KR101654618B1 - Method of obtaining high resolution triangulated point array structure and high resolution triangulated point array lithography method - Google Patents

Abstract

A method for acquiring a high-resolution triangular-point array structure that is a regular triangular overlapping structure by superimposing in accordance with optical modulation steps of a square unit structure of image centers reflected from spatial light modulator fine mirrors and projected onto a substrate, and a high- A lithographic method is provided. A method for acquiring a high resolution triangular point array structure includes the steps of determining a positive triangular threshold value T, determining a horizontal cell number A and a vertical cell number B of the square unit structure, wherein the horizontal cell number A and the vertical cell number B are And determining the superposition resolution D, wherein the superposition resolution D is set so that the positive triangular angle error E calculated as the horizontal axis number A, the vertical axis number B, and the superposition resolution D is equal to or smaller than the positive triangular threshold value T As shown in FIG. The present invention provides a mathematically method for analyzing a superposition structure that varies depending on overlapping pitch to make a superposition structure formed on a substrate a high resolution triangle point array structure almost equal to a level of a triangle superposition structure.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a high resolution triangular array array structure acquisition method and a high resolution triangular array array lithography method,

The present invention relates to a method of acquiring a high-resolution triangular-point array structure, and more particularly, to a method of acquiring a high-resolution triangular-point array structure formed on a substrate by superposing a square unit structure in the form of a square array of image centers reflected from spatial light modulator fine mirrors, Resolution triangular array structure in the form of a regular triangular array, and a lithography method using the same.

In a digital lithography system using a spatial light modulator or a digital mirror device, the micromirrors constituting the micro mirror arrangement of the spatial light modulator are arranged on a time-varying substrate surface The pattern is exposed by selectively reflecting light beams. Whether or not the light beam is reflected by the micro mirror array corresponding to each substrate movement serves as a partial mask and the total sum of whether or not the light beam is reflected by the micro mirror array corresponding to the movement of the entire substrate acts as a complete digital mask . Therefore, digital lithography using a spatial light modulator can be regarded as an operation of generating mask data suitable for a pattern and each substrate movement and transferring them to the micro mirror controller according to substrate movement, The relative configuration of the centers determines the patterning accuracy of the exposure pattern.

Currently, maskless lithography or digital lithography methods using various spatial light modulators have been patented or filed at home and abroad. Of these, image centers related to the present invention A patent referring to the relative arrangement structure is disclosed in U.S. Patent No. 6,870,604 issued to Ball Semiconductor Inc of United States of America as "High Resolution point array", or in U.S. Patent No. 10-0978118, invented by the present inventors, Digital lithography "or 10-0999516," regular lithography method ". Accordingly, the relative arrangement structure of image centers related to the resolution or resolution, which is the basis of the present invention, can be specifically divided as follows.

In the present invention, in consideration of the beam image arrangement reflected by the fine mirror arrangement of the spatial light modulator and projected onto the substrate, regardless of the respective beam image profile, the relative arrangement of the centers of the beam images (hereinafter referred to as image centers) (hereinafter referred to as " image center structure ").

The image center structure includes an image center structure (hereinafter referred to as a unit structure) and a superimposed image center structure (hereinafter referred to as a superposition structure) formed by superposition of unit structures from an initial position to a final position. Respectively.

The unit structure (image center structure in optical modulation step unit) has a unit structure in the form of a square array (hereinafter referred to as a square unit structure) 70011 and a unit structure in the form of a rectangular array Unit structure) (70021).

The superposition structure (superimposed image center structure formed by superposing the unit structure from the initial position to the final position) is a superposition structure in the form of a perfect square arrangement (hereinafter referred to as a square superposition structure ), A superposition structure having a perfect triangle arrangement type (hereinafter, referred to as a triangle superposition structure), and a superposition structure (hereinafter referred to as a normal superposition structure) including a normal triangle arrangement structure including both a square superposition structure and a remaining superposition structure do.

The triangle constituting the general superposition structure is not a perfect equilateral triangle, but there is a deviation or an error from a perfect equilateral triangle. In the present invention, a triangle whose error from a perfect triangle of a triangle is equal to or smaller than a user specified positive triangular threshold value (for example, 5%) is referred to as a regular triangle, and a normal overlapping structure composed of the regular triangles is referred to as a high- It is called high-resolution triangular-point array structure.

 The technique of the present invention is a technique relating to a superposition structure related to resolution or resolution, and can be specifically divided as follows.

1. Techniques for forming a square superposition structure 70012 using a square unit structure 70011 projected onto a substrate by a spatial light modulator are described in U.S. Patent No. 6,870,604 entitled "High Resolution point array" or 10-0978118, Resolution digital lithography "or 10-0999516," regular lithography method ", and the squares of the square overlapping structures according to the three patents are perfectly square.

2. A technique for forming a general superposition structure of triangles using a square unit structure 70011 projected onto a substrate by a spatial light modulator is included in "super resolution digital lithography " of 10-0978118, The triangles of nested structures are not perfect equilateral triangles and there is no mention of deviations or errors from perfect equilateral triangles.

3. The technique of forming the equilateral triangle superposition structure 70022 using the rectangular unit structure 70021 projected onto the substrate by the spatial light modulator is included in the "regular lithography method" of 10-0999516, The triangle of structure is the perfect equilateral triangle. Therefore, the triangular overlapping structure is a perfect honeycomb structure.

In addition to the background art directly related to the three inventions described above, the background art of the present invention is a "normal lithography method" of 10-0999516, invented by the present inventors and patented, or " Resolution digital lithography "or 10-0989863" Digital three-dimensional lithography method "or 10-0868242" In-line virtual masking method for maskless lithography "or 10-0655165" Occupancy-based pattern generation method for maskless lithography " "And the patents registered as patents by the inventors of the present invention are incorporated herein by reference in the specification of the present application.

In a maskless lithography system using a spatial light modulator, the fine mirror array of the spatial light modulator is rotated at a predetermined angle with respect to the moving direction of the substrate, and the light beams, which are selectively reflected on the substrate surface, The degree of the pattern as a result of the exposure is determined by the arrangement of the light beams reflected by the fine mirror and the intensity distribution of the light beam as the rotation angle of the fine mirror array is decreased, It is known that as the overlapping pitch in which the structures overlap is reduced, the overlapping pitch is improved. However, depending on the setting of the overlap pitch, in some cases, even if the overlap pitch is decreased, the degree of the pattern as a result of exposure is not improved but rather degraded. In some cases, Resolution. Therefore, a careful analysis of the superposition structure related to the rotation angle and overlapping pitch of the fine mirror array is needed.

1. 10-0978118, "Super Resolution Digital Lithography" 2. 10-0999516, "Regular lithography method" 3. "Digital three-dimensional lithography method" of 10-0989863 4. 10-0868242, "In-line virtual masking method for maskless lithography" 5. 10-0655165 "Occupancy Area Based Pattern Generation Method for Maskless Lithography" 6. "High Resolution point array" of U.S. Patent No. 6,870,604,

1. 2014, Proxy delta lithography method: Improving pattern fidelity and exposure dose effectiveness of spatial light modulation based lithography, Microelectronic Engineering, Vol. 123, pp. 2. 2013, "Adjustment of Image Decomposition Mode and Reflection Criterion Focusing on the Critical Dimensionality and Exposure Dose Effectiveness of Diffraction Effects in Optical Microlithography Using a Digital Micromirror Device", Optical Microlithography XXVI, Proc. of SPIE Vol. 8683, pp.1-10 3. 2012 "Influence of dynamic sub-pixelation on exposure intensity distribution under diffraction effects in spatial light modulation based lithography", Microelectronic Engineering, Vol.98, pp.125-129 4. 2011 "Spatial light modulation based 3D lithography with single scan virtual layering", Microelectronic Engineering, Vol.88, pp.2117-2120 5. 2010 "Delta lithography method to increase CD uniformity and throughput of SLM-based maskless lithography", Microelectronic Engineering, Vol.87, pp.1135-1138 6. 2007 "Lithography upon Micromirror", Computer-Aided Design, Vol.39, No.3, pp.202-217 7. 2006 "Lithography using Microelectronic Mask ", Journal of Robotics and Mechatronics Vol. 18 No. 6, pp.816-823

Since the lithography method based on the rotation angle of the micro mirror array proposed in US Pat. No. 6,870,604 has been proposed focusing on the rotation angle of the micro mirror array, no description is made on the superposition structure that varies depending on the overlap pitch. As evidenced by the specification of the "normal lithography method ", the overlapping pitch has some problems in that the degree of the actually exposed pattern is larger than the determined resolution.

The overlapping pitch-based lithography method proposed in the above-mentioned " super resolution digital lithography "is not a regular triangle overlapping structure composed of perfect equilateral triangles but a general deviation having a random deviation from a perfect triangle or a general We propose a general superposition structure consisting of triangles. Since the number of projected images in the vertical direction mirror of the unit structure that is the basis of the superposition structure is derived only 1, the scope of application of the general superposition structure is limitedly proposed.

It is possible to increase the projection area while maintaining the resolution without increasing the total number of micro mirrors involved in the exposure, which is essential for accelerating the application of the mass production process of the actual substrate of the digital lithography using the spatial light modulator, 10-0999516 "Regular lithography method" has been filed and patented as a method for generating or transmitting mask data at a very high speed by quantitatively lossless compression. However, the technique of forming a perfect triangle superimposed structure 70022 by using a rectangular unit structure 70021 projected onto a substrate by a spatial light modulator, which is a typical technique proposed in the "regular lithography method" The difficulty of the projection technique and the high cost of the projection apparatus required to make the unit structure of the image centers projected onto the substrate by the spatial light modulator into the rectangular unit structure 70021 have not become commonplace. Only a technique of forming a square superposition structure 70012 of a square using the square unit structure 70011 is used.

It is obvious that the equilateral triangle superimposing structure 70022 made of a perfect equilateral triangle is the best digital lithography patterning technique that maximizes the accuracy of the exposed pattern. Accordingly, there is a need for a method of improving the above-described prior art in view of the above problems of the prior art. Furthermore, the problem of the difficulty of the projection technique and the high cost of the projection apparatus required to make the unit structure of the image centers projected onto the substrate by the spatial light modulator composed of the square mirror array into the rectangular unit structure 70021 is solved, The superposition structure 70022 consisting of a complete equilateral triangle with the highest patterning accuracy, taking all the superposition structures that vary depending on the superposition pitch when the number of projected images of the longitudinal mirrors of the unit structure serving as the basis of the structure is one or more, There is a desperate need for a method or a technique that can be widely applied by forming a high-resolution regular triangle superimposition structure very close to a triangle.

The problem to be solved by the present invention is shown in Fig. When the unit structure of the image centers projected onto the substrate by the spatial light modulator is the square unit structure 70011 shown in FIG. 1, as described in the "regular lithography method" in the above prior art document, If the unit structure of the image centers projected onto the substrate by the spatial light modulator is a rectangular unit structure 7002 shown in Fig. 1, which is a square unit structure 7002 shown in Fig. 1, It is possible to obtain a triangle overlapping structure 70022 made up of a perfect triangle. However, as described in the "regular lithography method" in the above-mentioned patent document 10-0999516, the unit structure of the image centers projected onto the substrate by the spatial light modulator is not a rectangular unit structure 70021 shown in Fig. 1 In the case of the square unit structure 70011 shown in FIG. 1, it is impossible to obtain the equilateral triangle overlapping structure 70022 of the perfect equilateral triangle shown in FIG. That is, when the unit structure of the image centers projected onto the substrate by the spatial light modulator is the square unit structure 70011, a normal superposition structure with deviation or error from the perfect equilateral triangle is always obtained. Or the accuracy of the pattern exposed by the error is reduced.

Therefore, it is an object of the present invention to provide a lithographic apparatus and a lithographic apparatus using the spatial light modulator, in which the superposition structure that varies depending on the superimposition pitch is closely analyzed and the superposition structure formed on the substrate by superposition of the square unit structure 70011 shown in FIG. The present invention provides a digital lithography method that guarantees regularity, accuracy, efficiency, and economy together by mathematically suggesting a method for making the structure a high-resolution triangular-point array structure substantially equal to the level of the equilateral triangle structure 70022 shown in Fig. .

One aspect of the present invention is a method for obtaining a high-resolution triangular-point array structure which is a normal triangular overlapping structure by superposition according to light modulation steps of a square unit structure of image centers reflected from a spatial light modulator fine mirrors and projected onto a substrate . A method of obtaining a high resolution triangular point array structure according to an aspect of the present invention includes the steps of determining a positive triangular threshold value T, determining a horizontal cell number A and a vertical cell number B of the square unit structure, The number of vertical cells is B and the number of vertical cells is B, and the normal triangle error E calculated as the overlapping resolution D is the number of vertical cells A, To be less than or equal to the triangular threshold value T. [ The step of determining the superposition resolution D includes the steps of calculating a mirror angle? As the number of horizontal cells A and the number of vertical cells B, and calculating a superposition resolution S as the number of horizontal cells A, the number of vertical cells B, And further comprising: The method of acquiring a high resolution triangle point array structure further comprises the step of determining the superposition resolution D by overlapping the overlap resolution S, the given image center spacing C, and the superposition resolution D, Determining a pitch P; And obtaining a regular triangle overlapping structure formed by a square unit structure inclined to the mirror angle? From an initial position to a final position according to the overlapping pitch P. The mirror angle θ is calculated as θ = tan ^-1 (B / A) radian, and the overlap resolution S is calculated as S = (A ² + B ² ) ^(1/2) / D . Moreover, the positive triangular error E is E = 100 {max {1, μ, [1 + μ 2 -2μcos (ρπ / 3)] (1/2)} / min {1, μ, [1 + μ 2 (Cos? - LS)]} / 2) cos ( ^-1 / ²⁾ } - 1}, and the coincidence factor? And the coincidence factor? S [integer (cos? / S)] - 0.5, where B is an even number, and each matching factor ρ is ρ = 3 tan ^-1 [sin θ / (cos θ- (Cos? / S)] - 0.5S}? 0, or when B is an even number and {cos? - S [integer (B / 2), and the mirror angle θ is θ = tan ^-1 (B / A) radian and the superposition resolution S is S = (A ² + B ² ) ^(1/2) / D. Further, the overlap pitch P is calculated as P = HC (A ² + B ² ) ^(1/2) / D.

According to another aspect of the present invention, there is provided a high resolution triangle point array lithography method. A high resolution triangle point array lithography method comprises the steps of obtaining the high resolution triangle point array structure by a method of obtaining a high resolution triangle point array structure according to an aspect of the present invention, And a rotation angle at which the image arrangement projected on the substrate by the fine mirror arrangement on the spatial light modulator forms the direction opposite to the movement of the substrate is set to be equal to the overlapping pitch P, And a step of performing lithography as a regular triangle overlapping structure by dividing the inter-beam gap and performing lithography while adjusting the angle to be equal to the angle &thetas;.

The overlapping structure that varies according to the overlapping pitch according to the present invention is closely analyzed and the overlapping structure formed on the substrate by the overlapping of the square unit structure 70011 shown in Fig. 1 is referred to as a level of the equilateral triangle overlapping structure 70022 shown in Fig. 1 Resolution triangular-point array structure, such as < RTI ID = 0.0 > a < / RTI >

Therefore, the regularity, accuracy, efficiency, and economy of the digital lithography method, the digital holography method, and the head-up display technique are improved.

1 is a view showing a square unit structure, a square overlapping structure, a rectangular unit structure, and a triangle overlapping structure.
2 is a diagram showing a unit structure based on the entire light modulation step together with an image cell.
Fig. 3 is a view showing unit structures in the initial and final light modulation steps together with image cells. Fig.
4 is a diagram showing a superposition structure which is a set of unit structures based on the entire light modulation step.
FIG. 5 is an enlarged view of an overlapping structure centering on image centers 10038 and 10039.
FIG. 6 is a view showing an overlapping structure analyzed based on image centers 10038 and 10039.
Fig. 7 is a diagram showing a basic structure of a large triangle.
FIG. 8 is a diagram showing a superposition structure including an error generated when the number of unit steps is not an integer. FIG.
9 is an enlarged view of a superposition structure including an error generated when the number of unit steps is not an integer.
Figure 10 shows an example of image centers located in different initial rows that divide between two parallel straight lines formed by the horizontal movement according to the light modulation step of the image centers located in the same initial row, Together with the cell.
11 is a diagram showing a relationship with image centers located in different initial rows dividing a large triangle formed by image centers located in the same initial row into small triangles.
12 is a diagram showing a basic small triangle overlapping structure.
13 is a flowchart briefly showing a method of acquiring a high resolution triangular point array structure according to an embodiment of the present invention.
14 shows high resolution triangular point array lithography and square superposition structure lithography results by a Gaussian beam having a radius of 5 nanometers.
15 shows high resolution triangle point array lithography and square superposition structure lithography results by a Gaussian beam whose radius is equal to the overlapping pitch.
16 is a diagram showing a 2 micrometer G pattern used as an example of an input drawing.
Figure 17 shows the result of exposing a 2 micrometer G pattern by high resolution triangle point array lithography and square superposition structure lithography with a Gaussian beam having a radius of 0.25 micrometers.
18 is a diagram showing a result of a critical shape error measurement for comparing positions of one-to-one correspondence points of an input drawing and a lithography result.
19 is a diagram showing the frequency of occurrence of the measured critical shape error.

In a digital lithography using a spatial light modulator, an image center formed on a substrate, which is an object to be moved from a predetermined initial position to a predetermined final position by light beams reflected by fine mirrors of a light modulator in a fixed position, The degree of the pattern is determined by the superposition structure of the patterns.

A method for generating a high resolution triangular point array structure according to one aspect of the present invention is introduced as a simplified flow chart in FIG.

FIG. 2 is a view showing an example of an image of a substrate, which is an object to be moved from a predetermined initial position to a predetermined final position by being reflected by three fine mirrors in 10 rows in a fixed position, The unit structures of the image centers formed on the image display unit are shown together with the image cells by the optical modulation step or the optical modulation switch unit. 3 shows only the initial unit structure 10000 and the final unit structure 19400 together with the image cells in the unit structures of the image centers shown together with the image cells in the overall light modulation step of FIG.

The boundary between the blue rectangles 10001 in FIG. 2 and FIG. 3 is regarded as the maximum boundary of the projected image formed by one light beam and the blue rectangle 10001 is defined as an image cell do. The red point or circle 10002 in FIGS. 2 and 3 is regarded as the center of the projected image formed by the projected beam, and the red point or circle 10002 is defined as the image center. Referring to FIGS. 2 and 3, there is only one shortest path in which the initial unit structure 10000 moves to the position of the final unit structure 19400, but only a few steps of light There is a choice as to whether or not modulation is performed, and FIG. 2 shows an example in which 94 optical modulation steps are performed.

2 shows the position of the upper left vertex 19002 of the first row and first column image cell after the light modulation step 94 is the position of the lower right vertex 19001 of the third row and 10th column image cell at the initial position, As shown, that is to say, the initial I row J column image center is positioned posterior to the position of the initial (I + 3) row (J + 10) column image center after 94 light modulation steps, The movement of the unit structure has proceeded based on the cells 10001 or the image centers 10002. [

For example, the image centers 10002 shown in FIG. 3 will be described with reference to an image center 10002 in the initial row 1 column 1 column 1 row 2 column 2 row 5 column 2 row 9 column 3 row 8 column 3 row 9 column 19412, 19425, 19429, 19438, and 19439, respectively, after 94 light modulation steps, where the image centers 19411, 19412, 19425, 19429, 19438, 19439), the position of each of the initial 4 rows 11 columns, 4 rows 12 columns, 5 rows 15 columns, 5 rows 19 columns, 6 rows 18 columns, 6 rows 19 columns image And coincides with the position of the center, respectively. Therefore, the direction 10007 from the image center 10029 to the image center 19429 shown in Fig. 3 becomes the direction opposite to the substrate moving direction.

In the present invention, a direction 10007 opposite to the substrate moving direction is defined as a horizontal direction or an overlap direction, and a direction 10008 perpendicular to the horizontal direction 10007 is defined as a vertical direction. In addition, the direction 10005 from the image center 10025 to the image center 10029 shown in Fig. 3 rotates counterclockwise (CCW) by the angle? 10009 in the horizontal direction 10007 Direction (10005). In the present invention, the direction 10005 is defined as a lateral direction, the direction 10006 perpendicular to the lateral direction 10005 is defined as a longitudinal direction, and the angle? (10009) is defined as a mirror angle below. In the present invention, the number of image cells 10001 or image centers 10002 in the horizontal direction that determines the positions of the initial unit structure 10000 and the final unit structure 19400 together with the image cells is denoted by A And the number of image cells 10001 or image centers 10002 in the vertical direction is denoted by B to define the number of vertical cells.

By incorporating the patent of the "Regular lithography method" of the patent invented and patent registered 10-0999516 by the inventors of the present invention with reference to the specification of the present application, in the present invention, coprime) is established. The number of optical modulation steps based on the number of horizontal and vertical cells A and B performed while moving the shortest path to the position of the final unit structure 1900 is denoted by D and the superposed resoluble degree).

In the example shown in Figs. 2 and 3, the number of horizontal cells A is 10, the number of vertical cells B is 3, and the overlapping resolution D is 94. [ The horizontal spacing 10003, the vertical spacing 10004, the horizontal length 19003 of the image cell, and the vertical spacing 10003 between the light beam image centers projected onto the substrate in a state stopped by the fine mirrors of the spatial light modulator shown in Fig. And the vertical length 19004 of the image cell are all the same, and the horizontal interval 10003 between the light beam image centers, the vertical interval 10004, the horizontal length 19003 of the image cell, and the vertical direction The length 19004 is denoted by C and defined as the image center interval.

가 되고, 미러각 θ(10009)는 일반화하면

라디안(radian)이 된다.If the unit movement distance of the substrate corresponding to the unit light modulation time of the fine mirrors of the spatial light modulator or the moving distance of the image center in units of the optical modulation steps is defined as P and defined as a superposition pitch, Is generalized,

, And the mirror angle [theta] (10009) becomes generalized

It becomes a radian.

As shown in FIGS. 2 and 3, if the image center spacing C (10003, 10004, 19003, and 19004) is 1 μm (micron, micrometer, micron) 0.1111 microns, and the mirror angle? (10009) is about 16.6992 degrees (degree). Accordingly, when the unit structure shown in FIG. 2 is rotated counterclockwise about 16.6992 degrees, FIG. 2 shows a structure in which a fine mirror array inclined at about 16.6992 degrees is moved on a substrate Can be regarded as a unit structure shown together with the image cells formed in the image display unit.

FIG. 4 is a set of unit structures, that is, a nested structure, in which only image centers 10002 are selected, except for the image cells in the set of unit structures shown together with the image cells of FIG. 4, each of the image centers 10011, 10012, 10025, and 10039 in the first row 1 column, the first row 2 column, the second row 5th column, and the third row 9th column is moved in the horizontal direction 10007 every optical modulation step, And the image center 10038 of the initial 3 rows and 8 columns moves to the image centers 19411, 19412, 19425, and 19439 after the light modulation step of 94. The image center 10038 of the initial 3 rows and 8 columns moves along the horizontal direction 10007 Moves to the image center 10738 after seven optical modulation steps, to image center 11038 after ten optical modulation steps, and to image center 19438 after 94 light modulation steps, respectively.

The distribution of image centers 10002 uniformly appearing in the center of FIG. 4 is a nested structure formed by the regular movement of the unit structure, and consists of a triangular structure by three image centers. Two parallel straight lines 10038-19438 and 10039-19439 formed by the horizontal direction 10007 movement in accordance with the light modulation step of the image center 10038 and the image center 10039 of the nine columns, The two straight lines 10012 - 10012 formed by the horizontal direction 10007 movement in accordance with the light modulation step of the image center 10012 of two rows located in the initial row 1 and the image center 10025 of five rows located in the initial two row are formed between the two image lines 10012 - 19412 and 10025-19425 are located in parallel to divide the area between the two parallel lines 10038-19438 and 10039-19439 into three regions which again correspond to the eight columns of image centers 10038 and 9 The superposition structure is formed by dividing the large triangles 10039, 11038, and 10738 formed by the movement of the image center 10039 of the column into nine small triangles whose length is 1/3. 2 or 4 is 3, so that if the number of columns B is 1, there is an initial difference between the parallel lines formed by the horizontal movement according to the light modulation step of the adjacent two columns of image centers located in the same initial row A straight line formed by the horizontal movement according to the light modulation step of the image center located in the row can not be formed and the two parallel lines are not divided and if the vertical cell number B is 2, A straight line formed by the horizontal movement in accordance with the light modulation step of the image center located in one initial other row between the parallel lines formed by the horizontal movement in accordance with the light modulation step is located in parallel, This is obvious.

5 is an enlarged view of only a portion of the green square 10010 shown in the center of FIG. The distribution of the image centers 10002 uniformly displayed in the center of FIG. 4 is a triangle structure or image by the image centers 10039, 16612, and 16512 shown in FIG. 5 as an overlapping structure formed by the regular movement of the unit structure. Is determined by the repetition of the inverted triangular structure by the centers 16512, 16612, and 13725.

As discussed above, since the vertical cell number B is 3, horizontal direction (10007) movement according to the light modulation step of the image centers of adjacent two columns located in the initial same row is located in two different initial rows between two parallel lines The two straight lines formed by the horizontal movement in accordance with the light modulation step of the image center are located in parallel and the two parallel lines are divided into three regions so that the image centers 10038 and 10039 of two adjacent columns positioned in the same initial row, The triangular structure by the image centers 10039, 11038, and 10738 formed by the horizontal movement in accordance with the light modulation step of FIG. 9A includes nine triangular structures 10039, 16612, and 16512 ), (16512, 13725, 13625), 16512, 16612, 13725, 16612, 13825, 13725, 13625, 10838, 10738, 13625, 13725, 10838, 13725, 10938, 10838, (13725, 13825, 10938), (13825, 11038, 10938, and the triangular structure formed by the image centers 10039, 16612, and 16512 is formed into a structure that is enlarged to three times the length. In addition, six triangles (16512, 13725, 13625), (16512, 16612, 13725) except for (9123, 13725, 13388, and 10938 form a honeycomb structure. As shown in FIG.

FIG. 6 is a diagram illustrating enlargement of only the portion of the purple square 10020 shown in the center of FIG. 5 and then reducing the image centers to points. In FIG. 6, By the image centers 10039, 16382, and 7152 formed by horizontal movement along the triangular structure by the image centers 10039, 11038, and 10738 and the light modulation steps of the image centers located in the initial different rows A triangular structure is shown.

As shown in FIG. 6, an arrowed straight line 19998 indicates an image center 10038 positioned in the initial 3 rows and 8 columns and horizontal direction 10007 movement according to the 6th, 7th, and 10 light modulation steps of the image center And the straight line 19997 is a line connecting the image centers 10038 formed by the image center 10039 located in the first 3 rows and 9th columns in a direction perpendicular to the arrowed straight line 19998 Line 19998, and point 19999 is an intersection of the straight line 19998 and the straight line 19997. Therefore, the angle between the straight line 19996 drawn in the longitudinal direction 10006 of the image center 10039 and the straight line 19997 is the mirror angle? (10009).

FIG. 7 is a view showing the image centers reduced to points after enlarging only the triangular structure by the three image centers 10039, 16612, and 16512 as the basis of the overlapping structure shown in FIG. A straight line connecting the image center 10738 and the image center 11038 in Fig. 6 and an angle between a straight line connecting the image center 10738 and the image center 10039 (19993) or a curve indicated by a red arrow in Fig. 7 The angle between the sides (19995) and sides (19994) (19993) is defined as Ψ and is defined as the projection configuration angle.

The distance from the image center 10638 to the image center 10738 in Figure 6 or the distance from the image center 16512 in Figure 7 to the image center 16612 19995 is denoted by ξ and defined as a base and the distance from the image center 16512 to the image center 10039 in Fig. 6 (19994) or the image center 10039 in the image center 16512 represented by a red straight line in Fig. (19994) is defined as η and defined as the left side. Therefore, in the digital lithography proposed in the present invention, the triangle as the basis of the overlapping structure is determined by the projection shape angle Ψ (19993), the base line ξ (19995) and the left side η (19994).

On the other hand, if the triangles or inverted triangles formed by the image centers 10002 shown in FIG. 4 or FIG. 7 are closely examined, it can be understood that they are not perfectly regular triangles. In other words, as described above, when the image center array projected onto the substrate by the spatial light modulator is a square unit structure 70011 including the square image cells 10001 shown in FIG. 2 or FIG. 3, an equilateral triangle A superposition structure 70022 can not be obtained and a normal superposition structure composed of a regular triangle having a deviation or error from a perfect equilateral triangle is always obtained and furthermore the accuracy of the pattern exposed by deviation or error from this perfect equilateral triangle .

It is an object of the present invention to obtain a normal triangular superposition structure consisting of a nearly perfect equilateral triangle, i.e. a high resolution triangle point array structure substantially equal to the level of the equilateral triangle superposition structure 70022 shown in FIG. 1, in digital lithography using a spatial light modulator It is. Therefore, in the superposition structure according to the present invention, the tolerance level of deviation or error from the perfect equilateral triangle of the triangle generated by the present invention is set to 5% or less. To this end, in the present invention, an error from a perfect triangle of a generated triangle is defined as an equilateral triangle error and denoted by E. Further, in the present invention, the allowable limit of the positive triangular error, which is specified according to the user's need in the practice of the present invention, having a value of 5% or less is defined as an equilateral triangle threshold. And T, respectively.

The positive triangular error E of the present invention is represented by the following equation (1) using the three sides, base line ξ (19995), left side η (19994), and right side ζ (19992) shown in FIG.

Further, in the present invention, a triangle satisfying a positive triangular threshold value of a generated positive triangular error of 5% or less is defined as a regular triangle, and a honeycomb regular triangle overlapping structure of regular triangles is defined as a high- (high resolution triangulated point array), and the correlation between the interlaced horizontal pixel number A and the vertical pixel number B, the image center pixel spacing C, the overlapping resolution D, or the overlapping pitch P based thereon .

When the number A of horizontal units and the number B of vertical units of the unit structure serving as the basis of the superposition structure are small and the image center interval is C, the mirror angle?

와

가 성립한다. The unit of the mirror angle θ in Equation (2) is radians (rad), tan -1 (N3) is an inverse tangent value of N3, and in the present invention, tan -1 (N3) or arctan (N3), and from Equation 2

Wow

.

In Figure 6, the horizontal distance 10070 from the image center 10038 to the image center 10039 is the image center distance C 10003 and the vertical distance 19997 from the point 19999 to the image center 10039, (C sin?), And the distance from the image center 10738 to the image center 10039 is (C sin? / Sin?). As described above, since the number of columns B is 3, the large triangles formed by the horizontal movement in accordance with the light modulation step of the image centers of adjacent two columns located in the same initial row are shifted in the light modulation step of the image centers located in two different initial rows (19994) is a value obtained by dividing the distance from the image center 10738 to the image center 10039 by 1 < RTI ID = 0.0 > / 3, and if it is generalized, it becomes [(C sin θ) / (B sin φ)], and the generalized left side η (19994) by substituting the sin value of the above Equation 2 is expressed as Equation 3 .

로 일반화된다. 따라서, 일반화된 밑변 ξ(19995)를 중첩해상도 D의 함수로 하기 수학식 4와 같이 표현한다. In Figure 3 or Figure 4, the distance from the image center 10038 to the image center 19438 or the distance from the image center 10012 to the image center 19412 is

. Therefore, the generalized base line ξ (19995) is expressed as a function of the overlapping resolution D as shown in Equation (4).

 In the present invention, the dimensionless value (? / C) obtained by dividing the base line? By the image center distance C is denoted by S and is defined as a dimensionless superposed resolution, and expressed as a function of the overlapping resolution D do.

In the present invention, a dimensionless value obtained by dividing the overlapping pitch P by the base ξ or the product of the dimensionless overlapping resolution S and the image center interval C is denoted by H, and is defined as a superposition ratio.

By incorporating the patent of "Regular lithography method" of the patent invented and patent registered 10-0999516 by the present inventors with reference to the specification of the present application, in the present invention, coprime) is established. According to the above definition, in the present invention, the overlapping pitch P is defined as a product of the overlap ratio H and the dimensionless overlapping resolution S and the image center distance C as shown in Equation (7).

In the present invention, if the generated triangle is a perfect equilateral triangle, the value obtained by dividing the base line ξ (19995) by the generalized left side eta (19994) becomes 1 and the projection shape angle Ψ (19993) becomes π / 3 radian. However, as described above, it is impossible to form a perfect equilateral triangle in the superposition structure according to the present invention. Accordingly, in the present invention, the dimensionless side exactness factor μ is defined as the following equation 8 and the dimensionless angle exactness factor ρ is defined as the following equation (9).

Therefore, as the triangle that is generated approaches the perfect equilateral triangle, μ and ρ approximate to 1. The generalized left side eta (19994) of Equation (3) is expressed as a function of the dimensionless angle matching factor ρ as shown in Equation (10).

The superposition resolution D in which the value obtained by dividing the base value? Of the equation (4) by the left side? Of the equation (10) is the dimensionless variation factor? Is expressed by the following equation (11): A, B, And the dimensionless angle matching factor p.

Further, the right side ζ (19992) is calculated by the cosine law as a function of the base ξ, the left side η, and the dimensionless angle matching factor ρ as shown in the following equation (12).

In the present invention, the overlapping resolution D must be an integer since the initial unit structure based on the number of horizontal cells A and the number of vertical cells B is the number of optical modulation steps performed while moving the shortest path to the position of the final unit structure.

In the example shown in Figs. 2 to 7, the number of transverse cells A is 10, the number of longitudinal cells B is 3, the dimensionless matching factor mu is 0.9821414205250, and the dimensionless square matching factor rho is 0.9647528233280. The superimposed resolution D obtained by substituting these in Equation 11 is 94.0000000000072, which is not strictly an integer but when an integer of 94 is set, the error is less than 10 ^-10 . When the exposure is performed, the error occurring at 10 ^-10 is It is negligibly small compared with the physical error that occurs.

Also, when the dimensionless variance factor μ is used as 0.9821414205250750 instead of 0.9821414205250, D becomes almost exactly 94. The 10 ^-13 difference of the dimensionless variance factor μ has no effect on the exposure and is also negligible compared to the physical error caused by the stage magnitude. Accordingly, in the present invention, when the error is less than 10 < ^-10 > when integrating a number close to an integer, the number close to an integer is regarded as an integer and is referred to as an integer.

When the image center distance C (10003) is 1 micron, the base value ξ obtained by substituting 94 into the superposition resolution D of Equation 4 is 0.1084897768850 microns, the left side η is 0.1130866575820 microns, and the projection shape angle Ψ is 57.8851693997030 degrees. According to Equation (8), Equation (9) and Equation (12), the positive triangular error E of Equation (1) is expressed by the following equation (13) as a function of the dimensionless matched factor "

An example of the overlapping structure shown in FIGS. 2 to 7 by Equations 1 to 13 is that the overlap resolution D is an integer and at the same time about 4.237% where the positive triangular error is less than or equal to a user specified positive triangular threshold value (e.g., 5% And can be regarded as belonging to a high-resolution triangular-point array structure. Therefore, in the present invention, the condition for obtaining the high resolution triangular array structure is such that the superposition resolution D of Equation (11) becomes an integer and at the same time the positive triangular error of Equations (1) to (13) %) Or less.

As described above, the number A of horizontal lines in which the superposition resolution D of Equation (11) becomes an integer and the positive triangular errors of Equations (1) to (13) are equal to or less than a user specified positive triangular threshold value The combination of B, the dimensionless coincidence factor, and the dimensionless coincidence factor, p, are numerous and it is also considered easy to determine this combination.

Therefore, at the present stage, if the horizontal cell number A, the vertical cell number B, the dimensionless variation factor mu, and the dimensionless angle matching factor? Are correctly determined and the above two conditions are satisfied, It is necessary to confirm whether or not it is an array structure. In order to confirm the above description, in the example shown in 2 to 7, the dimensionless matching factor? Is changed to 0.9927020809608290 while the horizontal cell number A, the vertical cell number B, and the dimensionless angle matching factor? And Equation (1) to Equation (13), the overlapping resolution D is calculated as 93, and the positive triangular error is calculated as about 3.696%. Comparing this result with the superposition structure shown in FIG. 2 to FIG. 7, it is predicted that a more accurate superposition structure will be obtained as numerical superposition resolution S from a larger base?.

However, the superposition structure obtained by actually setting the superposition resolution D to 93 is not a normal triangle superposition structure composed of regular triangles of a normal triangular error of 3.696% predicted by calculation as shown in the image centers in Figs. 8 and 9, The error is very large, and it is difficult to see the overlapping structure consisting of equilateral triangles. Therefore, in order to satisfy both the conditions that the superposition resolution D of Equation (11) is an integer and the positive triangular errors of Equations (1) to (13) are equal to or less than a user specified positive triangular threshold value (e.g., 5% Even if the vertical cell number B, the dimensionless matching factor μ, and the dimensionless angle matching factor ρ are determined correctly, it can be concluded that the actually obtained overlapping structure may not be a normal triangle overlapping structure made up of regular triangles, and therefore additional conditions are required. Therefore, a more detailed analysis of the relationship between the projection shape angle Ψ, the overlapping resolution D, the number of transverse cells A, the number of longitudinal cells B, the dimensionless coincidence factor μ, and the dimensionless coincidence factor ρ and the superposition structure is needed.

The large triangular structure by the three image centers 10039, 11038 and 10738 described above is determined by considering the straight line 19998 which is indicated by an arrow and the angle 19993 formed by the straight line connecting the image center 10738 and the image center 10039 In general, when the projection shape angle Ψ is less than (π / 3-0.07) radians or less than (π / 3 + 0.07) radians, it is generalized based on the image center of I row J column of arbitrary K th optical modulation step. (J + 1) -th row of the (K + L) -th optical modulation step of the (J + 1) -th optical modulation step and the image center of the I- 1) It is the same as the triangle formed by the image center of the row.

Considering the straight line connecting the arrowed line 19998 and the straight line connecting the image center 11038 and the image center 10039, if the projection shape angle Ψ is (2π / 3-0.07) radian or more (2π / 3 + 0.07 ) Radian, it is generalized based on the I-th row J-column image center of a certain K-th optical modulation step. In this case, the image center in the I-th column and the (J + (J-1) column of the (K + LB) th optical modulation step and the image center of the J-th row (I-1) Since B is the number of columns and L is the number of optical modulation steps, B should be an integer according to the discussion of the superposition resolution D of Equation (11).

In the present invention, L is defined as the number of unit steps in terms of the number of unit light modulation steps as a reference of a large triangular structure formed by horizontal movement in accordance with the light modulation step of image centers, and the number of unit steps L is defined as the projection shape angle? , The number of horizontal cells A, the number of vertical cells B, the dimensionless matching factor μ, the dimensionless angle matching factor ρ, and the overlapping resolution D.

As discussed in the discussion of FIG. 6, the horizontal distance 10070 from the image center 10038 to the image center 10039 is the image center spacing C (10003), and from point 19999 to image center 10039 And the angle between the straight line 19996 drawn in the negative vertical direction 10006 and the straight line 19997 in the image center 10039 is the mirror angle θ 10009, The horizontal distance 10060 from the point 19999 to the image center 10039 is (C sin ² ?). The distance from the image center 10738 to the image center 10039 is generalized to B eta as three times the left side eta of the distance 1999000 from the image center 16512 to the image center 10039, ) To the point 19999 is (B? Cos? Cos?).

6, the horizontal distance 10040 from the image center 10038 to the image center 10638 is the distance obtained by subtracting the sum of the horizontal distances 10050 + 10060 from the horizontal distance 10070 (10070-10050-10060). The horizontal distance 10040 from the image center 10038 to the image center 10738 is the product of the number of unit steps L and the distance 10080 and is the distance from the image center 10638 to the image center 10738 (L? Cos?) Since the horizontal distance 10080 from the image center 10638 to the image center 10738 is (? Cos?). Since the horizontal direction distance 10040 is (L? Cos?) And this is again (10070-10050-10060), this relationship is expressed by Equation (14).

,

, ξ = μη, ψ = ρπ/3 및 수학식 10를 대입하여 단위스텝수 L에 대해 정리함으로써, 단위스텝수 L을 하기 수학식 15와 같이 가로셀수 A, 세로셀수 B, 무차원 변일치인자 μ 및 무차원 각일치인자 ρ의 함수로 산출한다. In Equation (14)

,

, Ξ = μη, ψ = ρπ / 3 and the step number of the unit by substituting the equation (10) by cleanup for the L, the unit for the step number L as shown in equation (15) horizontal count A, the vertical number of cells B, non-dimensional variables match factor mu and the dimensionless angle matching factor p.

Another example of the condition for obtaining the high resolution triangular point array structure of the present invention is that the number of unit steps L of Equation 15 is an integer .

The number of unit steps L obtained by substituting the horizontal cell number A, the vertical cell number B, the non-dimensional variance coincidence factor μ, and the dimensionless coincidence factor ρ in the equation (15) as in FIGS. 2 to 7 is an integer of 7.00000000000. Therefore, in the case of FIGS. 2 to 7, a normal triangular overlapping structure composed of regular triangles with a positive triangular error of 4.237% was formed. On the other hand, the number of unit steps L obtained by substituting the horizontal cell number A, the vertical cell number B, the non-dimensional variation factor? And the non-dimensional angle matching factor? In Equation 15 in the same manner as in FIGS. 8 to 9 is 6.92553191489, which is not an integer. Therefore, in the case of FIGS. 8 to 9, the error is so large that a superposition structure of a regular triangle is difficult to predict and a superposition structure of a different type is formed.

That is, the condition for obtaining the high resolution triangular point array structure of the present invention based on the large triangle is that the overlap resolution D of Equation (11) and the unit step number L of Equation (15) Is less than or equal to a user defined positive triangular threshold value (e.g., 5%).

In other words, the method of obtaining the high resolution triangular point array structure of the present invention on the basis of the large triangles is based on the mathematical formula The overlap resolution D of Equation 11 and the number of unit steps L of Equation 15 are all integers and at the same time the condition that the positive triangular error of Equations 1 to 13 is equal to or less than a user specified positive triangular threshold value Dimensional non-dimensional matching factor? And a non-dimensional variance coincidence factor?, And a non-dimensional variance coincidence factor? And a non-dimensional angle matching factor? Is determined by Equation (5), and the overlapping pitch P is determined according to Equation (7) in accordance with a given overlapping ratio D between the image center interval C and the superimposed resolution D to perform lithography.

The method of obtaining the high resolution triangular point array structure of the present invention based on the above described large triangles is based on the image centers of two adjacent columns (e.g., columns 8 and 9) located in the same initial row (e.g., row 3) 11038, and 10738 formed by the movement in the horizontal direction 10007 according to the light modulation step of the three image centers 10039, 11038, and 10739. Therefore, a condition that the number of unit steps L in Equation (15) should be an integer was required.

Instead of the large triangular structure, a small triangular structure by three image centers 10039, 16612, and 16512 located in the initial different rows (e.g., rows 3 and 1), as illustrated in Figures 5 and 6, In order to derive a method of obtaining a high resolution triangular point array structure, it is necessary to determine the distance between two parallel straight lines formed by the horizontal movement according to the light modulation step of the adjacent two columns of image centers located in the same initial row shown in Figs. The indexes of the rows and columns of (B-1) image centers located in different initial rows that divide into B regions should be first generalized.

In this specification, the terms 'large triangle' and 'small triangle' are used to refer to the triangles used to obtain the scan resolution D for convenience of explanation according to their relative sizes. As described above, a large triangle means a triangle having vertexes as three vertexes of three image centers, which are formed by horizontal movement of image centers of adjacent two columns located on the same row of a square unit structure. On the other hand, a small triangle means a minimum-sized triangle having vertexes of three adjacent image centers among the image centers of a regular triangle overlapping structure formed as a result of the light modulation step. That is, a large triangle is generated from two adjacent columns located in the same row of a square unit structure, and a small triangle is generated in a regular triangle overlapping structure in which a square unit structure is superimposed according to the light modulation step. Therefore, the method using large triangles and small triangles is the same when B = 1.

FIG. 10 is a schematic diagram of a (B-1) number of images (B-1) located in an initial other row dividing between two parallel straight lines formed by horizontal movement in accordance with the light modulation step of adjacent two- It is an example showing the indexes of rows and columns of centers.

(B) shows the case where the number of horizontal cells A is 10, and FIG. 10 (c) shows a case where the number of horizontal cells A is 11, when the number of vertical cells B is 3 and the number of horizontal cells A is 8 Respectively. If the index I ₀ of the reference image center row is B and the index J ₀ of the column is A, then the large triangles are (I ₀ , J ₀ ) = (B, A) ₀ , J ₀ -1) = (B, A-1) index. That is, in the case of FIG. 10 (a) and _{(I 0, J 0) =} (3,8) and _{(I 0, J 0 -1)} = (3,7), the case of (b) (I _0, J ₀₎ = (3,10), and (a _{I 0, J 0 -1) =} (3,9), (c _{for) (I 0, J 0)} = (3,11) , and (I _0, J ₀ -1) = (3, 10). However, the small triangle is, unlike the case of the larger triangle, the index of the image center as a reference (I _0, J ₀₎ and the index is defined a specific relation that is easy to image center having the (I ^*, J ^*) As shown in FIG. 10, (I ₀ , J ₀ ) = (3,8) and (I ^* , J ^* ) = (2,5) in the case of (a) _{I 0, J 0) = (} 3,10) and ^{(I *, J *) =} (1,3) , and, (c _{for) (I 0, J 0)} = (3,11) and (I ^* , J ^* ) = (2, 7).

If the index I ₀ of the row of the reference image center is set to B and the index J ₀ of the column is set to (A-1), the large triangles are (I ₀ , J ₀ ) = (B, A -1) and (I ₀ , J ₀ -1) = (B, A-2) indexes. That is, in the case of FIG. 10 (a) and _{(I 0, J 0) =} (3,7) and _{(I 0, J 0 -1)} = (3,6), the case of (b) (I _0, J ₀₎ = (3,9) and (a _{I 0, J 0 -1) =} (3,8), (c _{for) (I 0, J 0)} = (3,10) , and (I _0, J ₀ -1) = (3, 9). However, the small triangle is, unlike the case of the larger triangle, the index of the image center as a reference (I _0, J ₀₎ and the index is defined a specific relation that is easy to image center having the (I ^*, J ^*) As shown in FIG. 10, (I ₀ , J ₀ ) = (3,7) and (I ^* , J ^* ) = (2,4) in the case of (a) _{I 0, J 0) = (} 3,9) and ^{(I *, J *) =} (1,2) , and, (c _{for) (I 0, J 0)} = (3,10) and (I ^* , J ^* ) = (2, 6).

Therefore, in the present invention, in order to derive a relational expression between the index (I ₀ , J ₀ ) of the reference image center and the index (I ^* , J ^* ) of the image center constituting the small triangle, And FIG. 10 are carefully examined to determine the indexes of the rows and columns of the image center that split between two parallel straight lines formed by the horizontal movement according to the light modulation step of the image centers of adjacent two columns located in the same initial row . If the index of the row of the image center as a reference of the common I ₀ la la and the column index J _0, the index of the line in the adjacent previous row in the image center on the same line is I ₀ and the column index J is ₀ -1 .

2 to 4, for example, when the reference image center is 10039 and the image center of the adjacent previous row located on the same row is 10038, I ₀ = 3, J ₀ = 9, J ₀ -1 = 8 .

The next step is a straight line formed by the horizontal movement according to the optical modulation step of the reference image center (I ₀ , J ₀ ), the light of the image center (I _0, J ₀ -1) (B + 1) straight lines including a straight line formed by the horizontal movement according to the modulation step and (B-1) straight lines that evenly divide the two straight lines into B groups are shown in Fig. 11 Consider together.

The index m of (B + 1) straight lines is assigned from 0 to B in the negative 10008 direction, starting from giving the index m to 0 as a reference image center and the straight line formed by the indexes, (I _m , J _m ), the index of the reference image center is (I ₀ , J ₀ ), and if the index of the row and column of the image center forming the straight line is _m , (I _0, J ₀ -1) of the adjacent previous row located in the same row as the image center (I ₀ , J ₀ ) constituting the image center is (I _B , J _B ).

Based on this, when m increases by 1 from 0 to B, the indexes (I _m , J _m ) of the row and column of the image center forming the (B + 1) parallel straight lines are generalized, Express it together. That is, the indexes (I _m , J _m ) of the rows and columns of the image center forming the (B + 1) parallel straight lines are integers satisfying the following expression (16).

Equation 16, the index m is when _{B, J B = (J 0} -1) - (A / B) , and the (I ₀ -I _B), J is an integer _B when A and B are relatively prime J _B must be (J ₀ -1) since I _B must be equal to I ₀ . Further, when the rearrangement for the equation (16) if the line (I ₀₎ as a reference of B, and the _{J m = J 0 -A + (} AI m -m) / B, so that the integer _m J is present, I _m should be less than or equal to B so that (AI _m -m) is a multiple of B.

(10 * I _m -0) is 3 when m = 0 when the reference (I ₀ , J ₀ ) is (3, 9) An integer I _m less than or equal to 3, which is a multiple, is 3 and the integer J _m is 9 accordingly. If m = 1, then an integer I _m less than or equal to 3, where (10 * I _m -1) is a multiple of 3, is 1 and the integer J _m is 2 accordingly. If m = 2 (10 * I _m -2) is less than or equal to 3, which is a multiple of 3, then m = 3 and an integer I _m less than or equal to (10 * I _m -3) 3, and the integer J _{m thereof} is 8.

Therefore, as shown in Figure 4, the center image (I _0, J ₀₎ is the case of (3,9), (10039), in the case of m = 0 the image center (3,9), (10039), the m = 1 (1, 2) 10012 in the case of m = 2, image center (2,5) (10025) in the case of m = A triangle with large horizontal movement according to the modulation step and small triangles dividing it are formed.

FIG. 12 is a diagram showing the image centers reduced from a small point to a circle after magnifying only a small triangular structure by three image centers 10039, 16612, and 16512 as the basis of the overlapping structure shown in FIGS. 5 and 6 . The small triangular structure by the image centers 10039, 16612, and 16512 shown in Fig. 12 is a case where the image center I ₀ , J ₀ is (3, 9) 9) and m = 1 in the horizontal direction according to the optical modulation step of the image center (1,2). If this is generalized to a small triangular structure, the index (I ^* , J ^* ) of the row and column of the image center forming a small triangular structure with the reference image center (I ₀ , J ₀ ) .

If I ₀ is B and J ₀ is A, J ^* = (AI ^* -1) / B is obtained.

Thus, for an integer J ^* to exist, I ^* should be chosen to be less than or equal to B, where (AI ^* -1) is a multiple of B. (10 * I ^* -1) when the reference (I ₀ , J ₀ ) is (3, 10), taking A to be 10 and B to be 3, ) Is a multiple of 3, the integer I ^{*, which} is less than or equal to 3, is 1 and the integer J ^* (8 * I ^* -1) when the reference (I ₀ , J ₀ ) is (3, 8) is described as an example of FIGS. 4 to 10 An integer I ^{* that} is less than or equal to 3, which is a multiple of 3, is 2 and the integer J ^* (11 * I ^* -1) when the reference (I ₀ , J ₀ ) is (3, 11) is described as an example with reference to FIGS. 4 to 10 An integer I ^{* that} is less than or equal to 3, which is a multiple of 3, is 2 and the integer J ^*

The above equation (17) is rearranged for the case where I ₀ is B and J ₀ is not A, so that J ^* = J ₀ -A + (AI ^* -1) / B. Thus, for an integer J ^* to exist, I ^* should be chosen to be less than or equal to B, where (AI ^* -1) is a multiple of B. (10 * I ^* -1) when (I ₀ , J ₀ ) is ( ₃ , ₉ ), which is a reference, ) Is a multiple of 3, the integer I ^{*, which} is less than or equal to 3, is 1 and the integer J ^* (8 * I ^* -1) when the reference (I ₀ , J ₀ ) is (3, 7) is described as an example of FIGS. 4 to 10 An integer I ^{* that} is less than or equal to 3, which is a multiple of 3, is 2 and the integer J ^* (11 * I ^* -1) when (I ₀ , J ₀ ) is (3, 10), which is a reference, An integer I ^{* that} is less than or equal to 3, which is a multiple of 3, is 2 and the integer J ^*

Therefore, as shown in FIG. 4, when A is 10, B is 3, and the reference (I ₀ , J ₀ ) is (3, ₉ ), the image centers 3, A small triangular structure is formed by the image centers 10039, 16612, and 16512 generated by the horizontal movement in accordance with the light modulation step of FIG.

The description of the method of obtaining the high resolution triangular point array structure of the present invention based on the large triangle is described by taking as an example the case where the image center spacing C (10003) is 1 micron. However, the method of obtaining the high resolution triangle point array structure of the present invention is a method of obtaining a high resolution triangle point array structure regardless of the image center spacing C (10003). That is, it is applicable to any arbitrary image center spacing C (10003) specified by the user in the field.

In the following description of the present invention, the length of a length used in the practice of the present invention is defined as a dimensionless length divided by an image center distance C (10003). We want to be convenient as needed. 12 is a diagram showing a dimensionless small triangular structure. Under the mirror angle θ of the equation (2) determined by the given interlaced transverse number A, the vertical number B, and A and B, the dimensionless superposition resolution S (29995) (19995) divided by the image center distance C.

The small triangle shown in Fig. 12 is generalized with reference to the I ₀ row J ₀ column image center of an arbitrary K th light modulation step. In other words, I ₀ row J ₀ column image center and (K + L ^*) th and (K + L ^* +1), and the second light modulating step of triangle I to satisfy the equation (17) ^- forming rows and J ^* to heat the image center, the light modulation step number L ^* is to equation (18) and It is expressed as. In the present invention, L ^* is defined as a basic number of steps in the sense of a basic light modulation step number serving as a reference of a small triangular structure formed by horizontal movement in accordance with an optical modulation step of image centers. The integer {N3} in the following equation (18) is a value obtained by integrating N3 by discarding the value below the decimal point of N3.

According to the basic step number L ^* , the non-dimensional distance 39995 from the image center 16512 to the point 29999 shown in FIG. 12 is expressed by the following equation (19) 10039) is expressed as Equation (20). A straight line connecting the image center 16512 and the point 29999 and a straight line connecting the image center 10039 and the point 29999 are orthogonal at the point 29999. [

The dimensionless distance η ^* (29994) from the image center 10039 to the image center 16512 is expressed by the following mathematical expression 21 and the dimensionless distance from the image center 10039 to the image center 16612 ζ ^* of 29 992) is to be represented as shown in equation 22, the non-dimensional distance η ^* (29994) and the non-dimensional overlap resolution S (between 29 995) each (19993) to the non-dimensional distance η ^* (29994) and the sides (39 995) (19993)? Is expressed by Equation (23).

The expression (21) and the non-dimensional distance of Figure 12 η ^* (29994) is also a non-dimensional value obtained by dividing the left-hand side (19 994) as an image center spacing C of 7, the non-dimensional distance of the equation 22 and 12 ζ ^* ( 29992) is a dimensionless value obtained by dividing the right side (19992) of FIG. 7 by the image center distance C.

In the method for obtaining the high resolution triangular point array structure of the present invention, the positive triangular error representing the error from the perfect equilateral triangle of the triangle generated by the present invention is defined as μ = S / η ^* And the non-dimensional angular coincidence factor ρ is calculated as ρ = ψ / (π / 3) using the angle Ψ between the angles in the above equation (23) and substituted into the above equation (13). In addition, the positive triangular error becomes is represented by the following equation (24) as a function of non-dimensional distance ^{S (29995), η * (} 29994) and ζ ^* (29992), calculated by the above equation 1512, 16, and 17 S ,? ^* And ? ^* Can be obtained by substituting the following equation (24).

That is, a high-resolution triangular-point array lithography method for obtaining a high-resolution triangular-point array structure according to the present invention based on a small triangle, comprises the steps of: obtaining a mirror angle of a given angle a and a number B, the superimposed resolution D in which the positive triangular error is equal to or less than a user specified positive triangular threshold value (e.g., 5%) is determined under the condition of?,?,? The overlapping resolution S is multiplied by the superimposed ratio H and the overlapping resolution D with the given image center distance C, and the overlapping pitch P is calculated as shown in Equation (7) to perform lithography.

Thus, in a high-resolution triangular-point array lithography method for obtaining a high-resolution triangular-point array structure of the present invention, a given right triangle error A is less than or equal to a user definite triangular threshold value (e.g., 5% , A high-resolution triangular-point array structure can be obtained.

In the high resolution triangular point array lithography method of obtaining the high resolution triangular point array structure of the present invention based on the small triangle discussed so far, in the special case where the vertical cell number B is 1, B in the above formula (17) ^* Becomes I ₀ . Therefore, the index (I ^* , J ^* ) of the row and column of the image center forming a small triangular structure together with the image center (I ₀ , J ₀ ) It is an integer satisfying.

According to the relation of the equation (25) can be of basic steps of Equation 18 L ^*, to the case where the non-dimensional distance of Equation 19 ω and the non-dimensional distance of the expression 20 γ is the vertical number of cells B 1 Equation 26 , (27), and (28).

The cotangent value of the angle? Between the dimensionless distance ? ^* And the dimensionless superposition resolution S of Equation (23) is expressed as Equation (29) when the number of longitudinal cells B is 1.

The number of basic steps of the L ^* Equation 26 is expressed by Equation 29 as the η ^* follows as a function of the angle Ψ between the S Equation 30.

,

, 수학식 8의 무차원 변일치인자 μ, 수학식 9의 무차원 각일치인자 ρ, 수학식 11의 중첩해상도 D 및 수학식 5의 무차원 중첩분해능 S를 대입하여 정리하면, 상기 수학식 15의 단위스텝수 L은 사이 각 Ψ의 함수로서 하기 수학식 31로 표현되어 상기 수학식 30의 기본스텝수 L^*과 같아진다.In the method of obtaining the high resolution triangular point array structure of the present invention, in the special case where the vertical cell number B is 1, the large triangle and the small triangle which are the reference of the triangle point array structure are the same triangle. Therefore, when the number of longitudinal cells B is 1, the number of unit steps L of Equation 15 and the number of basic steps L ^* of Equation 30 should be the same. B = 1,

,

Dimensional non-dimensional variance coincidence factor? Of Equation (8), the dimensionless coincidence factor? Of Equation (9), the superposition resolution D of Equation (11), and the dimensionless superposition resolution S of Equation (5) Is expressed by the following equation (31) as a function of the angle?, And is equal to the number of basic steps L ^* of the equation (30).

Therefore, in the method of obtaining the high-resolution triangular-point array structure of the present invention by the equations (30) and (31), when the vertical cell number B is 1 in the special case, the large triangle and the small triangle which are the reference of the triangular- It has proved to be a triangle.

In the present invention, a method for obtaining a high resolution triangular point array structure of the present invention is described as an image center spacing C (10003) based on a large triangle formed by horizontal movement according to light modulation steps of adjacent two columns of image centers, Is derived by taking as an example a case where 1 micron is used and again referring to a small triangle formed by the horizontal movement according to the optical modulation step of the image centers located in two different initial rows, Lt; / RTI > The triangle used to obtain a high resolution triangle point array structure is either a large triangle or a small triangle, or whether the unit is dimensionless or dimensionless. Under mirror angle θ of 2, the superposition resolution D corresponding to a positive triangular error of one user-defined positive triangular threshold value (eg, 5%) is one integer value, and thus the resulting high resolution triangular- It is one structure.

In other words, the method of acquiring the high resolution triangular point array structure of the present invention obtains the super resolution D in which a positive triangular error is less than or equal to a user specified positive triangular threshold value (a value of 5% or less) under a given horizontal axis A and vertical axis B 13, which is a flowchart briefly showing a method of acquiring a high-resolution triangular-point array structure according to one aspect of the present invention, in a manner that a high-resolution triangular-point array structure is obtained.

- High resolution triangle point array structure acquisition method

STEP 1. Determine the positive triangular threshold value T (S1310)

And determines the positive triangular threshold value T, which is the allowable limit of the positive triangular error. The positive triangular threshold value T can be specified according to the needs of the user.

STEP 2. Determine the horizontal cell number A and the vertical cell number B (S1320)

The number A of the horizontal units and the number B of the vertical units of the square unit structure are determined to be coprime. If the number of columns B in the unit structure is 1, then all the integers A and B are small.

STEP 3. Determination of overlapping resolution D (S1330)

The overlapping resolution D is determined so that the positive triangular error E is equal to or less than the positive triangular threshold value T. [ The method of calculating the positive triangular error E using the number of horizontal cells A, the number of vertical cells B, and the overlapping resolution D is summarized as follows.

STEP 3-1. The mirror angle? Is calculated as? = Tan ^-1 (B / A) radian by Equation (2).

STEP 3-2. Select the overlay resolution D

STEP 3-3. The overlap resolution S is calculated as S = (A ² + B ² ) ^(1/2) / D by the equation (5 ⁾ .

STEP 3-4. A normal triangle error E is calculated using the number of horizontal cells A, the number of vertical cells B, the mirror angle?, The overlapping resolution D, and the overlapping resolution S,

STEP 3-4-1. Since the distance from the image center 10038 to the point 19999 in FIG. 6 is the cosine of distances divided by the image center interval C (10003) and the triangle of the present invention is a regular triangle, (Cos? / S) -integer (B / 2) + 1 when B is an even number and {cos? - S [integer -S [integer (cos? / S)] - 0.5S}? 0 or when B is an odd number, L is calculated as integer (cos? / S) -integer (B / 2).

STEP 3-4-2. The distance from the image center 10038 to the point 19999 in Fig. 6 is set to the distance from the image center 10738 to the point 19999 by the image center distance C (100099) Since 10003) divided by the normalized distance is cosθ-LS, of the variable matching factor μ of equation ^{8 μ = BS sin {tan -1} [sinθ / (cosθ-LS)]} / sin θ calculated as equation (9), and And each matching factor ρ is calculated as ρ = 3 tan ^-1 [sin θ / (cos θ-LS)] / π.

STEP 3-4-3. A constant triangular error E according to equation 13 E = 100 {max {1 , μ, [1 + μ 2 -2μcos (ρπ / 3)] (1/2)} / min {1, μ, [1 + μ ² -2 cos (p? / 3)] ^(1/2) } -1}.

STEP 3-5. It is checked whether the positive triangular error E is equal to or less than the positive triangular threshold value T. [ If the positive triangular error E is equal to or less than the positive triangular threshold value T, the process moves to STEP 4. If the positive triangular error E is greater than the positive triangular threshold value T, the process moves to STEP 3-2.

STEP 4. The overlapping pitch P is determined as P = HSC according to Equation (7) according to the superposition resolution S, the given image center spacing C, and the overlap ratio H given by the overlapping resolution D (S1340).

STEP 5. A regular triangle overlapping structure formed by a square unit structure inclined at a mirror angle? From an initial position to a final position is obtained according to the overlapping pitch P (S1350).

As described above, according to the present invention, the square unit structures generated for each optical modulation step unit are overlapped to form a high resolution triangular point array structure. That is, a square unit structure belonging to an initial position, a position in a middle light modulation step, and a final position are superimposed to form a high-resolution triangular-point array structure having a regular triangle overlapping structure.

In the present invention, for convenience of explanation, the user-specified positive trigonometric threshold value T is set at 5%. However, the user defined positive trigonometric threshold value T has a value of no more than 5%. In the present invention, for convenience of explanation, a high-resolution triangular-point array lithography method of obtaining a high-resolution triangular-point array structure in the case of A = 10, B = 3, and D = 94 has been described as an example. However, the values are not limited thereto and may have the values described in the following Tables 1 to 3, for example.

The following Tables 1 to 3 illustrate an example of implementing the high resolution triangle point array lithography of the present invention, in which the superposition resolution D committing the high resolution triangle point array structure of the present invention is given as a reciprocal of the number of horizontal, vertical, With a positive triangular error E of a high-resolution triangular-point array structure. Table 1 below shows the true triangular error E of a high-resolution triangular-point array structure resulting from the superposition resolution D that commits the high-resolution triangular-point array structure of the present invention when the number of horizontal cells A is 3 to 16, An example of implementing triangle point array lithography is shown.

Table 2 below shows the positive triangular error E of a high-resolution triangular-point array structure resulting from the superposition resolution D that commits the high-resolution triangular-point array structure of the present invention when the number of horizontal cells A is equal to or greater than 17 and less than or equal to 40, Point array lithography. Table 3 below shows the positive triangular error E of the high resolution triangular array array structure resulting from the super resolution D that assures the high resolution triangular array structure of the present invention when the number of horizontal lines A is equal to or greater than 41 and equal to or less than 128, Point array lithography.

 In order to verify the high resolution triangle point array lithography method of the present invention and to compare the high resolution triangle point array structure of the present invention with the existing square superposition structure, a digital lithography Simulations of the process were performed.

For the high-resolution triangular-point array lithography simulation of the present invention, the combinations of horizontal, vertical, and overlap resolutions A, D, and D shown in Table 3, in which the horizontal count A is 45, the vertical count B is 4, Was used. Accordingly, the mirror angle [theta] is 5.07961 [deg.] And the overlapping pitch P is 0.02554 [mu] m. For the conventional square superposition lithographic simulation, the superposition resolution D for obtaining a square superposition structure when the number of horizontal cells A is 39 and the number of vertical cells B is 4 is set to 1537 according to US Patent No. 6,870,604 or 10-0999516 . Accordingly, the mirror angle [theta] is 5.85601 [deg.] And the overlapping pitch P is 0.02551 [mu] m.

FIGS. 14 and 15 show the results of performing lithography with all the mirrors 'ON'. The beam used in the lithography of FIG. 14 is a Gaussian beam with a radius of 0.005 .mu.m, The beam used in lithography 15 is a Gaussian beam whose radius is equal to the overlapping pitch. 14 (a) and 15 (a) are the high resolution triangle point array lithography results of the present invention, and FIGS. 14 (b) and 15 (b) are the conventional square superposition structure lithography results. The lithography results shown in Fig. 14 are shown by setting the minimum value of the gray scale to 0.0 and the maximum value to 1.0, and the lithography results shown in Fig. 15 show a more detailed judgment of the illuminance or the luminance deviation The minimum gray scale value is set to 0.75 and the maximum value is set to 1.0.

The high-resolution triangular point array lithography results shown in Fig. 14 (a) show that the normal triangular error is 0.098%, as shown in Table 3, maintaining a high-resolution triangular-point array structure consisting of a triangle with little error, ) Shows that the square overlap structure lithography results shown in FIG. 5 maintain the correct square overlap structure as specified in U.S. Patent No. 6,870,604 or 10-0999516.

When comparing the results of the high resolution triangle point array lithography shown in FIG. 15 (a) with the results of the square superposition structure lithography shown in FIG. 15 (b), the illumination or luminance deviation is reduced more than the square superposition structure lithography in high resolution triangle point array lithography . The overlapping pitch P is exactly 0.025538399091 mu m when a combination with an image center distance C of 1 mu m, a horizontal cell number A of 45, a vertical cell number B of 4, and an overlapping resolution D of 1769 is used. Thus, in the implementation of the high resolution triangle point array lithography of the present invention, the successful combination of the stage moving speed and the digital mask data frame transfer rate, which bring the overlap pitch P closest to 0.025538399091 m, is 134 m / s and 5247 frames / s Or 185 μm / s and 7244 frames / s, the nm (nanometer) error occurring in the exposure of a 20 mm pattern is 3.0 nm for the former and 17.6 nm for the latter.

      In order to verify the patterning accuracy by the high resolution triangle point array lithography method of the present invention and to compare the patterning accuracy by the high resolution triangle point array structure of the present invention with the patterning accuracy by the existing square superposition structure, And the overlap ratio H is 1, the simulations of the digital lithography process for exposing the 2 μm G pattern of FIG. 16 with a Gaussian beam with a radius of 0.25 μm were performed.

For the high-resolution triangular-point array lithography simulation of the present invention, the combinations of horizontal, vertical, and overlap resolutions A, D, and D shown in Table 3, in which the horizontal count A is 45, the vertical count B is 4, Was used. Accordingly, the mirror angle [theta] is 5.07961 [deg.] And the overlapping pitch P is 0.02554 [mu] m. For the conventional square superposition lithographic simulation, the superposition resolution D for obtaining a square superposition structure when the number of horizontal cells A is 39 and the number of vertical cells B is 4 is set to 1537 according to US Patent No. 6,870,604 or 10-0999516 . Accordingly, the mirror angle [theta] is 5.85601 [deg.] And the overlapping pitch P is 0.02551 [mu] m.

17 (a1) or (a5) are the high resolution triangular point array lithography results of the present invention, and FIG. 17 (b1) or (b5) are the conventional square superposition structure lithography results. (A1) and (b1) in FIG. 17 are graphs of all the G patterns obtained as a result of lithography, and FIGS. 17 (a2) and (b2) (A3) and (b3) in FIG. 17 are views in which the exposed circular pattern of (a1) and (b1) is developed at a 50% (A4) and (b4) of FIG. 17 are views in which the rectangular corner portions of (a1) and (b1) are enlarged five times, and (a5) and (b5) Is developed at a threshold of 50%, and then the rectangular corner portion is magnified 5 times.

When comparing the results of the high resolution triangular point array lithography shown in (a1) or (a5) in FIG. 17 with the results of the square superposed structure lithography shown in (b1) or (b5) in FIG. 17, But it was similar enough not to be. Therefore, by introducing a critical shape error (CSE) measurement method that compares the positions of one-to-one correspondence points of the input drawing and the lithography result, the CSE measurement is performed using the input drawing of FIG. 16 and the post- Respectively.

FIG. 18 shows, as a result of the CSE measurement, that the internal arc portion by the high resolution triangle point array lithography of the present invention is represented by a solid line, the internal arc portion by the existing square superposition structure lithography is represented by a dotted line, and the high resolution triangle point array lithography Are represented by the open triangular marks, and the rectangular corner portions by the conventional square superposition lithography are represented by the open circle marks.

In FIG. 18, the CSE of the inner arc portion is represented by a scale of 1 to 10 nm, and the rectangular corner portion is represented by a scale of 1-100 nm due to an increase in error due to a corner rounding effect. The results shown in FIG. 18 demonstrate that patterning is more possible and less error tolerant to input patterns in high resolution triangle point array lithography than square superposition structure lithography. Fig. 19 (a) shows the frequency of CSE occurrence in the inner arc portion, and Fig. 19 (b) shows the frequency of CSE occurrence in the right corner portion. In FIG. 19, the frequency of occurrence of CSE by the high resolution triangular point array lithography of the present invention is represented by black bars, and the frequency of occurrence of CSE by conventional square superposition lithography is represented by open bars.

The results shown in FIG. 19 show that the frequency of occurrence of CSE due to the existing square superposition structure lithography is shifted to a larger error size than the frequency of CSE occurrence by the high resolution triangular point array lithography of the present invention.

Table 4 below shows the average value of CSE and the percentage value of CSE by the high resolution triangular point array lithography of the present invention by comparing the average value of CSE and the percentage of CSE by the conventional square superposition structure lithography. In Table 4, CSEavg is an average value of CSE, and CSE99, CSE95, CSE90, CSE85, CSE80, CSE75, and CSE70 represent 99%, 95%, 90%, 85%, 80% , And an error greater than 70%. The results shown in Table 4 show that the error due to the high resolution triangle point array lithography of the present invention is less than the error due to the existing square superposition structure lithography.

Taken together, the results shown in FIG. 14 or FIG. 19 and Table 4 demonstrate that the high resolution triangle point array lithography method of the present invention is more accurate and more efficient than the conventional square superposition structure lithography method.

The method for acquiring a high resolution triangular point array structure according to the present invention can be usefully used in various applications. For example, a high-resolution triangular-point array structure acquisition method can be applied to a digital hologram device using a spatial light modulator, and the accuracy of digital holography is improved by a high-resolution triangular-point array structure. In addition, the high-resolution triangular-point array structure acquisition method can be applied to the field of head-up display. Unlike a conventional large-screen display device, the head-up display displays images precisely adjacent to the user's eyes. Therefore, when the method of acquiring a high-resolution triangular-point array structure according to the present invention is applied, the accuracy of the image realized in the head-up display is improved.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is evident that many alternatives, modifications and variations will be apparent to those skilled in the art.

In addition, the method according to the present invention can be embodied as computer-readable code on a computer-readable recording medium. A computer-readable recording medium may include any type of recording device that stores data that can be read by a computer system. Examples of the computer-readable recording medium include a ROM, a RAM, a CD-ROM, a magnetic tape, a floppy disk, an optical data storage device, and the like, and may be implemented in the form of a carrier wave (for example, transmission via the Internet) . The computer readable recording medium may also store computer readable code that may be executed in a distributed manner by a distributed computer system connected to the network.

Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

The present invention can be applied to high resolution digital lithography field, high resolution digital holography field, and head up display field.

Claims (7)

There is provided a method of obtaining a high resolution triangular point array structure that is a normal triangular superposition structure by superposition according to light modulation steps of a square unit structure of image centers reflected from spatial light modulator fine mirrors and projected onto a substrate,
Determining a positive trigonometric threshold value T;
Determining a horizontal cell number A and a vertical cell number B of the square unit structure, wherein the horizontal cell number A and the vertical cell number B are small; And
Determining the overlap resolution D, wherein the overlap resolution D is determined so that the positive triangular error E calculated as the horizontal cell number A, the vertical cell number B, and the overlap resolution D is equal to or less than the positive triangular threshold value T Resolution triangular array structure. The method according to claim 1,
The step of determining the superposition resolution D comprises:
Calculating a mirror angle? As the number of transverse cells A and the number of transverse cells B; And
Further comprising the step of calculating a superposition resolution S as the number of horizontal cells A, the number of vertical cells B, and the superposition resolution D, respectively. 3. The method of claim 2,
Following the step of determining the superposition resolution D,
Determining an overlapping pitch P according to the overlapping resolution S, the given image center spacing C, and the overlapping ratio H given by the overlapping resolution D; And
Further comprising the step of obtaining a regular triangle overlapping structure formed by a square unit structure inclined to the mirror angle &thetas; from the initial position to the final position according to the overlapping pitch P. 3. The method of claim 2,
The mirror angle? Is calculated as? = Tan ^-1 (B / A) radians,
Wherein the superposition resolution S is calculated as S = (A ² + B ² ) ^(1/2) / D. The method according to claim 1,
The forward triangular error E is E = 100 {max {1, μ, [1 + μ 2 -2μcos (ρπ / 3)] (1/2)} / min {1, μ, [1 + μ 2 -2μcos ( ?? / 3)] ^(1/2) } -1}
Side matching factor μ and the respective matching factor ρ are respectively ^{μ = BSsin {tan -1 [sinθ} / (cosθ-LS)]} / sinθ , and each match factor ρ is ^{ρ = 3tan -1 [sinθ / (} cosθ-LS) ] / pi,
The number of unit steps L is L = integer (cos? / S) -integer (B / 2) +1 when B is an even number and {cos? (Cos? / S) -integer (B / 2) when B is an odd number and L = integer (cos? / S) (A / mo> ² + B / ²⁾ / D where A = tan ^-1 (B / A) radian and the superimposed resolution S is S = (A ² + B ² ) ^(1/2) / D. The method of claim 3,
Wherein the overlapping pitch P is calculated as P = HC (A ² + B ² ) ^(1/2) / D. A high resolution triangle point array lithography method,
5. The method of claim 3, further comprising: obtaining the high resolution triangle point array structure; And
The unit moving distance of the substrate, which is the object to be exposed during the unit light modulation time of the fine mirror included in the spatial light modulator, is adjusted to be equal to the overlapping pitch P, and the image arrangement projected onto the substrate by the fine mirror arrangement on the spatial light modulator And performing lithography as a regular triangle overlapping structure by dividing the inter-beam gap and performing lithography while adjusting the rotation angle with the direction opposite to the movement of the substrate to be equal to the mirror angle &thetas;.

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