KR101377746B1 - Veiwer device of veiw port in silicon ingot growth chamber - Google Patents

Abstract

The present invention relates to a viewer device for view port of ingot growth chamber. The present invention includes: a tubular pin hole light collector (100) which is inserted in a view port of a chamber (c) for growing an ingot, collects the light generated from the inside of the chamber (c) by forming a pin hole; a guide tube (200) which guides the light penetrated the pin hole, is extended from the pin hole light collector (100), and has large cross section than the pin hole light collector (100); a projected area (300) which is a semitransparent mirror installed in the rear side part of the guide tube (200), in which the light penetrated from the pin hole is focused to an image by being reflected; an observation part (400) which is a tube with predetermined length from the projected area (300), has a view hole to observe the focused image on the projected area (300). The present invention secures the wide visual field and reduces glairiness by having a simple structure and composition; provides a viewer device which can observe and monitor the ingot growing process inside the chamber more clearly and minutely. Additionally, the present invention can obtain a clear and minute image than a directly observed image with eyes, and can monitor in real time, and monitor by saving a total image history of process.

Description

Viewport viewer device for ingot growth chambers {veiwer device of veiw port in silicon ingot growth chamber}

The present invention relates to a viewer apparatus of an ingot growth chamber, and more particularly, to a viewport viewer apparatus of an ingot growth chamber, which is easy to mount, and which can monitor the growth process in a chamber in detail.

In general, a silicon ingot growth chamber is a silicon ingot which grows silicon ingots, including a quartz crucible in which raw materials for growth of silicon ingots are stacked, an electric heater, and a seed rod to heat the raw materials to form a silicon melt. The pull drive is configured to be pulled up and rotated at a predetermined speed by dipping the seed into the silicon melt to grow the silicon ingot.

In addition, the silicon ingot growth chamber has a silicon melt formed by an electric heater at a high temperature of 1000 ° C or higher, and the growing silicon ingot is pulled up to a reject chamber connected to the upper part of the chamber to prevent the influence of heat, and to quickly remove the silicon ingot. The cover is formed with a cooling jacket for growth.

FIG. 1 is a plan view illustrating a cover used in a conventional chamber for growing silicon ingots, and FIG. 2 is a cross-sectional view in the <II-II> direction of FIG. 1 for explaining an internal structure of the cover.

As shown, the cover of the chamber for conventional silicon ingot growth is formed with a cover body 10 in which a coolant flow space is formed by the bottom plate 12 and the case 14a, 14b, the cover body 10 is in the form of a cross-section It is formed as a flat type.

In addition, the cooling water flow space inside the cover body 10 is formed to gradually expand from the outer edge direction of the cover body to the inner edge direction. That is, the distance d 'between the base plate 12 and the case 14a is gradually widened from the outer edge direction of the cover body to the inner edge direction.

In addition, a coolant inlet 16a and a coolant outlet 16b are connected and formed in the case 14a of the cover body so that the coolant is introduced into and withdrawn from the coolant flow space, and the coolant is rapidly circulated in the coolant flow space. A baffle board 13 is formed spirally in the cooling water flow space. In addition, first and second view ports 18a and 18b are formed on the upper surface of the case 14a of the cover body to observe the solidification interface of the growing silicon ingot with the naked eye or a CCD camera.

However, the conventional cover here is inconvenient to identify the solidification interface by the first and second viewports. That is, in the case of the first and second viewports, the case and the bottom plate of the cover body are obliquely diagonally formed in the inner periphery direction, and the gap between the case and the bottom plate is gradually widened in the inner periphery direction, thereby increasing the depth of the viewport by the widened interval. This is because the viewing angle is reduced.

In addition, such a viewport structure is difficult to directly observe by the eyes due to the glare of the light generated from the inside, and even if the camera is used directly attached to the viewport, there is a problem that the sharpness of the video screen due to the brightness inside the chamber of the viewing angle described above is inferior .

An object of the present invention to solve the above problems is to provide a viewer device that can be easily mounted in a viewport to reduce glare and observe clearly and in detail in order to monitor the process situation in a silicon ingot growth chamber. .

In addition, it is intended to provide a viewer device that can be monitored in real time without restrictions in place and time, and to monitor the history of the ingot growth process after the fact.

The first feature of the present invention for solving the above problems is inserted into the viewport of the chamber (c) for the growth of silicon ingot, forming a pinhole to collect the light generated inside the chamber (c) 100; A guide tube (200) extending to the pinhole condenser (100) and having a larger cross-sectional area than the pinhole condenser (100) by guiding the light passing through the pinhole; A translucent mirror installed on the rear surface of the guide tube 200, the projection unit 300 through which light passing through the pinhole is projected to form an image; And an observer 400 formed with a view hole for observing an image formed in the projector 300 with a tube having a predetermined length from the projector 300.

Here, the pinhole light collecting part 100 preferably includes a tubular guard that prevents foreign matter from entering the chamber c in the front part and a pin hole that condenses the light generated in the chamber c in the back part. , The pinhole is cone-shaped, it is preferable that the pinhole hole is formed in the center.

In addition, the tubular guard extends to the inner side of the guard, and forms a plurality of cone-shaped auxiliary guards 115 having a guard hole in the center thereof, but preferably convex in the chamber c direction. It is preferable that the plurality of auxiliary guards 115 have a larger diameter of the guard hole toward the chamber c.

In addition, preferably, the guide tube 200 may be formed with at least one air hole 230 for introducing external air to the side surface, the view hole 450 of the observation unit 400, glass, lens and One of the films may be mounted.

In addition, the second aspect of the present invention is inserted into the viewport of the chamber (c) for silicon ingot growth, tubular pinhole condensing portion 100 for forming a pinhole to collect the light generated inside the chamber (c); A guide tube 200 extending to the pinhole condenser 100 and having a larger cross-sectional area than the pinhole condenser 100 to guide the light passing through the pinhole; An image sensing device 500 attached to a rear surface of the guide tube 200 to project light passing through the pinhole to be converted into an image; And a terminal 600 connected to the image sensing device 500 to display an image generated from the image sensing device 500.

Here, the terminal 600 is preferably any one of a PC, a smartphone, a PDA, and a tablet PC, and the pinhole light collecting part 100 has a tubular shape that prevents foreign substances from entering and exiting the chamber c in the front side. It is preferable to include a guard and a pinhole for condensing light generated in the chamber (c) in the rear portion.

In addition, preferably the pinhole has a cone shape, the pinhole hole may be formed in the center, the tubular guard, extending to the inner surface of the guard, a plurality of cone-shaped auxiliary guards formed with a guard hole in the center ( 115, but may be convex in the interior direction of the chamber (c).

Furthermore, it is preferable that the plurality of auxiliary guards 115 have a larger diameter as the guard holes are closer to the pinholes, and the guide tube 200 includes at least one air hole 230 for introducing external air into the side surface. It is preferable that this is formed.

The present invention provides a viewer device that can reduce glare, secure a wider field of view, and observe and monitor ingot growth processes in a chamber more clearly and with a simple structure and configuration.

In addition, the present invention not only obtains a clear and detailed image than directly observed by the eye, but also has the advantage of being capable of monitoring real time and storing and monitoring the image history of the entire process.

In addition, it is easily mounted in the viewport of a typical ingot growth chamber, which increases user convenience in observing the growth process inside the chamber in real time through an external terminal, and monitors the situation in the chamber anytime, anywhere, without restriction of place and time. There is a big advantage to it.

1 is a plan view for explaining a cover used in the chamber for conventional silicon ingot growth,
FIG. 2 is a cross-sectional view in the <II-II> direction of FIG. 1 for explaining the internal structure of the cover.
3 is a view illustrating a configuration of a viewport viewer device of an ingot growth chamber and a chamber (c) connection according to an embodiment of the present invention;
4 is a cross-sectional view showing the configuration of the viewport viewer device of the ingot growth chamber (c) according to an embodiment of the present invention,
5 is a view showing a cross-sectional configuration of the pinhole light collecting unit of the viewport viewer device of the ingot growth chamber (c) according to an embodiment of the present invention,
6 is a cross-sectional view of a viewport viewer device of an ingot growth chamber (c) according to another embodiment of the present invention;
7 is a view showing the configuration of a viewport viewer device of the ingot growth chamber (c) according to another embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and how to accomplish it, will be described with reference to the embodiments described in detail below with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. The embodiments are provided so that those skilled in the art can easily carry out the technical idea of the present invention to those skilled in the art.

In the drawings, embodiments of the present invention are not limited to the specific forms shown and are exaggerated for clarity. Also, the same reference numerals denote the same components throughout the specification.

The expression "and / or" is used herein to mean including at least one of the components listed before and after. Also, singular forms include plural forms unless the context clearly dictates otherwise. Also, components, steps, operations and elements referred to in the specification as " comprises "or" comprising " refer to the presence or addition of one or more other components, steps, operations, elements, and / or devices.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

3 is a view illustrating a configuration of a viewport viewer device and a chamber connection of an ingot growth chamber according to an exemplary embodiment of the present invention. As shown in FIG. 3, the viewport viewer device of the ingot growth chamber (c) according to the embodiment of the present invention is inserted into the viewport of the chamber (c) for silicon ingot growth and forms a pinhole to form the chamber (c). A tubular pinhole condenser 100 condensing light generated therein; A guide tube (200) extending to the pinhole condenser (100) and having a larger cross-sectional area than the pinhole condenser (100) by guiding the light passing through the pinhole; A translucent mirror installed on the rear surface of the guide tube 200, the projection unit 300 through which light passing through the pinhole is projected to form an image; And an observer 400 formed with a view hole for observing an image formed in the projector 300 with a tube having a predetermined length from the projector 300.

As described above, the embodiment of the present invention proposes a viewer device inserted into the viewport to observe the progress of growth of the chamber (c) ingot so that the user can check the inside with a clear image. The configuration of the viewer device according to an embodiment of the present invention, the pinhole condenser 100 is inserted into the viewport to collect the light generated therein, the guide tube 200 for guiding the light passing through the pinhole, projecting the light The projection unit 300 to form an image, and the observation unit 400 is formed with a view hole 450 for observing the image projected on the projection unit 300.

Here, the pinhole concentrator 100 includes a tubular guard and a pinhole for condensing and passing light generated in the chamber c. The front side is open to one tube, and the rear side is composed of the pinhole. The pinhole is a structure in which a small hole is formed in a plate such as tungsten material.

The guide tube 200 has a tubular shape extending to the rear surface of the pinhole condenser 100 and has a wider cross-sectional structure than the pinhole condenser 100. Since light condensed in the pinhole is emitted while passing through the pinhole, the light must be wider in cross section than the pinhole condenser 100 to guide the light.

In addition, the rear surface of the guide tube 200 is provided with a projection unit 300 for projecting the light, the projection unit 300 is formed of a translucent glass to project the light passing through the guide tube 200 to the chamber (c). ) It performs the function of forming an internal image. At the rear of the projection unit 300, a tubular observation unit 400 having a predetermined length is formed, and a view hole 450 through which the user can directly observe the image formed on the projection unit 300 with his eyes on the rear of the observation unit 400. ). That is, the observer 400 functions as an eyepiece for allowing a user to observe an image formed on the projection unit 300 with eyes, and at the same time, serves as a darkroom for observing the image more clearly.

4 is a cross-sectional view showing the configuration of a viewport viewer device of the ingot growth chamber (c) according to an embodiment of the present invention. This will be described in more detail with reference to FIG. 4.

As shown in FIG. 4, the viewport viewer device of the ingot growth chamber c according to the embodiment of the present invention includes a pinhole condenser 100, a guide tube 200, a projection unit 300, and an observation unit 400. It is a tubular interface device comprised.

The pinhole light collecting part 100 is inserted into the viewport of the chamber c to be configured to collect light generated in a process of growing an ingot at a high temperature in the chamber c. The pinhole condenser 100 guides the light and at the same time is installed on the tubular guard (110) and the rear of the tubular guard (110) to prevent the foreign substances inside the chamber (c) to block the pinhole and to provide light It consists of a pinhole formed with a hole to pass through.

Here, the pinhole not only performs a lens function for condensing light generated in the chamber (c) to form an image, but also reduces the amount of light passing through the small hole, thereby reducing the glare of light generated therein. .

The light passing through the pinhole proceeds by being emitted from a small hole. The guide tube 200 extends to the rear of the pinhole condenser 100 where the pinhole is located to guide the light, thereby forming a guide tube 200 having a wider cross-sectional area. The guide tube 200 not only performs a function of guiding the light, but also condenses the light to form an image, and then performs an arrangement function of the optical element to secure and emit a predetermined distance again.

It is preferable to form at least one air hole 230 on the side of the guide tube 200, which increases the pressure inside the chamber c, between the pressure of the chamber c and the guide tube 200 connected through the pinhole. This is to maintain a constant pressure by introducing external air by forming an air hole 230 to prevent the outflow of air in the chamber (c) generated by the pressure difference of the.

The light passing through the guide tube 200 is projected onto the projection unit 300 installed at the rear of the guide tube 200 to form an image. The projection unit 300 is formed of translucent glass and performs a function of a screen for forming an image of incident light. That is, the light emitted from the pinhole through the guide tube 200 travels a certain distance secured through the guide tube 200, and is then projected onto the translucent glass that is the projection unit 300 to form an image.

The tubular observation unit 400 extends behind the projection unit 300 again, which is a viewer device for observing an image projected on the projection unit 300. That is, a view hole 450 for observing an image formed on the projection part 300 is formed at the rear of the tubular observation part 400 by the user's eye. As described above, when the observer 400 observes the inside of the observer 400 by observing the inside of the view hole 450 to monitor the situation in the chamber c, which is the original purpose, the user views the image formed on the projection part 300. It becomes possible, the observation unit 400 also performs the role of a dark room for viewing a clearer image at the same time.

5 is a cross-sectional view of the pinhole condenser 100 of the viewport viewer device of the ingot growth chamber c according to the embodiment of the present invention. As shown in FIG. 5, the pinhole light collecting part 100 is formed at a rear side of the tubular guard 110 to guide the light generated inside the chamber c and to prevent foreign matter from entering the chamber c. And a pinhole portion for collecting the light.

Here, the tubular guard 110 has a plurality of cone-shaped auxiliary guards 115 having a hole formed at a center thereof at regular intervals. Such an auxiliary guard 115 is an effective structure for preventing the introduction of various foreign substances that can be generated and introduced into the chamber (c), the light is incident on the pinhole, to ensure a wider internal image, each auxiliary guard The hole diameter of 115 is preferably smaller as it gets closer to the pinhole.

As shown in FIG. 5, the auxiliary guard 115 has a cone shape in which a hole is formed in the center thereof, and forms a predetermined inclination angle in the direction of the chamber c, and is smaller than the diameter d 'of the hole of the first auxiliary guard 115. 2 The diameter (d) of the hole of the auxiliary guard 115 is larger. This is to propose a filtering structure for effectively preventing the inflow of foreign substances as described above, and the difference in the diameter (d, d ') of each of the auxiliary guard 115 hole to monitor the situation inside the chamber (c) This is to ensure a wider field of view.

The light passing between the auxiliary guards 115 is focused on the pinhole formed on the rear surface according to the optical structure. The pinholes collect and pass the tube by forming a small hole in the center of the plate which is very resistant to heat such as tungsten. . The material having a high melting point for the pinhole plate is preferably a material having high heat resistance because the temperature in the chamber (c) is maintained at about 1000 ° C. for ingot growth.

6 is a cross-sectional view of a viewport viewer device of the ingot growth chamber (c) according to another embodiment of the present invention. 6 is different from the structure of the pinhole condenser 100 in the embodiment of FIG. 5, and all other configurations are the same, and thus descriptions of the same structure will be omitted.

As shown in FIG. 6, the pinhole concentrator 100 of the viewer device according to the embodiment of the present invention includes a tubular guard and a pinhole 153, and the pinhole 153 has a cone formed with a small hole in the center thereof. It is formed into a shape. Such a structure has the advantage of forming a convex structure to prevent foreign matter from entering the pinhole 153 and widening the field of view for monitoring the situation in the chamber (c).

7 is a view showing the configuration of a viewport viewer device of the ingot growth chamber (c) according to another embodiment of the present invention. As shown in FIG. 7, the viewer device according to the embodiment of the present invention is inserted into the viewport of the chamber c for silicon ingot growth, and forms a pinhole to condense light generated in the chamber c. Tubular pinhole condenser 100; A guide tube 200 extending to the pinhole condenser 100 and having a larger cross-sectional area than the pinhole condenser 100 to guide the light passing through the pinhole; An image sensing device 500 attached to a rear surface of the guide tube 200 to project light passing through the pinhole to be converted into an image; And a terminal 600 connected to the image sensing device 500 to display an image generated from the image sensing device 500.

Unlike the embodiment of FIGS. 3 to 6, the embodiment of the present invention does not check the image generated from the inside of the chamber c by the user's eyepiece, but the chamber c by the image sensing device 500. The present invention proposes an apparatus for sensing an internal image and displaying and monitoring the sensed image through an external terminal 600.

That is, the pinhole condenser 100 and the guide tube 200 are the same as those of the embodiment of FIG. 4, and the image sensing device 500 is installed at the rear side of the guide tube so that the light passing through the pinhole is projected to form an image. It is a structure. When an image is formed in the image sensing device 500 through the pinhole and guide tube 200, the image sensing device 500 converts the formed image into a digital signal, and the converted digital signal is connected to a wired or wireless terminal. 600 is transmitted to the terminal 600 to display. Description of the same configuration as in the embodiment of Figure 4 will be omitted below.

This embodiment not only obtains a clearer and more detailed image than directly observed by the eye, but also stores an image digital signal transmitted to the terminal 600, so that the real-time monitoring can be performed. There is an advantage that you can save and monitor the history.

Here, the image sensing device 500 may be broadly classified into an image tube and a solid state image sensor, and the former may include a beacon and a plum beacon, and the latter may include a metal oxide semiconductor (MOS) and a charge coupled device (CCD). have. They are used for television cameras and the like and shoot using a three-dimensional object or a planar subject with a lens.

As such, the image sensing device 500 is a device having an image sensor. In the embodiment of the present invention, the light emitted from the chamber c is projected by the light emitted through the pinhole, such that the lens structure is the same as a general CCD camera. Does not need That is, the pinhole condenser 100 and the guide tube 200 serve as a lens, collect an image from the image sensing device 500, and transmit the image to the external terminal 600. Display the video. The terminal 600 is preferably any one of a PC, a smartphone, a PDA, and a tablet PC.

As described above, the embodiment of the present invention is easily mounted on the viewport of the general ingot growth chamber c, and thus user convenience in that the growth process inside the chamber c can be observed in real time through the external terminal 600. This is high, there is a big advantage that can monitor the situation in the chamber (c) anytime, anywhere, without restriction of place and time.

In addition, in addition to monitoring in real time, if the image stored in the chamber (c) received by the terminal 600 can be stored after the entire history of the ingot growth process can be monitored and monitored, it is clearer than visual observation. There is a big advantage to being able to observe closely.

While the invention has been shown and described with respect to the specific embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined by the appended claims. Anyone with it will know easily.

100: pinhole condenser, 110: tubular guard, 115: auxiliary guard 150: pinhole,
200: guide tube, 230: air hole, 300: projection part, 400: observation part,
450: view hole, 500: image sensing device, 600: terminal

Claims (14)

A tubular pinhole condenser 100 inserted into the viewport of the chamber for ingot growth and forming a pinhole to collect light generated in the chamber c;
A guide tube (200) extending to the pinhole condenser (100) and having a larger cross-sectional area than the pinhole condenser (100) by guiding the light passing through the pinhole;
A translucent mirror installed on the rear surface of the guide tube 200, the projection unit 300 through which light passing through the pinhole is projected to form an image; And
Viewport of the ingot growth chamber (c) characterized in that it comprises a observer 400 is a tube having a predetermined length from the projection unit 300, the view hole for observing the image formed on the projection unit 300 Viewer device.
The method of claim 1,
Pinhole condenser 100,
A tubular guard for preventing foreign matter from entering the chamber (c) on the front surface;
Viewport viewer device of the ingot growth chamber (c) comprising a pinhole for condensing light generated in the chamber (c) in the rear portion.
3. The method of claim 2,
The pinhole is cone-shaped, the viewport viewer device of the ingot growth chamber (c) characterized in that the pinhole hole is formed in the center.
3. The method of claim 2,
The tubular guard,
Extending to the guard inner surface, to form a plurality of cone-shaped auxiliary guards 115 formed with a guard hole in the center,
Viewport viewer device of the ingot growth chamber (c), characterized in that the convex in the chamber (c) in the direction.
5. The method of claim 4,
The plurality of auxiliary guards 115,
Viewport viewer apparatus of the ingot growth chamber (c) characterized in that the diameter of the guard hole increases toward the chamber (c) direction.
The method according to any one of claims 1 to 5,
The guide tube 200,
Viewport viewer device of the ingot growth chamber (c), characterized in that at least one air hole (230) for introducing the outside air is formed on the side.
The method according to any one of claims 1 to 5,
The view hole 450 of the observation unit 400,
Viewport viewer device of the ingot growth chamber (c) characterized in that any one of the glass, lens and film is mounted.
A tubular pinhole condenser 100 inserted into the viewport of the chamber for ingot growth and forming a pinhole to collect light generated in the chamber c;
A guide tube 200 extending to the pinhole condenser 100 and having a larger cross-sectional area than the pinhole condenser 100 to guide the light passing through the pinhole;
An image sensing device 500 attached to a rear surface of the guide tube 200 to project light passing through the pinhole to be converted into an image; And
Viewport viewer device of the ingot growth chamber (c) is connected to the image sensing device 500, characterized in that it comprises a terminal 600 for displaying the image generated from the image sensing device (500).
9. The method of claim 8,
The terminal 600,
Viewport viewer device of the ingot growth chamber (c), characterized in that any one of PC, smartphone, PDA and tablet PC.
10. The method of claim 9,
Pinhole condenser 100,
A tubular guard for preventing foreign matter from entering the chamber (c) on the front surface;
Viewport viewer device of the ingot growth chamber (c) comprising a pinhole for condensing light generated in the chamber (c) in the rear portion.
11. The method of claim 10,
The pinhole is cone-shaped, the viewport viewer device of the ingot growth chamber (c) characterized in that the pinhole hole is formed in the center.
11. The method of claim 10,
The tubular guard,
Extending to the guard inner surface, to form a plurality of cone-shaped auxiliary guards 115 formed with a guard hole in the center,
Viewport viewer device of the ingot growth chamber (c), characterized in that the convex in the chamber (c) in the direction.
The method of claim 12,
The plurality of auxiliary guards 115,
Viewport viewer device of the ingot growth chamber (c) characterized in that the larger the diameter of the guard hole closer to the pinhole.
14. The method according to any one of claims 8 to 13,
The guide tube 200,
Viewport viewer device of the ingot growth chamber (c), characterized in that at least one air hole (230) for introducing the outside air is formed on the side.

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