KR101818307B1 - Tactile sensor possible to detect a proximity - Google Patents

Tactile sensor possible to detect a proximity Download PDF

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KR101818307B1
KR101818307B1 KR1020150145870A KR20150145870A KR101818307B1 KR 101818307 B1 KR101818307 B1 KR 101818307B1 KR 1020150145870 A KR1020150145870 A KR 1020150145870A KR 20150145870 A KR20150145870 A KR 20150145870A KR 101818307 B1 KR101818307 B1 KR 101818307B1
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electrode
line
elastic dielectric
hole
value
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KR1020150145870A
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KR20170046217A (en
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최혁렬
띠엔 닷 응웬
김의겸
박준우
한효승
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성균관대학교산학협력단
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • G01L5/0076—Force sensors associated with manufacturing machines
    • G01L5/009—Force sensors associated with material gripping devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V3/00—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
    • G01V3/08—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices
    • G01V3/088—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices operating with electric fields

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  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
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  • Life Sciences & Earth Sciences (AREA)
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  • Geophysics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Electromagnetism (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The present invention relates to a tactile proximity sensor, wherein a tactile proximity sensor according to the present invention includes a first electrode line in which through holes are formed in a row and a second electrode line in which a second electrode is formed, And a signal line is formed in the one-electrode line and the second electrode line, thereby providing a tactile proximity sensor capable of minimizing the number of signal lines.

Description

[0001] TACTILE SENSOR POSSIBLE TO DETECT A PROXIMITY [0002]

[0001] The present invention relates to a tactile proximity sensor, and more particularly, to a tactile proximity sensor in which a first electrode and a second electrode are formed on the same plane as a robot skin sensor and tactile sense detection and proximity detection are possible.

In recent years, as industrial technology has developed, tools for performing dangerous or fine work required for industrial use or medical use on behalf of human being are being actively developed. Therefore, research to realize the same mechanism as the human body is a global concern, and efforts to develop humanoid hands have been concentrated both at home and abroad, in particular, to represent the performance of tasks in dangerous or difficult places to be directly performed by humans have.

However, since human hands include about 30 bones in spite of a small volume compared to other bodies, delicate movements are possible, so that it is difficult to realize such human-like movements as robots. In particular, in order to fully simulate the human hand in addition to such a multi-degree-of-freedom operating mechanism, a technique is required to be able to sense the same touch as the human touch.

To this end, sensors that act like human skin to detect the contact force of an object attached to a robot have been developed.

FIG. 1 is a schematic perspective view of a conventional capacitor-type tactile sensor for a robot skin, and FIG. 2 is a front view of the tactile sensor for a robot skin of FIG.

Referring to FIGS. 1 and 2, a pair of electrodes 12 are disposed opposite to each other on both sides of an elastic dielectric material 11 having a dielectric constant. Accordingly, when an external force is applied to the sensor, the elastic dielectric 11 is compressed, and the distance between the electrodes 12 is reduced, thereby changing the capacitance value. The position and size of the force applied to the sensor 10 are calculated according to the change of the capacitance value.

At this time, not only one pair of electrodes 12 is formed on the sensor 10, but a plurality of pairs are formed so as to measure at a larger area. The information on each electrode 12 is required to obtain a change in the capacitance value, so that the electric wire 13 is connected to each electrode 12. Therefore, in the conventional robot skin sensor, the number of the electric wires 13 increases according to the number of the electrodes 12 formed on the sensor 10, so that the sensor 10 becomes complicated. As a result, There is a problem such as a relation with another constitution such as a robot.

In addition, the conventional tactile sensor has a limitation in reducing the thickness, and there is a problem that the durability of the electrode contacting the outside can not be ensured. In addition, since disturbance may occur due to an electrode exposed to the outside when sensing an external stimulus, there is a problem in that it is not suitable for use as a sensor for a skin of a robot.

Korean Patent Publication No. 10-2008-0054187

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a plasma display panel in which a first electrode and a second electrode are formed on the same plane, and a first electrode and a second electrode are formed in a row- So that the number of wires can be minimized.

It is another object of the present invention to provide a tactile proximity sensor capable of sensing not only when an object comes in contact with an object from outside but also when an object comes close to the object.

The problems to be solved by the present invention are not limited to the above-mentioned problems, and other matters not mentioned can be clearly understood by those skilled in the art from the following description.

According to an aspect of the present invention, there is provided a plasma display panel comprising: a first electrode formed in a long plate shape and having n number of first electrode lines arranged in a row in the form of 1 x n through-holes to form n x m through-holes; A second electrode that is formed to be smaller than the through hole and inserted into the through hole so as to be spaced apart from the first electrode and is arranged in the form of m x 1 and has n second electrode lines arranged perpendicularly to the first electrode line; An insulator formed between the first electrode and the second electrode as an insulator to prevent contact between the first electrode and the second electrode; An elastic dielectric layer laminated on the first electrode and the second electrode; And a tactile proximity sensor including a signal value of the first electrode and a signal value of the second electrode, the tactile proximity sensor including one of an object contacting the elastic dielectric and an object approaching the elastic dielectric.

Here, the insulating portion may include a base portion in which a second through-hole corresponding to the through-hole is formed in a plate shape, and the second electrode is inserted; And a projection protruding from the upper surface of the base to protrude from the periphery of the second through-hole, the protruding outer surface being inserted into the through-hole to prevent contact between the first electrode and the second electrode.

Here, signal lines are formed in the first electrode line and the second electrode line, respectively, and the signal line is connected to the calculation unit.

Here, the first electrode and the second electrode are preferably formed of conductive silicon.

Here, the insulating portion may be formed of silicon.

The elastic dielectric may be formed of carbon micro-coils (CMC).

Here, the calculating unit may determine a capacitance value or an impedance value by using the signal value of the first electrode and the signal value of the second electrode, and detect any one of the objects contacting the elastic dielectric or approaching the elastic dielectric desirable.

Here, it is preferable that the calculating unit detects an object proximate to the elastic dielectric by using the impedance value.

According to the tactile proximity sensor of the present invention as described above, the first electrode and the second electrode are formed on the same plane, and the first electrode and the second electrode are arranged in a row-row grid pattern, It can be minimized.

In addition, there is an advantage that it can be detected not only when an object comes in contact with the outside but also when an object comes close to it by using carbon micro coils (CMC) as an elastic dielectric.

In addition, it has flexibility and stretchability and can be mounted on the surface of the curved surface.

FIG. 1 is a schematic perspective view of a conventional capacitor-type tactile sensor for a robot skin.
2 is a front view of the tactile sensor for the skin of the robot of Fig. 1;
3 is an exploded perspective view of a tactile proximity sensor, except for an elastic dielectric, according to an embodiment of the present invention.
FIG. 4 is an exploded perspective view further comprising an elastic dielectric in FIG. 3; FIG.
5 is a perspective view illustrating an electrode structure of a single cell according to an embodiment of the present invention.
6 (a) is a view showing a PCB design design of a first electrode and a second electrode and an elastic dielectric formed of a carbon micro-coil, (b) and (c) Figure 2 shows a photograph of the front and back of the proximity sensor.
7 is a graph showing linearity experimental data of a tactile proximity sensor according to an embodiment of the present invention.
8 is a graph showing a change in capacitance with time when a constant force is applied to the tactile proximity sensor according to an embodiment of the present invention.
FIG. 9 is a graph showing a change in capacitance value and impedance value according to a distance to an object when sensing an object approaching the tactile proximity sensor according to an embodiment of the present invention.
FIG. 10 is a graph illustrating the repeatability of sensing an object approaching a tactile proximity sensor according to an exemplary embodiment of the present invention.
11 is a graph showing a change in impedance value according to the type of an object approaching a tactile proximity sensor according to an embodiment of the present invention.

The details of the embodiments are included in the detailed description and the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention and the manner of achieving them will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. To fully disclose the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

Hereinafter, the present invention will be described with reference to the drawings for explaining a tactile proximity sensor according to embodiments of the present invention.

FIG. 3 is an exploded perspective view of a tactile proximity sensor except an elastic dielectric according to an embodiment of the present invention, FIG. 4 is an exploded perspective view further including an elastic dielectric in FIG. 3, and FIG. (B) and (c) illustrate a PCB design design of a first electrode and a second electrode, and an elastic dielectric formed of a carbon micro-coil, FIG. 6 (a) Show photographs of the front and rear surfaces of a tactile proximity sensor fabricated on a PCB substrate according to the present invention.

The tactile proximity sensor according to an embodiment of the present invention may include a first electrode 110, a second electrode 120, an insulation unit 130, an elastic dielectric 140, and a calculation unit (not shown). have.

The first electrode 110 forms a capacitor together with the second electrode 120 and the elastic dielectric 140. As shown in FIG. 3, a plurality of first electrode lines 115 having a plurality of through holes 112 arranged in a row are formed in a long plate shape, and through-holes 112, which are arranged horizontally and vertically, . In the drawing, ten through holes 112 are formed in each first electrode line 115, and ten first electrode lines 115 are arranged so that a total of 10 x 10 through holes 112 are formed. FIG.

The number of through holes 112 formed in each first electrode line 115 and the number of through holes 112 formed in the first electrode line 115 are determined depending on the number of capacitors to be implemented, The first electrode 110 having the through holes 112 arranged in the form of nxm can be formed. The accuracy of the sensor and the size of the sensor may be adjusted by adjusting the distance between the through holes 112 formed in the first electrode line 115 and the distance between the first electrode lines 115.

Although the through hole 112 is formed in a circular shape in the drawing, the through hole 112 is not limited thereto. However, it is preferable that the shape of the second electrode 120 is formed so as to correspond to the shape of the through hole 112. For example, when the through hole 112 is formed in a circular shape as shown in the drawing, the second electrode 120 is preferably formed in a cylindrical shape, and the through hole 112 is formed in a square shape The shape of the second electrode 120 is preferably a square pillar shape.

The size of the through hole 112 is larger than that of the second electrode 120, and the second electrode 120 is inserted into the through hole 112. When the second electrode 120 is inserted into the through hole 112, the first electrode 110 and the second electrode 120 are spaced apart from each other, The insulating portion 130 is formed in the spacing space to prevent contact between the first electrode 110 and the second electrode 120 so that the first electrode 110 and the second electrode 120 Can be electrically separated.

In the present invention, a single signal line 118 may be formed in each first electrode line 115. 6A shows a PCB design design of the first electrode 110. One signal line 118 extends to each of the first electrode lines 115 formed laterally. Each signal line 118 formed in each first electrode line 115 is connected to a calculator (not shown) to be described later to transmit a signal.

On the other hand, a voltage is applied to the first electrode 110. In this embodiment, the first electrode 110 is a cathode, but may be an anode when the second electrode 120 is provided as a cathode.

The second electrode 120 has a polarity opposite to that of the first electrode 110 and is formed in a cylindrical shape having a height greater than the thickness of the first electrode 110. The second electrode lines 125 are arranged in a line at predetermined intervals in a number corresponding to the number of the first electrode lines 115. The second electrode lines 125 are arranged in the through holes 112 The number of which corresponds to the number of the electrodes. In the present invention, the second electrode lines 125 constituting the second electrode 120 are vertically arranged with respect to the first electrode line 115, so that the first electrode line 115 and the second electrode line 115, as shown in FIG. 3, The second electrode lines 125 are arranged in a lattice structure with each other. Therefore, if the number of the through-holes 112 formed in the first electrode line 115 is n and the number of the first electrode lines 115 arranged is m, the number of the electrodes formed in the second electrode line 125 The number of the second electrode lines 125 to be arranged is m and the number of the arranged second electrode lines 125 is n, so that the first electrode line 115 and the second electrode line 125 can form nxm unit cells, The one-electrode line 115 and the second electrode line 125 are arranged in the form of a lattice structure perpendicular to each other as described above.

In the present invention, a single signal line 128 is formed in each second electrode line 125. 6A shows the PCB design design of the second electrode 120. One signal line 128 is connected to each of the second electrode lines 125 formed vertically as shown in FIG. Respectively. Each signal line 128 formed in each second electrode line 125 is connected to an output unit (not shown) to transmit a signal.

6, since the single signal lines 118 and 128 are formed in the first electrode line 115 and the second electrode line 125, the number of all signal lines can be minimized There is a number.

The first electrode 110 and the second electrode 120 must be spaced apart from each other in order to function as the capacitor and the first electrode 110. As a result, The second electrode 120 is inserted into the through hole 112 such that the first electrode 110 and the second electrode 120 are spaced apart from each other.

The second electrode 120 is inserted into the through hole 112 so as to have a height equal to the height of the upper surface of the first electrode 110 so that the elastic dielectric 140 provided in a flat plate shape can be easily stacked. In addition, a voltage may be applied to the second electrode 120. In this embodiment, the second electrode 120 may be provided with an anode having a polarity opposite to that of the first electrode 110. [

The insulating part 130 is formed between the first electrode 110 and the second electrode 120 to prevent the first electrode 110 and the second electrode 120 having different polarities from each other to thereby electrically isolate the first electrode 110 and the second electrode 120 . The insulating portion 130 may be formed of an insulating material and may include a base portion 133 and a protrusion 134.

As shown in Fig. 3, the base portion 133 is provided in a flat plate shape and is stacked on the substrate S. Accordingly, the base portion 133 can prevent contact between the signal line 128 formed in the second electrode line 125 and the first electrode 110. [0050]

The second through holes 132 are formed in the base portion 133 and the number of the second through holes 132 is formed to correspond to the number of the second electrodes 120. That is, when the second electrodes 120 are arranged in n x m as described above, the second through holes 132 are formed in the same manner as n x m. Since the second electrode 120 is inserted into the second through hole 132, the area of the second through hole 132 corresponds to the area of the second electrode 120.

The projecting portion 134 is protruded from the upper surface of the base portion 133 around the second through hole 132. 5, the protrusion 134 is formed to have a width corresponding to the spacing between the first electrode 110 and the second electrode 120. The protrusion 134 is formed on the outer surface of the protrusion 134, The first electrode 110 is inserted into the second through hole 132 which is the inner circumferential surface of the protrusion 134 and the through hole 112 of the first electrode 110 and the second electrode 120 is inserted, It is possible to prevent contact. The first electrode 110 and the second electrode 120 are formed on the same plane by interposing the insulating portion 130 having the protrusion 134 formed between the first electrode 110 and the second electrode 120 as described above, And the first electrode 110 and the second electrode 120 can be electrically separated from each other by the insulating portion 130. In addition,

The height of the protrusion 134 is equal to the thickness of the first electrode 110 so that when the first electrode 110 and the second electrode 120 are inserted into the first electrode 110, the protrusion 134, It is possible to easily laminate the plate-like elastic dielectric 140 such that the upper surface formed by the two electrodes 120 is horizontal.

The first electrode 110, the second electrode 120, and the insulating portion 130 may be formed of a stretchable material. Specifically, the first electrode 110 and the second electrode 120 may be formed of a conductive silicon material, and the insulation unit 130 may be formed of a silicon material. It is possible to adapt to and adhere to the surface of human skin or various relative objects by being made of a stretchable material.

The elastic dielectric 140 is stacked on the upper surface of the first electrode 110 and the second electrode 120 and is formed of a dielectric material having a permittivity. An external force to be sensed is directly applied to the elastic dielectric 140.

The elastic dielectric 140 is formed in a plate shape as shown in FIG. 4 and is stacked on a plane formed by the first electrode 110, the protrusion 134, and the second electrode 120. That is, the first electrode 110 and the second electrode 120 are stacked on top of each other. When the external force is applied, the resilient dielectric 140 is compressed and the thickness is reduced. As a result, the capacitance value or the inductance value is changed, so that the magnitude of the external force and the magnitude of the external force can be calculated.

The elastic dielectric 140 may be formed of a flexible material such as the first electrode 110, the second electrode 120, and the insulating portion 130.

The capacitor formed by the first electrode 110, the second electrode 120 and the elastic dielectric 140 may be formed by co-planarizing the first electrode 110 and the second electrode 120 in the present invention. So that the electric flux is curvilinearly formed.

The capacitance value of a capacitor formed in this manner is known to be determined by the following equation.

Equation 1

Figure 112015101483715-pat00001

here,

Figure 112015101483715-pat00002
Is a dielectric constant,
Figure 112015101483715-pat00003
The thickness of the elastic dielectric 140,
Figure 112015101483715-pat00004
The electrode width,
Figure 112015101483715-pat00005
Is the electrode distance.

When the phases of the voltages applied to the first electrode 110 and the second electrode 120 are different from each other, the signal value of the first electrode 110 and the signal value of the second electrode 120 are used to determine the inductance value Can be obtained.

The calculation unit may calculate the capacitance value or the inductance value of the elastic dielectric 140 by using the signal value of the first electrode 110 and the signal value of the second electrode 120, Or that an object close to the elastic dielectric 140 has been detected. More specifically, when an object contacts the elastic dielectric 140, the contact position and the contact force can be detected, and when the object is in contact with the elastic dielectric 140, the proximity position and the proximity distance can be detected. In addition, it is preferable to use the inductance value when detecting an object close to the object to be described later.

The signal lines 118 and 128 formed in the first electrode line 115 and the second electrode line 125 are connected to the calculation unit (not shown). The calculation unit (not shown) It is possible to detect the object by determining the magnitude and the change of the capacitance value or the impedance value from the signal value of the first electrode 110 and the signal value of the second electrode 120.

Also, in the present invention, the elastic dielectric 140 may be formed of carbon micro coils (CMC) in a spiral coil state dispersed in silicon. The carbon micro-coils may be formed of a mixture of a conductive material and a polymer material. The polymer material may include at least one of silicone rubber, acrylonitrile butadiene rubber (NBR), and poly-dimethylsiloxane (PDMS).

When an object approaches the elastic dielectric 140 formed of CMC, the electric field formed by the carbon micro-coils and the electrode changes, and the capacitance value and the inductance value of the elastic dielectric 140 change. Accordingly, the degree of approach of the object can be detected by measuring the magnitude and the change of the capacitance value or the inductance value of the elastic dielectric 140.

Hereinafter, with reference to FIG. 7 to FIG. 9, experimental results on the performance of a sensor arranged in the form of 10 x 10 according to the present invention will be described.

FIG. 7 is a graph showing experimental data of linearity of a tactile proximity sensor according to an embodiment of the present invention. FIG. 8 is a graph showing a relationship between a capacitance according to a time when a constant force is applied to the tactile proximity sensor according to an embodiment of the present invention, FIG. 9 is a graph showing a change in capacitance value and impedance value according to a distance to an object when sensing an object approaching the tactile proximity sensor according to an embodiment of the present invention, and FIG. FIG. 10 is a graph illustrating the repeatability of sensing an object approaching a tactile proximity sensor according to an exemplary embodiment of the present invention. FIG. 11 is a graph illustrating the type of an object approaching the tactile proximity sensor according to an exemplary embodiment of the present invention. And FIG.

FIG. 7 shows a change in the capacitance value of the sensor when the pressure applied to the elastic dielectric 140 is gradually increased to 325 kPa and then reduced again. As the magnitude of the force changes, the capacitance value of the sensor changes It can be seen that the hysteresis is hardly generated due to the similar magnitude of the capacitance value when the force increases and the force decreases.

8 shows a change in capacitance value with time when a force of 150 kPa and 70 kPa is applied to the elastic dielectric 140. It can be seen that a constant value is maintained for each force with time.

9 is a graph showing a change in capacitance value and impedance value according to a proximity distance obtained from a signal value of the first electrode 110 and a signal value of the second electrode 120 when an object approaches using the tactile proximity sensor according to the present invention. FIG. In the graph, it can be seen that the value of the inductance changes continuously when the object is in close proximity, while the value of the capacitance is discontinuously generated. Therefore, in the case of sensing a nearby object with the tactile proximity sensor according to the present invention, it is preferable to use the impedance value obtained from the signal value of the first electrode 110 and the signal value of the second electrode 120.

10 is a graph showing the result of five repeated experiments of changing the impedance value when an object is moved from a tactile proximity sensor according to the present invention to a position of 220 mm and then moved to a position of 220 mm. The change in the impedance value due to the change in the impedance is the same. Therefore, it is understood that the repeatability is excellent when the proximity distance is detected.

11 is a graph showing the change in impedance value according to the proximity distance when the adjacent object is changed to plastic, aluminum, and copper.

The scope of the present invention is not limited to the above-described embodiments, but may be embodied in various forms of embodiments within the scope of the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims.

110: first electrode 112: through-hole
115: first electrode line 118: signal line
120: second electrode 125: second electrode line
128: signal line 130:
132: second through hole 133: base portion
134: protrusion 140: elastic dielectric

Claims (8)

A first electrode formed in a long plate shape and having n number of first electrode lines in which n number of through holes are arranged in a line in the form of 1 x n to form nxm through holes;
N second electrode lines which are arranged to be smaller than the through holes and are inserted into the through holes so as to be spaced apart from the first electrodes and protrude and arranged in the form of a long plate with mx 1 and arranged perpendicularly to the first electrode lines A second electrode;
An insulator formed between the first electrode and the second electrode as an insulator to prevent contact between the first electrode and the second electrode;
An elastic dielectric laminated on the first electrode and the second electrode and including carbon microcils (CMC); And
And a calculation unit for sensing a tactile angle of an object in contact with the elastic dielectric with a signal value of the first electrode and a signal value of the second electrode and sensing a proximity of an object close to the elastic dielectric. The method according to claim 1,
The insulating portion
A base portion having a plate-shaped second through hole corresponding to the through-hole and into which the second electrode is inserted; And
And a projection protruding from the upper surface of the base to protrude from the periphery of the second through hole and inserted into the protruding outer circumferential surface of the through hole to prevent contact between the first electrode and the second electrode. The method according to claim 1,
A signal line is formed in each of the first electrode line and the second electrode line, and the signal line is connected to the calculation unit. The method according to claim 1,
Wherein the first electrode and the second electrode are formed of conductive silicon. The method according to claim 1,
Wherein the insulating portion is formed of silicon. delete The method according to claim 1,
Wherein the calculating unit calculates a capacitance value or an impedance value by using the signal value of the first electrode and the signal value of the second electrode to detect a tangential proximity sensor that contacts any one of the elastic dielectrics, . 8. The method of claim 7,
Wherein the calculating unit detects an object close to the elastic dielectric by using the impedance value.
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KR102090684B1 (en) * 2018-04-30 2020-04-23 한국기계연구원 Multi-step tactile pressure sensor
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US11548635B2 (en) * 2019-03-28 2023-01-10 Rakuten Group, Inc. Unmanned flight equipment and delivery method
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KR101552801B1 (en) * 2014-11-20 2015-09-14 성균관대학교산학협력단 Tactile sensor

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JP2005049332A (en) * 2003-07-14 2005-02-24 Seiji Motojima Tactile sensor
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