KR101491438B1 - Joint bellows for semiconductor Making Facilities - Google Patents

Abstract

The present invention relates to joint bellows. The technical point of the present invention, in industrial facilities which include manufacturing facilities of semiconductor, LCD, solar cells, etc., required for chemical vapor deposition (CVD), relates to double pipe type joint bellows installed to a connector in the middle of a pump and a pipe line (vacuum line). The double pipe type joint bellows comprise multi joints consisting of joint rings. The pipe line of the multi joints is bent according to an angle set based on an axis direction, or an axis line can be changed. Thereby, the double pipe type joint bellows can prevent deposit generated from an exhaust gas (DSC gas) in a process from being hardened. The present invention greatly reduces a pipe repairing process, improves facilities operation efficiency, saves subsidiary processes such as post maintenance, and improves business profit.

Description

[0001] Joint bellows [0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing method of a semiconductor device, a method of manufacturing the same, a method of manufacturing the same, Wherein the plurality of articulated rings form a series of articulated tubes, wherein the articulated tubes are bent according to a set angle with respect to the axial direction, and the articulated bellows (DCS gas) is not hardened and accumulated inside the piping. This is because the piping maintenance work is remarkably reduced to greatly improve the facility operation rate, A joint bellows which is characterized in that the auxiliary work such as post-maintenance is reduced and the profit of the enterprise is greatly improved .

Therefore, the present invention is characterized in that a precise centering operation (assembling) is easily performed even when the vertical axis degree is bad when the piping is disconnected from the piping and the vacuum degree is secured.

Further, the present invention provides a double pipe structure in which an inner joint pipe and an outer flexible pipe (corrugated pipe) are formed so as to integrate both flanges so as to greatly improve airtightness due to gas leakage, And the socket ring of the multi-joint tube can be formed with a holder so that the overall length of the coupler can be slightly increased or decreased, thereby improving the workability at the time of field fitting.

In addition, the present invention is characterized by minimizing the generation of deposits generated from the exhaust gas and the occurrence of contamination and corrosion inside the pipe by applying a spray coating on the inner surface of the articulated pipe as an alternative embodiment.

Generally, a chemical vapor deposition (CVD) process is a process in which a reaction gas injected into a main chamber causes a chemical reaction on a heated substrate to form a thin film. The CVD equipment of the semiconductor equipment is DCS gas, NH3 ) And CL (chlorine) are formed as a main component, and are formed as thin films of various insulating films, metal thin films, and organic thin films.

Therefore, a conventional chemical vapor deposition process is performed through a low-pressure chemical vapor deposition apparatus, a dry etching apparatus, a plasma chemical vapor deposition apparatus, and the like. These apparatuses have a separate passage A corrugated pipe is formed and removed.

In other words, the DCS gas generated in the chemical vapor deposition process usually becomes solid when it is liquefied and becomes solid when it is below 8.4 ° C, and this hardening phenomenon starts to accumulate in the valley formed inside the corrugated tube, Lt; / RTI >

To explain this in more detail, the semiconductor manufacturing facility is used as a reference. By-product (DCS gas, etc.) generated after the wafer is processed is vacuum exhausted through the exhaust pipe in the process chamber, passed through the corrugated pipe, And is exhausted to the secondary byproduct treatment device through the scrubber which is the primary byproduct treatment device.

At this time, in the corrugated tube between the process chamber and the vacuum pump (or among the exhaust channels), some of the byproducts generated in the process chamber accumulate in the internal valleys.

At this time, accumulated by-products (DCS gas, etc.) are initially in the form of gas, but liquefied when the temperature is below a certain temperature, and then accumulated as sediments after curing. As time goes by, these deposits grow like septic tiles, Causing a problem that the abnormal operation can not be continued.

Therefore, the accumulated by-products periodically interrupts the process and requires cleaning by cleaning, thereby reducing the efficiency of the equipment itself.

However, in the conventional corrugated pipe, it is difficult for the operator to confirm the accumulation of by-products in the pipe until the pipe is clogged, and there is a problem that the joining and separating operation is troublesome and takes a long time, There are disadvantages.

In addition, there is a risk that the conventional corrugated tube may cause burning or fire when heat is generated due to the internal clogging. In particular, when the corrugated pipe is coupled between the disconnected pipe and the pipe, if the vertical degree in the axial direction is poor, There is no method for solving the problem such as the occurrence of a vacuum or the occurrence of a vacuum.

Recently, several improvements have been made to solve the above-mentioned conventional problems, and various prior arts can be seen.

PRIOR ART 1-Disclosed Patent Publication No. 10-2000-0026751 (published May 15, 2000)

As shown in Table 1, in the prior art 1, a straight tube type tube 20 is inserted to prevent the powder from accumulating inside the corrugated tube 12, but the tube 20 is inserted into the first flange 14, While the second flange 16 is separated from the second flange 16 so that the powder being conveyed is prevented from accumulating on the inner corrugation of the corrugated container.

However, in the prior art 1, when the first flange 14 is coupled to one end of the disconnected pipe and the second flange 16 is coupled to the other of the pipe, when the verticality (axis) 20) will be inclined in the axial direction.

This is because the powder transferred from the tube 20 can not be completely introduced into the inner hole of the second flange 16 and is accumulated on the side of the second flange 16, .

Prior Art 2 - Registration Patent Publication No. 10-1397087 (Registered on May 13, 2014)

As shown in Table 2, the prior art 2 is characterized in that the second corrugated tube 20 of synthetic resin is combined with the first corrugated tube 10 of metallic material to minimize the settling of by-products by lowering the curvature of the corrugated corrugation Is to do.

However, in this prior art 2, there is still a V-shaped valley in the second corrugated tube 20, which causes sedimentation of by-products (especially when the distance is narrowed to shorten the installation length due to wrinkles, The first and second corrugated pipes made of different materials are not completely fused to each other and are vulnerable to airtightness, , There is a disadvantage that it is structurally unstable such as pushing back the second corrugated tube on the inner side when assembling it directly into the piping.

Prior Art 3 - Registration Patent Publication No. 10-0506935 (registered July 30, 2005)

As shown in Table 3 above, Prior Art 3 is to dissolve the by-products formed in the inner bellows by the hot wire 214.

However, since the technical structure of the prior art 3 has an unreasonable necessity of establishing an electrical safety book and it must be heated by periodic setting, it is not a fundamental measure to prevent the precipitation of by-products, Rise, handling, and management supervision. This means that productivity, productivity and feasibility are very poor.

Prior Art 4-Open Patent Publication No. 10-2009-0060019 (Published on Jun. 11, 2009)

As shown in Table 4, the technical problem 4 is that the insert tube 200 is formed inside the corrugated pipe 100 to prevent the by-products from being precipitated.

However, according to the prior art 4, if the perpendicularity of the connection end is not matched during installation in the disconnected piping line, the insertion pipe 200 can not be used without deformation and the length can be varied depending on the installation site There is. This, in the end, is vulnerable to confidentiality and has the drawback that it is very difficult for workers to work.

In other words, the above-mentioned improvement inventions also suffer from problems such as clogging by deposits, inability to precisely assemble, and deterioration of workability, and the expected effect of the prototype is low and the feasibility is lowered. In fact.

Open Patent Publication No. 10-2000-0026751 (published May 15, 2000) Patent Registration No. 10-1397087 (registered on May 13, 2014) Patent Registration No. 10-0506935 (registered July 30, 2005) Open Patent Publication No. 10-2009-0060019 (published on Jun. 11, 2009)

In order to solve the above-described problems, the present invention is to provide a double-pipe system in which a chemical vapor deposition (CVD) process is required in a variety of industrial facilities, and is installed as a connection body between a pump (PUMP) In the joint bellows, the bellows of the double-pipe type joint bellows includes a plurality of joint rings to form a series of articulated tubes, wherein the artillery tube may be bent according to a predetermined angle with respect to the axial direction, So that deposits generated from the exhaust gas (DCS gas) during the process are not hardened and accumulated in the piping, which is formed to remarkably reduce piping maintenance work and greatly improve the facility operation rate. The present invention is directed to a joint bellows which is characterized in that the workload is reduced and the profit of the enterprise is greatly improved.

Accordingly, it is an object of the present invention to provide a high degree of vacuum degree, which is formed so as to facilitate precise centering work (assembly) even when the degree of vertical axis is poor when the piping is disconnected.

Further, the present invention provides a double pipe structure in which an inner joint pipe and an outer flexible pipe (corrugated pipe) are formed so as to integrate both flanges so as to greatly improve airtightness due to gas leakage, And the socket ring of the multi-joint tube is formed with a holder so that the overall length of the coupler can be slightly increased or decreased, thereby improving the workability in the field fitting.

In addition, the present invention is an optional embodiment of the present invention to provide spray coating on the inner surface of a multi-joint tube, thereby minimizing the generation of deposits generated from the exhaust gas and the occurrence of contamination and corrosion inside the pipe .

In order to achieve the above object, the joint bellows of the present invention is characterized in that a unitary joint ring 110 is connected in a plurality of axial directions to form a series of channels along the longitudinal direction, The arc-shaped first sphere back surface 111 and the second sphere back surface 112 (having a curved surface of different sizes along the circumference set on the basis of the center points C-1 and C-2 on the one side and the other side of the outer circumferential surface, C-1, C-1, and C-2 are inserted into the inner circumferential edge of the first sphere back surface 111 when the arc-shaped insertion surface 113 is formed by a circumference and the second sphere back surface 112 is correspondingly inserted. 2, the socket ring 120 is formed such that the circumferential rotation and the axial angle of the joint ring 110 are variable, and the assembling socket ring 120 is formed on the opposite sides of both ends of the joint rings 110, Is a hollow body corresponding to the joint ring 110, and has a first sphere rear surface 11 The third sphere back surface 121 or the fourth sphere back surface 122 is formed to correspond to the first sphere back surface 121 or the second sphere back surface 112 and the third sphere back surface 121 or the fourth sphere back surface 122, An articulated pipe (100) for forming a fastening extension (124) having a locking protrusion (123) at one end of the joint; A connection end 210 is formed on a surface corresponding to the extension 124 of the socket ring 120. A connection hole 221 and a coupling protrusion 222 are formed on the connection end 210 And a slip holder 220 for providing a length adjusting section 223 is formed so that a locking protrusion 123 of a fastening extension portion is fitted. On the other side opposite to the joining end 210, And a discharge hole 240 is formed at the center of the body so as to penetrate the joint end 210 and the joint end 230 so as to be coupled to the articulated pipe 100. [ A flange (200) for communicating with the extension (124) An opening 310 is formed at both ends in the longitudinal direction so as to correspond to the outer periphery of the joining end 210 of the flange and a space 320 is formed in the inside of the joining end 210, A flexible tube 300 is formed on the outer circumferential line in the axial direction to form a wrinkle 330 so as to be flexible in a free direction while being flexible; .

In the articulated pipe 100, the curved surface section L-1 of the first spherical surface 111 is formed to be shorter than the curved surface section L-2 of the second spherical surface 112, The angle adjustment and the centering change are facilitated within the rotation section G generated when the back surface 112 is fitted to the insertion surface 113 of the first sphere back surface 111. [

At this time, it is preferable that the articulated pipe 100 is selectively spray-coated with Y ₂ O ₃ on the inner surface, the outer surface, or the entire inner and outer surface.

As described above, the present invention is applicable to various industrial equipment requiring chemical vapor deposition (CVD) processes including manufacturing facilities of semiconductors, liquid crystals, solar cells, and the like, in the middle of a pump (PUMP) Wherein the plurality of articulated rings form a series of articulated tubes, wherein the articulated articulated tubes are arranged at a predetermined angle relative to an axial direction of the articulated bellows, (DCS gas) is not hardened and accumulated in the piping during the process, so that the piping maintenance work is significantly reduced and the facility utilization rate is greatly improved And it is effective to reduce the work such as post maintenance and repair, thereby greatly improving the profit of the enterprise.

Accordingly, the present invention has an effect that a precise centering operation (assembly) can be easily performed even if the vertical axis degree is bad when the piping is disconnected from the piping and the vacuum degree is secured.

Further, the present invention provides a double pipe structure in which an inner joint pipe and an outer flexible pipe (corrugated pipe) are formed so as to integrate both flanges so as to greatly improve airtightness due to gas leakage, The socket ring of the multi-joint tube can be formed with a holder so that the entire length of the coupler can be slightly increased or decreased, thereby improving workability in the field alignment.

In addition, the present invention is an alternative embodiment, which has the effect of minimizing the generation of deposits generated from the exhaust gas and the occurrence of contamination and corrosion inside the pipe by spray coating on the inner surface of the articulated pipe.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view showing an example of an industrial facility in which a double-pipe type joint bellows according to the present invention is installed;
2 is a perspective view of a double-pipe type joint bellows according to the present invention,
FIG. 3 is a longitudinal sectional view of FIG. 2,
FIG. 4 is a side view showing a jointed state of the articulated pipe according to the present invention,
FIG. 5 is a view showing a state where one side socket ring, flange and flexible tube according to the present invention are combined,
6 is a view illustrating a state where the other socket ring, the flange and the flexible tube according to the present invention are coupled,
7 is a cross-sectional view of one side of a joint ring according to the present invention,
Fig. 8 is a perspective view of Fig. 7,
Figure 9 is an exploded perspective view of the articulating rings according to Figure 7,
10 is an illustration showing an angle variable state of a joint ring according to the present invention,
11 is a view showing an axis (vertical view) variable state of the articulated pipe according to the present invention,
12 is an exemplary view showing another shape of a double coupler according to the present invention.

Hereinafter, the present invention will be described with reference to the accompanying drawings.

1 to 12, a joint bellows according to the present invention includes a multi-joint pipe 100, a flange 200, and a flexible pipe 300.

The articulated pipe (100) is constructed such that a plurality of unit joint rings (110) are axially connected to form a series of channels along the longitudinal direction. The joint ring (110) Shaped first and second spherical surfaces 111 and 112 having curved surfaces of different sizes along the circumference set on the other side with respect to the center points C-1 and C-2, .

That is, the first sphere back surface and the second sphere back surface are integrally formed, and end portions cut in a direction orthogonal to the open ends are formed so that the upper and lower ends of the bow tie or the grasshopper shape are cut horizontally The first and second sphere back surfaces are formed to be fitted to the first and second sphere back surfaces adjacent to each other to form a multi-joint shape.

At this time, an arc-shaped insertion surface 113 formed by a circumference is formed on the inner circumference of the first sphere back surface 111 so that center points C-1 and C-2 are formed when the second sphere back surface 112 is inserted correspondingly. And the circumferential rotation and the axial angle are variable.

That is, the first and second spherical surfaces may be inclined in the circumferential direction or the free direction with respect to the center point superimposed upon fitting, or may be formed to be rotatable along the circumferential surface, .

Thus, a socket ring 120 for assembly is formed on each side of both ends in the longitudinal direction of the plurality of joint rings 110 connected to each other.

At this time, the socket ring 120 is a hollow body corresponding to the joint ring 110, and is connected to the first sphere rear surface 111 or the second sphere back surface 112 adjacent to the one side, 121 or a fourth sphere back surface 122 is formed on one side of the third sphere back surface 121 or the fourth sphere back surface 122. The other end of the third sphere back surface 121 or the fourth sphere back surface 122 is formed with a fastening extension part 124 having a locking projection 123 do.

In the articulated pipe 100, the curved surface section L-1 of the first spherical surface 111 is formed to be shorter than the curved surface section L-2 of the second spherical surface 112, The angle adjustment and the centering change are facilitated within the rotation section G generated when the back surface 112 is fitted to the insertion surface 113 of the first sphere back surface 111. [

At this time, it is preferable that a rotation interval G generated from the curved sections of the first and second sphere rear faces has an angle difference of at least 5 degrees formed by the distance moved along the arc shape.

Accordingly, the first sphere back surface and the second sphere back surface are each arc-shaped in shape of a sphere and are roughly divided into an insertion portion and an insertion portion, and the inner surface of the second sphere rear surface 112 And is formed so as to form a straight line so as to smoothly transfer exhaust gas to the periphery.

At this time, it is preferable that the articulated pipe 100 is selectively spray-coated with Y ₂ O ₃ on the inner surface, the outer surface, or the entire inner and outer surface.

These spray coatings can be applied to glass, polymer, metal and plastic substrates according to industrial purposes such as corrosion resistance, abrasion resistance, heat generation, plasma, insulation, permeation, electromagnetic shielding, and electrodes for solid phase powders such as ceramics, A dense thin film or a thick film coating layer having no adherence to the interface between the base material and the coating layer is formed without heat damage, processing / cracking, and the coating layer is formed so as to completely realize a microstructure or a nanostructured coating layer.

Accordingly, the multi-joint tube implemented through the Y ₂ O ₃ spray coating can minimize particle contamination on the surface and particle contamination on the wafer due to swellable particles, So that the cleaning cycle can be extended, thereby remarkably improving the process yield.

The flange 200 is formed such that a connecting end 210 is formed on a surface corresponding to the extension 124 of the socket ring 120. A communication hole 221 is formed on the surface of the connecting end 210, And a slip holder 220 having a locking protrusion 222 and a length adjusting section 223 is formed to fit the locking protrusion 123 of the locking protrusion.

A coupling end 230 is formed on the other side opposite to the coupling end 210 so as to correspond to the coupling end of the equipment piping material and is coupled to the coupling end 210 and the coupling end 230 at the center of the main body. A discharge hole 240 is formed so as to communicate with the fastening extension 124 of the multi-joint tube 100.

In this case, as shown in FIG. 12, the flange is formed to be inserted into the socket ring while corresponding to the inner diameter of the extension of the socket ring, with a guide ring laid on one side of the connection end, which is the direction in which the airflow advances. This is an ideal connection structure to facilitate connection and assembly of one end of a reference point while ensuring smooth transport of airflow while confirming the position of the fastening direction.

The flexible tube 300 is formed with openings 310 at both lateral ends of the flexible tube 300 so as to be coupled to the outer periphery of the connection end 210 of the flange and has a space 320 therein, And a wrinkle 330 is formed on the outer circumferential line in the axial direction so as to be flexible in a free direction while being flexible in a free direction.

At this time, the wrinkles are secured in the longitudinal direction tension (elasticity), and the wrinkles can be expanded and contracted by the distance of the length adjusting section formed in the slip holder, so that the wrinkles can be formed in a bellows- It is also possible.

As described above, the present invention is a kind of intermediate connection body inserted into a vacuum pump (PUMP) and a peristaltic pipe in semiconductor CVD and various FURNACE equipment, and it is a kind of intermediate connection body which accumulates in the pipe, Is completely blocked, thereby minimizing the piping maintenance work rate and maximizing the utilization rate of the equipment, thereby maximizing the profit of the enterprise.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims and their equivalents. Of course, such modifications are within the scope of the claims.

100 ... articular tube 110 ... joint ring
111 ... first saddle back 112 ... second saddle back
113 ... insertion surface 120 ... socket ring
121 ... third sphere back surface 122 ... fourth sphere back surface
123 ... stopper 124 ... extension
200 ... flange 210 ... jointed end
220 ... Slip holder 221 ... communicating hole
222 ... hanging jaw 223 ... length adjusting section
230 ... Coupling unit 240 ... Discharge ball
300 ... flexible tube 310 ... opening
320 ... space part 330 ... crease

Claims (3)

The joint ring 110 is a hollow body having a central point C-1, a center point C-2, and a center point C-1 on one side and the other side in the axial direction, respectively, A first sphere back surface 111 and a second sphere back surface 112 in the form of an arc having curved surfaces of different sizes along the circumference set on the basis of the first sphere back surface 111 (C-2) An arc-shaped insertion surface 113 formed by a circumference is formed at the inner periphery of the second spherical surface 112. When the second spherical surface 112 is inserted correspondingly, the circumferential rotation and the axial angle And a socket ring 120 for assembly is formed on each side of both ends in the longitudinal direction of the plurality of joint rings 110. The socket ring 120 is formed in a hollow body corresponding to the joint ring 110, And the third sphere back surface 12 (12) is formed to correspond to the first sphere back surface 111 or the second sphere back surface 112 adjacent to one side, 1) or a fourth sphere back surface 122 is formed at one end of the third sphere rear surface 121 or the fourth sphere back surface 122 and a fastening extension part 124 having a locking projection 123 is formed (100);
A connection end 210 is formed on a surface corresponding to the extension 124 of the socket ring 120. A connection hole 221 and a coupling protrusion 222 are formed on the connection end 210 And a slip holder 220 for providing a length adjusting section 223 is formed so that a locking protrusion 123 of a fastening extension portion is fitted. On the other side opposite to the joining end 210, And a discharge hole 240 is formed at the center of the body so as to penetrate the joint end 210 and the joint end 230 so as to be coupled to the articulated pipe 100. [ A flange (200) for communicating with the extension (124);
An opening 310 is formed at both ends in the longitudinal direction so as to correspond to the outer periphery of the joining end 210 of the flange and a space 320 is formed in the inside of the joining end 210, A flexible tube 300 is formed on the outer circumferential line in the axial direction to form a wrinkle 330 so as to be flexible in a free direction while being flexible;
Wherein the bellows is made of a metal. The articulated pipe (100) according to claim 1, wherein the articulated pipe
The curved surface section L-1 of the first sphere back surface 111 is formed to be shorter than the curved surface section L-2 of the second sphere back surface 112 so that the neighboring second sphere rear surface 112 is located on the first sphere rear surface 111), and the angle adjustment and the centering change are facilitated within the rotation section (G) generated when the insertion bellows (111) is inserted into the insertion surface (113) of the joint bellows (111). The method of claim 1 or claim 2, wherein the multi-joint tube 100 has a bellows joint, characterized in that to occur to the spray coating of optionally Y ₂ O ₃ component as in any of the entire inner surface or the inner and outer surfaces.

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