KR101736847B1 - Plasma generation device, method for adjusting phase difference, and apparatus for processing substrate employing the same - Google Patents
Plasma generation device, method for adjusting phase difference, and apparatus for processing substrate employing the same Download PDFInfo
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- KR101736847B1 KR101736847B1 KR1020150154007A KR20150154007A KR101736847B1 KR 101736847 B1 KR101736847 B1 KR 101736847B1 KR 1020150154007 A KR1020150154007 A KR 1020150154007A KR 20150154007 A KR20150154007 A KR 20150154007A KR 101736847 B1 KR101736847 B1 KR 101736847B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/3299—Feedback systems
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
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- H05H2001/4682—
Abstract
The present invention relates to a plasma generating apparatus, a phase difference adjusting method, and a substrate processing apparatus using the same. A plasma generator according to an embodiment of the present invention includes: a first RF power supply for supplying a first RF signal; A first plasma source for generating plasma by receiving the first RF signal; A second RF power supply for supplying a second RF signal; A second plasma source for generating a plasma by receiving the second RF signal; A sensing unit provided at an input terminal of the second plasma source to sense a parameter of the second RF signal; And a controller for measuring an impedance of the plasma using the sensed parameter and adjusting a phase difference between the first RF signal and the second RF signal based on the measured impedance.
Description
The present invention relates to a plasma generating apparatus, a phase difference adjusting method, and a substrate processing apparatus using the same.
A process for depositing or etching a thin film on a substrate using a plasma in a semiconductor process is widely used. In particular, the technique of generating plasma in a chamber using two or more RF signals generates plasma using a part of an RF signal while controlling characteristics of the plasma such as ion flux by using another RF signal, thereby more effectively discharging the plasma, .
In the plasma process using the plurality of RF signals, although the intensity and the frequency of the RF signals are important, the phase difference between them may affect the plasma discharge characteristics and the process rate (deposition rate, etch rate, etc.) in the chamber. However, the conventional substrate processing apparatus does not introduce a process of setting a value optimized for the equipment in order to control the phase difference between the RF signals or to improve the productivity of the process.
Embodiments of the present invention provide a plasma generating apparatus, a phase difference adjusting method, and a substrate processing apparatus capable of improving the productivity of a substrate processing process by appropriately adjusting a phase difference between a plurality of RF signals for a plasma process .
A plasma generator according to an embodiment of the present invention includes: a first RF power supply for supplying a first RF signal; A first plasma source for generating plasma by receiving the first RF signal; A second RF power supply for supplying a second RF signal; A second plasma source for generating a plasma by receiving the second RF signal; A sensing unit provided at an input terminal of the second plasma source to sense a parameter of the second RF signal; And a controller for measuring an impedance of the plasma using the sensed parameter and adjusting a phase difference between the first RF signal and the second RF signal based on the measured impedance.
The frequency of the first RF signal may be higher than or equal to the frequency of the second RF signal.
The frequency of the first RF signal is n times the frequency of the second RF signal, where n may be a real number greater than or equal to one.
The first plasma source may include an upper electrode among parallel plate electrodes disposed in a plasma chamber, and the second plasma source may include a lower electrode among the parallel plate electrodes.
The sensing unit may include: a sensor for sensing a voltage and a current of the second RF signal.
The plasma generator includes a first impedance matcher provided between the first RF power source and the first plasma source to match an output impedance of the first RF power source with an input impedance of the first plasma source; And a second impedance matcher provided between the second RF power source and the second plasma source for matching the output impedance of the second RF power source with the input impedance of the second plasma source.
Wherein the controller is configured to: match the phase of the first RF signal with the phase of the second RF signal, measure the impedance while changing the phase difference between the first RF signal and the second RF signal, Obtaining a first set of impedances for said impedances associated with said set of phase differences and said phase differences and determining an extremum of said function indicative of said impedances for said phase differences based on said first set of phase differences and said first set of impedances, And to control at least one of the first RF power source and the second RF power source so that a phase difference between the first RF signal and the second RF signal is the target phase difference.
Wherein the controller is configured to: match the phase of the first RF signal with the phase of the second RF signal, measure the impedance while changing the phase difference between the first RF signal and the second RF signal, Obtaining a first set of impedances for the impedance associated with the phase difference set and the corresponding phase difference, calculating an average and standard deviation of the impedances from the first set of impedances, and calculating an average and a standard deviation of the impedances belonging to the first set of impedances, And the phase difference corresponding to the impedance is determined as the starting impedance and the starting phase difference, and the phase difference between the first RF signal and the second RF signal is determined as the starting phase Controls at least one of the first RF power source and the second RF power source so that the first R F signal and the second RF signal while measuring the impedance to obtain a second phase difference set for the phase difference and a second impedance set for the impedance related to the phase difference, Obtaining a target phase difference representing an extremum and the extremum of a function indicative of the impedance for the phase difference based on the set of phase differences and the second impedance set and determining a phase difference between the first RF signal and the second RF signal, And at least one of the first RF power source and the second RF power source may be controlled to have the target phase difference.
The acquisition of the first set of phase differences and the first set of impedances may be repeated until the phase difference between the first RF signal and the second RF signal is greater than or equal to 180 °.
The acquisition of the second phase difference set and the second impedance set is repeated by changing the phase difference between the first RF signal and the second RF signal until the measured impedance deviates from the average out of the standard deviation .
According to an aspect of the present invention, there is provided a method of adjusting a phase difference, comprising: supplying a first RF signal and a second RF signal from a first RF power source and a second RF power source to a first plasma source and a second plasma source, respectively; Sensing a parameter of the second RF signal supplied to the second plasma source; And adjusting a phase difference between the first RF signal and the second RF signal based on the impedance of the plasma measured using the sensed parameter.
The frequency of the first RF signal may be higher than or equal to the frequency of the second RF signal.
The frequency of the first RF signal is n times the frequency of the second RF signal, where n may be a real number greater than or equal to one.
The first plasma source may include an upper electrode among parallel plate electrodes disposed in a plasma chamber, and the second plasma source may include a lower electrode among the parallel plate electrodes.
The sensing the parameter of the second RF signal may include: sensing the voltage and current of the second RF signal.
Wherein adjusting the phase difference comprises: phase matching the first RF signal and the second RF signal; Measuring the impedance while changing the phase difference between the first RF signal and the second RF signal to obtain a first phase difference set for the phase difference and a first impedance set for the impedance related to the phase difference, ; Obtaining a target phase difference representing an extremum of the function and the extremum representing the impedance for the phase difference based on the first set of phase differences and the first set of impedances; And controlling at least one of the first RF power source and the second RF power source such that a phase difference between the first RF signal and the second RF signal is the target phase difference.
Wherein adjusting the phase difference comprises: phase matching the first RF signal and the second RF signal; Measuring the impedance while changing the phase difference between the first RF signal and the second RF signal to obtain a first phase difference set for the phase difference and a first impedance set for the impedance related to the phase difference, ; Calculating an average and standard deviation of the impedance from the first set of impedances; Determining one of the impedances distributed within the standard deviation from the average among the impedances belonging to the first impedance set and the phase difference corresponding to the impedance as the starting impedance and the starting phase difference, respectively; Controlling at least one of the first RF power source and the second RF power source such that a phase difference between the first RF signal and the second RF signal is the starting phase difference; Measuring the impedance while changing the phase difference between the first RF signal and the second RF signal to obtain a second phase difference set for the phase difference and a second impedance set for the impedance related to the phase difference, ; Obtaining a target phase difference representing an extremum and the extremum of the function indicative of the impedance for the phase difference based on the second set of phase differences and the second set of impedances; And controlling at least one of the first RF power source and the second RF power source such that a phase difference between the first RF signal and the second RF signal is the target phase difference.
Obtaining the first set of phase differences and the first set of impedances may be performed iteratively until the phase difference between the first RF signal and the second RF signal is greater than or equal to 180 °.
Wherein the obtaining of the second set of phase differences and the second set of impedances comprises: when the measured impedance is changed by shifting the phase difference between the first RF signal and the second RF signal out of the range of the standard deviation Can be repeatedly performed.
A substrate processing apparatus according to an embodiment of the present invention includes a chamber for providing a space in which a substrate is processed; A substrate support assembly for supporting the substrate within the chamber; A gas supply unit for supplying gas into the chamber; And a plasma generating unit that excites gas in the chamber into a plasma state, the plasma generating unit comprising: a first RF power supply for supplying a first RF signal; A first plasma source for generating plasma by receiving the first RF signal; A second RF power supply for supplying a second RF signal; A second plasma source for generating a plasma by receiving the second RF signal; A sensing unit provided at an input terminal of the second plasma source to sense a parameter of the second RF signal; And a controller for measuring an impedance of the plasma using the sensed parameter and adjusting a phase difference between the first RF signal and the second RF signal based on the measured impedance.
According to the embodiment of the present invention, the productivity of the substrate processing process can be improved by appropriately adjusting the phase difference between a plurality of RF signals for the plasma process.
1 is an exemplary diagram showing a substrate processing apparatus according to an embodiment of the present invention.
2 is an exemplary diagram schematically showing a plasma generating apparatus according to an embodiment of the present invention.
3 is an exemplary diagram illustrating waveforms and phase differences of first and second RF signals in accordance with an embodiment of the present invention.
FIG. 4 is a graph showing the coordinates of the phase difference between the first and second RF signals and the corresponding impedance in a two-dimensional coordinate plane according to an embodiment of the present invention. Referring to FIG.
5 is an exemplary distribution diagram derived based on the mean and standard deviation of the impedance in accordance with another embodiment of the present invention.
FIG. 6 is a graph showing a coordinate on a two-dimensional coordinate plane, which is composed of a phase difference between first and second RF signals and a corresponding impedance according to another embodiment of the present invention.
7 is an exemplary flowchart of a phase difference adjustment method according to an embodiment of the present invention.
8 is an exemplary flowchart illustrating a process of adjusting the phase difference between the first and second RF signals according to an embodiment of the present invention.
9 is an exemplary flow chart illustrating the process of adjusting the phase difference between the first and second RF signals in accordance with another embodiment of the present invention.
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings attached hereto.
1 is an exemplary diagram showing a
Referring to Fig. 1, a
The
According to one example, a
The
The
The electrostatic chuck 210 may include a
The
The
The
The
The
The
The second
The
The
The
The
The
The
The
A
The
The
The
The
The
The plasma generating unit may excite the process gas in the
Hereinafter, a process of processing a substrate using the above-described substrate processing apparatus will be described.
When the substrate W is placed on the
When the substrate W is adsorbed to the electrostatic chuck 210, the process gas can be supplied into the
The
2 is an exemplary diagram schematically showing a
The
The first
The first and
For example, the first plasma source may include an antenna disposed on the top or side of the
According to an embodiment, the first and second RF signals may be supplied to the same plasma source. In this case, the first and
As described above, the type of the plasma source in the
The parameters of the first RF signal and the second RF signal may be different from each other.
For example, the first and second RF signals may have different frequencies.
3 is an exemplary diagram illustrating waveforms and phase differences of first and second RF signals in accordance with an embodiment of the present invention.
As shown in FIG. 3, the frequency of the first RF signal may be higher than that of the second RF signal.
For example, the frequency f1 of the first RF signal is n times the frequency f2 of the second RF signal, where n is a real number greater than one (i.e., f1 = n.f2).
According to an embodiment, the frequencies of the first and second RF signals may be the same. In this case, n becomes 1.
The magnitude (e.g., amplitude) of the first RF signal and the magnitude of the second RF signal may differ according to the process performed by the
The parameters such as the frequency and the size of the first and second RF signals may be set in a recipe previously prepared in accordance with the process performed in the
Further, the
According to one embodiment, the
Then, the
Referring again to FIG. 2, the
The
In this case, the
The embodiment of the present invention measures the impedance of the plasma formed in the
The plurality of RF signals used in the plasma process are applied to the
Referring to the waveforms of the first and second RF signals shown in FIG. 2, the second RF signal is ahead of the first RF signal by a phase difference? At a timing corresponding to time t = 0.
In order to adjust the phase difference between the first and second RF signals, the
Then, the
FIG. 4 is a graph showing a coordinate formed by a phase difference? Between first and second RF signals and a corresponding impedance Z on a two-dimensional coordinate plane according to an embodiment of the present invention.
As described above, the
Then, the
For example, the
Referring to FIG. 4, the
In Fig. 4, the increment of the phase difference [phi] is 30 [deg.], But the phase difference increment in the present invention is not limited thereto. Also, the acquisition of the first set of phase differences and the first set of impedances may be repeatedly performed until the phase difference between the first and second RF signals is greater than or equal to 180 [deg.] (I.e., ≪ 180, the impedance Z for the phase difference? Is measured to form one coordinate).
Then, the
In Figure 4, from among the six coordinates shown in the two-dimensional coordinate plane in the φ-Z P 4 that has an impedance Z 4 corresponding to the maximum value, the impedance Z 4 phase difference φ 4 is the target phase difference φ t corresponding to .
Then, the
In other words, according to the embodiment of the present invention described above, the phase difference? Between the first RF signal supplied from the first
According to another embodiment of the present invention, the
According to this embodiment, the
Then, the
5 is an exemplary distribution diagram derived on the basis of mean m and standard deviation sigma of impedance in accordance with another embodiment of the present invention.
As described above, when the first phase difference set and the first impedance set are obtained, the
Then, based on the calculated average m and standard deviation?, Any one of the impedances distributed within the range of the standard deviation? From the average m among the impedances belonging to the first impedance set is determined as the starting impedance, The corresponding phase difference can be determined as the starting phase difference ss .
Here, according to the embodiment of the present invention, the distribution of the first impedance set can be previously defined as following the normal distribution, and the range of the standard deviation sigma from the average m in this case is the area shown by the hatched portion of FIG. 5 .
The
According to one embodiment, the starting impedance may be determined as a minimum value or a maximum value among the impedances of the first impedance set distributed within the range of the mean deviation m from the mean value m, and the starting phase difference ss is the minimum value or the maximum value The phase difference < RTI ID = 0.0 >
The
Then, the
FIG. 6 is a graph showing the phase difference between the first and second RF signals and the impedance Z corresponding thereto in a two-dimensional coordinate plane according to another embodiment of the present invention. Referring to FIG.
Unlike the graph shown in Figure 4, the second phase also the graph on the φ-Z coordinate plane shown in Figure 6, while gradually increasing the phase difference φ to the previously-determined start from the phase difference φ s is obtained by measuring the impedance Z And a second set of impedances.
Further, according to this embodiment, the acquisition of the second set of phase differences and the second set of impedances may be achieved by increasing the phase difference [phi] between the first and second RF signals so that the measured impedance is less than the standard deviation [ can be repeated until it exceeds the range of? (i.e., the hatched region in FIG. 5).
In addition, in this embodiment, the increment of the phase difference? May be less than the increment of the phase difference? That was applied when acquiring the first phase difference set and the first impedance set. For example, the phase difference increment [Delta] [phi] 2 used for acquiring the second phase difference set and the second impedance set is one fifth of the phase difference increment [Delta] [phi] 1 used for obtaining the first phase difference set and the first impedance set But are not limited thereto.
Thus, this embodiment further acquires a second set of phase differences and a second set of impedances based on the impedances distributed within a certain range from the mean m of the impedance calculated from the first set of impedances and the corresponding phase differences, The two-dimensional coordinates are determined, and the phase difference representing the maximum value or minimum value of the function Z = f (?) Defined by the two-dimensional coordinates can be determined as the target phase difference? T.
Then, the
In the embodiments of the present invention described above, the
7 is an exemplary flow diagram of a
The phase
Referring to FIG. 7, the
The frequency of the first RF signal may be higher than or equal to the frequency of the second RF signal. For example, the frequency of the first RF signal may be n times the frequency of the second RF signal, where n may be a real number greater than or equal to one.
According to one embodiment, the
The step S720 of sensing the parameters of the second RF signal may include sensing the voltage and current of the second RF signal. The detection of the parameter may be performed by a sensor provided at the input end of the
8 is an exemplary flow chart illustrating the process of adjusting the phase difference? Between the first and second RF signals (S730) according to an embodiment of the present invention.
Referring to FIG. 8, the step of adjusting the phase difference (S730) may include the step of matching the phases of the first RF signal and the second RF signal (S731), the phase difference between the first RF signal and the second RF signal (S732) of measuring a impedance Z while changing the phase difference? and obtaining a first set of phase differences for the phase difference? and a first set of impedances for an impedance Z related to the phase difference S732, (Step S733) of obtaining an extremum of a function indicating an impedance Z with respect to a phase difference? Based on the set and a target phase difference? T indicating the extremum, and calculating a phase difference? Between the first RF signal and the second RF signal And controlling (S734) at least one of the first
In this embodiment, the step (S732) of acquiring the first set of phase differences and the first set of impedances is repeated until the phase difference? Between the first RF signal and the second RF signal is greater than or equal to 180 degrees. Lt; / RTI >
FIG. 9 is an exemplary flow chart illustrating the process of adjusting the phase difference between first and second RF signals, S, in accordance with another embodiment of the present invention (S730).
Referring to FIG. 9, in operation S730, the phase difference is adjusted by matching the phase of the first RF signal with the phase of the second RF signal S731, (step S732) of measuring the impedance Z while changing the phase difference? to obtain a first phase difference set for the phase difference? and a first impedance set for the impedance Z related to the phase difference (S732) Which is the same as the embodiment.
Thereafter, the step of adjusting the phase difference (S730) includes calculating an average m and a standard deviation? Of the impedance Z from the first impedance set (S735), calculating the average m from step (S736), the 1 RF signals and the 2 RF signal to determine a phase difference, respectively a starting impedance and from the phase difference φ s which corresponds to any of impedance and the impedance of which is dispersed in the range of the standard deviation σ (S737) controlling at least one of the first
According to the embodiments of the present invention described above, by adjusting the phase difference between a plurality of RF signals used for a plasma process appropriately for the equipment, the characteristics and the process rate of the plasma in the chamber are improved to improve the productivity of the substrate processing process .
While the present invention has been described with reference to the exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. Those skilled in the art will appreciate that various modifications may be made to the embodiments described above. The scope of the present invention is defined only by the interpretation of the appended claims.
10: substrate processing apparatus
100: chamber
200: substrate support assembly
300: Shower head
400: gas supply unit
500: Baffle unit
600: Plasma generator
611: First RF power source
612: a first plasma source
613: First Impedance Matcher
621: Second RF power source
622: a second plasma source
623: Second Impedance Matcher
624:
630:
W: substrate
φ: phase difference
Z: Impedance
Claims (20)
A first plasma source for generating plasma by receiving the first RF signal;
A second RF power supply for supplying a second RF signal;
A second plasma source for generating a plasma by receiving the second RF signal;
A sensing unit provided at an input terminal of the second plasma source to sense a parameter of the second RF signal; And
A controller for measuring an impedance of the plasma using the sensed parameter and adjusting a phase difference between the first RF signal and the second RF signal such that the measured impedance of the plasma is maximized;
And a plasma generator.
Wherein the frequency of the first RF signal is higher than the frequency of the second RF signal.
Wherein the frequency of the first RF signal is n times the frequency of the second RF signal, where n is a real number equal to or greater than one.
Wherein the first plasma source comprises an upper electrode of parallel plate electrodes disposed in a plasma chamber,
And the second plasma source comprises a lower electrode of the parallel plate electrodes.
The sensing unit includes:
And a sensor for sensing the voltage and current of the second RF signal.
A first impedance matcher provided between the first RF power source and the first plasma source to match an output impedance of the first RF power source with an input impedance of the first plasma source; And
A second impedance matcher provided between the second RF power source and the second plasma source for matching the output impedance of the second RF power source with the input impedance of the second plasma source;
Further comprising a plasma generator.
The control unit includes:
The first RF signal and the second RF signal are in phase with each other,
Measuring the impedance while changing the phase difference between the first RF signal and the second RF signal to obtain a first phase difference set for the phase difference and a first impedance set for the impedance related to the phase difference,
Obtaining a target phase difference representing an extremum and the extremum of the function indicative of the impedance for the phase difference based on the first set of phase differences and the first set of impedances,
And controls at least one of the first RF power source and the second RF power source such that a phase difference between the first RF signal and the second RF signal is the target phase difference.
The control unit includes:
The first RF signal and the second RF signal are in phase with each other,
Measuring the impedance while changing the phase difference between the first RF signal and the second RF signal to obtain a first phase difference set for the phase difference and a first impedance set for the impedance related to the phase difference,
Calculating an average and standard deviation of the impedance from the first set of impedances,
Determining one of the impedances distributed within the standard deviation from the average among the impedances belonging to the first impedance set and the phase difference corresponding to the impedance as the starting impedance and the starting phase difference,
Controlling at least one of the first RF power source and the second RF power source such that a phase difference between the first RF signal and the second RF signal is the starting phase difference,
Measuring the impedance while changing a phase difference between the first RF signal and the second RF signal to obtain a second phase difference set for the phase difference and a second impedance set for the impedance related to the phase difference,
Obtaining a target phase difference representing an extremum and the extremum of the function indicative of the impedance for the phase difference based on the second set of phase differences and the second set of impedances,
And controls at least one of the first RF power source and the second RF power source such that a phase difference between the first RF signal and the second RF signal is the target phase difference.
Wherein the acquisition of the first set of phase differences and the first set of impedances is repeated until the phase difference between the first RF signal and the second RF signal is greater than or equal to 180 °.
The acquisition of the second phase difference set and the second impedance set is repeated by changing the phase difference between the first RF signal and the second RF signal until the measured impedance deviates from the average out of the standard deviation And a plasma generator.
Sensing a parameter of the second RF signal supplied to the second plasma source; And
Adjusting a phase difference between the first RF signal and the second RF signal such that an impedance of the plasma measured using the sensed parameter is maximized;
/ RTI >
Wherein the frequency of the first RF signal is higher than or equal to the frequency of the second RF signal.
Wherein the frequency of the first RF signal is n times the frequency of the second RF signal, where n is a real number greater than or equal to 1.
Wherein the first plasma source comprises an upper electrode of parallel plate electrodes disposed in a plasma chamber,
And the second plasma source includes a lower electrode of the parallel flat plate electrodes.
Wherein sensing the parameters of the second RF signal comprises:
And sensing the voltage and current of the second RF signal.
Wherein adjusting the phase difference comprises:
Matching phases of the first RF signal and the second RF signal;
Measuring the impedance while changing the phase difference between the first RF signal and the second RF signal to obtain a first phase difference set for the phase difference and a first impedance set for the impedance related to the phase difference, ;
Obtaining a target phase difference representing an extremum of the function and the extremum representing the impedance for the phase difference based on the first set of phase differences and the first set of impedances; And
Controlling at least one of the first RF power source and the second RF power source such that a phase difference between the first RF signal and the second RF signal is the target phase difference;
/ RTI >
Wherein adjusting the phase difference comprises:
Matching phases of the first RF signal and the second RF signal;
Measuring the impedance while changing the phase difference between the first RF signal and the second RF signal to obtain a first phase difference set for the phase difference and a first impedance set for the impedance related to the phase difference, ;
Calculating an average and standard deviation of the impedance from the first set of impedances;
Determining one of the impedances distributed within the standard deviation from the average among the impedances belonging to the first impedance set and the phase difference corresponding to the impedance as the starting impedance and the starting phase difference, respectively;
Controlling at least one of the first RF power source and the second RF power source such that a phase difference between the first RF signal and the second RF signal is the starting phase difference;
Measuring the impedance while changing the phase difference between the first RF signal and the second RF signal to obtain a second phase difference set for the phase difference and a second impedance set for the impedance related to the phase difference, ;
Obtaining a target phase difference representing an extremum and the extremum of the function indicative of the impedance for the phase difference based on the second set of phase differences and the second set of impedances; And
Controlling at least one of the first RF power source and the second RF power source such that a phase difference between the first RF signal and the second RF signal is the target phase difference;
/ RTI >
Wherein obtaining the first set of phase differences and the first set of impedances comprises:
Wherein the phase difference is repeatedly performed until a phase difference between the first RF signal and the second RF signal is greater than or equal to 180 °.
Wherein obtaining the second set of phase differences and the second set of impedances comprises:
And varying the phase difference between the first RF signal and the second RF signal to be repeatedly performed until the measured impedance deviates from the average to the range of the standard deviation.
A substrate support assembly for supporting the substrate within the chamber;
A gas supply unit for supplying gas into the chamber; And
And a plasma generating unit that excites gas in the chamber into a plasma state, the plasma generating unit comprising:
A first RF power supply for supplying a first RF signal;
A first plasma source for generating plasma by receiving the first RF signal;
A second RF power supply for supplying a second RF signal;
A second plasma source for generating a plasma by receiving the second RF signal;
A sensing unit provided at an input terminal of the second plasma source to sense a parameter of the second RF signal; And
A controller for measuring an impedance of the plasma using the sensed parameter and adjusting a phase difference between the first RF signal and the second RF signal such that the measured impedance of the plasma is maximized;
And the substrate processing apparatus.
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KR102630343B1 (en) * | 2017-08-03 | 2024-01-30 | 삼성전자주식회사 | plasma processing apparatus and method for manufacturing semiconductor device using the same |
JP7199246B2 (en) * | 2019-02-19 | 2023-01-05 | 東京エレクトロン株式会社 | Substrate processing equipment |
WO2023069211A1 (en) * | 2021-10-18 | 2023-04-27 | Lam Research Corporation | Systems and methods for determining a phase difference between rf signals provided to electrodes |
US20240079211A1 (en) * | 2022-09-06 | 2024-03-07 | Mks Instruments, Inc. | Extremum-Seeking Control Apparatuses and Methods for Automatic Frequency Tuning |
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JP2010062579A (en) * | 2002-09-26 | 2010-03-18 | Lam Res Corp | Method to perform tool matching on plasma processing system and to troubleshoot the same |
JP2012175001A (en) * | 2011-02-23 | 2012-09-10 | Toshiba Corp | Controller, plasma processing apparatus, and control method |
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JP2012175001A (en) * | 2011-02-23 | 2012-09-10 | Toshiba Corp | Controller, plasma processing apparatus, and control method |
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