KR101763848B1 - Chemical Auto Supplying System - Google Patents
Chemical Auto Supplying System Download PDFInfo
- Publication number
- KR101763848B1 KR101763848B1 KR1020150062891A KR20150062891A KR101763848B1 KR 101763848 B1 KR101763848 B1 KR 101763848B1 KR 1020150062891 A KR1020150062891 A KR 1020150062891A KR 20150062891 A KR20150062891 A KR 20150062891A KR 101763848 B1 KR101763848 B1 KR 101763848B1
- Authority
- KR
- South Korea
- Prior art keywords
- coupler
- unit
- chemical
- protective cap
- docking
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
Abstract
An automatic chemical supply system is disclosed. The automatic chemical supply system according to an embodiment of the present invention includes a fixed coupler in which a protective cap is detachably coupled, and is installed in a process facility where chemicals are used, and supplies chemicals to the process facility through a fixed coupler A stationary chemical supply unit; And a coupler docking device having a coupler docking portion for automatically docking or docking the movable coupler, to which the hose for supplying chemicals is fed, to the fixed coupler.
Description
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic chemical supply system, and more particularly, to an automatic chemical supply system capable of automatically supplying a chemical product to prevent a safety accident in advance.
Semiconductors and display manufacturers use various chemicals due to the nature of the process. Among the various types of chemicals used, some chemicals are known to have a great negative impact on health.
For example, benzene is used as an organic solvent in photoprocesses that form circuit patterns on wafers. Exposure to benzene can cause headache, nausea, and dizziness in the central nervous system, leading to leukemia .
Continuous exposure to glycol ethers used in photoprocessing reduces spontaneous abortion and reproductive functions such as delayed pregnancy.
In the process of injecting ions into semiconductors, when arsine is used, arsenic is produced as a byproduct. It causes lung cancer, liver cancer and skin cancer. When acetone used throughout semiconductor wafer processing line is exposed, Stimulates and seriously damages the central nervous system.
Arsenic, which is used when injecting ions from a semiconductor wafer processing line, may also belong to a first class hazardous substance with high carcinogenicity.
In addition to the chemical agents described above, for example, chemical agents such as hydrofluoric acid, sulfuric acid, and nitric acid are widely used in manufacturing semiconductors and display parts or products, particularly in cleaning parts or products.
In this way, chemical agents such as hydrofluoric acid, sulfuric acid, and nitric acid are used in large quantities unlike other chemical agents, so they must be supplied and replenished from time to time. In supplying or supplementing such chemical agents, And the like are known to be highly exposed to chemicals.
In fact, FOSHAN, which is a problem with subsequent leakages in Korea in 2014, is often used in washing wafers together with sulfuric acid and nitric acid. Long-term exposure to such chemicals such as hydrofluoric acid, sulfuric acid, and nitric acid may cause bone weakness, Which can cause serious health problems.
Therefore, when a chemical such as hydrofluoric acid, sulfuric acid, or nitric acid is supplied to a facility, it is necessary to automatically supply the chemical. However, until now, there is no system for automatically supplying chemical such as hydrofluoric acid, sulfuric acid and nitric acid Given the fact that it is dependent on manual operation, it is necessary to research and develop a system that can prevent safety accidents by automatically supplying chemicals such as hydrofluoric acid, sulfuric acid, and nitric acid.
SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above problems, and it is an object of the present invention to provide an automatic chemical supply system capable of automatically supplying a chemical to prevent a safety accident in advance.
According to an aspect of the present invention, there is provided a method of manufacturing a chemical agent, which comprises a fixed coupler to which a protective cap is detachably coupled and which is installed in a process facility in which a chemical is used and supplies the chemical to the process facility through the fixed coupler A supply unit; And a coupler docking unit for automatically docking or docking the movable coupler to the fixed coupler, the hood being connected to one side of the chemical supply hose supplying the chemical, System can be provided.
The coupler docking device may include a device frame in which a transparent or semi-transparent window is installed on one side; And a coupler loading unit provided on the apparatus frame and connected to the coupler docking unit, for loading the mobile coupler.
The coupler docking portion may be disposed in a side area of the apparatus frame.
A loader door may be provided at one side of the apparatus frame in which the coupler loading section is disposed. The coupler loading section may be provided with a clamping unit for clamping the movable coupler to the coupler loading section, Further confirmation sensors may be provided.
The coupler docking apparatus may further include a protection cap removing unit for removing the protection cap from the fixed coupler.
The protection cap removing unit may include: a protection cap clamp for clamping the protection cap; And a clamp driving unit for driving the protection cap clamp.
The clamp driving unit may include: a clamp actuator connected to the protection cap clamp to drive the protection cap clamp; An actuator X-axis driving unit for driving the clamp actuator such that the clamp actuator is moved in the X-axis direction to approach or separate from the fixed coupler in which the protective cap is located; And an actuator Y-axis driving unit connected to the actuator X-axis driving unit and moving the actuator X-axis driving unit and the clamp actuator in a Y-axis direction crossing the X-axis.
The protective cap removing unit may further include a plurality of protective cap lockers disposed around the fixed coupler to lock or unlock the protective cap.
The protective cap rocker includes a half-moon shaped rocker body; And a body arm connected to the rocker body.
The protective cap removing unit may further include a rocker drive actuator connected to the body arm of the protective cap rocker to rotationally drive the protective cap rocker.
The coupler docking device may further include an auto shutter disposed in a central area of the apparatus frame and partitioning a space in the apparatus frame.
The coupler docking device may further include a shutter driving unit connected to the auto shutter and driving the auto shutter.
The coupler docking device may include a chemical leak detection unit for detecting whether the chemical is leaked; A pressure sensing part for sensing a pressure; And a gas sensing unit for sensing the leakage of the gas.
The coupler docking device may further include a controller for controlling an operation of the shutter driving unit based on a signal from at least one of the chemical leak detection unit, the pressure detection unit, and the gas sensing unit.
A shower nozzle provided in a space formed between the auto shutter and the stationary chemical supply unit for spraying water for digestion; And a carbon dioxide nozzle disposed adjacent to the shower nozzle and injecting carbon dioxide for extinguishing.
And a fire auto damper provided in a space formed between the auto shutter and the stationary chemical supply unit.
A chemical drain tank may be provided in the lower region of the apparatus frame for storing chemicals to be drained.
A touch screen coupled to one side of the device frame to operate the equipment; And a fire extinguisher provided on the other side of the apparatus frame.
And a base frame for supporting the stationary chemical supply unit and the coupler docking device.
A sliding rail may be provided on the base frame to support the coupler docking device so that the coupler docking device can be slidably moved with respect to the stationary chemical supply unit fixed in position.
According to the present invention, unlike in the past, chemical agents can be supplied automatically, thereby preventing a safety accident in advance.
FIGS. 1 to 3 are diagrams showing steps in which a movable coupler of a coupler docking device is docked to a fixed coupler of a stationary chemical supply unit, respectively.
4 is a perspective view of an automatic chemical supply system according to an embodiment of the present invention.
5 is a view of the stationary chemical supply unit coupled to the coupler docking device in FIG.
6 is an enlarged view of a coupler docking apparatus.
7 is a view showing the state in which the loader door is opened in Fig.
8 is a partial side view of the coupler docking device.
9 is a plan structural view of Fig.
10 is a front view of Fig. 8. Fig.
11 is a detailed view along the line BB in Fig.
FIGS. 12 to 15 are enlarged views of the area A of FIG. 7, respectively, showing steps of removing the protective cap by the protective cap removing unit.
16 is a system control block diagram of an automatic chemical supply system according to an embodiment of the present invention.
In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.
FIGS. 1 to 3 are diagrams showing a process of docking a movable coupler of a coupler docking device to a fixed type coupler of a fixed chemical supply unit, respectively. FIG. Fig. 5 is an enlarged view of the coupler docking device in the stationary chemical supply unit in Fig. 4, Fig. 6 is an enlarged view of the coupler docking device, Fig. 7 is a view showing the state in which the loader door is opened 8 is a plan view of the coupler docking apparatus, Fig. 9 is a plan view of the structure of Fig. 8, Fig. 10 is a front view of Fig. 8, Fig. 11 is a detail view of the coupler docking apparatus of Fig. FIG. 15 is an enlarged view of the area A of FIG. 7, and FIG. 15 is a view showing steps of removing the protective cap by the protective cap removing unit, and FIG. 16 is a cross- It is a system block diagram of a control system.
Referring to these drawings, the automatic chemical supply system according to the present embodiment is capable of automatically supplying a chemical agent to prevent a safety accident in advance, and it includes a fixed
The stationary
The fixed
As shown in FIG. 1, the
The
For reference, the stationary
That is, the scope of the present invention is not limited to the shape of the drawings, because the scope of the present invention can be applied to a stationary chemical supply unit in which one
On the other hand, the chemicals such as hydrofluoric acid, sulfuric acid, and nitric acid, which are supplied to process equipments for manufacturing semiconductors and displays, as described above, are used in manufacturing semiconductor or display parts or products, Replenishment can be done from time to time because it is used.
In order to supply (replenish) the chemical to the facility as described above, the processes of FIGS. 1 to 3 must be repeated. At this time, if the processes of FIGS. 1 to 3 are performed by the manual operation of the operator, .
Therefore, in the case of the present embodiment, the process of FIG. 1 to FIG. 3 is automatically performed to supply (replenish) chemical chemicals to the process facility by applying the
4 and 5, the
A sliding
In other words, the
By applying the
The
The
It is necessary to observe the inside of the
Therefore, a transparent or
A
1 through 3 may proceed downward in the
At one side of the
On the other side of the
6 and 7, a
The
The
The operator can remove the stopper (not shown) from the
The
Although not shown in detail, the
When the
As shown in FIG. 9, a
The
That is, as described above, the
The
In applying the
Of course, there is no problem in that the
However, when the
Since a plurality of fixed
In order to automatically dock the
That is, the
12 to 15, the protective
The
The
The
When a signal for removing the
The
The
The
For example, when the circular portion of the
When the operation of automatically docking or undocking the
Therefore, in the case of the present embodiment, an
The
The
In order to shut down the central area of the
To this end, the chemical
In addition, a space formed between one side of the
The chemical
The
Finally, the
In particular, when leakage occurs in the supply of the chemical, the
In addition, the
The
In the present embodiment, the
The memory 192 (MEMORY) is connected to the
A support circuit 193 (SUPPORT CIRCUIT) is coupled with the
The
In addition, the
At this time, the
Although processes according to the present invention are described as being performed by software routines, it is also possible that at least some of the processes of the present invention may be performed by hardware. As such, the processes of the present invention may be implemented in software executed on a computer system, or in hardware such as an integrated circuit, or in combination of software and hardware.
Hereinafter, the operation of the automatic chemical supply system according to the present embodiment will be briefly described.
First, the
When a signal for supplying (replenishing) chemicals such as hydrofluoric acid, sulfuric acid, and nitric acid is input, the
The actuator Y-
Thereafter, the
When the
According to the present embodiment having such a structure and function, it is possible to automatically supply the chemical agent unlike the previous one, thereby preventing a safety accident in advance.
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.
100: coupler docking device 110: movable coupler
111: Chemical supply hose 113: Hose guide
115: chemical drain tank 116: touch screen
117: fire extinguisher 120: device frame
123: Windows 126: Loader Door
126a: Loader door actuator 127: Auto shutter
128: shutter drive unit 130: coupler docking unit
140: Coupler loading part 150: Protective cap removal
155:
155b: Body arm 157: Actuator for rocker drive
160: Protection cap clamp 170: Clamp driving part
171: Clamp actuator 172: Actuator X-axis drive unit
173: Actuator Y-axis drive unit 181: Chemical leak detection unit
182: Pressure sensing part 183: Gas sensing part
185: Shower nozzle 186: Carbon dioxide nozzle
187: Fire auto damper 190: Controller
200: stationary chemical supply unit 210: stationary coupler
220: protective cap 300: base frame
310: sliding rail
Claims (20)
A coupler docking device for interacting with said stationary chemical supply unit,
The coupler docking device includes:
A coupler docking portion for automatically docking or docking a movable coupler to which the chemical supply hose supplying the chemical is connected to the fixed coupler;
A device frame in which a transparent or translucent window is installed on one side;
A coupler loading unit provided in the apparatus frame and connected to the coupler docking unit, for loading the movable coupler; And
And an auto shutter disposed in a central area of the apparatus frame to partition a space in the apparatus frame.
Wherein the coupler docking portion is disposed in a side region of the apparatus frame.
A loader door is provided at one side of the apparatus frame in which the coupler loading section is disposed,
Wherein the coupler loading unit is further provided with a clamping confirmation sensor for checking whether the movable coupler is normally clamped to the coupler loading unit.
The coupler docking device includes:
Further comprising a protective cap removing unit for removing the protective cap from the fixed coupler.
The protection cap removing unit may include:
A protective cap clamp for clamping the protective cap; And
And a clamp driver for driving the protection cap clamp.
The clamp driving unit includes:
A clamp actuator connected to the protection cap clamp to drive the protection cap clamp;
An actuator X-axis driving unit for driving the clamp actuator such that the clamp actuator is moved in the X-axis direction to approach or separate from the fixed coupler in which the protective cap is located; And
And an actuator Y-axis driving unit connected to the actuator X-axis driving unit and configured to move the actuator X-axis driving unit and the clamp actuator in the Y-axis direction crossing the X-axis. system.
The protection cap removing unit may include:
Further comprising a plurality of protective cap lockers disposed around the fixed coupler to lock or unlock the protective cap.
Wherein the protective cap rocker comprises:
A half - moon shaped rocker body; And
And a body arm connected to the rocker body.
The protection cap removing unit may include:
Further comprising a rocker drive actuator connected to the body arm of the protective cap rocker to rotate and drive the protective cap rocker.
The coupler docking device includes:
Further comprising a shutter driving unit connected to the auto shutter to drive the auto shutter.
The coupler docking device includes:
A chemical leak detecting unit for detecting whether or not the chemical is leaked;
A pressure sensing part for sensing a pressure; And
Further comprising a gas sensing part for sensing the leakage of the gas.
The coupler docking device includes:
Further comprising a controller for controlling the operation of the shutter driving unit based on a signal from at least one of the chemical leak detection unit, the pressure detection unit, and the gas detection unit.
A shower nozzle provided in a space formed between the auto shutter and the stationary chemical supply unit for spraying water for digestion; And
Further comprising a carbon dioxide nozzle disposed adjacent to the shower nozzle and injecting carbon dioxide for extinguishing.
Further comprising a fire auto damper provided in a space formed between the auto shutter and the stationary chemical supply unit.
And a chemical drain tank in which a chemical to be drained is stored is provided in a lower region of the apparatus frame.
A touch screen coupled to one side of the device frame to operate the equipment; And
Further comprising a fire extinguisher provided on the other side of the apparatus frame.
Further comprising a base frame for supporting the stationary chemical supply unit and the coupler docking device.
Wherein a sliding rail is provided on the base frame to support the coupler docking device so that the coupler docking device can be slidably moved so that the coupler docking device is moved toward or away from the stationary chemical supplying unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020150062891A KR101763848B1 (en) | 2015-05-06 | 2015-05-06 | Chemical Auto Supplying System |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020150062891A KR101763848B1 (en) | 2015-05-06 | 2015-05-06 | Chemical Auto Supplying System |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20160131141A KR20160131141A (en) | 2016-11-16 |
| KR101763848B1 true KR101763848B1 (en) | 2017-08-14 |
Family
ID=57540552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020150062891A KR101763848B1 (en) | 2015-05-06 | 2015-05-06 | Chemical Auto Supplying System |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR101763848B1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200117674A (en) * | 2019-04-05 | 2020-10-14 | 한양이엔지 주식회사 | System for automatically connecting hose used to supply chemical |
| KR20210000701A (en) * | 2019-04-05 | 2021-01-05 | 한양이엔지 주식회사 | System for automatically connecting hose used to supply chemical |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102297463B1 (en) * | 2019-09-30 | 2021-09-02 | 한양이엔지 주식회사 | System for coupling chemical supply hose |
| KR102295510B1 (en) * | 2019-10-14 | 2021-08-31 | 호산테크 주식회사 | Automatic clean connection apparatus for chemical transfer |
| KR102473229B1 (en) * | 2020-11-19 | 2022-12-01 | 한양이엔지 주식회사 | Chemical Transfer System between Chemical Tank Lorry and Chemical Storage Tank |
| JP7280909B2 (en) * | 2021-03-29 | 2023-05-24 | ホサンテック カンパニー， リミテッド | Automatic cleaning connection device and method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200196948Y1 (en) * | 1998-02-25 | 2000-10-02 | 김철원 | The cabinet fixation construction for semiconductor chemical transfer line |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5355699A (en) | 1992-04-16 | 1994-10-18 | Tsudakoma Kogyo Kabushiki Kaisha | Flat knitting machine and a method of operating the rocking sinkers of the flat knitting machine |
-
2015
- 2015-05-06 KR KR1020150062891A patent/KR101763848B1/en active IP Right Grant
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200196948Y1 (en) * | 1998-02-25 | 2000-10-02 | 김철원 | The cabinet fixation construction for semiconductor chemical transfer line |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200117674A (en) * | 2019-04-05 | 2020-10-14 | 한양이엔지 주식회사 | System for automatically connecting hose used to supply chemical |
| KR20210000701A (en) * | 2019-04-05 | 2021-01-05 | 한양이엔지 주식회사 | System for automatically connecting hose used to supply chemical |
| KR102207227B1 (en) | 2019-04-05 | 2021-01-25 | 한양이엔지 주식회사 | System for automatically connecting hose used to supply chemical |
| KR102287974B1 (en) | 2019-04-05 | 2021-08-09 | 한양이엔지 주식회사 | System for automatically connecting hose used to supply chemical |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20160131141A (en) | 2016-11-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101763848B1 (en) | Chemical Auto Supplying System | |
| EP3002080A1 (en) | Vertical machining center | |
| NO326211B1 (en) | Washing machine for sieve cloth and method for cleaning sieve cloth | |
| JP4701666B2 (en) | Machine Tools | |
| JP2007091430A (en) | Elevator device | |
| JPH1170440A (en) | Machine tool | |
| FI129672B (en) | An extinguishing system and an extinguishing method | |
| CN107215489B (en) | A kind of maintenance tool test method out of my cabin | |
| JP2010016144A (en) | Substrate treatment equipment and supporting frame used for the equipment | |
| KR101838999B1 (en) | Door Assembly of Index Machine and Index Machine Haing the Same | |
| CN106466539A (en) | Closed system for the filter valve in the situation of industrial suction equipment | |
| JP2006192454A (en) | Cabin for laser beam machine, and method for carrying material to laser beam machine in cabin | |
| KR20110001858U (en) | Stuffing appratus of pipe for ship | |
| KR101713074B1 (en) | Auto opening and shutting system in a dock and auto opening and shutting method using the same | |
| JP5326682B2 (en) | Safety cover device for grinding machines | |
| JP2008100247A (en) | Safety starting method of facility apparatus in production of casting article and automobile internal article, and facility apparatus using the method | |
| JP2004114258A (en) | Machine tool having workpiece conveying device | |
| WO2011004547A1 (en) | Access area opening and closing device that opens to working platform of reactor vessel | |
| KR102133493B1 (en) | Local ventilator in gas cabinet | |
| JP2010046686A (en) | Laser beam machining apparatus and laser beam machining method | |
| JPH0225798A (en) | Radiation shielding device | |
| KR101722245B1 (en) | A latter shape working platform and a ship including the same | |
| JP3193834B2 (en) | Waterjet safety equipment | |
| KR100643951B1 (en) | Deburring system for work | |
| EP4235138A1 (en) | Automobile collision simulation test bogie and automobile collision simulation test device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant |