KR101567803B1 - Apparatus for analyzing surface of lens - Google Patents

Abstract

The present invention relates to an apparatus for analyzing a surface of a lens. The apparatus for analyzing a surface of a lens according to an embodiment of the present invention comprises: a light source unit (10) to emit laser light (L); a light direction changing unit (30) to change a propagation direction of the laser light (L) emitted from the light source unit (10) to direct the laser light (L) to a test lens (1); a first lens (40) to focus the laser light (L) to pass the laser light (L) through a prescribed focus point to disperse the laser light (L); a second lens (50) which faces the first lens (40) with the focus point disposed therebetween, and converts the laser light (L) which has passed through the focus point and dispersed into parallel light (L1) parallel with an optical axis to output the parallel light (L1); an object lens (60) which is disposed between the second lens (50) and the test lens (1), and focuses the parallel light (L1) to form a light spot on one surface or the other surface of the test lens (1); a holder unit (20) which fixes the test lens (1) on an XY-plane consisting of an X-axis and a Y-axis perpendicular to each other, and moves in a Z-axis direction perpendicular to the XY-plane; and an ultrasonic transducer (70) to receive an opto-acoustic wave generated in the test lens (1) by the laser light (L) emitted to the test lens (1) to convert the opto-acoustic wave into an electric signal.

Description

[0001] APPARATUS FOR ANALYZING SURFACE OF LENS [0002]

The present invention relates to a lens surface analyzing apparatus.

Various types of lenses are used in optical instruments such as a microscope and a camera. A lens is a transparent body that refracts light reflected from an object. The light refracted by such a lens converges or diverges to a point, thereby forming an image of the object. In other words, when light from each point of an object is refracted through a lens and then collected at a specific point, an image of the object is created.

How the light refracted from the lens collects and diverges is related to the focus of the lens. The lens has a unique focus. When the light is collected, the light is gathered at its focus. When the light is emitted, the light is emitted as if the light comes out from the focus. Thus, the focal point of the lens is an important factor in achieving a clear image. The focus of such a lens is influenced by the surface shape of the lens, and the aberration due to the spherical shape is typical. Here, the spherical aberration means aberration generated because the light is refracted more the farther from the lens center. In addition, although the spherical surface of the lens is subjected to elaborate processing, fine irregularities of the surface, which are inevitably generated in the processing, also affect the refraction of light. Therefore, the surface roughness of the lens due to the irregularities, There is a close relationship with. Therefore, the illuminance of the lens must be precisely measured and managed at the manufacturing stage of the lens.

Generally, a stylus-type surface roughness measuring device is used to measure the roughness. Such a contact-type surface roughness measuring apparatus is a contact-type surface roughness measuring apparatus in which the stylus is brought into contact with the surface of the workpiece, and the roughness is measured while moving along the unevenness of the surface thereof. However, such a contact-type surface roughness measuring apparatus takes a long time to measure the roughness, and there is a problem that the workpiece is scratched because the stylus moves in contact with the workpiece.

In order to solve such a problem, a non-contact type surface roughness measuring apparatus has been devised as disclosed in the following patent documents. Conventionally, the non-contact type surface roughness measuring apparatus irradiates the surface of a subject with laser light and measures the surface roughness using reflected scattered light. However, in the conventional non-contact type surface roughness measuring apparatus using scattered light, there is a problem that the reflected light is greatly influenced by external environmental conditions and does not take into consideration the reflectance of the surface of the object to be inspected, and thus a large error occurs. Also, since the equipment is expensive, there is a problem that the inspection cost is high.

Accordingly, there is a desperate need for a solution to the problem of the conventional non-contact type surface roughness measuring apparatus.

KR 2000-0033124 A

According to an aspect of the present invention, there is provided an optical pickup device including a light deflecting unit deflecting a laser beam and a holder unit moving a lens to be examined up and down, And to provide a lens surface analyzer capable of analyzing the surface in three dimensions.

According to another aspect of the present invention, there is provided a lens surface analyzing apparatus capable of irradiating a lens with a constant amount of light through an objective lens by arranging a lens combination for amplifying and outputting light deflected in parallel between the light deflecting unit and the objective lens .

A lens surface analyzing apparatus according to an embodiment of the present invention includes a light source unit for emitting a laser beam, an optical deflecting unit for deflecting a traveling direction of the laser beam emitted from the light source unit and irradiating the laser beam on the lens to be examined, A first lens which focuses the laser light so as to diffuse through a predetermined focus, a second lens which is opposed to the first lens with the focal point therebetween, and which diffuses the laser light passing through the focal point into a parallel light An objective lens which is disposed between the second lens and the examined lens and condenses the parallel light to form a light spot on one surface or the other surface of the examined lens, A holder portion which fixes the examined lens to be placed on an XY plane formed of a Y axis and is movable in a Z axis direction perpendicular to the XY plane, The laser light is irradiated includes the ultrasonic transducer for converting an electrical signal to receive the photoacoustic wave generated in the lens to be examined.

Further, in the lens surface analyzer according to the embodiment of the present invention, the optical deflector deflects the laser beam such that the light spot moves along the X-axis and Y-axis directions.

Further, in the lens surface analyzer according to an embodiment of the present invention, the optical deflecting unit may include a first galvanometer mirror for reflecting the laser beam emitted from the light source unit, And a second galvanometer mirror that reflects the laser beam reflected by the first galvanometer mirror toward the first lens and adjusts a reflection angle while rotating around a second rotation axis perpendicular to the first rotation axis, .

According to another aspect of the present invention, there is provided a lens surface analyzer comprising: a lens having a plate shape and disposed between the second lens and the objective lens so that only a part of the parallel light passes therethrough, And a light amount adjusting plate for adjusting an amount of laser light incident on the objective lens.

Further, in the lens surface analyzer according to the embodiment of the present invention, the holder part rotates with the X axis passing through the center of the tested lens as a third rotational axis, one of which is in close contact with one side surface of the lens to be examined And the other includes two rotors which come in close contact with the other side surface of the lens to be tested and rotate the tested lens about the third rotation axis, and a support for supporting the rotator.

In the apparatus for analyzing the surface of a lens according to the embodiment of the present invention, a PZT extending or contracting according to a polarity of a voltage to be applied, and an electrode arranged in the PZT to apply the contact pressure, And an actuator for moving the holder according to the contraction.

Further, in the lens surface analyzer according to the embodiment of the present invention, the light path hole through which the laser light passes is penetrated, and the one or more ultrasonic transducers And a fixed dome in which the ducer is disposed.

Further, in the lens surface analyzing apparatus according to the embodiment of the present invention, a rail part having a plurality of rails arranged in a spider-like shape along the inner circumferential surface of the fixed dome, and a transportation part mounting the ultrasonic transducer and moving along the rail .

Further, in the lens surface analyzing apparatus according to an embodiment of the present invention, the apparatus further includes a control unit for controlling the movement of the transportation unit.

The lens surface analyzer according to an embodiment of the present invention further includes a display unit for receiving an electrical signal of the ultrasonic transducer and displaying three-dimensional images of one surface and the other surface of the examined lens.

The features and advantages of the present invention will become more apparent from the following detailed description based on the accompanying drawings.

Prior to that, terms and words used in the present specification and claims should not be construed in a conventional and dictionary sense, and the inventor may properly define the concept of the term in order to best explain its invention It should be construed as meaning and concept consistent with the technical idea of the present invention.

According to the present invention, by including the optical deflecting unit for deflecting the laser beam and the holder unit for moving the tested lens vertically, laser light is irradiated along the X and Y axes on the lens to be examined, and the lens to be examined moves along the Z axis, It is possible to analyze the lens surface in three dimensions by using an acoustic wave.

Further, according to the present invention, by arranging a lens combination for amplifying and outputting light deflected in parallel between the light deflecting unit and the objective lens, even if the light spot moves along the X and Y axes on the lens to be examined, Can be irradiated to the test lens.

1 is a schematic view of a lens surface analyzer according to an embodiment of the present invention.
2 is a perspective view of the light amount control plate shown in Fig.
3 is a perspective view of a holder portion and an actuator of a lens surface analyzing apparatus according to another embodiment of the present invention.
4 is a perspective view of a fixed dome of a lens surface analyzer according to another embodiment of the present invention.
5 is a cross-sectional view taken along line AA 'of FIG.

BRIEF DESCRIPTION OF THE DRAWINGS The objectives, specific advantages and novel features of the present invention will become more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which: FIG. It should be noted that, in the present specification, the reference numerals are added to the constituent elements of the drawings, and the same constituent elements are assigned the same number as much as possible even if they are displayed on different drawings. Also, the terms "first "," second ", and the like are used to distinguish one element from another element, and the element is not limited thereto. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the following description of the present invention, detailed description of related arts which may unnecessarily obscure the gist of the present invention will be omitted.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a schematic view of a lens surface analyzing apparatus according to an embodiment of the present invention, and FIG. 2 is a perspective view of the light amount control plate shown in FIG.

1, a lens surface analyzing apparatus according to an embodiment of the present invention includes a light source 10 that emits laser light L, a light source 10 that deflects the traveling direction of the laser light L emitted from the light source 10, A first lens 40 for converging the laser light L so that the deflected laser light L is diffused through a predetermined focal point; A second lens 50 which is opposed to the first lens 40 with the focal point therebetween and which converts the laser light L diffused through the focal point into a parallel light L1 parallel to the optical axis and amplifies and outputs the parallel light L1, An objective lens 60 which is disposed between the second lens 50 and the lens 1 to be condensed and condenses the parallel light L1 to form a light spot on one surface or the other surface of the lens 1 to be examined, A holder portion 20 which fixes the lens to be examined 1 so as to be arranged on the XY plane consisting of the X axis and the Y axis and is movable in the Z axis direction perpendicular to the XY plane, It is the laser light (L) irradiated includes an ultrasonic transducer 70 for receiving the photoacoustic wave generated in the subject's eye lens 1 is converted into an electric signal.

The lens surface analyzing apparatus according to the present invention is an apparatus for analyzing the surface roughness of the examined lens 1 in three dimensions and includes a light source unit 10, a light deflecting unit 30, a first lens 40, a second lens 50 An objective lens 60, a holder portion 20, and an ultrasonic transducer 70.

The lens surface analyzing apparatus according to the present invention is an apparatus for analyzing and inspecting the surface of a lens. Here, the examined lens 1 to be inspected includes all kinds of lenses which are used in optical equipment such as glasses, a microscope, a camera, a telescope and the like, and are transparent to make an optical image using light. On the other hand, the surface roughness means the roughness of the surface, that is, the degree of fine irregularities that occur on the surface of the lens. Therefore, the lens surface analyzer according to the present invention analyzes and checks the roughness and smoothness of the lens surface.

The lens surface analyzer according to the present invention irradiates a laser light L to a lens 1 to be examined and inspects the lens 1 using a photoacoustic wave generated at this time, And a diverging light source part (10). Here, the light source unit 10 is a laser for generating laser light L. At this time, the laser may be a small-sized, light-weight, and efficient fiber-optic laser. However, the light source unit 10 is not limited to the optical fiber laser, and may be a CO ₂ And all known lasers such as a laser or an Nd: YAG laser. On the other hand, when the laser light L is irradiated on the lens 1 to be examined, a photoacoustic effect occurs. Here, photoacoustic effect means a phenomenon in which a material absorbs light to exhibit an acoustic response. That is, the photoacoustic effect is a phenomenon in which a material absorbing electromagnetic wave energy thermally expands to generate a sound wave. These sound waves are a kind of ultrasonic waves, and they are called photoacoustic waves. Therefore, when the laser light L is irradiated on the lens 1 to be examined, the lens 1 to be examined absorbs the energy of the laser light L, and the absorbed energy is converted into heat energy to increase the temperature of the lens 1 to be examined So that thermal elastic expansion occurs. By receiving the photoacoustic wave generated through this process and generating an image, it is possible to analyze the lens 1 to be examined. On the other hand, the laser light L is irradiated to the lens 1 to be examined while the advancing direction is changed by the light deflecting unit 30. [

At this time, the light deflecting unit 30 deflects the laser light L emitted from the light source unit 10 and irradiates the examined lens 1 in two dimensions. The light deflecting unit 30 does not change the position of the light source unit 10 but moves the position of the light spot on the lens 1 to be examined. That is, the light deflecting unit 30 deflects the laser light L such that the light spot moves along the X-axis and the Y-axis on the XY plane where the tested lens 1 is disposed.

Specifically, the light deflecting portion 30 may include first and second galvano mirrors 31 and 33 for moving the light spot. At this time, the galvanometer mirror is a rotating reflection mirror that adjusts a reflection angle at which light is reflected while rotating around a predetermined rotation axis. The first galvanometer mirror 31 reflects the laser beam L emitted from the light source unit 10 toward the second galvanometer mirror 33 and the laser beam L is reflected by the second galvanometer mirror 33 and irradiated to the lens 1 to be examined. At this time, the first galvanometer mirror 31 rotates around the first rotation axis and the second galvanometer mirror 33 rotates about the second rotation axis, thereby adjusting the angle of reflection to deflect the laser light L . Here, the first rotation axis and the second rotation axis are arranged perpendicular to each other. Accordingly, as the laser light L is deflected by the light deflecting section 30, the light spot also moves along the X and Y axes. On the other hand, the laser light L reflected by the second galvanometer mirror 33 passes through the first lens 40 and the second lens 50 before being irradiated to the lens 1 to be examined.

Here, the first lens 40 and the second lens 50 are lenses that maintain the light amount of the laser light L at a constant level in combination with each other. The laser light L deflected by the light deflecting unit 30 Converts it into parallel light L1, amplifies it, and outputs it. Specifically, the first lens 40 converges the deflected laser light L to a predetermined focus. On the other hand, the second lens 50 is disposed so as to face the first lens 40 with its focal point therebetween so that the laser light L gathered at a predetermined focus by the first lens 40 passes through the focal point And reaches the second lens 50 in a diffused state. Here, the second lens 50 converts the diffused laser light L into parallel light L1 parallel to the optical axis and outputs the parallel light L1. Therefore, even if the laser beam L is deflected and the optical spot moves on the lens 1 to be examined, the laser beam L having a constant amount of light is irradiated irrespective of the position of the optical spot to generate a photoacoustic wave under the same condition .

 On the other hand, when the focal point between the first lens 40 and the second lens 50 is closer to the first lens 40, by the diffusion of the laser light L passing through the focal point, The diameter of the laser light L incident on the first lens 40 becomes larger than the diameter of the laser light L incident on the first lens 40. [ Therefore, the second lens 50 can amplify and output the laser light L according to the position where it is disposed.

Here, the first lens 40 may be a scan lens, and the second lens 50 may be a tube lens. However, the present invention is not limited thereto, As long as it is converted into a digital signal and amplified and outputted. The laser light L converted into the parallel light L 1 is irradiated to the lens 1 to be examined through the objective lens 60.

Here, the objective lens 60 is a lens disposed between the second lens 50 and the lens 1 to be examined, and is located closest to the lens 1 to be examined. The objective lens 60 condenses the parallel light L1 that has passed through the second lens 50 to form a light spot on the surface of the lens 1 to be examined. The laser light L is irradiated to the lens 1 to be examined through the first and second lenses 40 and 50 and the objective lens 60. The lens 1 to be examined is held by the holder 20 .

The holder 20 is a device for fixing the lens 1 to be examined on an XY plane consisting of an X-axis and a Y-axis, as described above. Specifically, the holder portion 20 fixes the lens 1 to be examined so that the laser light L is irradiated on the surface of the lens 1, that is, one surface or the other surface opposite to the surface. Therefore, the surface of the lens to be examined 1 is arranged so as to face the objective lens 60. [ At this time, the holder portion 20 is formed as a plate-type stage (not shown) so as to support one surface or the other surface of the examined lens 1, or a clip (not shown) holding the rim of the tested lens 1 Lt; / RTI > However, the holder portion 20 is not necessarily limited to this, and may include any known fixing means as long as the lens to be examined 1 is fixed. On the other hand, the holder portion 20 is movable in the Z-axis direction in order to analyze and analyze the surface of the lens 1 to be examined in three dimensions. Here, the Z axis direction means a direction perpendicular to the XY plane. Therefore, the lens 1 to be examined fixed by the holder portion 20 moves in the direction approaching or departing from the objective lens 60. [ That is, the distance between the objective lens 60 and the lens 1 to be examined is changed by the movement of the lens 1 in the Z-axis direction. As a result, the distance between the objective lens 60 and the lens 1 L) is also varied. As a result, the laser light L passing through the objective lens 60 relatively moves along the Z-axis direction with respect to the lens 1 to be examined.

Therefore, the laser light L moves along the X-axis and Y-axis directions by the optical deflecting section 30 and the laser light L moves relatively along the Z-axis direction by the holder section 20, The surface of the examined lens 1 can be imaged in three dimensions. At this time, the three-dimensional image of the surface of the lens 1 to be inspected is obtained by the ultrasonic transducer 70 receiving the photoacoustic wave.

The ultrasonic transducer 70 is a device for converting a photoacoustic wave into an electric signal. Therefore, the photoacoustic wave generated in the lens 1 irradiated with the laser light L is received by the ultrasonic transducer 70 and is converted into an electric signal, and this electric signal is converted into a three-dimensional image of the lens 1 to provide. The ultrasonic transducer 70 applies a piezoelectric effect. The piezoelectric element receives acoustic waves. The piezoelectric element is a piezoelectric ceramic such as lead zirconate titanate (PZT) or the like, a polyvinylidene fluoride (PVDF) ) And the like. However, the ultrasonic transducer 70 is not necessarily limited to a transducer using a piezoelectric effect, but includes all known transducers for converting a photoacoustic wave into an electric signal.

Therefore, in the lens surface analyzing apparatus according to the present invention, the surface illuminance of the lens 1 to be examined is three-dimensionally imaged by using the photoacoustic wave by irradiating the laser light L to the examined lens 1 in three dimensions Can be analyzed.

In this case, the lens surface analyzing apparatus according to the present invention may further include a display unit 130 for displaying a three-dimensional image of the surface of the lens 1 to be examined. The display unit 130 is electrically connected to the ultrasonic transducer 70 so as to receive the electrical signal of the ultrasonic transducer 70 to visually output and display images of one surface and the other surface of the lens 1 to be examined .

Meanwhile, the lens surface analyzing apparatus according to the present invention may further include a light amount adjusting plate 80 for adjusting the amount of light irradiated to the lens 1 to be examined. The light amount control plate 80 is formed in the shape of a plate through which the adjustment hole 81 penetrates so that one surface is opposed to the second lens 50 and the other surface is opposed to the objective lens 60, (50) and the objective lens (60). 2, the adjustment hole 81 is formed so as to penetrate from one surface to the other surface of the light amount adjusting plate 80. The diameter of the parallel light L1a output from the second lens 50 (see FIG. 1) . A portion L1b of the parallel light L1a incident on the light amount adjusting plate 80 passes through the adjustment hole 81 and the rest is blocked by one surface of the light amount control plate 80, The amount of light of the laser light incident on the light source is adjusted.

3 is a perspective view of a holder portion and an actuator of a lens surface analyzing apparatus according to another embodiment of the present invention.

3, the holder portion 20 of the lens surface analyzing apparatus according to another embodiment of the present invention may include a rotator 21 and a support 23 so as to rotate the lens 1 to be examined. have. Here, the rotating body 21 is a member that rotates about the third rotation axis, and two of them are disposed closely to one side surface and the other side surface of the lens 1 to be examined. At this time, the third rotation axis is the X-axis passing through the center of the lens 1 to be examined arranged on the XY plane. Therefore, the two rotating bodies 21 are arranged on the X axis and are in close contact with the lens 1 to be examined, so that the examined lens 1 is fixed by the rotating body 21 and rotates around the third rotational axis. Here, the rotating body 21 can be driven by a motor (not shown), but it is not necessarily limited to this, and the user may rotate the rotating body 21 directly. Since the lens 1 to be examined can be rotated in this way, when the inspection of one surface of the lens 1 is completed, the tested lens 1 can be rotated to irradiate laser light on the other surface of the lens 1 to be examined. At this time, the two rotating bodies 21 are supported by the support rods 23.

Meanwhile, the lens surface analyzing apparatus according to another embodiment of the present invention may further include an actuator 90 to move the holder unit 20 in the Z-axis direction. Here, the actuator 90 is a device that is coupled to the holder portion 20 to move the holder portion 20 up and down in the direction of the objective lens 60 (see Fig. 1). Specifically, the actuator 90 includes a PZT and an electrode. At this time, PZT is a piezoelectric element, and has a property of elongating or contracting when a voltage is applied. Therefore, when the holder portion 20 is arranged in the direction in which the PZT extends and shrinks and a voltage is applied, the holder portion 20 moves according to the extension or contraction of the PZT. At this time, in order to adjust the moving distance of the holder 20, a plurality of PZTs may be stacked on each other. However, the PZT does not necessarily have to be stacked as a plurality, and the holder 20 can be moved by itself. Here, the voltage is applied to the PZT through the electrode. Thus, the electrode is disposed in the PZT.

FIG. 4 is a perspective view of a fixed dome of a lens surface analyzer according to another embodiment of the present invention, and FIG. 5 is a sectional view taken along line A-A 'of FIG.

4, the lens surface analyzing apparatus according to another embodiment of the present invention further includes a fixed dome 100 to receive the photoacoustic wave generated from the examined lens 1 in different directions can do. Here, the fixed dome 100 is formed in the shape of a hemispherical dome, the lens 1 to be examined is contained therein, and one or more ultrasonic transducers 70 are disposed on the inner peripheral surface thereof. At this time, one ultrasonic transducer 70 is disposed on the inner circumferential surface of the fixed dome 100 at a different position, or a plurality of ultrasonic transducers 70 are disposed at different positions, thereby receiving the photoacoustic wave in different directions. Therefore, the ultrasonic transducer 70 is disposed in the traveling direction of the photoacoustic wave, and the photoacoustic wave can be effectively received. Further, since the fixed dome 100 covers the lens 1 to be examined, the lens 1 to be examined is protected from disturbance light, and noise can be blocked. At this time, since the light passage hole 101 is formed through the outer surface of the fixed dome 100, the laser light emitted from the light source unit 10 passes through the fixed dome 100.

5, the lens surface analyzing apparatus according to the present invention further includes a rail part 110 and a transportation part 120 so that the ultrasonic transducer 70 can move along the inner circumferential surface of the fixed dome 100 can do. Here, the rail 110 is formed by arranging a plurality of rails 111 in a spider-like shape along the inner circumferential surface of the fixed dome 100. The transportation part 120 moves along the rail 111, and the transportation part 120 mounts the ultrasonic transducer 70. Therefore, the ultrasonic transducer 70 moves along the rail part 110, and receives the photoacoustic wave.

At this time, the lens surface analyzing apparatus according to the present invention may further include a control unit for controlling the movement of the transportation unit 120. [ The control unit controls the movement of the transportation unit 120 in consideration of the angle at which the laser beam is deflected, the radius of curvature of the surface of the lens to be examined 1, and the like. Therefore, the ultrasonic transducer 70 can effectively receive the photoacoustic wave in accordance with the conditions under which the laser light is irradiated and the condition of the lens 1 (see Fig. 4).

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the same is by way of illustration and example only and is not to be construed as limiting the present invention. It is obvious that the modification or improvement is possible.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

1: Test lens 10: Light source
20: holder part 21: rotating body
23: support base 30: optical deflection part
31: First Galvano Mirror 33: Second Galvano Mirror
40: first lens 50: second lens
60: Objective lens 70: Ultrasonic transducer
80: Light quantity adjusting plate 81: Adjusting hole
90: Actuator 100: Fixed dome
101: light passage hole 110: rail part
111: rail 120:
130:

Claims (10)

A light source section for emitting laser light;
A light deflector for deflecting a traveling direction of the laser beam emitted from the light source and irradiating the laser beam on the lens to be examined;
A first lens for focusing the laser light so that the deflected laser light passes through a predetermined focus;
A second lens which opposes the first lens with the focal point therebetween, converts the laser light diffused through the focal point into parallel light parallel to the optical axis, and amplifies and outputs the parallel light;
An objective lens disposed between the second lens and the examined lens to condense the parallel light to form a light spot on one surface or the other surface of the lens to be examined;
A holder unit which fixes the examined lens to be placed on an XY plane consisting of X and Y axes perpendicular to each other and is movable in a Z axis direction perpendicular to the XY plane; And
An ultrasonic transducer for receiving the photoacoustic wave generated by the lens to be irradiated with the laser beam and converting the received photoacoustic wave into an electric signal;
And a lens surface analyzer.
The method according to claim 1,
And the optical deflecting unit deflects the laser light such that the light spot moves along the X-axis and Y-axis directions.
The method of claim 2,
The optical deflector
A first galvanometer mirror that reflects the laser beam emitted from the light source unit and adjusts a reflection angle while rotating around a first rotation axis; And
A second galvanometer mirror that reflects the laser light reflected from the first galvanometer mirror toward the first lens, and rotates about a second rotation axis perpendicular to the first rotation axis to adjust a reflection angle;
And a lens surface analyzer.
The method according to claim 1,
An adjusting hole having a diameter smaller than that of the parallel light is formed to pass through the objective lens so that only a part of the parallel light passes therethrough so that the light amount of the laser light incident on the objective lens A light amount adjusting plate for adjusting the light amount;
Further comprising a lens surface analyzer.
The method according to claim 1,
The holder
And the X-axis passing through the center of the lens to be examined rotates with the third rotation axis, one of which is in close contact with one side of the lens to be examined and the other is in close contact with the other side of the lens to be examined, Two rotators rotating the lens to be examined with a center; And
A support for supporting the rotating body;
And a lens surface analyzer.
The method according to claim 1,
A PZT extending or contracting when a voltage is applied, and an electrode arranged in the PZT so that the voltage is applied, the actuator moving the holder according to expansion or contraction of the PZT;
Further comprising a lens surface analyzer.
The method according to claim 1,
A fixed dome formed in a hemispherical shape for receiving the lens to be inspected therein, the optical path hole through which the laser light passes, and the one or more ultrasonic transducers arranged on an inner peripheral surface thereof;
Further comprising a lens surface analyzer.
The method of claim 7,
A rail portion in which a plurality of rails are arranged in a spiral shape along the inner peripheral surface of the fixed dome; And
A transporter for mounting the ultrasonic transducer and moving along the rail;
Further comprising a lens surface analyzer.
The method of claim 8,
A control unit for controlling movement of the transportation unit;
Further comprising a lens surface analyzer.
The method according to claim 1,
A display unit receiving an electrical signal of the ultrasonic transducer and displaying three-dimensional images of one surface and the other surface of the lens to be examined;
Further comprising a lens surface analyzer.

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