KR101438163B1 - The method for manufacturing haptic feedback generating apparatus using prictional force and vibration generated by electrostatic force and the recording medium thereof - Google Patents

The method for manufacturing haptic feedback generating apparatus using prictional force and vibration generated by electrostatic force and the recording medium thereof Download PDF

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KR101438163B1
KR101438163B1 KR1020130077199A KR20130077199A KR101438163B1 KR 101438163 B1 KR101438163 B1 KR 101438163B1 KR 1020130077199 A KR1020130077199 A KR 1020130077199A KR 20130077199 A KR20130077199 A KR 20130077199A KR 101438163 B1 KR101438163 B1 KR 101438163B1
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electrostatic force
electrodes
tactile feedback
film
vibration
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KR1020130077199A
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Korean (ko)
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김종호
양태헌
김영태
김동기
김민석
박연규
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한국표준과학연구원
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/016—Input arrangements with force or tactile feedback as computer generated output to the user
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

Abstract

The present invention relates to a method to manufacture a haptic feedback generating device by vibration and friction generated by electrostatic force capable of generating a haptic feedback of a horizontal direction using friction generated by the electrostatic force, and generating a haptic feedback of a vertical direction using vibration generated by applying power of a resonant frequency. In the method to manufacture a haptic feedback generating device including an upper film receiving a touch of a first object, a lower film separates from the upper film and an actuator generating the haptic feedback in response to touch. According to an embodiment of the present invention, the method to manufacture the haptic feedback generating device includes: a first step of forming a plurality of lower electrodes on an upper surface of the lower film; a second step of forming a spacer on an upper surface of the lower film to form a gap between the upper film and the lower film; and a third step of attaching the upper film, of which a plurality of upper electrodes inducing the electrostatic force is formed on the lower surface, to an upper surface of the spacer. When an input waveform having a first frequency in a set range is applied from the resonant frequency to at least one of the upper and lower electrodes, the induced electrostatic force is at least one of the first electrostatic force and the second electrostatic force. The first electrostatic force is induced between the upper electrodes and the lower electrodes, the second electrostatic force is induced between the upper electrodes and the first object, and the haptic feedback can be one or both of the friction generated by the second electrostatic force and the vibration generated by the first electrostatic force.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a method of manufacturing a tactile feedback device using friction force and vibration generated by an electrostatic force,

The present invention relates to a method of manufacturing a tactile feedback device, and more particularly, to a tactile feedback device that generates tactile feedback in a horizontal direction by using a frictional force generated by an electrostatic force, And more particularly to a method of manufacturing a tactile feedback generating device capable of generating a tactile feedback in the direction of a tactile feedback.

In general, touch refers to a tactile sensation that can be felt by a person's finger or stylus pen when touching an object, including tactile feedback that the skin touches the object surface and muscular feedback that is felt when movement of the joints and muscles is disturbed Concept.

As human sensory receptors, receptors for mechanical stimulation include Pacinian corpuscle, which senses high-frequency vibrations, Meissner's corpuscle, which senses low-frequency vibrations, Merkel's disc, and Ruffini's ending, which detects the stretch that presses the skin.

Various actuators such as piezo actuators, solenoid actuators, DC / AC motors, server motors, ultrasonic actuators, shape memory alloy ceramic actuators, and electroactive polymer actuators are examples of various tactile presentation devices for stimulating such sensory receptors.

A representative example of the tactile display apparatus is a device for stimulating a pachinian / meister body that detects vibration of a high frequency / low frequency by generating vibration by a vibration motor in accordance with an input of a touch screen in a mobile device.

Meanwhile, the vibration motor (vibration generating module) is a device that is applied to a portable device and transmits a predetermined sensation. In the related art, a vibration sensation is outputted in response to a touch of a touch panel by a user's finger.

The conventional vibration generating module has a problem that a user must use a high operating voltage because vibration must be generated with a strength enough to be recognized by a finger.

In addition, the portable device in which the vibration generating module is frequently used has a tendency to be reduced in size for the sake of convenience, and accordingly, there is a limit in the amount of power that can be supplied.

However, the conventional vibration generating module has a problem of inconvenience when it is applied to such a portable device because of its high power consumption.

Furthermore, the conventional vibration generating module can output only a simple sense of vibration, and it is difficult to control the strength or the interval of vibration, and it is difficult to generate various tactile feedbacks.

Therefore, there is a need to develop a manufacturing method of a tactile feedback generating device that can generate tactile feedback capable of easily adjusting the strength or the interval of vibration while reducing power consumption by using a low operating voltage.

Korea Patent No. 10-0997108 Korean Patent No. 10-1115419

SUMMARY OF THE INVENTION The present invention has been conceived to solve the above-mentioned problems, and it is an object of the present invention to provide a tactile feedback device that generates horizontal tactile feedback using a frictional force generated by an electrostatic force, The present invention provides a method of manufacturing a tactile feedback generating device capable of generating tactile feedback of a tactile feedback device.

Specifically, it is an object of the present invention to provide a method of manufacturing a tactile feedback generating device capable of reducing the power consumed while lowering the operating voltage of the tactile generating device.

It is another object of the present invention to provide a method of manufacturing a tactile feedback generating device that can easily adjust the strength or the interval of tactile feedback.

It is to be understood that both the foregoing general description and the following detailed description of the present invention are exemplary and explanatory and are not intended to limit the invention to the precise form disclosed. It can be understood.

A method of manufacturing a tactile feedback generating device including an upper film receiving a touch of a first object, a lower film disposed apart from the upper film, and an actuator generating tactile feedback corresponding to the touch, A method of manufacturing a tactile feedback generating apparatus according to an example of the present invention for solving one or more problems includes a first step of forming a plurality of lower electrodes on an upper surface of the lower film, A second step of forming a spacer on the upper surface of the lower film to make an upper electrode, and a third step of bonding the upper film formed on the lower surface of the plurality of upper electrodes to the upper surface of the spacer to induce an electrostatic force, An input waveform having a first frequency within a predetermined range is applied to the plurality of upper electrodes and the plurality of lower The electrostatic force induced is at least one of a first electrostatic force and a second electrostatic force and the first electrostatic force is induced between the plurality of upper electrodes and the plurality of lower electrodes, The electrostatic force is induced between the plurality of upper electrodes and the first object, and the tactile feedback may be at least one of the vibration generated by the first electrostatic force and the frictional force generated by the second electrostatic force.

A method of manufacturing a tactile feedback generating device including an upper film receiving a touch of a first object, a lower film disposed apart from the upper film, and an actuator generating tactile feedback corresponding to the touch, According to another aspect of the present invention, there is provided a method of manufacturing a tactile feedback generating apparatus, the method comprising: a first step of forming a plurality of lower electrodes on an upper surface of the lower film; a second step of forming a spacer on the upper surface of the lower film to form a gap, a third step of applying a dielectric substance to the gap, a third step of applying a dielectric force to the upper film, And a fourth step of bonding to the upper surface of the spacer, wherein the first frequency is within a predetermined range from the resonance frequency Wherein when the input waveform is applied to at least one of the plurality of upper electrodes and the plurality of lower electrodes, the induced electrostatic force is at least one of a first electrostatic force and a second electrostatic force, And the second electrostatic force is induced between the plurality of upper electrodes and the first object, and the tactile feedback is induced between the vibration generated by the first electrostatic force and the second electrostatic force And the frictional force generated by the frictional force.

The dielectric material may be at least one of air, water, gel, and polymer.

Forming a coating layer on the upper surfaces of the plurality of lower electrodes to prevent the plurality of upper electrodes and the plurality of lower electrodes from contacting each other by the touch between the first step and the second step .

The plurality of upper electrodes are arranged parallel to each other at a predetermined interval on the lower surface of the upper film, the plurality of lower electrodes are arranged parallel to the upper surface of the lower film at predetermined intervals, Lt; / RTI >

The plurality of upper electrodes and the plurality of lower electrodes may be formed of at least one of copper (Cu) and silver (Ag).

The plurality of upper electrodes and the plurality of lower electrodes are transparent materials, and the plurality of upper electrodes and the plurality of lower electrodes are formed of indium tin oxide (ITO), carbon nanotubes (CNTs) ) And graphene. ≪ / RTI >

The spacer may be formed of at least one of gel, polydimethylsiloxane (PDMS), optically clear adhesive (OCA), double-sided tape, UV material, and polymer bonding material.

Further, the position resolution of the tactile feedback generating device is adjusted corresponding to the interval between the spacers formed in the second step, and the position resolution is a minimum distance of the touch generating the tactile feedback different from each other, The larger the resolution, the smaller the minimum distance of the touch.

Further, the first electrostatic force may be expressed by the following equation

Figure 112013059501288-pat00001
. ≪ / RTI > here,
Figure 112013059501288-pat00002
Is a first electrostatic force,
Figure 112013059501288-pat00003
Is the dielectric constant of vacuum,
Figure 112013059501288-pat00004
Is a dielectric constant,
Figure 112013059501288-pat00005
Is a width of an area where the plurality of upper electrodes and the plurality of lower electrodes overlap,
Figure 112013059501288-pat00006
Is a voltage applied to at least one of the plurality of upper electrodes and the plurality of lower electrodes,
Figure 112013059501288-pat00007
Represents an interval between the plurality of upper electrodes and the plurality of lower electrodes.

Also, when the first object touches the upper film, the frictional force is generated, and the second electrostatic force is expressed by Equation

Figure 112013059501288-pat00008
, And the frictional force is determined using equation
Figure 112013059501288-pat00009
. ≪ / RTI > here,
Figure 112013059501288-pat00010
Is a second electrostatic force,
Figure 112013059501288-pat00011
Is the dielectric constant of vacuum,
Figure 112013059501288-pat00012
Is a dielectric constant,
Figure 112013059501288-pat00013
Is the area of the area where the plurality of upper electrodes overlap with the first object,
Figure 112013059501288-pat00014
Is a voltage applied to the plurality of upper electrodes,
Figure 112013059501288-pat00015
Represents an interval between the plurality of upper electrodes and the first object,
Figure 112013059501288-pat00016
Is a frictional force,
Figure 112013059501288-pat00017
Is a coefficient of friction,
Figure 112013059501288-pat00018
Represents a second electrostatic force.

Further, the resonance frequency is expressed by the following equation

Figure 112013059501288-pat00019
. ≪ / RTI > here,
Figure 112013059501288-pat00020
Is the resonant frequency of the actuator,
Figure 112013059501288-pat00021
Wherein the temporal sensitivity of the person is indicative of a temporal acuity of the human being when the tactile feedback by the vibration has two stimuli so as to recognize the two stimuli as two outputs, It is the minimum time that must be separated.

Further, the vibration is a waveform having a plurality of magnetic poles within the temporal sensitivity time of the person, and the vibration having the waveform can be recognized as one output.

Further, the waveform includes a plurality of waveforms, and the time interval between the plurality of waveforms

Figure 112013059501288-pat00022
The period of the output recognized by the vibration can be adjusted.

Further, the period of the output recognized by the vibration is expressed by Equation

Figure 112013059501288-pat00023
. ≪ / RTI > here,
Figure 112013059501288-pat00024
Is a period of an output recognized by the user due to the vibration,
Figure 112013059501288-pat00025
Is the temporal sensitivity of man,
Figure 112013059501288-pat00026
Represents a time interval between the plurality of waveforms.

Further, it is possible to adjust the intensity of the output recognized by the vibration by adjusting at least one of the number of the plurality of magnetic poles and the first frequency within the temporal susceptibility time.

The tactile feedback by the frictional force is generated in a direction parallel to the surface of the first object touching the upper film, and the tactile feedback by the vibration may be generated in a direction perpendicular to the upper film.

The input waveform may be applied to the plurality of upper electrodes, and ground electrodes may be connected to the plurality of lower electrodes, so that the vibration generated by the first electrostatic force and the frictional force generated by the second electrostatic force Can be used together.

The second electrostatic force may be decreased when the ground electrode is connected to the plurality of upper electrodes and the input waveform is applied to the plurality of lower electrodes, The frictional force generated by the second electrostatic force can be reduced.

Also, the second electrostatic force may be reduced corresponding to the thickness of the upper film formed to be thick, and the frictional force generated by the second electrostatic force may be reduced corresponding to the reduced second electrostatic force.

On the other hand, a program of instructions executable by the digital processing apparatus is implemented tangibly to carry out the method of manufacturing the tactile feedback generating apparatus according to an example of the present invention for realizing the above-mentioned problems, A tactile feedback device comprising: an upper film for receiving a touch of a first object; a lower film disposed apart from the upper film; and an actuator for generating tactile feedback corresponding to the touch, The manufacturing method of the producing apparatus includes a first step of forming a plurality of lower electrodes on the upper surface of the lower film, a step of forming a spacer on the upper surface of the lower film to make a gap between the upper film and the lower film A second step and a plurality of upper electrodes for guiding the electrostatic force, And a third step of adhering to the upper surface of the spacer, wherein when an input waveform having a first frequency that is within a predetermined range from the resonance frequency is applied to at least one of the plurality of upper electrodes and the plurality of lower electrodes, Wherein the electrostatic force is at least one of a first electrostatic force and a second electrostatic force, the first electrostatic force being induced between the plurality of upper electrodes and the plurality of lower electrodes, and the second electrostatic force being transmitted between the plurality of upper electrodes and the first object And the tactile feedback may be at least one of a vibration generated by the first electrostatic force and a friction generated by the second electrostatic force.

In addition, a program of instructions executable by the digital processing apparatus to perform the method of manufacturing the tactile feedback generating apparatus related to another example of the present invention for realizing the above-mentioned problems is tangibly embodied, A tactile sense including an upper film for receiving a touch of a first object, a lower film disposed apart from the upper film, and an actuator for generating a tactile white back corresponding to the touch, A method of manufacturing a feedback generating device includes a first step of forming a plurality of lower electrodes on an upper surface of the lower film, a step of forming a spacer on an upper surface of the lower film to make a gap between the upper film and the lower film A third step of applying a dielectric substance to the gap, and a third step of applying an electrostatic force And a fourth step of bonding the upper film formed on the lower surface of the upper electrode to the upper surface of the spacer, wherein the upper electrode and the upper electrode are formed on the upper surface of the spacer, The induced electrostatic force is at least one of a first electrostatic force and a second electrostatic force and the first electrostatic force is induced between the plurality of upper electrodes and the plurality of lower electrodes, The second electrostatic force is induced between the plurality of upper electrodes and the first object, and the tactile feedback may be at least one of a vibration generated by the first electrostatic force and a friction generated by the second electrostatic force.

The present invention relates to a tactile feedback generating device capable of generating tactile feedback in a horizontal direction by using a frictional force generated by an electrostatic force and generating tactile feedback in a vertical direction by using a vibration generated by applying a power of a resonant frequency Method can be provided to the user.

Specifically, the present invention can provide a method of manufacturing a tactile feedback generating device capable of reducing the power consumed while lowering the operating voltage of the tactile generating device.

In addition, the present invention can provide a tactile generation device and a method of manufacturing the same that can easily adjust the intensity or the interval of tactile feedback.

It should be understood, however, that the effects obtained by the present invention are not limited to the above-mentioned effects, and other effects not mentioned may be clearly understood by those skilled in the art to which the present invention belongs It will be possible.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate a preferred embodiment of the invention and, together with the description, serve to provide a further understanding of the technical idea of the invention, It should not be construed as limited.
FIG. 1 shows an example of a block diagram of a tactile feedback generating apparatus that can be applied to the present invention.
Figures 2a and 2b show one embodiment of a general configuration for measuring touch locations.
3A and 3B show cross-sectional views of a tactile generation device that may be implemented in accordance with one embodiment of the present invention.
4 is a flowchart showing an example of the present invention relating to a method of manufacturing a tactile feedback generating apparatus.
5A to 5E are cross-sectional views showing an embodiment of a manufacturing method of the tactile feedback generating device according to the flowchart of FIG.
6A and 6B show an embodiment showing the shapes of a plurality of upper electrodes and a plurality of lower electrodes.
7 is a diagram for explaining the concept of tactile feedback of the present invention.
8A and 8B illustrate the concept that a frictional force using electrostatic force is generated by tactile feedback in accordance with the present invention.
9 shows an example of a waveform of tactile feedback of vibration generated when an input waveform having a resonance frequency is applied according to the present invention.
Figures 10A-10C illustrate one embodiment of a waveform of vibration that controls vibrotactile feedback, in accordance with the present invention.
11 shows a cross-sectional view of an example of a tactile feedback generating device manufactured according to the present invention.
FIG. 12 shows an example of a block diagram of a portable device to which the tactile feedback generating device manufactured according to the present invention is applied.

Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. In addition, the embodiment described below does not unduly limit the contents of the present invention described in the claims, and the entire configuration described in this embodiment is not necessarily essential as the solution means of the present invention.

Generally, tactile feedback generation devices are widely used in electronic and communication devices indispensable to our daily lives and provide convenience in many areas of life.

However, the conventional haptic generation device has a problem that a high operating voltage should be used and power consumption is relatively large. Further, there is a problem that it is not easy to adjust the intensity or frequency of tactile feedback.

The present invention proposes a manufacturing method of a tactile feedback generating device which can be operated even under a low operating voltage and is suitable for a portable device because of low power consumption. Furthermore, a method of manufacturing a tactile feedback generating device capable of generating various tactile feedbacks is proposed.

<Tactile feedback generating device>

Hereinafter, a tactile feedback generating apparatus manufactured by the present invention will be described in detail.

1 shows an example of a block diagram of a tactile feedback generating apparatus that can be manufactured according to the present invention.

The tactile feedback generating apparatus 10 that may be used in the present invention may include a controller 300, an actuator 400, and the like. However, the components shown in FIG. 1 are not essential, so that a tactile generation device having more or fewer components may be implemented.

Hereinafter, the components will be described in order.

The control unit 300 typically controls the overall operation of the tactile feedback generating apparatus 10 of the present invention. For example, touch sensing of a predetermined object such as a person's finger or a stylus, signal generation for tactile feedback output, and the like.

The controller 300 may include a sensor unit 310, a signal generator 320, and the like. However, it is also possible to implement the control unit 300 having more or fewer components.

The sensor unit 310 may detect a predetermined object touching a part of the entire area of the upper film of the tactile feedback generating apparatus 10. [

Further, when the capacitance between the upper electrode and the lower electrode changes due to the touch of the predetermined object, the sensor unit 310 can detect the changed capacitance and can detect the touch position of the predetermined object using the capacitance have.

The sensor unit 310 senses a change in the first capacitance and can measure the position of the first region using the change.

Reference is made first to Figs. 2A and 2B to describe the measurement of the position with respect to the first region by the touch.

Figures 2a and 2b show one embodiment of a general configuration for measuring touch locations. However, the configuration for measuring the touch position in the present invention is not limited to this configuration, but it is also possible to use another touch position measurement method.

2A, a configuration for measuring a touch of a predetermined object includes a first position measuring electrode 3 and a second position measuring electrode 5, which are spaced apart with a dielectric 1 interposed therebetween, .

A voltage is applied to the first position measuring electrode 3 and the second position measuring electrode 5 and a capacitance is formed in the dielectric 1 by the voltage.

When there is a touch input of a predetermined object, a change in the capacitance between the first position measuring electrode 3 and the second position measuring electrode 5 can be induced, and the touch position can be measured by measuring the capacitance .

Referring to FIG. 2B, it is possible to acquire positional information based on the X-axis using the first position measuring electrode 3 and obtain position information based on the Y-axis using the second position measuring electrode 5.

The sensor unit 310 is not necessarily integrated with the control unit 300, and may be implemented separately from the control unit 300.

1, the signal generator 320 may generate an electric signal for outputting tactile feedback when a predetermined object touches the upper film of the tactile feedback generating apparatus 10. [ The electric signal is input to the actuator 400, and the actuator 400 can control the tactile feedback output.

On the other hand, the actuator 400 is a device for outputting tactile feedback such as vibration, frictional force or the like in response to a touch of a predetermined object.

The actuator 400 is connected to the signal generator 320 of the control unit 300 and can receive an electric signal for tactile feedback output of the signal generator 320 and operate the actuator.

In addition, the actuator 400 may output tactile feedback locally only at the position touched by the object.

Hereinafter, the structure of the tactile feedback generating device having the above-described configuration will be described with reference to the drawings.

Figures 3a and 3b show cross-sectional views of a tactile feedback generation device that may be implemented in accordance with one embodiment of the present invention.

3A and 3B, the tactile feedback generating apparatus 10 of the present invention includes a substrate 100, an electrode 200, a coating layer 230, a dielectric substance 240, ) 250 and the like. However, the components shown in Figs. 3A and 3B are not essential, and a tactile feedback generating device having more or fewer components may be implemented.

The substrate 100 may be made of glass, a reinforced polymer substrate, a PI substrate, or the like, and may be made of a transparent material. The substrate 100 includes an upper film 110 and a lower film 120.

A plurality of upper electrodes 210 may be disposed on the lower surface of the upper film 110. The upper electrode 210 may be disposed on the upper surface of the upper film 110,

The electrode 200 may include a plurality of upper electrodes 210, a plurality of lower electrodes 220, and the like.

The plurality of upper electrodes 210 and the plurality of lower electrodes 220 may be made of copper (Cu) or silver (Ag).

The plurality of upper electrodes 210 and the plurality of lower electrodes 220 may be transparent materials such as indium tin oxide (ITO), carbon nanotube (CNT), graphene, Metal nanowires, conductive polymers (PEDOT, poly (3,4-ethylenedioxythiophene)), or transparent conductive oxides (TCO).

Meanwhile, the application layer 230 may be disposed on the plurality of lower electrodes 220 as shown in FIGS. 3A and 3B.

When a predetermined object touches the upper film 110 to apply a force, the coating layer 230 prevents the plurality of upper electrodes 210 and the plurality of lower electrodes 220 from touching each other .

Meanwhile, the dielectric 240 may be disposed in a spaced space between the upper film 110 and the lower film 120. The dielectric 240 may be made of a material having a low rigidity and may be made of any one of air, water, gel, silicone, and polydimethylsiloxane (PDMS).

In addition, a capacitance may be formed in a space where the plurality of upper electrodes 210 of the dielectric 240 and the plurality of lower electrodes 220 overlap. When a predetermined object is touched by touching the upper film 110, the capacitance formed on the dielectric 240 changes, and the sensor unit 310 can sense a change in the capacitance.

On the other hand, the spacer 250 is configured to form a gap between the upper film 110 and the lower film 120 by being adhered to a contact surface with a thermal adhesive tape, a double-sided tape, or the like.

The spacer 250 may be made of an adhesive material and may include at least one of gel, polydimethylsiloxane (PDMS) polymer, optically clear adhesive (OCA), double-sided tape, UV material and polymeric bonding material.

When the spacing between the spacers 250 is widened, the position resolution is degraded. Conversely, when the spacing between the spacers 250 is narrowed, the position resolution is improved.

On the other hand, as shown in FIG. 3A, the lower layer 260 may be disposed on the lower surface of the lower film 120. Alternatively, the upper layer 265 may be disposed on the upper surface of the upper film 110 as shown in FIG. 3B.

The lower layer 260 may include at least one of an LCD (Liquid Crystal Display), an OLED (Organic Light-Emitting Diode), an OLED-based flexible display, and an electronic paper.

The upper layer 265 may be formed of at least one of an LCD (Liquid Crystal Display), an OLED (Organic Light-Emitting Diode), an OLED-based flexible display, and an electronic paper. In this case, the upper layer 265 can receive a touch of an external object.

However, the display means is not limited to the above configuration, and any means that can show the state in which the application is executed can constitute an embodiment of the present invention.

&Lt; Method of manufacturing tactile feedback generating device >

Hereinafter, a method of manufacturing the tactile feedback generating apparatus proposed by the present invention will be described in detail.

4 is a flowchart showing an example of the present invention relating to a method of manufacturing a tactile feedback generating apparatus.

Referring to FIG. 4, a plurality of lower electrodes 220 are formed on the upper surface of the lower film 120 (S100).

The lower film 120 may be made of glass, a reinforced polymer substrate, a PI substrate, or the like, and may be made of a transparent material.

A plurality of lower electrodes 220 may be formed on the upper surface of the lower film 120 so as to be arranged in parallel at predetermined intervals.

Next, a coating layer is formed to prevent the plurality of upper electrodes 210 and the plurality of lower electrodes 220 from contacting each other by the touch of an external object (S200).

Next, at least one spacer 250 is formed on the upper surface of the lower film 120 to form a predetermined gap between the upper film 110 and the lower film 120 (S300).

The spacers 250 are bonded to the contact surfaces between the upper film 110 and the lower film 120 using a thermal adhesive tape, a double-sided tape or the like to form a gap, and a plurality of the spacers 250 may be provided.

The spacer 250 may be made of an adhesive material, and may be formed of at least one of gel, polydimethylsiloxane (PDMS) polymer, optically clear adhesive (OCA), double-sided tape, UV material and polymeric bonding material.

The spacing between the spacers 250 formed in the step S300 may determine the positional resolution of the tactile feedback generating apparatus 10. Here, the position resolution means the minimum distance of the touch that can generate different tactile feedback, and the larger the position resolution is, the smaller the moving distance of the touch that can cause the tactile feedback change.

That is, if the positional resolution is large, the tactile feedback generating apparatus 10 may generate a change in the tactile feedback even if the predetermined object touches the upper film 110 and moves finely.

On the contrary, if the position resolution is small, the same tactile feedback is outputted when the predetermined object moves finely, and when the tactile feedback is somewhat large, the tactile feedback changes.

The tactile feedback generating apparatus 10 manufactured according to the present invention desirably has a large position resolution.

In order to design the positional resolution of the tactile feedback generating apparatus 10 to be large, the spacing between the spacers 250 should be narrow. Conversely, if the spacing between the spacers 250 is large, the positional resolution of the tactile feedback generating apparatus 10 is degraded.

As the rigidity of the upper film 110 is lower, the spacing between the spacers 250 can be narrowed, and the positional resolution of the tactile feedback generating apparatus 10 can be designed to be large. Accordingly, the upper film 110 is preferably made of a material having a low rigidity.

Subsequently, the dielectric 240 is inserted into the gap formed between the upper film 110 and the lower film 120 (S400).

The dielectric 240 may be made of a material having a low rigidity and may be made of any one of air, water, gel, silicone, and polydimethylsiloxane (PDMS).

The step S400 of injecting the dielectric into the gap may be omitted, and it is also possible to manufacture the dielectric-free tactile feedback generating apparatus 10. FIG.

Next, the upper film 110 having the plurality of upper electrodes 210 formed on the lower surface thereof is adhered to the upper surface of the spacer 250 (S500).

The upper film 110 may also be made of glass, a reinforced polymer substrate, a PI substrate or the like, and may be made of a transparent material. An object such as a human finger or a stylus can be touched on the upper surface of the upper film 110 to be touched.

A plurality of upper electrodes 210 may be formed on the lower surface of the upper film 110 and the plurality of upper electrodes 210 may be formed on the lower surface of the upper film 110 at any stage.

The plurality of upper electrodes 210 may be disposed parallel to the lower surface of the upper film 110 at predetermined intervals and may be arranged to cross the plurality of upper electrodes 210.

That is, the plurality of upper electrodes 210 may be spaced apart from each other by a predetermined distance, and the plurality of lower electrodes 220 may be spaced apart from each other by a predetermined distance. The plurality of upper electrodes 210 and the plurality of lower electrodes 220 may be arranged to cross each other at an angle of 90 degrees with respect to one another.

5A to 5E are sectional views showing an embodiment of a method of manufacturing the tactile feedback generating device according to the flowchart of FIG.

First, referring to FIG. 5A, a plurality of lower electrodes 220 are formed on the upper surface of the lower film 120.

Refer to FIG. 6B for explaining the shapes of the plurality of lower electrodes 220. 6B is an example showing the shapes of the plurality of lower electrodes.

As shown in FIG. 6B, the plurality of lower electrodes 220 may be spaced apart from the upper surface of the lower film 120 at predetermined intervals, and may be arranged to be parallel to the longitudinal direction.

Referring again to FIG. 5B, a coating layer 230 is formed to prevent a plurality of upper electrodes 210 and a plurality of lower electrodes 220 from being in contact with each other by a touch of an external object.

The coating layer 230 is formed on the upper surface of the upper film 110 in a direction in which the plurality of upper electrodes 210 are present.

Referring to FIG. 5C, at least one spacer 250 is formed on the upper surface of the lower film 120 to form a predetermined gap between the upper film 110 and the lower film 120.

The spacing between the spacers 250 determines the position resolution of the tactile feedback generating apparatus 10 as described above. In order to increase the position resolution, it is desirable to design the interval between the spacers 250 to be narrow.

The thickness of the upper film 110 can be reduced to maintain the rigidity of the upper film 110 as usual when the distance between the spacers 250 is narrower than the conventional one.

Next, referring to FIG. 5D, a dielectric 240 is inserted into a gap formed between the upper film 110 and the lower film 120.

However, the tactile feedback generating apparatus 10 manufactured by the present invention may be implemented without the dielectric 240.

5E, an upper film 110 having a plurality of upper electrodes 210 formed on a lower surface thereof is bonded to the upper surface of the spacer 250.

Reference is made to FIG. 6A to see the shapes of the plurality of upper electrodes 210. FIG. 6A is an example showing the shape of a plurality of lower electrodes.

As shown in FIG. 6A, the plurality of upper electrodes 210 may be formed on the lower surface of the upper film 110 so as to be spaced apart from each other by a predetermined distance, and to be arranged in parallel in the longitudinal direction.

That is, the plurality of upper electrodes 210 of FIG. 6A are arranged in the longitudinal direction, and the plurality of lower electrodes 220 of FIG. 6B are arranged in the lateral direction and cross each other.

When a predetermined object touches the upper surface of the upper film 110, the capacitance formed between the plurality of upper electrodes 210 and the lower electrodes 220 may vary.

The sensor unit 310 can measure a change in the capacitance, and can measure a touch position of a predetermined object.

The plurality of lower electrodes 220 formed in the transverse direction acquire position information based on the X axis, and the plurality of upper electrodes 210 formed in the longitudinal direction can acquire the position information based on the Y axis.

Hereinafter, the concept of generating the tactile feedback by the tactile feedback generating apparatus 10 manufactured according to the above manufacturing method will be described with reference to FIG.

7 is a diagram for explaining the concept of tactile feedback of the present invention.

An input waveform having a frequency in the vicinity of a resonant frequency may be input to the plurality of upper electrodes 210 and the plurality of lower electrodes 220. The input waveform may be a spherical file, and preferably a sinusoidal input waveform may be input.

7, when the finger 12 is touched by touching the upper film 110 of the tactile feedback generating apparatus 10, the vibration in the direction perpendicular to the upper film 110 with tactile feedback ).

This is tactile feedback generated by the electrostatic force formed between the plurality of upper electrodes 210 and the plurality of lower electrodes 220. [

In addition, when the finger 12 moves in contact with the upper film 110, a frictional force 14 in a horizontal direction is generated on the surface of the finger 12 that contacts the upper film 110 with tactile feedback.

This is the tactile feedback generated by the electrostatic force formed between the plurality of upper electrodes 210 and the finger 12. [

Hereinafter, the tactile feedback 14 and vibration 16 generated by the tactile feedback generating apparatus 10 according to the present invention will be described in detail with reference to the drawings.

First, the frictional force as the tactile feedback of the present invention will be described with reference to Figs. 8A and 8B.

8A and 8B illustrate the concept that a frictional force using electrostatic force is generated by tactile feedback in accordance with the present invention.

Referring to FIG. 8A, the user inputs a touch using the finger 12. At this time, the frictional force 14 according to the electrostatic force 18 generated by the movement of the finger 12 may be more sensitively changed than the upward and downward force of the finger 12.

The pressing force by the user's finger 12

Figure 112013059501288-pat00027
And the electrostatic force 18 generated between the finger 12 and the electrode 200
Figure 112013059501288-pat00028
.

As shown in Fig. 8B, the subcutaneous layer of the skin of the finger 12 can be formed into the nonconductive layer 12a and the conductive layer 12b.

Since the electrode 200 forms one plate and the conductive layer 12b of the finger 12 forms another plate, this can be modeled as a parallel plate capacitor.

Therefore, when the alternating voltage is applied to the electrode 200, the electrostatic force 18 of the following formula (1) is generated between the finger 12 and the electrode 200.

Figure 112013059501288-pat00029

In the above equation (1)

Figure 112013059501288-pat00030
Is an electrostatic force between the finger 12 and the electrode 200,
Figure 112013059501288-pat00031
Is the dielectric constant of vacuum,
Figure 112013059501288-pat00032
Is a dielectric constant,
Figure 112013059501288-pat00033
Is the area of the overlapping area of the electrode 200 and the finger 12,
Figure 112013059501288-pat00034
Is a voltage applied to the electrode 200,
Figure 112013059501288-pat00035
Represents the distance between the electrode 200 and the finger 12. [

The AC voltage applied to the electrode 200 may range from 50 V to 5 kV, the frequency may range from 10 Hz to 1 kHz, and the waveform may be a square wave or sinusoidal wave. Generally, an AC voltage of 500 V can be applied.

Further, the pressing force by the finger 12

Figure 112013059501288-pat00036
The electrostatic force 18 generated between the finger 12 and the electrode 200,
Figure 112013059501288-pat00037
Can be expressed by the following equation (2). &Quot; (2) &quot;

Figure 112013059501288-pat00038

In Equation (2)

Figure 112013059501288-pat00039
Means the total frictional force generated,
Figure 112013059501288-pat00040
Is a coefficient of friction,
Figure 112013059501288-pat00041
Is the frictional force generated by the pressing force,
Figure 112013059501288-pat00042
Represents the frictional force generated by the electrostatic force 18.

here,

Figure 112013059501288-pat00043
The value of
Figure 112013059501288-pat00044
And thus, the total frictional force can be ignored
Figure 112013059501288-pat00045
.

Therefore, when the finger 12 is moved, the electrostatic force 18 generated between the finger 12 and the electrode 200 causes the frictional force 14 to be generated by tactile feedback. Further, as described above, the frictional force 14 corresponds to horizontal tactile feedback.

Next, with reference to Fig. 9 and Figs. 10A to 10C, the vibration due to the input waveform having the resonance frequency as the tactile feedback of the present invention will be described.

9 shows an example of a waveform of tactile feedback of vibration generated when an input waveform having a resonance frequency is applied according to the present invention.

The input waveform applied to the electrode 200 may be a square wave or sinusoidal wave. Preferably, the input waveform may be a sinusoidal file having a frequency in the vicinity of the resonant frequency of the tactile feedback generating device 10. [

If the applied frequency is close to the resonance frequency, a large mechanical vibration may be generated mechanically. In the case of the present invention, too, the frequency of the input waveform applied to the electrode 200 is set near the resonance frequency, . As described above, the vibration 16 corresponds to vertical tactile feedback.

Accordingly, even if the operating voltage is not increased greatly, sufficient tactile feedback of the vibration can be generated and the power consumption can be reduced. Therefore, it is preferable that the frequency of the input waveform coincides with the resonance frequency.

The tactile feedback of the vibration is generated by the electrostatic force between the plurality of upper electrodes 210 and the plurality of lower electrodes 220 to which the input waveform is inputted and the plurality of upper electrodes 210 and the plurality of lower electrodes 220 Can be expressed by Equation (3) below. &Quot; (3) &quot;

Figure 112013059501288-pat00046

In Equation (3)

Figure 112013059501288-pat00047
Is an electrostatic force between the plurality of upper electrodes 210 and the plurality of lower electrodes 220,
Figure 112013059501288-pat00048
Is the dielectric constant of vacuum,
Figure 112013059501288-pat00049
Is a dielectric constant,
Figure 112013059501288-pat00050
Is a width of an area where the plurality of upper electrodes 210 and the plurality of lower electrodes 220 overlap,
Figure 112013059501288-pat00051
Is a voltage applied to the electrode 200,
Figure 112013059501288-pat00052
Represents the distance between the plurality of upper electrodes 210 and the plurality of lower electrodes 220. [

9, the tactile feedback of the vibration 16 by the input waveform is performed within a temporal acuity time of a person

Figure 112013059501288-pat00053
Can be represented by a waveform having three stimuli. FIG. 9 shows tactile feedback of vibration having three stimuli within the temporal acuity time of a person.

Here, the temporal sensitivity of a person is the minimum time for separating the two stimuli and recognizing them as two outputs when the tactile feedback by the vibration 16 has two stimuli .

The temporal sensitivity of the person may generally be 5.5 ms. That is, when the vibration with two stimuli is output as the tactile feedback, if the interval between the two stimuli is less than 5.5 ㎳, the user recognizes it as one output.

9, when a tactile feedback of a vibration 16 having three stimuli is generated within a temporal sensitivity, a person can not distinguish the three stimuli as three stimuli and recognizes them as one output.

That is,

Figure 112013059501288-pat00054
Can be designed according to the following expression (4).

Figure 112013059501288-pat00055

In Equation (4)

Figure 112013059501288-pat00056
Is a period of stimulation,
Figure 112013059501288-pat00057
Is a real number greater than 1,
Figure 112013059501288-pat00058
Indicates the temporal acuity of a person.
Figure 112013059501288-pat00059
May preferably have a value of 3 to 4.

Figure 112013059501288-pat00060
silver
Figure 112013059501288-pat00061
Lt; / RTI &gt; here,
Figure 112013059501288-pat00062
The
Figure 112013059501288-pat00063
And is integerized.

Since the period is inversely related to the frequency, the equation (4)

Figure 112013059501288-pat00064
Can be summarized as shown in Equation (5) below.

Figure 112013059501288-pat00065

The resonance frequency of the actuator should be designed to be faster than the reciprocal of the temporal sensitivity of the human being as shown in Equation (6) below, since it should preferably be designed to approximate the resonance frequency of the actuator.

Figure 112013059501288-pat00066

In Equation (6)

Figure 112013059501288-pat00067
Represents the resonance frequency of the actuator.

That is, the resonance frequency can be designed according to Equation (6) to control the cycle of the output recognized by the vibration or the intensity of the output.

Referring to the example of the input waveform shown in FIG. 9, if the temporal sensitivity is 5.5 ms, the period of vibration is 2.2 ms,

Figure 112013059501288-pat00068
Is 2.5. In addition, since three pulse-like magnetic poles are formed within the time of temporal sensitivity,
Figure 112013059501288-pat00069
Is 3.

On the other hand, Figs. 10A to 10C show one embodiment of the waveform of the vibration for controlling the vibration haptic feedback according to the present invention.

As shown in Fig. 10A, the interval between the plurality of vibration waveforms

Figure 112013059501288-pat00070
So that the period of the output recognized by the vibration tactile feedback can be adjusted.

When the interval between the plurality of waveforms is narrowed, the output by the vibration tactile feedback is quickly recognized. On the contrary, when the interval between the plurality of waveforms is made wider, the output by the vibration tactile feedback is recognized to be slow.

Spacing between multiple waveforms

Figure 112013059501288-pat00071
The period of the output due to the vibration tactile feedback recognized by the user can be expressed by Equation (7) below.

Figure 112013059501288-pat00072

In Equation (7)

Figure 112013059501288-pat00073
Is a period of an output recognized by a user due to vibration,
Figure 112013059501288-pat00074
Is the temporal sensitivity of man,
Figure 112013059501288-pat00075
Represents a time interval between the plurality of waveforms.

This allows the user to provide vibrotactile feedback with various stimulation periods.

Further, as shown in Fig. 10B, the number of magnetic poles of the vibration waveform can be adjusted to adjust the intensity of the output recognized by the vibration tactile feedback.

Even if the waveform of the vibration 16 has a plurality of stimuli within the time of temporal sensitivity, the person perceives the corresponding tactile feedback as one stimulus.

However, depending on the number of stimuli, the intensity of the vibrotactile feedback is felt differently. That is, as the number of stimuli existing within the time of temporal sensitivity increases, the tactile feedback of the strong vibration is felt.

As in the embodiment of Fig. 10B, in the case of two pulsed stimuli or four stimuli within the temporal sensitivities, all of them are recognized as one output. However, in the case of four stimuli, vibrotactile feedback of greater intensity may occur when there are two stimuli.

Thus, the intensity of vibration can be controlled by adjusting the number of stimuli present within the time of temporal sensitivity.

Further, as shown in FIG. 10C, the intensity of the vibration of the vibration tactile feedback can be adjusted through fine adjustment of the frequency of the input waveform.

The intensity of the tactile feedback vibration varies depending on the frequency of the waveform applied to the electrode 200 of the tactile feedback generating apparatus 10 and the intensity of the vibration can be relatively weakened as the distance from the resonance frequency increases.

Therefore, the frequency of the input waveform can be finely adjusted to adjust the intensity of the output recognized by the vibration tactile feedback as in the embodiment of FIG. 10C.

9 and FIGS. 10A to 10C, it is possible to adjust the frequency of the input waveform to the vicinity of the resonance frequency to generate tactile feedback of a larger vibration.

In addition, the waveform of the vibration can be formed into a waveform having a plurality of magnetic poles within a temporal acuity time, and can be recognized as one output.

Further, it is possible to adjust the interval of the output recognized by the vibration tactile feedback by adjusting the interval between the waveforms of the vibration. The intensity of the output recognized by the vibration tactile feedback can be adjusted by adjusting the number of poles and the frequency of the vibration waveform.

Hereinafter, a method of simultaneously using the vibration 16 and the friction force 14, which are tactile feedback of the tactile feedback generating apparatus 10 manufactured according to the present invention, and a method of reducing the effect of the friction force 14 will be described.

11 shows a cross-sectional view of an example of a tactile feedback generating device manufactured according to the present invention.

First, a method of using the tactile feedback of the vibration 16 and the friction force 14 at the same time will be described.

The tactile feedback of the vibration 16 is generated by an electrostatic force induced between the plurality of upper electrodes 210 and the plurality of lower electrodes 220, and the electrostatic force can be expressed by Equation (3).

The tactile feedback of the frictional force 14 is generated by an electrostatic force induced between the plurality of upper electrodes 210 and the finger 12, and the electrostatic force can be expressed by Equation (1).

In order to simultaneously use the tactile feedback of the vibration 16 and the friction force 14, an input waveform is applied to the plurality of upper electrodes 210, and a ground electrode is connected to the plurality of lower electrodes 220.

If the thickness of the upper film 110 is t 1 , the interval between the plurality of upper electrodes 210 and the fingers 12 becomes smaller by reducing the t 1 , so that the electrostatic force becomes larger as shown in Equation (1) .

Therefore, the tactile feedback by the electrostatic force can be strengthened, and the tactile feedback of the vibration 16 and the friction force 14 can be used at the same time.

If the tactile feedback effect of the vibration 16 and the friction force 14 is simultaneously used by the above method, the tactile feedback of the vibration 16 and the friction force 14 is transmitted to the user, so that the effective tactile feedback can be generated .

Next, a method for reducing the tactile feedback effect of the frictional force 14 and mainly using the tactile feedback of the vibration 16 will be described.

In order to reduce the tactile feedback effect of the frictional force 14 and to utilize the tactile feedback effect of the vibration 16, the ground electrodes are connected to the plurality of upper electrodes 210 and the input waveform is applied to the plurality of lower electrodes 220 do.

Since the plurality of upper electrodes 210 are grounded and the electrostatic force induced between the plurality of upper electrodes 210 and the finger 12 is reduced, the tactile feedback effect of the frictional force 14 can be reduced.

In addition, when t 1 is increased, the distance between the plurality of upper electrodes 210 and the finger 12 is increased, so that the electrostatic force becomes smaller as shown in Equation (1). Accordingly, the tactile feedback of the frictional force 14 can be further reduced.

Generally, the tactile feedback of the frictional force 14 is generated over the entire area and it is difficult to generate tactile feedback only at the desired portion.

However, if the tactile feedback effect of the frictional force 14 is reduced by the above-described method, the local tactile feedback can be provided to the user.

On the other hand, in order to improve the positional resolution of the tactile feedback generating apparatus 10, the spacing L between the spacers 250 should be designed to be narrow. For this purpose, it is desirable to design the rigidity of the upper film 110 to be low.

Hereinafter, an embodiment in which the tactile feedback generating apparatus according to the present invention is applied to a portable device will be described with reference to FIG.

FIG. 12 shows an example of a block diagram of a portable device to which the tactile feedback generating device manufactured according to the present invention is applied.

12, the portable device 20 according to the present invention includes a tactile feedback generating device 10 and a microprocessor 22 and a display unit 24, which are internal components of the portable device 20 .

Since the tactile feedback generating apparatus 10 according to the present invention is the same as that described above, the tactile feedback generating apparatus 10 is included in the portable apparatus 20 to be described below to implement an embodiment of the present invention do.

A memory (not shown) according to the present invention is means for storing applications, and application programs executed in various portable devices 20 are stored. In addition, a program used in the tactile feedback generating apparatus 10 may be stored as needed.

On the other hand, the memory can be implemented using an EEPROM or a flash memory, or an internal memory incorporated in an MCU, MPU, or DSP. In this case, the memory may be implemented separately from the microprocessor 22 to be described later or may be implemented by including the function in the microprocessor 22.

The microprocessor 22 according to the present invention executes the application stored in the memory and outputs the application information to the control unit 300 according to the executed application.

The application information is information on various kinds of execution programs, apps, or touch buttons executed in the portable device 20. [ Since the controller 300 generates tactile feedback in various ways according to the application information, the microprocessor 22 can receive such information as needed.

Meanwhile, the microprocessor 22 may directly receive a signal from the sensor unit 310 that senses the touch of an external object, and may output various electric signals.

Accordingly, the control unit 300 and the microprocessor 22 need not be separately implemented in order to implement the present invention, and may be integrated into one of the control unit 300 or the microprocessor 22.

Therefore, the microprocessor 22 can be implemented using an MCU, an MPU, a DSP, and the like, and can also be implemented by a logic design such as an FPGA or an ASIC. The microprocessor 22 may be included in the actuator 400 and may be included in the portable device 20 separately from the actuator 400 if necessary.

The display unit 24 according to the present invention is a means for showing a state in which an application is executed. The display unit 24 may be implemented without the display unit 24 in the present invention. For example, when the portable device 20 according to the present invention is a smart phone or a tablet PC, the display unit 24 is required. However, in the case of a joystick or keyboard used in a game such as a console game machine, ). &Lt; / RTI &gt;

The display unit 24 having the functions described above may be implemented using an LCD, an OLED, an LED, or the like. However, the present invention is not limited to this configuration, The embodiment will be performed.

As described above, the tactile feedback generation apparatus of the present invention can generate a large vibration using the resonance frequency, thereby lowering the operating voltage and reducing power consumption. In addition, various haptics can be provided by adjusting the intensity of tactile feedback.

The present invention can also be embodied as computer-readable codes on a computer-readable recording medium. A computer-readable recording medium includes all kinds of recording apparatuses in which data that can be read by a computer system is stored. Examples of the computer-readable recording medium include ROM, RAM, CD-ROM, magnetic tape, floppy disk, optical data storage, and the like. The computer readable recording medium may also be distributed over a networked computer system so that computer readable code can be stored and executed in a distributed manner. In addition, functional programs, codes, and code segments for implementing the present invention can be easily inferred by programmers of the technical field to which the present invention belongs.

It should be understood that the above-described apparatus and method are not limited to the configuration and method of the embodiments described above, but the embodiments may be modified so that all or some of the embodiments are selectively combined .

Claims (23)

An upper film receiving a touch of the first object; A lower film disposed apart from the upper film; And an actuator for generating tactile feedback in response to the touch, the method comprising:
A first step of forming a plurality of lower electrodes on the upper surface of the lower film;
A second step of forming spacers on the upper surface of the lower film to create a gap between the upper film and the lower film; And
And a third step of bonding the upper film formed on the lower surface of the upper electrode to the upper surface of the spacer to induce an electrostatic force,
When an input waveform having a first frequency which is within a predetermined range from a resonance frequency is applied to at least one of the plurality of upper electrodes and the plurality of lower electrodes, the induced electrostatic force is at least one of a first electrostatic force and a second electrostatic force ego,
Wherein the first electrostatic force is induced between the plurality of upper electrodes and the plurality of lower electrodes and the second electrostatic force is induced between the plurality of upper electrodes and the first object,
Wherein the tactile feedback is at least one of a vibration generated by the first electrostatic force and a frictional force generated by the second electrostatic force. An upper film receiving a touch of the first object; A lower film disposed apart from the upper film; And an actuator for generating tactile feedback in response to the touch, the method comprising:
A first step of forming a plurality of lower electrodes on the upper surface of the lower film;
A second step of forming spacers on the upper surface of the lower film to create a gap between the upper film and the lower film;
A third step of applying a dielectric substance to the gap; And
And a fourth step of bonding the upper film formed on the lower surface of the upper electrode to the upper surface of the spacer to induce an electrostatic force,
When an input waveform having a first frequency which is within a predetermined range from a resonance frequency is applied to at least one of the plurality of upper electrodes and the plurality of lower electrodes, the induced electrostatic force is at least one of a first electrostatic force and a second electrostatic force ego,
Wherein the first electrostatic force is induced between the plurality of upper electrodes and the plurality of lower electrodes and the second electrostatic force is induced between the plurality of upper electrodes and the first object,
Wherein the tactile feedback is at least one of a vibration generated by the first electrostatic force and a frictional force generated by the second electrostatic force. 3. The method of claim 2,
The dielectric material
Wherein the tactile feedback generating device comprises at least one of air, water, gel, and a polymer. 3. The method according to claim 1 or 2,
Between the first step and the second step,
And forming a coating layer on the upper surfaces of the plurality of lower electrodes to prevent contact between the plurality of upper electrodes and the plurality of lower electrodes by the touch, . 3. The method according to claim 1 or 2,
Wherein the plurality of upper electrodes are disposed in parallel on a lower surface of the upper film at predetermined intervals,
Wherein the plurality of lower electrodes are arranged in parallel on a top surface of the lower film at a predetermined interval and arranged in a direction intersecting with the plurality of upper electrodes. 3. The method according to claim 1 or 2,
Wherein the plurality of upper electrodes and the plurality of lower electrodes are formed of at least one of copper (Cu) and silver (Ag). 3. The method according to claim 1 or 2,
Wherein the plurality of upper electrodes and the plurality of lower electrodes are transparent materials,
Wherein the plurality of upper electrodes and the plurality of lower electrodes are formed of at least one of indium tin oxide (ITO), carbon nanotube (CNT), and graphene. Producing device. 3. The method according to claim 1 or 2,
The spacer
Wherein the adhesive layer is made of at least one of gel, PDMS (Polydimethylsiloxane), OCA (Optically Clear Adhesive), double-sided tape, UV material and polymer bonding material. 3. The method according to claim 1 or 2,
The positional resolution of the tactile feedback generating device is adjusted corresponding to the interval between the spacers formed in the second step,
Wherein the position resolution is a minimum distance of the touch generating the tactile feedback different from each other,
Wherein the minimum distance of the touch is smaller as the position resolution is larger. 3. The method according to claim 1 or 2,
Wherein the first electrostatic force is determined using the following equation.
Equation
Figure 112013059501288-pat00076

here,
Figure 112013059501288-pat00077
Is a first electrostatic force,
Figure 112013059501288-pat00078
Is the dielectric constant of vacuum,
Figure 112013059501288-pat00079
Is a dielectric constant,
Figure 112013059501288-pat00080
Is a width of an area where the plurality of upper electrodes and the plurality of lower electrodes overlap,
Figure 112013059501288-pat00081
Is a voltage applied to at least one of the plurality of upper electrodes and the plurality of lower electrodes,
Figure 112013059501288-pat00082
Represents an interval between the plurality of upper electrodes and the plurality of lower electrodes. 3. The method according to claim 1 or 2,
When the first object touches the upper film and moves, the frictional force is generated,
Wherein the second electrostatic force is determined using Equation (1), and the frictional force is determined using Equation (2). &Lt; EMI ID = 1.0 &gt;
Equation 1
Figure 112013059501288-pat00083

here,
Figure 112013059501288-pat00084
Is a second electrostatic force,
Figure 112013059501288-pat00085
Is the dielectric constant of vacuum,
Figure 112013059501288-pat00086
Is a dielectric constant,
Figure 112013059501288-pat00087
Is the area of the area where the plurality of upper electrodes overlap with the first object,
Figure 112013059501288-pat00088
Is a voltage applied to the plurality of upper electrodes,
Figure 112013059501288-pat00089
Represents an interval between the plurality of upper electrodes and the first object.
Equation 2
Figure 112013059501288-pat00090

here,
Figure 112013059501288-pat00091
Is a frictional force,
Figure 112013059501288-pat00092
Is a coefficient of friction,
Figure 112013059501288-pat00093
Represents a second electrostatic force. 3. The method according to claim 1 or 2,
Wherein the resonant frequency is determined by using the following equation.
Equation
Figure 112013059501288-pat00094

here,
Figure 112013059501288-pat00095
Is the resonant frequency of the actuator,
Figure 112013059501288-pat00096
Indicates the temporal acuity of a person,
The temporal sensitivity of the person is the minimum time at which the two stimuli must be separated to recognize the two stimuli as two outputs when the tactile feedback by the vibration has two stimuli. 13. The method of claim 12,
Wherein the vibration is a waveform having a plurality of stimuli within the temporal sensitivity time of the person,
Wherein the vibration having the waveform is recognized as one output. 14. The method of claim 13,
Wherein the waveform has a plurality of waveforms,
A time interval between the plurality of waveforms
Figure 112013059501288-pat00097
Wherein a period of an output recognized by the vibration is adjusted in response to the vibration of the tactile feedback device. 15. The method of claim 14,
Wherein the period of the output recognized by the vibration is determined using the following equation.
Equation
Figure 112013059501288-pat00098

here,
Figure 112013059501288-pat00099
Is a period of an output recognized by the user due to the vibration,
Figure 112013059501288-pat00100
Is the temporal sensitivity of man,
Figure 112013059501288-pat00101
Represents a time interval between the plurality of waveforms. 14. The method of claim 13,
And adjusting the intensity of the output recognized by the vibration by adjusting at least one of the number of the plurality of magnetic poles and the first frequency within the temporal susceptibility time. 3. The method according to claim 1 or 2,
Wherein the tactile feedback by the frictional force is generated in a direction parallel to the surface of the first object touching the upper film,
Wherein the tactile feedback by the vibration is generated in a direction perpendicular to the upper film. 3. The method according to claim 1 or 2,
The input waveform is applied to the plurality of upper electrodes, the ground electrodes are connected to the plurality of lower electrodes,
Wherein the vibration generated by the first electrostatic force and the friction generated by the second electrostatic force are used together as the tactile feedback. 3. The method according to claim 1 or 2,
A ground electrode is connected to the plurality of upper electrodes, and when the input waveform is applied to the plurality of lower electrodes,
The second electrostatic force is reduced,
And the frictional force generated by the second electrostatic force of the tactile feedback corresponding to the reduced second electrostatic force is reduced. 20. The method of claim 19,
The second electrostatic force is reduced corresponding to the thickness of the upper film formed to be thick,
And the frictional force generated by the second electrostatic force of the tactile feedback corresponding to the reduced second electrostatic force is reduced. A tactile feedback generating device according to claim 1 or 2, wherein the tactile feedback generating device is manufactured by the manufacturing method of the tactile feedback generating device. A recording medium on which a program of instructions executable by a digital processing apparatus to perform a method of manufacturing a tactile feedback generating apparatus is tangibly embodied and which can be read by the digital processing apparatus,
An upper film receiving a touch of the first object; A lower film disposed apart from the upper film; And an actuator for generating tactile feedback corresponding to the touch, the method comprising:
A first step of forming a plurality of lower electrodes on the upper surface of the lower film;
A second step of forming spacers on the upper surface of the lower film to create a gap between the upper film and the lower film; And
And a third step of bonding the upper film formed on the lower surface of the upper electrode to the upper surface of the spacer to induce an electrostatic force,
When an input waveform having a first frequency which is within a predetermined range from a resonance frequency is applied to at least one of the plurality of upper electrodes and the plurality of lower electrodes, the induced electrostatic force is at least one of a first electrostatic force and a second electrostatic force ego,
Wherein the first electrostatic force is induced between the plurality of upper electrodes and the plurality of lower electrodes and the second electrostatic force is induced between the plurality of upper electrodes and the first object,
Wherein the tactile feedback is at least one of a vibration generated by the first electrostatic force and a friction generated by the second electrostatic force. A recording medium on which a program of instructions executable by a digital processing apparatus to perform a method of manufacturing a tactile feedback generating apparatus is tangibly embodied and which can be read by the digital processing apparatus,
An upper film receiving a touch of the first object; A lower film disposed apart from the upper film; And an actuator for generating tactile feedback corresponding to the touch, the method comprising:
A first step of forming a plurality of lower electrodes on the upper surface of the lower film;
A second step of forming spacers on the upper surface of the lower film to create a gap between the upper film and the lower film;
A third step of applying a dielectric substance to the gap; And
And a fourth step of bonding the upper film formed on the lower surface of the upper electrode to the upper surface of the spacer to induce an electrostatic force,
When an input waveform having a first frequency which is within a predetermined range from a resonance frequency is applied to at least one of the plurality of upper electrodes and the plurality of lower electrodes, the induced electrostatic force is at least one of a first electrostatic force and a second electrostatic force ego,
Wherein the first electrostatic force is induced between the plurality of upper electrodes and the plurality of lower electrodes and the second electrostatic force is induced between the plurality of upper electrodes and the first object,
Wherein the tactile feedback is at least one of a vibration generated by the first electrostatic force and a friction generated by the second electrostatic force.
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