KR101618714B1 - Heating element having a fine pattern - Google Patents
Heating element having a fine pattern Download PDFInfo
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- KR101618714B1 KR101618714B1 KR1020150098006A KR20150098006A KR101618714B1 KR 101618714 B1 KR101618714 B1 KR 101618714B1 KR 1020150098006 A KR1020150098006 A KR 1020150098006A KR 20150098006 A KR20150098006 A KR 20150098006A KR 101618714 B1 KR101618714 B1 KR 101618714B1
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- insulating layer
- heating
- spray coating
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Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/16—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being mounted on an insulating base
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/013—Heaters using resistive films or coatings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/017—Manufacturing methods or apparatus for heaters
Landscapes
- Surface Heating Bodies (AREA)
Abstract
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating element having a fine pattern and a method of manufacturing the same, and more particularly, to a heating element having a minute pattern formed by a patterned mask and a spray coating. To this end, a first insulating layer formed by spray coating a first insulating material on the base material to insulate the base material from the base material, a first insulating layer formed on the first insulating layer by spray coating a metal component, A second insulating layer formed by spray coating a space between the exothermic fine patterns and a second insulating layer on the exothermic layer so as to insulate the exothermic layer on which the exothermic fine pattern is formed, A heat-sensitive material having a fine pattern is disclosed.
Description
The present invention relates to a heating element having a fine pattern and a method of manufacturing the same, and more particularly, to a heating element having a fine pattern that forms a fine pattern by a mask with a patterned mask and a spray coating, and a method of manufacturing the same.
A conventional heater embeds a sheath heater (heating element) in a metal base material of a lower plate, and welds the metal base material of the upper plate and the metal base material of the lower plate to manufacture a heater. Generally, a sheath heater generates heat substantially by an external power supply. Such a sheath heater is roughly made of nickel-chromium, and the insulator is provided so as to surround the hot wire. The configuration of such a sheath heater can be referred to in the present invention as required according to the conventionally known configuration.
Accordingly, the lower metal base material, the sheath heater embedded in the lower metal base material, and the upper metal base material are sequentially stacked in this order. At this time, there is a limit to the pattern due to the nature of the sheath heater, and in order to embed the sheath heater in the embedding hole, the thickness of the metal base material of the lower plate should be increased to some extent. When the base material becomes thick, the weight of the product itself becomes heavy, so that there is a problem that the drive shaft lifts the heater in the process chamber or receives a lot of force when the heater is put in place. In addition, since the heater has a quantity of heat corresponding to the mass of the heater itself, there is a problem that rapid response is not obtained when the temperature is rapidly increased or rapidly cooled.
In addition, since the diameter of the sheath heater is about 10 pie, the arrangement of the sheath heater can not be densely arranged, and in order to change the arrangement of the sheath heater to meet the requirements of the customer, there is a problem that the base material must be newly manufactured. Furthermore, it is difficult to reuse the heater since the sheath heater is embedded in the buried hole of the lower metal base material.
SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a heating element for forming a fine pattern by a patterned mask and spray coating to supply power to a fine pattern to generate heat. have.
However, the objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.
It is an object of the present invention to provide a plasma display panel comprising a first insulating layer formed by spray coating a first insulating component on a base material to be insulated from a base material and a base material, And a second insulating component is spray-coated on the space between the exothermic fine patterns and on the exothermic layer to insulate the exothermic fine pattern from the object to be insulated or placed on the upper side And a second insulating layer formed on the second insulating layer.
It is another object of the present invention to provide a method of manufacturing a semiconductor device, which comprises a base material made of an insulating material, a heating layer on which an exothermic fine pattern is formed by spraying a metal component onto the base material,
And an insulating layer formed by insulating the heating fine patterns and insulating the space between the heating fine patterns so as to insulate the heating target from the object placed on the upper side and spraying an insulating component on the heating layer. ≪ / RTI >
The base material is made of a metal and is preferably made of at least one of Al, Fe, Ni, Ti, Mo, and SUS, and a first insulating layer is provided to insulate the base metal from the heating layer.
The base material is made of a ceramic component and an insulating layer for insulating each other between the ceramic base material and the heat generating layer is not provided.
The exothermic fine pattern is a fine pattern formed in correspondence with the vacant area pattern of the mask by thermal spray coating using a patterned mask, and has a width and an interval that can generate heat by consuming electric power in the process chamber.
The exothermic fine pattern varies the temperature distribution locally by making the intervals of the exothermic fine patterns dense or coarse.
Wherein the first insulating layer has a thickness of 300 to 1000 탆 and is made of at least one of Al 2 O 3 , Y 2 O 3 , YF 3 , YAG, YSZ and ZrO 2 , the heating layer has a thickness of 50 μm or more, W (tungsten), Ni, Fe, and Cr is made of at least any one or a mixture or alloy made of the alloy, and the second insulating layer is 150 ~ 250㎛ thickness, Al 2 O 3, Y 2 O 3, YF 3, YAG , YSZ, and ZrO 2 , and the heating layer has a thickness of 50 μm or more and is made of at least one of W (tungsten), Ni, Fe, and Cr alloy, Is made of at least one of Al 2 O 3 , Y 2 O 3 , YF 3 , YAG, YSZ, and ZrO 2 .
And a bonding layer for spraying and coating a ceramic material between the base material and the heat generating layer so that the heat generating layer maintains a relative adhesive force relative to that formed on the surface of the base material, and the bonding layer has a thickness of 5 to 300 탆.
An object of the present invention is to provide a method of manufacturing a semiconductor device, which comprises: forming a first insulating layer by spray coating a first insulating component on a base material to insulate the base material; Forming a heating layer in a fine pattern corresponding to the pattern of the mask, and forming a second insulating layer by spray coating a space between the fine patterns and a second insulating component over the heating layer. A method of manufacturing a heating element having a pattern can be achieved.
The object of the present invention is to provide a method of manufacturing a semiconductor device, which comprises the steps of forming a heating layer in a fine pattern corresponding to a pattern of a mask by spray coating a metal component on a base material using a patterned mask, And forming an insulating layer by spray coating the insulating layer on the insulating layer.
The base material is composed of at least one of Al, Fe, Ni, Ti, Mo, and SUS. The first insulating layer has a thickness of 300 to 1000 탆 and is made of at least one of Al 2 O 3 and Y 2 O 3 And the heat generating layer is made of at least one of W (tungsten), Ni, Fe, and Cr alloy or a mixed alloy, the thickness of the second insulating layer is 150 to 250 탆, , Y2O3, and YF3.
Wherein the base material is made of a ceramic component and the heat generating layer is made of at least one of W (tungsten), Ni, Fe, and Cr alloy or a mixed alloy and has a thickness of 100 to 1000 Mu m and at least one of Al2O3, Y2O3, and YF3.
The mask is a heat generating layer film. In the step of forming the heat generating layer, a fine pattern is formed according to the film pattern of the heat generating layer formed by patterning the heat generating layer film by adhering to the surface of the base material or the first insulating layer and spray coating.
The heat generating layer film is a heat resistant tape having at least one of a heat resistant polyimide film, a glass fiber type, a PTFE (Teflon) type, a polyester (PET) type, an aramid (Nomex) type and a silicone fiberglass type.
The step of forming the heat generating layer includes the steps of cutting the heat resistant adhesive film into a predetermined heat generating pattern, bonding the cut heat resistant adhesive film to the surface of the base material or the first insulating layer, Forming a fine pattern corresponding to the blank area pattern of the cut heat-resistant adhesive film, and removing the heat-resistant adhesive film.
The step of preheating the base material to a predetermined temperature by putting the base material into a plasma gun or an oven before the step of bonding can prevent the film from crying by rubbing only the patterned portion of the heat resistant adhesive film.
A buffer layer is provided between the metal base material and the first insulating layer to reduce the difference in thermal expansion coefficient by at least one of Ni, Al, Cr, Co, Mo, and at least one of the mixed alloys.
Each of the insulating layers is coated with an organic silicon compound or an inorganic silicon compound, and then subjected to a sealing treatment.
According to the present invention as described above, since the embedding hole is not formed in the base material, the base material can be processed to be thinner than the conventional product, thereby lowering the overall weight of the product. As the weight is smaller than that of the conventional heater, It is possible to proceed with a quick response.
In addition, according to the present invention, since the insulating layer and the heat generating layer are all formed by spray coating, the base material can be re-coated and re-coated, and the product can be reused.
According to the present invention, the shapes and shapes of the fine patterns can be locally different from each other, the temperature distribution can be locally varied, the heating layer can be formed in a fine pattern, .
BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate preferred embodiments of the invention and, together with the description, serve to further the understanding of the technical idea of the invention, It should not be construed as limited.
1 is a sectional view of a heating element using a metal base material according to a first embodiment of the present invention,
FIG. 2 is a view showing a buffer layer and a top coating layer in FIG. 1,
3 and 4 are views showing positions where a heat generating layer can be formed,
5 is a cross-sectional view of a heating element using a ceramic base material according to a second embodiment of the present invention,
FIG. 6 is a view including a buffer layer and a top coating layer in FIG. 5,
7 is a patterned ring view of the mask of the present invention using a heat resistant adhesive film,
FIG. 8 is a view in which the mask pattern of FIG. 7 is divided into a first area pattern and a second area pattern, and a first area pattern is formed more densely than a second area pattern,
9 is a sectional view of a heating element using a metal base material according to a third embodiment of the present invention,
10 is a cross-sectional view of a heating element using a ceramic base material according to a fourth embodiment of the present invention.
Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. In addition, the embodiment described below does not unduly limit the content of the present invention described in the claims, and the entire structure described in this embodiment is not necessarily essential as the solution means of the present invention.
<Configuration of Heating Element>
A heating element according to an embodiment of the present invention is a heater used for providing uniform heat to a wafer or flat panel display in a process process chamber for processing a wafer or a flat panel display (a target to which heat is transferred by a heating element). Thus, a wafer or flat panel display to be processed is placed on top of a heating element according to an embodiment of the present invention and processed by receiving uniform heat.
A heating element according to an embodiment of the present invention may be used in a process in which the temperature is low in a low temperature process of about 150 degrees Celsius or less, but the temperature uniformity should be uniformly about 1% or less, or may be used in a process It is a heating element that can be used in processes up to 800 degrees Celsius. Hereinafter, the structure and function of a heating element according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
In the first and second embodiments described later, the
(Embodiment 1)
1, a heating element according to an exemplary embodiment of the present invention includes a
The first insulating
The
The fine pattern is formed by spray coating using the
The
The second
The first insulating
In particular, the first and second insulating
Meanwhile, the first embodiment of the three-layer structure described above may be formed in a four-layer structure. That is, when the thermal expansion coefficient difference between the
When the base material is a conductive metal base material, it may have a three-layer structure as shown in FIG. 1 or a four-layer structure as shown in FIG. At this time, the
As shown in FIG. 1, a
As shown in FIGS. 1 and 2, the
(Second Embodiment)
The
Since the
However, since the
Particularly, in the insulating
5 and 6, the
The
The above-described heating element may not have a shaft for supporting the heater plate as in the conventional ceramic heater.
(Third Embodiment)
The heating element according to the third embodiment of the present invention is different from the first embodiment in that the
9, the
The
As shown in FIG. 9, the temperatures of the first region P1 and the second region P2 of the regions near the
The position and arrangement of the
The
A top coating layer is formed by spray coating using a corrosion resistant material (yttria, Y 2 O 3 ) on the upper surface (surface contacting the wafer) of the
(Fourth Embodiment)
The heating element according to the fourth embodiment of the present invention is different from the second embodiment in that the
The
The
As described above with reference to FIG. 9, the first region P1 and the second region P2 of the region adjacent to the heating element may have different temperatures from each other. That is, the temperature of the first region P1 may be relatively higher than that of the second region P2. In the second embodiment, the temperatures of the first region P1 and the second region P2 may be slightly different from each other, and therefore, the temperature of the first region P1 may be slightly different from that of the second region P2, There is a problem that the temperature is not uniform. When the
On the other hand, when the
The
The top coating layer is formed by spray coating using the corrosion resistant material (yttria, Y 2 O 3 ) on the upper surface (the surface contacting the wafer) of the
≪ Manufacturing method of heating element &
A method of manufacturing a heating element according to an embodiment of the present invention can be divided into two embodiments. For example, if the base material is a metal base material, an insulating layer should be formed on the upper part. Alternatively, if the base material is a ceramic base material, a heating layer may be formed without forming an insulating layer on the base material. Hereinafter, a method for manufacturing a heating element will be described in detail with reference to FIGS. 1 and 2. FIG.
(Embodiment 1)
First, referring to FIG. 1, when a heating element has a three-layer structure, a first insulating
However, the method of forming the heat generating layer may be the following two methods. For example, after forming the first insulating
Examples of the heat resistant tape having adhesive properties include a polyimide film, a glass fiber type, a PTFE (Teflon) type, a polyester (PET) type, an aramid (Nomex) type and a silicone fiberglass type. In the present invention, a polyimide film is described as an embodiment, but heat-resistant tapes having adhesiveness can be used.
As another example of the mask, a mask in which a heat generating pattern other than the polyimide film is patterned is sufficient. That is, a patterned mask may be disposed on the first insulating
Next, the heat generating layer
On the other hand, when the polyimide film is adhered to the surface of the first insulating
7, the formed
Next, after forming a fine pattern on the heat generating layer, a second insulating layer is formed by spray coating on the fine pattern interspace and the fine pattern surface for electrical insulation.
In the case where the heat generating element has a four-layer structure due to a large difference in thermal expansion coefficient between the
On the other hand, the first and second insulating layers 120.140 may include a liquid phase organic silicon compound (such as an organic silicon resin such as methyl silyl triisocyanate, phenyl silyl triisocyanate) or an inorganic silicon compound (such as a silicon alkoxide compound, A silicon compound of an alkali metal) or an epoxy system, and then the sealing treatment is performed by heating at 120 to 350 DEG C for 1 to 5 hours.
Finally, yttria may be coated (deposited) on the upper surface of the second insulating
(Second Embodiment)
When the base material is the
After the heating layer is formed, an insulating
However, the method of forming the heat generating layer may be the following two methods. For example, after the
In the first and second embodiments, a top coating layer may be formed on the surfaces of the upper insulating
(Third Embodiment and Fourth Embodiment)
The third and fourth embodiments of the present invention will be replaced by the heating element manufacturing methods of the first embodiment and the second embodiment, respectively. However, the thermocouple placement positions and the power connector placement positions in the third and fourth embodiments can be described with reference to Figs. 9 and 10, respectively.
As described above, the metal base material or the ceramic base material according to the present invention can be made thinner than the base material in which the conventional sheath heater is embedded. That is, the base material for embedding the existing sheath heater should be thick to embed the sheath heater, but the metal base material or the ceramic base material according to the present invention forms a fine pattern by spray coating instead of embedding the sheath heater The base material can be made thinner than the conventional one. Therefore, in the case of manufacturing a heating element by forming a fine pattern by using a mask and a spray coating, the weight of the product can be reduced by reducing the thickness of the base material compared to the case of manufacturing a heating element by using a conventional sheath heater, It is possible to solve the problem that the driving shaft receives a lot of force when the existing sheath heater is installed.
On the other hand, in the case of the sheath heater described above, the upper plate metal base material and the lower plate base metal material are welded together while being embedded in the lower plate base metal material. Therefore, in the case of a conventional sheath heater, it is difficult to reuse. However, in the case of the heating body according to the present invention, since each layer is formed of a spray coating, the surface of the base material can be reworked and the spray coating can be reused.
Although the present invention has been described with reference to the embodiment thereof, the present invention is not limited thereto, and various modifications and applications are possible. In other words, those skilled in the art can easily understand that many variations are possible without departing from the gist of the present invention. In the following description, well-known functions or constructions relating to the present invention as well as specific combinations of the components of the present invention with respect to the present invention will be described in detail with reference to the accompanying drawings. something to do
10: wafer or glass
P1: first region
P2: second region
100: heater (heating element)
110: metal base material
120: first insulating layer (lower insulating layer)
130: heating layer
140: second insulating layer (upper insulating layer)
151: buffer layer (undercoat layer)
161: Top coating layer
131: heating layer
181: Thermocouple (Thermo Couple)
191: Power connector
192: terminal
200: heater (heating element)
210: ceramic base material
220: heating layer
230: insulating layer (upper insulating layer)
241: bonding layer
251: Top coating layer
300: polyimide film (mask)
310: first region
320: second region
330: blank area
340: occupied area
400: heater (heating element)
410: metal base material
420: first insulating layer (upper insulating layer)
430: heating layer
431: heating layer
440: second insulating layer (lower insulating layer)
481: Thermocouple (Thermo Couple)
491: Power connector
500: heater (heating element)
510: ceramic base material
520: heating layer
521: Heating layer
530: insulating layer (lower insulating layer)
Claims (22)
A first insulating layer formed by spray coating a first insulating component on the surface of the base material so as to be insulated from the base material,
A heating layer on which an exothermic fine pattern for generating heat is formed by a power source applied from the outside by spray coating a metal component on the first insulating layer,
And a second insulation layer formed by spray coating a second insulation component including the space between the heating fine patterns and the heating layer to insulate the heating fine patterns from an object placed on the upper side,
Wherein the surface of the base material or the second insulating layer is coated or vapor-deposited with yttria for improving corrosion resistance.
A heating layer on which an exothermic fine pattern is formed by spraying a metal component onto the surface of the base material to generate heat by an external power source;
And an insulating layer formed by insulating the heat generating fine patterns and spraying the insulating material including the space between the heat generating fine patterns and the heat generating layer to insulate the object from the object,
Characterized in that the surface of the base material or the insulating layer is coated or vapor-deposited with yttria in order to improve corrosion resistance.
Wherein the base material, the first insulating layer, the heat generating layer, and the second insulating layer are sequentially stacked in this order on the basis of the target body.
Wherein the base material, the heating layer, and the insulating layer are sequentially stacked in this order on the basis of the target body.
The base material is made of a metal component,
Al, Fe, Ni, Ti, Mo, and SUS.
The base material is made of a ceramic component,
Wherein at least one of Al 2 O 3 , AlN, SiC, Y 2 O 3 , and Quartz is a bulk type.
The heat-
A fine pattern formed corresponding to a blank area pattern of the mask by spray coating using a patterned mask,
Wherein the heating chamber has a width and an interval which can generate heat by consuming electric power in the process chamber.
Characterized in that the temperature distribution can be varied locally by making the interval of the exothermic fine patterns dense or brittle.
Wherein the first insulating layer has a thickness of 300 to 1000 탆 and is made of at least one of Al 2 O 3 , Y 2 O 3 , YF 3 , YAG, YSZ, and ZrO 2 ,
Wherein the heating layer has a thickness of 50 占 퐉 or more and is made of at least one of W (tungsten), Ni, Fe, and Cr alloy,
Wherein the second insulating layer has a thickness of 100 to 1000 탆 and is made of at least one of Al 2 O 3 , Y 2 O 3 , YF 3 , YAG, YSZ, and ZrO 2 .
Wherein the base material and the heat generating layer are made of Al 2 O 3 , Y 2 O 3 , YF 3 , YAG, YSZ, and ZrO 2 And the bonding layer is further formed by spray coating,
The bonding layer is coated with the heating layer so that the bonding force is relatively maintained as compared with the case where the heating layer is directly coated on the surface of the base material,
The bonding layer has a thickness of 5 to 300 탆,
Wherein the heating layer has a thickness of 50 占 퐉 or more and is made of at least one of W (tungsten), Ni, Fe, and Cr alloy,
Wherein the insulating layer has a thickness of 100 to 1000 占 퐉 and is made of at least one of Al 2 O 3 , Y 2 O 3 , YF 3 , YAG, YSZ, and ZrO 2 .
A buffer layer may be provided between the metal base material and the first insulating layer so as to be spray coated with at least one of Ni, Al, Cr, Co, Mo, and at least one of the mixed alloys thereof in order to reduce a difference in thermal expansion coefficient Characterized in that the heating element has a fine pattern.
In the insulating layer,
Characterized in that at least one of an organic silicon compound, an inorganic silicon compound, and an epoxy compound is coated and heated to perform a sealing treatment.
A thermocouple is provided in the metal base region to measure the temperature,
And a power connector for supplying electricity to the heating layer is connected to the heating layer terminal through the second insulating layer.
A thermocouple is provided in the ceramic base material area to measure the temperature,
And a power connector for supplying electricity to the heating layer is connected to the heating layer terminal through the insulating layer.
The heat-
Wherein a spray coating is formed on the surface of the first insulating layer or a spray coating is formed on the groove formed in the first insulating layer.
In the case where the heating layer is formed by spray coating in the groove of the first insulating layer,
Wherein the interface of the heating layer is higher or lower than the interface of the first insulating layer, or the interface is the same.
The heat-
The base material or the surface of the bonding layer may be formed of a spray coating,
Or a spray coating is formed on the base material or the groove formed in the bonding layer.
When the heating layer is formed of a spray coating on the base material or the groove of the bonding layer,
Wherein the interface of the heating layer is higher or lower than the interface of the base material or the bonding layer, or the interface is the same.
The groove
Wherein the heat generating layer is formed by sandblasting.
Wherein the yttria coating or deposition comprises any one of spray coating, chemical vapor deposition, and physical vapor deposition to form an yttria thin film layer.
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KR1020150098006A KR101618714B1 (en) | 2015-07-09 | 2015-07-09 | Heating element having a fine pattern |
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KR1020150098006A KR101618714B1 (en) | 2015-07-09 | 2015-07-09 | Heating element having a fine pattern |
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KR1020150178947A Division KR20170007685A (en) | 2015-12-15 | 2015-12-15 | Heating element having a fine pattern and method thereof |
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