KR101598298B1 - heater monitoring apparatus based on resistor measuring technique and therefore method - Google Patents

Abstract

According to the present invention, disclosed are a heater monitoring device based on a resistor measuring technique and a heater monitoring method thereof. According to the present invention, the heater monitoring device comprises: a first detection unit detecting voltage of an alternate current power supply and a current applied to a heater; and a second detection unit detecting an instantaneous current and an instantaneous voltage by measuring the voltage and the current, provided by the first detection unit, in the same time zone and the same phase area. In addition, the heater monitoring device includes a control unit dividing the instantaneous voltage detected by the second detection unit into the instantaneous current to calculate a resistance value of the heater and saving the same; and monitoring an operation status of the heater by comparing the prior resistance value with the saved resistance value.

Description

TECHNICAL FIELD [0001] The present invention relates to a heater monitoring apparatus based on resistance measuring method,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0002] The present invention relates to a monitoring apparatus for a power-use heating element, and more particularly, to a heater monitoring apparatus and a heater monitoring method capable of diagnosing a failure by monitoring an operating state of the heater and predicting the service life of the heater.

Heaters widely used in semiconductor manufacturing processes and general industrial manufacturing facilities are devices that convert electrical energy into heat energy. It is required in the semiconductor manufacturing process and the general industry in general to accurately monitor the operation state of such a heater to diagnose the failure of the heater or to predict the life of the heater.

Conventionally, since the operating state of the heater is monitored based on the amount of power, it is difficult to diagnose the failure of the heater due to measurement inaccuracy.

SUMMARY OF THE INVENTION The present invention provides a heater monitoring apparatus and a heater monitoring method capable of diagnosing a failure by monitoring an operating state of the heater and predicting a service life of the heater.

According to an aspect of an embodiment of the present invention for solving the above-described problems, a heater monitoring apparatus includes:

A first sensing unit for sensing the voltage and current of the AC power applied to the heater;

A second sensing unit for measuring a voltage and a current provided from the first sensing unit in the same time domain and the same phase domain to detect an instantaneous voltage and an instantaneous current; And

And a controller for dividing the instantaneous voltage detected by the second sensing unit by an instantaneous current to obtain a resistance value of the heater, storing the resistance value, and comparing the instantaneous resistance value with the resistance values stored before the present time to monitor the operation state of the heater .

In the embodiment of the present invention, the detection of the instantaneous voltage and the instantaneous current is performed at a level equal to or higher than the zero potential, and may be performed within a half period of the AC power supply.

In an embodiment of the present invention, the controller may generate information for predicting the lifetime of the heater based on a change in the resistance values when monitoring the operating state of the heater.

According to another aspect of the present invention, there is provided a heater monitoring apparatus comprising:

A voltage and current sensor for detecting the voltage and current of the AC power applied to the heater;

An instantaneous sensing unit for measuring a voltage and a current provided from the voltage and current sensors in the same time domain and the same phase domain to detect instantaneous voltage and instantaneous current; And

The heater failure diagnosis information is obtained by dividing the instantaneous voltage detected by the instantaneous sensing unit by the instantaneous current to obtain a resistance value of the heater, storing the resistance value, and comparing the instantaneous voltage value with the resistance values stored before the current time, And a controller for generating heater life prediction information in which a variation pattern of the resistance values is compared with the life reference data.

According to another aspect of the present invention, there is provided a method of monitoring a heater,

Providing a voltage and current sensor for detecting voltage and current of an AC power source applied to the heater;

Measuring the voltage and current in the same time domain and in the same phase domain to detect instantaneous voltage and instantaneous current;

Dividing the detected instantaneous voltage by an instantaneous current to obtain a resistance value of the heater;

Generating heater fault diagnosis information indicating the operating state of the heater by comparing the measured resistance value with the stored resistance values; And

And comparing the variation pattern of the resistance values with the life criterion data to generate heater life prediction information.

According to the heater monitoring apparatus and the heater monitoring method of the present invention as described above, there is an advantage that the operation state of the heater can be monitored to reliably diagnose the failure, the temperature management, the state change, and the life span of the heater .

1 is a schematic diagram showing the monitoring of the amount of power in a general heater control.
Figure 2 is another schematic diagram showing the wattage monitoring in a typical heater control.
3 is a schematic diagram showing a heater state failure judgment according to the prior art.
4 is an overall block diagram of a heater monitoring apparatus according to an embodiment of the present invention.
5 is an overall block diagram of a heater monitoring apparatus according to another embodiment of the present invention.
Fig. 6 is a timing chart of the operation of the heater monitoring based on the resistance measuring method according to Fig. 4 or Fig.
7 is a flowchart of a heater device monitoring method according to an embodiment of the present invention.
8 is an exemplary utilization diagram used in heater life prediction according to an embodiment of the present invention.
9 is another exemplary utilization diagram used in heater life prediction according to an embodiment of the present invention.
10 is a flowchart of heater life prediction according to an embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features, and advantages of the present invention will become more apparent from the following description of preferred embodiments with reference to the attached drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art, without intention other than to provide an understanding of the present invention.

In this specification, when it is mentioned that some element or lines are connected to a target element block, it also includes a direct connection as well as a meaning indirectly connected to the target element block via some other element.

In addition, the same or similar reference numerals shown in the drawings denote the same or similar components as possible. In some drawings, the connection relationship of elements and lines is shown for an effective explanation of the technical contents, and other elements or functional blocks may be further provided.

Each of the embodiments described and exemplified herein may also include complementary embodiments thereof, and the basic operation and internal mechanism details of heater device control mounted on a semiconductor manufacturing facility or the like are described in detail in order to avoid obscuring the gist of the present invention. Please note that it is not.

In semiconductor manufacturing and various industrial sites, the temperature in manufacturing facilities is being increased by using a heater system. The surface thickness of semiconductor wafers and other products can be adjusted when the temperature is increased to control the reaction rate and the amount of the gas on the surface of semiconductor wafers and other products.

The most important factors in the fabrication of semiconductor devices are temperature, pressure, gas amount, and time. The factors such as pressure, gas amount, and time can be accurately measured and measured. Respectively. Therefore, the pressure, the gas amount, and the time can be controlled to be relatively constant.

In the temperature management, there is also a system capable of maintaining the target at a constant temperature through the temperature controller. However, in the case of temperature control, the important thing is the heat energy generated by the heater, and the amount of heat energy changes depending on the condition of the heater.

In general technology, it is difficult and inaccurate to measure or monitor the heating source itself because the temperature control by the temperature controller is performed by measuring the change in the amount of power instead of judging the state or temperature of the heater in an accurate and practical manner.

1 is a schematic diagram showing the monitoring of the amount of power in a general heater control.

In Fig. 1, the horizontal axis represents time and the vertical axis represents amplitude.

The waveform TCD indicates the control period of the temperature controller, and the waveform V / I indicates the voltage and current. The waveform RMS also shows the RMS measurements.

FIG. 1 is a typical method for monitoring a power amount using a voltage and a current. By measuring the amount of power and sensing a change in the amount of power, the defective state of the heater is indirectly determined.

1, the RMS value for each cycle is obtained by measuring the voltage G10 and the current G12 applied to the heater by periods T1, T2, T3 and T4, Is controlled. That is, when the amount of current due to the control of the temperature controller and the PID control is reduced, the amount of power is also decreased or increased. The control of the temperature controller connected to the heater and the PID control are performed by monitoring the changed amount of power.

However, the amount of power changed in the case of this temperature control can not be said to be a change in the resistance value of the heater. As a result, the control method shown in FIG. 1 can be performed in the ON / OFF control such as the proportional control, provided that the constant voltage and constant current are constantly supplied. However, the control method of FIG. 1 is difficult to apply as a heater monitoring method in such a place, since a current or a voltage supply is variable in a semiconductor production equipment that precisely controls the temperature.

Figure 2 is another schematic diagram showing the wattage monitoring in a typical heater control.

In Fig. 2, the horizontal axis represents time and the vertical axis represents amplitude.

The waveform TCD indicates the control period of the temperature controller, and the waveform V / I indicates the voltage and current. The waveform AVG also shows AVG (average) measurements.

In the control system shown in FIG. 2, the voltage G11 and the current G13 applied to the heater are measured by periods T1, T2, T3, and T4 to obtain AVG values per cycle, Is controlled. That is, when the amount of current due to the control of the temperature controller and the PID control is reduced, the amount of power is also decreased or increased. The control of the temperature controller connected to the heater and the PID control are performed by monitoring the changed amount of power.

However, in the case of this temperature control, the changed average power amount can not be said to be a change in the resistance value of the heater. As a result, the control method as shown in FIG. 2 is also possible in ON / OFF control such as proportional control, assuming that constant voltage and constant current are continuously supplied. However, it is difficult to apply it as a heater monitoring method in a semiconductor production equipment that precisely controls the temperature.

3 is a schematic diagram showing a heater state failure judgment according to the prior art.

1, waveform TCD represents the control period of the temperature controller, and waveform V / I represents voltage and current. The waveform RMS also shows the RMS measurements.

The RMS value for each cycle is obtained by measuring the voltage G10 and the current G12 applied to the heater by periods T1, T2, T3 and T4, and the heater is judged to be in an abnormal state during the period other than the period T1 do.

3 is a simple and inaccurate method of determining whether the heater is defective or normal by determining whether the amount of power is normally measured in a region for controlling a specific temperature interval based on the amount of power will be.

The amount of power determined by the two factors of voltage and current varies, even if any one of the factors changes. Therefore, such measurement of the amount of electric power has a limitation in determining the accurate state of the heater. In addition, components for control purposes, such as temperature controllers, use various control methods such as P.PI or PID. By these control methods, a constant amount of voltage and current is not always supplied but a variable amount of power is supplied.

In the conventional method of detecting the state of the heater through the amount of electric power, it is difficult to accurately check the state of the heater. That is, the unit time average monitoring method for comparing the constant power amount per unit time due to the control characteristic of the temperature controller is applied.

In the embodiment of the present invention, there is provided an improved method for accurately determining the heater state by repeating the heater state monitoring by the power amount monitoring method as described above.

A heater monitoring method according to an embodiment of the present invention includes:

Providing a voltage and current sensor for detecting voltage and current of an AC power source applied to the heater; Measuring the voltage and current in the same time domain and in the same phase domain to detect instantaneous voltage and instantaneous current; Dividing the detected instantaneous voltage by an instantaneous current to obtain a resistance value of the heater; Generating heater fault diagnosis information indicating the operating state of the heater by comparing the measured resistance value with the stored resistance values; And comparing the variation pattern of the resistance values with the life criterion data to generate heater life prediction information.

4 is an overall block diagram of a heater monitoring apparatus according to an embodiment of the present invention.

4, the heater monitoring apparatus includes a controller 100, a voltage sensor 102, a zero voltage detector 104, a current sensor 106, a zero current detector 108, a power supply state detector 110, The status detector 112, the temperature information converter 114, the monitor 116, the storage unit 118, the keyboard 120, the communication unit 122, the power supply unit 124, the heater 202, the VT 204, A CT 206, a power controller 208, a temperature sensor 210, and a temperature controller 214.

The heater 201 is a heat generating element that receives heat and generates heat, and serves as a heat generating source for generating a temperature necessary for a specific processing of the wafer, particularly when used in a semiconductor manufacturing process.

The power controller 208 is composed of a silicon controlled rectifier element or the like, and controls a power source applied to the heater 208.

The temperature sensor 210 is installed around the heater 202 to sense the temperature. The detected temperature is temperature information necessary for controlling the target value of the temperature controller.

The temperature controller 214 receives temperature information from the temperature sensor 210 to maintain a constant temperature in a semiconductor manufacturing process, and controls the temperature. If the sensed temperature is below the target temperature, the temperature controller 214 applies a signal to the power controller 208 indicating a temperature rise. On the other hand, when the sensed temperature is equal to or higher than the target temperature, the temperature controller 214 applies a signal to the power controller 208 indicating the temperature decrease. The power controller 208 controls the heater 202 to supply power to the heater 202 upon receiving a signal indicative of a temperature rise and to prevent the heater 202 from being powered off or to supply a minimum holding power .

The temperature information converter 114 interfaces between the temperature controller 214 and the controller 100. The analog temperature information provided from the temperature controller 214 is converted into digital data so that the controller 100 can recognize the analog temperature information. The control information applied from the controller 100 is converted into a communication format set through the temperature information converter 114 and provided to the temperature controller 214. [

The drive state detector 112 senses a signal in the control region for the actual drive of the temperature controller 214 when the temperature controller 214 controls the power controller 208. [

The power supply status detector 110 is connected to the power controller 208 to determine whether power is actually being supplied to the heater 202 and is coupled to the controller 100 when the power is actually being supplied or not, . Although it is recognized that the temperature controller 214 controls the power controller 208 through the drive state detector 112, it is determined whether the power is actually supplied to the heater 202 by installing the power supply state detector 110 Can be judged.

The voltage sensor 102 is connected to the VT 204 and measures the voltage supplied to the heater 202. The voltage sensor 102 can measure the voltage supplied to both ends of the heater 202 by reducing the voltage to a current value.

The current sensor 106 may be connected to the current transformer CT 206 to measure the current supplied to the heater 202. The voltage sensor 102 and the current sensor 106 may be referred to as a first sensing unit.

The " 0 " voltage detector 104 is a voltage source phase discriminator for detecting the phase change point of the AC voltage SINE wave and judging whether or not it is in phase with the current value.

The " 0 " current sensor 108 is a discriminator for discriminating a region to which a current equal to or larger than an actual " 0 "

The " 0 " voltage sensor 104 and the " 0 " current sensor 108 function as an instantaneous sensing unit and may be referred to as a second sensing unit. The instantaneous sensing unit detects the instantaneous voltage and the instantaneous current by measuring the voltage and current provided from the first sensing unit (voltage sensor and current sensor) in the same time domain and the same phase domain.

The controller 100 is an element that synthesizes the signals of the respective components to measure " R " (resistance) values and predict and diagnose the state of the heater. The controller 100 serves as a main control unit for controlling the monitor 116 so as to transmit various information to the storage user and for controlling the communication unit 122 to provide information to the remote user.

The controller 100 divides the instantaneous voltage detected by the instantaneous sensing unit by the instantaneous current to obtain a resistance value of the heater, stores the resistance value, compares the instantaneous voltage with the resistance values stored before the current time, And generates one heater failure diagnosis information. Also, the controller 100 generates heater life prediction information in which the variation pattern of the resistance values is compared with the life reference data.

The storage unit 118 stores the measured information so that the user can check past information. The storage unit 118 may be a nonvolatile memory such as a volatile memory such as a DRAM or a flash memory.

The monitor 116 is a display device that delivers the measured values to the user. The monitor 116 may be connected to a touch unit that receives a user touch input. The touch unit may sense a user input by depressurizing or electrostatic operation.

The communication unit 122 is a data transmission device for providing information to remote users and monitoring devices. The communication unit 122 is provided to perform communication between the controller 100 and the outside, and a host or a server may be located outside the controller.

The power supply unit 124 is a circuit device that generates and supplies various voltages necessary for the entire system. The power supply unit 124 receives AC power or DC power through an input terminal. When the AC power is received at the input terminal, the power supply unit 124 may convert AC power to DC power and regulate the converted output voltage to a constant voltage. When the DC power is received at the input terminal, the power supply unit 124 may perform an operation of converting the received DC voltage into an internal required voltage level.

In order to solve the problems in the prior art, the heater monitoring apparatus of FIG. 4 is designed to measure the voltage and current in the same time domain and the same phase domain to monitor the resistance of the heater, It is used to raise the stand. Here, temperature information that senses the temperature of the heater can be additionally referred to. The voltage and current can be measured in the same time domain and in the same phase domain to detect instantaneous voltage and instantaneous current to measure resistance.

Such a heater condition monitoring technique is a highly reliable method that can advance the conventional uncertainty inspection method and can extract the core elements of the measurement object. In addition, using this method, the key element can be measured in real time even when the heater is in operation and power is supplied.

As a result, unlike the prior art, "R" (resistance value), a key element of heater monitoring, can be accurately measured without using uncertain data based on the amount of power.

This method can overcome the problems in the conventional determination method using the amount of power. In addition, since information can be processed using information in the same time domain at all times, it can be used as a more effective detection method.

(Such as heater power supply time, heater voltage and current supply period, "0" area of voltage and current, control execution command of temperature controller, etc.) based on sensing voltage and current, By generating the instantaneous voltage and the instantaneous current on the time isotope, the resistance value of the heater can be detected more accurately and reliably.

Resistance = voltage / current " to be measured in the present invention can be derived using the formula: voltage = current * resistance. In the present invention, since the instantaneous voltage and the instantaneous current measured at the same time / in-phase are used for deriving the resistance, the zero voltage / current sensor can be utilized as a high-speed measuring circuit. As a result, the resistance value of the heater is obtained by detecting the instantaneous value of the voltage and current on the same time and on the same level. As a result, the present invention does not simply use the RMS and AVG values of voltage and current in the time domain.

In order to measure the heater resistance value according to the present invention, the time domain in which the actual current is supplied must be derived, and the phase difference must be accurately determined. Also, if the temperature controller 214 is operating within the actual control range Additional information about the paper should also be referenced in the judgment. Eventually, these information should be comprehensively judged and calculated.

When the instantaneous sensing unit detects instantaneous voltage and instantaneous current, the controller 100 refers to the additional information and obtains a resistance value to monitor the operation state of the heater. Here, even if the values of the voltage and the current are changed, the in-phase and the instantaneous values of the current and the voltage are always used for the measurement, so that the resistance value can always be reliably obtained.

5 is an overall block diagram of a heater monitoring apparatus according to another embodiment of the present invention.

5, the heater monitoring apparatus includes a controller 100, a voltage sensor 102, a zero voltage detector 104, a current sensor 106, a zero current detector 108, a power supply state detector 110, And includes a state detector 112, a temperature information converter 114, a monitor 116, a storage unit 118, a keyboard 120, a communication unit 122, a power supply unit 124 and an existing semiconductor production facility 200 can do.

Here, the conventional semiconductor production facility 200 may include a heater 202, a VT 204, a CT 206, a power controller 208, a temperature sensor 210, and a temperature controller 214.

5, the heater 202, the VT 204, the CT 206, the power controller 208, the temperature sensor 210, and the temperature controller 214 are already installed in the existing semiconductor production facility 200 It is possible to install only the rest of the components in the heater monitoring apparatus and to establish the wiring connection.

4, the controller 100 of FIG. 5 receives the zero voltage, the voltage, the zero current, the current, the power supply status signal, the drive status signal, and the temperature information signal through the input terminals S1 to S7 Respectively.

The functions and operations of the respective components of Fig. 5 may be the same as or similar to those of the corresponding components of Fig.

Fig. 6 is a timing chart of the operation of the heater monitoring based on the resistance measuring method according to Fig. 4 or Fig.

Referring to FIG. 6, the horizontal axis represents time and the vertical axis represents amplitude of each signal. The waveform TCD indicates the control period of the temperature controller, and the waveform V / I indicates the voltage and current. The waveforms VS and ILS respectively indicate the voltage '0' signal and the current level signal, and the waveform RMSP indicates the RMS power. The waveform R indicates the resistance value of the heater obtained by dividing the instantaneous voltage by the instantaneous current.

As shown in FIG. 6, in the region where a voltage higher than the zero potential exists and a current higher than the zero potential exists, the two values are measured in the same phase and the same time region of the voltage and current as shown in 1, 2, 3, And the resistance value (resistance = voltage / current) is calculated using the measured value.

As shown in FIG. 6, when the measurement is performed in the same phase and the same time region, the amount of power is not constant but changes in real time.

By storing and managing the measured value in real time through the measurement method as shown in FIG. 6, the amount of change in the heater resistance can be known. For example, when the amount of current is suddenly changed as in the case of (5) at time t9, a change in the resistance value has occurred, so that it is possible to accurately determine the failure state of the heater by comparing with the previously stored resistance value.

As a result, if the state of the heater is not changed because the heater has a constant resistance value, the amount of current is always increased or decreased in proportion to the resistance value by the control of the temperature controller. The temperature controller controls the amount of power for each cycle of voltage and current. However, if we analyze the voltage and current waveform more precisely, it controls the supply time of the current during one cycle of voltage and current (60Hz = 16.7mS) .

As a result, this means that the amount of power should not be used as a basis for diagnosing the heater failure. The heater failure diagnosis according to the principle of FIG. 6 is based on a region where a voltage and a current are generated over a zero potential in a shorter region and a region in which the temperature controller actually controls power, And the resistance value is measured in the same time domain. By comparing the patterns of the detected resistance values, it is possible to judge the presence or absence of defective heater and predict the service life.

Also, by referring to additional information, it can be determined whether power is not supplied due to disconnection of the heater or whether the temperature controller abnormally controls the power. It is also possible to diagnose whether the power control element is broken or defective.

7 is a flowchart of a heater apparatus monitoring method according to an embodiment of the present invention.

7, an abnormality of the input voltage S726, a fault of the power controller S728, a disconnection of the heater coil S730, and a short-circuit of the heater coil S732 are illustrated as additional examples of the heater apparatus diagnosis.

The abnormality of the input voltage S726 occurs when an abnormality is detected in the step S714 of checking whether the input voltage is normal after the system initial value is confirmed (S712).

The failure of the power controller (S728) occurs when the power controller is turned on (S718) and the amount of power is not increased (S720).

The disconnection (S730) of the heater coil occurs when the amount of current does not increase (S722).

The short-circuit (S732) of the heater coil occurs when the amount of power exceeds the threshold value (S724).

The diagnostic function of the heater device as shown in Fig. 7 is improved and advanced in the diagnostic limit of a general system capable of detecting only the break check of the heater. That is, it is provided with a diagnosis function that can determine the cause of defects of various components such as a semiconductor device, a heater, and a controller used for temperature control, thereby facilitating analysis and maintenance of the cause of defects.

A heater system is a complex system controlled by various elements such as a controller, a temperature sensor, a power control element, and various sensors.

In FIG. 7, it is determined whether or not power is supplied without addition of a separate sensor, an operation state in which the actual temperature controller controls the control target value, and an operation signal of the power controller. It is possible to accurately determine whether the problem of the controller, the problem of the power controller, or the problem of the supply voltage source is detected, and deliver it to the user, thereby reducing maintenance and cost.

8 is an exemplary utilization diagram used in heater life prediction according to an embodiment of the present invention. 9 is another exemplary utilization diagram used in heater life prediction according to an embodiment of the present invention. 10 is a flowchart of heater life prediction according to an embodiment of the present invention.

Hereinafter, the measurement of the resistance value of the heater and the example of the heater life prediction will be described with reference to FIGS. 8 to 10. FIG.

In the embodiment of the present invention, the lifetime of the heater can be determined by using the time value used up to now and the value changed to the present time based on the variation amount of the resistance value with precision.

In the case of a system that controls the heater in a periodic on / off manner in the time domain, the mutual comparative analysis of the information of the current operation state and the information of the previous operation state intuitively shows the power amount of the specific temperature control section and various signal information Allowing for comparative analysis.

For example, information that is not easy for the user to determine, such as an increase in the amount of power, a change in the resistance value, an increase time, a power supply time, etc. according to the temperature increase table in the first startup state, Can be compared with each other through the time domain.

10, if the heater is driven (S814) and the voltage / current is equal to or higher than zero potential (S816) and the voltage and current are the same phase (S818), data sampling and storage are performed in step S820 . Data sampling means obtaining the resistance value of the heater using the value measured in the time domain of the voltage and current in the same phase.

This data sampling operation is repeated in step S832 after the time delay in step S822. If one minute has elapsed in step S828 after the time delay in step S830, the average value of the data sampling information is calculated in step S834.

For example, you can create a standard resistance value by averaging the value in 1-hour increments to determine the standard state of the heater during system installation and initialization. That is, the standard resistance value is a reference resistance value that can determine the state of the heater at the initial stage of the installation of the system, and the resistance of the heater generated by averaging the measured values in the time- Value. The obtained standard resistance value is stored in the storage unit 118 of Fig.

After the system is activated in step S834 and the time information has been stored until now, the heater life predicting function is achieved through steps S838 to S848.

Information on whether the life of the heater is determined to be completed when the heater detects a certain amount of change is determined by the user in order to accurately determine the life span in the prediction algorithm. For example, you can set the heater life completion when the measured resistance value of the heater changes by 1% from the standard resistance value. This prediction method will be described in more detail with reference to FIGS. 8 and 9. FIG.

As shown in FIG. 8, the system is started and a standard resistance value of 100 ohms is measured in the first operation area, which is stored in a storage unit and used as a standard resistance value (REF) of the prediction algorithm

If the heater starts operating again after 2 hours from the start of the system and the measured resistance value changes by 0.2% compared with the standard resistance value (the reference value of the lifetime determined by the user is 1% of the standard resistance value) It is understood that the heater is driven and changed by 0.2% for 2 hours and this variation is changed by 0.1% per hour, which means that the heater is completed after 10 hours.

The graph in Fig. 9 shows the resistance pattern change corresponding to the case of Fig.

Although the information illustrated in the drawings is prepared on the basis of a certain time, since the actual system does not operate at a precise time in the actual system, the time until the system is actually switched to the active state is the current operation time.

The heater monitoring of the present invention can be applied to all industrial and domestic temperature control and heating devices using a heater. For example, it can be applied to all fields such as semiconductor wafer production process such as semiconductor, display, sunlight, hot wire for preventing frost from sewerage, and heater system for temperature management in general industry.

As described above, an optimal embodiment has been disclosed in the drawings and specification. Although specific terms have been employed herein, they are used for purposes of illustration only and are not intended to limit the scope of the invention as defined in the claims or the claims. Therefore, those skilled in the art will appreciate that various modifications and equivalent embodiments are possible without departing from the scope of the present invention. For example, without departing from the technical idea of the present invention, when the matters are different, the internal structure and the detailed structure and the shape of the heater device can be variously changed and modified.

100:
104: zero voltage detector
106: Zero current detector
202: heater
208: Power controller
210: Temperature sensor

Claims (16)

A first sensing unit for sensing the voltage and current of the AC power applied to the heater;
A second sensing unit for measuring a voltage and a current provided from the first sensing unit in the same time domain and the same phase domain to detect an instantaneous voltage and an instantaneous current; And
And a controller for dividing the instantaneous voltage detected by the second sensing unit by an instantaneous current to obtain a resistance value of the heater, storing the resistance value, and comparing the instantaneous voltage value with the resistance values stored before the current time, ,
Wherein the detection of the instantaneous voltage and the instantaneous current is performed at a level equal to or higher than the zero potential,
Wherein the controller generates information for predicting the lifetime of the heater based on a change in the resistance values when monitoring the operation state of the heater.
delete delete delete 2. The heater monitoring apparatus according to claim 1, further comprising a communication unit for transmitting the heater failure diagnosis information and the life prediction information obtained as a result of monitoring the operating state of the heater to the outside.
The heater monitoring apparatus according to claim 1, wherein said controller also refers to a control execution command of a temperature controller when said resistance value is obtained.
delete delete A voltage and current sensor for detecting the voltage and current of the AC power applied to the heater;
An instantaneous sensing unit for measuring a voltage and a current provided from the voltage and current sensors in the same time domain and the same phase domain to detect instantaneous voltage and instantaneous current; And
The heater failure diagnosis information is obtained by dividing the instantaneous voltage detected by the instantaneous sensing unit by the instantaneous current to obtain a resistance value of the heater, storing the resistance value, and comparing the instantaneous voltage value with the resistance values stored before the current time, And a controller for generating heater life prediction information in which a variation pattern of the resistance values is compared with life reference data.
10. The heater monitoring apparatus according to claim 9, wherein the instantaneous voltage and the instantaneous current are detected at a level equal to or higher than the zero potential, and are performed in a plurality of cycles within the half cycle of the AC power.
10. The heater monitoring apparatus according to claim 9, further comprising a communication unit for transmitting the heater failure diagnosis information and heater life prediction information to the outside.
10. The heater monitoring apparatus of claim 9, wherein the instantaneous sensing unit includes a zero voltage sensor and a zero current sensor.
10. The heater monitoring apparatus according to claim 9, wherein the heater is applied to industrial equipment.
Providing a voltage and current sensor for detecting voltage and current of an AC power source applied to the heater;
Measuring the voltage and current in the same time domain and in the same phase domain to detect instantaneous voltage and instantaneous current;
Dividing the detected instantaneous voltage by an instantaneous current to obtain a resistance value of the heater;
Generating heater fault diagnosis information indicating the operating state of the heater by comparing the measured resistance value with the stored resistance values; And
And comparing the variation pattern of the resistance values with the life criterion data to generate heater life prediction information.
15. The method of claim 14, wherein the detection of the instantaneous voltage and the instantaneous current is performed at a level equal to or higher than the zero potential, and the plurality of circuits are performed within the half period of the AC power.
15. The heater monitoring method according to claim 14, further comprising transmitting the heater failure diagnosis information and heater life prediction information to the outside via a communication unit.

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