KR101629704B1 - Leakage Test Device Using Line Laser and Leakage Test Method Thereof - Google Patents

Leakage Test Device Using Line Laser and Leakage Test Method Thereof Download PDF

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Publication number
KR101629704B1
KR101629704B1 KR1020150154478A KR20150154478A KR101629704B1 KR 101629704 B1 KR101629704 B1 KR 101629704B1 KR 1020150154478 A KR1020150154478 A KR 1020150154478A KR 20150154478 A KR20150154478 A KR 20150154478A KR 101629704 B1 KR101629704 B1 KR 101629704B1
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South Korea
Prior art keywords
inspection
height information
space
leakage
unit
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KR1020150154478A
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Korean (ko)
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김병순
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주식회사 나노하이테크
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/36—Investigating fluid-tightness of structures by using fluid or vacuum by detecting change in dimensions of the structure being tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/38—Investigating fluid-tightness of structures by using light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

The present invention relates to a leakage inspection apparatus using a line laser, and more particularly, to a leakage inspection apparatus using a line laser, which comprises a base and a chamber body provided at one side of the base and having an upper portion opened and a receiving space formed therein, And a vertically moving force providing means installed between the one side of the base portion and one side of the bottom surface of the upper cover to provide a movement force to the upper cover in a vertical direction of the chamber main body, A chamber and an open side surface of the chamber body, the chamber being provided with an inspection space that is formed to be movable in an outward direction in the accommodation space, the inspection space being recessed from the upper surface, a seating surface on which the inspection object is placed, , An upper surface which is in close contact with a bottom surface of the upper cover is sealed along the circumferential direction A vacuum induction unit installed to communicate with the inspection space and guiding the inspection space to a vacuum pressure state by discharging the inside air of the inspection space to the outside, and a vacuum guide unit installed on the other side of the base unit, A transfer unit installed at one side of the chamber to move the inspection unit, and a scanning unit installed at a side of the transfer unit to scan a linear laser to each inspection area of the inspection object at the atmospheric pressure, And the second height information of each inspection area of the inspection object is calculated by scanning a linear laser to each inspection area of the inspection object while the inspection space is guided to the vacuum pressure, The laser irradiation unit and the calculated first height information and the second height information are compared with each other, It comprises a leakage checking unit for checking whether or not the leakage occurs in reverse.
According to the present invention, the presence or absence of leakage of each inspection area of the inspection object is checked using the fine height change of each inspection area of the inspection object measured by the line laser, It is possible to more accurately check whether a leak has occurred.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a leakage inspection apparatus and a leakage inspection method using a line laser,

The present invention relates to a leakage inspection apparatus and a leakage inspection method using a line laser, and more particularly, to a leak inspection apparatus and a leakage inspection method using a line laser, And more particularly, to a leak inspection apparatus and a leak inspection method using a line laser.

Generally, medicines, diagnostic reagents and processed food products are supplied to consumers in a sealed state in a plastic or can to prevent deterioration due to external factors.

Because of the structural characteristics of the above products, it is very important to test the reliability of the product because it may cause fine pinholes in the manufacturing process or may cause leak in the product because the sealing condition is released due to the defective part of the joint.

For this reason, in order to inspect the hermetic state of the product, there has been conventionally employed a vacuum chamber having a constant size, which is shielded from the outside, a vacuum pump for guiding the inside of the vacuum chamber into a vacuum state, and a pressure sensor And a vacuum leakage inspection apparatus is used to check the airtightness of the product.

In the conventional vacuum leak inspection apparatus, when the change of the vacuum pressure inside the vacuum chamber is not detected through the pressure sensor while the inside of the vacuum chamber containing the inspection target product is guided to the vacuum state through the vacuum pump and maintained for a predetermined time It is determined that leakage does not occur in the inspection target product, and when a change in the vacuum pressure inside the vacuum chamber is detected through the pressure sensor, it is judged that leakage of the inspection target product has occurred.

However, in the conventional vacuum leak inspection apparatus, when applied to a small packaged product in the form of a pill or a stick having a small cross-sectional area in which a pressure change is very small at the occurrence of leakage, It is difficult to detect the change of the air pressure, so that it is not possible to accurately detect whether the product is leaking.

Korean Laid-Open Patent Application No. 2013-0027151 entitled " Leak Test Device of Pouch Cell &

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a method and apparatus for checking whether leakage occurs in each inspection region of an inspection object, using a minute height change of each inspection region of the inspection object, And to provide a leak inspection apparatus and a leak inspection method using a line laser.

According to another aspect of the present invention, there is provided an apparatus for inspecting leakage of an object to be inspected in which a pressure change occurs finely when leakage occurs, the apparatus comprising: a base unit; An upper cover provided on an upper portion of the chamber body and having a viewing window formed on one side thereof, and an upper cover provided between one side of the base portion and one side of the bottom surface of the upper cover, And an upper and lower moving force providing means for providing a moving force in the up-and-down direction of the main body of the chamber, and an inspection space which is installed movably in an outward direction in the accommodating space through an open side surface of the chamber main body, A seating surface on which the object to be inspected is placed is formed in the inspection space, And a sealing member provided on an upper surface of the inspection space to seal the inspection space and the outside along a circumferential direction on an upper surface closely contacting the bottom surface of the inspection space, A vacuum guiding part for guiding the inspection space into a vacuum state, and a transfer part installed at the other side of the base part to be movable along one direction of the chamber, and a transfer part installed at one side of the transfer part, A linear laser is scanned in each inspection region of the object to calculate first height information of each inspection region of the object to be inspected, and in a state where the inspection space is guided to the vacuum pressure, A line laser irradiation unit for calculating second height information of each inspection region of the inspection object, It is compared to the calculated first height information and a second height information leakage inspection apparatus using the line laser comprising the leakage checking unit for checking whether or not the leakage occurs in each inspection area of the target object is provided.

Here, the leak checking unit may determine that leakage occurs in each inspection area of the inspection object, when the difference between the corresponding first height information and the second height information of the inspection area of the inspection object is less than a predetermined value, When any one of the difference between the first height information and the second height information corresponding to each inspection region of the inspection object exceeds a preset value, it is determined that no leak occurs in each inspection region of the inspection object .

The apparatus further includes an image capturing unit installed at one side of the laser irradiation unit for capturing a plane image of the object to be inspected and a display unit for outputting a plane image of the object to be inspected provided from the image capturing unit to a screen, The inspection area of the inspection object where leakage occurs in the plane image is displayed and visually provided to the user.

In addition, the seating plate is inserted into one side of the outer surface of the chamber and is installed so as to be movable in the inward and outward directions of the chamber.

In addition, the seating plate may further include a sealing member on one side of the upper surface to seal the inspection space and the outside along the circumferential direction.

A method of testing a leak using a line testing apparatus using a line laser according to claim 1, the method comprising the steps of: placing an object to be inspected on a seating surface of the placing part; A first height information calculation step of calculating a first height information of each inspection area of the inspection object by scanning a linear laser beam on the inspection area and a vacuum guide part, And a second height information for calculating a second height information of each inspection region of the inspection object by scanning a linear laser to each inspection region of the inspection object using the line laser irradiation portion, Calculating step and the leak checker calculate first height information of each inspection area of the inspected object and And a leakage inspection step of comparing the first height information with the second height information and detecting whether leakage occurs in each inspection area of the object to be inspected.

According to the present invention, the presence or absence of leakage of each inspection area of the inspection object is checked using the fine height change of each inspection area of the inspection object measured by the line laser, It is possible to more accurately check whether a leak has occurred.

1 is a perspective view of a leakage inspection apparatus using a line laser according to an embodiment of the present invention.
2 is a partially exploded perspective view of a leakage inspection apparatus using a line laser according to an embodiment of the present invention.
3 is a plan view of a leakage inspection apparatus using a line laser according to an embodiment of the present invention.
4 is a side view of a leak inspection apparatus using a line laser according to an embodiment of the present invention.
5 is a schematic view of a display unit of a leak testing apparatus using a line laser according to an embodiment of the present invention.
6 is a schematic view illustrating an inspection process of a leak inspection apparatus using a line laser according to an embodiment of the present invention.

Hereinafter, the present invention will be described in detail with reference to the drawings. It is to be noted that like elements in the drawings are represented by the same reference numerals as possible. Further, detailed description of known functions and configurations that may unnecessarily obscure the gist of the invention will be omitted.

2 is a partially exploded perspective view of a leak testing apparatus using a line laser according to an embodiment of the present invention, and FIG. 3 is a cross-sectional view of a leak inspection apparatus using a line laser according to an embodiment of the present invention. FIG. 4 is a side view of a leakage inspection apparatus using a line laser according to an embodiment of the present invention. FIG.

Referring to FIGS. 1 to 4, a leakage inspection apparatus 1 using a line laser according to an embodiment of the present invention determines whether leakage occurs in an inspection area of a test object P in which a pressure change is finely generated when a leak occurs (Not shown), a conveying unit 40, a laser irradiating unit 50, and a leak checking unit (not shown) for inspecting the substrate 10, the chamber 20, the seating unit 30, the vacuum inducing unit .

Hereinafter, a blister pack in which a plurality of pockets for holding pills are formed on a surface of the object to be inspected P at a predetermined interval, and a cover for sealing a plurality of pockets is formed will be described as an example.

The inspection area means the cover surface of the area corresponding to the pocket of the blister pack.

The base portion 10 is formed in a substantially rectangular plate shape and is provided in a region to be installed and includes a chamber 20, a seating portion 30, a vacuum guide portion (not shown), a transfer portion 40, a laser irradiation portion 50 ). ≪ / RTI >

The chamber 20 includes a chamber body 21, an upper cover 22 and a shunt power providing means 23, which provide an area in which a seat 30 to be described later is accommodated.

The chamber body 21 is formed in a rectangular parallelepiped shape with an open upper part and a receiving space S 1 formed therein and a side surface thereof being opened to receive a seating part 30 described later in the receiving space S 1 Lt; / RTI >

The upper cover 22 is formed in a rectangular plate shape and has a viewing window 22a formed on one side thereof and vertically movably installed on the upper portion of the chamber body 21. [

The upper cover 22 can be easily accommodated in the accommodation space S 1 of the chamber body 21 when the seating portion 30 described later is accommodated through the opened one side surface of the chamber body 21. And moves downward when the seating part 30 is received in the accommodation space S 1 of the chamber main body 21 and is brought into close contact with the upper part of the chamber main body 21, 30 to seal the inspection space S 2 formed on the seating surface 31 of the seating part 30 to be described later.

The vertically movable force providing means 23 is provided between one side of the base portion 10 and one side of the bottom surface of the upper cover 22 to provide the upper cover 22 with a moving force in the vertical direction of the chamber body 21, May be used.

The seating part 30 is provided in a rectangular plate shape and is formed with an inspection space S 2 which is recessed on one side of the upper surface and the inspection space S 2 A seating surface 31 on which the inspection object P is seated is formed on the inner bottom surface formed.

The seating part 30 is installed to be movable in the inward and outward directions of the chamber body 21 through one opened side of the chamber body 21. [

In this embodiment, the seating part 30 includes a plurality of receiving grooves 31a corresponding to the pockets of the blister pack on the seating surface 31 so as to accommodate the pockets of the blister pack as the inspected object P Spaced apart from each other.

In addition, the seating portion 30 is preferably the upper cover 22 and a check in the peripheral direction on the upper surface side to be in close contact space the closure member 32 of which the fluid material for sealing (S 2) and the outer installation .

The vacuum guide portion (not shown) receiving part (30) check to be formed in the upper space (S 2) and is provided to communicate, to discharge the air inside the test space (S 2) to the external test space (S 2) Vacuum To the state.

The transfer unit 40 includes a support frame 41, a transfer bar 42, a transfer block 43, a rotation force transmitting unit 43, (44), a rotational force providing means (45), and a cable chain (46).

The support frame 41 includes a vertical support 41a having one end movably installed along the direction of one side of the chamber 20 on the other side of the base 10 and the other end inclined upwards in the direction of the chamber 20, And a horizontal support table 41b extending horizontally from the other end of the vertical support table 41a toward the chamber 20. A line laser irradiation unit 50 to be described later is installed on the bottom surface of the other end of the horizontal support table 41b do.

In addition, a moving structure of the vertical support 41a of the support frame 41 may be a generally known LM guide structure.

The conveying bar 42 is provided along one side of the base portion adjacent to the support frame 41 along the conveying direction of the support frame 41, and screw-type threads are formed on the outer circumferential surface.

One end of the transfer block 43 is fixedly coupled to one side of the vertical support 41a of the support frame 41 and the other side is inserted into the transfer bar 42. The other end of the transfer block 43 is connected to the outer peripheral surface of the transfer bar 42 And a screw thread corresponding to the formed thread is formed and movably screwed to the outer circumferential surface of the transfer bar 42.

The rotational force providing means 44 is for providing rotational force to the transfer bar 42, and a generally known motor may be used.

The rotational force transmitting means 45 is for transmitting the rotational force of the rotational force providing means 44 to the transfer bar 42 and includes a drive pulley 45a coupled to the rotational shaft of the rotational force providing means 44, And a belt member 45c wound around a driven pulley 45b and a driven pulley 45b and a driven pulley 45a.

The cable chain 46 has one end coupled to one side of the upper surface of the base 10 and the other end coupled to one side of the conveying block 43 to guide the support frame 41 in one direction do.

When the rotational force providing means 44 is driven, the transfer unit 40 transmits the rotational force of the rotational force providing means 44 to the transfer bar 42 by the rotational force transmitting means 45, The support frame 41 moves together with the transfer block 43 as the transfer block 43 moves along one direction of the chamber 20. [

The line laser irradiation unit 50 is coupled to one side of the bottom surface of the horizontal support 41b of the support frame 41 of the transfer unit 40 and moves together with the transfer unit 40 along one direction of the chamber 20, S 2) calculating a first height information of each inspection area of the inspection object (P) by scanning a laser with a linear to each inspection area of the inspection object (P) in which the atmospheric pressure, and the inspection space (S 2) is true The second height information of each inspection area of the inspection object P is calculated by scanning a linear laser to each inspection area of the inspection object P in the state of being induced by the air pressure.

The line laser irradiation unit 50 includes a light emitting unit for irradiating a linear laser to an inspection area of the inspection object P and a light receiving unit for receiving a linear laser reflected from the inspection area of the inspection object P .

The leak inspection part (not shown) compares the first height information and the second height information of each inspection area of the inspection object P calculated by the line laser irradiation part 50 to generate leakage of each inspection area of the inspection object P It checks whether it is.

As described above, the leakage inspection apparatus 1 using the line laser according to the embodiment of the present invention measures the minute height change of each inspection region of the inspection object P using a line laser, It is possible to more precisely check the leak of the inspection area of the inspection object P in which a pressure change slightly occurs at occurrence of leak.

5 is a schematic view of a display unit of a leak testing apparatus using a line laser according to an embodiment of the present invention.

The leakage inspection apparatus 1 using a line laser according to an embodiment of the present invention further includes an image photographing unit (not shown) and a display unit 60.

An image capturing unit (not shown) is provided at one side of the inside of the line laser irradiating unit 50 and captures a plane image of the object P to be inspected by the line laser irradiating unit 50.

As shown in FIG. 5, the display unit 60 outputs a plane image of the inspection object P provided from an image photographing unit (not shown) as a screen and provides it to a user.

The leak checking unit (not shown) displays the inspection area where leakage is detected on the plane image of the inspection object P output to the display unit 60, and visually provides the inspection area to the user.

Hereinafter, an inspection method using a leakage inspection apparatus using a line laser according to an embodiment of the present invention will be described with reference to the drawings.

6 is a flowchart schematically illustrating a leakage inspection method using a leakage inspection apparatus using a line laser according to an embodiment of the present invention.

Referring to FIG. 6, a leakage inspection method using a leak inspection apparatus using a line laser according to an embodiment of the present invention includes a step of placing an object to be inspected, a first height information calculation step, a vacuum pressure induction step, a second height information calculation step And a leak checking step.

In the seating step of the object to be inspected, the seating part 30 on which the object P is placed is moved to the inside of the accommodation space S 1 of the chamber body 21 while the upper cover 22 is moved to the upper part of the chamber body 21 The upper cover 22 is moved downward to seal the accommodation space S 1 of the chamber body 21 and to close the inspection space S formed on the seating surface 31 of the seating plate 30 2 ). (S1)

In the first height information calculation step, the line laser irradiating unit 50 is moved through the conveying unit 40 along one direction of the chamber 20, and the inspected object P, which is seated on the seating surface 31 of the seating unit 30, The first height information of each inspection region of the inspection object P is calculated.

At this time, the inspection space S 2 formed on the seating surface 31 of the seating part 30 is in an atmospheric pressure state. (S2)

The air in the inspection space S 2 formed on the seating surface 31 of the seating part 30 is discharged to the outside through the vacuum induction part (not shown) to guide the inspection space S 2 to the vacuum pressure (S3)

In the second height information calculation step, the line laser irradiating unit 50 is moved through the conveying unit 40 along one direction of the chamber 20, and the inspected object P, which is seated on the seating surface 31 of the seating unit 30, And the second height information of each inspection region of the inspection object P is calculated by scanning a linear laser in each inspection region of the inspection target P. (S4)

In the leak inspection step, a leak inspection unit (not shown) compares the first height information and the second height information of each inspection region of the inspection object P provided from the line laser irradiation unit 50, Check whether the area has leaked.

More specifically, the leak checking unit (not shown) detects the difference between the first height information and the second height information corresponding to the inspection regions of the inspection object P calculated by the line laser irradiating unit 50, Mu m) or less, it is determined that leakage has occurred in the corresponding inspection area.

This is because if a leak does occur, both the inner pressure and the pressure in the inspection space (S 2) of the examination area, so induced by vacuum pressure state displacement is not generated in the test area of each inspection area of the inspection object (P) a second height This is because the information is not changed.

The leak inspection unit (not shown) determines whether any one of the difference between the corresponding first height information and the second height information of each inspection area of the inspection object P calculated by the line laser irradiation unit 50 is equal to or greater than a predetermined value 1 Mu m), it is determined that leakage does not occur in the corresponding inspection area.

This is because when the leakage does not occur in each inspection area of the inspection object P, the inspection area is separated from the inspection area (S 2 ) due to the difference between the internal pressure of the inspection area at the atmospheric pressure state and the internal pressure of the inspection space S 2 ) direction and displacement occurs, so that the second height information changes. (S5)

Although the present invention has been described in connection with the preferred embodiments, it is possible to make various modifications and variations without departing from the spirit and scope of the invention. It is, therefore, to be understood that the appended claims will include all such modifications and changes as fall within the true spirit of the invention.

1: Leak inspection system using line laser
10: base portion 20: chamber
21: chamber body 22: upper cover
22a: view window S 1 : accommodation space
23: Up and down movement force providing means 30:
31: seat surface 31a: receiving groove
32: sealing member 40:
41: support frame 41a: vertical support
41b: Horizontal support bar 42: Feed bar
43: feed block 44: rotational force providing means
45: Torque transmitting means 45a: Driving pulley
45b: a driven pulley 45c: a belt member
46: cable chain 50: line laser irradiation part
60: Display part S 2 : Inspection space
P: Inspection object

Claims (6)

1. An apparatus for inspecting leakage of a test object in which a pressure change slightly occurs when a leak occurs,
A base portion;
An upper cover provided on one side of the base and having an upper portion opened and a receiving space formed therein and having one side opened, an upper cover installed on the upper portion of the chamber body so as to be movable up and down, And a vertical movement force providing means provided between one side and one side of the bottom surface of the upper cover to provide a movement force to the upper cover in a vertical direction of the chamber main body;
Wherein the inspecting space is formed to be movable in an outward direction in the accommodating space through an opened one side surface of the chamber body, a seating surface in which the inspected object is seated is formed in the inspecting space, And a sealing member which seals the inspection space and the outside along a circumferential direction on an upper surface of the upper cover closely contacting the bottom surface of the upper cover;
A vacuum guiding part installed to communicate with the inspection space and guiding the inspection space to a vacuum pressure state by discharging the inside air of the inspection space to the outside;
A transfer part installed on the other side of the base part and movably installed along one direction of the chamber;
The first height information of each inspection area of the inspection object is scanned by scanning a linear laser to each inspection area of the inspection object while the inspection space is at atmospheric pressure, A line laser irradiator for calculating a second height information of each inspection area of the inspection object by scanning a linear laser beam to each inspection area of the inspection object in a state of being induced by air pressure;
And a leakage inspection unit for comparing the calculated first height information with the second height information to check whether leakage occurs in each inspection region of the inspection object. The method according to claim 1,
The leak checking unit
When the difference between the first height information and the second height information corresponding to the respective inspection regions of the inspection object is equal to or less than a preset value, it is determined that leakage occurs in each inspection region of the inspection object,
When any one of the difference between the first height information and the second height information corresponding to each inspection region of the inspection object exceeds a predetermined value, it is determined that leakage does not occur in each inspection region of the inspection object Wherein the line inspection system comprises: The method according to claim 1,
An image capturing unit installed at one side of the laser irradiation unit and capturing a planar image of the object to be inspected;
And a display unit for outputting a plane image of the inspection object provided from the image capturing unit to a screen,
Wherein the leakage inspection unit displays an inspection area of the inspection object in which the leakage occurs in the plane image, and visually provides the inspection area to a user. delete delete A leak inspection method using a leak inspection apparatus using a line laser according to claim 1,
Placing an object to be inspected on the seating surface of the seating portion;
A first height information calculation step of calculating a first height information of each inspection area of the inspection object by scanning a linear laser to each inspection area of the inspection object using the line laser irradiation part;
A vacuum guiding step of guiding the inspection space to a vacuum pressure state by discharging the inside air of the inspection space to the outside through a vacuum guiding part;
A second height information calculation step of calculating a second height information of each inspection area of the inspection object by scanning a linear laser to each inspection area of the inspection object using the line laser irradiation part;
And a leakage checking step of comparing the first height information and the second height information of each of the inspection areas of the inspected object with the leak inspection unit to detect whether leakage occurs in each inspection area of the inspection object. Leak inspection method using laser.
KR1020150154478A 2015-11-04 2015-11-04 Leakage Test Device Using Line Laser and Leakage Test Method Thereof KR101629704B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101894201B1 (en) 2018-01-02 2018-10-04 (주)휴엔텍 Inspection apparatus for laser vision sensor
CN111751065A (en) * 2020-06-30 2020-10-09 博众精工科技股份有限公司 Sealing detection device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030088371A1 (en) * 2001-11-05 2003-05-08 Parker Andrew Ernest Leak detection apparatus for blister packs
KR20130027151A (en) 2011-09-07 2013-03-15 주식회사 비주 Pouch cell leak tester
KR101267150B1 (en) * 2011-04-11 2013-05-24 (주)엘지하우시스 Apparatus for vacuum pressure check of multistage vacuum insulation panel and measuring method using the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030088371A1 (en) * 2001-11-05 2003-05-08 Parker Andrew Ernest Leak detection apparatus for blister packs
KR101267150B1 (en) * 2011-04-11 2013-05-24 (주)엘지하우시스 Apparatus for vacuum pressure check of multistage vacuum insulation panel and measuring method using the same
KR20130027151A (en) 2011-09-07 2013-03-15 주식회사 비주 Pouch cell leak tester

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101894201B1 (en) 2018-01-02 2018-10-04 (주)휴엔텍 Inspection apparatus for laser vision sensor
CN111751065A (en) * 2020-06-30 2020-10-09 博众精工科技股份有限公司 Sealing detection device

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