KR101821888B1 - Piezoelectric module and small generator using the same - Google Patents

Abstract

The present invention relates to a piezoelectric device module and a small generator using the same. More specifically, the present invention relates to a piezoelectric device module which comprises a plurality of piezoelectric device layers and a plurality of modification guides alternately stacked with the piezoelectric device layers and having a curvature formed on a surface being in contact with the piezoelectric device layers, and a small generator using the same. The piezoelectric module of the present invention can increase durability and electric energy generation.

Description

TECHNICAL FIELD [0001] The present invention relates to a piezoelectric element module,

The present invention relates to a piezoelectric element module and a small-sized generator using the same.

Electric energy is a key driving force for various devices. It is obtained from various forms such as hydroelectric power and fossil fuel. Because energy source is exhausted and environmental problem is rising, interest in energy harvesting that can be used cleanly and indefinitely is amplified have.

As the development of semiconductor technology progressively leads to miniaturization, high integration and low power consumption of electronic devices and components, the miniaturization and portability of electronic products are rapidly increasing, and the leisure activity population is also increasing, . As a result, demand for portable hand-held generators has increased along with battery technology, and the market size is also rapidly increasing.

There is a growing interest in miniature passive power generation technology, and small energy harvesting methods such as solar power, piezoelectric power generation, induction electric power generation, and thermoelectric power generation are being actively studied. Among them, solar power generation and induction electric power generation are mostly commercialized, but PV power generation is bulky, product price is high, weather and time are greatly influenced, and induction electric power generation is miniaturized The efficiency is rapidly reduced and it is difficult to secure a sufficient amount of electric energy.

In recent years, miniature generators have been studied for passive compact generators using ceramic piezoelectric materials with high efficiency compared to power density. Piezoelectric elements used in passive compact generators using ceramic piezoelectric materials are very small in volume and can be highly integrated as in semiconductors and have advantages in mass production.

 In the case of a piezoelectric element using a ceramic material, since the piezoelectric element is used in the form of a thin film, it is vulnerable to impact or deformation when producing electrical energy by periodic mechanical deformation. Therefore, the piezoelectric element easily breaks, There is a problem that the electricity production amount is lowered.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a piezoelectric element module which has improved durability and can increase the amount of electric energy produced per unit volume through high integration.

The present invention also provides a compact generator including the piezoelectric element module according to the present invention.

According to one aspect of the present invention,

A plurality of piezoelectric element layers; And a plurality of deformation guides alternately stacked with the piezoelectric element layer; Wherein the deformation guide is formed with a curvature on a surface in contact with the piezoelectric element layer.

According to an embodiment of the present invention, the deformation guide may be formed with a curvature in contact with 20% to 90% of the length of the piezoelectric element layer.

According to an embodiment of the present invention, the deformation guide is formed with a curvature having a radius of curvature inducing vertical deformation of 10% to 15% of the length of the piezoelectric element layer, and the curvature is 0.5 mm to 7.5 mm The height difference (distance between the low point and the high point, when the electrode length is 50 mm).

According to an embodiment of the present invention, the deformation guide may be formed with an elastic polymer coating layer on at least a part of its surface, and the coating layer may have a thickness of 0.1 mm to 10 mm.

According to one embodiment of the present invention, the elastic polymer coating layer comprises a polyolefin-based elastomer polymerized with at least one of ethylene, propylene, butadiene, and alpha olefin olefin-based monomers; Polyolefin elastomer; Polyurethane-based elastomers; An elastomer in which the olefin-based monomers and the monomers having polar groups are copolymerized; An elastomer in which styrene and the olefin-based monomers are copolymerized; Nylon elastomer; Polyester-based elastomer; And Teflon elastomers; , And the like.

According to one embodiment of the present invention, the deformation guide may be formed of an alloy, metal or poly (oxymethylene) nylon, nylon 6, nylon 66, nylon 610 610), epoxies, polyurethanes, and cellulose. The term " polymer "

According to one embodiment of the present invention, the deformation guide may have a thickness of 1 mm to 30 mm.

According to an embodiment of the present invention, the piezoelectric element layer comprises: a substrate; And a piezoelectric layer formed on the substrate, the piezoelectric layer having electrode layers on both surfaces thereof; The piezoelectric layer, and containing silver, comprising a ferroelectric, wherein the piezoelectric layer _{is, α-AlPO 4 (Berlnite)} , α-SiO 2 (Quartz), LiTaO 3, LiNbO 3, SrxBayNb 2 O 8, Pb5-Ge 3 _{O 11, Tb 2 (MoO 4} ) 3, Li 2 B 4 O 7, Bi 12 SiO 2 0, Bi 12 GeO 2, PZT (lead zirconate titanate), BTO (barium titanate), BFO (bismuth ferric oxide), PTO ZnSiO ₃ , GaN, KNbO ₃ , NaNBO ₃ , ZnO, ZnO, ZnO, PZT-foamed polyurethane, PZT-foamed urethane, and PVDF (polyvinylidene difluoride), which are selected from the group consisting of P (VDF-TrFe), P (VDFTeFE), TGS, PZT-PVDF, PZT- Or more.

According to an embodiment of the present invention, the substrate is a metal substrate or a plastic substrate, and the substrate may be a Ti substrate, an Al alloy, a stainless steel plate, a brass plate, or a PET substrate.

According to one embodiment of the present invention, the piezoelectric element layer comprises a substrate having a thickness of 0.05 mm to 4 mm; And a piezoelectric layer of 0.05 mm to 3 mm; . ≪ / RTI >

According to another aspect of the present invention,

A piezoelectric element module; A fixing part for fixing the piezoelectric element module; An elasticity adjusting unit disposed at an upper end of the fixing unit; And a lower driver for vibrating the piezoelectric element; The piezoelectric element module comprising: a plurality of piezoelectric element layers; And a plurality of deformation guides alternately stacked with the piezoelectric element layer; And the deformable guide is related to a compact generator having a curvature formed on the surface in contact with the piezoelectric element layer.

According to an embodiment of the present invention, the fixing portion may include: a fixed frame having a trapezoidal groove into which the piezoelectric element layer is inserted and a guide groove for inducing vertical reciprocating motion; The fixing frame may include a semi-cylindrical lower protrusion contacting the elasticity adjusting unit at the upper end and contacting the piezoelectric element driving unit at the lower end to generate a vertical reciprocating motion.

According to an embodiment of the present invention, the elastic regulating portion includes an elastic spring and a spring housing, and the elastic spring may include a spring elastic modulus having a strain frequency ranging from 1 to 1,000.

According to an embodiment of the present invention, the piezoelectric element driving part includes a driving screw that rotates, the driving screw contacts a lower projection of the fixing frame, the driving screw forms a curved surface, And may include corrugations and flooring.

According to one embodiment of the present invention, the drive screw may provide one to ten vertical reciprocating motions per rotation.

According to an embodiment of the present invention, the piezoelectric element driver includes: a driving gear that rotates; And a piston for converting rotational motion of the driving gear into vertical reciprocating motion; Wherein the piston is capable of transmitting a vertical reciprocating motion to the fixture in contact with the fixture.

According to an embodiment of the present invention, a protective substrate may further be provided between the piston and the fixed body.

The present invention provides a piezoelectric device module which can increase the durability and prevent the generation of cracks while dispersing the stress evenly throughout the piezoelectric device, and minimizing the impact while increasing the deformation range of the piezoelectric device of the ceramic material can do.

The present invention can provide a passive compact generator capable of producing optimum power using the piezoelectric element module.

INDUSTRIAL APPLICABILITY The present invention can provide a small-sized generator in which a large number of piezoelectric element modules are highly integrated, thereby greatly improving power production.

1 is a cross-sectional view of a piezoelectric element module according to an embodiment of the present invention.
Fig. 2 illustrates, by way of example, a section of a deformation guide according to an embodiment of the present invention.
Fig. 3 exemplarily shows a miniature generator including a piezoelectric element module according to an embodiment of the present invention.
Fig. 4 illustrates, by way of example, a miniature generator including a piezoelectric element module according to another embodiment of the present invention.
5 is a diagram illustrating a multi-small generator according to another embodiment of the present invention, which is highly integrated by mounting a plurality of piezoelectric element modules according to the present invention.

Hereinafter, embodiments of the present invention will be described in detail. In the following description of the present invention, detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. In addition, terms used in this specification are terms used to appropriately express the preferred embodiments of the present invention, which may vary depending on the user, the intention of the operator, or the practice of the field to which the present invention belongs. In this specification, the definitions of these terms shall be based on the contents throughout this specification.

The present invention relates to a piezoelectric element module. According to one embodiment of the present invention, a strain guide is provided between the piezoelectric element layers to optimally disperse stress energy mechanically applied to the piezoelectric element module, It is possible to provide a highly integrated piezoelectric element module having excellent durability.

1 is a cross-sectional view illustrating a piezoelectric element module according to an embodiment of the present invention. Referring to FIG. 1, The piezoelectric element module 100 includes a plurality of piezoelectric element layers 110; And a plurality of deformation guides (120); . ≪ / RTI >

The plurality of piezoelectric element layers 110 produce piezoelectric energy by deformation due to the applied mechanical energy and are formed of a ceramic piezoelectric layer 111 and an electrode layer 112 formed on both surfaces of the piezoelectric layer 111 , 113).

For example, the piezoelectric layer 111 includes a ferroelectric material, and may be a single crystal, a polycrystalline material, a polymer composite thereof, or the like. _{α-AlPO 4 (Berlnite),} α-SiO 2 (Quartz), LiTaO 3, LiNbO 3, SrxBayNb 2 O 8, Pb5-Ge 3 O 11, Tb 2 (MoO 4) 3, Li 2 B 4 O 7, Bi ₁₂ SiO ₂ , Bi ₁₂ GeO ₂ , lead zirconate titanate (PZT), barium titanate (BTO), bismuth ferric oxide, PTO, ZnO, CdS, GaN, AlN, VDF, ZnMgO, InN, _{GeTe, ZnSnO 3, GaN, KNbO} 3, NaNBO 3, PZT-foamed polyurethane, PZT-foamed urethane, and PVDF (polyvinylidene difluoride), which are selected from the group consisting of P (VDF-TrFe), P (VDFTeFE), TGS, PZT-PVDF, PZT- Or more.

For example, the piezoelectric layer 111 can be formed to have a thickness of 0.1 mm to 3 mm in view of the flexible deformation and strength through the mechanical energy of the piezoelectric element.

For example, the electrode layers 112 and 113 may include at least one selected from the group consisting of Pt, Cu, Al, Au, Ag, and Ti.

In another example of the present invention, a plurality of piezoelectric element layers 110 includes piezoelectric layers 111 on a substrate 114 and a substrate 114, electrode layers 112 and 113 on both surfaces of the piezoelectric layer 111, Can be formed. The piezoelectric substrate 111 and the electrode layers 112 and 113 are as described above and the substrate 114 is a metal substrate or a plastic substrate and the substrate 114 is made of an Al alloy, a Ti substrate, a stainless steel , A brass plate, or a PET substrate.

For example, the length of the substrate 114 may be the same as the length of the piezoelectric layer 111 or may be shorter to induce a flexible deformation of the piezoelectric layer 111

For example, the substrate 114 is formed to a thickness of 0.05 mm to 4 mm, the piezoelectric layer 111 is formed to a thickness of 0.05 mm to 3 mm, and the thickness of the substrate 114 and the piezoelectric layer 111 The sum may be from 0.1 mm to 7 mm. Preferably, the substrate 114 may be formed to a thickness of 0.3 mm and the piezoelectric layer 111 may be formed to a thickness of 0.2 mm.

In one embodiment of the present invention, the deformation guides 120 are stacked alternately with the piezoelectric element layers 110, and the deforming guides 120 are composed of a plurality of. The deformation guide 120 absorbs the impact between the piezoelectric element layers 110 and is stretched or contracted when the piezoelectric element layer 110 vibrates to deform the piezoelectric element layer 110 to an optimum radius of curvature at the time of deformation, It is possible to provide a piezoelectric device module 100 that is uniformly dispersed to prevent cracks, breakage, and the like of the piezoelectric device layer 110 and to control the level of deformation to provide durability through optimum deformation of the piezoelectric device.

For example, the deformation guide 120 is capable of deforming the piezoelectric element layer 110, for example, vertical deformation in the range of 10% to 15% of the length of the piezoelectric layer 111; For example, this may be from 1 mm to 7.5 mm for a 50 mm piezoelectric element; Or a size of 2 mm to 5 mm, inducing a uniform dispersion of the stress due to the deformation, and improving the durability.

For example, the deformation guide 120 may have a curvature on a surface contacting the piezoelectric element layer 110, and the curvature may be 90% or less of the length of the piezoelectric element layer 110; Preferably 20% to 90%; More preferably in a contact area of 50% to 90% with respect to the piezoelectric element layer 110 and the deformation guide 120. If the contact area is out of the contact area range, expansion and contraction are not performed well, stress dispersion is not performed well, and improvement of the durability of the piezoelectric element layer 110 may become difficult.

For example, the deformation guide 120 may be formed in a range of 10% to 15% of the length of the piezoelectric element layer 110 so that the stress distribution of the piezoelectric element layer 110 is well dispersed, A radius of curvature r for inducing deformation of the piezoelectric element layer 110. For example, the piezoelectric element layer 110 having a length of 50 mm may have a curvature radius r to induce deformation of 1 to 5 mm, May be between 65 mm and 325 mm.

For example, the deformation guide 120 may have a thickness of 1 mm to 30 mm.

For example, referring to FIG. 2, the deformation guide 120 is illustratively shown in cross section of a deformation guide 120 according to an embodiment of the present invention, The height difference (h, elevation difference) between the trough L1 and the trough L2 in the curvature of the trough 120 is 0.5 mm to 7.5 mm; Or 1 mm to 5 mm, which may be 1 mm to 7.5 mm for a 50 mm long electrode.

For example, the deformation guide 120 may have an elastic polymer coating layer formed on at least a part of the surface thereof. The elastic polymer coating layer may include an elastic polymer, keep the mechanical deformation amount of the piezoelectric element layer uniform, The surface friction and scratches can be minimized.

For example, the elastic polymer coating layer may have a thickness of 0.1 mm to 10 mm; 1 mm to 5 mm; Or a thickness of 0.5 mm to 1 mm. If the thickness of the elastic polymer coating layer is less than 0.1 mm, damage may be caused by the piezoelectric element layer 110. If the thickness exceeds 1 mm, It may not.

For example, the elastic polymer coating layer may be applied to any polymer having elasticity without limitation, for example, a polyolefin elastomer polymerized with at least one of ethylene, propylene, butadiene, and alpha olefin olefin-based monomers; Polyolefin elastomer; Polyurethane-based elastomers; An elastomer in which the olefin-based monomers and the monomers having polar groups are copolymerized; An elastomer in which styrene and the olefin-based monomers are copolymerized; Nylon elastomer; Polyester-based elastomer; And Teflon elastomers; But it is not limited thereto. .

For example, the deformation guide 120 may comprise an alloy, metal, polymer, and the like, and may include, for example, poly (oxymethylene) nylon, nylon 6, nylon 66 nylon 66, nylon 610, epoxies, polyurethanes, cellulose, polymers of engineering plastics having excellent mechanical strength, and light alloys such as Al alloys. Or more, but is not limited thereto.

The present invention relates to a small-sized generator including a piezoelectric element module according to the present invention. According to an embodiment of the present invention, the small-sized generator has high durability and a highly integrated piezoelectric element module, It can be used as a passive generator with improved production and portability.

3 is a block diagram illustrating a compact generator according to an embodiment of the present invention. Referring to FIG. 3, the compact generator includes a piezoelectric element A module 100, a fixing unit 200, a lower driving unit 300, an elasticity adjusting unit 400, and an AC / DC converter 500. The piezoelectric element module 100 is as described above.

In the present invention, the fixing portion 200 is configured to mount and fix the piezoelectric element module 100, to transmit the mechanical kinetic energy to the piezoelectric element, and to prevent the natural deformation of the piezoelectric element module 100 according to the mechanical kinetic energy The fixing portion 200 may include a fixing frame 210 having the insertion groove 211, the guide groove 212 and the lower protrusion 213 formed therein.

 For example, the insertion groove 211 may be formed in a trapezoidal shape so that the piezoelectric element layer 110 of the piezoelectric element module 100 is inserted and fixed and the piezoelectric element is well deformed.

For example, the guide groove 212 induces a vertical reciprocating motion, and is formed on the left and right sides of the fixed frame 210 to allow vertical reciprocating motion without generating any vibration when the fixed frame 210 reciprocates vertically , The plate shaft can be inserted.

For example, the lower protrusion 213 transforms the rotational motion transmitted from the lower driver 300 into a vertical reciprocating motion to induce deformation of the piezoelectric element. The lower protrusion 213 is formed at the lower end of the fixed frame 210, , And may protrude in a semicircular columnar shape in order to generate a mechanical reciprocating motion without vibration and impact upon contact with the lower driver 300.

For example, the fixed frame 210 is formed of a ceramic material, preferably made of alumina, and can be easily replaced without scratching by the piezoelectric element module 100.

The lower driving part 300 generates mechanical kinetic energy and contacts the lower protruding part 213 to transfer mechanical kinetic energy to the fixed frame 210. [ For example, the lower driving unit 300 includes a driving screw 311 that rotates, and the rotary motion of the driving screw 311 is converted into a vertical reciprocating motion by the lower projection 213, . The driving screw 311 is formed with a curved surface for converting rotational motion into vertical reciprocating motion without vibration and impact, and the curved surface may include a plurality of troughs S1 and a floor S2. For example, the troughs S1 and S2 may be formed to provide one to ten vertical reciprocating movements at a time.

The elasticity adjusting unit 400 is located at the upper end of the fixed frame 210 and maintains a quick bottom restoring force when the driving screw 311 rotates to induce optimum power generation and prevent shock have.

For example, the elastic regulator 400 includes an elastic spring 410 and a spring housing 420, and the elastic spring 410 has a spring elastic modulus in the range of a strain frequency of 1 to 1000, The impact due to the high-speed rotation of the driving screw can be alleviated, and stable high-power production can be achieved. The resilient spring 410 is equipped with an elastic adjusting screw (not shown) to adjust the vertical position of the fixed frame.

The AC-DC converter 500 transforms the piezoelectric energy produced by the piezoelectric element module unit 100 into a voltage and transfers the energy to a portion where energy storage and energy consumption are required. The DC-DC converter 500 ) May be used in the technical field of the present invention, and are not specifically described herein.

As an example of the present invention, the miniature generator may further include a configuration applied in the technical field of the present invention, so long as the object of the present invention is not overcome, and the present specification is not specifically described.

4 is a cross-sectional view of a small generator according to another embodiment of the present invention. In FIG. 4A, the small generator includes a piezoelectric element module 100, a fixing portion 200, a lower receiving portion 300, a lower driving portion 400, an elasticity adjusting portion 500 (not shown in the drawing), and an AC-DC converter 600 And the piezoelectric element module 100, the fixing part 200, the elasticity adjusting part 500, and the AC-DC converter 600 are as described above.

The lower driving unit 400 includes a rotary gear 410, a piston 420, and a piston shaft 430. The lower driving unit 400 includes a rotary gear 410, a piston 420, and a piston shaft 430, The piston 410 is coupled with the piston shaft 430 to rotate, and a curved surface is formed to convert the rotational motion into the vertical reciprocating motion without vibration and impact. The curved surface may include a plurality of troughs S1 and a floor S2 and may preferably form at least 8 valleys S1 and a floor S2 and the curved surface may have a thickness of 3 mm to 5 mm A radius of curvature is formed.

For example, the piston shaft 430 rotates the rotary gear 410 to transfer mechanical energy for up and down movement of the piston 420.

The protective plate 440 may be disposed between the piston 420 and the fixed frame 210 to prevent the direct mechanical energy of the piston 420 from being applied to the fixed frame 210. [ It is possible to prevent transmission of cracks and the like of the piezoelectric element module 100. For example, the protective substrate 440 may be a Ti substrate, a stainless steel plate, a brass plate, or a PET substrate, preferably an SUS plate.

The fixing part 200 and the lower driving part 400 are provided on the lower supporting part 300 and are provided with a fixing part 200 and a lower driving part 400 for stable installation and power generation, And the insertion portion may be formed in accordance with the shapes of the fixing portion 200 and the lower driving portion 400. In this case, For example, the lower driver 400 may be formed as a single unit or a plurality of units.

4B, the lower driving unit 400 includes a rotary gear 410 and a piston 420 in a cylinder 450, and a rotary gear 410 according to a mechanical motion. And detachment of the piston 420 and the like, and can provide stable electric energy.

5, there is shown a multi-compact generator according to the present invention, which is highly integrated by mounting a plurality of piezoelectric element modules, and includes a piezoelectric element module 100, And includes a fixing portion 200, a lower receiving portion 300, a lower driving portion 400, an elasticity adjusting portion 500, and a current transformer 600. The fixing portion 200, the lower receiving portion 300, The driving unit 400, the elasticity adjusting unit 500 (not shown in the figure), and the current converter 600 (not shown in the drawing) are as described above. In an example of the present invention, a plurality of piezoelectric element modules 100, 100a, 100b, and 100c are mounted so as to highly integrate the piezoelectric elements, thereby producing a high-capacity piezoelectric energy and improving the power generation amount. A plurality of fixed portions 200, 200a, 200b, and 200c and a plurality of lower driving portions 400 may be formed to drive the plurality of piezoelectric element modules 100, 100a, 100b, and 100c.

The present invention can provide a piezoelectric device module capable of improving the durability of the piezoelectric device module and producing stable piezoelectric energy by preventing the damage of the piezoelectric device according to mechanical energy. Further, the present invention can provide a small-sized generator that realizes high integration of a piezoelectric element, improves power generation capacity, and is highly portable.

Claims (17)

A plurality of piezoelectric element layers; And
A plurality of deformation guides alternately stacked with the piezoelectric element layer;
Lt; / RTI >
Wherein the deformation guide has a curvature formed on a surface contacting the piezoelectric element layer,
Both ends of the piezoelectric element layer are inserted into the fixing portion,
Wherein the deformation guide is stacked on the piezoelectric element layer and is vertically and constantly oscillated so that the piezoelectric elements are uniformly deformed,
Wherein the deformation guide is formed by forming an elastic polymer coating layer on at least a part of the surface,
Wherein the coating layer has a thickness of 0.1 mm to 10 mm.
The method according to claim 1,
Wherein the deformation guide has a curvature in contact with 20% to 90% of the length of the piezoelectric element layer.
The method according to claim 1,
Wherein the deformation guide is formed with a curvature having a radius of curvature inducing vertical deformation of 10% to 15% of the length of the piezoelectric element layer,
Wherein the height difference according to the curvature has a height difference (a distance between a low point and a high point) of 0.5 mm to 7.5 mm for a 50 mm long electrode.
delete The method according to claim 1,
Wherein the elastic polymer coating layer comprises a polyolefin elastomer polymerized with at least one of ethylene, propylene, butadiene, and alpha olefin olefin-based monomers; Polyolefin elastomer; Polyurethane-based elastomers; An elastomer in which the olefin-based monomers and the monomers having polar groups are copolymerized; An elastomer in which styrene and the olefin-based monomers are copolymerized; Nylon elastomer; Polyester-based elastomer; And Teflon elastomers; And at least one selected from the group consisting of a piezoelectric material and a piezoelectric material.
The method according to claim 1,
The deformation guide may be an alloy, metal or poly (oxymethylene) nylon, nylon 6, nylon 66, nylon 610, epoxies, Wherein the piezoelectric layer comprises at least one polymer selected from the group consisting of polyurethanes and cellulose.
The method according to claim 1,
Wherein the deformation guide has a thickness of 1 mm to 30 mm.
The method according to claim 1,
The piezoelectric element layer comprising: a substrate; And a piezoelectric layer formed on the substrate, the piezoelectric layer having electrode layers on both surfaces thereof; / RTI >
Wherein the piezoelectric layer includes a ferroelectric,
Said piezoelectric _{layer, α-AlPO 4 (Berlnite)} , α-SiO 2 (Quartz), LiTaO 3, LiNbO 3, SrxBayNb 2 O 8, Pb5-Ge 3 O 11, Tb 2 (MoO 4) 3, Li 2 B _{4 O 7, Bi 12 SiO 2} 0, Bi 12 GeO 2, PZT (lead zirconate titanate), BTO (barium titanate), BFO (bismuth ferric oxide), PTO (platinum oxide), ZnO, CdS, GaN, AlN, VDF , ZnMgO, InN, GeTe, ₃ ZnSnO, GaN, KNbO _3, NaNBO _3, PZT-foamed polyurethane, PZT-foamed urethane, and PVDF (polyvinylidene difluoride), which are selected from the group consisting of P (VDF-TrFe), P (VDFTeFE), TGS, PZT-PVDF, PZT- And the piezoelectric element module comprises a piezoelectric element.
9. The method of claim 8,
The substrate is a metal substrate or a plastic substrate,
Wherein the substrate is a Ti substrate, an Al alloy, a stainless steel plate, a brass plate, or a PET substrate.
9. The method of claim 8,
Wherein the piezoelectric element layer comprises: a substrate having a thickness of 0.05 mm to 4 mm; And a piezoelectric layer having a thickness of 0.05 mm to 3 mm; And a piezoelectric element.
A piezoelectric element module;
A fixing part for fixing the piezoelectric element module;
An elasticity adjusting unit disposed at an upper end of the fixing unit; And
A lower driver for vibrating the piezoelectric element;
Lt; / RTI >
The piezoelectric element module comprises:
A plurality of piezoelectric element layers; And
A plurality of deformation guides alternately stacked with the piezoelectric element layer; Lt; / RTI >
Wherein the deformation guide has a curvature formed on a surface contacting the piezoelectric element layer,
Both ends of the piezoelectric element layer are inserted into the fixing portion,
Wherein the deformation guide is stacked on the piezoelectric element layer and is vertically and constantly oscillated so that the piezoelectric elements are uniformly deformed,
Wherein the deformation guide is formed by forming an elastic polymer coating layer on at least a part of the surface,
Wherein the coating layer has a thickness of 0.1 mm to 10 mm.
12. The method of claim 11,
The fixing unit includes: a fixed frame having a trapezoidal groove into which the piezoelectric element layer is inserted and a guide groove for inducing vertical reciprocating motion; / RTI >
Wherein the fixed frame includes a semi-cylindrical lower protrusion that contacts the elasticity regulating portion at the upper end and contacts the lower drive portion at the lower end to generate a vertical reciprocating motion.
12. The method of claim 11,
The elasticity adjusting unit may include:
An elastic spring and a spring housing,
Wherein the elastic spring comprises a spring elastic modulus in the range of 1 to 1000 strain frequencies.
13. The method of claim 12,
Wherein the lower driving part includes a driving screw that rotates,
Wherein the driving screw is in contact with a lower projection of the fixing frame,
Wherein the drive screw forms a curved surface and includes a plurality of valleys and a floor.
15. The method of claim 14,
Wherein the drive screw provides one to ten vertical reciprocating motions per revolution.
12. The method of claim 11,
Wherein the lower driver comprises:
A driving gear that rotates; And a piston for converting rotational motion of the driving gear into vertical reciprocating motion; / RTI >
Wherein the piston is in contact with the fixture and transmits a vertical reciprocating motion to the fixture.
17. The method of claim 16,
And a protective substrate between the piston and the fixed body.

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