KR101558188B1 - Deionized water supply apparatus - Google Patents

Abstract

The present invention relates to a DI water supply apparatus which is reduced in volume and enhanced in mobility so as to be suitable for a workplace or research institute requiring a small amount of pure water (DI water) unlike a large workplace, A plurality of wheels 200 attached to the bottom surface of the bottom plate 110 of the case 100 and a filter 31 for removing foreign matters from PCWs, A resin tank 32 for passing the filtered water through the filter to improve the resistivity of the PCW, a DI water reservoir 33 for storing the PCW purified by DI water, and a circulation pump for maintaining the flow of the DI water 34, and is constituted by DI water supply means provided in the case 100.

Description

[0001] DETIONED WATER SUPPLY APPARATUS [0002]

The present invention relates to a process for the production of a distilled water for injection, such as dilution of a chemical agent, washing of a container, washing of a semiconductor wafer, preparation of a distillate for injecting such as a ring gel, preparation of a water-based paint, prevention of decrease in arrival rate of deionized water for electroplating, And more particularly to a DI water supplying device used for preventing the corrugation and degeneration of a product produced by a microorganism and preventing a pigment congelation phenomenon of a soft drink, and more particularly, to a DI water supplying device which requires a small amount of pure water (DI water) And more particularly to a DI water supply apparatus for reducing volume and enhancing mobility so as to be suitable for a workplace or a research institute.

Deionized water (hereinafter, referred to as 'DI water') is a water with almost no impurities except for ions generated by self-ionization of water by removing all ions dissolved in water. Pharmaceutical industry, paint industry, plating industry, food processing and cosmetics industry. DI water is widely used in industrial fields such as semiconductor manufacturing apparatuses, LCD manufacturing plants, such as LCD and PDP manufacturing plants and pharmaceutical plants. DI water is also used to cool various manufacturing apparatuses and to clean semiconductor wafers and glass substrates, for example, LCDs, PDPs, glass substrates used for organic EL, and other industrial members. Therefore, DI water is widely used in various industries requiring pure water.

Generally, DI water is produced by sequentially passing distilled water through a cation exchange resin and an anion exchange resin. Therefore, in the fields of chemical industry, semiconductor industry, pharmaceutical industry, paint industry, plating industry, food processing and cosmetics industry, DI water manufacturing factory which manufactures DI water by supplying large amount of industrial water (wastewater) Respectively.

An example of the DI water producing apparatus described above includes a filter for removing foreign matters from raw water, a first deionization device for deionizing raw water having passed through the filter at a first resistivity, A second deionization device for deionizing the ultrapure water passed through the deionization device to a second resistivity higher than the first resistivity, a supply part for supplying ultrapure water through the second deionization device to the use part, And a recovery pipe for recovering the purified water recovered between the first deionization device and the second deionization device to mix the ultrapure water and the recovered ultrapure water passed through the first deionization device and supplied to the second deionization device.

In addition, the conventional DI water producing apparatus includes a filter, a first deionizing device, a second deionizing device, a tank for storing raw water and a tank for storing ultrapure water together with a supply and return pipe as shown in Patent Document 1 There is a problem that the whole volume becomes large and the mobility thereof becomes low.

Korean Registered Patent Publication (B1) Registration No. 10-0397111 (2003. 09. 06. Announcement)

Disclosure of the Invention The present invention overcomes the problems of the prior art as described above, and unlike a large workplace, the present invention provides a DI water supply device that reduces volume and improves mobility to suit a small amount of pure water, The purpose is to provide.

It is another object of the present invention to provide a DI water supply device which is easy to repair and replace, such as a filter, a resin tank, a DI water storage tank, and a circulation pump installed in a case.

It is another object of the present invention to provide a DI water supply device capable of increasing mobility and fixing it so as not to move during a work.

It is another object of the present invention to provide a DI water supply device capable of checking the level of DI water stored in a DI water storage tank without opening the side plate or the upper plate of the case.

Another object of the present invention is to provide a DI water supply device that can be immediately replaced when the performance of a resin tank deteriorates.

It is another object of the present invention to provide a DI water supply device capable of preventing freezing of DI water.

It is another object of the present invention to provide a DI water supply device that facilitates connection with a source of raw water.

It is another object of the present invention to provide a DI water supply device capable of adjusting the water level of a DI water storage tank to an appropriate level.

It is another object of the present invention to provide a DI water supply device which can block a PCW flowing into a resin tank or flowing out of a resin tank when a resin tank is replaced.

It is another object of the present invention to provide a DI water supply device which can supply DI water to various places where it is required.

Another object of the present invention is to provide a DI water supply device that allows the DI water to be circulated to the resin tank when the resistivity value of the DI water discharged from the DI water storage tank is low or when the discharge flow rate is large.

According to an aspect of the present invention, there is provided an electronic device including: a case having a space formed therein and a control box provided on one side thereof; A plurality of wheels attached to a bottom surface of the case bottom plate; A filter for removing impurities of PCW (Process Cooling Water), a resin tank for passing the chemical filter to improve the specific resistance value of the PCW, a DI water storage tank for storing the PCW purified by DI water, And a DI water supply means installed in the case, the DI water supply means including a circulation pump for maintaining the flow of suction and discharge.

According to one aspect of the present invention, the case is characterized in that at least one of a plurality of side plates and an upper plate is opened and closed.

According to another aspect of the present invention, there is further provided a plurality of stoppers attached to the bottom surface of the case bottom plate.

According to another aspect of the present invention, the DI water storage tank is provided with a water level indicator pipe for indicating the water level in the DI water storage tank, and the case has a transparent window for viewing the water level indicator pipe.

According to another aspect of the present invention, the case is further provided with an auxiliary resin tank for replacement with the resin tank.

According to another aspect of the present invention, the DI water storage tank is provided with a heater for preventing freezing of DI water.

According to another aspect of the present invention, a PCW inlet of a pipe end connected to one end of the filter is fixed to the case and is exposed to the outside.

According to another aspect of the present invention, there is provided a solenoid valve which is located on a pipe connecting the other end of the filter and the inlet of the resin tank, and is opened or closed according to a water level of the DI water storage tank.

According to another aspect of the present invention, there is provided a microvalve located at an inlet and an outlet of the resin tank and blocking a PCW flowing into the resin tank or flowing out of the resin tank when the resin tank is replaced.

According to another aspect of the present invention, a DI water inlet of a pipe end connected to an outlet of the circulation pump connected to the DI water storage tank is fixed to the case and is exposed to the outside.

According to another aspect of the present invention, when the resistivity value of the DI water discharged from the DI water storage tank is lowered or the discharge flow rate is large, the DI water discharge pipe is located on the pipe connecting the discharge port of the circulation pump and the inlet port of the resin tank. And a microvalve that circulates the DI water to the resin tank.

According to the present invention, a filter for removing PCW (Process Cooling Water) foreign substances is provided in a case having a wheel at the bottom with minimized volume, a resin tank for increasing the specific resistance value of PCW by passing through a chemical filter, A DI water storage tank for storing the purified PCW and a DI water supply means including a circulation pump for maintaining the flow of the suction and discharge of the DI water are installed so that a small amount of pure water, DI water can be obtained.

Further, the present invention makes it easy to repair and replace troubles such as filters, resin tanks, DI water storage, and circulation pumps installed in the case by opening and closing a plurality of side plates and upper plates constituting the case.

Further, by providing a plurality of stoppers together with wheels on the bottom surface of the case of the present invention, it is possible to increase the mobility and to fix it so as not to move during operation.

Further, the present invention can confirm the level of the DI water stored in the DI water storage tank without opening the side plate or the top plate by providing a water level indicator pipe in the DI water storage tank and providing a transparent window corresponding to the water level indicator pipe in the case.

Further, according to the present invention, by providing the auxiliary resin tank which can be replaced separately from the resin tank being used in the case, there is an effect that the resin tank can be immediately replaced when the performance of the resin tank deteriorates.

Further, the present invention can prevent freezing of DI water by constituting a heater in the DI water storage tank.

In addition, the present invention facilitates connection with a raw water supply source by fixing the PCW inlet connected to the filter to a case exposed to the outside.

In addition, the present invention can adjust the water level of the DI water storage tank to an appropriate level by providing a solenoid valve that is opened or closed on the pipe connecting the filter and the resin tank according to the DI water storage tank level.

In addition, by providing a microvalve in the inlet and outlet of the resin tank, it is possible to block the PCW flowing into the resin tank or flowing out from the resin tank when the resin tank is replaced.

The DI water supply port connected to the DI water reservoir through the circulation pump is exposed to the outside of the case so that DI water can be supplied to various places requiring the DI water.

Further, by providing a microvalve on the pipe connecting the circulation pump and the resin tank, when the specific resistance value of the DI water discharged from the DI water storage tank is low or the discharge flow rate is large, the DI water is circulated to the resin tank Reprocessing can be done.

1 is an exploded perspective view of a DI water supply apparatus according to the present invention.
2 is a rear perspective view of the DI water supply apparatus according to the present invention in a state in which the side plate and the upper plate are open.
3 and 4 are perspective views of DI water supply means.
5 is a circuit diagram for controlling the operation of the DI water supply apparatus according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is an exploded perspective view of a DI water supply device according to the present invention, FIG. 2 is a rear perspective view of a DI water supply device according to the present invention in a state in which a side plate and an upper plate are open, FIGS. 3 and 4 show a DI water supply device And FIG. 5 is a circuit diagram for controlling the operation of the DI water supply apparatus according to the present invention.

1 and 5, the DI water supplying apparatus according to the present invention includes a small rectangular case 100 having a space formed therein and a control box 120 on one side thereof, A plurality of wheels 200 for movement attached to the bottom surface of the plate 110 and a filter 31 for removing PCW (Process Cooling Water) foreign substances, a resin 31 for passing through a chemical filter to improve the resistivity of the PCW A DI water storage tank 33 for storing PCW purified by DI water, and a circulation pump 34 for maintaining the flow of intake and discharge of DI water, and the like, DI water supply means.

Since the case 100 has a length, a length, and a height of about 100 cm, 67 cm, and 100 cm, the volume of the DI water supply apparatus is greatly reduced and miniaturized.

The case 100 in which the respective components of the DI water supply means are housed can be opened or closed, that is, detachably coupled to at least one of the plurality of side plates 140, 150 and the upper plate 160, It is easy to install and maintain the element.

Since the case 100 has a plurality of wheels 200 attached to the bottom surface of the bottom plate 110 and has a good mobility and a plurality of stoppers 210 attached together with the wheels 200, So that it does not move.

The case 100 has a transparent window 130 formed on one of the side plates so as to extend vertically and horizontally from the window 100 for observing the level gauge 33a showing the level of the DI water storage tank 33 in the case 100. [ to be. It is a matter of course that the transparent window 130 and the level gauge 33a should be formed vertically long.

The case 100 further includes an auxiliary resin tank 32a for replacement with the resin tank 32. [ The DI water storage tank 33 is provided with a heater 33b for preventing freezing of DI water.

A drain 33h for draining the DI water is connected to the end of the pipe 33g connected to the DI water storage tank 33. The drain 33h is fixed to the case 100, .

5, the control box 120 constituting one side plate of the case 100 is supplied with operation power from the outside and is connected to a temperature sensor 33e, a flow sensor 34d, a resistance sensor 33f, And controls the operations of the circulation pump 34, the heater 33b, the solenoid valves 32f and 33c, the microvalves 32d, 32e and 34d, and the like.

The temperature sensor 33e is a sensor installed in the DI water storage tank 33 to sense the temperature of the DI water stored in the DI water storage tank 33. The flow sensor 34d is connected to the circulation pump 34 and DI The resistance sensor 33f is installed on the DI water reservoir 33 and is connected to the DI water reservoir 33. The DI water reservoir 33 is connected to the water supply port 34b, The float switch 33d is provided in the DI water reservoir 33 and is turned on and off according to the level of the DI water stored in the DI water reservoir 33. The DI water reservoir 33 is a sensor for sensing the resistance of the DI water stored in the DI water reservoir 33 Switch.

The circulation pump 34 is a pump for supplying the DI water stored in the DI water storage tank 33 to the outside through the DI water supply port 34b. The heater 33b is disposed above the DI water storage tank 33 to prevent freezing of DI water stored in the DI water storage tank 33. [

The solenoid valve 32f is located on the pipe 32g connecting the resin tank 32 and the DI water reservoir 33 so that the resistance of the DI water stored in the DI water reservoir 33 has not reached the normal value And serves to block the DI water discharged from the resin tank 32 from being further introduced into the DI water storage tank 33. The solenoid valve 33c is located on the pipe 31b connecting the filter 31 and the resin tank 32 and is detected by the float switch 33d to indicate that the water level of the DI water storage tank 33 has fallen below a predetermined water level And the PCW is supplied from the outside.

The microvalve 34d is located on the pipe 34c connecting the circulation pump 34 and the resin tank 32 so that the resistivity of the DI water stored in the DI water storage tank 33 is lowered or the DI water And functions to circulate DI water discharged from the DI water storage tank 33 to the resin tank 32 when the discharge amount is large. The microvalves 32d and 32e are positioned at the inlet and outlet of the resin tank 32 to block the PCW flowing into the resin tank 32 or flowing out from the resin tank 32 when the resin tank 32 is replaced .

The PCW inlet 32b at the end of the pipe 31a connected to one end of the filter 31 is fixed to the case 100 and exposed to the outside so that connection with a raw water supply source not shown is easy.

The DI water supply port 34b at the end of the pipe 34a connected to the discharge port of the circulation pump 34 connected to the DI water storage tank 33 is fixed to the case 100 and exposed to the outside, Can be supplied in various places.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined by the scope of the appended claims and equivalents thereof.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, Modification is possible. Accordingly, the spirit of the present invention should be understood only in accordance with the following claims, and all equivalents or equivalent variations thereof are included in the scope of the present invention.

31: filters 31a, 32b, 32g, 33g, 34a, 34c: pipes
31b: PCW inlet 32: resin tank
32a: auxiliary resin tank 32f, 33c: solenoid valve
32d, 32e, 34d: micro valve 33: DI water storage tank
33a: level gauge 33b: heater
33d: float switch 33e: temperature sensor
33f: resistance sensor 33h: drain
34: circulation pump 34b: DI water supply port
34d: Flow sensor 100: Case
110: bottom plate 120: control box
130: Transparent window 140, 150: Shroud
160: top plate 200: wheel
210: Stopper

Claims (5)

A case 100 having a space formed therein and a control box 120 on one side thereof; And
A PCW inlet 31b through which PCW is introduced from outside the case, a filter 31 connected from the PCW inlet to remove foreign substances from the PCW, A DI water storage tank 33 connected to the resin tank and storing the PCW purified through DI water through the resin tank, a DI water storage tank 33 connected to the DI water storage tank 33, A circulation pump 34 for maintaining the flow of suction and discharge of the DI water and a pipe 34c for connecting the resin tank 32 and the circulation pump 34, A DI water supply means including a microvalve 34d for recirculating the DI water to the resin tank 32 and a DI water supply port 34b connected to the circulation pump to discharge the DI water out of the case, [0003]
DI water supply. The method according to claim 1,
Further comprising a plurality of moving means (200) attached to a bottom surface of the case (100). 3. The method of claim 2,
Further comprising a plurality of stoppers (210) attached to a bottom surface of the case (100). 4. The method according to any one of claims 1 to 3,
Wherein an auxiliary resin tank (32a) is further included in the case (100) for replacement with the resin tank (32). 5. The method of claim 4,
The PCW inlet 31b and the DI water inlet 34b are fixed to the opposite side of the control box 120 included in one side of the case 100 and exposed to the outside.

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