KR101469737B1 - Apparatus for detecting abnormality of transfer robot and method thereof - Google Patents

Apparatus for detecting abnormality of transfer robot and method thereof Download PDF

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Publication number
KR101469737B1
KR101469737B1 KR20140063340A KR20140063340A KR101469737B1 KR 101469737 B1 KR101469737 B1 KR 101469737B1 KR 20140063340 A KR20140063340 A KR 20140063340A KR 20140063340 A KR20140063340 A KR 20140063340A KR 101469737 B1 KR101469737 B1 KR 101469737B1
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South Korea
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signal
transfer robot
frequency
ultrasonic signal
ultrasonic
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KR20140063340A
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Korean (ko)
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김재민
이상신
박규성
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주식회사 썬닉스
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/026—Acoustical sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1674—Programme controls characterised by safety, monitoring, diagnostic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
    • G01H3/04—Frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/14—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object using acoustic emission techniques

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Manipulator (AREA)

Abstract

The present invention relates to an apparatus and a method to detect an abnormality of a transfer robot. According to the present invention, characteristic information of a specific component of the transfer robot is calculated based on the frequency characteristics of an ultrasonic signal generated during a transfer robot movement (or an ultrasonic signal/vibration signal resulting from the transfer robot movement), the presence or absence of the abnormality of the transfer robot is detected based on the frequency characteristics of the ultrasonic signal, and alarm information is produced and outputted when abnormality is detected. Accordingly, the service life and productivity of the expensive transfer robot can be extended and improved.

Description

[0001] The present invention relates to an apparatus and a method for detecting an abnormality of a transfer robot,

The present invention relates to an apparatus and method for detecting an abnormality of a transfer robot, and more particularly, to an apparatus and method for detecting an abnormality of a transfer robot based on frequency characteristics of an ultrasonic signal (or an ultrasonic signal / vibration signal in accordance with movement of the transfer robot) The information on the specific characteristics of the transfer robot is calculated, the abnormality of the transfer robot is detected on the basis of the frequency characteristics of the ultrasonic signal, the alarm information is generated and outputted upon detection of abnormality, And more particularly, to an apparatus and method for detecting an abnormality of a transfer robot.

Generally, a transfer robot (or transport device) is a device manufacturing equipment for moving objects (including semiconductor devices, for example).

Such a transfer robot has a problem that it is impossible to confirm whether there is an abnormality (or a failure) of each component included in a plurality of bearings, joints of a speed reducer, etc. constituting the transfer robot.

Korean Registered Patent No. 10-0484213 [Title: Apparatus for detecting defective complex machine devices]

An object of the present invention is to provide various information related to the operation state of the transfer robot on the basis of an ultrasonic signal (or an ultrasonic signal / vibration signal according to movement of the transfer robot) generated when the transfer robot moves, The present invention provides an apparatus and method for detecting an abnormality of a transfer robot that can extend the operation period of the transfer robot and improve the management efficiency of the entire system.

It is another object of the present invention to provide an ultrasonic diagnostic apparatus and method which can detect the abnormality of the transfer robot based on the frequency characteristics of the ultrasonic signal generated when the transfer robot moves, An apparatus and method for detecting an abnormality of a transfer robot are provided.

An abnormality detection apparatus for a transfer robot according to an embodiment of the present invention is an apparatus for detecting the presence or absence of an abnormality of a transfer robot. The apparatus is installed directly on a transfer robot or installed adjacent to the transfer robot, An ultrasonic sensor part for measuring an ultrasonic wave; And a RMS value, a delta RMS value, an anomaly signal number, a signal maximum difference, an abnormal signal number difference, a channel / measurement error, a hit ratio, and a frequency analysis value based on the measured ultrasonic signal, a deviation analysis value, a hit-ratio, and an abnormal signal frequency.

The ultrasonic sensor unit may include at least one of a joint position, an arm position, a bearing position, a speed reducer position, a rotation axis position of the drive motor, a linear motor block position, a lead screw position, and may be installed in at least one of a fan position and a rotary shaft position of the vacuum pump.

As an example related to the present invention, the ultrasonic sensor unit may be configured such that when the transfer robot moves, an ultrasonic signal generated in the joint according to movement of a joint included in the transfer robot, and an arm included in the transfer robot are interconnected An ultrasonic signal generated in the bearing according to the movement of the bearing, an ultrasonic signal generated in the speed reducer in accordance with the movement of the speed reducer included in the transfer robot, and a rotation axis of the driving motor included in the transfer robot, An ultrasonic signal generated on the rotary shaft, an ultrasonic signal generated in the linear motor block according to the movement of the linear motor block included in the transfer robot, and a lead screw included in the transfer robot, , The fan of the transfer robot At least one of the ultrasonic signals generated in the fan and the rotary shaft of the vacuum pump included in the transfer robot may be measured according to the movement of the rotary shaft of the vacuum pump.

In one embodiment of the present invention, the frequency analysis value indicates a result of analyzing a frequency characteristic of the ultrasonic signal, the deviation analysis value indicates a deviation of the ultrasonic signal, and the RMS value of the ultrasonic signal is measured Wherein the delta RMS value represents a difference between an RMS value of the ultrasound signal and an RMS value of the reference signal, and the RMS value of the reference signal represents an RMS value of the ultrasound signal Wherein the number of the abnormal signals indicates the number of frequencies of the frequency of the ultrasonic signal located above the frequency of the reference signal by comparing the frequency of the reference signal and the frequency of the ultrasonic signal, The frequency of the ultrasonic signal located in the upper part of the frequency Wherein the signal maximum difference indicates a maximum value of the difference between the frequency of the reference signal and the frequency of the abnormal signal among the frequencies of the abnormal signal, and the abnormal signal number difference is the number of abnormal signals of the reference signal Wherein the channel / measurement interval represents a currently displayed channel and an accumulated number of times of measurement in a total channel of the transmitter, and the hit ratio represents a difference between the delta RMS value, the abnormal signal number, , And the abnormal signal frequency may indicate the frequency of the abnormal signal.

As an example related to the present invention, the controller may measure the ultrasonic signal based on a reference signal stored in advance in a storage unit corresponding to a component of the transfer robot at a position where the measured ultrasonic signal and the ultrasonic signal are measured It is possible to confirm the presence or absence of a component of the transfer robot corresponding to one position.

A method of detecting an abnormality of a transfer robot according to an embodiment of the present invention is a method of detecting an abnormality of a transfer robot, comprising the steps of: directly attaching the transfer robot to the transfer robot or installing an ultrasonic sensor unit adjacent to the transfer robot; Measuring an ultrasound signal; A deviation analysis value, an RMS value for the ultrasonic signal, a delta RMS value, an abnormal signal number, a signal maximum difference, an abnormal signal number difference, a channel / measurement error, and a channel / measurement error based on the measured ultrasonic signal, Calculating at least one of a hit ratio and an abnormal signal frequency; And the display unit, the calculated frequency analysis value, the deviation analysis value, the RMS value for the ultrasonic signal, the delta RMS value, the abnormal signal number, the signal maximum difference, the abnormal signal number difference, the channel / measurement order, And displaying the signal frequency.

In one embodiment of the present invention, the ultrasonic signal is measured based on a reference signal stored in advance in a storage unit corresponding to a component of the transfer robot at a position where the measured ultrasonic signal and the ultrasonic signal are measured, Confirming an abnormality of a component of the transfer robot corresponding to the measured position; Generating an alarm signal including information on a component of the transfer robot when an abnormality occurs in a component of the transfer robot corresponding to a position where the ultrasonic signal is measured; And outputting the generated alarm signal through the display unit.

The present invention provides various information related to the operation state of the transfer robot on the basis of an ultrasonic signal (or an ultrasonic signal / vibration signal according to movement of the transfer robot) generated when the transfer robot moves, The period is extended, and the management efficiency of the entire system is improved.

In addition, the present invention has an effect of improving the convenience of use by detecting the abnormality of the transfer robot based on the frequency characteristics of the ultrasonic signal generated when the transfer robot moves, and generating and outputting alarm information upon detection of an abnormality .

1 is a block diagram showing a configuration of an abnormality detection apparatus for a transfer robot according to an embodiment of the present invention.
2 is a flowchart illustrating a method of detecting an abnormality of a transfer robot according to an embodiment of the present invention.
3 is a diagram illustrating a screen of a display unit according to an embodiment of the present invention.

It is noted that the technical terms used in the present invention are used only to describe specific embodiments and are not intended to limit the present invention. In addition, the technical terms used in the present invention should be construed in a sense generally understood by a person having ordinary skill in the art to which the present invention belongs, unless otherwise defined in the present invention, Should not be construed to mean, or be interpreted in an excessively reduced sense. In addition, when a technical term used in the present invention is an erroneous technical term that does not accurately express the concept of the present invention, it should be understood that technical terms can be understood by those skilled in the art. In addition, the general terms used in the present invention should be interpreted according to a predefined or prior context, and should not be construed as being excessively reduced.

Furthermore, the singular expressions used in the present invention include plural expressions unless the context clearly indicates otherwise. In the present application, the term "comprising" or "comprising" or the like should not be construed as necessarily including the various elements or steps described in the specification, Or may be further comprised of additional components or steps.

Furthermore, terms including ordinals such as first, second, etc. used in the present invention can be used to describe various elements, but the elements should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals refer to like or similar elements throughout the several views, and redundant description thereof will be omitted.

In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail. It is to be noted that the accompanying drawings are only for the purpose of facilitating understanding of the present invention, and should not be construed as limiting the scope of the present invention with reference to the accompanying drawings.

1 is a block diagram showing a configuration of an abnormality detection apparatus 10 of a transfer robot according to an embodiment of the present invention.

1, the abnormality detection apparatus 10 of the transfer robot includes an ultrasonic sensor unit 100, a storage unit 200, a control unit 300, a display unit 400, and a sound output unit 500 do. All of the components of the abnormality detection device 10 of the transfer robot shown in Fig. 1 are not essential components, and the abnormality detection device 10 of the transfer robot is constituted by more components than the components shown in Fig. Or an abnormality detection device 10 of the transfer robot may be implemented by fewer components.

Here, the abnormality detection device 10 may be a smart phone, a mobile terminal, a portable terminal, a telematics terminal, a personal computer, a notebook computer, (PDA), a WiBro terminal, an IPTV (Internet Protocol Television) terminal, an AVN (Audio Video Navigation) terminal, a PMP (Portable Multimedia Player), a navigation terminal (Vehicle Navigation Device) (Navigation Terminal), and the like.

The ultrasonic sensor unit 100 may be installed at a predetermined position of a transfer robot (not shown) (e.g., a transfer robot) such as a joint, an arm, a bearing, a speed reducer, (Or attached) to a transfer robot (e.g., a linear motor block, a lead screw, a fan, a rotary shaft of a vacuum pump, or the like) It may be installed at any position adjacent to the transfer robot to measure the signal.

That is, the ultrasonic sensor unit 100 can be installed at a position where ultrasonic signals generated in a predetermined region of the transfer robot can be measured according to movement (or movement) of the transfer robot.

At this time, the transfer robot (not shown) is included in a semiconductor manufacturing facility (not shown). Here, the semiconductor manufacturing facility includes at least one process chamber (not shown) in which a conventional ion implantation process or an etching process is performed, a transfer chamber (not shown) communicating with the process chamber and installed with the transfer robot A plurality of wafers are collectively loaded or unloaded in a low vacuum state in the atmosphere so that the ion implantation process or the etching process can be performed in the process chamber in a vacuum state mounted on one side of the transfer chamber A load lock chamber (not shown) to be loaded, and an aligning chamber (not shown) communicating with the transfer chamber and aligning the wafers loaded in the load lock chamber in one direction.

In addition, the transfer robot installed in the transfer chamber sequentially rapidly loads or unloads wafers between the load lock chamber, the alignment chamber, and the process chamber, and the semiconductor manufacturing facility using the multi- It provides excellent process throughput while achieving excellent throughput.

In the embodiment of the present invention, the transfer robot is included in a part of the semiconductor manufacturing facility. However, the transfer robot is not limited thereto. The transfer robot may be included in various manufacturing facilities according to the designer's design.

In addition, when the transfer robot moves or operates, the ultrasonic sensor unit 100 detects ultrasonic signals (or vibration signals) generated at positions (e.g., joints) where a plurality of components included in the transfer robot are mutually connected, .

That is, when the transfer robot moves (or moves), the ultrasonic sensor unit 100 detects an ultrasonic signal generated in the joint according to movement (or movement) of the joint included in the transfer robot, An ultrasonic signal generated in the bearing according to movement (or movement) of an arbitrary bearing interconnecting the arms, an ultrasonic signal generated in the speed reducer in accordance with movement (or movement) of the speed reducer included in the transfer robot, (Or movement) of the linear motor block included in the transfer robot according to the movement (or movement) of the rotation axis of the drive motor included in the transfer robot, and the ultrasonic signal generated in the linear motor block (Or movement) of the lead screw included in the transfer robot, (Or movement) of the rotary shaft of the transfer robot, an ultrasonic signal generated in the lead screw, an ultrasonic signal generated in the corresponding fan according to movement (or movement) of the fan included in the transfer robot, Ultrasonic signals generated from the rotary shaft of the vacuum pump are measured.

The storage unit 200 stores various user interfaces (UI), a graphical user interface (GUI), and the like.

Also, the storage unit 200 stores data and programs necessary for the operation of the abnormality detection apparatus 10 of the transfer robot.

The storage unit 200 may be a flash memory type, a hard disk type, a multimedia card micro type, a card type memory (for example, SD or XD A random access memory (SRAM), a read-only memory (ROM), an electrically erasable programmable read-only memory (EEPROM), a magnetic random access memory And a PROM (Programmable Read-Only Memory). The abnormality detection apparatus 10 of the transfer robot may operate a web storage for performing a storage function of the storage unit 200 on the Internet or may operate in association with the web storage .

In addition, the storage unit 200 may store component information (e.g., joints, arms, bearings, etc.) of the transfer robot corresponding to the measured position of the ultrasonic signal and the ultrasonic signal measured through the ultrasonic sensor unit 100 , Reducer, rotary shaft of drive motor, linear motor block, lead screw, fan, rotary shaft of vacuum pump, etc.).

Also, the storage unit 200 stores a root mean square (RMS) value of a reference signal or a reference signal corresponding to the component information of the transfer robot.

The storage unit 200 stores the frequency analysis value, the deviation analysis value, the RMS value of the input signal, the delta RMS value, the abnormal signal number, the signal maximum difference, and the abnormal signal number difference calculated by the control unit 300 , Channel / measurement cycle, hit ratio, abnormal signal frequency, and the like.

The storage unit 200 stores steady state information, maintenance state information, maintenance state information, and the like generated under the control of the controller 300.

Also, the storage unit 200 stores frequency characteristics (or frequency characteristics in a steady state) corresponding to each component included in the transfer robot.

That is, the storage unit 200 stores the frequency (or frequency range) characteristics generated in the corresponding component when the joint included in the transfer robot operates normally. For example, the storage unit 200, the frequency characteristics at the joints included in the transfer robot in normal operation, the frequency characteristics of the arms included in the normal operation transfer robot, The frequency characteristics of the speed reducer included in the transfer robot in normal operation, the frequency characteristics of the rotation axis of the drive motor included in the transfer robot in normal operation, the frequency characteristics of the transfer robot Frequency characteristics of the lead screw included in the transfer robot in normal operation, frequency characteristics of the fan included in the transfer robot in the normal operation, frequency characteristics of the linear motor block included in the transfer robot in the normal operation, And the frequency characteristics of the rotary shaft of the vacuum pump All.

The control unit 300 performs an overall control function of the abnormality detection apparatus 10 of the transfer robot.

In addition, the controller 300 may apply various noise reduction algorithms to remove noise signals generated in the process of receiving external ultrasonic signals through the ultrasonic sensor unit 100.

The control unit 300 may further include a frequency analysis value, a deviation analysis value (or a deviation analysis value for the ultrasonic signal), an RMS value of the input signal (for example, A difference value between the RMS value of the input / ultrasonic signal and the RMS value of the reference signal set in advance, the number of abnormal signals, the maximum signal difference, the number of abnormal signals, the channel / (Or confirms) the measurement time, the hit ratio, the abnormal signal frequency, and the like. Here, the frequency analysis value indicates a result of analyzing a frequency characteristic of the ultrasonic signal. In addition, the deviation analysis value indicates a deviation of the ultrasonic signal. The RMS value of the input signal represents an effective value of an energy value of the angular frequency per unit time with respect to the measured ultrasonic signal. The RMS value of the reference signal represents the effective value of the energy value of the angular frequency per unit time with respect to the ultrasonic signal of the component included in the transfer robot in the good state (or the steady state), and the input signal (or the ultrasonic signal) . The delta RMS value represents the difference between the RMS value of the input signal and the RMS value of the reference signal. The number of the abnormal signals may be determined by comparing the frequency of the reference signal with the frequency of the input signal (or the frequency of the ultrasonic signal) and comparing the frequency of the input signal (or the frequency of the reference signal) The number of frequencies of the frequency of the large input signal). At this time, the abnormal signal indicates the frequency of the input signal located above the frequency of the reference signal. The maximum signal difference represents a maximum value of the RMS value between the frequency of the reference signal and the frequency of the abnormal signal among the frequency of the abnormal signal. The abnormal signal number difference represents the difference between the number of abnormal signals of the reference signal and the number of abnormal signals inputted. The channel / measurement interval represents the currently displayed channel and the cumulative number of measurements among the total channels of the transmitter (not shown). The hit ratio represents a value calculated based on the delta RMS value, the number of abnormal signals, and the signal maximum difference. Here, the hit ratio may be a score assigned to a first criterion (for example, 5 dB) preset for the delta RMS value, a second criterion (for example, 30 criteria) previously set for the number of the abnormal signals, And a score assigned to a third criterion (for example, based on 5 dB) previously set for the signal maximum difference, to calculate a hit ratio for the measured ultrasonic signal. At this time, if the hit ratio is within a predetermined first range (for example, more than 5 points to 7 points), it can be determined that the measured ultrasonic signal is a signal of a normal state, It is possible to judge that the measured ultrasonic signal is a signal in a warning state when the ultrasonic signal exists within a second range (for example, 7 points to 10 points or less), and when the hit ratio is within a predetermined third range Point to 15 points or less), it can be determined that the measured ultrasonic signal is an abnormal state signal. The abnormal signal frequency represents the frequency of the abnormal signal (the frequency of the input signal located above the frequency of the reference signal).

In addition, the control unit 300 may calculate the RMS value of the reference signal, the calculated one or more pieces of information (e.g. frequency analysis value, deviation analysis value, RMS value of input signal, delta RMS value, The number of abnormal signals, the channel / measurement cycle, the hit ratio, the abnormal signal frequency, etc.) through the display unit 400 and / or the audio output unit 500.

In addition, the control unit 300 may store the ultrasonic signal measured through the ultrasonic sensor unit 100 and the ultrasonic signal measured by the ultrasonic sensor unit 100 in advance in the storage unit 200 in correspondence with the corresponding component of the transfer robot (Or determines) an abnormality of a corresponding component of the transfer robot, which has measured the ultrasonic signal, through comparison with a stored reference signal (or a reference frequency).

That is, the control unit 300 determines the frequency characteristics of the corresponding component information stored in the storage unit 200 in correspondence with the component information of the corresponding transfer robot at the position where the frequency characteristic of the ultrasonic signal measured the ultrasonic signal And confirms whether there is an abnormality in the corresponding component of the transfer robot that measured the ultrasonic signal.

At this time, the control unit 300 performs a signal band separation process and a source signal extraction process on the ultrasonic signal measured through the ultrasonic sensor unit 100, and then performs the signal band separation process and the source signal extraction process By comparing the ultrasonic signal with the reference signal, it is possible to check whether the corresponding component of the transfer robot measures the ultrasonic signal.

That is, the control unit 300 removes the first noise from the ultrasonic signal measured through the ultrasonic sensor unit 100.

In this manner, the control unit 300 separates the signal bands generated according to the operation of the transfer robot among the measured ultrasonic signals (source seperation).

In addition, the control unit 300 removes the noise signal included in the separated ultrasonic signal. At this time, the control unit 300 may remove the ambient noise included in the separated ultrasonic signals based on various known noise removal methods.

That is, the controller 300 removes a noise signal included in the separated ultrasound signals to extract only a substantial source signal generated according to the operation of the transfer robot among the separated ultrasound signals.

In addition, the control unit 300 may compare the reference signals stored in the storage unit 200 in correspondence with the positions of the noise-removed ultrasonic signals and the ultrasonic signals, (Or judges) an abnormality of the corresponding component of the robot.

If it is determined that an abnormality is not detected in the corresponding component of the transfer robot measuring the ultrasonic signal, the controller 300 checks whether the corresponding component of the transfer robot is abnormal .

If it is determined that an abnormality is detected in the corresponding component of the transfer robot measuring the ultrasonic signal, that is, the frequency characteristic of the ultrasonic signal corresponds to the component information of the corresponding transfer robot at the position where the ultrasonic signal is measured The control unit 300 determines that there is an abnormality in the corresponding component of the transfer robot at the position at which the ultrasound signal is measured, if it is not within the range of the frequency characteristics of the corresponding component information previously stored in the storage unit 200 (Or determination), and generates an alarm signal (or alarm information) including information on the corresponding component of the transfer robot in which the abnormality is detected.

The control unit 300 also outputs the generated alarm signal through the display unit 400 and / or the audio output unit 500.

The control unit 300 detects a presence or absence of a corresponding component of the transfer robot, and the controller 300 controls the plurality of (for example, (Including the frequency range of the ultrasonic signal) including the frequency characteristic range (for example, the normal range (or normal range frequency), the inspection range (or the inspection range frequency / It is possible to check whether a frequency characteristic is included in a certain frequency characteristic range and to detect an abnormality with respect to a corresponding component of the transfer robot at a position where the ultrasonic signal is measured.

Also, when the frequency characteristic of the measured ultrasonic signal is included in the normal range among the plurality of frequency characteristic ranges (for example, the normal range, the inspection range, the maintenance range, etc.), the control unit 300 determines whether or not the corresponding (Or a steady state signal) indicating that there is no abnormality in the components and generates the steady state information indicating the steady state and transmits the generated steady state information to the display unit 400 and / Lt; / RTI >

When the frequency characteristic of the measured ultrasonic signal is included in the inspection range among the plurality of frequency characteristic ranges (for example, the normal range, the inspection range, the maintenance range, etc.), the control unit 300 determines whether or not the corresponding (Or check state signal / attention state information) indicating that it is necessary to perform an inspection for the component, and outputs the generated check state information to the display unit 400 and / And outputs it via the audio output unit 500. [

When the frequency characteristic of the measured ultrasonic signal is included in the maintenance range among the plurality of frequency characteristic ranges (for example, the normal range, the inspection range, the maintenance range, etc.), the control unit 300 determines whether or not the corresponding (Or maintenance state signal / warning state information) indicating that the maintenance is required, and outputs the generated maintenance state information to the display unit 400 and / And outputs it via the audio output unit 500. [

In this way, the control unit 300 determines the frequency characteristics of the measured ultrasonic signal (or the noise-removed ultrasonic signal) and the reference signal stored in advance in the storage unit 200 in correspondence with the measured position of the ultrasonic signal, It is possible to check the presence or absence of an abnormality of the corresponding component of the transfer robot based on the frequency characteristics of the transfer robot and to output the confirmation result.

The control unit 300 detects the presence or absence of the component of the transfer robot based on the ultrasonic signal (or the noise-removed ultrasonic signal) measured through the ultrasonic sensor unit 100 and the ultrasonic signal The degree of similarity between the reference signal and the reference signal stored in the storage unit 200 is calculated.

That is, the control unit 300 determines whether the reference signal stored in the storage unit 200 corresponds to the measured frequency characteristics of the ultrasonic signal (or the noise-removed ultrasonic signal) and the measured position of the ultrasonic signal And calculates the similarity between the included frequency characteristics.

Also, the controller 300 compares the calculated similarity with a preset value, and confirms whether or not the corresponding component of the transfer robot that measured the ultrasonic signal is abnormal.

If it is determined that there is no abnormality in the corresponding component of the transfer robot (or if the calculated similarity is greater than the preset value (for example, 90%)), the control unit 300 And generates steady state information (or steady state signal) indicating steady state.

Also, the controller 300 outputs the generated steady state information (or a steady state signal) through the display unit 400 and / or the audio output unit 500.

If it is determined that the corresponding component of the transfer robot measures the ultrasonic signal (or the calculated similarity is less than or equal to the preset value (for example, 90%)) The control unit 300 analyzes the frequency domain of the measured ultrasound signal (or the noise-removed ultrasound signal).

In addition, the controller 300 determines (or confirms) whether the corresponding components of the transfer robot need general inspection or immediate maintenance according to the result of the precision analysis, Maintenance state signal / warning state information) or maintenance state information (or maintenance state signal / warning state information).

That is, when the calculated degree of similarity exists between the predetermined value (for example, 90%) and a predetermined second value (for example, 70%) as a result of the precision analysis, (Or check status signal / attention state information) indicating that the check is necessary.

If the calculated degree of similarity is less than or equal to the predetermined second value (for example, 70%) as a result of the precision analysis, the control unit 300 determines whether the corresponding component of the transfer robot needs immediate maintenance And generates maintenance state information (or maintenance state signal / warning state information) indicating that the maintenance is required.

Also, the controller 300 outputs the generated maintenance status information or maintenance status information through the display unit 400 and / or the audio output unit 500. FIG.

The display unit 400 can display various contents such as various menu screens using the user interface and / or graphical user interface stored in the storage unit 200 under the control of the controller 300. [ Here, the content displayed on the display unit 400 includes various text or image data (including various information data) and a menu screen including data such as icons, list menus, and combo boxes. Also, the display unit 400 may be a touch screen.

The display unit 400 may be a liquid crystal display (LCD), a thin film transistor liquid crystal display (TFT LCD), an organic light-emitting diode (OLED) And may include at least one of a flexible display, a 3D display, an e-ink display, and an LED (Light Emitting Diode).

The display unit 400 displays the frequency characteristics of the ultrasonic signal (or the frequency characteristics of the noise-removed ultrasonic signal) under the control of the controller 300, the RMS value of the reference signal, (Eg frequency analysis value, deviation analysis value, RMS value of input signal, delta RMS value, abnormal signal number, maximum signal difference, number of abnormal signal number, channel / measurement ratio, hit ratio, ), And the generated information (for example, the steady state information, the check state information, the maintenance state information, and the like), battery status information, and the like.

The voice output unit 500 outputs voice information included in a signal processed by the control unit 300. Here, the audio output unit 500 may be a speaker.

The voice output unit 500 outputs voice information corresponding to the generated information (for example, the steady state information, the check status information, the maintenance status information, and the like) by the control unit 300 do.

In addition, the abnormality detection device 10 of the transfer robot may further include a communication unit (not shown) for communicating with any internal component or an arbitrary server (not shown) through a wired / wireless communication network. Herein, as a wireless Internet technology, a wireless LAN (WLAN), a wireless broadband (Wibro), a WiMAX (World Interoperability for Microwave Access), HSDPA (High Speed Downlink Packet Access) , Long Term Evolution (LTE), Wireless Mobile Broadband Service (WMBS), and the like. In addition, the short range communication technology may include Bluetooth, Wi-Fi, Radio Frequency Identification (RFID), Infrared Data Association (IrDA), Ultra Wideband (UWB), ZigBee, , Near Field Communication (NFC), Ultra Sound Communication (USC), Visible Light Communication (VLC), and the like. The wired communication technology may include a power line communication (PLC), a USB communication, an Ethernet, a serial communication, an optical / coaxial cable, and the like.

In addition, the communication unit may control the frequency characteristics of the measured ultrasonic signal (or the frequency characteristics of the noise-removed ultrasonic signal) under the control of the controller 300, the RMS value of the reference signal, Including the frequency analysis value, the deviation analysis value, the RMS value of the input signal, the delta RMS value, the number of abnormal signals, the maximum signal difference, the number of abnormal signals, the channel / measurement period, the hit ratio, And may transmit the generated information (for example, the steady state information, the check state information, the maintenance state information and the like), the battery state information, and the like to the arbitrary server.

Thus, various information related to the operation state of the transfer robot can be provided based on the ultrasonic signal (or the ultrasonic signal / vibration signal according to the motion of the transfer robot) generated when the transfer robot moves.

In addition, it is possible to detect the abnormality of the transfer robot based on the frequency characteristic of the ultrasonic signal generated when the transfer robot moves, and to generate and output alarm information upon detection of an abnormality.

Hereinafter, a method for detecting an abnormality of the transfer robot according to the present invention will be described in detail with reference to FIGS. 1 to 3. FIG.

2 is a flowchart illustrating a method of detecting an abnormality of a transfer robot according to an embodiment of the present invention.

First, the ultrasonic sensor unit 100 detects an ultrasonic signal (or a vibration signal) generated at a position (for example, a joint) where a plurality of components included in the transfer robot are connected to each other ).

For example, when an arbitrary transfer robot moves (or moves), the ultrasonic sensor unit 100 detects an ultrasonic signal generated in the joint according to movement (or movement) of the joint included in the transfer robot, An ultrasonic signal generated in an arbitrary bearing interconnecting the included arms, an ultrasonic signal generated in a speed reducer included in the transfer robot, an ultrasonic signal generated in a rotary shaft of a drive motor included in the transfer robot, An ultrasonic signal generated in the linear motor block, an ultrasonic signal generated in a lead screw included in the transfer robot, an ultrasonic signal generated in a fan included in the transfer robot, and an ultrasonic signal generated in a rotary shaft of a vacuum pump included in the transfer robot Ultrasonic signals and the like are measured (S210).

Then, the control unit 300 calculates a frequency analysis value, a deviation analysis value (or a deviation analysis value for the ultrasonic signal), an RMS value (or an RMS value) of the input signal based on the ultrasonic signal measured through the ultrasonic sensor unit 100 (Difference value between the RMS value of the input / ultrasonic signal and the RMS value of the reference signal set in advance), the number of abnormal signals, the maximum signal difference, the number of abnormal signals, the channel / measurement (Or confirms) the difference, the hit ratio, the abnormal signal frequency, and the like.

In addition, the control unit 300 may calculate the RMS value of the reference signal, the calculated one or more pieces of information (e.g. frequency analysis value, deviation analysis value, RMS value of input signal, delta RMS value, The number of abnormal signals, the channel / measurement cycle, the hit ratio, the abnormal signal frequency, etc.) through the display unit 400 and / or the audio output unit 500.

For example, the control unit 300 may calculate a frequency analysis value, a deviation analysis value, an RMS value of an input signal, a delta RMS value, an abnormal signal number, a signal maximum value, and the like based on the ultrasonic signal measured through the ultrasonic sensor unit 100 Difference of the number of abnormal signals, channel / measurement count, hit ratio, abnormal signal frequency, and the like.

3, the control unit 300 may include a graph 610 of the calculated frequency analysis value, a graph 620 of the calculated deviation analysis value, and a graph 620 of the computed variation analysis value, The RMS value 630 of the reference signal 640, the calculated delta RMS value 650, the calculated abnormal signal number 660, the calculated signal maximum difference 670, The calculated signal ratio 680, the calculated channel / measurement ratio 690, the calculated hit ratio 700, the calculated ideal signal frequency 710, and the like are displayed on the display unit 300 at step S220.

The control unit 300 then stores the ultrasound signals measured through the ultrasound sensor unit 100 and the ultrasound signals stored in the storage unit 200 in correspondence with corresponding components of the transfer robot at the positions where the ultrasound signals are measured (Or determines) an abnormality of a corresponding component of the transfer robot measuring the ultrasonic signal through comparison with a reference signal (or a reference frequency). At this time, the controller 300 amplifies the measured ultrasound signal to the level necessary for analyzing (or analyzing) the ultrasound signal measured through the ultrasound sensor unit 100, or amplifies the noise included in the measured ultrasound signal (Or separates signal bands generated according to the operation of the transfer robot among the measured ultrasonic signals and removes noise signals included in the separated ultrasonic signals (or removes noise signals included in the separated ultrasonic signals from the separated ultrasonic signals The ultrasonic signal obtained by removing the noise signal included in the separated ultrasonic signal in order to extract only a substantial source signal generated according to the ultrasonic signal and the reference signal is compared with the reference signal, The presence or absence of an abnormality of the sensor can be confirmed.

For example, when the frequency characteristic of the ultrasonic signal of the linear motor block included in the transfer robot is normal (or set) in the storage unit 200 in relation to the linear motor block, It is checked whether or not the linear motor block is within the frequency characteristic range of the linear motor block and whether or not the linear motor block constituting the transfer robot is abnormal.

In another example, the control unit 300 may be configured to determine, from among a plurality of frequency characteristic ranges (for example, a normal range, a check range, a maintenance range, etc.) stored in advance in the storage unit 200 in relation to the linear motor block, It is checked in which frequency characteristic range the frequency characteristic of the ultrasonic signal of the linear motor block is included (S230).

If an abnormality is detected in the corresponding component of the corresponding transfer robot, the controller 300 generates an alarm signal (or alarm information) including information on the corresponding component of the transfer robot detected as an abnormality do.

The control unit 300 also outputs the generated alarm signal through the display unit 400 and / or the audio output unit 500.

For example, if the frequency characteristic of the ultrasonic signal of the linear motor block included in the transfer robot (or the frequency characteristic of the ultrasonic signal of the linear motor block from which the noise is removed) is stored in the storage unit 200 The linear motor block corresponding to the measured position of the ultrasonic signal is judged to be abnormal when it is not within the frequency characteristic range of the linear motor block at the time of operation, And outputs the generated alarm signal through the display unit 400 and / or the sound output unit 500. [0035]

As a result of the above determination, among the plurality of frequency characteristic ranges (for example, the normal range, the inspection range, the maintenance range, etc.) stored in advance in the storage unit 200 in association with the linear motor block, When the frequency characteristic of the ultrasonic signal of the motor block is within the normal range, the controller 300 determines that there is no abnormality in the linear motor block and generates steady state information (or a steady state signal) And outputs the generated steady state information through the display unit 400 and / or the audio output unit 500.

As a result, it is possible to determine, among the plurality of frequency characteristic ranges (for example, the normal range, the inspection range, the maintenance range, etc.) stored in advance in the storage unit 200 with respect to the linear motor block, When the frequency characteristic of the ultrasonic signal of the linear motor block is included in the inspection range, the controller 300 determines that the linear motor block needs to be inspected, And outputs the generated check state information through the display unit 400 and / or the audio output unit 500. [0050] FIG.

As a result, it is possible to determine, among the plurality of frequency characteristic ranges (for example, the normal range, the inspection range, the maintenance range, etc.) stored in advance in the storage unit 200 with respect to the linear motor block, When the frequency characteristic of the ultrasonic signal of the linear motor block is included in the maintenance range, the controller 300 determines that maintenance for the linear motor block is necessary, and outputs maintenance state information (or a maintenance state signal And outputs the generated maintenance status information through the display unit 400 and / or the audio output unit 500 (S240).

As described above, in the embodiment of the present invention, various information related to the operation state of the transfer robot is generated based on the ultrasonic signal (or the ultrasonic signal / vibration signal according to the movement of the transfer robot) generated when the transfer robot moves So that the operation period of the expensive transfer robot is extended and the management efficiency of the entire system is improved.

As described above, the embodiment of the present invention detects the presence or absence of an abnormality of the transfer robot based on the frequency characteristics of an ultrasonic signal generated when the transfer robot moves, generates and outputs alarm information when an abnormality is detected, There is an effect of improving convenience in use.

The present invention may be embodied in many other specific forms without departing from the spirit or essential characteristics thereof. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas within the scope of equivalents should be construed as falling within the scope of the present invention.

10: Detecting abnormality of transfer robot
100: ultrasonic sensor unit 200:
300: control unit 400: display unit
500: Audio output unit

Claims (10)

An abnormality detection apparatus for a transfer robot,
An ultrasonic sensor unit directly attached to the transfer robot or installed adjacent to the transfer robot and measuring an ultrasonic signal generated when the transfer robot moves; And
The RMS value, the delta RMS value, the abnormal signal number, the signal maximum difference, the abnormal signal number difference, the channel / measurement order, and the hit ratio (hit) are calculated based on the measured ultrasonic signals, -ratio) and an abnormal signal frequency,
Wherein the frequency analysis value represents a result of analyzing a frequency characteristic of the ultrasonic signal, the deviation analysis value represents a deviation of the ultrasonic signal, and the RMS value of the ultrasonic signal is an angular frequency Wherein the delta RMS value represents a difference between an RMS value of the ultrasonic signal and an RMS value of a reference signal, an RMS value of the reference signal represents a reference value of the ultrasonic signal, The number of frequencies of the reference signal and the frequency of the ultrasonic signal are compared with each other to indicate the frequency of the frequency of the ultrasonic signal located above the frequency of the reference signal, Frequency, and the signal maximum difference The difference of the RMS value between the frequency of the reference signal and the frequency of the abnormal signal among frequencies of the abnormal signal is a maximum value and the abnormal signal number difference is a difference between the number of abnormal signals of the reference signal and the number of the abnormal signals inputted Wherein the channel / measurement cycle represents a currently displayed channel and cumulative measurement frequency in a total channel of the transmitter, and the hit ratio is a value calculated based on the delta RMS value, the number of abnormal signals, Wherein the abnormal signal frequency represents a frequency of the abnormal signal.
delete The method according to claim 1,
The ultrasonic sensor unit comprises:
Wherein when the transfer robot moves, an ultrasonic signal generated in the bearing in accordance with movement of a bearing connecting the ultrasonic signal generated in the joint and the arm included in the transfer robot in accordance with movement of the joint included in the transfer robot, An ultrasonic signal generated in the speed reducer in accordance with the movement of the speed reducer included in the transfer robot, an ultrasonic signal generated in the rotary shaft of the drive motor in accordance with the movement of the rotary shaft of the drive motor included in the transfer robot, An ultrasonic signal generated from the lead screw in accordance with movement of an ultrasonic signal generated in the linear motor block and a lead screw included in the transfer robot according to movement of the linear motor block, Ultrasonic signals and phase Abnormality detection device of the transfer robot, characterized in that for measuring at least one of an ultrasonic signal generated in the rotating shaft of the vacuum pump in response to the movement of the axis of rotation of the vacuum pump contained in the transfer robot.
delete The method according to claim 1,
Wherein,
The ultrasonic signal is measured based on a reference signal stored in advance in a storage unit corresponding to a component of the transfer robot at a position where the measured ultrasonic signal and the ultrasonic signal are measured, The abnormality detecting unit detects the abnormality of the transfer robot.
A method for detecting an abnormality of a transfer robot,
Measuring an ultrasonic signal generated when the transfer robot is moved through an ultrasonic sensor unit directly attached to the transfer robot or installed adjacent to the transfer robot;
A deviation analysis value, an RMS value for the ultrasonic signal, a delta RMS value, an abnormal signal number, a signal maximum difference, an abnormal signal number difference, a channel / measurement error, and a channel / measurement error based on the measured ultrasonic signal, Calculating at least one of a hit ratio and an abnormal signal frequency; And
A display unit for displaying the frequency analysis value, the deviation analysis value, the RMS value for the ultrasonic signal, the delta RMS value, the abnormal signal number, the signal maximum difference, the abnormal signal number difference, the channel / measurement order, And displaying a frequency,
Wherein the frequency analysis value represents a result of analyzing a frequency characteristic of the ultrasonic signal, the deviation analysis value represents a deviation of the ultrasonic signal, and the RMS value of the ultrasonic signal is an angular frequency Wherein the delta RMS value represents a difference between an RMS value of the ultrasonic signal and an RMS value of a reference signal, an RMS value of the reference signal represents a reference value of the ultrasonic signal, The number of frequencies of the reference signal and the frequency of the ultrasonic signal are compared with each other to indicate the frequency of the frequency of the ultrasonic signal located above the frequency of the reference signal, Frequency, and the signal maximum difference The difference of the RMS value between the frequency of the reference signal and the frequency of the abnormal signal among frequencies of the abnormal signal is a maximum value and the abnormal signal number difference is a difference between the number of abnormal signals of the reference signal and the number of the abnormal signals inputted Wherein the channel / measurement cycle represents a currently displayed channel and cumulative measurement frequency in a total channel of the transmitter, and the hit ratio is a value calculated based on the delta RMS value, the number of abnormal signals, Wherein the abnormal signal frequency represents a frequency of the abnormal signal.
delete The method according to claim 6,
Wherein the step of measuring an ultrasonic signal generated when the transfer robot moves comprises:
Wherein when the transfer robot moves, an ultrasonic signal generated in the bearing in accordance with movement of a bearing connecting the ultrasonic signal generated in the joint and the arm included in the transfer robot in accordance with movement of the joint included in the transfer robot, An ultrasonic signal generated in the speed reducer in accordance with the movement of the speed reducer included in the transfer robot, an ultrasonic signal generated in the rotary shaft of the drive motor in accordance with the movement of the rotary shaft of the drive motor included in the transfer robot, An ultrasonic signal generated from the lead screw in accordance with movement of an ultrasonic signal generated in the linear motor block and a lead screw included in the transfer robot according to movement of the linear motor block, Ultrasonic signals and phase Method detects abnormality of the transfer robot, characterized in that in response to the movement of the axis of rotation of the vacuum pump, measuring at least one of the ultrasonic signal generated in the rotating shaft of the vacuum pump contained in the transfer robot.
delete The method according to claim 6,
And a control unit for controlling the ultrasonic signal based on the measured reference ultrasonic signal and the reference signal stored in advance in the storage unit corresponding to the component of the transfer robot at the measured position of the ultrasonic signal, Checking whether there is an abnormality in a component of the robot;
Generating an alarm signal including information on a component of the transfer robot when an abnormality occurs in a component of the transfer robot corresponding to a position where the ultrasonic signal is measured; And
And outputting the generated alarm signal through the display unit.
KR20140063340A 2014-05-26 2014-05-26 Apparatus for detecting abnormality of transfer robot and method thereof KR101469737B1 (en)

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN114434496A (en) * 2022-01-19 2022-05-06 山东新一代信息产业技术研究院有限公司 Assistant robot for detecting performance of robot

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100029338A (en) * 2008-09-08 2010-03-17 하주영 System for diagnostication of transformer using ultrasonic wave
KR101265535B1 (en) * 2013-01-09 2013-05-20 주식회사 썬닉스 Monitoring apparatus and method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100029338A (en) * 2008-09-08 2010-03-17 하주영 System for diagnostication of transformer using ultrasonic wave
KR101265535B1 (en) * 2013-01-09 2013-05-20 주식회사 썬닉스 Monitoring apparatus and method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114434496A (en) * 2022-01-19 2022-05-06 山东新一代信息产业技术研究院有限公司 Assistant robot for detecting performance of robot

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