KR101564710B1 - manufacturing method of wave-tunable stimulus tip and stimulus tip thereby - Google Patents

Abstract

The present invention relates to a method for manufacturing a probe integrated with light-emitting diodes and, more specifically, to a method for manufacturing a probe capable of controlling a wavelength and a probe manufactured thereby, which comprises: a first step of preparing a substrate; a second step of forming an alignment key for forming a light-emitting diode on some areas of the substrate to form a first electrode layer; a third step of forming multiple light-emitting diodes having different emission wavelengths on the substrate based on the alignment key; a fourth step of forming a metal interconnect electrode on the substrate, which is electrically connected to the light-emitting diode; a fifth step of forming an insulating film to cover the light-emitting diode, the whole area on the substrate, and the metal interconnect electrode; a sixth step of forming a pattern on the substrate to form a probe; a seventh step of polishing or etching the substrate to reduce the thickness of the substrate; and an eighth step of separating a probe-shaped pattern from the substrate. Accordingly, multiple light-emitting diodes having different emission wavelengths are formed on a single probe (substrate) to allow a single probe to emit lights of various wavelength bands and selectively control either activation or suppressing of nerves, thereby providing very high clinical utility, reducing a unit product cost, and simplifying the process to improve the yield.

Description

[0001] The present invention relates to a method of manufacturing a probe capable of wavelength control,

The present invention relates to a light emitting device having a plurality of light emitting devices having different emission wavelengths on a substrate, thereby enabling light emission of various wavelength ranges by a single probe, selectively controlling the activity and suppression of neurons, To a method of manufacturing a probe capable of wavelength control for lowering a product cost of a product and improving a product yield by simplifying a process, and a probe manufactured by the method.

Recently, research on optogenetics is emerging. It is a combination of Opto and channel rhodopsin (a green algae protein that reacts to light) gene, and the idea of treating mental illness and disease by suggesting a light on a gene-implanted neural circuit is proposed.

In the field of optical genetics, a light-stimulated probe is used to illuminate neural circuits. It collects and analyzes the information after giving the light stimulus to the nerve (brain nerve) of the subject, and it is for treating the brain disease and identifying the motion of the brain.

In the case of the probe of the conventional optical stimulus type, since the optical fiber or the micro LED having a monochromatic wavelength is externally mounted, the manufacturing cost of the micro LED, the manufacturing cost at the time of mounting, There is a problem that it is costly.

In addition, since the mounting type micro LED has a separate substrate, there is a disadvantage that the thickness of the probe increases due to the thickness of the substrate and the thickness of the bonding, and because of the external mounting type, there is a problem of the bonding method, The product yield is lowered, so that the unit price also increases.

In particular, the neuro probe injected into the brain must have a diameter of several tens of micros or less, which limits the inherent substrate thickness of micro LED chips before integration.

Further, in the case of the probe of the conventional optical stimulation method, it takes a long time to complete the product because it takes time in the process of bonding.

As described above, the conventional probe manufacturing method has many problems such as the degree of integration, the size of the probe, and the yield of the product. Thus, there is a limit to be applied to brain neuropsychiatric research and treatment.

In addition, the activity and inhibition of neurons are regulated by the light wavelength region scanned on the target neuron. However, there is a difficulty in selectively controlling the light-sensitive protein in the conventional single-wavelength light probe system.

Korea Patent Office Registration Patent Registration No. 10-1206462

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and it is an object of the present invention to provide a light emitting device having a plurality of light emitting elements having different emission wavelengths on a substrate, It is an object of the present invention to provide a method of manufacturing a probe capable of wavelength control to improve the product yield by lowering the unit cost of the product and simplify the process and to provide a probe manufactured thereby.

According to an aspect of the present invention, there is provided a method of manufacturing a light emitting device including a first step of preparing a substrate, a second step of forming an alignment key for forming a light emitting element in a partial area on the substrate and forming a first electrode layer, A third step of forming a plurality of light emitting devices having different emission wavelengths on the substrate on the basis of the first light emitting device and the second light emitting device; A fifth step of forming an insulating film so as to surround the entire area on the substrate and the metal wiring electrode, a sixth step of forming a pattern for forming a probe on the substrate, a sixth step of polishing the substrate, Or etching, and an eighth step of separating a probe-like pattern on the substrate. The method according to claim 1, And a probe manufactured thereby.

In addition, the substrate is preferably formed of a transparent material, and glass or polyimide is preferably used.

In the third step, it is preferable to use a transfer printing method.

Meanwhile, it is preferable that the light emitting device of the present invention is an organic LED (OLED) or a light emitting device using a light emitting layer using a quantum dot (QD).

The light emitting devices may be formed by transfer printing sequentially on different regions of the substrate according to wavelengths, or transfer printing may be simultaneously performed on different regions of the substrate according to wavelengths.

It is preferable that the insulating layer in the fifth step is formed by opening an area in which the second electrode layer and the metal wiring electrode are in contact with each other and the sixth step is to form a pattern for forming a single probe or a plurality of probes on the substrate .

In addition, the light emitting devices may be formed in a single number, or a plurality of the light emitting devices may have red, green, and blue light emission wavelengths, or may be formed in any one of a series, parallel, zigzag, .

The present invention has the effect that the thickness of the probe is drastically reduced by integrating the light emitting element on the substrate to form the substrate of the probe, thereby eliminating the substrate thickness inherent to the light emitting device or the thickness of the bonding material for bonding the light emitting device.

Particularly, the present invention is characterized in that, by forming a plurality of light emitting elements having different emission wavelengths on a single probe (substrate), it is possible to emit light in various wavelength ranges with a single probe, It is possible to have a very high medical efficacy, lower the unit price of the product, and improve the product yield by simplifying the process.

In addition, since the bonding between the conventional substrate and the probe is not required, it is possible to effectively shorten the product completion period since the adhesive material, the bonding step, and the like are not required. Further, since a plurality of light emitting devices can be formed by the transfer printing process, It is possible to reduce the thickness of the probe, thereby further improving the medical utility.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view of essential parts of a probe capable of wavelength control according to an embodiment of the present invention; FIG.
FIG. 2 is a schematic view (a front view and a back surface) of a probe in which a plurality of probes are formed in a probe capable of wavelength control according to an embodiment of the present invention.
FIG. 3 is a schematic diagram of a probe capable of wavelength control according to an embodiment of the present invention, in which red, green, and blue light emitting devices are implemented on a substrate.
4 is a schematic view showing a method of manufacturing a probe capable of wavelength control according to an embodiment of the present invention.
5 is a schematic view of a light emitting device according to an embodiment of the present invention.

The present invention can be applied not only to the substrate itself as a probe but also to integrate a plurality of light emitting devices having different emission wavelengths on a substrate so that light emission in various wavelength ranges can be performed by one probe, Which has a very high medical efficacy, lowers the unit price of the product, and improves the product yield by simplifying the process.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a cross-sectional view of a main portion of a probe capable of wavelength control according to an embodiment of the present invention. FIG. 2 is a schematic view illustrating a probe having a plurality of probes in a wavelength control according to an embodiment of the present invention. FIG. 3 is a schematic view of a probe capable of wavelength control according to an embodiment of the present invention, in which red, green, and blue light emitting devices are mounted on a substrate, FIG. 4 is a cross- FIG. 5 is a schematic view of a light emitting device according to an embodiment of the present invention. FIG. 5 is a schematic view illustrating a method of manufacturing a probe capable of wavelength control according to an embodiment of the present invention.

1 and 2, a probe 100 capable of wavelength control according to the present invention includes a substrate 110, a plurality of light emitting devices 120 formed on a part of the substrate 110, A metal wiring electrode 130 formed on the substrate 110 and electrically connected to the light emitting device 120 and the light emitting device 120 and the entire area on the substrate 110 and the metal wiring electrode 130 And an insulating layer 140 formed to surround the insulating layer 140.

A method of fabricating a probe having such a light emitting device integrated therein includes a first step of preparing a substrate as shown in FIG. 4, a second step of forming an alignment key for forming a light emitting element in a part of the substrate, A third step of forming a plurality of light emitting devices having different emission wavelengths on the substrate on the basis of the alignment key, a third step of forming a metal wiring electrode A fifth step of forming an insulating film so as to surround the entire area on the substrate and the metal wiring electrodes, a sixth step of forming a pattern for forming a probe on the substrate, A seventh step of polishing or etching to lower the thickness of the substrate, and an eighth step of separating the probe-like pattern on the substrate.

First, a substrate is prepared (Fig. 4 (a)).

The substrate is formed of a transparent material, and a transparent substrate is used as a base material so that light can be emitted from the finished product to the rear surface of the substrate. Preferably, glass or polyimide is used in consideration of workability and economical efficiency.

The light emitting device is monolithically integrated on the substrate and processed by itself to be used as a probe.

An align-key for forming a light-emitting element is formed on a part of the substrate to form a first electrode layer (FIG. 4 (a)).

The alignment key is formed on the substrate by a cross mark, a date mark, or the like, and is formed as a scribe line with a laser or the like. By displaying the alignment key on the substrate, the light emitting element can be formed in a precise design position.

The first electrode layer is preferably formed of a transparent conductive oxide (TCO) for light emission of the light emitting device, and may be formed of ITO, ZnO, SnO ₂ or the like. The first electrode layer functions as an anode electrode of the light emitting device.

Then, a plurality of light emitting devices having different emission wavelengths are formed on the substrate with reference to the alignment key (FIGS. 4 (b), (c), and (d)).

The light-emitting element formation in the present invention is formed by a transfer printing method using a mold in which some elements of the light-emitting element are formed on the substrate.

Here, the light emitting device is preferably formed of an organic LED (OLED). That is, some elements of the organic LED are formed on the patterned PDMS mold and the organic LED is formed on the substrate by its transfer printing.

In this case, the light emitting devices may be formed by transfer printing sequentially on different regions of the substrate according to wavelengths, or by transfer printing on different regions of the substrate according to wavelengths.

For example, a constituent element of the organic LED having one light emitting wavelength on the patterned PDMS mold is formed according to a predetermined pattern, and the organic LED is first transferred onto the substrate, and then an organic LED having a different emission wavelength And transfer printing is sequentially performed in accordance with wavelengths.

In addition, when organic LED elements having different emission wavelengths are simultaneously formed on the patterned PDMS mold, transfer printing is performed to form organic LEDs having different emission wavelengths in different regions on the substrate.

Here, the components of the organic LED formed on the PDMS mold are formed in the reverse order of the components of the organic LED except for the anode electrode (first electrode layer), the remaining components being formed on the substrate, Transferred onto the substrate.

According to another embodiment of the present invention, the transfer printing method includes forming a second electrode layer on a patterned PDMS mold, sequentially forming an electron transport layer, a light emitting layer, and a hole transport layer on the PDMS mold, The light emitting device may be formed by transfer printing on the formed substrate with reference to the alignment key.

Here, it is preferable that the electron transporting layer and the hole transporting layer use a known material and the light emitting layer of the light emitting device is made of QD (Quantum-Dot, quantum dot).

Unlike the organic LED in which an organic material is used as a light emitting material, the QD (Quantum-Dot, quantum dot) uses a property of self-emitting like an organic LED when a semiconductor is cut into nanoscale and voltage is applied. , And color recall ratio are excellent. These QDs are nanomaterials that emit light with a shorter wavelength as the particle size becomes smaller and emit longer wavelengths as the particle size increases. By controlling the particle size, the QD emits a desired wavelength that can be displayed in the visible light region There are advantages to be able to.

The second electrode layer serves as a cathode electrode of a light emitting device using QD as a light emitting layer. By transfer printing the light emitting device having the constituent elements formed on the patterned PDMS mold in the reverse order as described above, A light emitting element using QD as a light emitting layer is formed.

5, a first electrode layer (anode electrode) 121 is formed on a substrate, and a hole transport layer 122, a QD emission layer 123, an electron transport layer 124, and an uppermost layer A second electrode layer (cathode electrode) 125 is formed.

The light emitting device having the QD as the light emitting layer is also transferred and printed on the substrate to have various light emitting wavelengths in the same manner as the organic LED.

That is, as described above, they are formed by transfer printing sequentially in different regions on the substrate according to wavelengths, or transferred and printed simultaneously to different regions on the substrate according to wavelengths.

Then, a metal wiring electrode is formed on the substrate and electrically connected to the light emitting element to inject current into the light emitting element (FIG. 4 (e)).

The metal wiring electrode is electrically connected to the second electrode layer of the light emitting device and is formed in accordance with the arrangement of the light emitting devices. The metal wiring electrode is formed by a plurality of connection patterns, such as an arrangement pattern of light emitting devices, a distance between patterns, A contact shadow mask, and may be formed by an e-beam evaporator, a sputtering, a printing, or a plating process.

After the metal wiring electrode is formed, an insulating film is formed to surround the light emitting element, the entire region on the substrate, and the metal wiring electrode.

The insulating layer may be formed of a material such as SOG, TEOS, LTO, an oxide layer, a polymer, a polyimide, or a nitride layer. The insulating layer may be formed by CVD, e-beam evaporation, , Sputtering, printing, or the like.

Here, it is preferable that the insulating layer is formed so as to surround the entire surface of the substrate, and the region where the second electrode layer and the metal wiring electrode are in contact with each other is opened, and this region is removed by a photolithography process and an etching process Or can be selectively formed by a photolithography process through a mask.

That is, except for the region where the second electrode layer and the metal wiring electrode are in contact with each other in the finished product, it can be protected by an insulating film formed of an oxide film, a nitride film or a polyimide system.

Then, a pattern for forming a probe is formed on the substrate (Fig. 4 (f)).

Forming a probe-like pattern on the substrate through a contact mask, or forming a pattern for forming a probe or a plurality of probes on the substrate, if necessary, wherein the probe- And may be formed by dry etching, reactive ion etching, or induced coupling plasma.

Then, polishing or etching is performed to lower the thickness of the substrate to form a final probe, and the probe-like pattern is separated on the substrate (FIGS. 4 (g) and 4 (h)).

The process of lowering the thickness of the substrate is performed by grinding, lapping, polishing or etching. The process of separating the probe pattern is performed by laser cutting or a process of lowering the thickness of the substrate. do.

As shown in FIG. 3, the light emitting devices 120 may be formed in a single number so as to have emission wavelengths of red, green, and blue to form metal wiring electrodes 130 for current injection, , And when they are formed in a plurality, they may have any one of a row, a parallel, a zigzag, and a cross, or a mixed arrangement.

In addition, the QD is cut to have a certain size so as to emit red and green light, and then mixed to form a blue organic LED or a blue QD at the back thereof to realize a white light.

This makes it possible to easily form the light emitting element on the substrate by forming the components of the light emitting element on the appropriately patterned PDMS mold and transfer printing the same.

The probe fabricated in this manner can be fabricated by monolithically integrating a light emitting element directly on a substrate using an optical fiber of a conventional method or by mounting the probe on a substrate, The thickness of the probe is drastically reduced.

The probe manufactured by the manufacturing method of the present invention has a thickness of 200 탆 or less, which is expected to increase the medical efficacy of the probe according to miniaturization and to be used in various ranges.

Particularly, the present invention is characterized in that, by forming a plurality of light emitting elements having different emission wavelengths on a single probe (substrate), it is possible to emit light in various wavelength ranges with a single probe, It is highly possible to have a high medical efficacy, lower the unit price of the product, and improve the product yield by simplifying the process.

In addition, since the bonding between the conventional substrate and the probe is not required, it is possible to effectively shorten the product completion period since no adhesive material, a bonding step or the like is required. In the present invention, the light emitting device is sequentially The thickness of the probe can be reduced compared with that of the conventional method, and the medical utility is further enhanced.

100: probe 110: substrate
120: light emitting element 121: first electrode layer
122: hole transporting layer 123: light emitting layer
124: electron transport layer 125: second electrode layer
130: metal wiring electrode 140: insulating film

Claims (14)

A first step of preparing a substrate;
A second step of forming an alignment key for forming a light emitting element on a part of the substrate and forming a first electrode layer;
A third step of forming a plurality of light emitting devices having different emission wavelengths on the substrate with reference to the alignment key;
A fourth step of forming a metal wiring electrode formed on the substrate and electrically connected to the light emitting element;
A fifth step of forming an insulating film to surround the light emitting element, the entire region on the substrate, and the metal wiring electrode;
A sixth step of forming a pattern for forming a probe on the substrate;
A seventh step of polishing or etching to lower the thickness of the substrate;
And separating the probe-like pattern on the substrate. The method of claim 1, The substrate processing apparatus according to claim 1,
Wherein the transparent electrode is formed of a transparent material. The substrate processing apparatus according to claim 2,
Glass or polyimide. The method according to claim 1, 2. The method according to claim 1,
A method of manufacturing a probe capable of wavelength control, characterized by using a transfer printing method. The method of claim 4, wherein the light emitting device is an organic LED (OLED). The light emitting device according to claim 5,
Transfer-printing sequentially on different regions on the substrate according to wavelengths,
And transfer printing is performed on other regions on the substrate according to wavelengths. 5. The method of claim 4, wherein the transfer printing method comprises:
A second electrode layer is formed on the patterned PDMS, and an electron transporting layer, a light emitting layer, and a hole transporting layer are sequentially formed on the patterned PDMS. Transfer printing is performed on the substrate on which the first electrode layer is formed, Wherein the wavelength of the laser beam is controlled to be in the range of about 10 to 20 nm. 8. The method of claim 7, wherein the light emitting layer is made of QD (Quantum-Dot). The light emitting device according to claim 8,
Transfer-printing sequentially on different regions on the substrate according to wavelengths,
And transfer printing is performed on other regions on the substrate according to wavelengths. 8. The method according to claim 7,
Wherein a region where the second electrode layer and the metal wiring electrode are in contact with each other is opened and formed. The method as claimed in claim 1,
Wherein a pattern for forming a single probe or a plurality of probes is formed on the substrate. The light emitting device according to claim 1, wherein each of the light emitting devices has a plurality of light emitting elements each having a red, green, and blue emission wavelength, or a plurality of light emitting elements may be formed in any one of a series, parallel, zigzag, The method of manufacturing a probe according to claim 1, 2. The method of claim 1, wherein after the seventh step,
Wherein the wavelength of the laser beam is controlled to be 200 占 퐉 or less. A probe capable of wavelength control produced by the method of any one of claims 1 to 13.

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