KR101427626B1 - Aging apparatus for epoxy for manufacturing semiconductor pakage - Google Patents

Aging apparatus for epoxy for manufacturing semiconductor pakage Download PDF

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Publication number
KR101427626B1
KR101427626B1 KR20120143328A KR20120143328A KR101427626B1 KR 101427626 B1 KR101427626 B1 KR 101427626B1 KR 20120143328 A KR20120143328 A KR 20120143328A KR 20120143328 A KR20120143328 A KR 20120143328A KR 101427626 B1 KR101427626 B1 KR 101427626B1
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South Korea
Prior art keywords
syringe
input port
control unit
aging
central control
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KR20120143328A
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Korean (ko)
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KR20140075207A (en
Inventor
윤통섭
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비전세미콘 주식회사
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Priority to KR20120143328A priority Critical patent/KR101427626B1/en
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Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an epoxy aging device for semiconductor manufacturing for use management of an epoxy used in a semiconductor manufacturing process.
The epoxy aging device 100 for semiconductor manufacturing according to the present invention includes an enclosure 110 provided with an operation button 111 on one side thereof and a syringe input port 121 provided inside the enclosure to identify each syringe input port A syringe discharge cylinder 160 vertically installed on the bottom 112 of the housing for pushing up the syringe C at the syringe inlet where the aging is completed, A central control unit 130 for performing an operation control of the discharge cylinder and receiving an operation start signal from the operation button and counting an aging time and performing a history management control for each syringe, A display unit 140 for displaying information on the syringe inserted into the respective syringe input ports under the control of the control unit in real time, Said is configured to received a control of the central control unit comprises a label printer (150) and outputting the record aging history information associated with each label on a syringe 180.

Description

[0001] The present invention relates to an epoxy aging apparatus for semiconductor manufacturing,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an epoxy aging device for semiconductor manufacturing for use management of an epoxy used in a semiconductor manufacturing process.

Generally, during a semiconductor manufacturing process, there are a sawing process for cutting a wafer into individual semiconductor chips, a die attach process for bonding the cut semiconductor chips to a lead frame or a printed circuit board (PCB) A wire bonding process for connecting each lead of the lead frame and the semiconductor chip with a gold wire in a circuit manner, and a molding process for encapsulating the wire-bonded semiconductor chip with an encapsulating material.

In the diathertem process, an adhesive such as epoxy is applied to a lead frame or a printed circuit board, a semiconductor chip is attached to the lead frame or printed circuit board, and the epoxy adhesive is cured by heating the chamber in an oven at a predetermined temperature A curing process is performed.

As described above, epoxy is mainly used as a bonding material in a semiconductor manufacturing process. The epoxy is contained in a syringe and stored in a freezer.

The reason why the epoxy is kept frozen in this way is that the epoxy becomes semi-liquid at room temperature, which is hardened when such a state is maintained for a long time. If the epoxy hardens, the amount of bonding can not be controlled, and the bonding performance is remarkably lowered, resulting in various quality problems.

In order to use the cryopreserved epoxy, it is necessary to maintain the frozen epoxy at room temperature for a predetermined time (about 1 hour to 2 hours) to dissolve the epoxy resin, that is, aging.

However, the process of aging the frozen epoxy requires precise time counting as well as a clear confirmation of the time taken from the freezer, the aging completion time, and the effective time of use of the epoxy.

Therefore, the aging history information such as the aging completion time and the effective use time of the epoxy should be recorded on the outer wall surface of the aging syringe, and as a result, the worker often neglected the record due to carelessness.

If the recording of the aging history information is missed, the use of the epoxy becomes impossible. In other words, if the epoxy is used due to the carelessness of the operator, the epoxy is used even though the aging is not sufficient. In addition, not only the occurrence of the bonding failure but also the use of the epoxy, And the like.

Particularly, when aging a large number of syringes, chaos may occur due to time measurement, so that there is a problem in that the reliability with respect to the effective period of use is inevitably lowered.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the problems described above, and it is an object of the present invention to provide an apparatus and a method for accurately recording aging history information on a syringe having an epoxy stored therein taken out of the freezer, an aging time of an epoxy extracted from the freezer, And to provide an epoxy aging device for semiconductor manufacturing that can be smoothly managed.

In order to achieve the above object, the epoxy aging device for semiconductor manufacturing according to the present invention comprises: a housing having an operation button on one side; a housing provided inside the housing and having syringe input ports, A syringe discharge cylinder installed vertically on the bottom of the housing for pushing up a syringe of a syringe input port which has been aged; and a syringe discharge cylinder provided at one side of the housing for performing operation control of the discharge cylinder, A central control unit for counting an aging time and performing a history management control for each syringe, a display unit provided at one side of the housing for displaying information on a syringe inserted into each syringe input port under the control of the central control unit in real time, , And a central body And a label printer that records aging history information related to each syringe on a label under the control of a fisher and outputs the information.

Further, the present invention may further comprise a syringe sensor installed on the bottom of the housing for sensing the insertion of the syringe and generating a syringe detection signal to the central control unit.

delete

The horizontal plate is horizontally rotatable in a state spaced apart from the bottom of the housing. An opening is formed in the upper portion of the housing. A door having an opening hole is formed in the upper portion of the housing to partially open and close the opening. The central control unit may be configured to control the operation of the horizontal plate so that a syringe input port into which the syringe to be aged is inserted or a syringe input port into which the aged syringe is inserted may be positioned below the opening of the door.

In this case, it is preferable that a syringe discharge cylinder is installed only at a lower portion of the syringe input ports located below the opening of the door.

The horizontal plate may be divided into an upper rotary plate for supporting the upper end of the syringe and a lower rotary plate for guiding the lower portion of the syringe.

Preferably, the central control unit controls the syringe discharge cylinder located below the syringe input port except for the syringe input port into which the syringe is inserted and the syringe input port into which the syringe is inserted when the syringe is inserted, to draw out the rod.

In addition, when the syringe is inserted, the central control unit controls the syringe discharge cylinder located below the syringe input port except for the syringe input port into which the syringe is inserted and the syringe input port into which the syringe is inserted, to withdraw the rod and the aging is completed The operation of the syringe discharge cylinder may not be controlled so as to push up the syringe which has been aged in succession if it is determined that the aged syringe is not taken out first through the syringe sensor.

In addition, it is preferable that an alarm unit is further provided to inform the operator that the aging time is completed under the control of the central control unit.

In the epoxy aging apparatus for semiconductor manufacturing according to the present invention, the syringe discharge cylinder pushes up the syringe having been aged so that the syringe discharge cylinder protrudes onto the horizontal plate, so that the operator can take out the syringe completely and easily Since the time counting and the time recording are automatically controlled by the central control unit and automatically printed by the label printer, the history management for the aging of the epoxy can be accurately performed, so that the management of the epoxy can be performed stably .

Further, in the present invention, a horizontal plate is rotatably installed and a door formed with an opening hole is provided to allow the syringe to be inserted and removed through the opening hole. At the same time, only the syringe, which has been aged, So that the operator can input and take out the syringe which has been aged very easily and accurately.

In addition, since the central control unit controls the syringe discharge cylinder so that the syringe discharges according to the order in which the aging is completed, even if aging of a plurality of syringes, the aging sequence can be taken out sequentially without chaos, There is an effect that it is accurately performed.

1 is a perspective view of an epoxy aging device for semiconductor manufacturing according to the present invention.
2 is a plan view of an epoxy aging apparatus for manufacturing semiconductors according to the present invention.
3 is a cross-sectional view taken along line III-III in Fig.
4 is a view showing an example of a label attached to the circumferential surface of the syringe;
5 is a perspective view of an epoxy aging device for semiconductor manufacturing according to another embodiment of the present invention.
Fig. 6 is a plan view of Fig. 5; Fig.
7 is a cross-sectional view taken along line VII-VII of FIG. 5;
Figure 8 is a perspective view of the use state of Figure 5,

The features and advantages of the present invention will become more apparent from the following detailed description of preferred embodiments with reference to the accompanying drawings. Prior to this, terms and words used in the present specification and claims are to be interpreted in accordance with the technical idea of the present invention based on the principle that the inventor can properly define the concept of the term in order to explain his invention in the best way. It must be interpreted in terms of meaning and concept.

Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings. The same reference numerals are used for the same components, and only the different portions are described for the sake of clarity.

1 to 4, the present invention includes a housing 110, a horizontal plate 120 provided on the housing 110, a syringe discharge cylinder 160, a central control unit 130, (140), and a label printer (150).

The enclosure 110 is a member forming the external appearance of the epoxy-aging apparatus 100 for semiconductor manufacturing according to the present invention, and is formed in the form of a rectangular box having an interior hollow and an open portion at the top. An operation button 111 is provided on one side of the housing 110.

Therefore, when the operator presses the operation button 111 when the operator intends to insert the syringe C, an operation start signal is transmitted from the operation button 111 to the central control unit 130 and the syringe input port 121, When the operation button 111 is pressed after the worker has taken out the aging syringe C and the operation start signal is transmitted from the operation button 111 to the central control unit 130 It is possible to receive the label 180 printed with various history information about the syringe C taken out while being sent.

A horizontal plate 120 having a syringe inlet 121 is installed in the housing 110. The lower end of the syringe C inserted into the syringe inlet 121 is spaced apart from the bottom 112 of the housing 110 so as not to collide with the bottom 112 of the housing 110.

A plurality of syringe input ports 121 are formed in the horizontal plate 120 so that the syringe C containing the epoxy can be inserted. In the present embodiment, the syringe input ports 121 are formed concentrically at regular intervals.

The syringe inlet 121 is smaller than the protrusion formed on the upper end of the syringe C so as to support the inserted syringe C and has an inner diameter larger than the outer diameter of the syringe C.

On the upper surface of the horizontal plate 120, a serial number is marked so that each syringe inlet 121 can be identified.

The syringe discharge cylinder 160 is installed in the syringe discharge cylinder 160 installed at the bottom 112 of the housing 110. The syringe discharge cylinder 160 is installed vertically so as to push up the lower end of the syringe C.

The syringe discharge cylinders 160 are operated to push up the aged syringe C when the aging is completed by the instruction of the central control unit 130. When the syringe C is inserted, The syringe input port 121 and the syringe C are inserted and the rod is drawn out to the empty syringe input port 121 excluding the syringe input port 121 being aged.

Therefore, when the user accidentally inserts the syringe C into the empty syringe input port 121 other than the syringe input port 121 through which the syringe C is to be inserted, the syringe discharge cylinder 121 160, the syringe C is projected from the syringe inlet 121, and normal insertion is impossible. Therefore, the operator visually recognizes that there is an error in the insertion of the syringe C, .

A syringe sensor 170 may further be installed on the bottom 112 of the housing 110. The syringe sensor 170 is installed on the syringe inlet 121 in a one-to-one correspondence with each other and senses the syringe C to be inserted into the syringe inlet 121 individually. And generates a syringe detection signal.

In this case, when the aging is completed, the central control unit 130 determines that the aged syringe C is not taken out through the syringe sensor 170, The operation of the syringe discharge cylinder 160 is not controlled. This is to allow the syringe C to be taken out in the order in which the aging is completed.

The central control unit 130 is provided at one side of the housing 110 to designate the position of the syringe input port 121 to be aged when the operation start signal is received from the operation button 111 and to control the operation of the display unit 140, To be output.

The central control unit 130 not only controls the operation of the syringe discharge cylinder 160 but also receives an operation start signal from the operation button 111 and a syringe detection signal from the syringe sensor 170, Counting and history management control for each syringe.

When receiving the syringe detection signal from the syringe sensor 170, the central control unit 130 counts the aging time of the syringe C inserted in the designated syringe input port 121 and performs the history management control.

When the operation control unit 130 receives the operation start signal from the operation button 111 after completing the operation control to raise the syringe C to the syringe discharge cylinder 160 after the aging is completed, The printer 150 is operated.

In addition, the central control unit 130 is preferably configured to perform the various controls described above by a control module pre-programmed, such as a computer. It is also possible to perform manual operation control on the central control unit 130 by using an input device such as a keyboard or a mouse.

Further, although not shown, it is preferable that a door for opening and closing the opening is provided in the opening of the housing 110. In this case, the user can open the door 190 only when the syringe C is inserted or when the aging is completed, and the door 190 is normally closed to protect the aging cushion C .

The display unit 140 can easily recognize the individual degree of the syringes C that are installed at one side of the housing 110 to be controlled by the central control unit 130 and enter the syringe input ports 121 In real time. The information provided through the display unit 140 includes the number of the syringe input port 121 into which the syringe C is to be inserted and the input date of the syringe C by each syringe input port 121, The time at which the syringe C is aged at room temperature, and the available time of the epoxy built in the syringe C, and the like.

The label printer 150 is installed at one side of the housing 110 so as to receive control of the central control unit 130 and prints various history information related to each syringe C on the label 180 and outputs the history information. Various history information related to each syringe C to be printed on the label 180 includes the date and time of freezer extraction, the date and time of completion of aging, the available effective date and time of the epoxy built in the syringe C, And the like.

In addition, although not shown, the present invention may further include an alarm unit, which is under the control of the central control unit 130 and informs the operator whether the aging time is completed or not. In this case, the alarm unit may include a visual notification device using a display unit 140 or a separately installed warning light, or an audible notification device using a separately installed speaker.

Hereinafter, the management process of the epoxy using the epoxy aging device 100 for semiconductor manufacturing according to the present invention configured as described above will be described in more detail.

When the operator presses the operation button 111, an operation start signal is transmitted from the operation button 111 to the central control unit 130. The central control unit 130 receiving the operation start signal designates the number of the syringe input port 121 into which the syringe C can be input and controls the display unit 140 to output the number of the syringe input port 121 .

The central control unit 130 includes a syringe discharge cylinder 121 located below the syringe inlet 121 excluding the syringe inlet 121 through which the syringe C is inserted and a syringe inlet 121 through which the syringe C is inserted, To take out the load.

When the number of the syringe input port 121 is output to the display unit 140, the operator inserts the syringe C, which is stored in the syringe input port 121, in a frozen state.

If the operator accidentally inserts the syringe C into the empty syringe input port 121 other than the syringe input port 121 designated by the central control unit 130 and the syringe C is inserted into the syringe discharge cylinder 121 The syringe C is projected from the syringe inlet 121 while interfering with the raised rod. Therefore, since the normal insertion of the syringe C becomes impossible, the operator can visually recognize that there is an error in inputting the syringe C and take corrective action.

When the syringe C is normally inserted into the syringe input port 121, the syringe sensor 170 senses the syringe C and sends a syringe detection signal to the central control unit 130.

When the syringe detection signal is received from the syringe sensor 170, the central control unit 130 performs a history management control such as counting the aging time of the syringe C inserted into the syringe input port 121 and recording the freezer extraction time .

The central control unit 130 continuously counts the time when the syringe C is inserted into each syringe input port 121 and checks whether the counting is completed.

If the syringe C inserted into the syringe inlet 121 reaches the set time, the load of the syringe discharge cylinder 160 is withdrawn under the control of the central control unit 130 and the syringe C ). As a result, only the syringe C having been aged is protruded to the upper portion of the horizontal plate 120, so that the syringe C that has been aged can be taken out very easily and easily.

On the other hand, when the aging is completed, if the aged syringe C is not taken out first, the central control unit 130 controls the operation of the syringe discharge cylinder 160 so as to push up the syringe C after completion of aging Do not.

Therefore, even when the aged syringes C are numerous, the syringe C jumps out to the upper portion of the horizontal plate 120 sequentially in accordance with the order in which the aging is completed, so that chaos according to the aging sequence does not occur.

In addition, the central control unit 130 controls the notification unit to inform the operator of the fact that the syringe C can be taken out.

When the worker takes out the aged syringe C from the syringe inlet 121 and presses the operation button 111, an operation signal is transmitted from the operation button 111 to the central control unit 130, The central control unit 130 determines that the take-out is normally performed and controls the label printer 150 to print various history information on the syringe C. Then, the label printer 150 provides the printed history information to the operator using the label 180.

The information printed on the label 180 includes the freezer extraction date and time, the date and time of the aging, and the effective date and time of the epoxy built in the syringe C, as shown in FIG. do.

The operator attaches the labels 180 and 300 supplied from the label 180 printer to the circumferential surface of the syringe C 200 so that the history of the epoxy built in the syringe C 200 is accurately managed .

The horizontal plate 120 may be fixed to a rotary shaft connected to a driving motor M provided on the bottom 112 of the housing 110 so as to be horizontally rotatable. In this case, it is preferable that an opening is formed on the upper portion of the housing 110, and a door 190 for opening and closing the opening is provided. In this case, the user can open the door 190 only when the syringe C is inserted or when the aging is completed, and the door 190 is normally closed to protect the aging cushion C An opening 191 is formed in the door 190 to partially open and close the opening.

The central control unit 130 controls the syringe input port 121 to which the syringe C to be aged is inserted or the syringe input port 121 to which the aged syringe C is inserted from the lower portion of the opening 190 of the door 190 And controls the operation of the horizontal plate 120 so that the horizontal plate 120 can be positioned.

The syringe discharge cylinder 160 and the syringe sensor 170 are installed only at the lower portion of the syringe inlet 121 located below the opening 191 of the door 190.

The horizontal plate 120 is divided into an upper rotary plate 120a for supporting the upper end of the syringe C and a lower rotary plate 120b for guiding the lower portion of the syringe C, It is preferable that the horizontal plate 120 can be aged while maintaining a stable posture without flowing when the horizontal plate 120 rotates.

 In this case, the syringe inlet 121 formed in the upper swash plate 120a is formed so as to have an inner diameter larger than the outer diameter of the syringe C, which is smaller than the protrusion formed at the upper end of the syringe C to support the inserted syringe C And the syringe inlet 121 formed in the lower rotary plate 120b is formed to have an inner diameter larger than the outer diameter of the syringe C. In order to identify the syringe input port 121, the serial number may be displayed only on the upper surface of the upper rotating plate 120a.

In this case, the process of managing the epoxy is as follows.

First, when the operator presses the operation button 111, the central control unit 130 designates the number of the syringe input port 121 into which the syringe C can be input, and instructs the display unit 140 to input the number of the syringe input port 121 And at the same time the driving motor M of the horizontal plate 120 is rotated so that the designated syringe input port 121 is located below the opening 191 of the door 190. [

When the designated syringe input port 121 is positioned below the opening 191 of the door 190, the central control unit 130 controls the syringe input port 121 to which the syringe C is to be inserted and the syringe input port 121 to which the syringe C is inserted And controls the syringe discharge cylinder 160 located below the syringe inlet 121 except for the inlet of the syringe C to draw out the rod.

In this manner, since the designated syringe inlet 121 is positioned below the opening 191 of the door 190, the operator can find the syringe inlet 121 very easily and quickly.

The syringe sensor 170 senses the syringe C and the central control unit 130 senses the syringe C inserted into the syringe input port 121. When the syringe C is inserted into the syringe input port 121, ), And records the freezer extraction time. The central control unit 130 continuously counts the time when the syringe C is inserted into each syringe input port 121 and checks whether the counting is completed.

If the syringe C inserted into the syringe inlet 121 reaches a predetermined time, the central control unit 130 determines that the syringe inlet 121 is positioned below the opening 191 of the door 190 And the operation of the syringe discharge cylinder 160 is controlled so as to push up the syringe C that has been aged.

As a result, only the aged syringe C that has been aged is protruded to the upper portion of the opening 191 of the door 190, so that the operator can take out the aged syringe C very easily and accurately.

Since the syringe C is introduced and taken out through the opening 191 of the door 190, the operator can easily handle and operate the epoxy aging device 100 for semiconductor manufacturing according to the present invention. Thus, the epoxy can be stored more accurately.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be takeners of ordinary skill in the art, And such variations are within the scope of the present invention.

110 ... Enclosure 111 ... Operation button
120 ... horizontal plate 120b ... upper rotary plate
120b ... lower rotating plate 121 ... syringe input port
130 ... central control unit 140 ... display unit
150 ... label printer 160 ... syringe discharge cylinder
170 ... syringe sensor 180 ... label
190 ... door 191 ... opening hole
C ... syringe

Claims (9)

A housing having an operation button on one side thereof;
A watertight plate installed inside the housing and having a syringe inlet formed therein and having a serial number so as to identify each syringe inlet;
A syringe discharge cylinder vertically installed on the bottom of the housing for pushing up the syringe of the aged syringe input port;
A central control unit provided at one side of the housing for performing an operation control of the discharge cylinder and receiving an operation start signal from the operation button and counting an aging time and performing a history management control for each syringe;
A display unit provided at one side of the housing for displaying information on a syringe inserted into each syringe input port in real time under the control of the central control unit; And
And a label printer provided on one side of the housing for recording the aging history information related to each syringe on the label under the control of the central control unit and outputting the information. The method according to claim 1,
Further comprising a syringe sensor installed at the bottom of the housing for detecting a syringe input and generating a syringe detection signal to the central control unit. delete The method according to claim 1,
The horizontal plate is horizontally rotatable so as to be spaced apart from the bottom of the housing,
An opening is formed in the upper portion of the housing,
A door having an opening hole formed therein for partially opening and closing the opening,
Wherein the central control unit controls the operation of the horizontal plate so that the syringe input port into which the syringe to be aged is inserted or the syringe input port into which the aged syringe is inserted is positioned below the opening of the door, Device. 5. The method of claim 4,
Wherein a syringe discharge cylinder is installed only at a lower portion of the syringe input ports located below the opening of the door. The method according to claim 1,
Wherein the horizontal plate is divided into an upper rotary plate for supporting the upper end of the syringe and a lower rotary plate for guiding the lower portion of the syringe. The method according to claim 1,
Wherein the central control unit controls the syringe discharge cylinder located below the syringe input port except for the syringe input port into which the syringe is inserted and the syringe input port into which the syringe is inserted when the syringe is inserted so as to take out the rod. Epoxy aging device. 3. The method of claim 2,
The central control unit controls the syringe discharge cylinder located below the syringe input port except for the syringe input port into which the syringe is inserted and the syringe input port into which the syringe is inserted when the syringe is inserted,
Wherein the operation of the syringe discharge cylinder is not controlled so as to push up the syringe after completion of aging if it is determined that the aged syringe has not been taken out through the syringe sensor even if aging is completed. The method according to claim 1,
Further comprising an alarm unit for informing an operator of completion of the aging time under the control of the central control unit.
KR20120143328A 2012-12-11 2012-12-11 Aging apparatus for epoxy for manufacturing semiconductor pakage KR101427626B1 (en)

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Application Number Priority Date Filing Date Title
KR20120143328A KR101427626B1 (en) 2012-12-11 2012-12-11 Aging apparatus for epoxy for manufacturing semiconductor pakage

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KR101427626B1 true KR101427626B1 (en) 2014-08-07

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KR101466710B1 (en) * 2013-07-01 2014-11-28 유한회사 듀오콤 Apparatus of storage, import and export for epoxy injector and method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069136U (en) * 1992-07-07 1994-02-04 日本電子機器株式会社 Aging device
KR20050072655A (en) * 2004-01-29 2005-07-12 비전세미콘 주식회사 Managing system for management of epoxy
KR20100064216A (en) * 2008-12-04 2010-06-14 삼성모바일디스플레이주식회사 An aging test apparatus of display module

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069136U (en) * 1992-07-07 1994-02-04 日本電子機器株式会社 Aging device
KR20050072655A (en) * 2004-01-29 2005-07-12 비전세미콘 주식회사 Managing system for management of epoxy
KR20100064216A (en) * 2008-12-04 2010-06-14 삼성모바일디스플레이주식회사 An aging test apparatus of display module

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