KR101733154B1 - Piezoelectric element using nanofiber by electrospinning and manufacture method thereof - Google Patents
Piezoelectric element using nanofiber by electrospinning and manufacture method thereof Download PDFInfo
- Publication number
- KR101733154B1 KR101733154B1 KR1020160030330A KR20160030330A KR101733154B1 KR 101733154 B1 KR101733154 B1 KR 101733154B1 KR 1020160030330 A KR1020160030330 A KR 1020160030330A KR 20160030330 A KR20160030330 A KR 20160030330A KR 101733154 B1 KR101733154 B1 KR 101733154B1
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- nanofiber matrix
- piezoelectric element
- piezoelectric
- electrode
- Prior art date
Links
Images
Classifications
-
- H01L41/047—
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01D—MECHANICAL METHODS OR APPARATUS IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS
- D01D5/00—Formation of filaments, threads, or the like
- D01D5/0007—Electro-spinning
- D01D5/0061—Electro-spinning characterised by the electro-spinning apparatus
-
- D—TEXTILES; PAPER
- D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
- D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
- D04H1/00—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres
- D04H1/70—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres characterised by the method of forming fleeces or layers, e.g. reorientation of fibres
- D04H1/72—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres characterised by the method of forming fleeces or layers, e.g. reorientation of fibres the fibres being randomly arranged
- D04H1/728—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres characterised by the method of forming fleeces or layers, e.g. reorientation of fibres the fibres being randomly arranged by electro-spinning
-
- H01L41/193—
-
- H01L41/25—
-
- H01L41/29—
-
- H01L41/35—
Abstract
Description
The present invention relates to a piezoelectric element having a novel structure using an electrospun nanofiber and a method of manufacturing the same, and more particularly, to a piezoelectric element having an interface packaged with an electrospun nanofiber matrix and an electrode in which a fine protrusion pattern is formed, ≪ / RTI >
The principle of the conventional pressure sensor is to detect the change of the internal capacitance of the sensor due to the external pressure or the change of the resistance under a certain voltage or to measure the voltage or current generated in the piezoelectric material. In the case of an energy harvesting device that converts energy into electrical energy, there is a method of utilizing static electricity generated between different materials or utilizing a piezoelectric material.
Recently, researches have been actively carried out to maximize sensitivity and energy efficiency by processing the core materials of sensors and energy devices using nanomicroscales. When a piezoelectric material is used for such a sensor or an energy element (particularly for a sensor), the system operates by the direct energy amount generated from the piezoelectric material, and self-power generation (self-powered) is possible.
On the other hand, in the case of a ceramic-based piezoelectric device such as PZT, the flexibility of the final device is limited. In addition, in the case of a sensor or an energy device based on the structure of a conventional electrode-piezoelectric material-electrode, since it is a simple interfacial contact, it is impossible to operate in various deformation or motion modes.
SUMMARY OF THE INVENTION It is an object of the present invention to provide a piezoelectric nanofiber matrix and a piezoelectric nanofiber matrix by using the electrospun nanofibers in consideration of the problems of the prior art, And an adhesive property and a workability which are improved in response to various mechanical deformation modes, and a method for manufacturing the same.
It is still another object of the present invention to provide a piezoelectric device in which the substrate is curved in the piezoelectric device according to the present invention or a fine protrusion pattern is formed on the surface of the substrate to improve the adhesion to an object and a method for manufacturing the same .
In order to achieve the above object,
Electrospun nanofiber matrix;
An upper substrate and a lower substrate; And
Electrode,
The upper substrate or the lower substrate has fine protrusion patterns formed on the contact surfaces of the electrospun nanofiber matrix
And the electrospun nanofiber matrix is connected to an electrode, to produce a piezoelectric element.
In addition,
A first step of producing a piezoelectric material as a nanofiber matrix by electrospinning;
A second step of forming a fine projection pattern on the upper substrate or the lower substrate; And
And a third step of connecting the upper substrate and the lower substrate to the electrode and the nanofiber matrix.
In addition,
In the piezoelectric element according to the present invention, the substrate is curved.
In addition,
In the piezoelectric element according to the present invention, a fine protrusion pattern is formed on an object contact surface of a lower substrate.
The piezoelectric device according to the present invention uses an electrospun nanofiber to form a piezoelectric polymer into an electrospinning process. The polymer is mechanically stretched by an electrostatic force. At the same time, a strong electric field causes the beta-phase dipole So as to have high piezoelectric properties.
In addition, the piezoelectric element according to the present invention improves adhesion and adhesion to the piezoelectric nanofiber matrix by van der Waals force by forming nano / micro-sized fine protrusions on the interface including the electrode, and the micro- It is embedded in the matrix and can respond to a variety of mechanical deformation modes.
In addition, the piezoelectric element according to the present invention can increase the adhesion of an object to be attached by curving the substrate or forming a fine protrusion pattern.
1 is a view showing a structure in which a micro-projection pattern is formed on an interface including electrodes in a piezoelectric element according to one embodiment of the present invention.
FIG. 2 is a diagram showing shear, torsion, bending, and pressure characteristics by using a flexible and stretchable material as an interface in a piezoelectric device according to one embodiment of the present invention.
3 is a view showing an arrangement of electrodes in a piezoelectric element as one embodiment of the present invention.
4 is a diagram showing various arrangements according to technical characteristics of the electrospun nanofiber in a piezoelectric element as one embodiment of the present invention.
5 is a view showing a structure in which a contact surface of an object is curved in a piezoelectric element according to one embodiment of the present invention.
6 is a view showing a structure in which a fine protrusion pattern of an object contact surface is formed in a piezoelectric element as one embodiment of the present invention.
Hereinafter, the present invention will be described in detail. In the following description of the present invention, a detailed description of known configurations and functions will be omitted.
The terms and words used in the present specification and claims should not be construed as limited to ordinary or dictionary meanings and should be construed in accordance with the technical meanings and concepts of the present invention.
The embodiments described in the present specification and the configurations shown in the drawings are preferred embodiments of the present invention and are not intended to represent all of the technical ideas of the present invention and thus various equivalents and modifications Can be.
The present invention has high piezoelectric properties by utilizing electrospun nanofibers and improves adhesion with piezoelectric nanofiber matrix by forming nano / micro fine protrusion patterns on an interface including an electrode, and responds to various mechanical deformation modes A piezoelectric element improved in adhesiveness and workability that can be provided.
Specifically, the piezoelectric element according to the present invention
Electrospun nanofiber matrix;
An upper substrate and a lower substrate; And
Electrode,
The upper substrate or the lower substrate has fine protrusion patterns formed on the contact surfaces of the electrospun nanofiber matrix
The electrospun nanofiber matrix may be connected to an electrode.
In the piezoelectric element,
When the piezoelectric polymer is formed by the electrospinning process, the polymer is mechanically stretched by the electrostatic force, and at the same time, a strong electric field forms a beta-phase dipole in the structure, so that it can have a high piezoelectric property.
The electrospun nanofiber matrix may have an arrangement form selected from the group consisting of a random arrangement, a one-way arrangement, and a lattice arrangement (see FIG. 4).
The arrangement of such electrospun nanofibers can be made in various arrangements according to the technical characteristics of the collection, such as 1) a random form generally by a strong electric field, 2) a dynamic rotation of the collector or anisotropy distribution of the electric field And 3) a shape of a single fiber through fine adjustment of the electrospinning jet.
The electrode may be configured to form a plurality of contact surfaces at the upper and lower ends of the nanofiber matrix, depending on the arrangement of the electrospun nanofiber matrix (see FIG. 3).
As shown in FIG. 3, by configuring the electrodes according to the shapes of the collecting arrays, various sensors or energy generating elements can be manufactured.
The micro-projection pattern may be formed on one or both of the upper substrate and the lower substrate.
The fine protrusions may be nano-sized or micro-sized, and may have a dot pattern of a circular or polygonal shape, a ridge-groove line pattern including a straight line, Alternatively, it may be a pattern having a wedge-like inclined surface rather than a straight wall by making a master mold through light irradiation, but the size and shape are not particularly limited.
The shape and size of these microprojections can be adjusted to optimize Van der Waals forces.
The micro-projection pattern may be formed through a molding or imprinting method.
Specifically, a silicon-based master mold may be manufactured through electron beam lithography or photolithography, and then molded or imprinted according to a curing method of a material desired to be finalized. In general, thermal imprinting using a thermoplastic resin and photo-curing imprinting using a photocurable resin are known.
The microprojection pattern of the interface including these electrodes may be formed with a van der waals force in conjunction with the electrospun nanofibers, thereby increasing the adhesion and adhesion.
The electrode may be formed on the substrate through a method selected from the group consisting of sputtering, evaporation, transfer, insertion, and spreading such as silver paste, The electrode forming method is not limited thereto.
For example, an electrode may be formed by sputtering, vapor-depositing or transferring an electrode such as a gold foil, inserting an aluminum sheet or a film, or applying a silver paste after forming a micro-projection pattern on an interface.
The substrate may be made of a flexible material or a hard material.
Examples of the flexible material include thermoplastic polyurethane based materials such as polydimethylsiloxane (PDMS) and polyester polyol, polyether polyol, and polycaprolactone, Resin, a photocurable resin, or a silicone-based flexible resin. The hard material may include polymethylmethacrylate (PMMA), polyvinylacetate (PVA), poly methyl methacrylate methacrylate, PMMA, polypropylene (PP), polycarbonate (PC), or cyclic olefin copolymer (COC). However, the material of the substrate is not limited thereto, Any substrate material known in the art is available.
The substrate may be thinned.
The thinning can be performed by spin coating, heat pressing, or mechanical stretching, and the thinning method is not limited thereto.
In one embodiment of the present invention, when the interface is made of a flexible material, it is made of a thin film that is spin-coated to have a durability such as folding or stretching, and can be transformed into a tube shape after final integration, It is possible to fabricate a sensor or an energy device which adheres well to the bending of the bending part.
The upper substrate and the lower substrate may have one or both of an outer detachable film and a washable film.
This is because, during the sensor integration process, it may be difficult to manipulate the thin film interface, so that it is formed as a spin coating film on a temporary film which is a detachable film or a washable film, , The operation of the thin film interface can be facilitated.
In addition,
A first step of producing a piezoelectric material as a nanofiber matrix by electrospinning;
A second step of forming a fine projection pattern on the upper substrate or the lower substrate; And
And a third step of connecting the upper substrate and the lower substrate to the electrode and the nanofiber matrix.
A method of manufacturing a piezoelectric element is provided.
In the above manufacturing method, the piezoelectric material of the first stage may be at least one selected from the group consisting of polyvinylidene fluoride (PVDF), polytrifluoroethylene (PTrFE), polyvinylidene fluoride- co-trifluoroethylene, PVDF-TrFE), polyvinylidene-co-hexafluoropropylene, PVDF-HFP, polyvinylidene-co-tetrafluoroethylene , PVDF-TFE), polyamide, polyurea, polyundecaneamide, nylon-11, polyvinylchloride (PVC), polyvinylacetate (PVAc) Polyacrylonitrile (PAN), polyvinylidenecyanide-co-vinylacetate (PVDCN-VAc), polyphenylether nitrile (PPEN) And poly-1-bicyclobutanecarbonitrile. However, the present invention is not limited thereto, and any polymeric piezoelectric material can be used.
In the above manufacturing method, it is preferable that the electrospun nanofiber matrices are manufactured in an array configuration selected from the group consisting of random arrangement, arrangement in one direction, and lattice arrangement.
In the above manufacturing method, the micro projection pattern may be formed on one or both of the upper substrate and the lower substrate.
In the above manufacturing method, the upper substrate and the lower substrate are preferably formed as a thin film.
The thin film may be thinned by spin coating, heat pressing, or mechanical stretching, but the thinning method is not limited thereto.
The electrode may be formed on a substrate by a method selected from the group consisting of sputtering, evaporation, transfer, insertion, and spreading, The forming method is not particularly limited.
The electrode may be configured to form a plurality of contact surfaces at the upper and lower ends of the nanofiber matrix, depending on the arrangement of the electrospun nanofiber matrix,
In the above manufacturing method, it is preferable that the upper substrate and the lower substrate are formed as a thin film on a detachable film or a washable film on the outside.
The washable film can be used as a whole by making the water-soluble polymer into a sheet form. Examples of the water-soluble polymer include dextran, polyacrylic acid sodium salt, polyethylene glycol (polyethylene glycol) ), Polyacrylamide, polyvinylpyrrolidone, carboxymethylcellulose sodium salt, polyacrylic acid, polyvinyl alcohol, poly-2-ethyl-2 2-ethyl-2-oxazoline, acetaldehyde dimethyl acetal, 3- (chloromethyl) benzoyl chloride, polypropylene glycol, Acrylamide, polymethylacrylic acid sodium salt, polystyrenesulfonic acid sodium salt, and the like. Pullulan and the like can be used, and a detachable film is not particularly limited and a polyimide (PI), polyester (PET) film is preferable, and a releasable silane the silane treatment can be additionally performed to lower the interfacial energy.
In addition,
In the piezoelectric element according to the present invention,
There is provided a piezoelectric device having a structure in which a fine protrusion pattern is formed on an object contact surface of a lower substrate.
The contacted object means any object capable of measuring the fine displacement.
The fine protrusions may be formed by attaching the nanoparticle matrix contact surface and the object contact surface of the lower substrate after forming fine protrusions, a method of molding the micro protrusions on the upper and lower surfaces of the lower substrate at once, And a method in which fine protrusions are attached to the bottom surface.
In addition,
In the piezoelectric element according to the present invention,
A piezoelectric element having a structure in which a substrate is curved is provided.
One or both of the upper substrate and the lower substrate may be curved, and one or both of the upper and lower surfaces of each of the upper substrate and the lower substrate may be curved.
The object contact surface means a contact surface of an object having an arbitrary free-form surface.
Examples of the object include, but are not limited to, a general mechanical part subjected to a fine fatigue load, a robot part requiring a tactile sensor, a medical device requiring fine pressure sensing, and the like. .
The curved surface may be formed to conform to the curved surface of the object contact surface, and may be molded by molding the curved surface of the object contact surface.
Hereinafter, the present invention will be described in more detail with reference to Examples. It is to be understood by those skilled in the art that these embodiments are only for describing the present invention in more detail and that the scope of the present invention is not limited by these embodiments in accordance with the gist of the present invention .
Example 1 - Manufacturing process of electrospun nanofiber
Polyvinylidene fluoride-co-trifluoroethylene (PVDF-TrFE) polymers were mixed in a ratio of acetone / dimethylformamide (8: 2 to 2: 8) 10 ~ 20 w / v%, injected into the syringe nozzle at a certain feed rate, and then subjected to electrospinning by applying a high voltage of 10 ~ 20 kV. In this way, it is captured in a random form, and it is possible to carry out electrospinning in the form of alignment according to a specific method.
Example 2 - moldings for forming projections or Imprinting Manufacturing process
Polydimethylsiloxane (PDMS) prepolymer and a curing agent were mixed at a ratio of 10: 1, using polydimethylsiloxane (PDMS) as a flexible material.
The ratio of the curing agent can be adjusted up to 15: 1 for better flexibility and up to 3: 1 for better patterning.
Since the degree of curing varies depending on the ratio, it is preferable to add a curing agent in order to bring out the nanopattern well, and to add less curing agent in order to improve the flexibility.
After mixing, the master mold is placed in a constantly patri dish and the well mixed prepolymer is poured on it.
The prepolymer was placed in an oven at 60 占 폚 to 150 占 폚 and cured for about 1 hour or overnight.
The cured portion of the polydimethylsiloxane (PDMS) was then separated from the mold.
The above-described embodiment 2 is performed by modifying a paper (HONG NAM KIM, et al., Annals of
Example 3-substrate Thin-walled process
The substrate was spin coated at 1000 ~ 5000 rpm.
In the case of polydimethylsiloxane (PDMS), a thin film is coated at a thickness of 50 to 20 μm, and a thin film coated at a thickness of less than 10 μm is diluted with toluene.
Example 4- Microprojection A process of packaging a substrate including a patterned electrode with a nanofiber matrix
In case of packaging using polydimethylsiloxane (PDMS), oxygen plasma can be applied for about 1 minute to adhere the upper and lower plates, and the prepolymer resin of the polymer is spread and hardened It may be bonded.
Since it has a multi-layer structure, a certain level of heat and pressure is applied so that the overall structure is squeezed well.
As described above, preferred embodiments of the present invention have been disclosed in the present specification and drawings, and although specific terms have been used, they have been used only in a general sense to easily describe the technical contents of the present invention and to facilitate understanding of the invention , And are not intended to limit the scope of the present invention.
It is to be understood by those skilled in the art that other modifications based on the technical idea of the present invention are possible in addition to the embodiments disclosed herein.
The piezoelectric element according to the present invention can produce a sensor / energy device sensitive to various mechanical modes due to the enhancement of the matching between the microstructure interfaces and can expect sensitivity improvement and high efficiency energy generation. As a whole, It can be manufactured as a device and can be applied in the form of a wearable device.
10: substrate
20: fine protrusion
30: nanofiber matrix
40: electrode
50: fine protrusion of the object contact surface
Claims (16)
An upper substrate and a lower substrate composed of a flexible material or a hard material; And
Electrode,
Wherein the upper substrate or the lower substrate has fine protrusion patterns formed on the surfaces of the surface of the electrospun nanofiber matrix so that the fine protrusions are embedded in the electrospun nanofiber matrix,
Wherein the electrospun nanofiber matrix is connected to an electrode,
A piezoelectric element having reactivity to a mechanical deformation mode.
Wherein the electrospun nanofiber matrix has an arrangement form selected from the group consisting of a random arrangement, an arrangement arranged in one direction, and a lattice arrangement.
Wherein the electrode is formed so as to be connected to the partial multi-surface of the upper, lower, upper and lower ends, both ends, or the lower end with respect to the electrospun nanofiber matrix.
Wherein the micro-projection pattern is formed through a molding or imprinting method.
Wherein the electrode is formed on the substrate through a method selected from the group consisting of sputtering, evaporation, transfer, insertion and spreading. Piezoelectric element.
Wherein the substrate is thinned. ≪ RTI ID = 0.0 > 11. < / RTI >
A second step of forming a fine protrusion pattern on the upper substrate or the lower substrate, which is made of a flexible material or a hard material; And
Connecting the upper substrate and the lower substrate to the electrode and the nanofiber matrix,
And a third step of forming fine protrusions on the surface of the electrospun nanofiber matrix so that the fine protrusions are embedded in the electrospun nanofiber matrix.
A method of manufacturing a piezoelectric element having reactivity to a mechanical deformation mode.
The piezoelectric material may be selected from the group consisting of polyvinylidene fluoride (PVDF), polytrifluoroethylene (PTrFE), polyvinylidene fluoride-co-trifluoroethylene (PVDF-TrFE) Polyvinylidene-co-hexafluoropropylene, PVDF-HFP), polyvinylidene fluoride-co-tetrafluoroethylene (PVDF-TFE), polyamide Polyamide, polyurea, polyundecaneamide, nylon-11, polyvinylchloride (PVC), polyvinylacetate (PVAc), polyacrylonitrile (PAN) Polyvinylidenecyanide-co-vinylacetate (PVDCN-VAc), polyphenylether nitrile (PPEN), and poly-1-bicyclobutanecarboxylate Nitrile method of producing a piezoelectric element having a reactivity with the mechanical deformation mode, characterized in that selected from the group consisting of (Poly-1-bicyclobutanecarbonitrile).
Wherein the nanofiber matrix is fabricated in a random arrangement, an arrangement in one direction, and an arrangement selected from the group consisting of a lattice arrangement.
Wherein the electrode is fabricated so as to be connected to the entire surface of the upper and lower ends, the both ends, or the lower surface of the lower surface of the nanofiber matrix.
Wherein the upper substrate and the lower substrate are made of a thin film.
Wherein the piezoelectric substrate has reactivity to a mechanical deformation mode in which a fine protrusion pattern is formed on an object contact surface of a lower substrate.
The fine protrusions may be formed by attaching the nanoparticle matrix contact surface and the object contact surface of the lower substrate after forming fine protrusions, a method of molding the micro protrusions on the upper and lower surfaces of the lower substrate at once, And attaching fine protrusions to the lower surface of the piezoelectric element.
Wherein the substrate has a curvature and is responsive to a mechanical deformation mode.
Wherein the curvilinear surface is formed by curving one or both of an upper surface or a lower surface of the upper substrate or the lower substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020160030330A KR101733154B1 (en) | 2016-03-14 | 2016-03-14 | Piezoelectric element using nanofiber by electrospinning and manufacture method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020160030330A KR101733154B1 (en) | 2016-03-14 | 2016-03-14 | Piezoelectric element using nanofiber by electrospinning and manufacture method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR101733154B1 true KR101733154B1 (en) | 2017-05-10 |
Family
ID=58743842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020160030330A KR101733154B1 (en) | 2016-03-14 | 2016-03-14 | Piezoelectric element using nanofiber by electrospinning and manufacture method thereof |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR101733154B1 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101846994B1 (en) * | 2017-10-25 | 2018-04-09 | 은성화학(주) | A Electrospinning apparatus for fabricating nano-web filter |
| WO2020235847A1 (en) * | 2019-05-21 | 2020-11-26 | 성균관대학교산학협력단 | Piezoelectric nanomaterial |
| KR102248482B1 (en) | 2020-06-02 | 2021-05-04 | 서울대학교산학협력단 | Nano piezoelectric element |
| CN113106628A (en) * | 2021-03-23 | 2021-07-13 | 浙江大学 | Flexible piezoelectric energy conversion device based on lead zirconate titanate/PVDF composite fiber |
| KR20210098811A (en) * | 2020-02-03 | 2021-08-11 | 제주대학교 산학협력단 | Piezo-phototronic gated optofluidic logic computations empowering intrinsic reconfigurable switches |
-
2016
- 2016-03-14 KR KR1020160030330A patent/KR101733154B1/en active IP Right Grant
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101846994B1 (en) * | 2017-10-25 | 2018-04-09 | 은성화학(주) | A Electrospinning apparatus for fabricating nano-web filter |
| WO2020235847A1 (en) * | 2019-05-21 | 2020-11-26 | 성균관대학교산학협력단 | Piezoelectric nanomaterial |
| KR20210098811A (en) * | 2020-02-03 | 2021-08-11 | 제주대학교 산학협력단 | Piezo-phototronic gated optofluidic logic computations empowering intrinsic reconfigurable switches |
| KR102407382B1 (en) * | 2020-02-03 | 2022-06-10 | 제주대학교 산학협력단 | Piezo-phototronic gated optofluidic logic computations empowering intrinsic reconfigurable switches |
| KR102248482B1 (en) | 2020-06-02 | 2021-05-04 | 서울대학교산학협력단 | Nano piezoelectric element |
| CN113106628A (en) * | 2021-03-23 | 2021-07-13 | 浙江大学 | Flexible piezoelectric energy conversion device based on lead zirconate titanate/PVDF composite fiber |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101733154B1 (en) | Piezoelectric element using nanofiber by electrospinning and manufacture method thereof | |
| Shao et al. | Nanoimprint lithography for the manufacturing of flexible electronics | |
| Wen et al. | Emerging flexible sensors based on nanomaterials: recent status and applications | |
| Pan et al. | Triboelectric and piezoelectric nanogenerators for future soft robots and machines | |
| Dagdeviren et al. | Recent progress in flexible and stretchable piezoelectric devices for mechanical energy harvesting, sensing and actuation | |
| CN202679272U (en) | A nanometer generator with mixed piezoelectric and triboelectric films | |
| Parameswaran et al. | Large area flexible pressure/strain sensors and arrays using nanomaterials and printing techniques | |
| CN111759315B (en) | Preparation method of self-powered electronic skin system based on laser reduction graphene/MXene composite material | |
| CN109115376A (en) | A kind of condenser type pliable pressure sensor and preparation method thereof | |
| US10903762B2 (en) | Actuator device based on an electroactive or photoactive polymer | |
| WO2014005434A1 (en) | Magnetic-field-driven nanometer friction generator | |
| US9746356B2 (en) | Sensor, method for forming the same, and method of controlling the same | |
| CN111780897A (en) | Bionic multilayer capacitive flexible pressure sensor and preparation method thereof | |
| CN103475262B (en) | Nanometer generator with piezoelectricity and frictional electricity mixed | |
| US20080014465A1 (en) | Actively switchable nano-structured adhesive | |
| CN111055554A (en) | Novel flexible intelligent fabric sensor and manufacturing method thereof | |
| Sun et al. | Recent applications of different microstructure designs in high performance tactile sensors: A review | |
| Wang et al. | A flexible capacitive tactile sensor array for prosthetic hand real-time contact force measurement | |
| CN105836696A (en) | Electric-actuating dry adherence composite structure and manufacturing process | |
| CN109639175B (en) | Friction nanometer generator, wearable sensor and preparation method of wearable sensor | |
| Oh et al. | Sensors for biosignal/health monitoring in electronic skin | |
| Cao et al. | Recent advances in physical sensors based on electrospinning technology | |
| Xin et al. | The Role of 3D Printing Technologies in Soft Grippers | |
| Shao et al. | Flexible force sensor with micro-pyramid arrays based on 3D printing | |
| CN210956725U (en) | Unidirectional bending electrostrictive polymer micro-driver |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant |