KR101580886B1

KR101580886B1 - Plasma arc torch

Info

Publication number: KR101580886B1
Application number: KR1020140135130A
Authority: KR
Inventors: 박헌수; 정상현; 이재홍; 이승훈; 김학범; 오준석; 김종식
Original assignee: 주식회사 케이피씨
Priority date: 2014-10-07
Filing date: 2014-10-07
Publication date: 2015-12-31

Abstract

The present invention relates to a plasma arc torch, and more particularly, to a plasma arc torch, which comprises a cathode fixedly installed on the upper side of a cylindrical housing, an insulating part surrounding a lower front side of the cathode to expose a cathode tip for discharging, A gas supply unit connected to the anode to supply a plasma generation gas to a circulation tube provided inside the anode and to supply the plasma generation gas in a preheated state; And a guide ring for supplying the gas supplied through the circulation pipe to the discharge space portion between the cathode tip and the anode. The present invention is provided between an anode and a cathode through a circulation tube provided inside the anode, so that it is preheated at an appropriate temperature passing through the circulation tube, thereby improving the plasma generation efficiency It is effective.

Description

Plasma arc torch

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma arc torch, and more particularly, to a plasma arc torch capable of improving arc generation efficiency.

Generally, various gases are used to manufacture semiconductor devices and flat panel display devices. The waste gas used in the manufacturing process can not be directly discharged to the atmosphere, and must be discharged in a safe state by various treatments.

As a method of treating the waste gas, a wet treatment method in which the contact surface of water is absorbed and dissolves by widening the water surface, a thermal oxidation treatment method in which the gas is thermally oxidized by a heat source, a waste gas is physically or chemically There is a dry processing method in which adsorption treatment is performed. Among them, the thermal oxidation treatment method of the waste gas by the heat source is classified into a treatment method by a heater, a treatment method by burning a fuel gas such as LNG or H ₂ , and a treatment method using a plasma arc torch.

At this time, the plasma arc torch uses a method of converting a plasma generating gas into a plasma state by using an arc discharge between a negative electrode and a positive electrode to generate a high temperature flame and thermally oxidizing the waste gas using the flame.

Generally, nitrogen is used as a plasma generating gas.

A technique for supplying a plasma generating gas supplied to a space between a negative electrode and a positive electrode is disclosed in Patent No. 10-0756642 (Plasma arc torch and a scrubber using the same, filed September 3, 2007) by the applicant of the present invention .

In the conventional plasma arc torch, nitrogen is supplied from the outside of the torch for maintaining the discharge and the flame. At this time, the temperature of nitrogen is relatively low and plasma generation efficiency is low.

Due to such a problem, there is a problem that the cost is increased because a larger amount of nitrogen must be supplied in order to generate and maintain sufficient plasma.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide a plasma arc torch capable of increasing plasma generation efficiency of gas supplied for generation of plasma.

Another object of the present invention is to provide a plasma arc torch capable of enhancing the cooling efficiency of the anode and preventing the shortening of the service life of the apparatus and improving the reliability.

According to an aspect of the present invention, there is provided a plasma arc torch including: a cathode fixed to an upper side of a cylindrical housing; an insulation unit surrounding a lower front side of the cathode to expose a cathode tip, An anode connected to a lower portion of the insulating portion and spaced apart from the cathode by a predetermined distance; and a plasma generation gas supplied to the anode through a circulation tube provided inside the anode to supply the plasma generation gas in a preheated state And a guide ring for supplying the gas supplied through the circulation pipe to the discharge space portion between the cathode tip and the anode.

In the present invention, a plasma generating gas is supplied, and is supplied between an anode and a cathode through a circulation tube provided inside the anode, so that the gas is heated to a proper temperature passing through the circulation tube Thus, there is an effect that the plasma generation efficiency can be increased.

In addition, since the plasma generation efficiency of the plasma generating gas is increased as described above, sufficient plasma can be obtained while using a smaller amount of gas than the conventional plasma generating apparatus, thereby reducing the cost.

In the present invention, the plasma generating gas is supplied through a circulation tube provided inside the anode, and heat exchange with the anode is performed, thereby enhancing the cooling efficiency of the anode.

FIG. 1 is a configuration diagram of a plasma arc torch according to a preferred embodiment of the present invention.
2 is a sectional view taken along the line AA in Fig.

Hereinafter, the plasma arc torch of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a configuration diagram of a plasma arc torch according to a preferred embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along line A-A in FIG.

Referring to FIGS. 1 and 2, the plasma arc torch according to the preferred embodiment of the present invention includes a cathode 20 fixedly installed on the upper side of a cylindrical housing 10, And an anode 40 coupled to a lower portion of the insulating portion 30 and spaced apart from the cathode 20 by a predetermined distance, A gas supply unit 60 connected to the anode node 40 and supplied to a circulation pipe 41 provided inside the anode 40 and a gas supply unit 60 for supplying gas supplied through the circulation pipe 41 to the cathode tip 21 And a guide ring (50) for supplying the space between the anode nodes (40).

Hereinafter, the construction and operation of the plasma arc torch according to a preferred embodiment of the present invention will be described in detail.

First, the housing 10 has a hollow cylindrical structure, and the upper portion of the cathode 20 is fixed to the upper surface of the housing 10.

The shape of the cathode 20 can be changed in various structures as needed. However, the present invention is not limited by the structure of the cathode 20 insofar as it includes a cathode tip 21 in which a discharge is generated at the bottom.

The coupling portions of the cathode 20 and the housing 10 are coupled to each other by the insulating portion 11 and the cathode 20 may have a columnar shape whose diameter decreases as it goes down .

A cathode tip (21) is disposed under the cathode (20).

At this time, a cable for supplying power to the cathode 20 is connected to the port 12 provided on the exposed upper portion of the cathode 20.

The lower portion of the cathode (20) is insulated by an insulating portion (30). At this time, the shape of the insulation portion 30 is a cylindrical structure that surrounds the lower portion of the cathode 20, and the cathode tip 21 is exposed at the lower portion.

A cooling water supply port 31 is provided on a side surface of the insulation part 30. A cooling water supply pipe 73 provided through a side surface of the housing 10 is connected to the cooling water supply port 31 to supply cooling water Overheating can be prevented.

A guide ring 50 is disposed between the anode 40 and the insulating part 30. The guide ring 50 is disposed on the lower side of the insulating part 30. [ The guide ring 50 serves to divide the space between the insulating portion 30 and the anode 40 and to maintain the space.

3 is an exploded view showing the anode node 40 expanded and expanded.

3, the anode 40 is provided with a circulation pipe 41 for allowing the gas supplied through the gas supply unit 60 to move along the inside of the anode 40 for a predetermined period of time.

The circulation pipe (41) may have a shape in which long-shaped pipes in an up-and-down direction are alternately connected to an upper pipe or a lower pipe with neighboring pipes.

The shape of the circulation pipe 41 is for ensuring convenience of machining. The shape of the circulation pipe 41 may be a variety of structures such as a spring shape so that the gas is supplied while rotating along the anode 40.

The gas supplied to the circulation pipe 41 flows into the gas supply space part 75 which is a space outside the guide ring 50 along the circulation pipe 41. At this time, the gas is heat-exchanged with the anode 40 to be preheated to a predetermined temperature, and thus the plasma generation efficiency is increased.

In addition, since the gas cools the anode 40 through the circulation pipe 41, the cooling efficiency of the anode 40 is also increased.

The preheated gas introduced into the gas supply space part 75 flows into the discharge space part 76 through which the plasma is maintained through the injection hole provided in the guide ring 50.

Fig. 4 is a schematic configuration diagram of the guide ring 50. Fig.

Referring to FIG. 4, the guide ring 50 has a ring shape having a predetermined height, and a plurality of inclined injection holes 51 are formed on the side surface. The preheated gas flows into the gas supply space 75 It can be supplied to the discharge space portion 76 through the inclined injection hole 51.

The inclined injection hole 51 is not formed along the radial direction which is the imaginary central direction when viewed from the top of the guide ring 50, and is inclined 10 to 20 degrees to the left or right in the radial direction.

The inclined injection hole 51 is inclined from the radial direction on the plane of the guide ring 50 so that the gas supplied to the discharge hole portion 76 through the inclined injection hole 51 is injected into the inclined injection hole 51, As shown in Fig.

This makes it easy to mix the arc discharge or formed plasma with the newly supplied gas by the formation of the vortex, thereby facilitating generation or maintenance of the plasma.

The cooling water supply pipe 71 and the cooling water discharge pipe 72 are connected to the lower side of the anode 40 so that the anode 40 can be cooled by the cooling water. The cooling water discharged through the cooling water discharge pipe (72) may be connected to the cooling water supply pipe (73).

A power connector 74 for supplying power is inserted into the anode 40 from the side of the housing 10 to supply power.

In this configuration, when power is supplied to the port 12 and the power connector 74, a discharge is generated from the cathode tip 21 to the anode 40. At this time, A gas such as nitrogen is converted into plasma and a flame is generated, and the anode 40 is heated by the flame.

The gas supplied through the gas supply unit 60 in the state where the flame is generated is preheated through the circulation pipe 41 formed inside the anode 40. The preheated gas flows through the gas supply space 75 And then flows into the discharge space 76 through the inclined injection hole 51 of the guide ring 50 to be mixed with the formed plasma to easily perform plasma phase transformation.

Therefore, the present invention is characterized in that efficiency can be increased while reducing the amount of gas used.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, And this also belongs to the present invention.

10: housing 11: insulating portion
20: cathode 21: cathode tip
30: Insulation part 31: Cooling water supply port
40: the node 41: the circulation pipe
50: guide ring 51: inclined injection hole
60: gas supply unit 71, 73: cooling water supply pipe
72: Cooling water discharge pipe 74: Power connector
75: gas supply space part 76:

Claims

A cathode 20 fixedly installed on the upper side of the cylindrical housing 10;
An insulating part 30 surrounding the lower side front surface of the cathode 20 and exposing the cathode tip 21 where discharge occurs;
An anode 40 coupled to a lower portion of the insulating portion 30 and spaced apart from the cathode 20 by a predetermined distance;
A gas supply unit 60 coupled to the anode 40 to supply a plasma generation gas to the circulation pipe 41 provided inside the anode 40 to supply the plasma generation gas in a preheated state; And
And a guide ring (50) for supplying the gas supplied through the circulation pipe (41) to the discharge space (76) between the cathode tip (21) and the anode (40).

The method according to claim 1,
The circulation pipe (41) provided inside the anode (40)
A plurality of pipes of a long shape are provided up and down,
Wherein the plurality of tubes are connected to each other in such a manner that adjacent tubes are alternately connected to the upper and lower tubes,
Increases the residence time in the anode (40) of the gas supplied through the gas supply part (60).

The method according to claim 1,
The guide ring (50)
Defining a side surface of the discharge space portion (76)
And a plurality of inclined supply openings (51) for supplying the plasma generated gas preheated through the circulation pipe (41) to the discharge space (76)
So as to form a vortex in the discharge space (76).

The method of claim 3,
The inclined supply ports (51)
Wherein the guide ring (50) is inclined 10 to 20 degrees to the left or right in the radial direction when viewed in plan.