KR101537451B1 - COF semiconductor package and method for manufacturing thereof - Google Patents

COF semiconductor package and method for manufacturing thereof Download PDF

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Publication number
KR101537451B1
KR101537451B1 KR1020130142046A KR20130142046A KR101537451B1 KR 101537451 B1 KR101537451 B1 KR 101537451B1 KR 1020130142046 A KR1020130142046 A KR 1020130142046A KR 20130142046 A KR20130142046 A KR 20130142046A KR 101537451 B1 KR101537451 B1 KR 101537451B1
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South Korea
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semiconductor element
resin
chamber
heat
semiconductor
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KR1020130142046A
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Korean (ko)
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KR20150058811A (en
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김준일
김성진
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주식회사 동부하이텍
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Priority to KR1020130142046A priority Critical patent/KR101537451B1/en
Priority to PCT/KR2014/001239 priority patent/WO2015076457A1/en
Priority to CN201480002926.2A priority patent/CN104823276A/en
Priority to US14/370,391 priority patent/US9406583B2/en
Priority to TW103106293A priority patent/TWI541955B/en
Publication of KR20150058811A publication Critical patent/KR20150058811A/en
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  • Nonlinear Science (AREA)
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  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
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  • Crystallography & Structural Chemistry (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
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  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

A cuef type semiconductor package according to a first embodiment of the present invention comprises a base film made of a flexible film; An electrode pattern formed on the base film; A semiconductor element electrically connected to the electrode pattern and mounted on a COF; A passivation layer formed on the electrode pattern and made of an insulating material; An underfill filled in a space between the semiconductor element and the passivation layer; And a heat dissipation layer formed on the semiconductor element, the underfill and the passivation layer, and performing heat dissipation of heat generated from the semiconductor element.
The proposed SiFe-type semiconductor package has an advantage of effectively dissipating heat generated from a semiconductor device to the outside.

Figure R1020130142046

Description

TECHNICAL FIELD [0001] The present invention relates to a semiconductor package and a manufacturing method thereof,

TECHNICAL FIELD The present invention relates to a COF-type semiconductor package, and more particularly, to a technical idea capable of effectively reducing the heat generation of a CIE-type semiconductor package manufactured on a flexible PCB.

A general liquid crystal display device is an apparatus that displays an image by adjusting the light transmittance of a liquid crystal using an electric field. For such image display, the liquid crystal display device includes a liquid crystal panel in which liquid crystal cells are arranged in a matrix form, and a driving circuit for driving the liquid crystal panel. Such a liquid crystal display device can be downsized as compared with a cathode ray tube, and is widely used as a display device for a portable television or a laptop-type personal computer.

A data driver and a gate driver are required to drive a liquid crystal panel of a liquid crystal display device, and such a data driver and a gate driver are integrated into a plurality of integrated circuits (ICs). Each of the integrated data driving IC and the gate driving IC is mounted on a tape carrier package (TCP), connected to a liquid crystal panel by a TAB (Tape Automated Bonding) method, or by a COG (Chip On Glass) And mounted on the liquid crystal panel.

Particularly, in the present situation in which a high-resolution display device is required and a highly integrated IC for cost reduction is required, the problem of heat generation of an integrated circuit, which is indispensable for a display device, is becoming more serious. This heating problem affects the stability of the circuit as well as the heat resistance temperature of the soft base film. In recent FHD and ultra high resolution display devices of UHD TV, due to the heat generation problem of the integrated circuit, the frame forming the appearance of the TV must also consider the heat resistance.

If the heat generated in the integrated circuit can sufficiently dissipate, the problem of design and material of various display devices in which the integrated circuit is used will be more easily solved.

The present invention proposes a solution to the above-mentioned present technical problem, and in particular, as a semiconductor element used for a liquid crystal panel or a printed board, a COF (Chip On Film) semiconductor having a structure in which a semiconductor element is mounted on a flexible film We propose the heating structure of the device package.

In addition, a structure capable of not only fixing the position of a semiconductor element but also easily protecting a semiconductor element from the outside by coating or vapor-depositing a heat-generating paint on a semiconductor element formed on a flexible film is proposed.

A cuef type semiconductor package according to a first embodiment of the present invention comprises a base film made of a flexible film; An electrode pattern formed on the base film; A semiconductor element electrically connected to the electrode pattern and mounted on a COF; A passivation layer formed on the electrode pattern and made of an insulating material; An underfill filled in a space between the semiconductor element and the passivation layer; And a heat dissipation layer formed on the semiconductor element, the underfill and the passivation layer, and performing heat dissipation of heat generated from the semiconductor element.

In addition, the cuef type semiconductor package of another embodiment includes a base film made of a flexible film; An electrode pattern formed on a first surface of the base film; A semiconductor element electrically connected to the electrode pattern and mounted on a COF; A passivation layer formed on the electrode pattern and made of an insulating material; An underfill filled in a space between the semiconductor element and the passivation layer; And a heat dissipation layer formed on a second surface of the base film and performing heat dissipation of heat generated from the semiconductor device, wherein the underfill and the heat dissipation layer are made of the same material.

The proposed CIE-type semiconductor package can effectively dissipate the heat generated from the semiconductor device to the outside, and this can cause a change in the material of the bezel or the chassis that forms the appearance of the liquid crystal panel in an ultra-high resolution TV or monitor . For example, in the case of an ultra-high resolution TV, in order to realize a slimmer design, the bezel and the chassis portion must be reduced. In order to withstand the high heat generated in the IC, a material such as aluminum is used. However, When the heat of the IC can be reduced, the bezel and the chassis of the TV can be formed of plastic material, which can reduce the weight of the product and reduce the production cost.

Particularly, since the heat radiating paint of the embodiment is formed so as to be in close contact with the passivation layer and the underfill including the semiconductor element, the heat radiating effect can be remarkably improved as compared with the existing heat radiating structure by taping. Considering the principle of heat dissipation by conduction, it is understood that the heat dissipation efficiency is further improved because the passivation layer including the semiconductor element and the structure closely adhered to the underfill.

FIG. 1 is a view for explaining a method of manufacturing a ceef-type semiconductor package according to the present embodiment.
2 is a view for explaining a method of applying a resin to a side surface of a semiconductor element by means of a potting facility of this embodiment.
3 is a view for explaining a configuration of a coating apparatus provided in the coating chamber of the present embodiment.
4 is a view for explaining a material constituting the heat radiation paint of this embodiment.
5 is a diagram for explaining a configuration of a ceef-type semiconductor package according to the present embodiment.
6 is a view showing the case where the application chamber for applying the heat radiation paint on the semiconductor element in this embodiment is arranged as a subsequent step after the curing chamber.
FIG. 7 is a view showing a configuration of a ceef-type semiconductor package according to another embodiment of the present invention.

Hereinafter, the present embodiment will be described in detail with reference to the accompanying drawings. It should be understood, however, that the scope of the inventive concept of the present embodiment can be determined from the matters disclosed in the present embodiment, and the spirit of the present invention possessed by the present embodiment is not limited to the embodiments in which addition, Variations.

FIG. 1 is a view for explaining a method of manufacturing a ceef-type semiconductor package according to the present embodiment.

In this embodiment, a semiconductor package is manufactured in such a manner that a circuit protection resin is applied in a Reel to Reel method after a semiconductor element is formed on a plastic flexible film, and a heat radiation paint for heat radiation of the semiconductor package is applied. As shown in FIG. 1, after the resin for circuit protection is applied, the heat radiation paint is applied, and then the curing process can be carried out. However, after the circuit protection resin is applied, It is also possible to apply the heat-radiating paint after the curing is completed.

1, a pre-reel 110 in which a flexible film 1 on which a semiconductor element is formed is wound is housed in a pre-chamber 100, and a flexible film 1 wound on the pre- (1) is transferred to the adjacent potting chamber (200) by the at least one auxiliary reel (120). Here, the flexible film 1 is described as being wound on the pre-reel 110, but the flexible film 1 herein has a flexible base film 610 and an electrode pattern (not shown) formed on the base film 610 A passivation layer 630 formed on the electrode pattern 620 and made of an insulating material and a bonding chip 641 connected to the electrode pattern 620; Semiconductor device 640 (see FIG. 5).

5, an underfill 650 is formed by applying a resin for circuit protection while passing through a potting chamber 200 in a state where a semiconductor element 640 is formed on a bonding chip 641, The insulation of the electrode pattern 620 made of a conductor (e.g., a conductive material such as copper or aluminum) and the primary protection of the semiconductor element 640 are performed. The heat dissipation layer 660 is formed by applying a heat dissipation paint on the semiconductor element 640, the underfill 650, and the passivation layer 630 while passing through the application chamber 300 in a state in which the circuit protection resin is coated. do. In the embodiment, the heat radiating paint is applied on a flexible film. However, the underfill and the heat radiating layer to be formed on the flexible film may be formed by vapor-depositing a heat radiating coating.

Referring again to FIG. 1, the flexible film 1 provided from the prechamber 100 is transferred to a potting chamber 200 for applying a circuit protection resin. In the potting chamber 200, the resin for circuit protection by the potting unit 210 is coated on four sides of the semiconductor element. For reference, the semiconductor package 10 in the potting chamber 200 and the application chamber 300 of FIG. 1 is composed of the first to fourth semiconductor packages 11, 12, 13 and 14, In practice, semiconductor packages are arranged on the flexible film 1 with a predetermined gap therebetween.

As shown in FIG. 2, the potting chamber 210 is provided with a potting device 210 for applying a resin for circuit protection to a side surface of the semiconductor device. The potting device 210 is movable in at least two axial directions . For example, the potting device 210 can be configured to be movable in the x-axis and y-axis directions. In this case, it is possible to apply resin to the four sides of the rectangular semiconductor device 650. Since the distance between the semiconductor device 650 and the potting device 210 can be adjusted when the potting device 210 can move in the z axis direction in the figure, It is also possible to adjust the amount of resin that falls.

As the resin for circuit protection to be filled in the potting unit 210, the same material as that of the heat radiating coating material described later may be used. In this case, the heat radiating coating material may be a material for improving adhesion with other members, .

The material of the circuit protection resin to be filled in the potter 210 is replaced with a description of the heat radiation paint.

Resin application is performed to the side surfaces of the semiconductor element 650 by at least one or more potting units 210 in the potting chamber 200 so that the underfill 650 in FIG. 5 is formed. It is necessary to design the position of the potentiometer 210 so that the underfill 650 can be filled in the space between the side of the semiconductor device 650 and the electrode pattern 620.

After the flexible film 1 is coated with the circuit protection resin in the potting chamber 200, the flexible film 1 is transferred to the application chamber 300 for applying the heat radiation paint on the semiconductor element 650 do.

In the application chamber 300, the heat radiation paint is sprayed toward the semiconductor element through at least one injection nozzle, and the number of the injection nozzles is determined by the size of the application chamber 300 and the size of the semiconductor elements And may be variously changed depending on the number.

The configuration of the application device 310 provided in the application chamber 300 will be described with reference to FIG.

3, the coating device 310 includes at least one or more spray nozzles 310 for spraying the heat dissipating paint toward the semiconductor device in a spraying manner, and the upper surface of the semiconductor device is photographed in the spray nozzle 310 A CCD camera 320 may be provided. The operator or the computer can control the amount or speed of the heat radiation paint sprayed through the injection nozzle 310 while checking the coating state of the heat radiation paint observed through the camera 320. [

The injection nozzle 310 is provided with an injection hole 311 for determining the injection direction and the injection angle of the heat radiation paint.

The applicator 310 may further include a driving unit 340 for rotating or moving the nozzle support frame 330 that supports the injection nozzle 310. The driving unit 340 may include a nozzle support frame 330, (Forward and backward movement in the drawing) and movement in the z-axis direction (upward and downward movement in the drawing) in the y-axis direction. When the nozzle support frame 330 and the injection nozzle 310 are moved in the y axis direction (or the x axis direction) according to the operation of the driving unit 340, the heat radiating paint sprayed through the injection hole 111 is transferred to the semiconductor element 650) and the underfill 650, as shown in FIG.

Although the heat radiating paint is applied on a flexible film as an example, the heat radiating paint proposed in the present invention can be deposited on a flexible film to form an underfill or a heat radiation layer.

The heat radiating paint sprayed around the semiconductor element 650 of the flexible film 1 in the coating chamber 300 will be described in detail. As described above, the heat radiating coating material may be the same material as the circuit protecting resin applied to the side surface of the semiconductor element in the potting chamber 200.

Fig. 4 is an enlarged view of the heat radiation paint of this embodiment. 4, the heat radiation paint 20 of the embodiment includes a heat radiation material 21 made of fine particles and an adhesive material 22 containing the heat radiation material 21 and improving the adhesiveness of the heat radiation paint do. Further, it may further include a dyeing material that determines the color of the heat dissipating paint 20. For example, when a graphite dye material is further added in addition to the heat radiation material 21 and the adhesive material 22, the heat radiation layer formed in the semiconductor package may be formed in a black color. 1 and 3 do not show the path for supplying the heat radiating paint 20 to the injection nozzle 310. The heat radiating paint 20 may include a first tank And a second tank in which the adhesive material 22 is stored, a bath for mixing the substances contained in the first tank and the second tank, and a pipe for connecting the bath and the spray nozzle 310 .

The heat dissipation material 21 may be aluminum oxide (Al 2 O 3 ), and the adhesive material 22 may be made of a resin composition containing an epoxy resin and an imidazole, or may be an epoxy resin, an amine, , ≪ / RTI >

Here, the aluminum oxide may be contained in the range of 80 to 90% by weight, the resin composition may be contained in the range of 1 to 10% by weight, and further, a dyeing material, a hardener and the like may be further added. When the ratio of the aluminum oxide is less than the suggested range, the heat dissipating effect is deteriorated. If the ratio exceeds the suggested range, the adhesive force on the semiconductor element can be weakened. When the particles of the aluminum oxide are connected to each other, a heat dissipation route is formed as shown in the drawing, and heat generated in the semiconductor device can easily dissipate to the outside along the heat dissipation route.

The flexible film 1 after the heat radiation paint 20 is applied on the semiconductor element 650, the underfill 650 and the passivation layer 630 is transferred to the curing chamber 400 and the curing chamber 400, the curing of the heat radiation paint is performed.

Since the plurality of guide reels 410 and 420 are disposed in the curing chamber 400, the time during which the flexible film 1 stays in the curing chamber 400 can be controlled. The curing in the curing chamber 400 may be thermal curing, UV curing, room temperature curing, and may be performed using a UV light source and a thermosetting oven.

A guide reel for determining the conveying direction of the flexible film 1 in the curing chamber 400 is illustrated as a first guide reel 410 and a second guide reel 420. However, .

The flexible film 1 cured in the curing chamber 400 is transferred to the recovery chamber 500 and the flexible film 1 is wound on the recovery reel 510 provided in the recovery chamber 500. The recovery chamber 500 may further include at least one auxiliary reel 520 for transferring the flexible film 1 to the recovery reel 510.

The flexible film 1 wound on the recovery reel 510 through the above-described process has a structure as shown in FIG. 5, and the structure of the semiconductor package shown in FIG. 5 will be summarized as follows.

The semiconductor package 640 of the embodiment includes an electrode pattern 620 formed on a flexible base material film 610 and a semiconductor element 640 mounted on the electrode pattern 620 with a bonding chip 641 interposed therebetween. A passivation layer 630 formed on the electrode pattern 620 and an underfill 650 filled in a space between the semiconductor element 640 and the electrode pattern 620, And a heat dissipation layer 660 extending from the underfill layer 650 to the passivation layer 630.

The CIE-type semiconductor package having such a structure is used as a driver IC for a liquid crystal panel, and the underfill 650 and the heat dissipation layer 660 can effectively dissipate heat generated in a high-resolution TV and a monitor.

6 is a view showing the case where the application chamber for applying the heat radiation paint on the semiconductor element in this embodiment is arranged as a subsequent step after the curing chamber.

In Fig. 1, an embodiment has been described in which a resin for circuit protection is applied in a potting chamber, a heat radiation paint is applied in a coating chamber, and then a curing process in a curing chamber is performed. 6, the flexible film 1 provided from the prechamber 100 passes through the potting chamber 200 and then is transferred to the curing chamber 400. Thereafter, the coating film 1 is applied to the coating chamber 200 for applying the heat- (300).

As described above, according to the modification of the embodiment, it is also possible that the underfill is formed in the semiconductor package by applying the resin for circuit protection and the curing process is performed before the heat radiation paint is applied.

FIG. 7 is a view showing a configuration of a ceef-type semiconductor package according to another embodiment of the present invention.

7, a cuef-type semiconductor package according to another embodiment includes an electrode pattern 720 on a first surface of a flexible base material film 710 and a bonding chip 741 on the electrode pattern 720 A passivation layer 730 formed on the electrode pattern 720 and an underfill 750 filled in a space between the semiconductor element 740 and the electrode pattern 720 A heat dissipation layer 760 for dissipating heat generated from the semiconductor device 740 is formed on the second surface of the base film 710 to a predetermined thickness.

The heat generated in the semiconductor device 740 may be generated upward or transferred to the electrode pattern 710 and the base film 710 through the bonding chip 741. The heat may be transferred to the heat dissipation layer 760, It is possible to easily radiate heat to the outside. The materials constituting the heat dissipation layer 760 are the same as those described with reference to the drawing shown in FIG.

The SiFe-type semiconductor package having such a structure can effectively dissipate the heat generated from the semiconductor device to the outside, and this can cause a change in the material of the bezel or the chassis that forms the appearance of the liquid crystal panel in an ultra-high resolution TV or monitor . For example, in the case of an ultra-high resolution TV, in order to realize a slimmer design, the bezel and the chassis portion must be reduced. In order to withstand the high heat generated in the IC, a material such as aluminum is used. However, When the heat of the IC can be reduced, the bezel and the chassis of the TV can be formed of plastic material, which can reduce the weight of the product and reduce the production cost.

Claims (10)

delete delete delete delete delete delete delete CLAIMS 1. A method of manufacturing a semiconductor package comprising a semiconductor device mounted on a CIE-
The transfer of the semiconductor device is started by the operation of the reel in a state where the semiconductor device is wound on a reel while the semiconductor device is formed on a base film made of a flexible film;
The semiconductor element is transferred to a potting chamber provided with a potting agent filled with a circuit protecting resin and the application of the resin to the side surface region of the semiconductor element is performed by the potting machine;
Wherein the resin-coated semiconductor element is transferred to an application chamber provided with an injection nozzle, and a heat radiation paint sprayed from the injection nozzle is applied to the entire area of the upper surface of the semiconductor element;
The semiconductor element to which the heat dissipation coating is applied is transferred to a hardening chamber that performs thermal hardening, and hardening is performed in the hardening chamber for a predetermined time; And
Wherein the cured semiconductor element is transferred to a recovery chamber provided with a recovery reel and the flexible film on which the semiconductor element is formed is wound on the recovery reel.
9. The method of claim 8,
Wherein the circuit protection resin and the heat radiation paint are made of the same material.
10. The method of claim 9,
Wherein the heat radiation paint comprises aluminum oxide and an epoxy resin.
KR1020130142046A 2013-11-21 2013-11-21 COF semiconductor package and method for manufacturing thereof KR101537451B1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020130142046A KR101537451B1 (en) 2013-11-21 2013-11-21 COF semiconductor package and method for manufacturing thereof
PCT/KR2014/001239 WO2015076457A1 (en) 2013-11-21 2014-02-14 Cof-type semiconductor package and method of manufacturing same
CN201480002926.2A CN104823276A (en) 2013-11-21 2014-02-14 Cof-type semiconductor package and method of manufacturing same
US14/370,391 US9406583B2 (en) 2013-11-21 2014-02-14 COF type semiconductor package and method of manufacturing the same
TW103106293A TWI541955B (en) 2013-11-21 2014-02-25 COF semiconductor package and method for manufacturing thereof

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KR1020130142046A KR101537451B1 (en) 2013-11-21 2013-11-21 COF semiconductor package and method for manufacturing thereof

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KR1020150031439A Division KR20150059139A (en) 2015-03-06 2015-03-06 Cof semiconductor package and method for manufacturing thereof

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Publication number Priority date Publication date Assignee Title
KR20180064583A (en) 2016-12-05 2018-06-15 삼성디스플레이 주식회사 Chip on film package and display device including the same
CN114721188A (en) * 2022-03-29 2022-07-08 颀中科技(苏州)有限公司 Forming method of flip chip packaging structure, flip chip packaging structure and display device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004119650A (en) * 2002-09-26 2004-04-15 Nec Kansai Ltd Semiconductor device
KR20100135161A (en) * 2009-06-16 2010-12-24 주식회사 동부하이텍 Heat releasing semiconductor package, method for manufacturing the same and display apparatus including the same
KR20110068867A (en) * 2009-12-15 2011-06-22 신에쓰 가가꾸 고교 가부시끼가이샤 Resin composition for encapsulating optical semiconductor element and optical semiconductor device
KR20120040414A (en) * 2010-10-19 2012-04-27 엘지이노텍 주식회사 Chip on flim package and fabricating method of the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004119650A (en) * 2002-09-26 2004-04-15 Nec Kansai Ltd Semiconductor device
KR20100135161A (en) * 2009-06-16 2010-12-24 주식회사 동부하이텍 Heat releasing semiconductor package, method for manufacturing the same and display apparatus including the same
KR20110068867A (en) * 2009-12-15 2011-06-22 신에쓰 가가꾸 고교 가부시끼가이샤 Resin composition for encapsulating optical semiconductor element and optical semiconductor device
KR20120040414A (en) * 2010-10-19 2012-04-27 엘지이노텍 주식회사 Chip on flim package and fabricating method of the same

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