KR101549652B1 - Close-type exposure apparatus - Google Patents

Abstract

The present invention relates to a display-type fan assembly device, wherein the rotation detection sensor includes an integrated cooling fan, a rotating state LED (Light Emitting Diode) module, an interlock LED module, an alarm history LED module and a history reset module, A sensor unit for sensing the pulse signal detected by the detection sensor and displaying the state of the cooling fan through the rotation state LED module, the interlock LED module, and the alarm history LED module, and a sensor unit for connecting the cooling fan and the sensor unit Signal cable. Therefore, the display-type fan assembly device can be easily attached to the semiconductor production facility where high heat is generated, so that the normal operation of the cooling fan can be easily discriminated, and the damage and maintenance of the facility due to the sudden stoppage of the cooling fan can be prevented. Can be saved.

Description

CLOSE-TYPE EXPOSURE APPARATUS [0001]

The present invention relates to a display-type fan assembly apparatus, and more particularly, to a display-type fan assembly apparatus capable of easily recognizing whether a cooling fan is operating normally by being attached to a semiconductor production facility in which high heat is generated, The present invention relates to a display-type fan assembly device capable of reducing maintenance and repair costs of a facility by preventing damage.

Generally, a semiconductor manufacturing facility requires a device for cooling the heat generated in the manufacturing process. Particularly, a machine or a facility used in a semiconductor process is susceptible to a malfunction or a down operation when operating conditions are changed. In order to prevent overheating of the device and to operate the device safely, a fan for heat dissipation is installed in main parts and parts, so that the heat generated from the component itself has a fatal effect on the life of the component, do.

Typically, the fan rotates the wings driven by the motor to protect the product or device from the heat of high temperature throughout the industry, and uses the generated convection to cool the heat generated by the predetermined heating element in the product or apparatus The state plays a role.

However, since means for visually discriminating whether or not the conventional fan operates normally has not been disclosed, it is often the case that the cause of the failure of the fan is unknown, or it is often impossible to know whether or not the fan is operating normally. In addition, when the rotational force of the motor is lowered, power is applied to the motor but the fan does not rotate, the heat radiation performance is lowered, the internal temperature rises, the life of the component is lowered, Overheating has resulted in ignition and subsequent problems such as causing damage to the machine or equipment.

Korean Patent Publication No. 10-2013-0055324 discloses a fan drive monitoring system. The fan drive monitoring system includes a body mounted on a shroud, a plurality of LEDs mounted on a front surface of the body, a power LED mounted on a rear surface of the body, A status LED for indicating an operation state of the fan, a sensor for sensing a rotation state of the fan, an operation state of the fan by receiving a sensing signal generated from the sensor, / OFF), and a power supply for supplying power to the plurality of LEDs, the power LED, the status LED, the sensor, and the control device. According to the disclosed technology, it is possible to easily check the normal operation and the abnormal operation of the fan through the LED, quickly cope with the abnormal operation of the fan, quickly discharge the heat generated inside, and prevent the PCB failure in the flex control device .

Korean Patent Laid-Open No. 10-2010-0113348 discloses a fan shroud assembly and its operation indicator. The fan shroud assembly and its operation display device include a fan and a shroud assembly, a motor rotation monitoring unit provided at one side of the motor for rotating the fan, a monitoring unit for displaying according to normal operation of the motor, And a controller for receiving a signal from the monitoring unit and transmitting a signal to the monitoring unit according to the received signal. According to the disclosed technology, it is possible to visually display the fan in real time by mounting a display device that can display various states depending on the case of normal operation of the fan, so as to determine whether the fan is operating normally or abnormally, Accordingly, it is possible to display various kinds of abnormality due to an abnormality due to the overheating of the motor and an external factor.

Korean Patent Publication No. 10-2013-0055324 Korean Patent Publication No. 10-2010-0113348

The embodiment of the present invention is capable of easily identifying whether the cooling fan is operating normally by attaching to a semiconductor production facility where high heat is generated, and it is possible to prevent equipment damage due to sudden stoppage of the cooling fan, The present invention provides a display-type fan assembly device capable of reducing the size of a display panel.

Among the embodiments, the display-type fan assembly device includes a cooling fan, a rotation state LED light module, an interlock LED module, an alarm history LED module, and a history reset module integrated with the rotation detection sensor, A sensor unit for sensing the pulse signal detected by the sensor and displaying the state of the cooling fan through the rotation state LED module, the interlock LED module, and the alarm history LED module, and a signal for connecting the cooling fan and the sensor unit Cable.

In one embodiment, the rotation detecting sensor may include an optical sensor for sensing the pulse signal generated in the cooling fan.

In one embodiment, the rotation status LED module may control a plurality of rotation status LEDs that sequentially flash according to the period of the pulse signal sensed by the rotation detection sensor.

In one embodiment, the interlock LED module may turn on the interlock LED and transmit the interlock signal to the exterior when the function stoppage time of the cooling fan or the rotation detection sensor has elapsed for a predetermined time or more.

In one embodiment, the alarm history LED module may illuminate an alarm history LED when a function stop of the cooling fan or the rotation detection sensor and a pulse signal of the cooling fan suddenly change.

In one embodiment, when the cooling fan or the rotation detection sensor has a function stop, the alarm history LED is turned on, and when the function stop state has passed a predetermined time, the interlock LED is turned on and the operation of the external facility is stopped can do.

In one embodiment, the history reset module may reset the alarm history LED to turn off a temporary malfunction history when the history reset button is pressed.

Among the embodiments, the contact type exposure apparatus includes a sensor unit including a cooling fan, a rotation state LED (Light Emitting Diode) module, an interlock LED module, an alarm history LED module, and a history reset module integrated with a rotation detection sensor, And a signal cable connecting the fan and the sensor unit.

In one embodiment, the display unit may further include a display unit for sensing a pulse signal detected by the rotation detecting sensor through the sensor unit and displaying the state of the cooling fan.

In one embodiment, the cooling fan and the sensor unit are attached to an external facility, and the display unit can be attached to a separate location.

The display-type fan assembly device according to an embodiment of the present invention is attached to a semiconductor production facility where high heat is generated, so that it is possible to easily identify whether the cooling fan is operating normally or not, and prevents the equipment from being damaged due to sudden stoppage of the cooling fan So that the maintenance and repairing costs of the equipment can be reduced.

1 is a perspective view illustrating a display-type cooling fan assembling apparatus according to an embodiment of the present invention.
FIG. 2 is a perspective view illustrating the sensor unit shown in FIG. 1. FIG.
Fig. 3 is a view for explaining an effect of using the display-type cooling fan assembling apparatus shown in Fig.
FIG. 4 is a perspective view showing an example in which an impedance automatic matching device is installed in a display-type cooling fan assembling apparatus in FIG.
FIG. 5 is a perspective view illustrating another embodiment of the display-type cooling fan assembling apparatus of FIG. 1. FIG.

The description of the present invention is merely an example for structural or functional explanation, and the scope of the present invention should not be construed as being limited by the embodiments described in the text. That is, the embodiments are to be construed as being variously embodied and having various forms, so that the scope of the present invention should be understood to include equivalents capable of realizing technical ideas. Also, the purpose or effect of the present invention should not be construed as limiting the scope of the present invention, since it does not mean that a specific embodiment should include all or only such effect.

Meanwhile, the meaning of the terms described in the present application should be understood as follows.

The terms "first "," second ", and the like are intended to distinguish one element from another, and the scope of the right should not be limited by these terms. For example, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

It should be understood that the term " and / or " includes all possible combinations from one or more related items. For example, the meaning of " first item, second item and / or third item " may be presented from two or more of the first, second or third items as well as the first, second or third item It means a combination of all the items that can be.

It is to be understood that when an element is referred to as being "connected" to another element, it may be directly connected to the other element, but there may be other elements in between. On the other hand, when an element is referred to as being "directly connected" to another element, it should be understood that there are no other elements in between. On the other hand, other expressions that describe the relationship between components, such as "between" and "between" or "neighboring to" and "directly adjacent to" should be interpreted as well.

It should be understood that the singular " include "or" have "are to be construed as including a stated feature, number, step, operation, component, It is to be understood that the combination is intended to specify that it does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

In each step, the identification code (e.g., a, b, c, etc.) is used for convenience of explanation, the identification code does not describe the order of each step, Unless otherwise stated, it may occur differently from the stated order. That is, each step may occur in the same order as described, may be performed substantially concurrently, or may be performed in reverse order.

The present invention can be embodied as computer-readable code on a computer-readable recording medium, and the computer-readable recording medium includes all kinds of recording devices for storing data that can be read by a computer system . Examples of the computer-readable recording medium include a ROM, a RAM, a CD-ROM, a magnetic tape, a floppy disk, an optical data storage device, and the like, and also implemented in the form of a carrier wave (for example, transmission over the Internet) . In addition, the computer-readable recording medium may be distributed over network-connected computer systems so that computer readable codes can be stored and executed in a distributed manner.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise defined. Commonly used predefined terms should be interpreted to be consistent with the meanings in the context of the related art and can not be interpreted as having ideal or overly formal meaning unless explicitly defined in the present application.

1 is a perspective view illustrating a display-type fan assembly apparatus according to an embodiment of the present invention.

Referring to FIG. 1, a display-type fan assembly device 100 includes a cooling fan 110, a sensor unit 200, and a signal cable 120.

The cooling fan 110 includes a rotation detection sensor 111 integrated with a fan and a motor (not shown). The cooling fan 110 is installed on the side of the impedance automatic matching device 10 to suck outside air into the device The internal temperature is kept constant by circulating the hot air due to the heat inside the device.

Here, the impedance automatic matching apparatus 10 uses the high frequency generated in the RF (Radio Frequency) generator of the CVD process of the semiconductor, and automatically adjusts the impedance of the chamber so that high quality plasma can be generated in the chamber. .

The rotation detecting sensor 111 senses a pulse generated through the rotation of the fan at the center of the fan and transmits the signal to the sensor unit 200. More specifically, the rotation detecting sensor 111 senses the pulse signal of the fan through the optical sensor, and can transmit the pulse signal through the signal cable 120 connected to the sensor unit 200.

A motor (not shown) is connected to one end of the signal cable 120, and receives power from the sensor unit 200 to rotate the fan.

The sensor unit 200 includes a facility connection jack 201 connected to the impedance automatic matching apparatus 10 through a cable and a fan connection jack 202 connected to the cooling fan 110 through a signal cable 120 Respectively, and includes a plurality of LEDs and buttons on the front surface. Here, the sensor unit 200 receives power required for driving from the impedance automatic matching apparatus 10, and can transmit a signal sensed by a plurality of internal modules to the impedance automatic matching apparatus 10.

The signal cable 120 extends from the side of the cooling fan 110 and is connected to the sensor unit 200. More specifically, the signal cable 120 is composed of a plurality of electric wires, one end of which is connected to a motor (not shown) of the cooling fan 110, and the other end of which is connected to a plurality of electric wires, 200 and a fan connection jack formed on the lower side of the fan connection jack. The signal cable 120 applies power to the cooling fan 110 from the sensor unit 200 and transmits the pulse signal detected by the rotation detection sensor of the cooling fan 110 to the sensor unit 200.

As shown in FIG. 4, the display-type fan assembly 100 is installed on one side of the external impedance automatic matching device 10 and operates with power supplied thereto. When the cooling fan 110 rotates, And can radiate heat inside the apparatus by blowing.

2 is a perspective view illustrating the sensor unit of FIG. 1. FIG.

Referring to FIG. 2, the sensor unit 200 includes a plurality of rotation status LEDs 210, an interlock LED 220, an alarm history LED 230, and a history reset button 240.

The plurality of rotation status LEDs 210 are disposed in the longitudinal direction at a front surface of the sensor unit 200 and are controlled by a rotation status LED module configured inside the sensor unit 200.

The rotation status LED module senses the normal and abnormal rotation status of the fan through the pulse signal of the cooling fan 110 detected by the rotation detection sensor 111 and detects the rotation status of the plurality of rotation status LEDs 210). The rotation status LED module receives a pulse signal generated by the operation of the cooling fan 110 and receives the pulse signal from the rotation status LED 210-1 located at the uppermost end of the plurality of rotation status LEDs 210 to the lowermost And the rotating state LED 210-3 located thereon.

The rotation status LED module indicates that the cooling fan 110 is operating normally through the blinking of the plurality of rotation status LEDs 21 and may be realized through a plurality of chips in the sensor unit 200.

The interlock LED 220 is disposed on the lower side of the plurality of rotation state LEDs 210 on the front surface of the sensor unit 200 and is controlled by the interlock LED module configured in the sensor unit 200.

The interlock LED module detects whether the function stoppage time of the cooling fan 110 or the rotation detection sensor has elapsed for a specific time (for example, 5 seconds or more), and when the predetermined time has elapsed, the interlock LED module 220 is turned on And generates an interlock signal to be transmitted to the external impedance automatic matching apparatus 10 through the equipment connection jack 201 of the sensor unit 200. The interlock LED module may be implemented through a plurality of chips in the sensor unit 200.

Here, the interlock signal is transmitted to the impedance automatic matching device 10 to stop the operation of the device in an emergency, so that the internal components can be prevented from being damaged due to the non-operation of the cooling fan 110.

The alarm history LED 230 is disposed below the interlock LED 220 at the front of the sensor unit 200 and is controlled by an alarm history LED module configured inside the sensor unit 200.

The alarm history LED module is implemented through a plurality of chips inside the sensor unit 200 and is used for stopping the temporary function of the cooling fan 110 or the rotation detection sensor and for rapidly changing the pulse signal of the cooling fan 110 A change in the period of the pulse signal) to turn on the alarm history LED 230.

The alarm history LED module continuously lights up the alarm history LED 230 until a light signal is transmitted from the history reset module, and displays that the cooling fan 110 or the rotation detection sensor has previously experienced a temporary malfunction . Accordingly, the alarm history LED module can recognize and prevent a trouble that may occur in the cooling fan 110 or the rotation detection sensor in advance.

The history reset button 240 is disposed below the alarm history LED 210 on the front surface of the sensor unit 200 and controls a history reset module implemented as a chip inside the sensor unit 200.

The history reset module generates a signal to turn off the lit alarm history LED 230 due to a temporary failure when a certain pressure is applied to the history reset button 240 and the button is pressed.

Accordingly, the sensor unit 200 displays the normal operation of the cooling fan 110 and the rotation detection sensor through the rotation LED module, and there is a malfunction of the cooling fan 110 and the rotation detection sensor through the alarm history LED module Lt; / RTI > In addition, the sensor unit 200 may stop the device in an emergency to prevent damage to the impedance matching device 10 when the cooling fan 110 and the rotation detection sensor continue to malfunction for a predetermined time or more through the interlock LED module And it is possible to continuously check the malfunction of the cooling fan 110 and the rotation detection sensor through the history reset module.

As shown in FIG. 3A, the display-type fan assembly 100 can generate a stable and stable pulse signal as shown in FIG. 3B by compensating for the problem of generating a short, narrow, and unstable pulse signal. Accordingly, malfunction of the sensor unit 200 can be prevented.

FIG. 5 is a perspective view illustrating another embodiment of the display-type cooling fan assembling apparatus of FIG. 1. FIG.

5, a display-type cooling fan assembly 100 includes a cooling fan 510, a sensor unit 520, a signal cable 530, and a display unit 540. Here, since the cooling fan 510, the sensor unit 520, and the signal cable 530 are implemented with the same functions and configurations as those of the embodiment of FIG. 1, detailed description thereof will be omitted.

The display unit 540 includes a plurality of rotation status LEDs 521, an interlock LED 522, an alarm history LED 523, and a history reset button 524 formed on the surface of the sensor unit 520, . The display unit 540 receives the control signals (for example, flashing or on / off signals) of the respective LEDs from the sensor unit 520 through short-range wireless communication, and can blink or light the corresponding LEDs.

The display unit 540 may be installed in an external space other than the space where the impedance automatic matching apparatus 10 is installed, so that the display type cooling fan assembly 100 may be easily and quickly detected.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the present invention as defined by the following claims It can be understood that

10: Automatic impedance matching device
100: Display-type fan assembly device
110, 510: Cooling fan
120, 530: Signal cable
200, 520:
210: Multiple rotation status LED
220: Interlock LED
230: Alarm history LED
240: History reset button
540:

Claims (3)

A cooling fan that integrates the rotation detection sensor and is installed on a side of the impedance automatic matching device and sucks outside air into the inside;
A light emitting diode (LED) module, an interlock LED module, an alarm history LED module, and a history reset module, which are supplied with power from the impedance matching device, A rotation state LED module for sequentially repeating a plurality of rotation state LEDs according to a cycle of the pulse signal, and a controller for controlling the rotation state of the LED module based on the period of the pulse signal when the function stop time of the cooling fan exceeds a predetermined time The interlock LED module generating an interlock signal transmitted to the impedance automatic matching device and lighting an interlock LED disposed at a lower end of the plurality of rotation status LEDs, a temporary stop of the cooling fan, And before the light-off signal is transmitted from the history reset module A history reset module for generating a signal for turning off the alarm history LED module and the illuminated alarm history LED that continuously illuminates the alarm history LED disposed at the lower end of the interlock LED and resetting the temporary malfunction history, A sensor unit for displaying a state of the sensor; And
And a signal cable connecting one end of the cooling fan to the motor of the cooling fan and the other end of the signal cable connected to a fan connection jack formed on the lower side of the sensor unit to connect the cooling fan and the sensor unit. delete delete

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