KR101775126B1 - Multichannel diagnostic apparatus - Google Patents

Abstract

The present invention relates to a multi-channel diagnosing device comprising: a plurality of sensor units mounted on facilities capable of measuring an angular velocity, an acceleration, an Euler angle, a vibration, and a vibration frequency of the facilities with respect to three-axial directions; and a controller connected to the sensor unit capable of generating status information of the facilities by receiving an input of the measured value of the sensor unit, and outputting the measured value of the sensor unit and the status information of the facilities onto the same screen. The present invention proposes a multi-channel diagnosing device capable of quickly diagnosing abnormalities of a facility and an abnormality occurrence position of the facilities by measuring a plurality of positions of the facilities or various vibrations generated at a plurality of facilities.

Description

[0001] The present invention relates to a multi-

The present invention relates to a multi-channel diagnostic apparatus, and more particularly, to a multi-channel diagnostic apparatus that measures various vibrations generated in a plurality of positions or a plurality of apparatuses during various processes, Channel diagnostic apparatus capable of diagnosing a multi-channel diagnosis.

Semiconductor manufacturing processes are performed by automated control mechanisms, and loading and unloading of wafers in semiconductor manufacturing facilities are performed by various types of robots. For example, Korean Patent Registration No. 10-0742091 discloses a robot for handling semiconductor wafers.

Meanwhile, in order to prevent damage to the wafer, the operation of the robot must be precisely controlled, and the operation of the robot must be diagnosed in real time.

Conventionally, as shown in, for example, Korean Patent Laid-Open Publication No. 10-2006-0114472, the vibration of the robot is monitored to diagnose abnormality of the robot operation. However, in this conventional method, it is only possible to diagnose only the abnormality of the robot, and it is impossible to precisely and quickly diagnose and track the detailed history of the damage of the robot at a plurality of positions.

KR 10-0742091 B1 KR 10-2006-0114472E

The present invention provides a multi-channel diagnostic apparatus that is portable and easy to use and can diagnose various facilities.

The present invention provides a multi-channel diagnostic device capable of rapidly diagnosing whether or not the posture and attitude of the facility are changed by measuring the Euler angles at a plurality of positions or a plurality of facilities of the facility.

The present invention provides a multi-channel diagnostic device capable of rapidly diagnosing an abnormality of a facility by measuring vibration at a plurality of locations or a plurality of facilities of the facility.

The present invention provides a multi-channel diagnostic apparatus capable of rapidly diagnosing an abnormality occurrence position of a facility by measuring a vibration frequency at a plurality of positions or a plurality of facilities of the facility.

The present invention provides a multi-channel diagnostic apparatus capable of tracking the diagnostic history by recording Euler angles, vibrations, and vibration frequencies measured at a plurality of positions or a plurality of facilities of the facility.

A diagnostic apparatus according to an embodiment of the present invention includes: a plurality of sensor units mounted on a facility and capable of measuring an angular velocity, an acceleration, an Euler angle, a vibration, and a vibration frequency of the facility with respect to three axial directions; And a controller, connected to the sensor unit, capable of generating status information of the facility by receiving the measured values of the sensor unit and outputting the measured values of the sensor unit and the status information of the facility.

Wherein the sensor unit includes a MEMS vibration sensor capable of measuring an angular velocity, an acceleration, an Euler angle, a vibration and a vibration frequency of the facility, and a geomagnetic sensor capable of measuring the azimuth of the facility, wherein the wireless communication unit and the wired communication unit As shown in FIG.

The controller comprising: a hub connected to the sensor unit in at least one of wired communication and wireless communication; A terminal connected to the hub for receiving the measured values of the sensor unit to generate status information of the equipment and outputting the measured values of the sensor unit and status information of the equipment on the same screen; An input / output unit connected to the hub; And an alarm connected to the terminal through the input / output unit and outputting a warning signal using status information of the facility.

The hub includes at least one wired communication port and at least one wireless communication port, and the plurality of sensor units may be connected to the wired communication port and the wireless communication port, respectively.

Wherein the terminal comprises: a sensor control unit for outputting a control signal for calibration of the sensor unit; A storage unit connected to the sensor unit through the hub and receiving and storing measured values of the sensor unit; A state information generation unit connected to the storage unit, receiving state information of the sensor unit, generating state information of the facility, and outputting the state information to the storage unit and the alarm; A screen output unit for receiving the measured values of the sensor unit and the state information of the facility from the storage unit and outputting the same together on the same screen; And a terminal control unit for determining an output method and an output range of the measured values of the sensor unit and the state information of the equipment output to the screen output unit.

The state information generator compares the Euler angle, the vibration and the vibration frequency of the facility with the reference Euler angles, the reference oscillation, and the reference oscillation frequency, And generate the result as state information of the facility.

The terminal control unit receives the measured value of the sensor unit and the state information of the facility from the storage unit, generates a diagnosis history of the facility, and outputs the measured value of the sensor unit and the state information of the facility on a screen in real time The output method and the output range of the screen output unit may be determined so that the diagnostic history of the selected period of the diagnostic history of the facility is displayed on the screen.

Wherein the reference vibration input unit includes a first reference vibration and a first reference vibration having a larger value than the first reference vibration, and the state information generating unit generates the state information when the vibration of the facility has a value greater than or equal to the first reference vibration The apparatus is determined as a first abnormal state to generate first abnormal state information, and when the vibration of the facility has a value equal to or greater than the second reference vibration, the facility is determined as a second abnormal state, Can be generated.

Wherein the state information generating unit sets a specific position of the facility corresponding to a specific frequency of the vibration frequency of the facility that is not included in the range of the reference vibration frequency when the vibration frequency of the facility is not within the range of the reference vibration frequency It is possible to generate the abnormality occurrence position information and output it to the screen output section 224. [

The alarm receives the fault state information of the facility from the terminal, outputs a fault signal, receives the first abnormal state information and outputs a first abnormal signal, receives the second abnormal state information, Can be output.

According to the embodiment of the present invention, it is possible to obtain a multi-channel diagnostic apparatus capable of simultaneously diagnosing a plurality of positions of a facility using a plurality of sensor units and simultaneously diagnosing a plurality of facilities. Thus, while various equipments are being operated, it is possible to quickly diagnose the posture of the facility by measuring the angle of the Euler from the facility, and to measure the vibration from the facility to quickly diagnose the abnormality of the facility, It is possible to quickly diagnose the abnormality occurrence position of the facility. In addition, the diagnostic history can be generated by recording the measured Euler angle, vibration and vibration frequency in the facility, and the diagnosis history of the facility can be tracked and managed in various ways based on the generated diagnosis history.

In addition, according to the embodiment of the present invention, real-time measurement values obtained in a facility and real-time diagnosis results of facilities are displayed on one screen by using a controller that is convenient for users to carry and use and communicates with a plurality of sensor units in real- Can be displayed together or selectively. In addition, it is possible to selectively display a diagnostic history of a desired period among the diagnostic histories already recorded on the screen. Therefore, it is possible to monitor facilities variously, and various diagnoses of facilities are possible. In addition, if an abnormality occurs in the equipment, it can be warned promptly. Thus, the reliability of the facility can be improved.

1 is a schematic diagram of a multi-channel diagnostic apparatus according to an embodiment of the present invention.
2 is a block diagram of a sensor unit according to an embodiment of the present invention.
3 is a block diagram of a controller in accordance with an embodiment of the present invention.
FIGS. 4 to 6 are graphs for explaining the process of determining whether the equipment is abnormal and where the abnormality occurs by the multi-channel diagnosing apparatus according to the embodiment of the present invention.
7 to 10 are photographs illustrating a diagnostic screen output from the controller according to the embodiment of the present invention.
11 is a flowchart illustrating a method of diagnosing a facility applied to a multi-channel diagnostic apparatus according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described below, but may be embodied in various forms. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. In the meantime, the drawings may be exaggerated to illustrate embodiments of the present invention, wherein like reference numerals refer to like elements throughout.

Hereinafter, embodiments of the present invention will be described based on what is applied to various manufacturing facilities of a semiconductor manufacturing factory. However, the present invention is applicable to diagnosis of various mechanical equipments provided in various industrial fields, and it is possible to provide a personal portable type which is capable of diagnosing the state of mechanical equipment such as vibration, attitude or position, and can be applied as a hand-held device.

For example, while various manufacturing equipments (hereinafter referred to as "equipments") of a semiconductor manufacturing factory are operated in a steady state, each mechanical element constituting the equipments, for example, parts oscillate at different frequencies. On the other hand, if one of the machine elements constituting the plant is damaged, the amplitude of the specific frequency corresponding to the particular machine element that is damaged changes irregularly.

The multi-channel diagnostic apparatus according to the embodiment of the present invention can measure the vibration of the facility and analyze the frequency thereof to precisely diagnose the damage to the specific mechanical element of the facility.

Further, in a state in which the facility is normally operated, the operation characteristics of the facility, such as the motion, are controlled to be the desired operation characteristics. On the other hand, if one of the mechanical elements constituting the equipment is damaged, the operation characteristics of the equipment corresponding to the specific mechanical element are changed, and the position or position of the equipment is irregularly changed.

The multi-channel diagnostic apparatus according to the embodiment of the present invention measures the Euler angle of the facility and diagnoses whether the posture and posture of the facility are changed from the measured angle, .

That is, the multi-channel diagnostic apparatus according to the embodiment of the present invention can diagnose the damage of a specific mechanical element of the facility to provide information on the abnormality occurrence position of the facility, diagnose whether the posture and posture of the facility are changed, Lt; / RTI > Therefore, the vibration and attitude of the facility are diagnosed together and the results are also provided, so that the reliability of the diagnosis and the utilization of the information to be diagnosed can be improved as compared with the prior art.

2 is a block diagram illustrating a sensor unit according to an embodiment of the present invention. FIG. 3 is a block diagram of a multi-channel diagnostic apparatus according to an embodiment of the present invention. .

Hereinafter, the configuration of a multi-channel diagnostic apparatus according to an embodiment of the present invention will be described with reference to FIG. 1 to FIG.

1, a multi-channel diagnostic apparatus according to an embodiment of the present invention includes a plurality of sensor units 100 mounted on a plurality of facilities 10, a plurality of sensor units 100, And a controller 200 connected by a communication method.

At this time, although not shown in the drawings, the plurality of sensor units 100 may be mounted on a plurality of equipments, mounted on a plurality of positions of one equipments, or mounted on a plurality of equipments. That is, the sensor unit 100 can be freely mounted at a desired position of the desired equipment.

The sensor unit 100 is mounted on the facility 10 and is capable of measuring various movements. The sensor unit 100 measures angular velocity, acceleration, Euler angles, vibration and vibration frequency of the facility 10 in three axial directions, .

For example, the sensor unit 100 is capable of measuring the angular velocity and acceleration in different three axial directions by being mounted on the facility 10, measuring the Euler angles of the facility 10 from the measured angular velocity and acceleration, The angular velocity and the acceleration can be used to measure the vibration and vibration frequency of the facility 10 with respect to the three axial directions.

In this case, when the facility 10 is installed at a predetermined position and operates in a fixed position, the sensor unit 100 detects angular velocity, acceleration, Euler angle, vibration And the vibration frequency can be measured.

The sensor unit 100 measures angular velocity, acceleration, Euler angle, vibration, and vibration frequency for running and operation of the facility 10 when the facility 10 travels (travels) along a predetermined path can do.

The sensor unit 100 may include a MEMS vibration sensor 110 and a geomagnetic sensor 120. At this time, the MEMS vibration sensor 110 and the geomagnetic sensor 120 may be replaced with various sensors satisfying the respective functions.

The MEMS vibration sensor 110 is a sensor capable of measuring angular velocity, acceleration, Euler angle, vibration and vibration frequency, and 'MEMS' means 'Micro Electro Mechanical Systems'. The MEMS vibration sensor 110 may be a vibration sensor including a MEMS gyro sensor, a MEMS acceleration sensor, and various logic circuit chips. By using these sensors, the angular velocity and acceleration of the facility 10 to which the MEMS vibration sensor 100 is attached Can be measured.

The angular velocity measured by the MEMS vibration sensor 110 is obtained by rotating in three axial directions, for example, x-axis rotation (hereinafter referred to as " x-axis rotation ") when specifying the operation of the facility 10 in a predetermined space in which the facility 10 is installed, R), y-axis rotation (P), and z-axis rotation (Y). The acceleration measured by the MEMS vibration sensor 110 may be measured in a three-axis direction such as an x-axis and a y-axis when the operation of the facility 10 is specified using a triaxial orthogonal coordinate system in a predetermined space in which the facility 10 is installed And z-axis, respectively.

The MEMS vibration sensor 110 integrates the attitude of the facility obtained by integrating the angular speed of the facility 10 using various logic circuit chips including various filters such as an extended Kalman filter, And the Euler angles of the facility 10 can be measured in such a manner that the Euler angles are corrected to the obtained attitude values.

The MEMS vibration sensor 110 can measure vibrations of the facility 10 in the three axial directions and the translational motions by integrating the angular speed and the acceleration of the facility 10 using the built-in logic circuit chip. In addition, the MEMS vibration sensor 110 can measure the vibration frequency of the facility 10 from the vibration of the facility 10 measured using various logic circuit chips incorporating a fast Fourier transform (FFT) algorithm.

The angular velocity, the acceleration, the Euler angle, the vibration and the vibration frequency of the facility 10 measured by the MEMS vibration sensor 110 can be transmitted to the controller 200 and used for diagnosis and management of the facility 10. [

The geomagnetic sensor 120 is a sensor capable of measuring the azimuth direction of the facility 10 by measuring the direction of the geomagnetism relative to the facility 10 and is capable of obtaining the horizontal and horizontal angles of the facility 10 using the sensor. The measured values measured by the geomagnetic sensor 120 may be output to the terminal 220 provided in the controller 200. [

Meanwhile, the MEMS vibration sensor 110 and the geomagnetic sensor 120 can be calibrated by receiving a control signal for calibration in the terminal 220.

The sensor unit 100 may include at least one of a wireless communication unit 130 and a wired communication unit 140. That is, the sensor unit 100 may include any one of the wireless communication unit 130 and the wired communication unit 140, or may include both the wireless communication unit 130 and the wired communication unit 140. The sensor unit 100 may transmit measured values measured from the facility 10 to the controller 200 using at least one of the wireless communication unit 130 and the wired communication unit 140. [

The wireless communication unit 130 and the wired communication unit 140 receive the measurement values measured by the MEMS vibration sensor 110, for example, the angular velocity, the acceleration, the Euler angle, the vibration, And can be transmitted to the controller 200 by receiving a measured value measured by the geomagnetic sensor 120, for example, the azimuth of the facility 10. The wireless communication unit 130 and the wired communication unit 140 may be configured to input control signals output from the controller 200 to the MEMS vibration sensor 110 and the geomagnetic sensor 120.

The wireless communication unit 130 and the wired communication unit 140 are provided for a wireless communication function and a wired communication function according to a standardized communication protocol. The wireless communication unit 130 may include a transceiver connected to a wireless antenna and a wireless antenna in a predetermined frequency band, for example, a frequency band of 2.4 GHz to modulate, demodulate, convert, and amplify signals transmitted and received. The wired communication unit 140 may include a transceiver connected to a micro USB connector and a micro USB connector for modulating, demodulating, converting, and amplifying signals transmitted and received.

The sensor unit 100 may include a circuit board (not shown) and a case (not shown). The MEMS vibration sensor 110, the geomagnetic sensor 120, the wireless communication unit 130, and the wired communication unit 140 are mounted on the circuit board, and the circuit board can be embedded in the case and protected.

A lithium polymer battery, for example, may be mounted on a circuit board of the sensor unit 100 as a power supply unit (not shown) for supplying power to each constituent unit of the sensor unit 100. The power supply unit may be electrically connected to the micro USB connector of the wired communication unit 140 to be charged.

That is, the micro-USB connector of the wired communication unit 140 is used not only as a connection terminal for transmitting the values measured by the sensor to the controller 200, but also as a charging terminal connected to the power supply unit and supplied with external power of a predetermined voltage It is possible.

The circuit board of the sensor unit 100 may be provided with a display unit (not shown), for example, a light emitting diode (LED), which is connected to the components of the sensor unit 100 and displays operation states of the components. The display unit includes a first display unit connected to the power source unit and displaying a charging and operating state thereof, a second display unit connected to the wireless communication unit 130 to display an operating state thereof, and a third display unit connected to the wired communication unit 140, And may include a display unit.

The controller 200 is connected to the sensor unit 100. The controller 200 receives the measurement values from the sensor unit 100 and can generate status information of the facility 10, Can be formed on the same screen. At this time, the measurement value output from the sensor unit 100 may include the angular velocity, the acceleration, the Euler angle, the vibration, and the vibration frequency of the facility 10. In addition, the state information of the facility 10 may include whether or not the facility 10 is tripped, an abnormality, and an abnormal occurrence location. That is, in the embodiment of the present invention, the state of the facility 10 can be diagnosed in real time using the controller 200 that is convenient to carry and use, and the result thereof can be managed.

The controller 200 may include a hub 210, a terminal 220, an input / output device 230, and an alarm 240. In this case, the hub 210, the terminal 220, the input / output device 230, and the alarm 240 may be provided as individual devices separated from each other as shown in the drawing, Device.

The hub 210 may be configured to communicate with the sensor unit 100 and may be connected to the plurality of sensor units 100 in at least one of wired communication and wireless communication. The hub 210 includes at least one wired communication port 211 and at least one wireless communication port 212 so as to communicate with the wireless communication unit 130 and the wired communication unit 140 of the sensor unit 100 And a wireless antenna 213 may be connected to the port 212 for wireless communication.

The wired communication port 211 and the wireless communication port 212 may include a micro USB connector and a transceiver connected to the micro USB connector for modulating, demodulating, converting, and amplifying signals transmitted and received. The wireless antenna 213 may be configured to transmit and receive signals in a predetermined frequency band, for example, a frequency band of 2.4 GHz. The wireless antenna 213 may include a transceiver capable of modulating, demodulating, converting, and amplifying signals to be transmitted and received, and may include a micro USB connector to be connectable to the wireless communication port 212.

These communication ports may be provided in a number corresponding to the number of the sensor units 100. For example, when the number of the sensor units 100 is ten, the total number of the wired communication port 211 and the wireless communication port 212 may be ten or more. A plurality of sensor units 100 may be connected to these communication ports by a wireless communication method or a wired communication method.

The terminal 220 is provided to diagnose the facility 10 in real time and output a diagnosis result. The terminal 220 is connected to the hub 210 and receives measurement values measured by the sensor unit 100, And the measurement values of the sensor unit 100 and the state information of the facility 10 can be output to the screen. The terminal 220 may include a sensor control unit 221, a storage unit 222, a status information generation unit 223, a screen output unit 224, and a terminal control unit 225.

The sensor control unit 221 may be connected to the hub 210. The sensor control unit 221 is provided to output a control signal for calibration of the sensor unit 100. The calibration is performed by adjusting the reference point of the MEMS vibration sensor 110 and the geomagnetic sensor 120, it means. The MEMS vibration sensor 110 and the geomagnetic sensor 120 are calibrated to adjust the reference point or the starting point and can accurately measure the measured values from the facility 10. [ To this end, a sensor control application is embedded in the sensor control unit 221.

The sensor control application may include a sensor setup page comprised of a plurality of fields into which respective instructions for calibrating the MEMS vibration sensor 110 and the geomagnetic sensor 120 may be input, Output is possible. That is, the sensor control application and the equipment diagnosis application described later of the terminal control unit 225 can be interlocked. When a command for calibration is input to the sensor setting page by the input / output unit 230, the sensor control application generates a control signal. The control signal may be transmitted to the sensor unit 100 via the hub 210. [ The calibration instruction includes, for example, a first instruction for performing calibration on the xyz axis of the MEMS gyro sensor, a second instruction for performing calibration on the xyz axis of the MEMS acceleration sensor, a MEMS gyro sensor and a MEMS acceleration sensor 120, A fourth instruction for performing a calibration on the xy axis of the geomagnetic sensor 120, a fifth instruction for performing calibration on the z axis of the geomagnetic sensor 120, . ≪ / RTI >

The storage unit 222 may include, for example, a memory chip, and various application programs for operating the multi-channel diagnostic apparatus according to an embodiment of the present invention, including a sensor control application and a facility diagnosis application, have.

The storage unit 222 is connected to the sensor unit 100 through the hub 210 and inputs the measured values of the sensor unit 100 such as the angular speed, the acceleration, the Euler angles, the vibration, It can receive and store. The storage unit 222 is connected to the state information generation unit 223 and stores state information of the facility 10 generated by the state information generation unit 223, for example, whether or not the facility 10 is twisted, You can enter and save the location.

The information stored in the storage unit 222 can be generated as a periodic diagnosis history of the facility 10 by the facility diagnosis application of the terminal control unit 225 and a database having the periodical diagnosis history information of the facility 10 is formed . The history histories of the facilities 10 may be output to the screen output unit 224 under the control of the terminal control unit 225. [ Thus, the diagnosis history of the facility 10 can be easily generated and managed, and utilized for preventive maintenance of the facility 10.

The state information generating unit 223 receives the measured values of the sensor unit 100, for example, the Euler angle, the vibration and the vibration frequency of the facility 10 from the storage unit 222, It is possible to judge whether or not the facility 10 is defective or abnormal and the occurrence position of the abnormality with respect to the frequency and to generate the result of the determination as the status information of the facility 10 and store it in the storage unit 222 and the alarm 240, As shown in FIG.

A method in which the state information generator 223 determines whether or not the facility 10 is defective and generates state information is as follows. The state information generating unit 223 can determine that the facility 10 is in an error state and generate the error information when the Euler angles of the facility 10 are not within the range of the reference Euler angles. The state information generating unit 223 can determine the facility 10 to be in a fixed position and generate the fixed position information when the Euler angles of the facility 10 are within the range of the reference Euler angles. Here, the reference Euler angle means an Euler angle according to a desired posture of the facility 10 when the facility 10 is operating in a steady state, and can be given within a predetermined range. For example, when a robot for transferring substrates to the facility 10 is illustrated, the reference Euler angles may be a predetermined range of Euler angles according to the posture of the robot for transferring the substrate programmed on the process control system that controls the robot for transferring the substrate.

FIGS. 4 to 6 are graphs for explaining the process of determining whether the equipment is abnormal and where the abnormality occurs by the multi-channel diagnosing apparatus according to the embodiment of the present invention. More specifically, FIG. 4 is a graph showing the relationship between the vibration measured in the facility and the reference vibration inputted in the facility, FIG. 5 is a graph showing the vibration frequency of one of the three- And FIG. 6 is a graph illustrating a process of comparing any one of the vibration frequencies selected from the three-axis direction vibrations of the facility with the reference input frequency.

4 to 6, the state information generation unit 223 determines whether or not the facility 10 is abnormal and generates the state information, and determines the abnormal occurrence position of the facility 10 and generates the state information Method.

A method of generating status information by determining whether the status information generator 223 is abnormal in the facility 10 is as follows. The state information generation unit 223 can determine the facility 10 as a steady state and generate steady state information when the vibration of the facility 10 is less than the first reference vibration. The state information generation unit 223 can generate the first abnormal state information by determining the facility 10 as the first abnormal state when the vibration of the facility 10 is less than the first reference vibration and the second reference vibration , And if the vibration of the facility 10 is equal to or greater than the second reference vibration, the facility 10 may be determined as the second abnormal state to generate the second abnormal state information.

For example, during the operation of the facility 10, certain mechanical elements of the facility 10 may be damaged, or due to disturbances such as external impact applied to the facility 10, The measured vibration may be greater than the vibration at the time t0 and may be larger than the first reference vibration at the time t1. At this time, if the cause of the vibration increase can not be solved, the vibration measured from the facility 10 may be larger than the second reference vibration at the time point t2. In such a case, the state information generation unit 223 outputs the first abnormal state information at time t1 and outputs the second abnormal state information at time t2.

Here, the first reference vibration is a vibration having a predetermined value larger than the range of the normal vibration value measured from the facility 10 when the facility 10 is operated in the steady state, and the first reference vibration is the first reference vibration It is necessary to pay attention to the operation of the facility. The difference between the first reference vibration and the normal vibration in the steady state of the equipment 10 can be appropriately set and input by the operator in consideration of the characteristics of the equipment 10. [ The second reference vibration is a vibration having a predetermined value larger than the first reference vibration and the damage or wear of the facility 10 during operation of the facility 10 is normal when the facility 10 vibrates above the second reference vibration The speed of progress of the damage or abrasion of the equipment 10 in the state of being in a state of being in a state of being in a state of being in a state of being in a state of being in contact with the equipment 10 is required. The difference between the second reference vibration and the first reference vibration can be appropriately set and input by the operator corresponding to the characteristics of the facility 10. [

A method in which the state information generation unit 223 determines an abnormality occurrence position of the facility 10 and generates the result as state information is as follows. The state information generation unit 223 generates the state information of the facility 10 based on the frequency of the vibration of the facility 10 that is not included in the range of the reference vibration frequency when the amplitude of the vibration frequency of the facility 10 is not within the reference amplitude range of the reference vibration frequency Or the specific frequency of the facility 10) is regarded as the abnormal occurrence position, and the abnormal occurrence position information can be generated. At this time, the reference vibration frequency is a frequency of vibration measured from the facility 10 when the facility 10 is operated in a steady state, and may be given as frequencies having an amplitude of a predetermined range. Each frequency included in the reference oscillation frequencies of the facility 10 corresponds to a particular mechanical element of the facility 10, which may be calculated from the physical properties, shape and structure of each mechanical element, Information. The information about the mechanical elements of the facility 10 corresponding to the reference vibration frequency and the frequency band of each reference vibration frequency is received from a process control system (not shown) for controlling the facility 10, ). ≪ / RTI >

For example, the vibration frequency measured from the facility 10 has various amplitudes A for each frequency f as shown in Fig. If the specific mechanical element of the facility 10 is damaged or disturbed by disturbance such as an irregular external force, the operation is changed and the amplitude of a specific frequency is changed. Referring to FIG. 6, it can be seen that the vibration frequency measured in the facility and the reference vibration frequency have different amplitudes at a specific frequency fa. At this time, it is determined that the specific mechanical element of the equipment 10 corresponding to the specific frequency fa is damaged, and the position information of the specific mechanical element is generated as the abnormality occurrence position information of the equipment.

The screen output unit 224 may include various display devices such as a liquid crystal panel and a touch screen and may be connected to the sensor control unit 221, the storage unit 222, and the status information generation unit 223 through the terminal control unit 225 Can be connected. The screen output unit 224 converts the Euler angle, vibration, and vibration frequency of the facility 10 received from the storage unit 222 into a graph of a time domain and a frequency domain under the control of the terminal control unit 225, Can be displayed, and can be displayed on the screen in the form of text. At this time, in the case of displaying on the screen in the form of text, the vibration of the facility 10 can be displayed as a decibel value, and the Euler angles can be displayed as a matrix value. And intuitive monitoring can be performed, so that the operation of the facility 10 can be facilitated.

7 to 10 are photographs illustrating a diagnostic screen output from the controller according to the embodiment of the present invention. FIG. 7 is a picture for showing a state in which measured values obtained from a plurality of sensor units are displayed on one screen on the screen output unit of the controller, and FIG. 8 is a picture for showing a measurement value obtained in one arbitrarily selected sensor unit, This is a picture showing the state displayed on the screen output unit. 9 is a photograph showing a state in which the diagnostic history of the facility generated from the measured value of the obtained sensor unit and the state information of the facility is displayed on the screen output unit of the controller, The output method of the screen output unit and the output range are set so as to adjust the state displayed on the screen output unit of the display unit.

The terminal control unit 225 outputs the measured values measured by the plurality of sensor units 100 and the status information of the facility 10 generated by these measured values together on the same screen in real time 8) from the storage unit 222 to the sensor unit 100 by selecting the desired sensor unit 100 of the sensor unit 100 and outputting the measured value and the state information of the facility 10 by the selected sensor unit 100 100 and the status information of the facility 10 to generate a diagnostic history of the facility 10 and output a diagnostic history of the selected period of the generated diagnostic history of the facility 10 to the screen The output method and output range of the screen output unit 224 can be determined. Accordingly, the screen output unit 224 can output the measured values of the sensor unit 100 and the state information of the facility 10 together or in a desired manner on the same screen.

That is, the terminal control unit 225 determines the output method and the output range of the measured value of the sensor unit 100 output to the screen output unit 224, and determines the state of the facility 10 output to the screen output unit 224 The output method of the information and the output range can be determined. In this case, the output method may include a graph output method and a text output method, and the output range may include a real time output, a graph output for a specific period and a graph scale for the graph output method.

The terminal control unit 225 determines the method of outputting the measured values of the Euler angle, the vibration and the vibration frequency of the facility 10 and the state information of the facility 10 outputted to the screen output unit 224, Can be installed. The facility diagnostic application may include a main page (not shown) and a plurality of setting pages and information output pages connected to the main page. The facility diagnostic application may also include an information transfer page (not shown) for generating a diagnostic history of the facility 10 and exporting it to a file in a process control system (not shown). At this time, the diagnosis histories can be divided into the period and the sensor unit and transmitted to the file.

The main page may include various setting buttons such as an output method setting button, a communication channel setting button, and a time setting button, and may include various diagnostic buttons such as a diagnostic history management button and an information output page change button.

When you click the output method setting button on the main page, the output method setting page is activated. For example, in FIG. 10, a vibration in the three-axis direction measured by the facility 10 is illustrated as a time-domain graph in the left part of the upper field of the output method setting page outputted to the screen output unit 224. At this time, the output vibration may be vibration in each axial direction with respect to the rotation of the facility 10 measured from the angular speed of the facility 10, and may be determined by the rotation of the facility 10 measured from the acceleration of the facility 10 It may be a vibration in each axial direction. Also, in the right part of the upper field of the output method setting page, a vibration frequency in the three-axis direction measured in the facility 10 is illustrated as a frequency domain graph. In the lower field of the output method setting page, a plurality of input units and input (RECORD) buttons for inputting and setting the recording range of measured values obtained from the facility 10, a warning about measured values displayed in the upper field A plurality of input units and alarm buttons for inputting and setting a range, and a plurality of input units and alarming buttons for inputting and setting an alarm range for measured values displayed in the upper field are activated. The output method and the output range for the respective measurement values corresponding to each sensor unit 100 and the status information of the facility 10 can be set by utilizing the lower field of the output method setting page. In addition, although not shown in the drawing, a plurality of output method setting pages may be provided, and each of the output method setting pages may include a field for setting an output method to a gyroscope mode, an acceleration mode, a fast Fourier Transformer mode, And a field for setting a mode and a text mode.

When the communication channel setting button of the main page is clicked, the communication channel setting page can be activated, and communication with the sensor unit 100 can be controlled by inputting a desired communication channel value into the input field of the communication channel setting page.

Clicking the diagnostic history management button on the main page, such as the event log button, activates a plurality of diagnostic history management pages. These diagnostic history management pages may include a plurality of period input fields, a sensor unit 100 selection button, a file transmission button, and the like. The user can initialize the diagnostic history by utilizing the diagnostic history management page, sort the diagnostic history by the period, view the diagnosis history of the specific period by the desired sensor unit, display the diagnostic history of the specific period To the file. ≪ / RTI >

When the information output page switching button of the main page is clicked, the information output page is switched to a predetermined information output page, and the diagnosis information of the facility 10 is outputted in real time according to the output method set in the information output page. At this time, when graph information is output to the information output page, a scale control button that can adjust the scale of the graph axis can be activated at the bottom of the information output page. Further, the information output page is provided with a predetermined information input field (not shown), and the first reference vibration and the second reference vibration can be input thereto. The first reference vibration and the second reference vibration inputted through the information input field are transmitted to the state information generating unit 223 and used for diagnosis of the facility 10. [

If the screen output unit 224 includes a touch panel, the main page may include a touch sensitivity control button, and the touch sensitivity control page (not shown) may be activated by clicking the touch sensitivity control button. The touch sensitivity adjustment page can adjust the touch sensitivity by, for example, sensing the screen output unit 224 while touching the screen output unit 224 a predetermined number of times.

Each of the setting pages and the information output page may be provided with a return button that can be switched to the main page, and the main page may be provided with a sensor control button for interlocking with the sensor control application.

The input / output unit 230 is connected to the hub 210, and a predetermined input unit (not shown) may be connected to the input / output unit 230. The input may be associated with a sensor control application and a facility diagnostic application and may include an input device including, for example, a numeric key, a character key, and a touchpad.

The input / output unit 230 may be provided with a serial port 250 of, for example, an RS232 method. (Not shown) via the serial port 250 so that the diagnostic history of the facility 10 can be transferred to the process control system and remotely controlled by the controller 200 . Of course, the controller 200 and the process control system (not shown) may be connected to each other via a local area network (e.g., Ethernet) through the input / output unit 230.

The alarm 240 is connected to the terminal 220 through the input / output unit 230 and can output a warning signal using the status information of the facility 10. [ That is, the alarm 240 receives the error information, the error state information, and the error occurrence position information of the facility 10 from the state information generation unit 223, and outputs an alarm signal for each of the information. At this time, the deflection information of the facility 10 means information on deflection of the facility 10 in each of three different axial directions. For example, the deformation information of the facility 10 may be positional deformation information of the facility 10 translationally moving in the x-axis direction with respect to the x-axis direction, and the deformation information of the facility 10 rotating in the z- and may be positional deviation information about the z-axis direction. In addition, the warning signal output from the alarm 240 by the abnormal state information may be a plurality of abnormal signals output stepwise, and may include, for example, a first abnormal signal and a second abnormal signal. That is, the notification 240 outputs a first abnormal signal when the first abnormal state information is received from the state information generating unit 223, and outputs a second abnormal signal when the second abnormal state information is received. These warning signals may include at least one visual and auditory signal such as an LED warning light or a speaker sound signal, and may be propagated to various types of signals.

The terminal 220 may include a predetermined circuit board (not shown) and a case (not shown) and may include a sensor control unit 221, a storage unit 222, a status information generation unit 223, a screen output unit 224 And the terminal control unit 225 may be mounted on or mounted on a circuit board and may be embedded in a case and protected. The terminal 220 may be provided with a predetermined power supply unit (not shown), and the power supply unit may be configured to receive the commercial AC power of, for example, 220V and supply the converted voltage to the terminal 220 and the hub 210 have.

11 is a flowchart illustrating a method of diagnosing a facility applied to a multi-channel diagnostic apparatus according to an embodiment of the present invention.

Hereinafter, a diagnostic method according to an embodiment of the present invention will be described with reference to Figs. 1 to 3 and 11. Fig. At this time, the description of the multi-channel diagnostic apparatus according to the embodiment of the present invention and its overlapping description will be omitted or briefly explained.

A diagnostic method according to an embodiment of the present invention is a method of mounting a sensor unit 100 on a stationary facility 10 and measuring the operation of the facility 10 using the sensor unit 100 while the facility 10 is operating And outputting the measured values measured by the facility 10 to the screen output unit 224. The state information of the facility 10 is generated using the measured values measured by the facility 10, And outputting at least one of a video signal and a signal sound.

At this time, the measurement value measured from the facility 10 may include angular velocity, acceleration, Euler angles, vibration, and vibration frequency of the facility 10 with respect to the three-axis directions. In addition, the state information of the facility 10 may include whether or not the facility 10 is tripped, an abnormality, and an abnormal occurrence location.

First, the sensor unit 100 is mounted on the stationary facility 10, and the facility 10 is operated. When the facility 10 is operated, the operation of the facility 10 is measured using the sensor unit 100 (S100). At this time, the sensor units 100 are provided in a plurality, and can be mounted on the plurality of facilities 10, mounted on a plurality of positions of one facility 10, or mounted on a plurality of positions of the plurality of facilities 10, respectively have.

Hereinafter, a diagnosis method according to an embodiment of the present invention will be described with reference to the case of one sensor unit 100, but each process of the diagnosis method described below can be easily performed even in the case of a plurality of sensor units 100 Lt; / RTI >

The method may further include the step of calibrating the sensor unit 100 prior to the step of measuring the operation of the facility 10. [ The MEMS gyro sensor and the MEMS acceleration sensor are calibrated while the sensor unit 100 is kept horizontal with respect to the ground surface (or the horizontal plane) before mounting the sensor unit 100 to the stationary facility. At this time, these sensors can be sequentially calibrated or simultaneously calibrated. Thereafter, the sensor unit 100 is rotated at a constant speed, for example, in a circular motion while the sensor unit 100 is kept horizontal, and the calibration of the geomagnetic sensor 120 is performed on the x-y axis. Then, in a state in which the sensor unit 100 is kept perpendicular to the horizontal plane, the sensor unit 100 is rotated and rotated, for example, circular motion at a constant speed. In this way, the output values of the MEMS vibration sensor 110 and the geomagnetic sensor 120 are initialized. Then, the sensor unit 100 is mounted on the facility 10. [

Next, the angular velocity, the acceleration, the Euler angle, the vibration and the vibration frequency of the facility 10 obtained in real time from the sensor unit 100 are stored in the storage unit 222 of the controller 200 and stored in the storage unit 222 These stored measurement values are output from the screen output unit 224 (S200). In this case, the output range and the output method of the vibration, the Euler angles, and the vibration frequency of the facility 10 can be controlled by the facility diagnosis application provided in the terminal control unit 225.

Next, the state of the facility 10 is diagnosed by using the measured values measured from the facility 10 to generate the state information of the facility 10, and the state information of at least one of the screen output unit 224 and the alarm 240 .

For example, the Euler angle of the facility 10 is compared with the reference Euler angle (S310). When the Euler angles of the facility 100 are not included in the reference Euler angles, it is determined that the facility 10 is misaligned to generate misalignment information, and a misalignment signal is output (S320). When the Euler angle of the facility 10 is included in the reference Euler angles, a process of comparing the vibration of the facility 10 with the first reference vibration is performed.

Then, the vibration of the facility 10 and the first reference vibration are compared (S410). When the vibration of the facility 10 is equal to or more than the first reference vibration, the facility 10 is determined as the first abnormal state to generate the first abnormal state information and the first abnormal signal is output (S420). If the vibration of the facility 10 is below the first reference vibration, a process of comparing the vibration frequency of the facility 10 with the reference vibration frequency is performed.

Then, the vibration of the facility 10 and the second reference vibration are compared (S430). If the vibration of the facility 10 is equal to or more than the second reference vibration, the facility 10 is determined as the second abnormal state to generate the second abnormal state information, and the second abnormal signal is output (S440). If the vibration of the facility 10 is below the second reference vibration, a process of comparing the vibration frequency of the facility 10 with the reference vibration frequency is performed.

Then, the vibration frequency of the facility 10 and the reference vibration frequency are compared with each other (S510). When the vibration of the facility 10 is not included in the reference vibration frequency, the abnormality occurrence position of the facility 10 is diagnosed to generate the abnormality occurrence position information, and the result is outputted (S520). When the vibration of the facility 10 is included in the reference vibration frequency, the state of the facility 10 is diagnosed to generate the state information of the facility 10, and the state information of at least one of the screen output unit 224 and the alarm 240 And the process of outputting the result to the user is terminated.

The above-described series of processes for diagnosing the state of the facility 10 to generate the state information of the facility 10 and outputting the state information to at least one of the screen output unit 224 and the alarm 240 will be described with reference to FIG. ) In real time during the operation.

Here, the process of comparing the Euler angle of the facility 10 with the reference Euler angle, the process of comparing the vibration of the facility 10 with the first reference vibration and the second reference vibration, the process of comparing the vibration frequency of the facility 10 with the reference vibration frequency The order of preparation is not limited to the above-described order, but can be variously changed.

Next, the measurement value of the sensor unit 100 stored in the storage unit 222 and the status information of the facility 10 are generated by the diagnostic history of the facility 10. [ At this time, the diagnostic history of the facility 10 can be classified and stored for each period, and can be classified and stored for each sensor unit 100. This process is performed together with the above-described series of processes of diagnosing the condition of the facility 10 to generate status information of the facility 10 and outputting the status information to at least one of the screen output unit 224 and the alarm 240 .

As described above, the facility 10 can be diagnosed in real time and the facility diagnosis history can be generated and managed using the diagnosis method according to the embodiment of the present invention. That is, the operation of the facility 10 is measured in real time by the sensor unit 100 while the facility 10 is operating, the status information of the facility 10 is diagnosed in real time by the controller 200, May be output to the controller 200 simultaneously or together on one screen. As described above, in the embodiment of the present invention, the facility 10 can be stably operated, and the preventive maintenance of the facility 10 can be effectively performed.

It should be noted that the above-described embodiments of the present invention are for the purpose of illustrating the present invention and not for the purpose of limitation of the present invention. In addition, it should be noted that the configurations and the methods disclosed in the above embodiments of the present invention may be combined with each other or applied cross-over to form a variety of different forms, and these variations may be regarded as the scope of the present invention. As a result, the present invention may be embodied in various other forms without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents are intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. .

100: sensor unit 200: controller
210: hub 220: terminal
230: I / O unit 240: Alarm

Claims (7)

A plurality of sensor units mounted on the facility and capable of measuring angular velocity, acceleration, Euler angle, vibration and vibration frequency of the facility with respect to the three axial directions; And
And a controller connected to the sensor unit and capable of generating the state information of the facility by receiving the measured value of the sensor unit and outputting the measured values of the sensor unit and the state information of the facility,
Wherein the controller comprises a hand-held terminal,
The terminal comprises:
A mechanical element position corresponding to a frequency band of the vibration frequency of the equipment not included in the reference amplitude range of the reference vibration frequency of each of the mechanical elements constituting the facility among the vibration frequencies measured by the sensor unit, A state information generation unit for generating the abnormal occurrence position information as state information; And
And a screen output unit capable of displaying the diagnostic history generated from the measured value, the status information, and the status information on a single screen. The method according to claim 1,
Wherein the sensor unit includes a MEMS vibration sensor and a geomagnetic sensor, and further comprises at least one of a wireless communication unit and a wired communication unit. The method according to claim 1,
The controller comprising:
A hub connected to the sensor unit in at least one of wired communication and wireless communication;
A terminal connected to the hub for receiving the measured value of the sensor unit to generate state information of the facility and outputting the measured values of the sensor unit and state information of the facility on the same screen;
An input / output unit connected to the hub; And
And an alarm connected to the terminal through the input / output unit and outputting a warning signal using status information of the facility. The method of claim 3,
Wherein the hub comprises at least one wired communication port and at least one port for wireless communication,
And a plurality of the sensor units are connected to the wired communication port and the wireless communication port, respectively. The method of claim 3,
The terminal comprises:
A sensor control unit for outputting a control signal for calibration of the sensor unit;
A storage unit connected to the sensor unit through the hub and receiving and storing measured values of the sensor unit;
The screen output unit receiving the measured values of the sensor unit and the state information of the facility from the storage unit and outputting the same together on the same screen; And
And a terminal control unit for determining an output method and an output range of the measured value of the sensor unit and the state information of the facility, output to the screen output unit,
Wherein the state information generating unit is connected to the storage unit, receives the measurement value of the sensor unit, generates state information of the facility using the measured value, and outputs the state information to the storage unit and the alarm. The method of claim 5,
The state information generator compares the Euler angle, the vibration and the vibration frequency of the facility with the reference Euler angles, the reference oscillation, and the reference oscillation frequency, And generating a result as state information of the facility. The method of claim 5,
The terminal control unit receives the measured value of the sensor unit and the state information of the facility from the storage unit, generates a diagnosis history of the facility, and outputs the measured value of the sensor unit and the state information of the facility on a screen in real time Or the output method and the output range of the screen output unit so as to output the diagnostic history of the selected period among the diagnostic logs of the facility.

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