KR101477060B1 - Waveguide-Coupling Method For Lisitano Coil Antenna - Google Patents

Abstract

The rigid-field coil antenna according to the present invention comprises an annular conductor block 110 having a slit 120 formed in a circumferential direction along a periphery thereof. The conductor block 110 is adjacent to the slit 120 An antenna body 100 to which a plurality of permanent magnets 130 are attached and receives microwaves through the inlet 120a of the slit 120 to generate plasma; And microwave supply holes 213, 223 and 233 for supplying an applied microwave to the antenna body 100 are formed in the inside of the slit 120 and the ends of the microwave supply holes 213, And a waveguide part (200) connected to the conductor block (110) so as to be matched with the waveguide part (120a) and supplying the microwave to the inlet part (120a) of the slit (120) through the microwave supply holes (213, A high power applied type regitano coil antenna of a waveguide connection type is disclosed.

Description

[0001] The present invention relates to a waveguide-coupled Lisitano Coil Antenna,

BACKGROUND OF THE INVENTION Field of the Invention [0001] The present invention relates to a rigid-field coil antenna of a waveguide connection type for generating a plasma, and more particularly to a rigid-field coil antenna of a high density, large area plasma To a plurality of antenna elements.

The ECR (Electronic Cyclotron Resonance) plasma source is an effective plasma generation source capable of expanding the operating and processing region of the plasma to a low pressure (for example, 10 ^-4 Torr).

In addition, unlike the conventional microwave plasma source, the Rizitano coil, which is a circular form of the Lisitano type antenna, is not limited to the wavelength of the wave to which the diameter is applied, Can be adjusted to a desired size. Therefore, it is an effective antenna structure capable of generating a corresponding large-area plasma.

Meanwhile, in various semiconductor processing processes such as etching using a plasma and thin film growth, a large-area plasma generation source is required in order to satisfy extreme characteristics and yields required by industry. In addition, in order to effectively use the large-area plasma generating source, a high power must be stably applied to the input terminal in proportion to the size of the plasma generating source.

According to the related art, as in Korean Patent Laid-Open Publication No. 2011-0020723, 'Plasma Generating Microwave Antenna', the Rigidano coil antenna includes a waveguide, an antenna body, and a plurality of conductors for electrically connecting the waveguide and the antenna body 10 And a coaxial structure connection including rods.

In this way, when a coaxial electrical connector is used for power transmission between the antenna body and the waveguide, the amount of power that can be transferred increases in proportion to the diameter, i.e., the surface area, of the inner conductive bar of the coaxial cable structure. However, the size (area) of the inner conductive bar is limited by the size of the rigidano coil antenna and the impedance matching of the coaxial line structure. Therefore, when a high power is applied due to the limited area of the inner conductive rod, high heat is generated on the surface of the conductive rod, which causes resistance loss and dielectric loss of the inner and outer conductive rods, the electric inductionor itself, the insulator surrounding the inner conductive rods, And the problem of hindering long-time operation is caused.

As described above, the conventional Rigidano coil antenna is not actively used as a large-area plasma generation source due to the weakness of the restriction of the application power (usually within 1 kW) according to the power transmission method of the coaxial line structure.

Korean Patent Laid-Open Publication No. 2011-0020723 (March 03, 2011), a microwave antenna for plasma generation

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a waveguide connecting method using a waveguide connecting structure, And to provide a coil antenna.

According to an aspect of the present invention, there is provided a rigid-nano coil antenna of a waveguide connection type comprising an annular conductor block (110) having a slit (120) formed in a circumferential direction along a circumference thereof, A plurality of permanent magnets 130 are mounted adjacent to the slit 120 in the slit 120 and a microwave is supplied through the inlet 120a of the slit 120 to generate a plasma 100); And microwave supply holes 213, 223 and 233 for supplying an applied microwave to the antenna body 100 are formed in the inside of the slit 120 and the ends of the microwave supply holes 213, And a waveguide part (200) connected to the conductor block (110) so as to be matched with the waveguide part (120a) and supplying the microwave to the inlet part (120a) of the slit (120) through the microwave supply holes (213, ).

The waveguide unit 200 includes a microwave supply waveguide 210 for receiving and supplying a microwave generated from the oscillator and an input terminal 221 connected to an output terminal 212 of the microwave supply waveguide 210. And a tapered waveguide 220 formed to be gradually narrowed toward the output terminal 222 and an input terminal 231 coupled to an output end 222 of the tapered waveguide 220, A microwave supply hole 233 corresponding to the inlet 120a is formed so that the microwave supply hole 233 is aligned with the inlet 120a of the slit 120, And a slit connecting waveguide 230 fastened to the sieve block 110. Each microwave supply hole 213, 223 and 233 is formed in the waveguide 210, 220 and 230 so that the microwave is applied to the slit 120 ) Of And can be supplied directly to the inlet 120a.

The slit connecting waveguide 230 and the inside of the antenna body 100 are maintained in a vacuum state between the output terminal 222 of the taper waveguide 220 and the input terminal 231 of the slit connecting waveguide 230 And a vacuum window 240 for entering the microwave into the microwave supply hole 233 of the slit connecting waveguide 230 may be disposed.

The length of the microwave supply hole 233 of the slit connecting waveguide 230 is longer than the length of the inlet 120a of the slit 120. The length of the microwave supply hole 233 The inclined surfaces 234 are formed at both sides of the output end 232 of the slit connecting waveguide 230 at an angle with respect to the slit connecting waveguide 230, And an opening hole 233a may be formed on both sides of the central portion.

(n=자연수,

= Guided Wavelength<관내 파장>) 로 형성될 수 있다.In addition, the length of the slit connecting waveguide 230 and the tapered waveguide 220 may be,

(n = natural number,

= Guided Wavelength &gt;).

The waveguide part 200 may be formed with a cooling line 250 for cooling the slit connecting waveguide 230 and the tapered waveguide 220.

The inlet 120a of the slit 120 is not open to the outside in the conductor block 110, but ends of the inlet 120a are connected to each other.

According to the lead-and-tube coil antenna of the present invention,

First, the antenna body and the waveguide portion are coupled with each other in a mutually matched manner, so that sufficient power required for large-area plasma generation can be applied.

Secondly, the center portion of the microwave supply hole of the slit connecting waveguide has a size that is matched with the inlet portion of the slit, but has an opening hole at both sides of the center portion, thereby connecting the waveguide structure that could not be connected It is possible to induce the incident microwaves to concentrate on the slit without leaking to the outside.

A vacuum window is disposed between the output end of the tapered waveguide and the input end of the slit connecting waveguide to keep the inside of the antenna body in a vacuum state and to introduce a microwave into the microwave supply hole of the slit connected waveguide, The inside of the body portion can be vacuum-sealed.

Fourth, since a cooling line for cooling the slit connecting waveguide and the tapered waveguide is formed in the waveguide part, the microwave can be stably applied by preventing the conductivity of the waveguide part from being reduced.

FIG. 1 and FIG. 2 are a plan view and a partial cutaway perspective view showing the structure of a rigid-nano coil antenna of a waveguide connection type according to a preferred embodiment of the present invention,
FIG. 3A is a partial perspective view showing a shape of a slit of a conventional rigid-field coil antenna,
FIG. 3B is a partial perspective view illustrating a shape of a slit of a rigid-nano coil antenna of a waveguide connection type according to a preferred embodiment of the present invention,
FIG. 4 is a partially cutaway perspective view showing a configuration of a microwave supply hole formed inside the waveguide unit, and FIG. 4 is a cross-
5 is a perspective view illustrating the configuration of an output terminal of a slit-connected waveguide coupled to an antenna body,
FIG. 6 is a perspective sectional view showing a main structure of a rigid-nano coil antenna of a waveguide connection type according to a preferred embodiment of the present invention,
FIG. 7A is a diagram illustrating a result of calculating a distribution of an electric field formed inside a coil antenna to which a power is applied by a conventional coaxial line structure using a Microwave Studio (MWS)
FIG. 7B is a diagram illustrating a result of calculating a distribution of an electric field formed inside a coil antenna according to a preferred embodiment of the present invention using a Microwave Studio (MWS)
8A is a graph showing a result of calculating a distribution of an electric field at a portion to which power is applied in a coaxial line structure in a conventional coil antenna using Microwave Studio (MWS)
FIG. 8B is a diagram illustrating a result of calculating a distribution of an electric field in a portion to which power is applied from a coil antenna to a direct waveguide structure according to a preferred embodiment of the present invention, using Microwave Studio (MWS) of CST.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, terms and words used in the present specification and claims should not be construed as limited to ordinary or dictionary terms, and the inventor should appropriately interpret the concepts of the terms appropriately The present invention should be construed in accordance with the meaning and concept consistent with the technical idea of the present invention.

Therefore, the embodiments described in this specification and the configurations shown in the drawings are merely the most preferred embodiments of the present invention and do not represent all the technical ideas of the present invention. Therefore, It is to be understood that equivalents and modifications are possible.

(Hereinafter, referred to as 'coil antenna 1') of the waveguide connection type according to the preferred embodiment of the present invention is connected to the antenna body part and the waveguide part in such a manner that the antenna body part and the waveguide part are connected to each other, As shown in FIGS. 1 to 6, the antenna element 100 and the waveguide part 200 (hereinafter, referred to as &quot; coil antenna 1 &quot; ).

First, the antenna body unit 100 is a constituent element in which a permanent magnet 130 is directly mounted, and an Energetic Electron generated by the ECR ionizes neighboring neutral particles to generate a plasma having uniform symmetry And a plurality of permanent magnets 130 adjacent to the slits 120 are formed in the conductor block 110. The slits 120 are formed in the circumferential direction along the circumference of the conductor block 110, And a microwave is supplied through the inlet 120a of the slit 120 to generate a plasma.

The slit 120 is formed through the inside and the outside of the conductor block 110 and has a rectangular wave shape (vertically extending, circumferentially extending, vertically downward, circumferentially extending, vertically rising, (See Figs. 2, 3B and 4).

The inlet 120a of the slit 120 is defined as a starting portion where the slit 120 extends along the circumference of the conductor block 110. [ A terminal portion 120b is formed at a final portion of the slit 120 extending along the circumference of the conductor block 110. [ 3B, the slit 120 is formed to extend in a rectangular wave shape along the circumference of the conductive block 110, so that the terminal 120b is formed at one side of the inlet 120a .

The permanent magnet 130 mounted adjacent to the square wave slit 120 is supported by the lid 131 so as not to be released to the outside while being inserted into the insertion groove formed in the conductor block 110, Is fixedly mounted on the body block (110).

(n=자연수,

= wavelength in vacuum<진공 중 파장>)로 파여지도록 형성된다. The length of the slit 120 in the height direction and the circumferential direction of the conductor block 110 is determined by the frequency of use of the coil antenna 1 according to the preferred embodiment of the present invention

(n = natural number,

= wavelength in vacuum < vacuum &gt;).

The waveguide part 200 is a component that is fastened to the conductor block 110 of the antenna body part 100 in a matched manner and applies a high power power to the antenna body part 100, And the microwave supply holes 213, 223 and 233 for supplying the microwave supply holes 213, 223 and 233 to the conductive block 100 are formed so as to penetrate the microwave supply holes 213, 223 and 233 to be aligned with the inlet 120a of the slit 120, And directly feeds the microwave to the inlet 120a of the slit 120 through the microwave supply holes 213, 223, and 233.

Here, the waveguide unit 200 includes a microwave supply waveguide 210 for receiving and supplying a microwave generated from an oscillator (not shown) as shown in the figure, A tapered waveguide 220 formed in such a manner that an input terminal 221 is coupled to the input terminal 212 and gradually narrowed toward the output terminal 222 and an input terminal 231 is connected to the output terminal 222 of the tapered waveguide 220 And a microwave supply hole 233 corresponding to the inlet 120a of the slit 120 is formed in the interior of the slit 120 so that the microwave supply hole 233 is formed in the inlet 120a of the slit 120, And a slit connection waveguide 230 to which the output terminal 232 is coupled to the conductor block 110 so as to be matched with the conductor block 110.

The taper waveguide 220 is gradually narrowed from the input end 221 to the output end 222 so that the waveguide 220 can be reduced in width in the lateral direction between the microwave supply waveguide 210 and the slit connecting waveguide 230. [ It plays a role to connect the gap naturally. Thereby minimizing the loss of microwaves supplied thereto and guiding a high voltage to the inside of the antenna.

In addition, microwave supply holes 213, 223, and 233 are formed in the waveguides 210, 220, and 230 so as to communicate with each other, and the microwave applied directly to the inlet 120a of the slit 120 is supplied.

The microwave supply waveguide 210 may be a standard waveguide such as a WR 340 or a WR 284 having a rectangular cross section and may include an output end 222 of the tapered waveguide 220 and an input end 231 of the slit connecting waveguide 230. A microwave is introduced into the microwave supply hole 233 of the slit connection waveguide 230 while maintaining the inside of the slit connection waveguide 230 and the antenna body 100 in a vacuum state, (240). Since the vacuum window 240 is disposed at the lowest voltage level in the waveguide unit 200, power loss due to the vacuum window 240 can be reduced. At the same time, the slit connection waveguide 230, It is possible to vacuum seal the inside of the body 100.

(n=자연수,

= Guided Wavelength<관내 파장>)로 형성되는 것이 바람직하다.Further, the lengths of the slit connecting waveguide 230 and the taper waveguide 220 are

(n = natural number,

= Guided Wavelength &quot;).

This is for disposing the vacuum window 240 and the inlet portion 120a of the slit 120 in a portion where the applied voltage is low in the waveguide portion 200. [ If a high voltage is applied, dielectric loss and resistance loss may be large in the vacuum window 240 and a local discharge due to a high voltage may be generated in the inlet 120a of the slit 120 so that the microwave is transmitted to the antenna body 100 It can be disturbed.

6, a cooling line 250 for cooling the slit connecting waveguide 230 and the tapered waveguide 220 may be formed on the waveguide part 200. In addition, The cooling line 250 may be a water-cooled furnace in which cooling water supplied from the outside is circulated. The cooling line 250 can prevent the waveguide unit 200 from being heated and damaged through the construction of the cooling line 250, The microwave can be applied.

4 and 5, the length of the microwave supply hole 233 of the slit connecting waveguide 230 is longer than the length of the inlet 120a of the slit 120 And a slope 234 inclined in the direction of the input end 231 is formed on both sides of the output end 232 of the slit connection waveguide 230 in the longitudinal direction of the microwave supply hole 233, The central portion of the slit 233 may be in communication with the inlet 120a of the slit 120 and the opening 233a may be formed on both sides of the central portion.

The central portion of the microwave supply hole 233 of the slit connecting waveguide 230 has a size corresponding to the inlet portion 120a of the slit 120, It is possible to directly connect the antenna to the antenna and to induce microwaves incident on the antenna body 100 to concentrate on the slit 120 without leaking to the outside.

3B, the inlet portion 120a of the slit 120 is formed so as not to open outward in the conductor block 110 but to connect ends of the slit 120 with each other.

Here, FIG. 3A shows the shape of the slit 12 formed in the conductor block 10 in the conventional coil antenna. In the conventional coaxial line power transmission system, the microwave is transmitted through the inner conductive bar directly connected to the coil antenna and flows through the slit 12 of the antenna to the outer conductor of the coaxial antenna. Therefore, 3A, the recessed portion of the slit 12 is opened to the outside in the conductor block 10.

However, in the coil antenna 1 according to the preferred embodiment of the present invention, the microwave is directly applied to the inlet portion 120a of the slit 120 through the waveguide portion 200, and the waveguide portion 200 3B, the inlet 120a of the slit 120 extends outwardly from the inside of the conductor block 110, as shown in FIG. 3B, since the current flows through one side of the slit connecting waveguide 230 of the slit 120, But the ends are interconnected.

That is, in the conventional coil antenna, if the inner conductor and the outer conductor are divided in the power feeder having the coaxial structure of the current application portion and the ground portion, in the coil antenna 1 according to the preferred embodiment of the present invention, There is a difference in structure in that it is divided into the applied portion and the ground portion by the structurally separated shape of the slit connecting waveguide 230 and the opening hole 233a of the slit connecting waveguide 230.

Here, FIG. 7A shows the result of calculating the distribution of the electric field formed inside the coil antenna (center of the antenna, z = 0) by applying power to the conventional coaxial line structure using Microwave Studio (MWS) FIG. 7B shows the result of calculating the distribution of the electric field formed inside the coil antenna 1 according to the preferred embodiment of the present invention in the same manner.

7A and 7B, when the waveguide direct matching method according to the preferred embodiment of the present invention is used as compared with the conventional coaxial line power transmission system, the coil antenna 1 is provided with a relatively high and uniform It can be confirmed that an electric field is formed.

8A shows a result of calculating the distribution of the electric field at the portion (coaxial line, waveguide center) where power is applied to the coaxial line structure in the conventional coil antenna in the same manner, and FIG. There is shown a result of calculating the distribution of the electric field of the portion (the conductor block 110, the slit connecting waveguide 230) to which the power is applied in the direct waveguide matching structure in the coil antenna 1 according to the preferred embodiment.

As shown in FIGS. 8A and 8B, the power transmission system using the waveguide matching method according to the preferred embodiment of the present invention, as compared with the power transmission system of the conventional coaxial line structure, Can be more effectively applied to the slit 120 of the antenna body part 100. [

According to the configuration and function of the coil antenna 1 according to the preferred embodiment of the present invention as described above, the coaxial wire structure according to the related art can supply only 1kW of power to the conductive bar, In the coil antenna 1 according to the preferred embodiment of the present invention, the waveguide unit 200 is directly coupled to the antenna body 100 so as to be connected thereto, so that a high power power of 4 kW or more can be applied.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It is to be understood that various modifications and changes may be made without departing from the scope of the appended claims.

1 ... coil antenna 100 ... antenna body part
110 ... conductor block 120 ... slit
120a ... inlet portion 130 ... permanent magnet
200 ... waveguide section 210 ... microwave supply waveguide
220 ... tapered waveguide 230 ... slit connection waveguide
240 ... vacuum window 250 ... cooling line

Claims (7)

And a plurality of permanent magnets 130 adjacent to the slits 120 are formed in the conductor block 110. The slits 120 are formed in the circumferential direction of the conductor block 110, An antenna body 100 for receiving a microwave through an inlet 120a of the slit 120 to generate plasma; And
The microwave supply holes 213, 223 and 233 for supplying an applied microwave to the antenna body 100 are formed in the inside of the slit 120 and the ends of the microwave supply holes 213, A waveguide part 200 fastened to the conductor block 110 so as to be aligned with the waveguide 120a and supplying microwaves to the inlet part 120a of the slit 120 through the microwave supply holes 213, ; &Lt; / RTI &gt;
The waveguide unit 200 includes:
A microwave supply waveguide 210 for receiving and supplying a microwave generated from the oscillator,
A taper waveguide 220 having an input terminal 221 coupled to an output terminal 212 of the microwave supply waveguide 210 and gradually narrowing toward an output terminal 222,
An input end 231 is coupled to an output end 222 of the taper waveguide 220 and a microwave supply hole 233 corresponding to the inlet 120a of the slit 120 is formed therein, And a slit connection waveguide 230 in which an output terminal 232 is coupled to the conductor block 110 so that a wave supply hole 233 is aligned with an inlet 120a of the slit 120,
And the microwave supply holes 213, 223 and 233 are formed in the waveguides 210, 220 and 230 so that the microwave supply holes 213, 223 and 233 are communicated with each other, and the applied microwave is directly supplied to the inlet 120a of the slit 120. [ Rijitano coil antenna.
delete The method according to claim 1,
Between the output end 222 of the tapered waveguide 220 and the input end 231 of the slit connecting waveguide 230,
A vacuum window 240 for entering the microwave into the microwave supply hole 233 of the slit connecting waveguide 230 while maintaining the inside of the slit connecting waveguide 230 and the antenna body 100 in a vacuum state, ) Are arranged on the same side of the substrate.
The method of claim 3,
The length of the microwave supply hole 233 of the slit connecting waveguide 230 is longer than the length of the inlet 120a of the slit 120,
At both sides of the output end 232 of the slit connection waveguide 230 in the longitudinal direction of the microwave supply hole 233, an inclined surface 234 inclined at a predetermined angle is formed,
The center portion of the microwave supply hole 233 communicates with the inlet portion 120a of the slit 120 and an opening hole 233a is formed on both sides of the center portion. Tano coil antenna.
5. The method of claim 4,
The length of the slit connecting waveguide 230 and the tapered waveguide 220 may be,

(n = natural number,

= Guided Wavelength &quot;).&Lt; / RTI &gt;
6. The method of claim 5,
In the waveguide section 200,
And a cooling line (250) for cooling the slit connecting waveguide (230) and the taper waveguide (220) is formed.
6. The method of claim 5,
The inlet portion 120a of the slit 120 is formed with a through-
And the end portion (120b) of the slit (120) is closed and electrically short-circuited without being opened to the outside from the inside of the conductor block (110).

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