KR101743361B1

KR101743361B1 - a discharge tube for excimer lamp

Info

Publication number: KR101743361B1
Application number: KR1020150152954A
Authority: KR
Inventors: 윤주영; 차무경; 안수겸; 강부식
Original assignee: 유니램 주식회사
Priority date: 2015-11-02
Filing date: 2015-11-02
Publication date: 2017-06-02
Also published as: KR20170050883A

Abstract

The present invention relates to a discharge tube joint of an excimer lamp having a coaxial double tube structure capable of joining ends of an inner tube and an outer tube, which are discharge tubes constituting a lamp, without using a separate member by using a facility having three coaxial chucks Device.
In order to achieve the above object, the present invention provides a discharge tube joining apparatus for an excimer lamp, which clamps an inner tube and an outer tube constituting a discharge tube in a state coaxial to each other and joining both ends of the inner and outer tubes, And a second chuck for clamping the other end of the inner tube in a state of being coaxial with the first chuck and located on the opposite side of the first inner tube retention base, 2 inner tube fixing table, and an outer tube fixing table which is located between the first and second inner tube fixing tables and clamps the outer diameter of the outer tube in a state of being coaxial with the first and second chucks.

Description

A discharge tube for excimer lamp < RTI ID = 0.0 >

The present invention relates to a discharge tube joining apparatus for an excimer lamp, and more particularly, to an apparatus for joining a discharge tube of an excimer lamp, To a discharge tube joining apparatus of an excimer lamp having a coaxial double tube structure capable of joining a lamp tube and a lamp tube.

Excimer is an abbreviation of excited state of dimer or extremely short excited dimer. It is also called hetero excimer or exciplex. That is, it refers to a dimer present in the excited state.

For example, when xenon (Xe) gas is subjected to a high-energy impact, the excited electrons are excited in the ground state, and after releasing energy in the excited state, the xenon atoms return to the ground state, . When xenon gas is excited, it becomes a dimer, a two-atom molecule with two atoms in a monomolecular molecule. This xenon dimer does not exist as a dimer, but it returns to its monomer state after one billionth of a second. In general, low-pressure UV light is emitted at wavelengths of 253.7 nm and 184.9 nm, and 184.9 nm decomposes organic impurities at an energy of 154.7 kcal / mol.

However, a liquid crystal display (LCD) substrate, a wafer surface, a polyvinyl chloride (PVC), a polypropylene (PP), a polyethylene (PE), a polyethylene terephthalate (PET), a polystyrene Impurities having a double bond or a triple bond are distributed on the surface of the light-emitting layer, and a C = C bond having a binding energy of 140.5 kcal / mol or a C = O bond having a binding energy of 190 kcal / mol It is impossible. Accordingly, excimer lamps capable of intensively irradiating ultraviolet (UV) rays having a shorter energy than the general UV lamps can be applied to display industries such as liquid crystal displays, wafers, organic light emitting diodes (OLEDs) , And is used in the engineering plastics industry.

In the excimer lamp, an inner tube made of synthetic quartz glass and an outer tube are coaxially arranged to form a discharge tube with a double tube structure. Both ends of the inner tube and the outer tube are closed to be sealed, and a discharge space is formed therebetween And a discharge gas is sealed in the discharge space.

The inner tube and the outer tube are joined to each other by opening both ends of the inner tube outward.

However, when the length of the discharge tube is prolonged, a member is applied between the inner and outer tubes to prevent the shaft from being fixed and the inner tube to rupture, and then the bonding process is performed. Thus, There is a disadvantage that the manufacturing process of the semiconductor device becomes complicated and difficult.

Document 1: Korean Patent Application Publication No. 10-2009-0100229 Document 2: Korean Patent Registration No. 10-1424572

SUMMARY OF THE INVENTION [0008] Accordingly, it is an object of the present invention to solve the above-mentioned problems, and it is therefore an object of the present invention to provide a chuck which is clamped at both ends of an inner tube by two chucks disposed on both sides using three coaxial chucks, Wherein the outer tube is contracted while both ends of the outer tube are clamped, so that the outer tube is joined together.

According to an aspect of the present invention, there is provided a discharge tube joining apparatus for an excimer lamp which clamps an inner tube and an outer tube constituting a discharge tube in a state coaxial with each other and joins both ends of the inner tube and the outer tube, A first inner tube fixture having a first chuck for clamping one end thereof, a second chuck for clamping the other end of the inner tube in a state of being coaxial with the first chuck, And an outer tube holder which is provided between the first and second inner tube holders and clamps the outer diameter of the outer tube in a state of being coaxial with the first and second holders.

The present invention is characterized in that all three chucks are coaxially arranged so that both ends of the inner tube are clamped on two chucks disposed on both sides and one chuck disposed in the center is connected to an outer tube The inner and outer pipes can be fixed while maintaining the coaxial state without using a separate member so that the inner and outer pipes can be joined to each other, There is no reason to consider the additional process, and the manufacturing process of the discharge tube can be simplified.

1 is a view showing a discharge tube structure of an excimer lamp manufactured by a discharge tube joining apparatus of an excimer lamp of the present invention.
2 is a view showing the structure of a double tube welding apparatus of an excimer lamp according to the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the following detailed description, only two embodiments of the present invention will be described in order to achieve the above-mentioned technical problems. And other embodiments which may be presented by the present invention are replaced by descriptions in the constitution of the present invention.

In the present invention, three coaxial chucks are arranged, and both ends of the inner tube are clamped on the two chucks disposed on both sides of the chucks, and one chuck disposed in the center is arranged on the outer side It is possible to keep the inner and outer pipes in a fixed state while coaxially arranging them without using a separate member. In this state, both ends of the outer pipe are contracted and joined to the outer surfaces of both ends of the inner pipe, Which is capable of manufacturing a discharge tube of an excimer lamp having a structure of an excimer lamp.

The discharge tube of the excimer lamp manufactured through the above bonding apparatus does not need to use a separate member as mentioned above, so there is no reason to consider the process of separating the member after the inner and outer pipes are joined, Can be simplified.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view illustrating a discharge tube structure of an excimer lamp manufactured by a discharge tube joining apparatus of an excimer lamp according to a preferred embodiment of the present invention. FIG.

As shown in FIG. 1, the discharge tube 400 of the excimer lamp is formed by a double tube structure as a whole having a coaxial structure with the inner tube 100 and the outer tube 200, and the inner and outer tubes The inner tube 100 and the inner tube 200 contract both ends of the outer tube 200 so that both ends of the outer tube 200 are joined to the outer surfaces of both ends of the inner tube 100, The discharge tube 400 is manufactured in a shape in which the space 300 is sealed.

The discharge space 300 formed between the inner and outer tubes 100 and 200 constituting the discharge tube 400 is filled with a discharge gas.

FIG. 2 is a view showing a configuration of a discharge tube joining apparatus of an excimer lamp proposed in the present invention.

As shown in FIG. 2, the discharge tube joining apparatus 10 of the excimer lamp clamps the inner and outer tubes 100 and 200 of the double tube structure with the coaxial state maintained by using three chucks, respectively, And both end portions of the outer tubes 100 and 200 are joined together.

The excimer lamp discharge tube joining apparatus 10 comprises a base 20 constituting a floor, first and second inner tube supports 21 and 22 installed on the upper surface of the base 20 for clamping the inner and outer tubes 100 and 200, 30, and 40, and an outer tube fixture 50.

The first and second inner tube holders 30 and 40 are provided on both sides of the upper end of the base 20 so as to reciprocate left and right to clamp both ends of the inner tube 100.

The first inner tube fixture 30 is provided with a first chuck 32 and the first chuck 32 clamps one end of the inner tube 100.

The second inner tube fixture 40 is disposed on the opposite side of the first inner tube fixture 30 and the second inner tube fixture 40 is provided with a second chuck 42, (42) coaxial with the first chuck (32) and clamp the other end of the inner tube (100).

The outer tube fixture 50 is disposed between the first and second inner tube fixtures 30 and 40 and is connected to an outer tube (not shown) fitted to the outside of the inner tube 100 in a state of being coaxial with the inner tube 100 200).

A through hole 54 is formed in the outer tube fixing base 50 and the inner and outer tubes 100 and 200 constituting the discharge tube 400 pass through the through hole 54.

A third chuck 52 is installed on the outer tube fixture 50. The third chuck 52 is connected to the first and second inner tube fixtures 30, The outer diameter of the outer tube 200 is clamped while coaxial with the inner tube 32, 42.

Even if a separate member is not assembled between the inner and outer pipes 100 and 200 through the first to third chucks 32, 42 and 52 coaxial with each other as described above, the inner and outer pipes 100 200 can be effectively clamped while keeping the coaxial axes of the inner and outer tubes 100, 200 constant.

That is, when joining both ends of the inner and outer tubes 100 and 200 of the discharge tube 400 having a double tube structure having a coaxial structure using the discharge tube joining apparatus of the excimer lamp of the present invention, the inner and outer tubes 100 and 200, Is passed through the through hole 54 of the outer tube fixture 50 and then one end of the inner tube 100 is clamped to the first chuck 32 of the first inner tube fixture 30, The tube 200 is clamped to the third chuck 52 of the outer tube fixture 50 coaxial with the first chuck 32.

Next, when the other end of the inner tube 100 is clamped to the second chuck 42 of the second inner tube fixture 40 coaxial with the first chuck 32 and the third chuck 52, The outer tubes 100 and 200 may be separated from each other by a separate member through the first through third chucks 32, 42 and 52 coaxial with each other without interposing between the outer tubes 100 and 200, It is possible to maintain the coaxial axes of the first and second actuators 100 and 200.

After clamping the inner and outer tubes 100 and 200 as described above, both ends of the outer tube 200 are contracted so that both ends of the outer tube 200 are joined to the outer diameters of both ends of the inner tube 100 The manufacturing of the discharge tube 400 is completed with the discharge space 300 formed between the inner and outer tubes 100 and 200 sealed.

10: Discharge tube joining device of excimer lamp 20: Base
30: first inner tube holder 32: first chuck
40: second inner tube fixture 42: second chuck
50: outer tube holder 52: third tube
100: Inner tube 200: Outer tube
300: Discharge space 400: Discharge tube

Claims

A discharge tube joining apparatus for an excimer lamp which clamps an inner tube (100) and an outer tube (200) constituting a discharge tube (400) in a coaxial state and joining both ends of the inner and outer tubes (100, 200)
A first inner tube fixture 30 having a first chuck 32 for clamping one end of the inner tube 100;
And a second chuck (42) located on the opposite side of the first inner tube fixture (30) and clamping the other end of the inner tube (100) while being coaxial with the first chuck 2 inner tube fixture 40;
The first and second inner tube holders are disposed between the first and second inner tube holders 30 and 40 and are coaxial with the first and second chucks at the center. The outer tube, which is fitted to the outer diameter of the inner tube with the discharge space therebetween, And a third chuck for coaxing the outer tube which is coaxial with the first and second chucks and passed through the through-hole, wherein the inner and outer tubes 100, 200) an outer tube fixture for clamping while maintaining the coaxial;
The both ends of the outer tube 200 are contracted to connect the both ends of the outer tube 200 to the outer diameters of both ends of the inner tube 100 to form a discharge space 300 formed between the inner and outer tubes 100, And the discharge tube (400) is manufactured in a state where the discharge tube (400) is sealed.