KR101420349B1 - A check valve of centering type - Google Patents

Abstract

The present invention relates to a centering type check valve and, more particularly, to a centering type check valve of which the installation time and costs for adding a check valve to a pipe are reduced since check valve can be installed not to generate backpressure while using a conventional pipe used for centering. The centering type check valve (1000) of the present invention comprises: a centering (1100) having a body accommodating home (1140) of which the diameter can be expanded on one side of a penetration hole (1110) for flowing fluid be being installed between a pipe on an exit and a pipe on an entrance of a vibration pump used for manufacturing semiconductors; a core moving part (1210) of which cylinder shaped one end is fixated on the body accommodating home (1140); a body (1200) having a core inclination adhere part (1220) of which the diameter is reduced at a fixed angle and length from the core moving part and a fluid path formation part (1230) of which the diameter is expanded at a fixed angle toward the other end from the core inclination adhere part; a body adhere moving part (1310) moving while attached to the core moving part (1210) of the body (1200); an inclination adhere surface (1320) of the shape is a corn since the diameter is reduced from the body adhere moving part (1310); and a core (1300) having a fluid path open and close home (1330) to close the fluid path when the core touches the core inclination adhere part (1220) while being penetrated through the inclination adhere surface (1320).

Description

A CHECK VALVE OF CENTERING TYPE

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a check valve used in semiconductor manufacturing, more specifically, a check valve can be installed so as not to reduce back pressure without reducing existing piping using centering, Ring-type check valve in which it is required to add a very small amount of time and cost to installation.

Generally, the semiconductor manufacturing process is largely composed of a fabrication process and a post-process (assembly process). The pre-process refers to a process of depositing a thin film on a wafer in various process chambers, A semiconductor chip is manufactured by repeatedly performing a process of selectively etching a thin film formed on a semiconductor substrate and then processing a specific pattern. The term " post-process " And then joining with the lead frame to assemble into the finished product.

At this time, the process of depositing a thin film on the wafer or etching a thin film deposited on the wafer is performed in a process chamber in which a process gas such as silane, arsine, boron chloride, And a large amount of reaction by-product gas containing various ignitable gases, corrosive foreign substances and toxic components is generated in the process chamber during the process.

Therefore, in the semiconductor manufacturing process, a scrubber for purifying the reaction by-product gas discharged from the process chamber and discharging the gas to the atmosphere is installed on the rear side of the vacuum pump for making the process chamber vacuum.

In this state, a gate valve is provided in the passage between the process chamber and the vacuum pump. The gate valve is for opening and closing the passage between the chamber and the vacuum pump. When the pump is malfunctioning, the air flow is opened to open the passage so that the air in the chamber can be forcibly sucked into the vacuum pump side during the process. Close the passageway to prevent backflow.

In this case, it takes about 1 to 3 seconds until the gate valve is closed by an electrical signal. Within this time, air flows backward from the vacuum pump side to the chamber side, causing the chamber to be contaminated with particles.

In order to solve the above problems, Korean Patent Publication No. 2003-0097452 discloses a check valve used in semiconductor manufacturing, which includes a first port connected to a chamber, A second port connected to a pump for keeping the chamber under vacuum; A housing having the first port and the second port; A plate for opening and closing the first port; Wherein the elastic member has one end coupled to the plate and the plate is in close contact with the first port due to the elastic force of the elastic member and is separated from the first port when the pump is operated.

Therefore, when the vacuum pump malfunctions, the plate can quickly seal the chamber port by the elastic force of the spring, so that the chamber can be prevented from being contaminated by the particles moved from the vacuum pump side to the chamber side, And the passage between the vacuum pump and the chamber can be opened or closed by the structure of the valve itself.

However, since such a check valve is integrally connected to the chamber port and the pump port, it is necessary to cut the piping and reduce the length thereof in order to install the pipeline in addition to the existing piping.

Reference literature: Korean Patent Publication No. 2003-0097452 entitled "Check Valve Used in Semiconductor Manufacturing"

SUMMARY OF THE INVENTION It is an object of the present invention to solve the above problems and to provide a check valve capable of installing a check valve so as to prevent back pressure without reducing existing piping using centering, The present invention is directed to a center ring type check valve which is designed to minimize installation time and cost.

In order to achieve the above object, the center ring type check valve according to the present invention is provided between a piping and a piping on an inflow side or an outflow side of a vacuum pump used for manufacturing a semiconductor, and is provided on one side of a through- A centering ring having a body receiving groove formed to be diametrically expanded in a stepped shape; A core inclined contact portion formed in the body seating groove so as to be fixed at one end thereof in a cylindrical shape and fixed at an angle to a predetermined length at a constant length in the core portion at an inner diameter of the core, A body having a flow path forming portion formed by enlarging the diameter at a predetermined angle from the oblique contact portion to the other end; A body close-contact moving part which moves in close contact with the core part of the body, an oblique close-contact face which is cone-shaped with a diameter decreasing gradually in the body close contact with the body part and a corrugated close- And a core provided with a channel opening / closing groove that is closed when the valve body is in close contact with the valve body.

Here, the groove is formed at a predetermined position of the core oblique adhesion portion in an annular shape, and an O-ring is mounted.

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As described above, according to the center ring type check valve according to the present invention, it is possible to install a check valve so as not to reduce back pressure without reducing the existing pipe using centering, and to use a pipe as it is, The installation time and cost are very small.

1 is a perspective view showing a center ring type check valve according to an embodiment of the present invention,
Fig. 2 is a front view of Fig. 1,
Fig. 3 is a longitudinal sectional view of Fig. 1,
4 is a perspective view showing a core according to an embodiment of the present invention,
Fig. 5 is a front view of Fig. 4,
6 is a sectional view showing a center ring type check valve of the present invention in a closed state,
7 is a cross-sectional view showing a center ring type check valve of the present invention in an open state.

Hereinafter, a center ring type check valve according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. In this process, the thicknesses of the lines and the sizes of the components shown in the drawings may be exaggerated for clarity and convenience of explanation. In addition, the terms described below are defined in consideration of the functions of the present invention, which may vary depending on the intention or custom of the user, the operator. Therefore, definitions of these terms should be given throughout the specification.

In addition, in the case of adding the reference numerals to the constituent elements of the drawings, the same constituent elements are denoted by the same reference symbols as possible even if they are displayed on different drawings, Detailed description of functions and configurations is omitted. Also, directional terms such as "top", "bottom", "front", "back", "front", "forward", "rear", etc. are used in connection with the orientation of the disclosed drawing (s). Since the elements of the embodiments of the present invention can be positioned in various orientations, the directional terminology is used for illustrative purposes, not limitation.

FIG. 1 is a perspective view showing a centering type check valve according to an embodiment of the present invention, FIG. 2 is a front view of FIG. 1, FIG. 3 is a longitudinal sectional view of FIG. 1, Fig. 5 is a front view of Fig. 4. Fig.

1 to 5, a center ring type check valve 1000 according to an embodiment of the present invention includes a centering ring 1100, a body 1200, a core 1300, and O-rings 1400 and 1500 .

The centering 1100 includes a through hole 1110 having a flow passage for flowing a fluid on the central axis, an O-ring seating groove 1120 formed in an arc-like concave shape so that an O-ring 1400 is seated on the outer peripheral surface, A pipe mounting portion 1130 having a stepped portion on the outer circumferential surface on which the mounting groove is formed so that the pipe 100 is fitted and closely contacted by the O-ring 1400; And a body seating groove 1140 formed thereon.

The connection pipe 100 of the pipe 100 is connected to the connection pipe 100 of the pipe 100 by the O-ring 1400 seated in the O-ring mounting groove 1120, Thereby preventing the fluid from leaking.

The body 1200 is formed in a cylindrical shape and has a core inner peripheral portion 1210 having an inner diameter formed by a predetermined length at a certain diameter and a core vertical core portion 1220 having a constant length and reduced in diameter at a constant angle. And the flow path forming portion 1230 is formed by enlarging the diameter of the flow path forming portion 1230 at a certain angle from the other end of the core inclined contact portion.

The groove 1221 is annularly formed at a predetermined position of the core oblique adhesion portion 1220 so that the oblique contact face 1320 of the core 1300 is closely contacted without leakage when the O-ring 1500 is mounted.

The core 1300 includes a body close-contact moving part 1310 which moves in close contact with the core moving part 1210 of the body 1200, and a cone-shaped moving part 1310 which is gradually reduced in diameter from the close- And a channel opening and closing groove 1330 formed to penetrate the oblique face 1320 and to be closed when the oblique face is in contact with the core oblique face 1220. [

The flow path opening / closing grooves 1330 are formed at an equal angle at intervals of 90 degrees in the present embodiment.

6, when the center ring type check valve 1000 according to the present invention is removed from the pipe 100 and the centering ring provided between the pipe 100 and the pipe 100 is replaced and the fluid moves from the left side to the right side, The inclined contact surface 1320 is brought into close contact with the core tapered contact portion 1220 of the body 1200 while the core 1300 moves and the flow path opening and closing groove 1330 formed in the tapered contact surface 1320 contacts the core And is closed by the slanting portion 1220 to block further fluid from moving from left to right.

7, when the fluid moves from the right side to the left side, the fluid pushes the core 1300 so that the inclined contact surface 1320 is spaced apart from the core tapered portion 1220, 1300 to the left through the flow path opening / closing groove 1330. [

Of course, if the center ring check valve 1000 is installed in the opposite direction as needed, it is possible to change the position of the back pressure prevention valve 1000. [

In addition, a check valve can be installed so as not to reduce the existing piping 100 in which the conventional centering is used, so that the piping 100 is used as it is, so that the centering check valve 1000 is added to the piping 100 The installation time and cost are very small.

The embodiments of the present invention described above and shown in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited only by the matters described in the claims, and those skilled in the art will be able to modify the technical idea of the present invention in various forms. Accordingly, such improvements and modifications will fall within the scope of the present invention if they are apparent to those skilled in the art.

100: Piping
1000: Center ring type check valve 1100: Centering
1110: Through hole 1120: O-ring seat groove
1130: pipe fitting part 1140: body fitting groove
1200: Body 1210: Core East
1220: Core inclined contact portion 1221: Groove
1230: flow path forming part 1300: core
1310: body close-contact moving part 1320: oblique contact face
1330: Euro opening / closing groove 1400,1500: O ring

Claims (3)

A body seating groove 1140 which is provided between the piping and the piping on the inflow side or the outflow side of the vacuum pump used for manufacturing a semiconductor and has a through hole 1110 through which the fluid flows, A centering 1100 having a centering 1100;
The body receiving groove 1140 is formed with a cylindrical one end fixed and fixed to the body receiving groove 1140. The inside diameter of the body receiving groove 1140 is formed by a core 1210 having a predetermined length and a constant diameter at one end, A body 1200 having a tight fitting portion 1220 and a flow path forming portion 1230 formed by enlarging the diameter at a certain angle from the other end of the core oblique fitting portion;
A body contact moving part 1310 which moves in close contact with the core moving part 1210 of the body 1200 and an oblique contact face 1320 which is conical in shape and whose diameter gradually decreases in the body contacting moving part 1310 And a core (1300) having an oil passage opening / closing groove (1330) formed through the slope contact face (1320) and closed when it is in close contact with the core slope contact portion (1220). The method according to claim 1,
The center ring type check valve according to any one of the preceding claims, wherein a groove (1221) is annularly formed at a predetermined position of the core oblique adhesion portion (1220) and an O-ring (1500) is mounted. delete

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