KR101415918B1 - Laser multi-sacn apparatus - Google Patents

Abstract

The present invention relates to a scanning apparatus using laser beams. The scanning apparatus according to an embodiment of the present invention, which uses laser beams, includes: a scanner which reflects an incident laser beam continuously to modify a path of the incident laser beam based on a scanner control signal; and an optical scanning system which scans a target object with the laser beam reflected by the scanner. The optical scanning system includes a stage, a moving unit, and a control unit.

Description

[0001] LASER MULTI-SACN APPARATUS [0002]

The present invention relates to a scanning device using a laser beam, and more particularly, to a scanning device using a laser multi-scanning device capable of performing a plurality of areas at the same time and improving the resolution of an image by reducing a size of a focus of a laser beam formed in a final scanning area .

In general, a laser scanning apparatus uses a scanner that deflects a laser beam to be imaged so that the path is continuously changed within a certain radiation angle. The faster the scan runs, the better the efficiency. However, the operation speed of the scanner is limited, which directly affects the scan speed and limits the speed of the scan. Therefore, a scanning device capable of high-speed scanning was required.

SUMMARY OF THE INVENTION An object of the present invention is to provide a multi-scanning apparatus using a laser for simultaneously scanning a plurality of regions for high-speed scanning.

Another object of the present invention is to provide a multi-scanning apparatus using a cylindrical optical system or a part of a spherical lens in order to efficiently arrange a plurality of optical systems along a plurality of laser travel paths.

Another object of the present invention is to provide a multi-scan apparatus that uses a cylindrical relay optical system to reduce the size of a focal point to provide a higher resolution.

A laser multi-scan apparatus according to the present invention includes a scanner for reflecting an incident laser beam so as to continuously change a path at a predetermined radiation angle in accordance with a scanner control signal, a scanning optical system for scanning a laser beam reflected by the scanner onto a measurement object, And the scanning optical system can scan a plurality of laser beams onto the object to be measured.

The multi-scan apparatus according to the present invention can scan a plurality of areas at the same time, thereby enabling high-speed scanning. Further, by using the narrow lens formed as a part of the spherical lens, it is possible to improve the spatial arrangement efficiency of each component.

The multi-scan apparatus according to the present invention introduces a cylindrical relay optical system to reduce the focus size at the final focus position, thereby improving the image resolution.

1 is a conceptual diagram of a scanning device,
2 is a perspective view illustrating a scanning apparatus according to another embodiment of the present invention,
3 is a perspective view of a scanning apparatus according to another embodiment of the present invention,
4 is a perspective view of a scanning apparatus according to another embodiment of the present invention,
FIG. 5 is a developed view of a scanning device according to a perspective view and a beam path, according to another embodiment of the present invention;
6 is a perspective view of a scanning apparatus according to another embodiment of the present invention,
7 is a perspective view of a multi-scan apparatus according to an exemplary embodiment of the present invention,
8 is a perspective view of a multi-scan apparatus according to another embodiment of the present invention,
9 is a perspective view illustrating a multi-scan apparatus according to another embodiment of the present invention,
10 is a perspective view illustrating a multi-scanning apparatus according to another embodiment of the present invention, and FIG.
11 shows a part of the surface of the condenser lens according to an embodiment of the present invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component. And / or < / RTI > includes any combination of a plurality of related listed items or any of a plurality of related listed items.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between. Also, the fact that the first component and the second component on the network are connected or connected means that data can be exchanged between the first component and the second component by wire or wirelessly.

Also, suffixes """ module "and" part "for components used in the following description are given only for convenience of description, It is not. Accordingly, the terms "module," "module," and " part " When such components are implemented in practical applications, two or more components may be combined into one component, or one component may be divided into two or more components as necessary.

In this description, the optical system may be an optical system or a combination of a plurality of optical systems. Also, whichever optical mechanism belongs to which optical system, this is merely an explanatory convenience, and any of the above optical mechanisms can constitute a separate system separately. Thus, it is not described specifically what optical system belongs to which optical system.

The transverse mode means the cross section of light that is perpendicular to the optical axis, i.e., the axis along which light travels. The transverse mode component means a light component of any one of the axes of the light. The first and second transverse mode directions are preferably perpendicular to each other. Hereinafter, the "first transverse mode direction" is an arbitrary axis perpendicular to the optical axis, and includes any one of the first axis, the first direction, the (x, y, z) Or in the direction, the longitudinal direction, the lateral direction, and the like. In particular, with respect to the longitudinal direction (vertical direction) and the lateral direction (horizontal direction), the longitudinal direction is a direction normal to the plane by the path of the laser beam, the lateral direction is the direction perpendicular to the longitudinal direction and the path direction of the laser beam Meaning or direction can be determined in relation to the ground. The "first transverse mode" means that the first axis (direction) component has the largest component. The first transverse mode component may also be referred to as the first component.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

Figure 1 shows a conceptual diagram of a scanning device.

The scanning apparatus shown in Fig. 1 includes a laser oscillating unit 1 for oscillating a laser, a scanner 10 rotatably installed around a stationary point, and a scanner 10 for forming a focus on a target plane TP. And a condensing lens 20 for condensing a parallel laser beam whose traveling direction is adjusted by passing therethrough.

It is preferable that the laser beam oscillated in the laser oscillation portion is substantially parallel or convergent. The laser oscillating section may further comprise a condensing optical system for making the oscillated laser beam parallel or converging. In this embodiment, all the transverse mode components of the laser beam are shown as substantially symmetrical (the transverse mode is circular or the light flux is parallel), but it may have an asymmetric transverse mode (non-parallel light flux) depending on the application. In Fig. 1, the laser oscillating section 1 scans the laser toward the scanner 10 arranged in the positive y-axis direction.

The scanner 10 can deflect the incident laser beam so that the path is continuously changed within a certain radiation angle in accordance with the scanner control signal provided by the controller (not shown). Specifically, according to the driving of the scanner 10, the reflection path of the incident beam having the path R2 can be changed from R3 to R4 to R5. Since this path variation is continuous, there are a myriad of reflection paths not shown between the reflection paths R3, R4, and R5. The behavior of the reflected beams R3, R4, and R5 may also be applied to other beams not shown. The reflected beam, which is reflected by the scanner 10 and changes its path continuously at a certain radiation angle, will be referred to as a radial multi-path (laser) beam or a deflection (laser) beam.

The scanner 10 may include a galvanometer, a polygon mirror, a resonant scanner, an acousto-optic deflector, and the like. The scanner 10 can be turned on / off or the deflection period can be changed in accordance with the scanner control signal.

The condensing lens 20 is disposed on the path along which the multi-path beams R3, R4, and R5 by the scanner 10 travel. It is preferable that the distance between the condenser lens 20 and the target plane TP or the distance between the condenser lens 20 and the scanner 10 is f when the condenser lens 20 has the focus f. The condenser lens 20 may be composed of a spherical convex lens. The condensing lens 20 can scan so that the multi-lens laser beams R3, R4, and R5 reflected by the scanner 10 converge perpendicularly to the target plane TP. The focus of the condensing lens 20 is such that the laser beams R6, R7 and R8 transmitted through the condensing lens 20 travel parallel to each other, R6, R7, R8). The focal point of the condensing lens 20 may be related to the width of the scan line SL by the laser beams R6, R7 and R8 transmitted through the condenser lens 20. [

As the scanner 10 rotates, a plurality of foci can be formed along the scan line SL on the target plane TP. The magnified S indicates the focal spot of the laser beam. The focal spot size d of the laser beam is known as a formula 1 when the wavelength of the laser beam is λ, the focal distance of the condenser lens 20 is f, and the diameter of the laser beam incident on the condenser lens 20 is D have.

If the size (d) of the laser beam formed on the target plane TP is large, the image resolution during the measurement of the surface shape may be deteriorated and the processing line width resolution during laser processing may be degraded. Therefore, in order to decrease d, it is necessary to increase D or decrease f. However, the diameter D of the beam incident on the condenser lens 20 is limited to the maximum size due to the size limitation of the scanner 10. When the focal length f of the condenser lens 20 is reduced, the scan width is reduced, distortion of the laser beam is increased, and the cost of the condenser lens 20 can be increased.

The scanning apparatus according to the present embodiment may further include a stage 50 for placing a target on an upper surface. The scanning device may further include a transfer device for scanning the constant width SL of the y-axis and then transferring the stage 50 in the x-axis direction.

The scanning apparatus according to the present embodiment may further include a detector 6 for detecting the intensity of the laser beam reflected on the target plane TP. The scanning device may further include a beam splitting unit 30 that directs the laser beam reflected on the target plane TP to the detection unit 6.

In the scanning method of the scanning apparatus according to the present embodiment, a part of the laser beam scanned by the laser oscillating unit 1 is transmitted in the y-axis direction by the beam splitting unit 30 in the path R1 (hereinafter referred to as "laser beam R1" The remainder is reflected in the positive z-axis direction. The laser R2 transmitted through the beam splitter 30 is reflected by the scanner 10 to the multi-path beams R3, R4 and F5. The multi-path beams R3, R4 and F5 are collimated beams R6, R7 and R8 by the converging lens 20 to form a focus on the target plane TP. The beam reflected by the target plane forms a path to the beam dividing section 30 inversely (paths R6, R7 and R8, paths R3, R4 and F5 and path R2) 30, a part of the beam R9 is reflected in the negative z-axis direction and reaches the detection unit 6. [

2 is a perspective view illustrating a scanning apparatus according to another embodiment of the present invention.

2, the scanning apparatus includes a laser oscillator 1 for oscillating a laser beam, a laser oscillator 1 for controlling the laser beam incident on the scanner in response to a scanner control signal provided from a controller (not shown) A converging lens 20 for converging a parallel laser beam whose traveling direction is controlled by the scanner 10 so as to form a scan line SL by forming a focus on the target plane TP, ), A light receiving lens 25 for refracting the laser beam reflected by the target plane TP to a specific position, and a light receiving lens 25 disposed at the focal position of the light receiving lens 25 to measure the intensity of the beam reflected from the target plane TP And a detection unit 7 for detecting the position of the object. The light receiving lens 25 may be composed of a spherical convex lens.

The scanning apparatus shown in Fig. 1 overlaps a part of the path of the beam reflected from the target plane and the path of the beam incident on the target plane, but the scanning apparatus shown in Fig. 2 differs from the scanning apparatus shown in Fig. The beam path is different.

3 is a perspective view of a scanning apparatus according to another embodiment of the present invention. Please refer to Fig.

Referring to FIG. 3, the scanning apparatus according to the present embodiment may further include a relay optical system 60 in the configuration of the scanning apparatus shown in FIG. In Fig. 3, the detection unit is omitted.

The relay optical system 60 can change the radial multi-path beam (deflection beam) by the scanner 10 to another position or adjust the focal position of the laser beam. The deflected beam moved by the relay optical system 60 may be the same as a sectorial deflected beam by the scanner 10 or a sectorial deflected beam having a different radiation angle. This may vary depending on the focal length of the optical unit constituting the relay optical system 410 to be described later.

The relay optical system 60 transmits a deflected beam by the scanner 10 to form a focus on the virtual plane VP and includes a first convex lens 62 having a focal length f1, And a second convex lens 64 arranged at a focal distance f2 and spaced apart from the first convex lens 21 by a distance L = f1 + f2. When the focal lengths of the first and second convex lenses 62 and 64 are the same, the path shape of the radial multi-path laser beam formed by the multi-lens path laser beam transmitted through the second convex lens 64, Path laser beam according to the present invention.

3, by adjusting the focal distance f1 of the first convex lens 62 and the focal distance f2 of the second convex lens 64, the diameter D of the beam incident on the condenser lens 20 can be increased There is an advantage. However, adjusting f1 and f2 may have certain limitations.

4 is a perspective view of a scanning apparatus according to another embodiment of the present invention. See FIG.

The scanning apparatus shown in FIG. 4 may further include a reflector 70 as compared to the scanning apparatus shown in FIG. The reflective portion 20 can adjust the scanning direction.

The scanning apparatuses shown in FIGS. 1 to 4 can not adjust the size of the focal spot of the beam to the same size.

5 is a developed view of a scanning device according to a perspective view and a beam path in accordance with another embodiment of the present invention. See FIG.

Referring to FIG. 5, the scanning device may include a laser oscillator, a scanner 10, a cylindrical relay optical system 70, and a condenser lens 20.

The laser oscillating section (not shown) can scan the scanner 10 with a laser beam whose light flux is parallel. The laser oscillating portion may oscillate a laser beam having an asymmetric transverse mode (non-parallel beam) depending on the application.

The scanner 10 deflects the laser beam incident according to the scanner control signal provided by a control device (not shown) such that the path is continuously changed at a certain radiation angle, and deflects the deflection beams L1, L2, 70, respectively.

The cylindrical relay optical system 70 may include a cylindrical optic. The cylindrical optic means a optic that has a curvature only in one direction and transmits or reflects the incident beam so as to condense or diffuse only in one-dimensional direction. The first direction cylindrical optic means a cylindrical optic for focusing or diffusing the first direction component of the incident beam. The cylindrical lens means a transmissive type, and the cylindrical mirror means a reflective type. The cylindrical lens may have various shapes. For example, it may have a curvature only on one side (incidence surface or exit surface), or both sides (incidence surface and exit surface) may have a curvature.

The cylindrical relay optical system 70 may include first and second cylindrical lenses 72 and 74. It is preferable that the first and second cylindrical lenses 72 and 74 are cylindrical convex lenses. By using the cylindrical lens, the degree of divergence of the specific transverse mode component of the incident beam can be changed, and the size of one axial focal point can be adjusted. It is preferable that the first and second cylindrical lenses 420 and 430 have a curvature only in the horizontal direction. This is because the plane formed by the incident radial multi-path beam is a horizontal plane. If cylindrical optics are used, unlike spherical lenses, there is less restriction on the placement according to lens size.

The first cylindrical lens 420 refracts the deflected beam such that the path of the incident radial multi-path laser beam is parallel to the optical axis of the first cylindrical lens 420. A multi-path beam having a path parallel to each other and transmitted through the first cylindrical lens 420 will be referred to as a parallel multi-path beam. The first cylindrical lens 420 may cause the horizontal component of the incident beam to converge. The position where the light flux of the transmission beam converges may be substantially the same as the focal length f3 of the first cylindrical lens 420. [

The second cylindrical lens 74 is arranged so that the parallel multiaxial beam transmitted through the first cylindrical lens 72 passes through the focal point f4 in the direction of the transmitting surface of the second cylindrical lens 74, Refract the beam. The second cylindrical lens 74 changes the degree of divergence of the horizontal component of the incident beam. In this embodiment, the beam travel distance of the first and second cylindrical lenses 72 and 74 is preferably equal to the sum of the focal lengths f3 and f4 of the first and second cylindrical lenses 72 and 74 . In this case, the divergent incident beam is changed into a parallel beam by the second cylindrical lens 430.

The condenser lens 20 is disposed on the path through which the laser beam transmitted through the second cylindrical lens 74 travels. It is preferable that the optical axis of the condenser lens 74 and the optical axis of the second cylindrical lens 74 coincide with each other. The condensing lens 20 can scan so that the laser beam transmitted through the second cylindrical lens 74 converges on the target plane TP. The condensing lens 20 is preferably a spherical convex lens.

The size of the focal lengths f3 and f4 of the first and second cylindrical lenses 72 and 74 may be appropriately selected so that the magnitude of the horizontal component of the beam incident on the first cylindrical lens 72, The ratio of the horizontal component size of the beam passing through the lens 74 can be adjusted. The adjusted ratio can be related to equation (1). In addition, by adjusting the size and position of the focus f of the condenser lens 20, the size of the beam incident on the condenser lens 20 can be increased, Can be made smaller.

6 is a perspective view of a scanning apparatus according to another embodiment of the present invention. Please refer to Fig.

5, a scanning apparatus according to an embodiment of the present invention may include a laser oscillation unit (not shown), a scanner 10, a cylindrical relay optical system 80, and a target lens 20. The cylindrical relay optical system 70 may include a cylindrical concave mirror 82, a flat mirror 83, and a third cylindrical lens 84.

The scanning apparatus of Fig. 6 mostly corresponds to the scanning apparatus of Fig. 6, and only the cylindrical relay optical system is different from each other. A description of the corresponding components will be omitted.

The cylindrical relay optical system 80 can move the radial multi-lens laser beam deflected by the scanner 10 to another position. The laser beams L1, L2, and L3 of the scanner 10 are parallel to each other by using the cylindrical concave mirror 82 instead of the first cylindrical lens 72 of the cylindrical relay optical system 70 of FIG. 5 Type multi-beam laser beam. It is preferable that the cylindrical concave mirror 82 is coated with a reflective material or a reflection plate is attached to the concave portion. In the case of a cylindrical convex lens, distortion may occur due to transmission of the beam. However, in the case of a cylindrical concave mirror, since the beam is not transmitted, the distortion or error due to the transmission of the medium can be reduced or eliminated.

The planar mirror 83 can change the path of the parallel multi-mirror beam reflected by the cylindrical concave mirror 82 in the appropriate direction. This can be useful if the arrangement of the elements that make up the device requires the plane mirror 83 to change the beam path to the target plane TP. In addition, when the reflection angle of the incident beam and the reflection beam of the cylindrical concave mirror is large, a distortion or an error may occur, and the reflection angle can be reduced by using the plane mirror 530. Therefore, it is preferable that the angle along the path of the beam incident on the cylindrical concave mirror 520 and the beam reflected by the cylindrical concave mirror 520 is smaller (closer to 0).

7 is a perspective view of a multi-scan apparatus according to an embodiment of the present invention. Referring to FIG. 1, detailed description of the components corresponding to FIG. 1 will be omitted.

Referring to FIG. 7, the multi-scan apparatus according to the present embodiment includes first and second laser oscillators 101 and 102 for oscillating a laser beam, A scanner 10 for reflecting the laser beam reflected by the scanner so as to be continuously changed, and first and second condenser lenses 130 and 135 for scanning the object to be measured with the laser beam reflected by the scanner.

The traveling path of the beam L01 oscillated by the first laser oscillator 101 and the beam L02 oscillated by the second laser oscillator 102 are different from each other and both beams L01 and L02 travel toward the scanner 10. [ The beams L01 and L02 are directed by the scanner 10 to a multipath including the path L12 in the path L11 and a multipath including the path L22 in the path L21, respectively. It is preferable that the beams L01 and L02 are directed to the rotation center axis of the scanner 10. [

The first multipath beams L11 and L12 by the first laser oscillator 101 are beams that travel in parallel paths to each other by the first condenser lens 130 and form a target plane disposed on the stage 20 Scan.

The second multipath beams L21 and L22 by the second laser oscillator 102 are beams that travel in a path parallel to each other by the second condenser lens 135 and form a target plane disposed on the stage 20 Scan. The scan area by the second laser oscillator 102 and the scan area by the first laser oscillator 101 are different from each other. That is, a plurality of areas can be scanned at one time, and the scan time can be shortened. It is preferable that the scanning direction by the second laser oscillator 102 and the scanning direction by the first laser oscillator 101 are parallel to each other.

The multi-scan apparatus according to the present embodiment may further include a transfer unit (not shown) for moving the stage and a control unit for controlling the transfer unit. The transfer unit is configured to transfer a plurality of laser beams to the target plane by the first and second laser oscillators 101 and 102 in the direction of xy plane and the first and second laser oscillators 101 and 102, Axis direction in the scanning direction (x-axis direction) in the target plane of the beam. When the one-dimensional scan by the plurality of laser beams by the first and second laser oscillators 101 and 102 is completed, the control unit controls the transfer unit to be transferred in the y-axis direction by the length d1 so that the next scan line of the target is scanned . The control unit can control the transport unit to be transported in the y-axis direction by the length d2 so that the scan areas by the plurality of laser beams by the first and second laser oscillators 101 and 102 do not overlap. The length d1 is preferably smaller than the length d2. The control unit preferably controls the length d2 conveyance control to be preferentially processed over the length d1 conveyance control.

The first and second condenser lenses 130 and 135 may be spaced apart from each other, and it may be difficult to use a general spherical lens. It is preferable that the first and second condenser lenses 130 and 135 are formed as a part of a spherical lens. See Fig. 11 for a lens formed as a part of a spherical lens.

11 shows a part of the surface of the condenser lens according to an embodiment of the present invention.

A dashed line in Fig. 11 (a) indicates a line where a general spherical lens is cut. 11 (b) to 11 (e) show a perspective view, a plan view, a right side view and a front view of the narrow lens after being cut by the chain double-dashed line in Fig. 11 (a). The first multipath beams L11 and L12 and the second multipath beams L21 and L22 shown in FIG. 7 have a substantially two-dimensional plane. Therefore, the narrow lens, which is a part of the spherical lens shown in Fig. 11, can change the path of the incident beam, and can take up a small volume.

8 is a perspective view of a multi-scanning apparatus according to another embodiment of the present invention. Referring to FIG. 1, detailed description of the components corresponding to FIG. 1 will be omitted.

Referring to FIG. 8, the multi-scan apparatus according to the present embodiment includes a laser oscillator 201 for oscillating a laser beam, a scanner 201 for deflecting the incident laser beam so that the path is continuously changed within a certain angle of incidence according to a scanner control signal, A beam splitter 250 for splitting the incident laser beam into a plurality of beams, and third and fourth condenser lenses 230 and 230 for scanning the plurality of laser beams split by the beam splitter 250, 235).

The beam L0 oscillated by the laser oscillator 201 travels through the multipaths L1, L2, and L3 by the scanner 10.

The radial multipath beams L1, L2 and L3 are divided into third multipath beams L11, L12 and L13 and fourth multipath beams L21, L22 and L23 by a beam splitter. The third multipath beams L11, L12 and L13 and the fourth multipath beams L21, L22 and L23 are respectively converted into parallel multipath beams by the third and fourth converging lenses 230 and 235, 20 to scan the target plane. The third multipath beams L11, L12, and L13 and the fourth multipath beams L21, L22, and L23 can scan a plurality of regions in the same time period, thereby shortening the scan time.

The multi-scan apparatus according to the present embodiment may further include a transfer unit (not shown) for moving the stage and a control unit for controlling the transfer unit. The control unit controls the moving speed of the transfer unit in the y-axis direction differently so that the multiple scan areas by the third multipath beams L11, L12, and L13 and the fourth multipath beams L21, L22, . A detailed description of this can be found in FIG.

It is preferable that the third and fourth condenser lenses 230 and 235 take up a small volume. It is preferable that the third and fourth converging lenses 230 and 235 are narrow lenses that are part of the spherical lenses shown in Fig.

9 is a perspective view illustrating a multi-scanning apparatus according to another embodiment of the present invention. Please refer to Fig. 5 and Fig. The multi-scan apparatus according to this embodiment can correspond to an apparatus capable of moving a focal distance of a laser beam by adding a relay optical unit to the multi-scan apparatus of FIG. It is preferable that the relay optical portion is the cylindrical relay optical portion shown in Fig. The detailed description of the corresponding components of FIG. 5 and FIG. 7 among the components of FIG. 9 may be replaced with the contents described above.

Referring to FIG. 9, the multi-scan apparatus according to the present embodiment includes first and second laser oscillators 101 and 102 for oscillating a laser beam, A first relay optics 160 and 165 and a second relay optics 170 and 175 for relaying the respective laser beams reflected by the scanner 10, And first and second reflectors (115 and 117) for reflecting the respective laser beams passed through the second relay optical unit and respective beams reflected by the first and second reflectors (115 and 117) And first and second condenser lenses 130 and 135 for scanning.

The lenses 160 and 165, 170 and 175 constituting the first relay optics 160 and 165 and the second relay optics 170 and 175 are cylindrically convex lenses as shown in FIG. desirable. In this embodiment, the relay optical portion of Fig. 5 is used as the relay optical portion, but is not limited thereto. For example, a relay optical part provided with the cylindrical concave mirror shown in Fig. 6 can be used. By the cylindrical relay optical unit according to the present embodiment, the laser beam in the target plane can form a smaller focus radius.

The first and second reflectors 115 and 117 may not be used if the progress path of the scan lasing beam and the arrangement of other components with respect to the stage 20 are permitted in this embodiment.

It is preferable that the first and second converging lenses 130 and 135 are narrow lenses formed as a part of the spherical lens shown in FIG.

The multi-scan apparatus according to the present embodiment may further include a transfer unit and a control unit for appropriately shifting the stage 20 to avoid overlapping scan areas.

10 is a perspective view illustrating a multi-scanning apparatus according to another embodiment of the present invention. Please refer to Fig. 5 and Fig. The multi-scan apparatus according to this embodiment can correspond to an apparatus capable of moving a focal distance of a laser beam by adding a relay optical unit to the multi-scan apparatus of FIG. It is preferable that the relay optical portion is the cylindrical relay optical portion shown in Fig. The detailed description of the corresponding components of Fig. 5 and Fig. 7 among the components of Fig. 10 can be replaced with the contents described above.

Referring to FIG. 10, the multi-scan apparatus according to the present embodiment includes a laser oscillator 201 for emitting a laser beam, a scanner 201 for deflecting the incident laser beam so that the path is continuously changed within a certain radiation angle in accordance with the scanner control signal, A beam splitter 250 for splitting the incident laser beam into a plurality of beams, a third relay optical unit 260 and 265 for relaying each of the plurality of laser beams split by the beam splitter 250, The respective laser beams whose focus positions are relayed by the relay optical parts 270 and 275, the third relay optical parts 260 and 265 and the fourth relay optical parts 270 and 275 are reflected in the direction of the stage 20 Third and fourth condensers 215 and 217 for scanning each of the laser beams reflected by the third and fourth reflectors 215 and 217 and the third and fourth reflectors 215 and 217 onto the measurement object on the stage 20, (230, 235).

The lenses 260 and 265, 270 and 275 constituting the third relay optical units 260 and 265 and the fourth relay optical units 270 and 275 are cylindrical convex lenses as shown in FIG. desirable. In this embodiment, the relay optical portion of Fig. 5 is used as the relay optical portion, but is not limited thereto. For example, a relay optical part provided with the cylindrical concave mirror shown in Fig. 6 can be used. By the cylindrical relay optical unit according to the present embodiment, the laser beam in the target plane can form a smaller focus radius.

The third and fourth reflectors 215 and 217 may not be used if the progress path of the scan laser beam and the arrangement of other components with respect to the stage 20 are permitted in this embodiment.

It is preferable that the third and fourth converging lenses 230 and 235 are narrow lenses formed as a part of the spherical lens shown in FIG.

The multi-scan apparatus according to the present embodiment may further include a transfer unit and a control unit for appropriately shifting the stage 20 to avoid overlapping scan areas.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, It will be understood by those skilled in the art that various changes and modifications may be made by those skilled in the art without departing from the spirit and scope of the present invention.

10: scanner 20: condenser lens
25: receiving lens 60: relay optical system

Claims (15)

A scanner that reflects the incident laser beam so that the path is continuously changed in accordance with a scanner control signal at a predetermined radiation angle; And
And a scanning optical system for scanning the object to be measured with the laser beam reflected by the scanner,
Wherein the scanning optical system scans a plurality of laser beams in a plurality of areas of the measurement object,
A stage arranged on the upper surface of the measurement object;
A transfer unit for moving the stage in a first direction different from a direction in which the plurality of laser beams are scanned by the measurement object; And
Further comprising a control unit for controlling the transfer unit such that the stage is moved by a distance of either the first distance or the second distance in the first direction. The method according to claim 1,
Wherein the plurality of laser beams are caused by beams emitted from a plurality of laser light sources. The method according to claim 1,
Further comprising at least one beam splitter for transmitting an incident beam to a plurality of beams,
Wherein the plurality of laser beams is by the at least one beam splitter. The method of claim 3,
Wherein the at least one beam splitter is disposed between the scanner and the scanning optics. delete The method according to claim 1,
Wherein the plurality of laser beams are scanned in a direction to be scanned to the measurement object and in a second direction different from the first direction,
Wherein the control unit controls the transfer unit such that the stage is moved by the first distance after the scanning of the plurality of laser beams in the second direction is completed. The method according to claim 6,
Wherein the control unit controls the transport unit such that the stage is transported by the second distance such that each scan region of the plurality of laser beams is not overlapped. 8. The method of claim 7,
Wherein the first distance is less than the second distance,
Wherein the control unit processes the second distance traversal of the stage prior to the first distance traversal. The method according to claim 1,
Wherein the scanning optical system includes a plurality of scanning lenses arranged in a path of each of the plurality of laser beams such that a focal point of each of the plurality of laser beams is formed in the plurality of areas of the measurement object. A scanner that reflects the incident laser beam so that the path is continuously changed in accordance with a scanner control signal at a predetermined radiation angle; And
And a scanning optical system for scanning the object to be measured with the laser beam reflected by the scanner,
Wherein the scanning optical system scans a plurality of laser beams in a plurality of areas of the measurement object,
Wherein the scanning optical system includes at least one relay optical system for adjusting a radial multi-path beam, which is reflected by the scanner and is reflected at a certain radiation angle, from the plurality of laser beams to be emitted at a second radiation angle from another position A multi-scan device. 11. The method of claim 10,
Wherein at least one lens of at least one lens belonging to the relay optical system is a bar-shaped lens formed by cutting a part of a spherical lens having a circular cross section. 11. The method of claim 10,
The relay optical system
A first refracting optical system for refracting the radial multi-path beam by the scanner of the first laser beam in a fourth direction,
And a second refractive optical system for refracting the multi-path beam in the fourth direction by the first refractive optical system so as to pass through an arbitrary position. 13. The method of claim 12,
Wherein the first and second refractive optical systems are first and second bar lenses respectively corresponding to respective spherical lenses having first and second focal lengths. 13. The method of claim 12,
Wherein the first and second refractive optical systems are first and second cylindrical lenses having third and fourth focal lengths, respectively. 13. The method of claim 12,
Wherein the first refractive optical system is composed of a cylindrical mirror and a plane mirror such that the radial multi-mirror beam by the scanner of the first laser beam is directed in the fourth direction in another plane.

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