KR101693152B1 - Special Gas Valve Box - Google Patents

Abstract

The present invention relates to a valve box for special gas, comprising: a box-shaped case installed in a special gas line supplied to a semiconductor or liquid crystal display (LCD) manufacturing line, and including a plurality of pairs of through-holes; a cover installed in a front surface of the case to seal the inside of the case; a pair of studs combined with both sides of a pipe, and combined with the through-hole to fix the pipe; a plurality of gas valves combined with multiple pipes, respectively, to open/close the pipe; a plurality of manometers combined with the multiple pipes, respectively, to represent the pressure of the pipe; and a vacuum tube connected to one side of the case, and combined with a vacuum module of the semiconductor or LCD manufacturing line to maintain the inside of the case in a vacuum state. According to the present invention, since the inside of the case can be maintained in the vacuum state by the vacuum tube combined with the vacuum module of the semiconductor or LCD manufacturing line, the remaining gas inside the case can be removed, so an accident, such as explosion, fire, etc., can be prevented.

Description

{Special Gas Valve Box}

The present invention relates to a valve box, and more particularly, to a valve box installed in a special gas supply line used in a semiconductor or LCD production line.

There is always a risk of explosion and fire in factories, refineries, gas refineries and factories handling flammable materials, and there is a risk of environmental pollution, explosion and explosion due to pipeline leakage in the gas supply lines used in these areas. Special care must be taken not to be exposed to the risk of explosion and fire, since the risk of safety accidents such as fire is inherent.

Therefore, the valve box is an essential element and it should be manufactured in a sealed or explosion-proof box form, installed and managed on the wall or floor, and promptly checked and taken by the manager in case of abnormal situation.

Korean Patent Laid-open Publication No. 10-2014-0055591 (May 2014), "explosion-proof cable box" Korea Registered Utility Model 20-0415779 (2006.05.01), "Waste Container Box for Piping Connection"

An object of the present invention is to provide a special gas valve box for detecting a leak of a special gas used in a semiconductor or LCD production line and notifying a manager of the leakage of the special gas and discharging the leaked gas to the outside to prevent a safety accident such as environmental pollution or fire or explosion .

The special gas valve box according to one aspect of the present invention for realizing the object of the present invention is installed in a special gas line supplied to a semiconductor or LCD production line, is embedded in a wall, A box-shaped case having a pair of through-holes formed on both sides thereof so as to pass therethrough; A cover disposed on a front surface of the case to seal the inside of the case; A pair of stubs coupled to both sides of the pipe and coupled to the through holes to fix the pipe; A plurality of gas valves respectively connected to the plurality of pipes to open and close the pipes; A plurality of pressure gauges coupled to the plurality of pipelines to indicate the pressure of the piping; And a vacuum tube connected to one side of the case and coupled to the vacuum module of the semiconductor or display production line to maintain the inside of the case in a vacuum state.

The apparatus may further include a leak detection sensor disposed inside the case and detecting a gas leak in the pipe.

The apparatus may further include a limit switch disposed inside the case to detect an opening and closing state of the cover.

The LED module may further include an LED module disposed inside the case and interlocking with the leakage sensor and the limit switch, the LED module being different in color depending on an internal state of the case and an open / closed state of the cover.

The alarm module may further include an alarm module that generates an alarm sound when the leakage sensor senses leakage of gas or interlocks with the leakage sensor and the limit switch or when the limit switch detects opening of the cover .

 The cover may include a plurality of door closers disposed on one side of the case to be engaged with the case and opening and closing the cover at a constant speed and fixing the cover when the cover is opened.

In addition, the cover may include an open sensor capable of opening the cover using at least one of an administrator card and a control key.

Here, the open sensor may include an administrator information unit for registering and storing manager information using at least one of an administrator card and a control key; And a log record storage unit for storing a log record of the manager who has opened the cover.

Furthermore, the cover may be made of a transparent material so that the inside of the case can be visually recognized.

The case includes a bracket for fixing the gas valve and the pressure gauge in combination with the gas valve and the pressure gauge; And a plurality of supports for fixing the plurality of pipes.

Here, the support may include: a plurality of clips coupled to the plurality of pipes to fix the plurality of pipes; A frame provided in the case so as to correspond to a length of the width of the case and having a groove formed therein for slidingly moving the plurality of clips; And a pair of stoppers disposed on both sides of the frame to prevent a plurality of the clips from separating from the frame.

The stub includes: a bolt-shaped fixing member formed with a pipe hole through which the pipe passes, and inserted into the through hole at one side of the through hole; And a nut-shaped coupling member coupled to the fixing member at the other side of the through hole to fix the pipe and to seal the inside of the case.

The stub has a pipe hole at the center thereof and a cross section formed in a cylindrical shape corresponding to the through hole so as to be inserted into the through hole at one side of the through hole and to be coupled with the pipe at both sides, A body having an engaging protrusion formed on an outer circumferential surface thereof so as to be fixed to the through hole; And a nut-shaped coupling member coupled to the thread of the body at the other side of the through hole to fix the body to the through hole

The vacuum tube may further include a vacuum valve coupled to the vacuum tube to open and close the vacuum tube.

According to the gas explosion device according to the embodiment of the present invention,

First, since the inside of the case can be maintained in a vacuum state by the vacuum tube coupled with the vacuum module of the semiconductor or LCD production line, the residual gas inside the case can be removed, thereby preventing an accident such as explosion or fire.

Second, since a leak sensor is provided inside the case to check whether or not a gas leak is present, an accident caused by a gas leak can be prevented.

Third, a limit switch is provided inside the case to detect whether the cover is open or closed, so that the open / close state of the cover can be easily managed.

Fourth, an alarm module interlocked with the leak detection sensor and the limit switch is provided to generate a warning sound for the gas leakage state and the cover open state, thereby promptly informing the manager of gas leakage or opening of the cover, It is possible to take prompt action.

Fifth, the state of the inside of the case can be easily grasped by the LED module having different colors according to the inside of the case and the open / closed state of the cover.

Sixth, the cover is equipped with a door closure to open and close the cover at a constant speed, and it is easy to work inside the case because the cover can be fixed when opened.

Seventh, security can be enhanced because the cover can be opened by recognizing only the identification information of the administrator by the open sensor.

Eighth, the open sensor includes a log record storage unit, and can store the log record of the manager who opened and closed the cover, so that the record of opening and closing can be managed.

Ninthly, the cover is made of a transparent material so that the manager can visually confirm the inside of the case and can transmit light of the LED module, thereby facilitating management.

In the tenth, the pipe can be firmly fixed to the case by the stub, the through hole can be stably sealed, and the inside of the case can be sealed.

Eleventh, a vacuum valve is provided to release the vacuum state when the cover is opened, so that it is easy to open the cover.

The twelfth, the bracket can firmly hold the gas valve and the connection between the pressure gauge and the case.

Third, the support can be provided and the pipe can be stably fixed in the case.

1 is an application perspective view illustrating a special gas valve box according to an embodiment of the present invention.
2 is a conceptual view showing a special gas valve box according to an embodiment of the present invention.
3 is a perspective view illustrating a special gas valve box according to an embodiment of the present invention.
4 is a perspective view of the case shown in Fig.
5 is a perspective view of the bracket.
6 (a) is a combined perspective view of the gas valve and the bracket, and (b) is a rear perspective view.
Figure 7 is a perspective view of the support shown in Figure 3;
8 is a perspective view of the cover shown in Fig.
9 is a block diagram of the open sensor shown in Fig.
10 is a cross-sectional view of the stub shown in Fig.
11 is an assembled perspective view of the stub and piping shown in Fig.
12 is a perspective view of a stub according to another embodiment.
13 is an assembled perspective view of the stub and piping shown in Fig.
14 is a block diagram of a leak detection sensor, a limit switch, an LED module, and an alarm module.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Note that, in the drawings, the same components are denoted by the same reference symbols as possible. Further, the detailed description of known functions and configurations that may obscure the gist of the present invention will be omitted. For the same reason, some of the components in the drawings are exaggerated, omitted, or schematically illustrated.

2 is a conceptual view illustrating a special gas valve box according to an embodiment of the present invention. FIG. 3 is a cross-sectional view of a special gas valve box according to an embodiment of the present invention. 6 is a perspective view of the case shown in Fig. 3, Fig. 5 is a perspective view of the bracket, Fig. 6 (a) is a combined perspective view of the gas valve and the bracket, It is a perspective view.

7 is a perspective view of the support shown in Fig. 3, Fig. 8 is a perspective view of the cover shown in Fig. 3, Fig. 9 is a block diagram of the opening sensor shown in Fig. 7, FIG. 12 is a perspective view of a stub according to another embodiment, FIG. 13 is a perspective view of a stub and a pipe shown in FIG. 12, and FIG. And Fig. 14 is a block diagram of the leak detection sensor, the limit switch, the LED module and the alarm module.

1 to 14, a gas explosion device 100 of the present invention installed in a special gas line supplied to a semiconductor or LCD production line includes a case 110, a cover 120, a stub 130, (140), a pressure gauge (150), and a vacuum tube (160).

The case 110 is buried in the wall 20 and has a front face opened and a plurality of through holes 111 are formed on both sides of the case 110 so that the plurality of pipes 10 can pass through.

The case 110 includes a bracket 112 and a support 113.

The bracket 112 is engaged with the gas valve 140 and the pressure gauge 150 to fix the gas valve 140 and the pressure gauge 150 to the case 110.

The combination of the case 110 and the bracket 112 and the combination of the gas valve 140 and the pressure gauge 150 and the bracket 112 can be combined by the wrench bolts L. [

Therefore, the coupling between the case 110 and the gas valve 140 and the pressure gauge 150 can be firmly maintained by the bracket 112.

A plurality of supports 113 are coupled to the case 110 to fix the plurality of pipes 10.

The support 113 includes a clip 113a, a frame 113b, and a stopper 113c.

A plurality of clips 113a are provided and are combined with a plurality of pipes 10 to fix the plurality of pipes 10.

The frame 113b is provided so as to correspond to the length of the case 110 and is disposed inside the case 110 and the groove G is formed so that the plurality of clips 113a can be slidably moved.

The stopper 113c is provided as a pair and slidably moves on both sides of the frame 113b to prevent the plurality of clips 113a from separating from the frame 113b.

The cover 120 is disposed on the front surface of the case 110 to seal the inside of the case 110.

The cover 120 includes a door closure 121 and an opening sensor 122.

A plurality of door closers 121 are provided at one side of the cover 120 coupled to the case 110 to open and close the cover 120 at a constant speed and to fix the cover 120 when the cover 120 is opened do.

In this way, when the cover 120 is opened, the door closure 121 fixes the cover 120, so that it is easy for the manager of the case 110 to perform internal work.

The open sensor 122 opens the cover 120 using at least one of the manager card and the control key.

Here, the open sensor 122 may recognize the manager card and open the cover 120, or may open the cover 120 using the manager's control key.

Therefore, only the administrator can open the cover 120, thereby enhancing security.

The open sensor 122 includes an administrator information section 122a and a log record storage section 122b.

The manager information section 122a registers and stores manager information using at least one of an administrator card and a control key.

The log record storage unit 122b stores the log record of the manager using the information of the administrator who opened the cover 120. [

In this way, since the log recorder 122b is provided to store the log record of the manager who has opened and closed the cover 120, the opening and closing record of the cover 120 can be managed.

The cover 120 may be made of a transparent material so that the inside of the case 110 can be visually checked by a manager.

Therefore, the administrator can visually confirm the inside of the case 110, and can transmit the light of the LED module 190, which will be described later, so that the state inside the case 110 can be confirmed from afar, can do.

The stubs 130 are coupled to both sides of the pipe 10 and are coupled to the through holes 111 of the case 110 to fix the pipe 10.

As shown in Figs. 10 and 11, the stub 130 includes a fixing member 131 and a coupling member 132. Fig.

The fixing member 131 is formed in the shape of a bolt and has a pipe hole 131a through which the pipe 10 passes at the center. The fixing member 131 is fixed to the through hole 111 from one side of the through hole 111 formed in the case 110 .

Here, the pipe 10 passing through the pipe hole 131a is joined to the fixing member 131 by welding (W).

The coupling member 132 is formed in a nut shape and is coupled to the fixing member 131 at the other side of the through hole 111 formed in the case 110 to fix the piping 10 and seal the inside of the case 110 .

Therefore, the pipe 10 can be firmly fixed in the case 110, and the through hole 111 of the case 110 is sealed by the engagement of the fixing member 131 and the engaging member 132, 110).

In addition, the stub 130 according to another embodiment includes a body 133 and a coupling member 134 as shown in Figs. 12 and 13.

The body 133 is formed with a pipe hole 133a at the center thereof and has a cross section in the shape of a tube corresponding to the through hole 111. The body 133 is inserted into the through hole 111 from one side of the through hole 111, The piping 10 is coupled, a thread is formed on the outer circumferential surface, and a hook 133b is formed on the outer circumferential surface so as to be fixed to the through hole 111.

The coupling member 134 is provided in the form of a nut and is coupled to the thread of the body 133 at the other side of the through hole 111 to fix the body 133 to the through hole 111.

A plurality of gas valves 140 are provided and are respectively connected to a plurality of pipes 10 to open and close the pipes 10.

A plurality of pressure gauges 150 are provided and are respectively coupled to the plurality of piping 10 to indicate the pressure of the piping 10.

The vacuum tube 160 is connected to one side of the case 110 and is coupled with a vacuum module of a semiconductor or LCD production line to maintain the inside of the case 110 in a vacuum state.

Accordingly, since the inside of the case 110 can be maintained in a vacuum state by the vacuum tube 160 coupled with the vacuum module of the semiconductor or LCD production line, the residual gas inside the case 110 can be discharged to the outside, It is possible to prevent accidents such as gas explosion or fire.

The special gas valve box 100 further includes a leakage detection sensor 170, a limit switch 180, an LED module 190, an alarm module 200 and a vacuum valve 210.

The leak detection sensor 170 is disposed inside the case 110 and detects a gas leak in the pipe 10. [

Accordingly, it is possible to detect the presence or absence of gas leakage inside the case 110 in real time to prevent an accident caused by gas leakage.

The limit switch 180 is disposed inside the case 110 and detects the open and closed states of the cover 120. [

Therefore, it is possible to detect whether the cover 120 is open or closed, and thus the open / close state of the cover 120 can be easily managed.

The LED module 190 is disposed inside the case 110 and is interlocked with the leakage sensor 170 and the limit switch 180 so that the LED module 190 may be colored differently depending on the inner state of the case 110 and the open / .

Therefore, the state of the inside of the case 110 can be easily grasped by the LED module 190 having different colors according to the state inside the case 110 and the open / closed state of the cover 120.

The alarm module 200 is interlocked with the leakage detection sensor 170 and the limit switch 180 so that when the leakage detection sensor 170 detects leakage of gas or when the limit switch 180 detects opening of the cover 120 , It generates a warning sound.

Accordingly, it is possible to generate a warning sound regarding the gas leakage state inside the case 110 and the open state of the cover 120, promptly inform the manager when the gas leakage state or the cover 120 is opened, It is possible.

The operation of the LED module 190 and the alarm module 200 will be described by way of example. When there is no abnormality in the case 110 at all times, the LED module 190 shows green color, When the leakage sensor 170 detects leakage, the LED module 190 indicates red flashing and the alarm module 200 sounds a warning sound.

Also, when the cover 120 is opened, the LED module 190 indicates an orange flashing, and the alarm module 200 sounds a warning sound.

Here, the color of the LED module 190 and the presence / absence of blinking can be freely set by the administrator.

Therefore, the manager can easily grasp the state inside the case 110 with the color of the LED module 190 from a distance.

The vacuum valve 210 is connected to the vacuum tube 160 to open the vacuum tube 160.

In the special gas valve box 100 of the present invention, since the inside of the case 110 is in a vacuum state, the cover 120 can not be opened normally.

Accordingly, after the vacuum tube 160 is closed by using the vacuum valve 210, the cover 120 can be opened to perform maintenance in the case 110. [

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined in the appended claims. It will be possible.

110 ... case 111 ... through hole
112 ... Bracket 113 ... Support
120 ... Cover 121 ... Door Closer
122 ... open sensor 130 ... stub
131 ... fixing member 132 ... engagement member
133 ... body 134 ... engagement member
140 ... gas valve 150 ... pressure gauge
160 ... vacuum tube 170 ... leak detection sensor
180 ... Lift switch 190 ... LED module
200 ... alarm module 210 ... vacuum valve

Claims (14)

In a special gas valve box installed in a special gas line supplied to a semiconductor or LCD production line,
A box-shaped case which is embedded in a wall, has a front surface, and has a pair of through holes on both sides thereof so that a plurality of pipes can pass through;
A cover disposed on a front surface of the case to seal the inside of the case;
A pair of stubs coupled to both sides of the pipe and coupled to the through holes to fix the pipe;
A plurality of gas valves respectively connected to the plurality of pipes to open and close the pipes;
A plurality of pressure gauges coupled to the plurality of pipelines to indicate the pressure of the piping; And
And a vacuum tube connected to one side of the case and coupled with the vacuum module of the semiconductor or display production line to maintain the inside of the case in a vacuum state,
The cover
And a plurality of door closers disposed on one side of the case to be engaged with the case and opening and closing the cover at a constant speed and fixing the cover when the cover is opened,
And an open sensor capable of opening the cover using at least one of an administrator card and a control key,
The open sensor
An administrator information section for registering and storing manager information using at least one of an administrator card and a control key; And
And a log record storage unit for storing a log record of the manager who has opened the cover,
The cover
The case is made of a transparent material so that the inside of the case can be visually recognized,
In this case,
A bracket coupled to the gas valve and the pressure gauge to fix the gas valve and the pressure gauge; And
And a plurality of supports for fixing the plurality of pipes,
In the support,
A plurality of clips coupled to the plurality of pipes to fix the plurality of pipes;
A frame provided in the case so as to correspond to a length of the width of the case and having a groove formed therein for slidingly moving the plurality of clips; And
And a pair of stoppers disposed on both sides of the frame to prevent a plurality of the clips from separating from the frame,
The stub includes:
A bolt-like fixing member formed with a pipe hole through which the pipe passes, and inserted into the through hole at one side of the through hole; And
And a nut-shaped coupling member coupled to the fixing member at the other side of the through hole to fix the pipe and to seal the inside of the case,
And a vacuum valve coupled to the vacuum tube to open and close the vacuum tube. The method according to claim 1,
Further comprising a leakage sensor disposed inside the case for detecting gas leakage from the pipe. 3. The method of claim 2,
Further comprising a limit switch disposed inside the case for sensing an opening and closing state of the cover. The method of claim 3,
Further comprising an LED module disposed inside the case and interlocked with the leak detection sensor and the limit switch, the LED module being different in color depending on an inner state of the case and an open / closed state of the cover. . 5. The method of claim 4,
And an alarm module interlocked with the leakage sensor and the limit switch to generate a warning sound when the leakage sensor senses leakage of gas or when the limit switch detects opening of the cover. Special gas valve box. delete delete delete delete delete delete delete delete delete

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