KR101398807B1 - Apparatus of manufacturing photovoltaic cell - Google Patents

Abstract

The present invention provides a solar cell manufacturing apparatus capable of continuously forming a light absorption layer by increasing the chalcogenation reactivity. A solar cell manufacturing apparatus according to an embodiment of the present invention includes a chamber in which a target body is subjected to a chalcogenation reaction; And a transfer means for transferring the object to the chamber, the transfer means being located inside the chamber, positioning the chalcogen source on the object transferred in the loading portion, and transferring the microgap An engaging portion for interposing the porous member between the object and the chalcogen source; Heating the chalcogen source transferred from the coupling portion to allow the chalcogen source to reach the object through the micropores of the microporous member and to undergo a chalcogenation reaction to form a chalcogenide formation part; And a separating portion located inside the chamber and separating the microporous member from the chalcogenized object, wherein the conveying means sequentially conveys the object to the object loading portion, the engaging portion, the chalcogenization forming portion, and the separating portion do.

Description

[0001] Apparatus of manufacturing photovoltaic cell [0002]

TECHNICAL FIELD OF THE INVENTION The present invention relates to a solar cell manufacturing apparatus, and more particularly, to a solar cell manufacturing apparatus capable of continuously manufacturing a solar cell including a chalcogen material.

In order to prepare for depletion of petroleum resources, alternative energy resources are actively being developed, and many researches are being carried out especially in the development of solar energy resources. Development of solar energy resources is mainly composed of solar power generation that converts solar energy into electric energy, and research is focused on the development of high efficiency solar cells.

The solar cell has a p-n junction in which a p-type semiconductor layer and an n-type semiconductor layer are joined, and sunlight reaches the p-n junction to generate photovoltaic power to generate electrical energy. Currently, the first-generation solar cell, silicon-semiconducting solar cell, is mainly used. However, compound thin-film solar cell, which is a second-generation solar cell, is being developed due to short- and light-weight shortening, economical efficiency, productivity and product applicability.

Chalcopyrite-based compound semiconductor materials are used as a light absorption layer in a compound thin-film solar cell, for example, CuInSe ₂ . Such a brassite based compound semiconductor material has a direct transition type energy band gap and a light absorption coefficient of 1 x 10 < ⁵ > cm < ^{-1 &} gt ;, which is the highest among semiconductors. Thus, a thin film having a thickness of 1 to 2 [ , And long-term electro-optical stability. CuInSe ₂ has a band gap of 1.04 eV, and part of indium (In) is substituted with gallium (Ga) and part of selenium (Se) is replaced with sulfur (S) in order to match an ideal band gap of 1.4 eV. The bandgap of CuGaSe ₂ is 1.6 eV and that of CuGaS ₂ is 2.5 eV. Thus, a siliceous compound comprising copper-indium-gallium-selenium is referred to as CIGS, and a material comprising copper-indium-gallium-selenium-sulfur is referred to as CIGSS.

However, since such CIGS or CIGSS is a multi-component compound, it is very difficult to produce a light absorbing layer using such a substance. In addition, since selenization carried out during the process of manufacturing a light absorbing layer uses H ₂ Se gas, which is highly toxic and highly corrosive, attention is paid to use, and additional costs are incurred due to installation of a special waste gas treatment device. In addition, selenium tends to form a gas having a high molecular weight when forming a selenium layer by vapor deposition or evaporation, and even when a solid phase in the chamber is unevenly formed even at a small temperature gradient, the light absorbing layer has a non-uniform selenium concentration gradient And thus there is a problem that the chalcogenation reactivity is lowered and the optical coherence layer having a large surface roughness is formed. These problems may reduce the efficiency of the solar cell.

The technical problem to be solved by the technical idea of the present invention is to provide a solar cell manufacturing apparatus which can easily increase the chalcogenation reactivity and continuously form a light absorption layer.

However, these problems are illustrative, and the technical idea of the present invention is not limited thereto.

According to an aspect of the present invention, there is provided a solar cell manufacturing apparatus comprising: a chamber in which a target object is subjected to a chalcogenation reaction; And a transfer means for transferring the object to the chamber, wherein the transfer means is located inside the chamber and positions the chalcogen source on the object transferred from the loading portion, An engaging portion for interposing a microporous member including fine pores between the object and the chalcogen source; Heating the chalcogen source transferred from the coupling unit and located inside the chamber to cause the chalcogen source to reach the object through the micropores of the microporous member to perform a chalcogenation reaction, A chalcogenide forming part forming a target; And a separating unit located inside the chamber and separating the microporous member from the chalcogenized object, wherein the conveying unit conveys the object to the object loading unit, the coupling unit, the chalcogenide forming unit, And the separation unit.

In some embodiments of the present invention, the engaging portion includes a first engaging portion providing a first chalcogen source and a second engaging portion providing a second chalcogen source, wherein the chalcogenogenesis forming portion comprises a first chalcogenide Wherein the separating portion includes a first separating portion and a second separating portion, and the conveying means conveys the object to the first engaging portion, the first calucogenizing forming portion, the second separating portion, 1 separation unit, the second coupling unit, the second chalcogenide formation unit, and the second separation unit.

In some embodiments of the present invention, the chamber includes a first chamber and a second chamber, wherein the coupling comprises a first coupling portion providing a first chalcogen source and a second coupling portion providing a second chalcogen source, Wherein the chalcogenide forming part includes a first chalcogenide forming part and a second chalcogenizing forming part and the separating part includes a first separating part and a second separating part, And a second separator, wherein the conveying unit is configured to convey the object to the first cholocogenisation forming part and the second separating part, wherein the second chambers include a second engaging part, 1 coupling portion, the first chalcogenide forming portion, the first separating portion, the second engaging portion, the second chalcogenization forming portion, and the second separating portion.

In some embodiments of the present invention, the first chalcogen source may comprise selenium (Se). Said second chalcogen source may comprise sulfur (Se).

In some embodiments of the present invention, the fine pore body member is 1.75 g / cm comprising the graphite has a density of ^{from 3} to 1.86 g / cm ³ range, or 6% to 11% of the porosity (porosity) of The graphite may include graphite.

In some embodiments of the present invention, the micropores contained in the microporous member are configured to block a chalcogen liquid that is liquefied from the chalcogen source and to allow passage of vaporized chalcogen gas from the chalcogen source Size.

In some embodiments of the present invention, the micropores included in the microporous member may have a radius according to the following formula.

(Where R is the radius of the micropores,? LV is the surface tension of the chalcogen liquid,? Is the contact angle of the chalcogen liquid, and P is the pressure).

According to an aspect of the present invention, there is provided an apparatus for manufacturing a solar cell, comprising: a first chamber in which a target object is subjected to a first chalcogenation reaction; A second chamber in which the object is subjected to a second chalcogenation reaction; And a transfer unit for transferring the object to the first chamber and the second chamber, the object loading unit being located outside the first chamber and loading the object; A microporous member located inside the first chamber and having micropores having a size such that the first chalcogen source is positioned on the object transferred from the loading unit, A first coupling unit interposed between the object and the first chalcogen source; Heating the first chalcogen source which is located inside the first chamber and transferred from the first coupling unit so that the first chalcogen source reaches the object through the micropores of the microporous member A first chalcogenide forming unit that forms a first chalcogenized object by a first chalcogenation reaction; And a first separator located inside the first chamber and separating the microporous member from the first chalcogenized object; An inter-chamber transferring unit located outside the first chamber and transferring the first chalcogenized object from the first chamber to the second chamber; A second chalcogen source disposed on the first chalcogenized object transferred from the inter-chamber transfer section and located within the second chamber, and including micropores having a size such that the second chalcogen source passes therethrough; A second coupling unit interposed between the first chalcogenized object and the second chalcogen source; Heating the second chalcogen source which is located inside the second chamber and transferred from the second coupling unit so that the second chalcogen source is moved through the micropores of the microporous member to the first chalcogenide A second chalcogenide-forming unit for forming a second chalcogenized object by reaching the second chalcogenide-forming target; And a second separator located inside the second chamber and separating the microporous member from the second chalcogenized object; And a target unloading unit located outside the second chamber and unloading the second caluculated target conveyed by the second separating unit, wherein the conveying unit conveys the target to the target loading unit, Wherein the first cholocogenisation forming part, the first separating part, the inter-chamber transferring part, the second engaging part, the second chalcogenide forming part, the second separating part, and the object unloading part As shown in Fig.

The apparatus for manufacturing a solar cell according to the technical idea of the present invention introduces a chalcogen material through a microporous body into a target to be subjected to a chalcogenation reaction. Thus, an optimal amount of chalcogen source can be used for the chalcogenation reaction, so that the consumption of chalcogen materials can be minimized. In addition, it does not use toxic and corrosive substances such as H ₂ Se and H ₂ S as a chalcogen source, thereby maximizing stability and device protection. Further, since the chalcogen material is directly supplied to the object through the microporous body, contamination in the chamber can be minimized, the use time of the equipment can be maximized, or the cost of equipment maintenance and repair can be minimized.

Further, since the solar cell manufacturing apparatus according to the technical idea of the present invention can form a chalcogenized object for the light absorbing layer by a continuous process while conveying the object using the conveying means, it is possible to shorten the process time and increase the working efficiency And mass production can be made possible.

These effects are exemplarily described, and the scope of the present invention is not limited by these effects.

1 is a cross-sectional view illustrating a solar cell formed using a solar cell manufacturing apparatus according to an embodiment of the present invention.
2 is a schematic view for explaining a solar cell manufacturing apparatus according to an embodiment of the present invention.
FIGS. 3 to 13 are schematic cross-sectional views illustrating a solar cell manufacturing apparatus according to an exemplary embodiment of the present invention.
14 is a schematic view illustrating the function of the microporous member included in the apparatus for manufacturing a solar cell according to an embodiment of the present invention.
15 to 18 show some embodiments of the microporous member included in the apparatus for manufacturing a solar cell according to an embodiment of the present invention.
19 is a scanning electron microscope (SEM) image showing a cross section of a CIGS layer formed using a solar cell manufacturing apparatus according to an embodiment of the present invention.
20 is a scanning electron microscope (SEM) image of a top surface of a CIGS layer formed using a solar cell manufacturing apparatus according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. It will be apparent to those skilled in the art that the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. The scope of technical thought is not limited to the following examples. Rather, these embodiments are provided so that this disclosure will be more thorough and complete, and will fully convey the scope of the invention to those skilled in the art. As used herein, the term "and / or" includes any and all combinations of one or more of the listed items. The same reference numerals denote the same elements at all times. Further, various elements and regions in the drawings are schematically drawn. Accordingly, the technical spirit of the present invention is not limited by the relative size or spacing depicted in the accompanying drawings.

1 is a cross-sectional view showing a solar cell 1 formed using a solar cell manufacturing apparatus according to an embodiment of the present invention.

Referring to Fig. 1, a solar cell 1 includes a lower electrode 3, a light absorbing layer 4, a buffer layer 5, and an upper electrode 6 sequentially located on a substrate 2. The grid electrode 7 may be positioned on a partial area of the upper electrode 6. [ In addition, optionally, the antireflection layer 8 may be located on the upper electrode 6.

For example, the lower electrode 3 may have a thickness of about 0.5 占 퐉, the light absorbing layer 4 may have a thickness of about 2 占 퐉, the buffer layer 5 may have a thickness of about 0.05 占 퐉 , And the upper electrode 6 may have a thickness of about 0.5 mu m. However, such a thickness is illustrative, and the technical idea of the present invention is not limited thereto.

The substrate 2 may be a glass substrate, for example, a sodalime glass substrate. Further, the substrate 2 may be composed of a ceramic substrate such as alumina, a metal substrate such as stainless steel, copper tape (Cu tape), or a polymer substrate. Further, the substrate 2 may be composed of a flexible polymer material such as polyimide or may be formed of a thin stainless steel plate.

The lower electrode 3 may be located on the substrate 2. The lower electrode 3 should be low in resistivity to be used as an electrode and should be excellent in adhesion to the substrate 2 so as not to peel off from the substrate 2 due to a difference in thermal expansion coefficient. The lower electrode 3 may be deposited by, for example, sputtering. The lower electrode 3 may include nickel (Ni), copper (Cu), molybdenum (Mo), or an alloy thereof. Particularly, when the lower electrode 3 contains molybdenum, excellent characteristics such as high electric conductivity of molybdenum, excellent ohmic contact to the light absorbing layer 4, high temperature stability in a selenium (Se) atmosphere process, Lt; / RTI >

The light absorbing layer 4 may be located on a part of the lower electrode 3. The exposed region 3a of the lower electrode 3 where the light absorbing layer 4 is not provided can provide an electrical contact to the outside. The light absorption layer 4 may include a material that absorbs sunlight and converts it into an electrical signal, and may include a p-type semiconductor material. The light absorption layer 4 may include at least one of copper (Cu), indium (In), and gallium (Ga), for example. In addition, the light absorbing layer 4 may further include a chalcogen-based material and may include, for example, selenium (Se), sulfur (S), or a mixture thereof. For example, the light absorbing layer 4 may comprise quaternary materials of copper-indium-gallium-selenium (CIGS) or may comprise pentavalent materials of copper-indium-gallium-selenium-sulfur (CIGSS). The manufacturing method of the light absorbing layer 4 will be described in detail below.

The buffer layer 5 may be located on the light absorbing layer 4. The buffer layer 5 may function to realize a good pn junction by reducing the lattice constant difference and the energy band gap difference between the light absorbing layer 4 and the upper electrode 6. [ In some cases, the buffer layer 5 may be omitted. The buffer layer 5 may include an n-type semiconductor material. The buffer layer 5 may be doped with an impurity to change a resistance value. For example, the buffer layer 5 may include boron (B), indium (In), gallium (Ga) Or the like can be doped to lower the resistance value. The buffer layer 5 may comprise cadmium sulfide (CdS) or indium-selenium (In _x Se _y ). When the buffer layer 5 contains cadmium sulfide (CdS), a cadmium sulfide (CdS) film can be formed using a chemical bath deposition (CBD) method. On the other hand, when the buffer layer 5 includes indium-selenium, the toxicity of the cadmium sulfide can be prevented and the hassle of the wet process for forming cadmium sulfide can be eliminated.

The upper electrode 6 may be located on the buffer layer 5. Alternatively, the upper electrode 6 may be located on the light absorbing layer 4. The upper electrode 6 may comprise an n-type semiconductor material. The upper electrode 6 may directly contact the light absorbing layer 4 to form a pn junction. Alternatively, a pn junction can be formed together with the buffer layer 5 which is in direct contact with the light absorbing layer 4. The upper electrode 6 preferably has a high electrical conductivity and a high light transmittance, and may be referred to as a transparent electrode. The upper electrode 6 may include at least one of zinc oxide (ZnO) and indium tin oxide (ITO). Zinc oxide (ZnO) has an energy band gap of about 3.3 eV and a high light transmittance of about 80% or more. The upper electrode 6 may be doped with an impurity element such as aluminum (Al) or boron (B) to have a specific resistance value of about 10 ^-4 ohm cm or less. In particular, in the case of doping the upper electrode 6 with boron (B), the light transmittance in the near-infrared region is increased and the effect of increasing the short-circuit current can be obtained. In the case where the upper electrode 6 is formed of zinc oxide (ZnO), the upper electrode 6 may be formed using an RF sputtering method using a zinc oxide (ZnO) target, reactive sputtering using a zinc target, . The upper electrode 6 may be formed of a composite layer in which a plurality of layers are laminated. For example, the upper electrode 6 may be formed of a composite layer in which an indium-tin oxide (ITO) thin film is formed on a zinc oxide (ZnO) thin film, or an n-type zinc Oxide (ZnO) thin film may be formed. The upper electrode 6 having such a composite structure can improve the efficiency of the solar cell 1.

Alternatively, the antireflective layer 8 may be located on the upper electrode 6. [ The antireflection layer 8 can reduce the reflection loss of incident sunlight and can reflect the sunlight reflected and extracted from the inside to the inside, thereby increasing the efficiency of the solar cell 1 . For example, the antireflection layer 8 can increase the efficiency of the solar cell by about 1%. The antireflection layer 8 may include, for example, magnesium fluoride (MgF ₂ ), and may be formed using, for example, an electron beam evaporation method.

The grid electrode 7 may be located in a part of the upper electrode 6 and may be electrically connected to the upper electrode 6. The grid electrode 7 can be paired with the lower electrode 3 to collect current from the surface of the solar cell 1. The grid electrode 7 may include aluminum (Al), nickel (Ni), or an alloy thereof, and may be composed of a single layer or a multi-layer structure such as nickel / aluminum (Ni / Al). Since the area occupied by the grid electrode 7 is opaque, solar light is not absorbed into the interior of the solar cell 1, and thus it is desirable to minimize the area occupied by the grid electrode 7.

2 is a schematic view for explaining a solar cell manufacturing apparatus 10 according to an embodiment of the present invention. 3 to 13 are schematic cross-sectional views for explaining the solar cell manufacturing apparatus 10 according to an embodiment of the present invention.

Referring to FIG. 2, the solar cell manufacturing apparatus 10 includes a transfer unit 20, and the transfer unit 20 can sequentially transfer unit processes to manufacture a solar cell. The solar cell manufacturing apparatus 10 according to the technical idea of the present invention is configured such that the object body 170 (see FIG. 3) is sequentially moved from the object body loading section 11 to the object unloading section 19 And / or the unit process is carried out while being continuously transferred. The conveying means 20 is constituted by intermittent conveying means for performing the conveying operation when the conveying operation is stopped during the execution of the unit process and / or continuous conveying means for performing the conveying operation without stopping during the execution of the unit process And may comprise, for example, a robot arm and / or a conveyor belt.

In addition, the solar cell manufacturing apparatus 10 may further include a first chamber 30 and a second chamber 40. The first chamber 30 may be connected to the first vacuum forming means 32 and the first inert gas supplying means 34. The second chamber 40 may be connected to the second vacuum forming means 42 and the second inert gas supplying means 44.

The solar cell manufacturing apparatus 10 includes a target body loading section 11, a first engaging section 12, a first calchogenic forming section 13, a first separating section 14, an inter-chamber transfer section 15, A second cleavage forming section 17, a second separating section 18, and a target body unloading section 19. [0035] As shown in FIG. The conveying means 20 is a conveying means for conveying the object to the object loading portion 11, the first engaging portion 12, the first color forming portion 13, the first separating portion 14 and the inter-chamber conveying portion 15 sequentially . The conveying means 20 is arranged so that the object is conveyed to the inter-chamber conveying portion 15, the second engaging portion 16, the second calucogenizing forming portion 17, the second separating portion 18, and the object unloading portion 19).

In the first chalcogenide forming part 13, the object for the solar cell can be subjected to the first chalcogenide treatment, for example, the object can be selenized. Further, in the second chalcogenogenesis forming unit 17, the subject can be subjected to the second calcination treatment, for example, the selenized subject can be sulfated.

Each component of the solar cell manufacturing apparatus 10 may be implemented as a separate apparatus and connected to each other, or the solar cell manufacturing apparatus 10 may be implemented as a single apparatus.

2 and 3, the object loading unit 11 loads the object 170 on the transfer means 20. [ The object 170 is conveyed by the conveying means 20 through the first inlet 36 to the first chamber 30.

The object 170 can be received and supported by the object support member 122. [ The object supporting member 122 may be composed of, for example, a susceptor including silicon carbide coated graphite. The object support member 122 may perform a function of transferring heat to the object 170 in the first and second coloration forming units 13 and 17.

The object 170 may correspond to the substrate 2 (see FIG. 1) as a structure in which the layer required by the solar cell manufacturing apparatus 10 is formed, or may be formed on the substrate 2 As shown in FIG. For example, the object 170 may be a structure in which at least one layer including at least one of copper, indium, and gallium is formed on the substrate 2 (see FIG. 1), or a structure in which a copper layer, an indium layer, May be formed. In this case, the lower electrode 3 (see Fig. 1) formed of molybdenum or the like can be directly placed on the substrate 2 (see Fig. 1). The copper layer, indium layer, and gallium layer as described above may be formed by separate processes and may be formed by separate sputtering. In addition, the order of stacking the copper layer, the indium layer, and the gallium layer may be variously changed. Alternatively, the object 170 may be a structure in which one copper-indium-gallium layer is located on the substrate 2 (see FIG. 1). This copper-indium-gallium layer may be formed by simultaneously sputtering copper, indium and gallium on a substrate.

2, 4 and 5, the object supporting member 122 in which the object 170 is accommodated is loaded into the first chamber 30 from the object loading portion 11 by the transfer means 20, Is transferred to the first engagement portion (12) in the first chamber (30).

The first chamber 30 may be composed of a metal such as aluminum or stainless steel, tempered glass, quartz, or graphite. In the case where the first chamber 30 is made of a transparent material such as tempered glass or quartz, the rapid thermal annealing can be easily performed.

The first chamber 30 may be connected to the first vacuum forming means 32 and the first inert gas supplying means 34. The first vacuum forming means 32 may be formed in a vacuum in the first chamber 30, and may be constituted by, for example, a vacuum pump. The first vacuum forming means 32 may be omitted as an optional component. The first inert gas supply means 34 can supply an inert gas such as helium, argon, nitrogen, etc. into the first chamber 30 that has been evacuated. The first inert gas supply means 34 may supply the inert gas into the first chamber 30, for example, such that the pressure in the first chamber 30 is at a desired air pressure, for example, about 1 atmosphere . The first inert gas supply means 34 may be omitted as an optional component. The first vacuum forming means 32 and the first inert gas supplying means 34 may be operated sequentially or simultaneously.

The first chamber 30 may have a first inlet 36 at a portion where the object support member 122 in which the object 170 is accommodated is loaded into the first chamber 30. The first inlet 36 may have a structure to seal the first chamber 30 or shut off the gas flow to maintain the inside of the first chamber 30 in a vacuum atmosphere and / or an inert gas atmosphere.

In the first engaging portion 12, the first chalcogen source 180 is positioned on the object 170. A microporous body member 124 may be interposed between the object 170 and the first chalcogen source 180. The microporous member 124 may include micropores having a size through which the first chalcogen source 180 passes. Specifically, in the first coupling portion 12, the object supporting member 122 in which the object 170 is accommodated and the chalcogen source receiving member 123 in which the first chalcogen source 180 is accommodated can be positioned, The support member 122 and the chalcogen source housing member 123 are combined to complete the layer forming member 120 of FIG.

The chalcogen source receiving member 123 can be carried on the object supporting member 122 using the first carrying member 50 and coupled with the object supporting member 122. [ The first carrying member 50 may be installed to be attached to the first chamber 30. The first carrying member 50 can be moved vertically or laterally by the first moving element 51 constituted by a motor, a shaft, and the like. The first carrying member 50 can be carried on the object supporting member 122 by contacting and supporting the chalcogen source housing member 123 using a vacuum suction method or a clamping method. After the chalcogen source receiving member 123 is placed on the object supporting member 122, the first carrying member 50 can be separated from the chalcogen source receiving member 123 and returned to the initial position. Further, the first carrying member 50 can carry and carry the new chalcogen source receiving member 123 in contact with it. The above-described first carrying member 50 is illustrative, and the technical idea of the present invention is not limited thereto.

The chalcogen source receiving member 123 includes a microporous body member 124 supporting the first chalcogen source 180, a window member 126 covering the first chalcogen source 180, 124 and a fixing member 128 for fixing the window member 126. [

The microporous body member 124 may be positioned to cover the object 170. [ Further, the microporous body member 124 and the target body 170 may have a spacing gap G so that they do not contact each other. The microporous member 124 may be provided with a first chalcogen source 180 and the microporous member 124 may support the first chalcogen source 180. The microporous member member 124 may include a material having a plurality of micropores therein, for example, and may include graphite. And the first chalcogen source 180 that has been vaporized through the micropores can pass through. The first chalcogen source 180 that has passed through the microporous member 124 may form a first chalcogenide layer on the object 170 or may react with the material contained within the object 170. The function of the microporous member member 124 will be described in detail with reference to FIG.

In addition, the microporous member 124 may include a microporous body element 124a, a first support element 124b, a second support element 124c, and a third support element 124d. The microporous element 124a can position the object 170 under its own and position the first chalcogen source 180 on its upper side. The microporous element 124a may include micropores through which the first chalcogenide material vaporized from the first chalcogen source 180 passes. The first support element 124b and the second support element 124c can support the microporous body member 124 such that the microporous body member 124 is spaced apart from the target body 170. [ The third support element 124d may provide space in which the first chalcogen source 180 is located. The third support element 124d may support the window member 126 such that the microporous element 124a is spaced from the window member 126. [ The microporous body element 124a, the first support element 124b, the second support element 124c and the third support element 124d are formed as a one-body structure, ).

Alternatively, the microporous element 124a, the first support element 124b, the second support element 124c, and the third support element 124d may be formed as separate structures, respectively, The microporous member member 124 can be constituted. In this case, the microporous element 124a comprises graphite and the first support element 124b, the second support element 124c and the third support element 124d may comprise silicon carbide-coated graphite have. Such embodiments of the microporous member 124 will be described in detail with reference to FIGS. 15 to 18. FIG.

The microporous element 124a may be spaced apart from the object 170 by a spacing G. [ The spacing distance G may range, for example, from about 0.1 mm to about 3 mm. By adjusting the thickness P of the microporous element 124a, the flux of the first chalcogen material passing through the microporous element 124a can be altered.

The first chalcogen source 180 may comprise a chalcogen material and may include, for example, selenium (Se). The first chalcogen source 180 may be solid at room temperature and may change to liquid or vapor phase by heating. As the thickness S of the first chalcogen source 180 is adjusted, the amount of the first calogen material introduced into the object 170 can be changed.

The window member 126 may be located above the microporous member 124 and may be supported by the third supporting member 124d of the microporous member 124. [ The window member 126 may be composed of quartz, tempered glass, sapphire, or the like. The window member 126 may have a function of being easily transferred to the first chalcogen source 180 in the heat provided in the first chalcogenide forming portion 13 and may also have a function of transferring heat from the liquefied or vaporized first chalcogen source Forming member 120 from being released to the outside of the layer-forming member 120.

The fixing member 128 is located on the microporous member 124 and can fix the microporous member 124 and the window member 126 to each other. Further, the fixing member 128 can fix the microporous member 124 and the object supporting member 122 to each other. The fixing member 128 may include silicon carbide-coated graphite.

The inside of the layer forming member 120 can be filled with the inert gas by the first vacuum forming means 32 and the first inert gas supplying means 34. That is, a space in the object supporting member 122 where the object 170 is located can be filled with the inert gas, and the microporous member 124 in which the first chalcogen source 180 is located and the window member (126) may be filled with the inert gas.

2 and 6, the layer forming member 120 containing the object 170 and the first chalcogen source 180 is transferred from the first engaging portion 12 to the first chamber (not shown) 30 to the first chalcogenide forming part 13 in the first step.

In the first chalcogenide forming portion 13, the layer forming member 120 is conveyed by the conveying means 20 in the first chamber 30. The first chalcogenide forming portion 13 can be located in the first chamber 30 and thereby the inert gas atmosphere can be obtained by the first vacuum forming means 32 and the first inert gas supplying means 34 .

The first heating member 39 for heating the layer forming member 120 may be located in the first coloration forming unit 13. The first heating member 39 can heat the first chalcogen source 180 to liquefy or vaporize it. Further, the first heating member 39 can be heat-treated by heating the object 170 together. The liquefied or vaporized first chalcogen source 180 may pass through the microporous member 124 to reach the object 170 and cause the first object to undergo a first chalcogenization to form the first chalcogenide The object 171 can be formed. In some cases, the first chalcogen source 180 in the first chalcogenide forming portion 13 may completely disappear and disappear. The formation of the first chalcogenized object 171 by the calcination of the object 170 will be described in detail below with reference to Fig.

The first heating member 39 may be located outside or inside the first chamber 30. The first heating member 39 may be disposed such that the temperature gradient of the layer forming member 120 is minimized and the temperature of the surface of the object 170 is uniformly heated. In order to maintain the temperature at which the first chalcogen source 180 is heated more uniformly, the first heating member 39 may have a coil-like shape. The first heating member 39 may be composed of a heat ray or an infrared lamp. In the case where the first heating member 39 is constituted by an infrared lamp, the rapid heating process of the object 170 and the first chalcogen source 180 can be performed. Particularly, in the case where the first chamber 30 is made of a transparent material such as tempered glass or quartz, such rapid thermal annealing can be easily performed.

Heating by the first heating member 39 may be performed at a temperature of, for example, 220 to 680 DEG C, for example, for a range of 1 second to 60 minutes. For example, if the first chalcogen source 180 is selenium, it may be performed for a range of 1 minute to 20 minutes, for example, at a temperature between 400 ° C. and 500 ° C., for example, at a temperature of about 460 ° C. For about 10 minutes. For example, if the first chalcogen source 180 is sulfur (S), it may be performed at a temperature between 500 [deg.] C and 600 [deg.] C, for example, ranging from 10 seconds to 10 minutes, Lt; 0 > C for about 1 minute.

Also, by the heating by the first heating member 39, the heat treatment of the layers contained in the object body 170 can be performed simultaneously. For example, when the object 170 is composed of a plurality of layers each including copper, indium, and gallium, one layer may be formed by diffusing each other by heating. In addition, when the first chalcogen source 180 is selenium, the object 170 may be subjected to a selenization reaction to form a selenized object, whereby the CIGS layer as described above may be formed have. In addition, when the first chalcogen source 180 is sulfur, the object 170 may generate a sulphurization reaction to form a sulphided object, and thus the CIGSS layer as described above may be formed. Here, the first chalcogenized object 171 may be subjected to, for example, selenization treatment.

2 and 7, the layer forming member 120 is transferred from the first chalcogenide forming portion 13 to the first separating portion 14 in the first chamber 30 by the transferring means 20 .

The first separating portion 14 separates the chalcogen-containing member 123 from the layer forming member 120 using the second carrying member 52 and thereby separates the first chalcogenized object 171 The object supporting member 122 to be accommodated is conveyed by the conveying means 20. The second carrying member 52 may be installed to be attached to the first chamber 30. The second carrying member 52 can be moved in the vertical direction or in the lateral direction by the second moving element 53 constituted by a motor, a shaft and the like. The second carrying member 52 can be detached from the object supporting member 122 by contacting and supporting the chalcogen source housing member 123 using a vacuum suction method or a clamping method. The above-described second carrying member 52 is illustrative, and the technical idea of the present invention is not limited thereto.

The first chamber 30 may have a first discharge port 38 at a portion where the object supporting member 122 accommodating the first chalcogenized object 171 is discharged from the first chamber 30, 1 chalcogenized object 171 may be discharged from the first chamber 30 through the first outlet 38 after passing through the first separator 14. The first outlet 38 may have a structure for sealing the first chamber 30 or shutting off the gas flow to maintain the inside of the first chamber 30 in a vacuum atmosphere and / or an inert gas atmosphere.

2 and 8, in the inter-chamber transfer unit 15, the object supporting member 122, which receives the first chalcogenized object 171 discharged from the first chamber 30 through the first discharge port 38, Is transferred to the second chamber (40) through the second inlet (46) by the transfer means (20). Alternatively, in the inter-chamber transfer section 15, the first chalcogenized object 171 and the object supporting member 122 may be unloaded from the solar cell manufacturing apparatus 10. [

2, 9, and 10, the object supporting member 122, in which the first chalcogenized object 171 is accommodated, is transferred from the inter-chamber transferring unit 15 to the second chamber 40 And is conveyed to the second engaging portion 16 in the second chamber 40. As shown in Fig.

The second chamber 40 may be composed of a metal such as aluminum or stainless steel, tempered glass, quartz, or graphite. In the case where the second chamber 40 is made of a transparent material such as tempered glass or quartz, rapid thermal annealing can be easily performed.

The second chamber 40 may be connected to the second vacuum forming means 42 and the second inert gas supplying means 44. The second vacuum forming means 42 may form a vacuum in the second chamber 40. The second inert gas supply means 44 may supply an inert gas such as helium, argon or nitrogen into the second chamber 40 that has been evacuated. The second chamber 40 may be similar to the first chamber 30 described above and the second vacuum forming means 42 and the second inert gas supplying means 44 may be similar to the first vacuum forming means 32 And the first inert gas supply means 34, as shown in FIG.

The second chamber 40 may have a second inlet 46 at a portion where the object support member 122 in which the first chalcogenized object 171 is received is loaded into the second chamber 40. The second inlet 46 may have a structure for sealing the second chamber 40 or shutting off the gas flow so as to maintain the inside of the second chamber 40 in a vacuum atmosphere and / or an inert gas atmosphere.

In the second coupling portion 16, the second chalcogenide source 190 is placed on the first chalcogenized object 171. A microporous body member 124 may be interposed between the first chalcogenized object 171 and the second chalcogen source 190. The microporous member 124 may include micropores having a size through which the second chalcogen source 190 passes. More specifically, in the second engaging portion 16, the chalcogen source receiving member 123 in which the second chalcogen source 190 is accommodated is placed on the object supporting member 122 in which the first chalcogenized object 171 is accommodated And the object supporting member 122 and the chalcogen source receiving member 123 are combined to complete the layer forming member 120 of FIG.

The chalcogen source receiving member 123 can be carried on the object supporting member 122 using the third carrying member 54 and coupled with the object supporting member 122. [ The third carrying member 54 may be installed to be attached to the second chamber 40. The third carrying member 54 can be moved vertically or laterally by the third moving element 55 constituted by a motor, a shaft, and the like. The third carrying member 54 can be carried on the object supporting member 122 by contacting and supporting the chalcogen source housing member 123 using a vacuum suction method or a clamping method. After the chalcogen source receiving member 123 is placed on the object supporting member 122, the third carrying member 54 can be separated from the chalcogen source receiving member 123 and returned to the initial position. In addition, the third carrying member 54 can carry the new chalcogen-containing member 123 in contact with and carry it. The above-described third carrying member 54 is illustrative, and the technical idea of the present invention is not limited thereto.

The chalcogen source receiving member 123 includes a microporous body member 124 supporting the second chalcogen source 190, a window member 126 covering the second chalcogen source 190, 124 and a fixing member 128 for fixing the window member 126. [ The chalcogen source housing member 123, the microporous body member 124, the window member 126, the fixing member 128, and the like are as described above with reference to FIGS.

The second chalcogen source 190 may comprise a chalcogen material and may include, for example, sulfur (S). The second chalcogen source 190 may be solid at room temperature and may change to liquid or vapor phase by heating. By adjusting the thickness S of the second chalcogen source 190, the amount of second calogen material introduced into the first chalcogenized object 171 can be varied.

The first chalcogen source 180 and the second chalcogen source 190 may comprise different materials. For example, the first chalcogen source 180 may comprise selenium and the second chalcogen source 190 may comprise sulfur.

Alternatively, the first chalcogen source 180 and the second chalcogen source 190 may comprise the same material. For example, the first and second chalcogen sources 180 and 190 both include selenium, and the first chalcogen source 180 and the second chalcogen source 190 may be used to couple the object 170) can be repeatedly performed. Alternatively, the first chalcogen source 180 and the second chalcogen source 190 both contain sulfur, and the first chalcogen source 180 and the second chalcogen source 190 are used to form the target 170, Can be repeatedly carried out.

The inside of the layer forming member 120 can be filled with the inert gas by means of the second vacuum forming means 42 and the second inert gas supplying means 44. That is, the space in the object supporting member 122 where the first chalcogenized object 171 is located can be filled with the inert gas, and the microporous member 190 in which the second chalcogenide source 190 is located 124 and the window member 126 can be filled with the inert gas.

2 and 11, the layer forming member 120 in which the first chalcogenized object 171 and the second chalcogen source 190 are accommodated is conveyed by the conveying means 20 to the second engaging portion 16, To the second chalcogenide forming portion 17.

In the second chalcogenide forming portion 17, the layer forming member 120 is conveyed by the conveying means 20 in the second chamber 40. The second chalcogenide forming portion 17 can be located in the second chamber 40 and thus has the inert gas atmosphere by the second vacuum forming means 42 and the second inert gas supplying means 44 .

In the second chalcogenide forming portion 17, a second heating member 49 for heating the layer forming member 120 may be located. The second heating member 49 can heat the second chalcogen source 190 to liquefy or vaporize it. Further, the second heating member 49 can be heat-treated by heating the first chalcogenized object 171 together. The liquefied or vaporized second chalcogen source 190 may pass through the microporous member 124 to reach the first chalcogenized object 171 and the first chalcogenised object 171 And the second chalcogenized object 172 can be formed by second chalcogenization. In some cases, the second chalcogen source 190 in the second chalcogenide forming portion 17 may completely disappear and disappear. The formation of the second chalcogenized object 172 by the calcination of the first chalcogenized object 171 will be described in detail below with reference to Fig. 14 and with reference to Fig.

The characteristics of the second heating member 49 may be similar to those of the first heating member 39 described above. For example, the second heating member 49 may be located outside or inside the second chamber 40. The second heating member 49 can be disposed so that the temperature gradient of the layer forming member 120 is minimized and the temperature of the surface of the first chalcogenized object 171 is uniformly heated. Heating by the second heating member 49 may be performed at a temperature of, for example, 220 to 680 DEG C, for example, for a range of 1 second to 60 minutes. For example, if the second chalcogen source 190 is selenium, it may be performed for a range of, for example, from 400 ° C to 500 ° C for a time ranging from 1 minute to 20 minutes, for example at a temperature of about 460 ° C For about 10 minutes. For example, if the second chalcogen source 190 is sulfur (S), it may be performed at a temperature between 500 [deg.] C and 600 [deg.] C, for example, ranging from 10 seconds to 10 minutes, Lt; 0 > C for about 1 minute. By the heating by the second heating member 49, the heat treatment of the layers contained in the second chalcogenized object 171 can be performed simultaneously.

2 and 12, the layer forming member 120 is transferred from the second chalcogenide forming portion 17 to the second separating portion 18 in the second chamber 40 by the conveying means 20 .

The second separator 18 separates the chalcogen-containing member 123 from the layer forming member 120 using the fourth conveying member 56 and thereby separates the second calcitized object 172 The object supporting member 122 to be accommodated is conveyed by the conveying means 20. The fourth carrying member 56 may be installed to be attached to the second chamber 40. The fourth conveying member 56 can be moved vertically or laterally by the fourth moving element 57 constituted by a motor, a shaft, and the like. The fourth carrying member 56 can be detached from the object supporting member 122 by contacting and supporting the chalcogen source housing member 123 using a vacuum suction method or a clamping method. The above-described fourth carrying member 56 is illustrative, and the technical idea of the present invention is not limited thereto.

The second chamber 40 can also have a second outlet 48 at a portion where the object support member 122 housing the second chalcogenized object 172 is discharged from the second chamber 40, The second chalcogenized object 172 may be discharged from the second chamber 40 through the second outlet 48 after passing through the second separator 18. The second outlet 48 may have a structure to seal the second chamber 40 or shut off the gas flow so as to maintain the inside of the second chamber 40 in a vacuum atmosphere and / or an inert gas atmosphere.

2 and 13, the object support member 122 housing the second chalcogenized object 172 discharged from the second chamber 40 through the second outlet 48 is supported by the conveying means 20 And is transferred from the second separator 18 to the target object unloading unit 19. [ In the target unloading section 19, the object supporting member 122, which receives the second chalcogenized object 172, can be transferred by the transferring means 20 and unloaded from the solar cell manufacturing apparatus 10 .

Here, the second chalcogenized object 172 may be subjected to, for example, selenization treatment and sulphation treatment. The second chalcogenized object 172 may correspond to the light absorbing layer 4 of Fig.

Alternatively, the case where the first chamber 30 and the second chamber 40 are constituted by one chamber and the inter-chamber transfer section 15 is located within the one chamber is also included in the technical idea of the present invention. In this case, the first outlet 38 and the second inlet 46 may be absent.

14 is a schematic view for explaining the function of the microporous member 124 included in the solar cell manufacturing apparatus 10 according to the embodiment of the present invention.

Referring to FIG. 14, the microporous member 124 may include a plurality of micropores 129. As described above, the microporous member 124 may be formed of graphite and may be formed of graphite, for example, having a density ranging from 1.75 g / cm ³ to 1.86 g / cm ³ . Alternatively, for example, the branch having porosity ranging from 6% to 11% may be formed of graphite. However, such density and porosity are illustrative, and the technical idea of the present invention is not limited thereto.

The micropores 129 may have a size through which the liquefied or vaporized first chalcogen source 180 passes. The size of the fine pores 129 can vary widely, and can range, for example, from several tens of nanometers to several tens of micrometers. In addition, the size of the micropores 129 can be calculated from porosity ranging, for example, from 6% to 11%. These fine pores 129 can be formed along the grain boundaries of the material constituting the microporous member 124.

Hereinafter, the case where the fine pores 129 do not pass the chalcogen liquid 182 but passes the chalcogenine gas 184 will be described. However, this is exemplary and the technical idea of the present invention is not limited thereto, and the case where the chalcogen liquid 182 passes through the micropores 129 is also included in the technical idea of the present invention.

When the first chalcogen source 180 is heated by the first heating member 39 (see FIG. 6), the first chalcogen source 180 can be changed to the chalcogen liquid 182. For example, when the first chalcogen source 180 is composed of selenium, the first heating member 39 is heated to a temperature between 220 DEG C and a boiling point of selenium of 685 DEG C, which is the melting point of selenium, (180) can be heated. The chalcogen liquid 182 may be introduced into the micropores 129 in the microporous member 124. However, the micropores 129 may be sized to pass the chalcogenide gas 184 exiting the chalcogen liquid 182 without passing through the chalcogen liquid 182. The radius of the fine pores 129 can be determined by the porosity principle, and can be, for example, as shown in Equation (1).

Where R is the radius of the micropores,? LV is the surface tension of the chalcogen liquid,? Is the contact angle of the chalcogen liquid, and P is the pressure.

The chalcogenide gas 184 that has passed through the micropores 129 can contact the object 170 and form a layer on the object 170 or diffuse into the object 170. Accordingly, the first chalcogen source 180 and the object 170 are subjected to the first chalcogenesis reaction, so that the first chalcogenized object 171 (see FIG. 6) can be formed.

The case of one chalcogen source 180 is selenium, selenium monoatomic non-gaseous diatomic gas (Se _2), 4 atomic gas (Se _4), 6 atomic gas (Se ₆₎ or 8 at gases (Se ₈ ). Therefore, it is difficult to form a homogeneous layer because diffusion is not actively caused due to a high molecular weight, because there is a strong tendency to constitute a polyatomic gas. In particular, there is a limit that can hardly be applied to the manufacture of a large-area solar cell module.

However, the method of manufacturing a solar cell according to the technical idea of the present invention can increase the reactivity of the chalcogenine gas by using the microporous member 124, and further, the micropores 129 ) To the object 170, so that the chalcogen material can be uniformly provided to the object 170 as a whole. Further, the spacing G between the target body 170 and the microporous body member 124 (see FIG. 5) is an important element that can uniformly apply selenium, and it is advantageous as it is smaller and can be about 1 mm.

For example, if the object 170 comprises copper, indium, and gallium, and the first chalcogen source 180 comprises selenium, then the first chalcogen source 180 may be a mixture of the object 170 and the selenium And can form a CIGS (Copper-Indium-Gallium-Selenium) layer. In addition, when the subject 170 comprises a CIGS layer and the first chalcogen source 180 comprises sulfur, the first chalcogen source 180 can cause a sulphurisation reaction with the subject, CIGSS (Copper-Indium-Gallium-Selenium-Sulfur) layer. Also, the case where the first chalcogen source 180 includes a mixture of selenium and sulfur, and the first chalcogen source 180 simultaneously causes the selenization reaction and the sulphation reaction with the object 170 is also included in the technical idea of the present invention . The object 170 having the chalcogenation reaction as described above can be used as the light absorbing layer 4 in Fig.

The microporous member 124 described above may also be applied to the second chalcogen source 190. That is, the second chalcogen source 190 is liquefied and / or vaporized by the second heating member 49 (see FIG. 11), passes through the micropores 129 of the microporous member 124, The second chalcogenide source 190 and the first chalcogenized object 171 undergo a second chalcogenesis reaction to form a second chalcogenized object 172 (see FIG. 11). Accordingly, the second chalcogenized object 172 may be subjected to, for example, selenization treatment and sulphation treatment. When the second chalcogen source 190 contains sulfur, the radius of the micropores 129 of the microporous member 124 can be changed according to Equation (1).

15 to 18 show some embodiments of the microporous member included in the apparatus 10 for manufacturing a solar cell according to an embodiment of the present invention.

15, the microporous member 124 may include a microporous element 124a, a first support element 124b, a second support element 124c, and a third support element 124d. have. The microporous element 124a may comprise micropores through which the chalcogenide material that is vaporized from the chalcogen source is passed. The fine pores are as described with reference to Fig. The first support element 124b, the second support element 124c, and the third support element 124d may perform a support function as described with reference to FIG. The microporous body element 124a, the first support element 124b, the second support element 124c and the third support element 124d are formed as a one-body structure, ). In such a case, the microporous element 124a, the first support element 124b, the second support element 124c, and the third support element 124d may all be composed of the same material, And graphite containing pores. Also, the first support element 124b, the second support element 124c, and the third support element 124d are coated with a material such as silicon carbide, and the microporous element 124a is not coated with the material .

16, microporous member 224 may include a microporous element 224a, a first support element 224b, a second support element 224c, and a third support element 224d. have. The microporous element 224a may comprise micropores through which the chalcogenide material that is vaporized from the chalcogen source is passed. The microporous element 224a, the first support element 224b, the second support element 224c, and the third support element 224d are each formed as a separate structure, The sieve member 224 can be formed. For example, the microporous element 224a may have a protrusion 225a and the second support element 224c may have a first groove 225c1 in which the protrusion 225a is inserted and engaged. It is also within the technical concept of the present invention that the second support element 224c includes a protrusion 225a and the microporous element 224a includes a first groove 225c1. In addition, the second support element 224c may include a second groove 225c2 at the bottom. The first support element 224b may be inserted into the second groove 225c2 and coupled. The second support element 224c may include a third groove 225c3 at the top. And the third support element 224d may be inserted into the third groove 225c3 and coupled. The first support element 224b, the second support element 224c, and the third support element 224d comprise graphite containing silicon carbide and the graphite containing micropores, . The protrusions and grooves for engagement of the components as described above can be varied in various forms.

17, the microporous member 324 may include a microporous element 324a, a first support element 324b, a second support element 324c, and a third support element 324d. have. The microporous element 324a and the second support element 324c may be constructed as an integral structure. On the other hand, the microporous body member 324a, the first supporting element 324b, and the third supporting element 324d are formed as separate structures, respectively, and the microporous body member 324 Can be configured. For example, the second support element 324c may include a second groove 325c2 at the bottom. And the first support element 324b may be inserted into the second groove 325c2 and coupled thereto. The second support element 324c may include a third groove 325c3 on the top. A third support element 324d may be inserted into the third groove 325c3 to be coupled. The microporous element 224a and the second support element 324c comprise graphite containing micropores and the first and third support elements 224b and 224d may comprise silicon carbide coated graphite have. The protrusions and grooves for engagement of the components as described above can be varied in various forms.

18, the microporous member 424 may include a microporous element 424a, a first support element 424b, a second support element 424c, and a third support element 424d. have. The first support element 424b, the second support element 424c, and the third support element 424d may be constructed as an integral structure. On the other hand, the microporous body member 424a and the integral structure are formed as separate structures, respectively, and the microporous body member 424 can be formed as an assembly in which the microporous body 424a and the integral structure are assembled and formed. For example, the microporous element 424a may have a protrusion 425a and the second support element 424c may have a first groove 425c1 into which the protrusion 425a is inserted and engaged. It is also within the technical concept of the present invention that the second support element 424c includes a protrusion 425a and the microporous element 424a includes a first groove 425c1. The microporous element 224a and the second support element 424c comprise graphite containing micropores and the first and third support elements 224b and 224d may comprise silicon carbide coated graphite have. The protrusions and grooves for engagement of the components as described above can be varied in various forms.

19 is a scanning electron microscope (SEM) image showing a cross section of a CIGS layer formed using a solar cell manufacturing apparatus according to an embodiment of the present invention. 20 is a scanning electron microscope (SEM) image of a top surface of a CIGS layer formed using a solar cell manufacturing apparatus according to an embodiment of the present invention.

19 and 20, a molybdenum (Mo) layer is formed on a glass substrate, and a CIGS layer formed on the molybdenum layer is shown. The CIGS layer is a result of heat treatment at about 460 DEG C for 20 minutes.

When a CIGS layer is formed by a conventional method, a CIGS layer having a poor characteristic such as a very rough surface, containing fine grains, and forming large voids at an interface between the CIGS layer and the molybdenum (Mo) layer is formed .

However, the CIGS layer produced according to the present invention has a very flat surface and has almost no voids at the interface between the CIGS layer and the molybdenum (Mo) layer, and it is confirmed that a CIGS layer having excellent characteristics such as a coarse crystal grain is formed Respectively. These structural features are uniform throughout the CIGS layer.

The CIGS layer having a flat surface and a uniform surface improves the contact with the buffer layer 5 (see FIG. 1) and the upper electrode 6 (see FIG. 1) formed later, thereby improving layer coatability and reducing contact resistance Etc. can be improved. In addition, since the incident solar light can be prevented or minimized from being emitted from the inside, the efficiency of the solar cell can be increased.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention as defined in the appended claims. Will be apparent to those of ordinary skill in the art.

1: solar cell, 2: substrate, 3: lower electrode, 4: light absorbing layer, 5: buffer layer,
6: upper electrode, 7: grid electrode, 8: antireflection layer,
10: solar cell manufacturing apparatus, 11: object loading section, 12: first coupling section,
13: first chalcogenide forming section, 14: first separating section, 15: chamber transferring section,
16: second coupling portion, 17: second chalcogenide forming portion, 18: second separating portion,
19: object unloading unit, 20: transfer means, 30: first chamber,
32: first vacuum forming means, 34: first inert gas supplying means,
36: first inlet, 38: first outlet, 39: first heating member, 40: second chamber,
42: second vacuum forming means, 44: second inert gas supplying means,
46: second inlet, 48: second outlet, 49: second heating member, 50: first conveying member,
52: second carrying member, 54: third carrying member, 56: fourth carrying member,
120: layer forming member, 122: object supporting member,
123: a chalcogen source housing member, 124: a microporous member,
124a: microporous element, 124b: first support element, 124c: second support element,
124d: third supporting element, 126: window member, 128: fixing member,
129: fine pores, 170: object, 171: first calcogenized object,
172: a second chalcogenized object, 180: a first chalcogen source,
190: a second chalcogen source,

Claims (8)

A chamber in which the object is chalcogenated; And
A transfer means for transferring the object to the chamber;
/ RTI >
A target object loading unit for loading a target object;
A microporous member positioned inside the chamber and having micropores having a size such that the chalcogen source is positioned on the object transferred from the object loading unit and the microporous member having a size passing through the chalcogen source, A coupling portion interposed between the cogen sources;
Heating the chalcogen source transferred from the coupling unit and located inside the chamber to cause the chalcogen source to reach the object through the micropores of the microporous member to perform a chalcogenation reaction, A chalcogenide forming part forming a target; And
A separator disposed inside the chamber and separating the microporous member from the chalcogenized object;
Lt; / RTI >
The conveying means sequentially conveys the object to the object loading section, the coupling section, the chalcogenide forming section, and the separating section,
Wherein the micropores contained in the microporous member have a size such that a liquid chalcogen source is not allowed to pass but a gaseous chalcogen source is allowed to pass. The method according to claim 1,
The coupling portion includes a first coupling portion providing a first chalcogen source and a second coupling portion providing a second chalcogen source,
Wherein the chalcogenide forming portion includes a first chalcogenide forming portion and a second chalcogenating forming portion,
The separator includes a first separator and a second separator,
Wherein the conveying means conveys the object to the first engaging portion, the first calucogenizing forming portion, the first separating portion, the second engaging portion, the second caluchenizing forming portion, and the second separating portion in sequence A solar cell manufacturing apparatus for transferring. The method according to claim 1,
Wherein the chamber comprises a first chamber and a second chamber,
The coupling portion includes a first coupling portion providing a first chalcogen source and a second coupling portion providing a second chalcogen source,
Wherein the chalcogenide forming portion includes a first chalcogenide forming portion and a second chalcogenating forming portion,
The separator includes a first separator and a second separator,
Wherein the first chamber includes a first engaging portion, a first chalcogenization forming portion, and a first separating portion,
The second chamber includes a second engaging portion, a second chalcogenization forming portion, and a second separating portion,
Wherein the conveying means conveys the object to the first engaging portion, the first calucogenizing forming portion, the first separating portion, the second engaging portion, the second caluchenizing forming portion, and the second separating portion in sequence A solar cell manufacturing apparatus for transferring. 4. The method according to claim 2 or 3,
Wherein the first chalcogen source comprises selenium (Se)
And the second chalcogen source comprises sulfur (Se). The method according to claim 1,
The micropore body member is 1.75 g / cm ³ to 1.86 g / cm comprising the graphite has a density of the ^third range, or 6% to 11% of the porosity, including graphite having a (porosity), the solar cell manufacturing apparatus . delete The method according to claim 1,
Wherein the micropores contained in the microporous member have a radius according to the following formula.

(Where R is the radius of the micropores,? LV is the surface tension of the chalcogen liquid,? Is the contact angle of the chalcogen liquid, and P is the pressure). A first chamber in which the object is first chalcogenated;
A second chamber in which the object is subjected to a second chalcogenation reaction; And
Transfer means for transferring the object to the first chamber and the second chamber;
/ RTI >
A target loading unit located outside the first chamber and loading a target object;
A microporous body member disposed inside the first chamber and having micropores having a size such that the first chalcogen source is positioned on the object transferred from the object loading unit, A first coupling unit interposed between the object and the first chalcogen source;
Heating the first chalcogen source which is located inside the first chamber and transferred from the first coupling unit so that the first chalcogen source reaches the object through the micropores of the microporous member A first chalcogenide forming unit that forms a first chalcogenized object by a first chalcogenation reaction; And
A first separator located inside the first chamber and separating the microporous member from the first chalcogenized object;
An inter-chamber transferring unit located outside the first chamber and transferring the first chalcogenized object from the first chamber to the second chamber;
A second chalcogen source disposed on the first chalcogenized object transferred from the inter-chamber transfer section and located within the second chamber, and including micropores having a size such that the second chalcogen source passes therethrough; A second coupling unit interposed between the first chalcogenized object and the second chalcogen source;
Heating the second chalcogen source which is located inside the second chamber and transferred from the second coupling unit so that the second chalcogen source is moved through the micropores of the microporous member to the first chalcogenide A second chalcogenide-forming unit for forming a second chalcogenized object by reaching the second chalcogenide-forming target; And
A second separator located inside the second chamber and separating the microporous body member from the second chalcogenized object; And
A target body unloading unit located outside the second chamber and unloading the second color-coded target object transferred from the second separation unit;
Lt; / RTI >
Wherein the conveying means is a conveying means for conveying the object to the object loading portion, the first engaging portion, the first calchogenizing forming portion, the first separating portion, the inter-chamber transfer portion, the second engaging portion, The second separation unit, and the target body unloading unit.

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