied by a very small amount of chemical substance.

The thickness of the chemical injection pattern 200 is preferably 1 mm, and the width and depth of the fluid injection channel 220 are preferably 0.5 mm.

If the width and depth do not meet the above range, difficulties may arise in the process of etching with a laser etcher or the flow of chemicals may not be smooth. Also, since the fluid injection channel 220 uses a laser etcher, the minimum processable value is 0.5 mm, but it does not necessarily have to be 0.5 mm and includes etching that is narrower according to future process technology.

The fluid injection channel 220 provides a convenient environment for collecting measurement data from the amount of nanoliter chemicals. This means that by switching the resonant frequency of the RF circuit, it can be detected by the injection of a nanometer of chemical.

In an embodiment of the present invention, a substrate-integrated-waveguide (SIW) antenna is used as the antenna including the electromagnetic-wave passing metal pattern 130 and the frequency-measuring metal pattern 120 formed on the substrate The chemical sensor can be fabricated with low loss, high Q value, and light weight.

An injection port 225 for injecting a chemical may be formed at both ends of the fluid injection channel 220 according to an embodiment of the present invention so as to open upward in the chemical injection pattern 200.

In addition to the alphabet 'E' shape, the fluid injection channel 140 also reduces the void space within the frequency measurement metal pattern 120 in the shape of a curved tube similar to the alphabet 'W' or 'M' Can be placed according to efficiency.

10 is a flowchart illustrating a frequency-sensitive chemical sensor system by a chemical reaction according to an embodiment of the present invention. Referring to FIG. 10, a chemical reaction-based frequency sensitive chemical sensor system 400 according to an embodiment of the present invention includes:

1. A chemical sensor system for sensing a chemical species,

An electromagnetic wave oscillating unit 410 for generating a constant electromagnetic wave;

A frequency receiver 420 for receiving electromagnetic waves generated from the electromagnetic wave oscillating unit 410 and receiving a variable frequency that is generated by electronically reacting with a chemical injected into a fluid injection channel of a chemical sensor according to an embodiment of the present invention;

A digital converter 430 for digitally converting the frequency received by the frequency receiver 420;

A determination unit 450 for comparing the digitally converted frequency with the frequency data stored in the data storage unit 440; And

And a display unit 460 for displaying the determination result of the determination unit.

Hereinafter, the present invention will be described in more detail with reference to Examples. It is to be understood by those skilled in the art that these embodiments are for illustrative purpose only and that the scope of the present invention is not limited to these embodiments.

Detecting the type of chemical

(DI-Water) is injected into the injection port 225 of the fluid injection channel 220 in order to confirm that the kind of chemical can be precisely detected even if a trace amount of chemical is injected using the frequency sensing chemical sensor of the present invention. And ethanol (Ethanol) were injected to measure the reflection coefficient.

As shown in FIG. 7, in the frequency range of 12.0 GHz to 20.0 GHz, 17.08 GHz was set for Empty, 14.95 GHz for DI-Water, In the case of injected (Ethanol), the simulation result of the reflection coefficient of 15.56 GHz was shown.

As shown in FIG. 8, the measurement of the reflection coefficient according to each of seven kinds of chemicals including distilled water and ethanol and Empty in the frequency range of 13.0 GHz to 20.0 GHz (Measurement) results. Each chemical had a different dielectric constant and therefore showed different resonant frequencies.

As shown in FIG. 9, the sensitivity of the sensor calculated from the measured data is shown. The dielectric constant sensitivity is defined by the slope.

Simulation result and measurement result were similar to each other, and it was found that frequency and reflection coefficient can be measured differently according to chemical substance, and reliability was secured.

It will be apparent to those skilled in the art that various modifications and variations may be made in the present invention without departing from the spirit or scope of the invention. Do. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

Accordingly, the actual scope of the invention is defined by the appended claims and their equivalents.

1: Frequency Sensing Chemical Sensor by Chemical Reaction
100: first substrate
120: Frequency measurement metal pattern
130: electromagnetic wave passing metal pattern
200: chemical injection pattern
220: fluid injection channel
225: inlet
300: second substrate
400: Frequency Sensing Chemical Sensor System by Chemical Reaction
410: electromagnetic wave oscillation portion
420: frequency receiver
430: Digital conversion unit
440: Data storage unit
450:
460:

Claims (8)

A first substrate on which a frequency measuring metal pattern for measuring a frequency of an electromagnetic wave passing metal pattern and an electromagnetic wave transmitted through the electromagnetic wave passing metal pattern is formed;
A second substrate having the same structure as the first substrate; And
A chemical injection pattern including a fluid injection channel into which a chemical to be measured is injected and formed between the two substrates in a wider area than the first substrate and the second substrate,
Wherein the fluid injection channel is located in a central region within the frequency measuring metal pattern,
Wherein the frequency measuring metal pattern measures a frequency that is varied by an electronic reaction with a chemical substance to be measured. delete delete [2] The apparatus of claim 1, wherein an injection port for injecting a chemical substance is formed at both ends of the fluid injection channel at an outer region of the first substrate and the second substrate, Frequency Sensing Chemical Sensor by Chemical Reaction. The chemical sensor according to claim 1, wherein the fluid injection channel has a curved shape similar to the alphabet (E). The chemical sensor according to claim 1, wherein the fluid injection channel and the chemical injection pattern comprise polydimethylsiloxane (PDMS). The method of claim 1, wherein the first and second substrates and the chemical injection pattern having the fluid injection channel formed between the substrates are bonded together through an adhesive film. Frequency Sensing Chemical Sensor. A chemical sensor system for sensing the frequency of a chemical substance,
An electromagnetic wave oscillating unit for generating a constant electromagnetic wave;
A frequency receiver for receiving an electromagnetic wave generated from the electromagnetic wave oscillating unit and receiving a variable frequency which is output by electronically reacting with a chemical injected into a fluid injection channel of the chemical sensor according to the first aspect;
A digital converter for digitally converting the frequency received by the frequency receiver;
A determination unit for comparing the digitally converted frequency with frequency data stored in a data storage unit; And
And a display unit for displaying a result of the determination by the determination unit.

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