KR101800326B1

KR101800326B1 - Detachable ionizer

Info

Publication number: KR101800326B1
Application number: KR1020150139842A
Authority: KR
Inventors: 김도윤
Original assignee: (주)브이에스아이
Priority date: 2015-10-05
Filing date: 2015-10-05
Publication date: 2017-12-20
Also published as: KR20170040613A

Abstract

The ionizer includes a first connector, a second connector, an electron beam generator mounting portion located between the first connector and the second connector, an electron beam generator detachably mounted on the electron beam generator mounting portion, Case.

Description

DETACHABLE IONIZER < RTI ID = 0.0 >

The present invention relates to an ionizer capable of detachable connection.

Ionizer, which is an ionization device for static elimination and dust collection, which directly affects the production yield in a process line for manufacturing semiconductor devices and the like, is recently in the spotlight.

Examples of ionization methods of the ionization apparatus include a corona discharge method and a photo-ionization method using X-rays.

When such an ionization apparatus is used for removing static electricity generated in a large area such as an apparatus for manufacturing a liquid crystal display apparatus or the like, a plurality of ionizer modules may be connected in series to remove a large area of static electricity.

However, in order to connect a plurality of ionizer modules in series, a cable is used. Since the connection process of two ionizer modules is complicated and the connection time is long, The structure of the ionizer having the ionizer module of the present invention becomes complicated, and the cables connected to each other during use are disconnected or tangled.

Also, when additional ionizer modules need to be installed or reduced, there is a problem in that the structure becomes complicated to separate or add and the wiring must be re-established.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above-mentioned problems occurring in the prior art, and it is an object of the present invention to provide an ionizer module which can easily connect and disconnect a plurality of ionizer modules.

According to an aspect of the present invention, there is provided an ionizer including a first connector, a second connector, an electron beam generator mounting portion located between the first connector and the second connector, an electron beam generator detachably mounted on the electron beam generator mounting portion, And includes a case.

The first connector may be a 9-pin circular connector.

The second connector may be a D-sub 9-pin connector female terminal or a D-sub 9-pin connector terminal.

The electron beam generator mounting portion may be positioned perpendicular to the longitudinal direction of the ionizer case.

And the electron beam generator is detachably mounted on the electron beam generating and mounting portion.

According to this aspect, when the plurality of ionizer modules are connected in series, the two ionizer modules adjacent to each other are electrically connected to each other by using a connector without using a cable, so that the connection operation of the plurality of ionizer modules is quick .

1 is a block diagram of a removable, removable, connectable ionizer module in accordance with one embodiment of the present invention.
2 is a structural view of a first ionizer module capable of being detachably connected with an input unit according to an embodiment of the present invention.
3 is a structural view of a second ionizer module capable of being detachably connected with an input unit according to an embodiment of the present invention.
4 is a structural view of a third ionizer module capable of being detachably connected with an input unit according to an embodiment of the present invention.
5 is a structural view of a portion of a removable and connectable ionizer module case according to an embodiment of the present invention.
Figure 6 is a partial enlarged view of a portion of a removable, connectable ionizer module case in accordance with one embodiment of the present invention.
FIG. 7 is an enlarged view of an Ionizer module case coupling portion detachable and connectable according to an embodiment of the present invention. FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.

It is to be understood that when an element is referred to as being "connected" to another element, it may be directly connected to the other element, but it is to be understood that there may be other elements in between. On the other hand, when an element is referred to as being "directly connected" to another element, it should be understood that there are no other elements in between.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an ionization apparatus capable of detachable connection according to an embodiment of the present invention will be described with reference to the accompanying drawings.

First, referring to FIGS. 1 to 4, a detachable connectable ionizer having a plurality of ionization modules connected in series according to an embodiment of the present invention will be described in detail.

1 to 4, the ionizer module 100 includes a plurality of ionizer modules 101-10n (n = 2, 3, 4, ...) connected in series via a connection connection .

In this case, the number of ionizer modules 101-10n connected in series may be variable according to the user's needs. In the case of FIG. 1, three ionizer modules 101-103 are connected in series, Fig.

Each ionizer module (101-10n) has the same structure except for the connections at both ends.

The structure of each ionizer module will then be described in detail.

2, the first ionizer module 101 includes a first connector 111, an electron beam generator coupling part 112 capable of detachably mounting the electron beam generator 113, an electron beam generator coupling part 112, And a second connector 114. The first connector 111 is provided with a transmission / reception line capable of communication between a power source and modules, and the first ionizer module Lt; RTI ID = 0.0 > 101 < / RTI >

It is preferable that the electron beam generator 113 is vertically mounted (coupled) to the electron beam generator coupling portion 112, but it is not necessarily vertically mounted.

In the present invention, the first connector 111 of the first ionizer module 101 uses a 9-pin circular connector, but other types of connectors performing the same function may be used.

The second connector 114 of the first ionizer module 101 also has a transmission / reception line for communication between the power source and the module and corresponds to the output terminal of the first ionizer module 101.

In the present invention, the second connector 114 of the first ionizer module 101 uses a D-sub 9-pin connector female terminal, but other types of connectors performing the same function may be used.

3, the second ionizer module 102 includes an electron beam generator coupling portion 112 for detachably mounting the first connector 121, the inter-module support portion 115, and the electron beam generator 113, And an electron beam generator 113 and a second connector 114 which are detachably mounted on the electron beam generator coupling part 112. The first connector 121 has a transmission and reception line capable of communication between a power source and modules And corresponds to the input of the second ionizer module 102.

In the present invention, the first connector 121 of the second ionizer module 102 uses a D-sub 9-pin connector, but other types of connectors performing the same function may be used.

The second connector 114 of the second ionizer module 102 also has a transmission / reception line for communication between the power source and the module and corresponds to the output terminal of the first ionizer module 101.

4, the third ionizer module 103 includes a first connector 121, an inter-module support part 115, an electron beam generator coupling part 112 for detachably mounting the electron beam generator 113, A second connector 114 and a dummy cap 116 which are detachably mounted on the electron beam generator coupling part 112. The first connector 121 includes a power source and a module A transmission / reception line for communicating with each other is provided and corresponds to an input terminal of the second ionizer module 102.

In the present invention, the first connector 121 of the third ionizer module 103 uses a D-sub 9-pin connector, but other types of connectors performing the same function may be used.

The second connector 114 of the third ionizer module 103 also has a transmission / reception line for communication between the power source and the modules and corresponds to the output terminal of the first ionizer module 101.

The third ionizer module 103 is further provided with a dummy cap 116 near the end of the second connector 114 so that the third ionizer module 103 can be finished when the connection is no longer desired.

5 to 7 illustrate the structure of the front case 104 and the rear case 105 of the ionizer module according to the embodiment of the present invention.

FIG. 7 is an enlarged view of a joint part of the ionizer module 100 according to an embodiment of the present invention, and the case of the ionizer module 100 can be easily assembled. As shown in FIG. 6, 131 are formed in a concave shape and the second engaging part 132 is formed in a stepped shape so as to be coupled as shown in Figure 7 to prevent leakage of the electron beam to the outside, .

Hereinafter, a method of connecting the ionizer 100 according to an embodiment of the present invention will be described. A power source and a control line are connected to a first connector 111, which is an input terminal of the first ionizer module 101 of FIG. And a first connector 121 in the form of a D-sub 9-pin connector terminal in the form of a D-sub 9-pin connector female terminal and a second connector 114 in the form of a D-sub 9-pin connector in the second ionizer module 102 The power and the control line are connected to the second ionizer module 102 and then the rear case 105 and the front case 104 are coupled.

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While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, It belongs to the scope of right.

100: ionizer module 101: first ionizer module
102: second ionizer module 103: third ionizer module
111: first connector part 112: electron beam generator mounting part
113: electron beam generator 114: second connector
115: ionizer module support 116: dummy cap

Claims

An ionizer module including an electron beam generator detachably mounted on an electron beam generator coupling part and a power module for supplying power to the electron beam generator,
Wherein the ionizer module includes a first connector corresponding to an input end on one longitudinal side and a second connector corresponding to an output end on an opposite side of the first connector, Wherein the ionizer module is provided with a transmission / reception line capable of communicating with the ionizer module through the first connector and the second connector. The ionizer module according to claim 1, Connectable ionizer.

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