KR101598355B1 - Sensor measuring material properties of polymer composite - Google Patents

Sensor measuring material properties of polymer composite Download PDF

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KR101598355B1
KR101598355B1 KR1020150145371A KR20150145371A KR101598355B1 KR 101598355 B1 KR101598355 B1 KR 101598355B1 KR 1020150145371 A KR1020150145371 A KR 1020150145371A KR 20150145371 A KR20150145371 A KR 20150145371A KR 101598355 B1 KR101598355 B1 KR 101598355B1
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composite material
polymer composite
thin film
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thermal
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KR1020150145371A
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오동욱
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조선대학교산학협력단
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00Adaptations of thermometers for specific purposes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • G01N25/005Investigating or analyzing materials by the use of thermal means by investigating specific heat
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • G01N25/18Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
    • H05B3/00Ohmic-resistance heating
    • H05B3/10Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
    • H05B3/00Ohmic-resistance heating
    • H05B3/20Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/34Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater flexible, e.g. heating nets or webs

Abstract

The present invention relates to a sensor to measure physical properties of a polymer composite material and, more specifically, relates to a sensor to measure physical properties of a polymer composite material which accurately performs measurement by attaching anisotropic thermal properties of the polymer composite material including additives such as fillers directly on a surface of a test piece of the polymer composite material. According to the sensor to measure physical properties of a polymer composite material, the invention performs measurement by directly attaching thermal properties of the polymer composite material including additives on the surface of the test piece of the polymer composite material such that the invention performs a measurement simply and efficiently without adding an additional form or a thermal history to a test piece of a material. Moreover, in accordance with the sensor to measure physical properties of a polymer composite material, the invention accurately measures anisotropic thermal properties of the polymer composite material including additives such as fillers by location.

Description

[MEANS FOR SOLVING PROBLEMS] A sensor for measuring a material property of a polymer composite material,

The present invention relates to a polymer composite material property measuring sensor, and more particularly, to a polymer composite material which is capable of accurately measuring an anisotropic thermal property of a polymer composite material to which an additive such as a filler is added, And a sensor for measuring a physical property of a composite material.

Each material has inherent mechanical, electrical and thermal properties, and it is common to add such additives as fillers to improve these properties.

In particular, in the case of polymer composites, additives such as carbon or metal are added to improve mechanical, electrical and thermal properties. In the case of a polymer composite material in which additives such as fibers or flakes are added among such additives, the additives are aligned in the flow direction of the mold during molding such as injection or extrusion, The physical properties are anisotropic.

FIG. 1 is a cross-sectional view showing an arrangement state of a general polymer composite material to which a filler is added.

Referring to FIG. 1, it can be seen that the directions of the fillers added to the polymer composite material are uniformly arranged due to factors such as the thickness of the material, the bending angle, the radius of curvature, and the manufacturing environment at the bent portions. The thermal properties of polymer composites with these fillers exhibit different thermal properties depending on the location. Particularly, the thermal conductivity at the bent portion of the material is greatly different from the thermal conductivity at other portions due to alignment and orientation of the additives .

Therefore, accurate measurement of the thermophysical properties of the polymer composite material is recognized as a very important problem in industry.

In general, a laser flash apparatus (LFA) or a heat flow meter is used for measuring the thermal properties of a polymer composite material.

However, when the thermo-physical properties of the polymer composite material are measured using the conventional measuring apparatus, there is a problem that only a limited size or thickness of the specimen can be measured. In order to accurately measure the thermal properties, the thermal history is added to the specimen through additional molding or the like, and thus the measured specimen has a thermal property different from that of the final material to be measured. .

In addition, it is desirable to measure by attaching a sensor directly to the material of the finished product for accurate measurement. It is difficult to deposit the sensor directly on the polymer composite material.

Therefore, it is required to develop a new measuring device capable of accurately measuring the thermophysical properties of polymer composite materials.

Open Patent No. 10-2015-0047700 (published on May 5, 2015)

DISCLOSURE OF THE INVENTION The present inventors have made efforts to solve all the disadvantages and problems of the prior art as described above, and as a result, they have found that a PDMS substrate, which can be directly attached to a surface of a workpiece without adding additional shape or thermal history to the workpiece, The present invention has been accomplished by applying a thin film heating wire.

Accordingly, an object of the present invention is to provide a physical property measuring sensor of a polymer composite material capable of measuring the thermal property of a polymer composite material to which an additive such as a filler is added, directly on the surface of the material sample.

Another object of the present invention is to provide a polymer composite material property measuring sensor capable of efficiently and accurately measuring an anisotropic thermo physical property of a polymer composite material to which an additive such as a filler is added.

The objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

According to an aspect of the present invention, there is provided a plasma display panel comprising: a substrate; A thin film heating wire provided on at least one of the substrates to perform temperature measurement together with generating heat; An alternating-current power supply for supplying an alternating current to the thin-film hot wire; And a controller for receiving a temperature signal from the thin film heating wire and measuring the thermal properties of the measurement object, wherein the thermal property of the measurement object is measured for each position of the measurement object .

In a preferred embodiment, the object to be measured is a polymer composite material.

In a preferred embodiment, the thermal properties are any of thermal conductivity, thermal diffusivity and specific heat.

In a preferred embodiment, the thermal properties are anisotropic thermal properties of the polymer composite.

In a preferred embodiment, the material property measuring sensor of the composite material is capable of measuring thermal properties using 3 omega (3ω) thermal analysis.

In a preferred embodiment, the substrate is made of polydimethylsiloxane (PDMS) or captone tape, and the substrate is preferably formed to a thickness of 1 to 10 μm.

In a preferred embodiment, the thin film hot wire is made of any one selected from the group consisting of Al, Pt, Ni, W, Ti and Cr, the thin film hot wire has a length of 2 mm or less, And is preferably formed to have a constant width in the range of 1 to 40 mu m.

In a preferred embodiment, the gap between the thin film heating wire and the adjacent thin film heating wire is formed to be parallel to each other in the longitudinal direction, maintaining a constant gap of several tens of micrometers to several millimeters.

In order to accomplish the above object, the present invention also provides a method of manufacturing a semiconductor device, comprising: a substrate attached to a surface of a measurement object; A thin film heating wire provided on the substrate and generating at least one heat; A temperature sensor provided at a predetermined interval from the thin film heating line for measuring a temperature; An alternating-current power supply for supplying an alternating current to the thin-film hot wire; And a controller for receiving the temperature signal of the temperature sensor and measuring the thermal properties of the measurement object, wherein the thermal property of the measurement object is measured for each position.

In a preferred embodiment, the object to be measured is a polymer composite material.

In a preferred embodiment, the thermal properties are any of thermal conductivity, thermal diffusivity and specific heat.

In a preferred embodiment, the thermal properties are anisotropic thermal properties of the polymer composite.

In a preferred embodiment, the substrate is made of polydimethylsiloxane (PDMS) or captone tape, and the substrate is preferably formed to a thickness of 1 to 10 μm.

In a preferred embodiment, the thin film hot wire is made of any one selected from the group consisting of Al, Pt, Ni, W, Ti and Cr, the thin film hot wire has a length of 2 mm or less, And is preferably formed to have a constant width in the range of 1 to 40 mu m.

In a preferred embodiment, the gap between the thin film heating wire and the adjacent thin film heating wire is formed to be parallel to each other in the longitudinal direction, maintaining a constant gap of several tens of micrometers to several millimeters.

In a preferred embodiment, the thin film hot wire adjacent to the thin film hot wire may be provided at a predetermined angle in the longitudinal direction.

The present invention has the following excellent effects.

First, according to the polymer composite material property measuring sensor of the present invention, since the thermo-physical properties of the polymer composite material to which the additive is added can be directly measured on the surface of the material specimen, additional shape or thermal history Can be measured easily and efficiently.

In addition, according to the physical property measuring sensor of the polymer composite material of the present invention, anisotropic thermal properties of the polymer composite material with additives such as filler can be accurately measured.

FIG. 1 is a cross-sectional view showing an arrangement state of a general polymer composite material to which a filler is added.
FIG. 2 is a view showing a physical property measuring sensor of a polymer composite material according to a first embodiment of the present invention.
3 is a view showing a physical property measuring sensor of a polymer composite material according to a second embodiment of the present invention.
4 is a view showing a physical property measuring sensor of a polymer composite material according to a third embodiment of the present invention.

Although the terms used in the present invention have been selected as general terms that are widely used at present, there are some terms selected arbitrarily by the applicant in a specific case. In this case, the meaning described or used in the detailed description part of the invention The meaning must be grasped.

Hereinafter, the technical structure of the present invention will be described in detail with reference to the accompanying drawings and preferred embodiments.

However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Like reference numerals used to describe the present invention throughout the specification denote like elements.

FIG. 2 is a view showing a physical property measuring sensor of a polymer composite material according to a first embodiment of the present invention.

2, the polymer composite material property measuring sensor 100 includes a substrate 110, a thin film heating wire 120 disposed on the substrate 110, an AC power source 130, and a controller (not shown) Not shown).

The polymer composite material property measuring sensor 100 according to the first embodiment of the present invention is a sensor capable of measuring the thermal properties of a polymer composite material to which an additive such as a filler that is an object to be measured is added and has a thermal conductivity, And the like can be efficiently measured. In particular, since the properties of the polymer composite material to which the additive is added have anisotropy as shown in Fig. 1, anisotropic thermal properties of the polymer composite material can be efficiently measured.

At this time, a polymer composite material containing 70% by weight of additives such as carbon nanotubes, graphene, graphite powder, carbon black, cut PAN or pitch-based carbon fibers as the polymer composite material may be used . The specimen of the object to be measured may be prepared by a method such as injection molding, extrusion molding, compression molding, etc., or may be used after being polished by cutting the desired part or the desired part.

The substrate 110 is made of a material that can be directly attached to the surface of the polymer composite material. That is, since it is difficult to directly deposit a sensor substrate on a polymer composite material, a flexible and highly adhesive substrate can be used to efficiently and accurately measure the shape and material of a specimen .

As the substrate 110, a material such as polydimethylsiloxane (PDMS) or captone tape was used.

By using a substrate such as PDMS or Capton Tape, it can be bonded to a specimen only by the adhesive force of the PDMS or capton tape without any adhesive, and can be easily bonded without restriction of the shape and material of the specimen. It also has the advantage of reducing contact thermal resistance between the completed measurement sensor and the specimen.

The thickness of the substrate 110 is preferably in the range of 1 to 10 μm, and may be used after depositing a thin film on PDMS or the like, which is spin-coated on a silicon (Si) wafer, Alternatively, a thin film hot wire may be deposited on a capton tape.

A thin film hot wire 120 is provided on the substrate 110 and an AC power source 130 for supplying an alternating current to the thin film hot wire 110 is provided.

Preferably, the thin film heating wires 120 are provided on the substrate 110 and serve as a temperature sensor for generating heat and measuring the temperature.

The thin film heating wire 120 may be formed using a metal, and may be formed using any one selected from the group consisting of Al, Pt, Ni, W, Ti and Cr. At this time, it is preferable that the thin film heating wire 130 has a length of 2 mm or less, a thickness of 1 μm or less, and a width of 1 to 40 μm. The longer the length of the thin film heating wire 120, the thinner the thickness, and the smaller the width, the greater the sensitivity of the material to thermal conductivity measurement. However, it is desirable to set appropriate values within the above range depending on the measurement spatial resolution, the thin film heating wire,

The gap between the thin film heating wires 120 and the neighboring thin film heating wires is preferably set to be maintained at a constant interval ranging from several tens of micrometers to several millimeters and formed parallel to each other in the longitudinal direction of the thin film heating wires 120 .

The AC power supply 130 is connected to each of the thin film heating wires 120 and controls the application of the AC power supply 130 of each thin film heating wire 120 kHz frequency range).

That is, when all of the AC power source 130 is applied to the thin film heating wire 120, the resistance heat is measured in each of the thin film heating wires 120 to measure the temperature, and alternating current power is applied to one heating wire If AC power is not applied to the neighboring thin-film hot wire, the resistance heat is measured at the neighboring thin-film hot wire to measure the temperature.

The controller (not shown) detects a temperature signal measured from the thin film heating wire 120 and converts the temperature signal into temperature amplitude and phase to measure the thermal properties of the measurement object. At this time, thermal property can be measured by using 3 omega (3ω) thermal analysis method.

The converted temperature amplitude and phase are a function of the material of the substrate 110 and the thermal properties of the specimen and can be calculated by using 3 omega thermal analysis to obtain the thermal properties of the specimen such as thermal conductivity, .

That is, the polymer composite material property measuring sensor 100 according to the first embodiment of the present invention adjusts the frequency of the AC power source 130 applied to the thin film heating wire 120 to adjust the spatial resolution from several millimeters to several tens of micrometers And it is possible to quantitatively analyze the homogeneity of additives in the specimen by measuring the thermal properties of the specimen at each position. At this time, the anisotropic thermal properties of the specimen can be quantitatively measured through various arrangements of the thin film heating wires 120.

The physical property measuring sensor 100 of the polymer composite material according to the first embodiment of the present invention can be cut into various sizes. For example, the sensor may be cut to a size of 5 x 5 mm 2 to measure a sample of a polymer composite material Or the like. Meanwhile, it is preferable that the sensor is attached to a flat part of a specimen of a polymer composite material to be measured, and it is preferable to measure the specimen after cutting or polishing.

Hereinafter, the process of measuring the thermal properties of the polymer composite material using the polymer composite material property measuring sensor 100 according to the first embodiment of the present invention will be described.

First, a physical property measurement sensor (5x5mm2) of a polymer composite material is attached on the flat surface of the specimen. At this time, two thin film heating wires are formed on the PDMS substrate which is spin-coated on the Si wafer, and the AC power source is thermally connected.

Next, the resistance heat generated by connecting the AC power source to each thin film heating wire is measured and the temperature is measured. The control unit detects the measured temperature signal and converts the temperature signal into temperature amplitude and phase to measure the thermal properties of the specimen.

At this time, the thermal properties of the specimen are measured using 3 omega (3?) Thermal analysis.

3 Ω thermal analysis is used as a method to measure the thermal properties of a specimen on which a metal thin film heater is placed. The 3? Thermal analysis assumes that a thin film hot line is located on a semi-infinite substrate. When an alternating current of an angular velocity of ω is applied to a hot metal wire of a certain length, a heat flux of 2ω angular velocity is generated by a joule heat. The generated heat flux is transferred to the periphery of the thin film heat line according to the thermal diffusivity of the base material. The 2ω temperature amplitude of the thin film hot wire is determined by the thermal properties of the base material, and the thin film hot wire resistance also oscillates at an angular velocity of 2ω through the linear relationship between the temperature and the resistance of the thin film hot wire. The temperature amplitude of the thin film hot wire can be determined by measuring the voltage of 3 ω angular velocity generated by the combined resistance oscillation of the thin film hot wire and the input alternating current. The relationship between the heat flux (Q ') generated in the thin film hot wire, the temperature amplitude (ΔT (x)) at the position of the semi-infinite base material surface x and the thermal conductivity k of the base material can be expressed by the following equation (1).

Figure 112015100901966-pat00001

Where k is the integral constant, b is the half-width of the hot line, q is the complex thermal wave number, the vibration angular velocity of the input alternating current, the density of the fluid, and the heat capacity of the fluid, Cp. (2).

Figure 112015100901966-pat00002

Here, in order to obtain the average temperature amplitude? T of the hot line, the following Equation (3) can be derived by integrating Equation 1 with the thin film hot line width.

Figure 112015100901966-pat00003

The thermal property value of the base material is calculated by comparing the measured heat wave temperature amplitude of 2? With the analytical solution of Equation (3).

On the other hand, since 3Ω thermal analysis is an alternating method, the thermal penetration depth of base material or fluid can be controlled by controlling the input frequency. The thermal penetration depth is defined as | 1 / q |, which is a physical distance scale in which the temperature oscillation generated in the thin film hot line propagates in the depth direction of the medium. Considering a 3 ω sensor with a thin-film hot-wire structure, the temperature amplitude at a distance of 7 times the depth of thermal penetration is known to have a value of less than 0.1% in comparison with that of a thin-film hot wire.

As in the present invention, there may be considered a case where there is a substance of additional substrate (PDMS or Capton tape or the like) having a negligible thickness compared to the depth of penetration on the material to be measured. In this case, the temperature amplitude in the substrate is expressed by the following equation (4).

Figure 112015100901966-pat00004

Where t is the thickness of the substrate, and Kf is the thermal conductivity of the substrate.

The thermal conductivity, thermal diffusivity and specific heat of the specimen can be calculated by using the experimentally measured temperature amplitude and the known thickness, thermal conductivity, and heat flux of the substrate through the above-described method.

3 is a view showing a physical property measuring sensor of a polymer composite material according to a second embodiment of the present invention.

3, the polymer composite material property measuring sensor 200 includes a substrate 210, a thin film heating wire 220 provided on the substrate 210, an AC power source 230, (240) and a control unit (not shown).

The main structure of the polymer composite material property measuring sensor 200 according to the second embodiment of the present invention is the same as that of the polymer composite material property measuring sensor 100 according to the first embodiment of the present invention, 220 and the temperature sensor 240 are different from each other. Therefore, the first embodiment of the present invention will be described with the exception of the description of the structure of the thin film heating wire 220 and the temperature sensor 240.

Preferably, at least one thin film heating wire 220 is provided on the substrate 210. The thin film heating wire 220 functions as a temperature sensor for generating heat for measuring the resistance and measuring the temperature. At this time, the thin film hot wire 220 measures the temperature in the depth direction of the specimen.

The temperature sensor 240 is disposed at a predetermined distance from the thin film heating line 220. The temperature of the thin film heating line 220 is measured by measuring the temperature of the thin film heating line 220 by diffusion. That is, the temperature sensor 240 measures thermal properties (in particular, thermal conductivity) in a direction parallel to the plane of the test piece. It is preferable that the temperature sensor 240 is provided parallel to the longitudinal direction of the thin film heating wires 220 and that the shape of the temperature sensor 240 is the same as that of the thin film heating wires 220 desirable.

The temperature sensor 240 may be provided in the periphery of the thin film heating wire 220 as many as necessary.

That is, in the polymer composite material property measuring sensor 200 according to the second embodiment of the present invention, the temperature signal is isotropically thermally diffused in the depth direction of the specimen measured in the thin film hot wire 120, The anisotropic thermal properties of the specimen can be quantitatively analyzed by measuring the temperature signal resulting from thermal diffusion in a direction parallel to the plane of the specimen measured by the temperature sensor 240. [ At this time, the anisotropic thermal properties of the specimen can be quantitatively measured through various arrangements of the thin film heating wire 220 and the temperature sensor 240.

4 is a view showing a physical property measuring sensor of a polymer composite material according to a third embodiment of the present invention.

4, the polymer composite material property measuring sensor 300 includes a substrate 310, a thin film heating wire 320 provided on the substrate 310, an AC power source 330, A controller 340 and a control unit (not shown).

At this time, the thin film heating wire adjacent to the thin film heating wire 320 is formed at a constant angle in the longitudinal direction.

Accordingly, the polymer composite material property measuring sensor 300 according to the third embodiment of the present invention can measure the thermal properties of the specimen in various directions in one sensor.

The main configuration of the polymer composite material property measuring sensor 300 according to the third embodiment of the present invention is the same as that of the polymer composite material property measuring sensor 200 according to the second embodiment of the present invention, 340 are different from each other. Therefore, the second embodiment of the present invention will be described with the exception of the description of the temperature sensor 340 configuration.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, Various changes and modifications may be made by those skilled in the art.

10: PSI 100: Physical property measurement sensor of polymer composite material
110: substrate 120: thin film heating wire
130: AC power supply 240: Temperature sensor

Claims (21)

  1. A substrate formed of polydimethylsiloxane (hereinafter referred to as PDMS) or captone tape with a certain thickness in the range of 1 to 10 μm and adhered to the surface of the polymer composite material as a measurement object;
    A thin film heating wire provided on the substrate and measuring the temperature in the depth direction of the polymer composite material;
    A temperature sensor disposed on the substrate at a predetermined interval from the thin film heating line and measuring a temperature from the thin film heating line in a direction parallel to the plane of the polymer composite material;
    An alternating-current power supply for supplying an alternating current to the thin-film hot wire; And
    And a controller for receiving the temperature signal measured by the temperature sensor and measuring the thermal properties of the polymer composite material,
    Wherein the controller measures anisotropic thermal properties from the thin film hot wire and anisotropic thermal properties from the temperature sensor.
  2. delete
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  4. The method according to claim 1,
    Wherein the thermal property is any one of thermal conductivity, thermal diffusivity, and specific heat.
  5. The method according to claim 1,
    Wherein the physical property measuring sensor of the composite material measures thermal property using a 3 omega (3?) Thermal analysis method.
  6. The method according to any one of claims 1, 4, and 5,
    Wherein the thin film heating wire is made of any one selected from the group consisting of Al, Pt, Ni, W, Ti, and Cr.
  7. The method according to claim 6,
    Wherein the thin film heating wire and the temperature sensor have a length of 2 mm or less, a thickness of 1 占 퐉 or less, and a width of 1 to 40 占 퐉.
  8. 8. The method of claim 7,
    Wherein the gap between the thin film heating wire and the temperature sensor is maintained at a constant interval of several tens of micrometers to several millimeters and is formed parallel to each other in the longitudinal direction.
  9. 8. The method of claim 7,
    Wherein the thin film heating wire and the temperature sensor are provided at a predetermined angle in the longitudinal direction.
  10. delete
  11. delete
  12. delete
  13. delete
  14. delete
  15. delete
  16. delete
  17. delete
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1026594A (en) * 1996-07-11 1998-01-27 Nikon Corp Thermal analysis element and its manufacture
JPH10260147A (en) * 1997-01-17 1998-09-29 Mitsuteru Kimura Thermal analyzer and its measuring method
JPH11183411A (en) * 1997-12-25 1999-07-09 Ricoh Co Ltd Thermal analyzing device
KR20100037891A (en) * 2008-10-02 2010-04-12 포항공과대학교 산학협력단 Sensor for measuring level and composition ratio of liquid compound
KR20150047700A (en) 2013-10-24 2015-05-06 (주)켐옵틱스 Tunable wavelength filter and tunable wavelength laser module with embedded thin film metal temperature sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1026594A (en) * 1996-07-11 1998-01-27 Nikon Corp Thermal analysis element and its manufacture
JPH10260147A (en) * 1997-01-17 1998-09-29 Mitsuteru Kimura Thermal analyzer and its measuring method
JPH11183411A (en) * 1997-12-25 1999-07-09 Ricoh Co Ltd Thermal analyzing device
KR20100037891A (en) * 2008-10-02 2010-04-12 포항공과대학교 산학협력단 Sensor for measuring level and composition ratio of liquid compound
KR20150047700A (en) 2013-10-24 2015-05-06 (주)켐옵틱스 Tunable wavelength filter and tunable wavelength laser module with embedded thin film metal temperature sensor

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