KR101446324B1 - Management system for pipe of the process of semiconductor and method thereof - Google Patents

Abstract

The present invention relates to a semiconductor process pipe management system and a pipe management method, which can simplify maintenance work and history management of a pipe installed in a semiconductor process without affecting a semiconductor process through smart terminal means.
Generally, the pipe management of the semiconductor process is carried out by the person in charge using the drawing of the process line design of the factory where the semiconductor process line is installed. However, it is difficult to confirm whether the facilities are properly designed and properly installed at the time of plant construction. When the equipment is replaced with old equipment, the change history is not managed.
In the present invention, VR image and pipe facility information is registered in a database for a pipe of a semiconductor process line, and VR image confirmation and equipment information of each pipe are confirmed through smart terminal means of a semiconductor process manager based on the database information In addition, it is possible to register and manage the information generated during the maintenance of the semiconductor process line through the smart terminal means of the manager as equipment history information, thereby making it possible to cope with the semiconductor process quickly without affecting the semiconductor process even in an urgent situation And to provide a process pipe management system.

Description

TECHNICAL FIELD [0001] The present invention relates to a semiconductor process pipe management system and a pipe management method,

The present invention relates to a semiconductor process pipe management system and a pipe management method, which can simplify maintenance work and history management of a pipe installed in a semiconductor process without affecting a semiconductor process through smart terminal means.

2. Description of the Related Art Generally, a semiconductor manufacturing process includes a FAB (Fabrication) process for forming a pattern on a wafer, and an assembly process for cutting and assembling the wafer with a semiconductor chip.

Various types of pipes are installed for various kinds of processing in the semiconductor manufacturing process. Particularly, in the FAB process, a large number of complicated and various types of pipes are installed in the factory for the chemical treatment process.

In the FAB process, many kinds of gases to be used as washing, etching, drying, and various resin solvents for wafers are simultaneously used.

The gases used in this process are separated and used simultaneously in the semiconductor process. These gases are colorless and odorless, and include many gases that are fatal when exposed to the human body, The worker will be seriously injured, and if the gas is leaked, the whole semiconductor process will be stopped, resulting in a lot of economic loss.

Therefore, the management of the pipes handling the gas in the semiconductor manufacturing process can be very important.

Semiconductor processing lines are interconnected by a room and a room, with each of a plurality of independent units being spaced apart from the production line at a predetermined distance, Many such devices are interconnected so that they can be supplied by pipes, which makes it difficult to quickly locate and take care of the location of the pipe if gas leakage and maintenance are required, and it is also difficult to maintain and maintain the pipe on a regular basis.

Generally, the pipe management of the semiconductor process is carried out by the person in charge using the drawing of the process line design of the factory where the semiconductor process line is installed.

However, it is difficult to confirm whether the facilities are properly designed and properly installed at the time of plant construction. When the equipment is replaced with old equipment, the change history is not managed.

In addition, there is a high possibility that the history of the maintenance company change is lost, and it is difficult to find the problem point in case of an accident, so that it is difficult to cope with maintenance and accidents. If the facility data is not systematically managed, , Security problems can arise. In other words, there is no way to change facilities or to manage them directly on site.

In this way, there are many problems such as poor accuracy of the drawing and poor practicality, and the reliability of the drawings is influenced by the experience of the person in charge. Since the history management of the pipe is not carried out, There is a serious error in the length of the material, so unnecessary cost consumption as well as a long maintenance time are consumed.

In the present invention, VR image and pipe facility information is registered in a database for a pipe of a semiconductor process line, and VR image confirmation and equipment information of each pipe are confirmed through smart terminal means of a semiconductor process manager based on the database information In addition, it is possible to register and manage the information generated during the maintenance of the semiconductor process line through the smart terminal means of the manager as equipment history information, thereby making it possible to cope with the semiconductor process quickly without affecting the semiconductor process even in an urgent situation And to provide a process pipe management system.

Also, in establishing the VR image with respect to the pipe of the semiconductor process line, 3D scan data of each pipeline is obtained by setting a zone and using a 3D laser scanner for each zone, and at a position where 3D scan data can not be obtained, The present invention provides a semiconductor process pipe management system that can easily produce a VR image without affecting a semiconductor process in constructing data for VR image production.

The semiconductor process pipe management system of the present invention includes a VR image production server that processes pipe information to create and manage VR (Virtual Reality) image information and pipe facility information to be provided through smart terminal means, VR image information and pipe facility information of the pipe manufactured by the VR image production server according to a request of the smart terminal device and registers and provides maintenance information of the pipe from the smart terminal means as facility history information of the pipe information A VR image management database in which VR production information including pipe data for producing VR image information of the pipe, manufactured VR image information, registered pipe facility information, and design drawing information is stored and managed; , Facility history information, and inquiry management information is stored and managed in the VR service database Smart terminal means connected to the pipe information server and equipped with a pipe information application program for retrieving information of pipes and information of VR images provided by a pipe information server, And a VR producer terminal means provided with a VR production program for registering VR image production and pipe facility information in accordance with a process provided by the VR producer terminal.

According to another aspect of the present invention,

A VR image production process for producing a VR image of a semiconductor process line and a pipe facility information database and accessing the requested VR image or pipe information by confirming the user class of the registered user information according to the VR image or pipe information request A pipe information providing process for providing a VR image or pipe information when the user is a connectable user and a facility history information registration request according to a maintenance request; if the user is a registerable user, A pipe information management process for providing historical information registration means and registering and managing facility details information of the registered maintenance information, the pipe information providing process, and the service details of the pipe information management process, and the user information using the registration history information, And an inquiry management process. It shall be.

According to the present invention, in a region where 3D laser scan data and 3D laser scan can not be performed on pipes of a semiconductor manufacturing process line, 3D image pickup data is collected to produce a VR image.

According to the present invention, the manager can confirm each relationship of the pipe using the VR image of each process through the smart terminal means, and can confirm the facility information and the facility history information of each pipe, It is easy to manage and it is possible to cope with accidents without any influence on the semiconductor process.

In particular, by continuously managing facility history information, it is possible to easily perform maintenance work even if it differs from the facility information at the time of initial construction, and thus precise facility management is possible.

1 is a block diagram showing a schematic configuration of a semiconductor process pipe management system according to the present invention;
2 is a block diagram showing a detailed configuration of a VR image production server and a pipe information server according to the present invention.
3 is a diagram showing a configuration for collecting 3D data of a semiconductor process line in a VR image production process according to the present invention.
FIG. 4 is a flowchart illustrating a VR image production process and a pipe facility information registration process performed by the pipe information server from data collection for VR image production according to the present invention. FIG.
5 to 7 are flow charts showing a pipe management method in a semiconductor process pipe management system according to the present invention, wherein FIG. 5 is a flow chart showing a VR production process, FIG. 6 is a flow chart showing pipe information FIG. 7 is a flow chart showing a process of managing equipment history information in maintenance; FIG.

The structure and operation of the semiconductor process pipe management system of the present invention will be described with reference to the embodiments shown in FIGS. 1 to 7. FIG.

A VR image production server 100 that processes the registered pipe information and produces and manages VR (Virtual Reality) image information and pipe facility information to be provided through the smart terminal means 500, a connected smart terminal means 500, VR image information and pipe facility information of the pipe manufactured by the VR image production server 100 in accordance with a request of the smart terminal means 500 and provides maintenance information of the pipe from the smart terminal means 500 to the facility history information of the pipe information And the VR production information including the pipe data for manufacturing the VR image information of the pipe, the created VR image information, the registered pipe facility information, and the design drawing information are stored and managed A VR service database 400 in which service management information including connection approval information, equipment history information, and inquiry management information is stored and managed; A smart terminal means 500 connected to the information server 200 and having a program for searching information of a pipe provided by the pipe information server 200 and confirming VR image information, And a VR producer terminal unit 600 having a VR production program for registering VR image production and pipe facility information according to a process provided by the VR image production server 100 when the connection approval is made, .

The VR image production server 100 provides a pipe data item in the factory required for VR image conversion to the VR producer terminal means 60 and data management means 110 for registering and managing pipe data registered according to each item A QR code generating means 120 for generating information to be contained in the QR code based on the data registered through the data managing means 110 and outputting QR code print output information, The data conversion means 130 for converting the registration data of the registered pipe into the VR data and registering the same in the VR image management database 300 and the VR creator terminal means 600 for the VR image production and pipe facility information registration request The data management means 110 in the VR image production server 100, the code generation means and the data conversion means 130 are controlled to register data for VR image production, Converting the data is configured to include a VR production control means 140 for controlling a process of making the VR image.

The pipe information server 200 includes a connection approval means 210 for controlling access to the smart terminal means 500 and the VR producer terminal means 600 connected according to the connection approval information and for accessing the pipe information, A VR image service means 220 for providing a VR image registered in response to a request of the smart terminal means 500 through the smart terminal means 500; A pipe information providing means 230 for providing history information; means for providing maintenance information in accordance with a request of the user who has been granted access; a pipe for registering maintenance information registered as facility history information of the pipe; Management means 240, service history management means 250 for registering and managing user information and service history information which are connected and provided with services, user approval Security management means (260) for providing a means for the administrator to register and manage the access management information of the registered registration management information and the registered pipe information, and a security management means (260) for approving the access requested user, To provide pipe information and VR video service
A service control means for controlling and managing the connection acknowledging means 210, the video service means 220, the pipe information providing means 230, the pipe managing means 240 and the security managing means 260 in the pipe information server 200; (270).

The semiconductor process pipe management system according to the present invention having such a configuration collects data for providing VR service to a pipe in a semiconductor process to construct pipe information and VR image information, And the VR image information.

A VR image production server 100 for building pipe facility information and VR image information, pipe facility information and VR image information constructed through the VR image production server 100, and data generated by maintenance A VR image management database 300 configured to register and manage data generated by the VR image production server 100 and the pipe information server 200, and a pipe information server 200 to manage the facility information, And a VR service database 400.

The terminal means of the user will be described as a smart terminal means 500 such as a tablet PC or a smart phone and a VR production terminal means 600 of a portable or personal computer such as a notebook .

The smart terminal means 500 is provided with a pipe information application program (app) that provides process means for inquiring facility information of pipe information and viewing VR images. The pipe information application program further includes equipment history management process means for registering information at the time of maintenance of the pipe.

When the pipe information application program scans the QR code and confirms the QR code, the pipe information application program displays and provides the information contained in the QR code, and also requests the pipe information server 200 to send the VR image and pipe information to the pipe And providing the automatic pipe information providing mode as an option to allow the user to set the automatic pipe information providing mode.

The VR production terminal unit 600 provides a process means provided from the VR image production server 100 to create a VR image to be provided to the smart terminal unit 500, A VR production program may be installed so that a video can be produced.

The VR production program may further include a pipe facility information registration process for providing a process means provided from the VR image production server 100 to allow a user to register pipe facility information.

The VR image production server 100 includes means for producing a VR image for providing pipe information of a semiconductor process line as a VR image through the smart terminal means 500. The VR image production server 100 also includes means for registering facility information of a pipe installed in the semiconductor process line.

The data management means 110 is a means for providing VR image production and pipe facility information. The data management means 110 generates data for VR image production and pipe facility information registration according to the user's VR image production or pipe facility information registration request. Provide means for registering and providing items necessary for input.

(A) to obtain 3D data necessary for VR image production. A method using a laser, (b). Method using radar, (c). A method using an RF signal, and (d). A method using photograph data, and the like can be applied. In the present invention, a method based on the above-described method using the 3D laser will be described as an embodiment.

The data management unit 110 includes a zone management unit 111 for setting lines in a semiconductor factory to be divided into zones required for data management and a 3D scan data management unit for registering and managing data scanned by the 3D laser scanner 112), and a pipe facility information management unit (113) for registering and managing facility information for each pipe set for each zone.

The zone management unit 111 provides a means for the user to define zones for the entire semiconductor process. The zone management unit 111 provides all the semiconductor process line drawing information and allows the user to distinguish the zones by considering the VR image production unit and the pipe facility information registration unit.

The 3D scan data management unit 112 provides means for registering data scanned by a 3D laser scanner for each zone and manages 3D scan data registered through the VR creator terminal unit 600.

The pipe facility information management unit 113 provides an input information item and a registration means so that the user can register the facility information for each pipe in each zone and manages the pipe facility information registered through the VR producer terminal unit 600 do.

The QR code generation means 120 of the VR image production server 100 is means for generating code information to be attached to the pipe on the basis of the pipe facility information registered in the pipe facility information management section 113, And a QR code printout information generating means for printing the created QR code.

The QR code includes the pipe serial number and pipe facility information.

The data conversion unit 130 is a unit for providing the process of converting 3D scan data registered from the 3D scan data management unit 112 into VR data.

The data conversion means 130 provides a process to include pipe serial number information and link information in each pipe entity information of the VR image. This is for providing a pipe information server 200 with pipe selection information to request pipe information when selecting a pipe object in the VR image in the pipe information application program.

Here, the data management unit 110 may further include a photographing data management unit 114. The photographing data management unit 114 provides a means for registering the image data photographed through the 3D panoramic camera with respect to the space in which the 3D laser scanning is impossible and outputs the 3D photographed image data registered through the VR creator terminal unit 600 Management.

With respect to such a configuration, the data conversion unit 130 further includes a process of converting 3D photographed image data into VR data.

The VR production control means 140 provides a process for controlling the means for registering and managing VR image production and pipe facility information.

The pipe information server 200 provides the pipe VR image of the semiconductor process line registered through the VR image production server 100 and the facility information of the pipe and also registers and registers facility history information through the smart terminal means 500 Providing and managing server means.

The connection approval means 210 is a means for controlling and managing access to the VR image production server 100 and the pipe information server 200 to be connected and access to the pipe information, 500 and the VR creator terminal unit 600, and access to the pipe information according to the set user class information.

The VR image service means 220 is a means for providing the registered VR image through the pipe information application program installed in the smart terminal means 500 in response to a request from the smart terminal means 500 that is approved for connection.

The pipe information providing means 230 is means for providing pipe facility information and facility history information at the request of the smart terminal means 500 that is approved for connection.

The pipe management means 240 provides an item for registering maintenance information in response to a request of an access authorized user, and registers and manages the maintenance information registered in accordance with the item as facility history information of the pipe.

The service history management means 250 is a means for registering and managing user information for which the service is provided and service history information for which service is provided, and uses user information and service history information as security information for future semiconductor process lines .

The security management means 260 is a means for registering access approval information and access authorization information, and is set to be manageable by a predetermined security manager. The security management means 260 is configured to manage the user approval information of the manager and the employee And management means for registering and managing access approval information of each registered pipe information.

The service control means 270 provides a process of controlling and managing the means for providing the pipe information of the pipe and the VR image service.

The VR image management database 300 is a means for registering and managing data registered through the VR image production server 100. The VR image management database 300 includes zone information, 3D scan data, 3D image information, pipe facility information, Information.

The zone information is zone information classified by the user through the zone management unit 111.

The 3D scan data is data scanned by the 3D laser registered through the 3D scan data management unit 112.

The 3D image information is data collected from the 3D panorama camera registered through the photographing data management unit 114.

The pipe facility information includes the serial number of the pipe, the type of the pipe, the use purpose, and the pipe direction information as the information registered by the user.

The serial number of the pipe is information for identifying the pipe, and is information designated by the user for each zone or location.

The design drawing information is a design drawing scan information obtained by scanning a design drawing of a semiconductor process line.

The VR service database 400 stores and manages information registered and managed by the pipe information server 200. Connection approval information, equipment history information, and inquiry management information are stored and managed.

The connection approval information is connectable user information, and includes information access class information indicating that the pipe for each zone can be accessed according to the user class.

The inquiry management information is information generated by the service history management unit 250, and includes user information using the service and service history.

The facility history information is information on pipes generated during maintenance, and includes maintenance history information.

The operation of the semiconductor process pipe management system according to the present invention will be described below.

The system of the present invention can provide a VR image to the semiconductor process line through the smart terminal unit 500 of the manager so that the administrator can confirm the pipe by the 3D VR image through the smart terminal unit 300, Check the information or search the pipe to see the VR image.

In order to confirm the VR image service and the pipe information, the VR image and pipe information for the semiconductor process line should be converted into a database.

First, the VR image and pipe information of the semiconductor process line are constructed in the VR image management database 300, and the process thereof will be described briefly as follows.

After confirming the semiconductor process line through on-site inspection, the 3D laser scanner is installed and the semiconductor process line is laser scanned to obtain scan data.

At this time, in the area where the scan data can not be obtained by the 3D laser scanner, the 3D panoramic camera is used to shoot the 3D image.

3 schematically shows a configuration for collecting 3D data of a semiconductor process line.

The 3D laser scan data and the 3D photographed image in all the regions are obtained and then the VR creator terminal unit 600 is connected to the VR image production server 100 to register the obtained data. The data management unit 110 of the VR image production server 100 performs the data registration process necessary for VR image production and displays the 3D scan data And the 3D photographed image are registered.

First, the zone management unit 111 provides zone setting means for dividing the semiconductor process line into zones so that the VR images can be divided. The zone management unit 111 includes a zone setting unit Provides a drawing and allows the user to set the area separately from the drawing of the drawing.

 Then, the user requests to register the 3D scan data and the 3D photographed image for each zone, and registers the data registered by the user in the VR image management database 300.

When all the data are registered in this manner and the completion of data registration is confirmed from the VR creator terminal means 600, the VR production control means 140 causes the data conversion means 130 to acquire 3D data registered in the VR image management database 300 Scan data, and 3D image data into VR data that can be served as a VR image, and registers the VR data in the VR image management database 300.

In addition, the VR production control means 140 provides a process of registering pipe facility information to the user through the pipe facility information management unit 113 of the data management means 110. [ The user registers facility information of the pipe in accordance with the process provided by the pipe facility information management unit 113. [

The facility information of the pipe includes the serial number of the pipe, the kind of the pipe, the use purpose, and the direction information of the pipe.

The pipe facility information management unit 113 provides a design drawing registered in the VR image management database 300 and VR image information for each zone so that a user can select a pipe and register information of the pipe.

On the other hand, the VR production control means 140 provides a process of generating a QR code to be installed in each pipe through the QR code generation means 120 when the pipe information registration from the user is completed.

The QR board generating means 120 generates QR codes in the order of the serial numbers of the registered pipes and generates printing data to be printed out.

The QR information includes the pipe serial number and facility information.

The VR production control means 140 prints out the QR code through the printer connected in accordance with the QR printing data generated by the QR board generation means 120 as described above.

It is possible to output to the printing paper or plain paper which can be easily adhered through the printer as described above, and the QR code can be separately produced by providing the printing data to the manufacturer in the steel or resin stream.

The user constructs the QR code produced as described above in the corresponding pipe.

FIG. 4 is a flowchart illustrating a VR image creation process and a pipe facility information registration process performed by the pipe information server 200 from the collection of data for VR image production, as described above.

Meanwhile, the pipe information server 200 provides the VR image service and pipe information to the smart terminal unit 500 of the manager based on the VR image information and the pipe information constructed in the VR image management database 300 as described above.

The manager can search and confirm the VR image and pipe information for each zone through the pipe information application program installed in the smart terminal means 500. In the pipe information server 200, the connection request of the smart terminal means 500 is confirmed , Access is permitted from the user information registered in the VR service database (400) through the connection approval means (210), the information range that can be provided is set according to the user rating information of the user information, Video and pipe facility information.

The user accesses the pipe information server 200 through the pipe information application program of the smart terminal unit 500 and selects VR images for each zone or searches the pipe facility information to check VR images and pipe information have.

In addition, the pipe serial number information and the link information are included in each pipe of the VR image, and when the pipe is selected, the pipe information application program provides pipe selection information to the pipe information server 200 to request pipe information .

When the pipe information application program scans the QR code and confirms the QR code, the pipe information application program displays and provides the information contained in the QR code, and requests the pipe information server 200 for the VR image and pipe information for the pipe .

That is, the automatic pipe information providing mode may be optionally set to the pipe information application program so as to perform the above-described operation, and the automatic pipe information providing mode may be set when the automatic pipe information providing mode is set.

The user can check the facility information of the pipe without accessing the pipe information server 200 by scanning the QR code installed on the pipe.

The service control means 270 of the pipe information server 200 receives the request for the VR video request and the pipe information as described above to the smart terminal means 200. The VR video service means 220 and the pipe information providing means 230 to provide VR image and pipe information.

If the pipe maintenance is required in the semiconductor process line, the user can confirm the pipe information, perform the maintenance, register the details through the smart terminal means 500, and manage the pipe history information of the pipe have.

When there is a maintenance information registration request from the smart terminal means 500, the service control means 270 controls the pipe management means 240 to perform a facility history information registration process, (500), and registers the maintenance information registered by the user as facility history information.

When maintenance is performed in this way and the facility history information is registered, the service control means 270 sets the confirmation request information for the pipe, and when the predetermined time has elapsed, the administrator who registers the facility history information registers VR image information and pipe When an information request is made, an alarm is provided to the smart terminal means 500 so that the user can confirm maintenance contents once more.

Meanwhile, the service control unit 270 controls the service history management unit 250 to display the service history information and service information such as VR image inquiry, pipe facility information inquiry, pipe pipe history information inquiry and registration process, Is registered as the inquiry management information.

In this way, the user can check the VR image using the smart terminal means 500, confirm the pipe relation of each process, and easily check the facility information and the facility history information of the pipe.

5 to 7 are flow charts showing a pipe management method in the semiconductor process pipe management system according to the present invention. FIG. 5 is a flowchart showing a VR production process. FIG. 6 is a flow chart FIG. 7 is a flow chart illustrating a process of managing equipment history information in maintenance. FIG.

In the semiconductor process pipe management system of the present invention,

A VR image production process for producing a VR image of a semiconductor process line and a pipe facility information database and accessing the requested VR image or pipe information by confirming the user class of the registered user information according to the VR image or pipe information request A pipe information providing process for providing a VR image or pipe information when the user is a connectable user and a facility history information registration request according to a maintenance request; if the user is a registerable user, A pipe information management process for providing historical information registration means and registering and managing facility details information of the registered maintenance information, the pipe information providing process, and the service details of the pipe information management process, and the user information using the registration history information, And a query management process.

When the time set for the pipe in which the confirmation request information is registered has elapsed, an alarm at the time of requesting the VR image information and the pipe information is transmitted to the smart terminal means 500, And a maintenance confirmation process for confirming the maintenance contents.

The VR image production process includes a zone setting process for providing a zone setting means of a semiconductor process line to a user to set a zone of a semiconductor process line according to a VR production process when a user requests a VR production from the user, A 3D data registration step of registering 3D data input by requesting 3D data for each zone after the setting is completed; a VR data conversion step of converting the registered 3D data into VR data when the 3D data registration process is completed, A pipe facility information registration step of requesting the user of pipe facility information for pipes in each zone and registering pipe facility information registered by the user; Generating two-dimensional code information, generating printout information of the two-dimensional code information, It comprises a two-dimensional code generating process for outputting a print output information.

In the zone setting process, the zone setting means provides the registered design drawings and distinguishes each zone using the design drawings.

In the 3D data registration process, the 3D data is composed of 3D laser scan data or 3D panoramic radiography image data.

In the two-dimensional code generation process, the two-dimensional code information is composed of QR code information.

Claims (17)

A VR image production server 100 that processes the registered pipe information and produces and manages VR (Virtual Reality) image information and pipe facility information to be provided through the smart terminal means 500, a connected smart terminal means 500, VR image information and pipe facility information of the pipe manufactured by the VR image production server 100 in accordance with a request of the smart terminal means 500 and provides maintenance information of the pipe from the smart terminal means 500 to the facility history information of the pipe information A pipe information server 200 for registering and managing the pipe information,
A VR image management database 300 storing and managing VR production information including pipe data for producing VR image information of pipes, manufactured VR image information, registered pipe facility information, and design drawing information, A VR service database 400 in which service management information including history information and inquiry management information is stored and managed; information retrieval and VR images of pipes provided by the pipe information server 200 connected to the pipe information server 200; A smart terminal means 500 installed with a pipe information application program for verifying information, a process which is confirmed by requesting connection approval to the pipe information server 200 and provided by the VR image production server 100, And VR producer terminal means 600 equipped with a VR production program for registering VR image production and pipe facility information in accordance with Characterized by a semiconductor process pipe management system.
The VR image production server (100) according to claim 1, wherein the VR image production server (100) provides the in-factory pipe data items required for VR image conversion to the VR producer terminal means (60) and registers and manages the pipe data registered according to each item Code generating means for generating information to be contained in the code based on the data registered through the data managing means 110 and outputting the code printing output information, Data conversion means 130 for converting the registered data of the registered pipe into VR data and registering the registered data in the VR image management database 300 and the VR creator terminal means 600 for the VR image production and pipe facility information registration request , The data management means 110, the code generation means, and the data conversion means 130 to register data for VR image production, pipe facility information registration process, and registered data And a VR production control means (140) for controlling the process of converting the VR image into a VR image.
The apparatus according to claim 1, wherein the pipe information server (200) comprises a connection approval means for controlling access to the smart terminal means (500) and the VR producer terminal means (600) A VR image service means 220 for providing a registered VR image through a smart terminal means 500 in response to a request of the smart terminal means 500, A pipe information providing means 230 for providing pipe facility information and equipment history information, a means for registering maintenance information according to a request of an access authorized user, A pipe management means (240) for registering and managing the pipe information, information for managing the user's approval information of an administrator and an employee for approval of access, and access approval information of each registered pipe information, (200) for providing the pipe information and the VR image service according to the request of the user who has made a connection request for the connection requested user, And a service control means (270) for controlling the service means (220), the pipe information providing means (230), the pipe managing means (240), and the security managing means (260) system.
4. The system according to claim 3, wherein the pipe information server (200) further comprises service history management means (250) for registering and managing user information and service history information provided to the pipe information server (200).
2. The semiconductor process pipe management system according to claim 1, wherein the QR code information is two-dimensional code information generated by the code generation means, and the QR code includes a pipe serial number and pipe facility information.
The system according to claim 1 or 2, wherein 3D data required for VR image production is 3D laser scan data or 3D image data photographed by a 3D panoramic camera.
The data management system according to claim 2, wherein the data management unit (110) comprises: a zone management unit (111) for setting lines in a semiconductor factory to be divided into zones required for data management; And a pipe facility information management unit (113) for registering and managing facility information for each pipe set for each zone.
The VR creator terminal unit (600) of claim 7, wherein the data management unit (110) provides means for registering image data photographed through a 3D panoramic camera with respect to a space in which 3D laser scanning is impossible, And a photographing data managing unit (114) for managing 3D photographed image data. The data converting means (130) further comprises a process of converting 3D photographed image data into VR data. Management system.
3. The semiconductor process pipe management system according to claim 2, wherein the data conversion means (130) further comprises a process of including pipe serial number information and link information in each pipe entity information of the VR image.
The method of claim 1, wherein the pipe facility information includes construction information at the time of designing a pipe registered by the user, and includes serial number, pipe type, use purpose, and pipe direction information, Wherein the design drawing information is design drawing scan information obtained by scanning a design drawing of a semiconductor process line, wherein the design drawing information is information designated by a user for each zone or location.
4. The method of claim 1 or 4, wherein the access authorization information of the VR service database (400) is connectable user information, and includes information access class information indicating that access to each pipe is made according to a user class and,
The inquiry management information is information generated by the service history management unit 250 of the pipe information server 200, and includes user information and service history information using the service, and the facility history information is maintained And information on the pipe generated at the time of maintenance, and includes maintenance history information.
The pipe information application program according to claim 2 or 5, wherein when the QR code is scanned and the QR code is code information, the pipe information application program displays and provides the information contained in the QR code, And process means for optionally providing an automatic pipe information providing mode for requesting the pipe information server (200) for pipe information, and for allowing the user to set the automatic pipe information providing mode.
A VR image production process for producing a VR image of a semiconductor process line and a pipe facility information database and accessing the requested VR image or pipe information by confirming the user class of the registered user information according to the VR image or pipe information request A pipe information providing process for providing a VR image or pipe information when the user is a connectable user and a facility history information registration request according to a maintenance request; if the user is a registerable user, A pipe information management process for providing historical information registration means and registering and managing facility details information of the registered maintenance information, the pipe information providing process, and the service details of the pipe information management process, and the user information using the registration history information, And an inquiry management process. Semiconductor process pipe management method as.
The method as claimed in claim 13, further comprising the steps of: setting confirmation request information in the pipe information of the pipe registered in the facility details information, and when the time set for the pipe in which the confirmation request information is registered passes, And a maintenance confirmation step of providing maintenance information to the terminal means so as to confirm maintenance contents.
[14] The method of claim 13, wherein the VR image production process includes providing a zone setting means of a semiconductor process line to a user in accordance with a VR production process when a VR production request is made from a user, A 3D data registration step of registering 3D data to be input by requesting 3D data of each zone after the zone setting is completed; and, when the 3D data registration process is completed, converting the registered 3D data into VR data A pipe facility information registration step of requesting a user of pipe facility information for each pipe in each zone and registering pipe facility information registered by the user; Generates two-dimensional code information to be installed on a star pipe, generates printout information of the two-dimensional code information, Therefore, the semiconductor process pipe management method characterized in that comprises the two-dimensional code generating process for outputting a printing output information.
16. The method of claim 15, wherein the zone setting means in the zone setting process provides means for providing registered design drawings and for distinguishing each zone using design drawings.
16. The method of claim 15, wherein in the 3D data registration process, the 3D data comprises 3D laser scan data or 3D panoramic radiography data.

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