KR101763871B1 - 3D flowmeter using bimorph and flow-measuring method using the flowmeter - Google Patents

Abstract

The purpose of the present invention is to provide a 3-dimensional flow meter using a biomorph, and a method of measuring a flow rate using the same. When the flow rate is measured using the biomorph, the flow rate is not limited to any one direction, but the flow rate is able to be measured with respect to all 3-dimensional directions. The 3-dimensional flow meter comprises: a sphere (110) having a void formed therein; a plurality of sensor rods (120) protruding on an outer surface of the sphere (110) measuring the flow rate by being made of the biomorph and by being deformed by fluid flow; and a plurality of signal lines (130) disposed in the sphere (110), and transferring signals generated from each of the sensor rods (120) to an external calculating device.

Description

TECHNICAL FIELD [0001] The present invention relates to a three-dimensional flowmeter using a bimorph, and a flowmeter using the bimorph,

The present invention relates to a three-dimensional flow meter using a bimorph, and more particularly, to a flow meter using a bimorph, which measures a flow rate using a bimorph and is capable of measuring a flow rate in all three- The present invention relates to a three-dimensional flow meter using a bimorph.

As is well known, a flow meter refers to a machine that measures the amount (volume or mass) of a fluid (gas or liquid) flowing through a unit of time. It can be used in a wide variety of types depending on the properties of a fluid to be measured, measurement conditions, And is widely used. Generally, there are a flow meter type using flow physical parameters (volume, flow rate, pressure, etc.), such as a wing flow meter, a differential pressure meter, an area type flow meter, a volumetric flow meter, an electronic flow meter applicable to a conductive fluid, There are also flowmeters that can be applied to fluids having more specific conditions, such as thermal flowmeters.

Ultrasonic flowmeter, which is one of these kinds of flowmeters, is used for more precise flow measurement, and briefly explains its principle. The speed at which the sound waves travel in the direction of flowing through the fluid is faster than the speed at which they travel in the opposite direction. An ultrasonic flowmeter is a device that measures the velocity of a fluid by comparing the difference between the two propagation velocities. For example, two sets of ultrasonic oscillators in which an ultrasonic resonator is attached to an input / output circuit of an amplifier and an input / output circuit is acoustically coupled are prepared, and a resonator is arranged so that a sound wave is transmitted in a direction The flow rate can be determined by measuring the frequency difference, or beat, of the oscillator. The specific structure and principle of such an ultrasonic flowmeter are widely disclosed in Korean Patent Publication No. 2016-0029656 ("Ultrasonic Flowmeter and Flow Measurement Method").

There is also a swirl type flow meter as a flow meter for precise flow measurement. A vortex type flow meter uses a Karman vortex. When a vortex generating prism is placed in a certain flow, a so-called Karman vortex occurs regularly behind the vortex generator. When the frequency of occurrence of the Karman vortex is detected, And the volume flow rate of the intake air can be calculated by multiplying the flow rate by the effective cross-sectional area of the air passage of the air meter. The basic constitution and principle of such a vortex type flow meter are well disclosed in Korean Patent Publication No. 2007-0044873 ("vortex type flow meter") and the like, and a device for precise flow measurement such as an automobile electronic control fuel injection device Have been widely used in the field.

Such an ultrasonic flowmeter and a swirl flowmeter have an advantage in that the flow rate of the fluid can be measured very precisely and accurately, but there is a disadvantage that the apparatus is complicated and the manufacturing cost is high. In addition, in the case of an ultrasonic flowmeter, if the distance between the ultrasonic transceivers is long or the vortex is generated in the flow, there is a problem that error occurs due to changes in the excitation, diffusion and absorption attenuation of the ultrasonic pulse. In the case of the swirl flowmeter, There is a problem that when the flow rate of the fluid becomes finer because the power is partially lost, the measurement becomes impossible due to the complete loss of the flow force.

In order to solve these problems, Korean Patent Registration No. 1431461 ("flow meter using bimorph") filed and registered by the present applicant has disclosed a sensor for measuring the flow rate using the bimorph as described above. 1, the bimorph is vertically disposed in a tube through which the fluid flows, and the flow rate is calculated by measuring the vibration frequency generated by causing the bimorph to deform by the flow of the fluid . According to the above-mentioned prior art, there is an advantage that accurate and accurate flow rate values can be measured while solving various problems of the ultrasonic flowmeter and the swirling flowmeter described above.

However, in the case of various flow meters as described above including the conventional technique, the flow meter is optimized to measure the flow rate of the flow flowing through the passage, that is, the flow rate in any one direction, There is a problem that the application is difficult when the flow rate is to be measured.

1. Korean Patent Publication No. 2016-0029656 ("Ultrasonic Flowmeter and Flow Measurement Method") 2. Korean Patent Publication No. 2007-0044873 ("Whirl Flow Meter") 3. Korean Patent No. 1431461 ("Flow meter using Bimorph")

SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above-mentioned problems occurring in the prior art, and it is an object of the present invention to provide a method and apparatus for measuring a flow rate using a bimorph, Dimensional flow meter using a bimorph and a flow rate measuring method using the same.

According to an aspect of the present invention, there is provided a three-dimensional flow meter using a bimorph comprising: a sphere having a cavity formed therein; A plurality of sensor rods 120 protruding from the outer surface of the sphere 110 and configured to measure a flow rate by being deformed by the flow of the fluid, A plurality of signal lines (130) disposed inside the sphere (110) and transmitting a signal generated from each of the sensor rods (120) to an external calculation device; . ≪ / RTI >

At this time, the three-dimensional flow meter 100 senses the vibration generated by the flow of the fluid in the sensor rod 120 through the signal line 130 and detects the vibration of the sensor rod 120 The flow rate can be calculated using the frequency.

Also, the sensor rods 120 may be disposed at positions spaced apart from each other by a predetermined distance along the latitude and longitude of the sphere 110. In this case, the number of the sensor rods 120 disposed on any one of hardnesses arbitrarily selected is eight or more, and the interval between the sensor rods 120 is determined by the distance between the sensor rods 120 May be formed so as to be equal to or larger than a minimum value at which contact and interference between the adjacent sensor rods 120 are prevented.

In addition, the three-dimensional flow meter 100 senses vibrations generated by deforming the sensor rod 120 due to fluid flow through the signal line 130, and detects the position of each of the sensor rods 120, The flow direction of the fluid can be calculated using the position of the symmetry point shown in the graph of the relationship of the frequency of the vibration of the sensor rod 120.

The three-dimensional flow meter 100 is provided at one side of the sphere 110 to support the sphere 110 and has a cavity therein to receive a plurality of the signal lines 130 connected to the external calculation device And a supporting part (140) for protecting it. As shown in FIG.

The flow rate measurement method using the bimorph-type three-dimensional flow meter according to the present invention is characterized in that the flow rate is measured using the three-dimensional flow meter 100 using the bimorph as described above, ) Is deformed to generate a voltage due to bending displacement, and is measured; A frequency calculating step of calculating a frequency of a voltage generated in the sensor rod 120; A flow rate calculation step of calculating a flow rate by using a frequency of vibration generated in the sensor rod 120; . ≪ / RTI >

At this time, the flow rate calculating step can calculate the flow rate using the following equation.

(Where, m: flow rate, k: proportional constant, f: frequency)

Alternatively, the flow rate calculation step may calculate the flow rate using a table for the frequency of the flow rate versus flow rate derived in advance.

The flow rate measuring method may further include a step of calculating a relationship graph of the position of each of the sensor rods 120 and the frequency of vibrations generated in each of the sensor rods 120 in two or three dimensions A relationship deriving step as shown; A flow direction calculating step of calculating a flow direction of the fluid by using the symmetry point position shown in the graph in the relationship deriving step; As shown in FIG.

According to the present invention, by measuring a flow rate using a plurality of bimorph sensors arranged three-dimensionally, it is possible to perform a three-dimensional flow measurement instead of a flow measurement for a flow flowing in any one direction. In other words, according to the present invention, it is possible to measure the directionality of the flow in addition to the flow measurement, and ultimately, the flow characteristic for the three-dimensional flow can be grasped.

Particularly, according to the present invention, since the flow rate is measured using the bimorph, a very precise and accurate measurement value can be obtained. However, in the case of an ultrasonic flowmeter, there is a problem that an error becomes large when a vortex in a fluid is generated, and in the case of a vortex type flowmeter, it is impossible to measure the flow rate when a minute flow rate is used . The present invention has the effect of improving the accuracy and accuracy of flow measurement while eliminating the problems of conventional flow meters because the flow rate is measured using the intrinsic characteristics of bimorph.

In addition, according to the present invention, due to the characteristics of the piezoelectric element constituting the bimorph, it has a quick time resolution and real-time measurement is possible. As described above, since the flow rate measurement according to the present invention improves precision and accuracy, it is possible to perform real-time measurement together with these advantages. Therefore, according to the present invention, This is a very high advantage.

In addition, according to the present invention, since the structure and structure are not complicated, there is an economical effect of easy fabrication and low manufacturing cost, and there is a great effect that the device volume can be drastically reduced as compared with the conventional structure . Therefore, it is possible to obtain an effect that the range of application to various flow rate and flow direction measurement is further widened.

FIG. 1 shows a flow meter in a one-dimensional direction using a conventional bimorph.
2 is a view for explaining the principle of a bimorph piezoelectric element.
3 is a perspective view of a three-dimensional flow meter using the bimorph of the present invention.
4 is a cross-sectional view of a three-dimensional flow meter using the bimorph of the present invention.
FIGS. 5 and 6 show the calculation principle of the flow direction using the three-dimensional flow meter of the present invention.

Hereinafter, a three-dimensional flow meter using the bimorph according to the present invention and a flow rate measuring method using the same will be described in detail with reference to the accompanying drawings.

[Device Configuration of 3D Flow Meter Using Bimorph]

2 is a view for explaining the principle of a bimorph piezoelectric element. A bimorph piezoelectric element refers to an element in which two piezoelectric elements and electrodes interposed therebetween are integrated. Generally, when a piezoelectric element is subjected to tensile or compressive stress, a voltage is generated in a direction in which the piezoelectric element is polarized in advance. When the direction of the polarization is reversed, the direction of the voltage is also reversed. do. As shown in Fig. 1 (A), when such a piezoelectric element is provided in a cantilever shape and one end of the piezoelectric element is deformed by pressing one end of the piezoelectric element, tensile force is generated on the upper surface with reference to Fig. The same kind of charge is generated on both the upper and lower surfaces, and as a result, there is no potential difference between the upper surface and the lower surface, so that the voltage does not appear. On the other hand, as shown in FIG. 1 (B), in the case of a bimorph piezoelectric element having two piezoelectric elements arranged one on top of the other and having electrodes in the center, two piezoelectric elements connected in parallel So that the voltage can be displayed. Fig. 1B is an example of a basic bimorph piezoelectric element. In Fig. 1B, two piezoelectric elements are polarized in the same direction, so that the electrical connections of the top-center-bottom- However, when the two piezoelectric elements are polarized in opposite directions, they may be in series, and the voltage may be doubled.

In this bimorph, when the cantilever shape is bent as an external load is applied, one side of the bimorph is tensioned and the other side is compressed to generate a potential difference. By measuring the potential difference, Can be measured. More specifically, the relationship between the voltage and the bending displacement generated in the bimorph formed in a bar shape having the length L and the diameter D is expressed by the following equation.

D is the diameter of the bimorph, L is the length of the bimorph, N is the number of piezoelectric elements forming the bimorph, d ₃₁ is the number of piezoelectric elements forming the bimorph, B is the voltage generated in the bimorph, B _d is the bending displacement of the bimorph, D is the diameter of the bimorph, Piezoelectric constant)

Here, since the length L of the bimorph, the diameter D, the number of piezoelectric elements N, and the piezoelectric constant d ₃₁ are constant values known in advance, the bimorph is bent substantially by the external load , The voltage V generated in accordance with the bending displacement B _{d that} is generated when the bending displacement B _d is known can be calculated, or vice versa.

In the present invention, such a bimorph sensor rod is placed in a concrete structure to enable measurement of a three-dimensional flow rate. 3 is a perspective view of one embodiment of a bimorph three-dimensional flow meter of the present invention, and Fig. 4 is a cross-sectional view thereof. 3 and 4, the three-dimensional flow meter 100 using the bimorph of the present invention includes a sphere 110, a plurality of sensor rods 120, a plurality of signal lines 130, And may further include a support 140 for more stable support. More specifically, each part will be described as follows.

The sphere 110 has a cavity formed therein and supports the sensor rods 120 to be described below. Although the interior of the spherical body 110 must be empty, the larger the cavity formed in the spherical body 110, the more advantageous it is to reduce the weight of the entire three-dimensional flowmeter 100 including the spherical body 110 And it is also advantageous to accommodate the signal line 130 to be described later. In addition, the spheres 110 are formed in a spherical shape as the name suggests, so as to have a uniform positional condition with respect to all directions.

The sensor rod 120 protrudes from the outer surface of the sphere 110 and is made of bimorph and is deformed by the flow of the fluid to measure the flow rate. As described above, the bimorph generates a voltage as the bending displacement occurs, and thus the bending displacement can be determined by measuring the voltage value. That is, by using the voltage value generated by bending the sensor rod 120 made of bimorph by the flow, it is possible to know how strongly the flow is generated at the position where the sensor rod 120 is disposed The specific flow measurement method by the rod 120 will be described in detail later).

A plurality of the signal lines 130 are disposed inside the spheres 110 and transmit signals generated from the sensor rods 120 to an external computing device. That is, one signal line 130 corresponds to one sensor rod 120, so that even if a plurality of sensor rods 120 are arranged, each sensor rod 120 can be easily distinguished.

The support part 140 is provided on one side of the sphere 110 to support the sphere 110. In other words, although it is possible to measure the three-dimensional flow without the supporting part 140, it is difficult to stably fix the three-dimensional flow meter 100 to any position. Therefore, it is preferable that the supporting part 140 is provided Do. As shown in FIG. 4, the support 140 may also serve to receive and protect a plurality of the signal lines 130 connected to the external calculation device.

As described above, according to the present invention, since the flow rate is measured using the bimorph, a very precise and accurate measurement value can be obtained. However, in the case of an ultrasonic flowmeter, there is a problem that an error becomes large when a vortex in a fluid is generated, and in the case of a vortex type flowmeter, it is impossible to measure the flow rate when a minute flow rate is used . Since the present invention is configured to measure the flow rate using the intrinsic characteristics of the bimorph, it is possible to improve accuracy and accuracy in flow measurement while omitting the problems of such conventional flow meters.

In addition, according to the present invention, real time measurement is possible because of the characteristics of a piezoelectric element constituting a bimorph, since it has a quick time resolution. As described above, since the flow rate measurement according to the present invention improves precision and accuracy, it is possible to perform real-time measurement together with these advantages. Therefore, according to the present invention, This is a very high advantage.

In addition, according to the present invention, since the structure and the structure are not complicated, it is easy to manufacture and economical effect of making the manufacturing cost lower. By simplifying the structure, the apparatus volume can be drastically reduced compared with the conventional one. Therefore, it is possible to obtain an effect that the range of application to various flow rate and flow direction measurement is further widened.

The arrangement of the sensor rods 120 will be described in more detail as follows. 3 and 4, the sensor rod 120 protrudes outward from the sphere 110, and an extension line passing through the sensor rod 120 is disposed to pass through the center of the sphere 110 . At this time, the sensor rods 120 are disposed at positions spaced apart by a predetermined distance along the latitude and longitude on the sphere 110, as shown in Fig. That is, three-dimensionally uniformly arranged on the spheres 110. By doing so, it is possible to sense the flow conditions at each point uniformly in all directions around the point where the three-dimensional flow meter 100 is disposed, and thereby, three-dimensional flow characteristics can be grasped.

In this respect, the spheres 110 may not necessarily have a perfect spherical shape since the sensor rods 120 need only be uniformly distributed with respect to a certain center point. That is, the spheres 110 are not spherical but regularly arranged, and the sensor rods 120 may be arranged at the center or each vertex of each surface of the regular array. However, when the distance between the sensor rods 120 is too large, the resolving power for three-dimensional measurement is considerably reduced. Even if the spherical bodies 110 are replaced with a square having substantially the largest number of faces and vertices, . ≪ / RTI > Therefore, the sphere 110 is most preferably spherical.

In consideration of the three-dimensional measurement resolution, it is natural that the sensor rods 120 are more advantageously arranged closer to each other. However, on the other hand, in consideration of various problems such as a calculation load problem caused by having to process an excessively large amount of data, and a problem of an increase in production cost caused by having a high-performance calculation device, It is also necessary to keep it. Considering these points, the maximum interval between the sensor rods 120 may be set so that the number of the sensor rods 120 arranged on any arbitrarily selected hardness is 8 or more . ≪ / RTI >

In determining the minimum distance between the sensor rods 120, it is necessary to consider a data processing problem as described above. However, it is important to consider that when the sensor rods 120 are deformed, 120 are in contact or interference with each other. That is, the gap between the sensor rods 120 is preferably formed to be equal to or larger than a minimum value at which the adjacent sensor rods 120 are prevented from touching and interfering with each other when the sensor rods 120 are deformed.

The degree of bending of the sensor rod 120 also depends on the rigidity of the sensor rod 120, which can be determined in the following manner. When the sensor rod 120 is deformed by the flow of the fluid and bending displacement occurs, a voltage is generated in the sensor rod 120 according to the bimorph principle. The voltage V generated at this time can be converted into the generation force F through the following equation.

(Where D is the diameter of the bimorph, L is the length of the bimorph, Y ^E ₁₁ is the Young's modulus, and d ₃₁ is the piezoelectric constant)

Since the generated force F acts as a distribution load, when the generated force F acts on the stop of the sensor rod 120 made of bimorph, the bending stress? Can be obtained through the following equation .

Based on the value of the bending stress (?), By designing the rigidity of the sensor rod 120 in consideration, it is possible to manufacture a stable sensor rod.

[Flow measurement method using a three-dimensional flow meter using Bimorph]

Hereinafter, a method of measuring the flow rate using the three-dimensional flow meter 100 having the above-described configuration will be described in more detail. As described above, the three-dimensional flow meter 100 of the present invention has a configuration in which a plurality of sensor rods 120, which are bimorphs, are uniformly spaced and arranged on a sphere 110.

In the first measurement step of the voltage, the sensor rod 120 is deformed by the flow of the fluid, and a voltage due to bending displacement is generated and measured. As described above, the strain generated in the sensor rod 120, i.e., the bending displacement, is expressed as a voltage signal through the following equation.

D is the diameter of the bimorph, L is the length of the bimorph, N is the number of piezoelectric elements forming the bimorph, d ₃₁ is the number of piezoelectric elements forming the bimorph, B is the voltage generated in the bimorph, B _d is the bending displacement of the bimorph, D is the diameter of the bimorph, Piezoelectric constant)

As described above, since the length L of the bimorph, the diameter D, the number of piezoelectric elements N, and the piezoelectric constant d ₃₁ are all constant values known in advance, a proportional relationship is obtained between the bending displacement and the voltage Can be seen. As described above, the voltage generated in the sensor rod 120 is transmitted to the external calculation device through the signal line 130 so that data processing can be performed.

Next, in the frequency calculation step, the frequency of the voltage generated in the sensor rod 120 is calculated. The sensor rod 120 deforms when it receives a load from the outside and generates a voltage according to the degree of deformation. If the load is a fixed load, the sensor rod 120 will generate a fixed bending displacement. However, in the case of the present invention, since the load is generated by the flow of the fluid, the sensor rod 120 substantially generates vibration instead of a fixed bending displacement. Since the proportional relation between the bending displacement and the voltage is established as shown in the voltage measurement step, the frequency of the vibration generated in the sensor rod 120 is theoretically the same as the frequency of the measured voltage. That is, the frequency of the actual bending displacement vibration generated in the sensor rod 120 can be obtained by calculating the frequency of the voltage.

Next, in the flow rate calculation step, the flow rate is calculated through the following equation using the frequency of the vibration generated in the sensor rod 120. The following equation is physically known as a relationship between the flow rate and the frequency, and k is also known in advance through a flow condition or a shape condition of the structure in which vibration is generated (in this case, the shape, length, It is possible to calculate the flow rate by knowing only the frequency obtained in the frequency calculating step.

(Where, m: flow rate, k: proportional constant, f: frequency)

Alternatively, the flow rate may be calculated using a table for the frequency of the flow rate versus flow rate derived in advance. In this case, the maximum value among the various frequency values measured in the sensor rod 120 may be compared with the values shown in the table to derive the flow rate value.

As described above, in the present invention, the sensor rod 120 senses the vibration generated by the fluid flow, through the signal line 130, and the flow rate is measured using the frequency of the vibration generated in the sensor rod 120 Respectively. At this time, since the sensor rods 120 are uniformly distributed on the spheres 110, the flow rate value at each measurement point uniformly distributed in three dimensions can be known , It becomes possible to measure the three-dimensional flow rate.

In addition, according to the present invention, the three-dimensional flow characteristics such as the flow direction can be calculated using the three-dimensional flow measurement values. The three-dimensional flow meter 100 senses vibrations generated by deforming the sensor rod 120 by the flow of the fluid through the signal line 130 and detects the vibration of the sensor rod 120 And the position of the symmetry point shown in the graph of the relationship between the position and the frequency of the vibration generated in each of the sensor rods 120 is used to calculate the fluid flow direction. 5 and 6 illustrate the principle of calculating the flow direction using the three-dimensional flow meter of the present invention, and will be described in more detail as follows.

First, referring to FIG. 5, it is assumed that the main direction of the fluid flow direction (flow direction) appears as indicated by an arrow in FIG. Since the sensor rods 120 can be indexed by the corresponding signal lines 130, when one of the sensor rods 120 is referred to as an N-th sensor rod (N in FIG. 5) (N + 1) th sensor rod N + 1, the (N + 1) th sensor rod N + 2, And so on. At this time, by performing curve fitting by correlating the sensor rod position and the measured frequencies in the respective sensor rods, a graph as shown in the lower part of FIG. 5 can be obtained. At this time, since the overall shape of the three-dimensional flow meter 100 is spherical, the bimorph vibrations that are the same distance away from the point as a reference are the same. In fact, the symmetry point can also be confirmed in the graph at the bottom of FIG. 5, and this symmetry point directly indicates the flow direction.

This will be described in more detail with reference to FIG. The position of the sensor rods 120 can be expressed as a radial position r and an angular position θ as shown in FIG. 6A, based on any one of the hardnesses. At this time, the frequency values measured in the respective sensor rods 120 are matched with the radial position r and the angular direction position &thetas; to be represented by a three-dimensional graph as shown in Fig. 6 (B) Dimensional contour graph as shown in FIG. 6 (C). In the graph thus obtained, the symmetry point can also be found, and the flow direction can be derived from the symmetry point using the positional direction of the sensor rod 120 having the highest frequency value as the direction vector.

In other words, the flow rate measuring method is characterized in that after the frequency calculating step, a graph of a relationship graph of the position of each of the sensor rods 120 and the frequency of the vibrations generated in each of the sensor rods 120 is 2-dimensional or 3-dimensional Dimensional relationship shown in FIG. 5 is performed to obtain a graph such as the bottom of FIG. 5, FIG. 6 (B), and FIG. 6 (C). Next, by performing the flow direction calculating step in which the flow direction of the fluid is calculated using the position of the symmetry point shown in the graph in the relation deriving step, the flow direction of the fluid finally can be accurately obtained.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. It goes without saying that various modifications can be made.

100: 3D flow meter
110: Sphere 120: sensor rod
130: signal line 140:

Claims (10)

A sphere 110 having a cavity formed therein;
A plurality of sensor rods 120 protruding from the outer surface of the sphere 110 and configured to measure a flow rate by being deformed by the flow of the fluid,
A plurality of signal lines (130) disposed inside the sphere (110) and transmitting a signal generated from each of the sensor rods (120) to an external calculation device;
Dimensional flow meter using a bimorph.
2. The apparatus of claim 1, wherein the three-dimensional flow meter (100)
The sensor bar 120 detects the vibration generated by the fluid flow, through the signal line 130,
And the flow rate is calculated by using the frequency of vibration generated in the sensor rod (120).
2. The sensor device according to claim 1, wherein the sensor rod (120)
Are arranged at positions spaced apart by a predetermined interval along the latitude and longitude on the sphere (110).
The apparatus of claim 3, wherein the three-dimensional flow meter (100)
The number of the sensor rods 120 disposed on any one hardness arbitrarily selected is eight or more,
Wherein the gap between the sensor rods (120) is formed to be equal to or greater than a minimum value that prevents contact and interference between adjacent sensor rods (120) when the sensor rods (120) are deformed. Dimensional flowmeter.
2. The apparatus of claim 1, wherein the three-dimensional flow meter (100)
The sensor bar 120 detects the vibration generated by the fluid flow, through the signal line 130,
Wherein a flow direction of the fluid is calculated using a symmetry point position represented by a graph of a relationship between a position of each of the sensor rods (120) and a vibration frequency of each of the sensor rods (120) 3D flowmeter.
2. The apparatus of claim 1, wherein the three-dimensional flow meter (100)
A support unit 140 installed on one side of the sphere 110 to support the sphere 110 and to receive and protect a plurality of the signal lines 130 having a cavity formed therein and connected to an external calculation device;
Wherein the flow meter further comprises a bimorph type flow meter.
A flow rate measuring method using a bimorph-based three-dimensional flow meter (100) according to claim 1,
A voltage measuring step of measuring a voltage due to bending displacement by deforming the sensor rod 120 due to fluid flow;
A frequency calculating step of calculating a frequency of a voltage generated in the sensor rod 120;
A flow rate calculation step of calculating a flow rate by using a frequency of vibration generated in the sensor rod 120;
And measuring the flow rate using the three-dimensional flow meter using the bimorph.
8. The method according to claim 7,
Wherein the flow rate is calculated using the following equation.

(Where, m: flow rate, k: proportional constant, f: frequency)
8. The method according to claim 7,
Wherein the flow rate is calculated using a table for the frequency of the flow rate versus the flow rate derived in advance.
The method according to claim 7,
After the frequency calculation step,
A relationship deriving step in which a graph of a relationship graph of a position of each of the sensor rods 120 and a vibration frequency of each of the sensor rods 120 is shown two-dimensionally or three-dimensionally;
A flow direction calculating step of calculating a flow direction of the fluid by using the symmetry point position shown in the graph in the relationship deriving step;
And measuring the flow rate of the fluid by using the three-dimensional flow meter using the bimorph.

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