KR101642510B1 - Hot Wire for Heating Device - Google Patents

Hot Wire for Heating Device Download PDF

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Publication number
KR101642510B1
KR101642510B1 KR1020150041851A KR20150041851A KR101642510B1 KR 101642510 B1 KR101642510 B1 KR 101642510B1 KR 1020150041851 A KR1020150041851 A KR 1020150041851A KR 20150041851 A KR20150041851 A KR 20150041851A KR 101642510 B1 KR101642510 B1 KR 101642510B1
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KR
South Korea
Prior art keywords
wire
hot wire
heater
plate
shape
Prior art date
Application number
KR1020150041851A
Other languages
Korean (ko)
Inventor
안용
Original Assignee
주식회사 솔렉스
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Publication date
Application filed by 주식회사 솔렉스 filed Critical 주식회사 솔렉스
Priority to KR1020150041851A priority Critical patent/KR101642510B1/en
Application granted granted Critical
Publication of KR101642510B1 publication Critical patent/KR101642510B1/en

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/54—Heating elements having the shape of rods or tubes flexible
    • H05B3/56—Heating cables
    • H05B3/565—Heating cables flat cables
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
    • H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/003—Heaters using a particular layout for the resistive material or resistive elements using serpentine layout
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/004—Heaters using a particular layout for the resistive material or resistive elements using zigzag layout

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Surface Heating Bodies (AREA)
  • Resistance Heating (AREA)

Abstract

The present invention relates to a hot wire for heating device. More particularly, to prevent a plate-type hot wire from being deformed due to the use of a heater, which has been a problem of an existing plate-type hot wire, a hot wire with a circular cut surface is made in a zig-zag shape. After that, a straight section of the wire, except a curved section of upper and lower end parts, is formed in a flat plate shape. Thereby, the deformation of the curved section of the hot wire can be prevented even if the heater is used for a long time. So, the durability of the hot wire can be improved.

Description

{Hot Wire for Heating Device}

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a hot wire for a heater installed in a heater, and more particularly, to a hot wire for a heater which is improved in order to prevent deformation of a plate- Wire type heat wire is formed in a zigzag shape and the wire of the straight portion excluding the bent portion of the upper and lower ends is formed into a flat plate shape so that the deformation of the bent portion of the hot wire, And to improve the durability of the hot wire.

Generally, a process for producing a semiconductor device is performed by a series of processes such as exposure, etching, diffusion, and deposition. In the diffusion and deposition process, a process gas is injected in a high temperature atmosphere, .

Among these equipment, diffusion furnace is widely used. The diffusion furnace is a chemical vapor deposition equipment. When a process gas is injected into a process chamber in a high-temperature vacuum atmosphere, the process gases react with each other to form a reaction material, And the thin film is laminated on the surface of the wafer.

As a diffusion process for carrying out such a process, a batch method in which a large number of wafers are loaded at one time and a process is performed is applied, and a wafer is loaded on a boat to carry out the process.

The diffusion furnace is largely composed of a control section, a transfer section, a gas supply section, and a reaction section, and the reaction section is constituted by a heater. The heater constituting the reaction unit is designed to increase the temperature to a maximum temperature of 1,250 degrees Celsius. The heater is provided with a zigzag-shaped plate-shaped heating wire to increase thermal efficiency.

DISCLOSURE OF THE INVENTION The present invention has been conceived to solve the problems of conventional zigzag plate type hot wire, and it is an object of the present invention to prevent the deformation occurring in the plate type hot wire and the cutting of the plate type hot wire portion by using the plate type hot wire for a long time, And an object thereof is to provide an improved heating wire for a heater.

According to an aspect of the present invention, there is provided a heating wire for a heater,

A heat wire which is formed in a zigzag shape and generates heat, which is composed of a conductor through which electricity flows;

The zigzag hot wire is composed of a bent portion 32 curved in a semicircular shape and a straight plate portion 34,

The curved bent portion 32 has a circular cross-sectional shape cut at a right angle with respect to a tangential line,

The straight plate portion 34 is characterized in that the cut surface cut at a right angle with respect to the longitudinal direction is a rectangle and the edge portion is an ellipse having a round shape, or one surface is flat and the other surface is a round surface ,

Wherein the heater hot wire is a wire type heat wire having a circular cross-section cut at a right angle with respect to the longitudinal direction,

The plate-like portion 34 is formed by deforming the flat shape by applying pressure to a linear portion except for the bent portion 32 which is bent upward and downward in a state where the hot wire is formed in a zigzag shape.

The heating wire for a heater according to the present invention solves the problem of deformation of a heating wire or breakage of a heating wire which occurs when a conventional plate type heating wire having a plate-like and zigzag shape and a thickness of 1.0 mm to 1.5 mm is used for a long time, In order to manufacture a hot wire, a thin metal plate is not adopted from the beginning, but a wire type hot wire having a circular cut surface is adopted to form a zigzag shape, and only a portion constituted by a straight line excluding the bent portion 32 having a semicircular shape is flattened And a plate-like portion 34 made of a plate-shaped thin plate.

The curved portion 32 curved in the shape of a semicircle in the heat line for a heater according to the present invention maintains a circular shape without any deformation of the shape of the cut surface and applies a writing pressure to the plate portion 34 extending only in a straight line, So as to have a thin plate-like shape.

Therefore, since the bent portion 32 of the heating wire for a heater according to the present invention is much thicker than the conventional heating wire for a heater, the bent portion 32 is hardly deformed or cut even though it is used for a long time. Since the plate-shaped portion 34 is formed in a thin plate-like shape, the heat-generating efficiency of the heat is remarkably the same as that of the conventional plate-shaped heat-line.

1 is a perspective view of a conventional hot wire for a heater.
2 is a plan view showing a path through which a user intends to flow in a conventional heating wire for a heater.
Fig. 3 is a plan view showing a path through which electricity actually flows in a conventional heating wire for a heater.
FIG. 4 is a plan view showing the degree of heat generation in a hot wire in a state where electricity flows in a conventional hot wire for a heater.
FIG. 5 is a plan view showing a modification of a hot wire, which is a problem that arises as a result of using a conventional hot wire for a heater.
6 is a perspective view of a heating wire for a heater according to the present invention.
7 is a plan view of a heating wire for a heater according to the present invention.
8 is a cut-away sectional view of AA 'shown in FIG.
9 is a cross-sectional view of BB 'and CC' shown in FIG.

1 is a perspective view of a conventional hot wire for a heater.

Referring to FIG. 1, a conventional hot-wire for a heater is installed in a reaction unit composed of a heater in a diffusion furnace, which is a device for performing a core process for heat-treating a silicon substrate.

The heater constituting the reaction part is a heater designed to increase the temperature up to 1,250 degrees Celsius. As shown in FIG. 1, the heater is provided with a plate-shaped heat line, and the conventional heat line is made of an alloy of Fe / Cr / Al.

FIG. 2 is a plan view showing a modification of a hot wire, which is a problem that arises as a result of using a conventional hot wire for a heater.

Referring to FIG. 2, since a conventional plate-shaped hot-wire has a thickness of 1.0 mm to 1.5 mm, the hot-wire is deformed when the heater is used for a long time. (See reference numeral 16 (hot line deforming portion)).

As shown in FIG. 2, the conventional hot wire has a problem that the hot wire deforming portion 16 is generated or, in severe cases, the hot wire 10 is broken and the heater can no longer be used. This problem is caused by a structural problem in which the shape of the hot wire is zigzag.

3 is a plan view showing a path through which a user intends to flow in a conventional heating wire for a heater.

Referring to Fig. 3, the hot wire 10 constructed in the conventional zigzag shape does not flow along the ideal electric flow path 12, which is the center of the hot wire, which is the conductor shown in Fig.

The problem that the heat ray 10 is deformed or cut off is not easily generated if electricity flows through the heat ray 10 along the ideal electric flow path 12 shown in Fig.

Fig. 4 is a plan view showing a path through which electricity actually flows in a conventional heating wire for a heater. FIG. 5 is a plan view showing the degree of heat generation in a hot wire in a state where electricity flows in a conventional hot wire for a heater.

4 and 5, the actual path 14 through which the electric current flows in the conventional zigzag heating wire 10 for a heater is the shortest as shown in Fig. 4 in a zigzag heating wire 10 for a heater Electricity flows along the distance.

Accordingly, when a current flows in the conventional hot wire 10 for a heater, the hot wire portion around the actual path 14 through which the electricity flows becomes a portion 24 that is heated while generating more heat as shown in FIG.

If the conventional heating wire 10 is continuously used due to the above-described problems, the deformed portion 16 of the heating wire 10 may be generated or the heating wire may be broken.

This is because the peripheral portion of the actual path 14 through which electricity flows is not heated uniformly over the entire portion of the conventional heating wire 10, but is heated at a portion 24 that generates more heat. The deformed portion 16 is generated in the bent portion of the conventional hot wire 10 due to the difference in temperature heated inside the conventional hot wire 10 for a heater.

6 is a perspective view of a heating wire for a heater according to the present invention. 7 is a plan view of a heating wire for a heater according to the present invention.

6 and 7, the heating wire 30 for a heater according to the present invention has a wire-type heating wire having a circular cross-section and is formed in a zigzag shape. Then, the heating wire 30, which is an advantage of the conventional heating wire for a heater, The flat portion is flattened with respect to the straight portion excluding the bent portion in the up and down direction to constitute the thin plate portion 34 having a thin thickness.

The curved portion 32, which is a curved portion of the heating wire 30 according to the present invention, is formed in a cylindrical shape so that the heating wire 30 according to the present invention is used for a long time, Deformation of the bent portion 32 does not easily occur.

The plate-shaped portion 34 according to the present invention can be made flat only on one side by performing a pressing process (press process or the like) on one side of a linear portion of a wire-type heater heat wire 30 having a round cross-section, The upper and lower surfaces of the plate-like portion 34 may be flattened by pressing against the upper and lower portions of the heating wire 30 for the heater.

8 is a cross-sectional view taken along the line A-A 'shown in Fig. 9 is a cross-sectional view of B-B 'and C-C' shown in FIG.

Referring to FIGS. 8 and 9, the plate-shaped portion 34 of the hot-wire for a heater according to the present invention is constructed such that the wire-type hot-wire 30 is flat and thin and wide. Accordingly, heat is generated in the plate-shaped portion 34 of the heat ray for a heater according to the present invention with high efficiency.

Since the plate-like portion 34 of the present invention is manufactured by pressing against the linear portion of the heating wire 34 for heating the round cut surface, the corner portion is rounded. As shown in Fig. 9 (a), the plate-like portion 34 of the present invention may be configured such that both the upper and lower surfaces are flat, and only one surface is flat and the other surface is slightly convex.

Since the curved portion 32 of the heating wire for a heater according to the present invention is formed in a wire type having a circular cut surface, the thickness of the curved portion 32 is so thick that the heating wire 30 for a heater according to the present invention is used for a long time The deformation 16, which is similar to the conventional hot wire 10 for a heater, does not easily occur.

According to the heat ray for a heater according to the present invention, it is possible to maintain the same heat generation efficiency as a conventional plate-type heat ray, prevent the occurrence of a deformation of the heat ray in the bent portion due to use for a long time, The durability of the hot wire is increased, and the overall yield is increased in the industry using the hot wire for the heater.

While the preferred embodiments of the present invention have been described above using specific terms, such description is for illustrative purposes only and that various changes and modifications may be made without departing from the spirit and scope of the following claims. Day. Such modified embodiments are not to be understood individually from the spirit and scope of the present invention, but are to be regarded as falling within the scope of the appended claims.

10: Conventional hot wire 12: Ideal electric flow path
14: Actual electric flow path 16:
24:
30: heat line 32 of the present invention:
34:

Claims (2)

A heat wire which is formed in a zigzag shape and generates heat, which is composed of a conductor through which electricity flows;
The zigzag hot wire is composed of a bent portion 32 curved in a semicircular shape and a straight plate portion 34,
The curved bent portion 32 has a circular cross-sectional shape cut at a right angle with respect to a tangential line,
Wherein the straight plate portion (34) is configured such that its width is wider than the bent portion and its thickness is narrower than the bent portion.
The method according to claim 1,
Wherein the heater hot wire is a wire type heat wire having a circular cross-section cut at a right angle with respect to the longitudinal direction,
Characterized in that the plate-like portion (34) is constituted by deforming the flat shape by applying pressure to a linear portion except for the bent portion (32) bent upward and downward in a state where the hot wire is formed in a staggered shape. .
KR1020150041851A 2015-03-25 2015-03-25 Hot Wire for Heating Device KR101642510B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150041851A KR101642510B1 (en) 2015-03-25 2015-03-25 Hot Wire for Heating Device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150041851A KR101642510B1 (en) 2015-03-25 2015-03-25 Hot Wire for Heating Device

Publications (1)

Publication Number Publication Date
KR101642510B1 true KR101642510B1 (en) 2016-07-29

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200254814Y1 (en) 2001-08-31 2001-11-26 이현묵 An electric heating element
KR20020054814A (en) * 2000-12-28 2002-07-08 이계안 Water jacket core for cylinder block casting
KR20040086633A (en) * 2003-04-03 2004-10-12 신아에이티(주) Heating Unit
KR20140039855A (en) * 2012-09-25 2014-04-02 박영수 A foot mat with meating means
JP2014160673A (en) * 2014-04-30 2014-09-04 Jx Nippon Mining & Metals Corp MoSi2-MADE HEATING ELEMENT AND MANUFACTURING METHOD OF THE HEATING ELEMENT

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020054814A (en) * 2000-12-28 2002-07-08 이계안 Water jacket core for cylinder block casting
KR200254814Y1 (en) 2001-08-31 2001-11-26 이현묵 An electric heating element
KR20040086633A (en) * 2003-04-03 2004-10-12 신아에이티(주) Heating Unit
KR20140039855A (en) * 2012-09-25 2014-04-02 박영수 A foot mat with meating means
JP2014160673A (en) * 2014-04-30 2014-09-04 Jx Nippon Mining & Metals Corp MoSi2-MADE HEATING ELEMENT AND MANUFACTURING METHOD OF THE HEATING ELEMENT

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