KR101348660B1 - Package module for terahertz wave transmitting receiving device - Google Patents

Abstract

The present invention relates to an all-in-one package module for a terahertz wave transceiving device capable of high density alignment, comprising: a photoconductive antenna having an active region for terahertz wave generation; A silicon ball lens for focusing terahertz waves generated from the photoconductive antenna; A focusing lens for focusing a laser pulse on the photoconductive antenna; And a focusing lens aligner in which the focusing lens is embedded and whose position is adjusted to align the focusing lens to the center of the active region of the photoconductive antenna.
According to the present invention, it is possible to provide a package module for a terahertz wave transmission / reception element having a high-density alignment of the focusing lens in the X, Y, and Z directions by a focusing lens aligner, and having a nitrogen gas or an inert gas injection / filling function.

Description

Package module for terahertz wave transceiving device {PACKAGE MODULE FOR TERAHERTZ WAVE TRANSMITTING RECEIVING DEVICE}

The present invention relates to a package module for a terahertz wave transceiver element, and more particularly, to an all-in-one package module for a terahertz wave transceiver device capable of high density alignment.

The present invention is derived from a study conducted as part of the IT source technology development project of the Ministry of Knowledge Economy [Task Management Number: 2006-S-005-04, Task name: THz wave oscillation conversion detector and signal source].

The terahertz wave (THz-wave) is an electromagnetic wave with a frequency range of 100 GHz to 10 THz between infrared and microwave, and recently gained more attention worldwide as it is recognized as a radio wave resource of the future with the development of advanced technology. (Information Technology), BT (Bio Technology), etc. are becoming more important in a variety of applications through convergence.

In particular, terahertz waves travel through various materials like radio waves while going straight like visible light, so that not only basic sciences such as physics, chemistry, biology, medicine, etc., but also detection of counterfeit bills, drugs, explosives, biochemical weapons, industrial structures, etc. Non-destructive inspection is expected to be widely used in general industries, defense, security and other fields.

In the field of information and telecommunications, terahertz technology is expected to be widely used for radio communication of 40 Gbit / s or higher, high speed data processing, and inter-satellite communication. Such terahertz waves can be divided into continuous and pulsed waves according to their generation method. In general, pulsed terahertz waves are generated by irradiating a femtosecond (10-15 seconds) laser to a special semiconductor or optical crystal. More detailed descriptions are as follows.

FIG. 1 is a diagram for describing a technique of generating a pulsed terahertz wave by injecting a femtosecond laser beam into a photoconductive antenna.

As shown, the photoconductive antenna 100 includes a photoconductive thin film 120 and a photoconductive thin film 120 grown on a semi-insulating GaAs or low temperature growth (LT) -GaAs substrate 110. It includes a metal parallel transmission line 130 of the H-shaped pattern formed above. Here, the central region of the H-shaped pattern of the metal parallel transmission line 130 acts as a small dipole antenna.

When the bias voltage Vb is applied to the metal parallel transmission line 130 and the excitation is discontinuously using a pulse of an ultrashort laser having a pulse duration of 100 femtoseconds (fs) or less, By absorption, carriers (electrons and holes) are generated to instantaneously flow a current through the metal parallel transmission line 130, and a terahertz wave (dipole radiation) is generated which is proportional to the time change (differential value) of the current.

The terahertz waves generated as described above are strongly radiated from the opposite surface of the substrate 110 having a high dielectric constant, and the pulse width of the radiated terahertz waves is 1 ps or less. When optically excited using the pulses of a commercially available 30fs ultrashort femtosecond laser, a Fourier transform can obtain a broad spectrum over a range of 0 to several tens of terahertz.

Therefore, in order to emit terahertz waves on the back surface of the substrate 110, the femtosecond laser pulses are focused on a photoconductive antenna formed on the front surface of the substrate 110 through a focusing lens 250, and the generated terahertz waves. The wave should be focused to a high intensity using a hemispherical silicon ball lens.

However, in the related art, since a terahertz wave transceiver is manufactured by mounting and aligning elements such as a focusing lens, a photoconductive antenna 100, and a silicon ball lens on an optical table at a time, a highly difficult alignment technique for aligning them with high precision and There is a problem that a considerable time is required.

In particular, when the surface contact between the photoconductive antenna 100 and the hemispherical silicon ball lens, there is a problem that a scratch does not occur on the surface of the photoconductive antenna 100 and the silicon ball lens, or terahertz waves due to alignment errors. have.

In addition, there is a problem that a separate fixing means (small / precision mechanism) for continuously maintaining the alignment state of the photoconductive antenna 100 and the silicon ball lens.

In addition, in order to measure the characteristics of the terahertz wave generated, it is necessary to directly connect a wire to the photoconductive antenna 100 using a conductive adhesive or an indium (P) material, and then remove the connected wire, etc. after the measurement. . Therefore, there is a problem that it is very cumbersome and difficult to measure the terahertz wave characteristics while maintaining the alignment state of the photoconductive antenna 100 and the silicon ball lens.

In addition, the alignment state of the focusing lens, the photoconductive antenna 100 and the silicon ball lens may be easily changed during transportation and storage, and the terahertz wave transceiver may be easily damaged or contaminated by an external environment. .

On the other hand, the terahertz wave transceiving device package module is composed of a metal thin film dipole antenna element module (including semiconductor substrate material) as a core component. Therefore, in order to generate / detect the high power terahertz wave, ultrashort / high energy optical pulses are used. Should be used.

However, there is a problem that ultrashort / high energy light pulses react with moisture on the device and crystal surface to form an oxide film and inhibit terahertz wave generation. As a result, as the use time of the terahertz wave transceiving device becomes longer, characteristics of the terahertz wave transceiving device are changed due to oxide film formation, corrosion, and contamination.

The present invention has been proposed to solve the above problems, and an object thereof is to provide a package module for a terahertz wave transmission / reception element capable of high density alignment and having a spray / fill function of nitrogen gas, inert gas or a mixture thereof. .

In order to achieve the above object, the present invention provides a package module for a terahertz wave transceiving device, comprising: a photoconductive antenna having an active region for terahertz wave generation; A silicon ball lens for focusing terahertz waves generated from the photoconductive antenna; A focusing lens for focusing a laser pulse on the photoconductive antenna; And a focusing lens aligner in which the focusing lens is embedded and whose position is adjusted to align the focusing lens to the center of the active region of the photoconductive antenna.

According to the present invention, there is provided a package module for a terahertz wave transceiving device having a high-density alignment of the focusing lens in the X, Y, and Z directions by a focusing lens aligner, and the injection / filling function of nitrogen gas, inert gas, or a mixture thereof. By providing the following effects, the following effects can be derived.

First, since the silicon ball lens, the photoconductive antenna and the focusing lens can be easily and accurately aligned, the terahertz wave can be easily generated or measured with a simpler structure as compared with the related art. Therefore, the time and cost required for the construction of the terahertz wave generation and measurement system can be greatly reduced. In addition, the terahertz wave generation and measurement system can be simplified and downsized.

In particular, by providing at least two dovetail grooves in the outer flange of the all-in-one package module structure for the terahertz wave transceiving device, the focusing lens may be aligned in the X and Y directions. In addition, it is possible to align the Z-direction by moving the internal flange up and down. Therefore, the center of the focusing lens mounted on the inner flange is highly aligned to the center of the active region of the photoconductive antenna, thereby simplifying and miniaturizing the terahertz wave generation and measurement system.

Second, nitrogen gas, an inert gas, or a mixed gas thereof is injected when the terahertz transceiving device is driven, and nitrogen gas, an inert gas, or a mixed gas thereof is filled when the device is stopped / stored. As a result, even if the driving time of the terahertz wave transceiving device becomes longer, the characteristics of the terahertz wave can be prevented from being changed due to oxide film formation, corrosion, contamination, and the like.

Third, when the terahertz wave transceiving device is stored or transported, the inner and outer elements may be completely sealed using the upper and lower covers. Therefore, while maintaining the alignment state of the photoconductive antenna, the silicon ball lens and the focusing lens can be preserved and transported to ensure stability as well as to minimize the contamination of the internal elements by the external environment.

Fourth, when it is necessary to measure the characteristics of the terahertz wave, it is possible to simply measure the characteristics of the terahertz wave generated from the photoconductive antenna by connecting an external terminal to the center of the active region of the photoconductive antenna. Therefore, there is no need to perform a conductive adhesive or an indium bonding operation for the characteristic test as in the prior art, which makes the test easier and simpler, as well as significantly reducing the test time and cost.

1 is a view for explaining a technique for generating a pulsed terahertz wave by injecting a femtosecond laser beam (pulse) to the photoconductive antenna
2 is a view showing the basic structure of a terahertz wave transmission and reception device according to an embodiment of the present invention
3 is a view showing the configuration of a terahertz wave generation and measurement system according to an embodiment of the present invention
Figure 4 is a cross-sectional view showing the configuration of a package module for terahertz wave transmission and reception elements according to an embodiment of the present invention
5a and 5b are perspective views showing the configuration of the outer flange according to an embodiment of the present invention
Figure 6 is a perspective view showing the configuration of the inner flange according to an embodiment of the present invention
7 is a view illustrating a plane of a focusing lens aligner according to an embodiment of the present invention.
8A and 8B are cross-sectional views of a package module for a terahertz wave transceiving device according to an embodiment of the present invention.
9A is a diagram illustrating an example of fabrication of a package module for terahertz wave transceiving devices according to an embodiment of the present invention.
9B is an exploded perspective view of a package module for a terahertz wave transceiving device
9C is an exploded perspective view of a package module for a terahertz wave transceiving device
9D is a view showing a completed example of a package module for terahertz wave transceiving elements according to an embodiment of the present invention

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art can easily carry out the technical idea of the present invention.

2 is a view showing a basic structure of a terahertz wave transmission and reception device according to the present invention, Figure 3 is a schematic diagram showing a terahertz wave generation and measurement system to which the terahertz wave transmission and reception device shown in FIG.

As shown in FIG. 2, the terahertz wave transceiving device 200 according to an embodiment of the present invention includes a photoconductive antenna 240 and a photoconductive antenna 240 having an active region for terahertz wave generation. The silicon ball lens 230 for focusing the generated terahertz waves and the focusing lens 250 for focusing the laser pulse on the photoconductive antenna element 240 are provided.

Here, the silicon ball lens 230 is aligned and bonded to the photoconductive antenna 240, the focusing lens is adjusted by the focusing lens aligner is aligned with the center of the active region of the photoconductive antenna 240.

As shown in FIG. 3, it is preferable that the photoconductive antenna 240, which is a core semiconductor device of the terahertz wave transceiving device 200, is modularized so that the region has a local nitrogen gas or an inert gas atmosphere. That is, in the present invention, the terahertz wave transceiving device may be modularized to remove moisture from all terahertz wave propagation paths in order to prevent deterioration of the terahertz wave vulnerable to moisture, and thus may be operated and measured in a nitrogen gas or inert gas atmosphere. Make sure In this case, nitrogen gas or an inert gas may be used or a mixture thereof may be used, for example, helium gas including nitrogen gas may be used.

To this end, the terahertz wave transceiving device 200 is provided with an injection passage for injecting nitrogen gas, inert gas or a mixed gas thereof and a filling passage for filling nitrogen gas, inert gas or a mixed gas thereof, and the gas A needle valve NV1 for adjusting the injection pressure and a check valve CV1 for adjusting the gas filling are provided.

Of course, it is also possible for the terahertz wave generating global enclosure 500 or the transmit / receive module partial enclosure 600 to have a nitrogen gas or inert gas atmosphere. In this case, a needle valve NV2 and a check valve CV2 are provided for the enclosure 500 to have a nitrogen gas or an inert gas atmosphere, and a needle valve for the enclosure 600 to have a nitrogen gas or an inert gas atmosphere. NV3 and check valve CV3 are provided.

4 is a cross-sectional view illustrating a configuration of a package module for terahertz wave transceiving devices according to an embodiment of the present invention.

As shown, the package module 300 of the terahertz wave transceiving device according to an embodiment of the present invention includes a photoconductive antenna 240 and a photoconductive antenna 240 having an active region for terahertz wave generation. A silicon ball lens 230 for focusing the generated terahertz waves, a focusing lens 250 for focusing a laser pulse on the photoconductive antenna 240, and a focusing lens 250 are embedded, and the focusing lens 250 is a photoconductive antenna. And a focusing lens aligner that is positioned to align to the center of the active area of 240.

The terahertz wave transceiving device package module 300 further includes a cylindrical sleeve 340 that surrounds and fixes an outer surface of the silicon ball lens 230, and defines an upper opening region of the photoconductive antenna 240. It is preferable to further include a top cover 360 for sealing and a bottom cover 370 for sealing the lower opening area of the photoconductive antenna 240.

In addition, it is preferable to further include ripples 380, 382, 384 for radiating and filling nitrogen in the terahertz wave transmitting and receiving device package module 300.

Hereinafter, each configuration will be described in detail.

The photoconductive antenna 240 has an active region ① for radiating or detecting terahertz waves at the center thereof. In the package module for the terahertz wave transceiving device according to the exemplary embodiment of the present invention, since the upper region and the lower region of the photoconductive antenna 240 are open, an external terminal (not shown) is provided at the center of the active region. When connected, the characteristics of the terahertz wave generated by the photoconductive antenna 240 may be easily measured. Here, the external terminal may be, for example, USB.

The focusing lens aligner has a focusing lens 250 mounted thereon, and includes a first direction (for example, X direction), a second direction (for example, Y direction) that intersects the first direction, and an up and down direction (for example, For example, by adjusting the position in the Z direction, the mounted focusing lens 250 is aligned with the center portion ① of the active region of the photoconductive antenna 240.

The focusing lens aligner includes an outer flange 320, 312, 314, 316 and an inner flange 320 inserted into the barrel-shaped outer flange 316. The outer flanges 310, 312 and 314 are adjusted in a first direction or a second direction by a dovetail, and the inner flange 320 is adjusted in an up and down direction, thereby moving the focusing lens 250 to an appropriate position. Align it.

In addition, the focusing lens aligner may further include an adjusting unit 330 for moving the inner flange 320 in the up and down directions. The adjusting unit 330 is fixed to the upper portion of the barrel-type outer flange 316 is rotated in place, and rotates the inner flange 320 during the rotation by the screw groove 322 provided on the contact surface with the inner flange 320, Move downward

In addition, the focusing lens aligner may further include a line groove, a metal ball 350 and a fixing bolt 352 for inducing the up and down movement of the inner flange 320.

According to the present invention as described above, it is possible to precisely align the photoconductive antenna 240, the silicon ball lens 230 and the focusing lens 250 using a focusing lens aligner without using a high precision alignment technology. All-person package modules can be provided. Accordingly, the terahertz wave transceiving device 200 according to the present invention can easily generate or measure terahertz waves with a simpler structure as compared with the conventional art, and thus, it is necessary to construct a terahertz wave generation and measurement system. Can significantly reduce the time and cost.

5A and 5B are perspective views illustrating a configuration of an external flange according to an embodiment of the present invention. However, for convenience of description, the dovetail is illustrated as a center, and the configuration of the barrel-type external flange is omitted.

5A shows a configuration of an external flange according to a first embodiment of the present invention.

As shown, the outer flange is configured to move the first dovetail ② and the focusing lens 250 in the first direction I-I 'to move the focusing lens 250 in the first direction I-I'. And a second dovetail ③ for moving in the intersecting second direction (II-II ').

Here, the dovetail means protrusions and grooves respectively cut at the joint surfaces of the two layers in order to move the outer flange in a linear direction. That is, the two layers are joined by the protrusions and the grooves formed on the joining surfaces of the two layers and are moved along the grooves in a linear direction. In this case, the protrusions have a wider width toward the top in order to maintain the bonding state of the two layers. It is formed to have a shape, and this shape is called a dovetail because it is similar to the swallow tail.

For example, the outer flange is formed to include the first outer flange 310, the second outer flange 312 and the third outer flange 314, which are sequentially stacked, the first outer flange 310 and the second outer The first dovetail (②) is provided in the joining surface of the flange 312 in the first direction (I-I '), and the second direction is joined to the joining surface of the second outer flange 312 and the third outer flange 314. A second dovetail ③ may be provided as (II-II ').

5B illustrates a configuration of an external flange according to a second embodiment of the present invention.

As shown, the outer flange includes a first outer flange 310, second outer flanges 312A and 312B, and a third outer flange 314 that are sequentially stacked.

Here, the second outer flanges 312A and 312B are composed of a main part 312A and a sub part 312B. After the upper and lower parts have a protrusion having the same width on the upper surface of the main part 312A, The sub-sections 312B are connected to both sidewalls of the protrusions so as to have a dovetail shape in which the protrusions become wider toward the top. Through this, the difficulty of the process during the cutting process of the second outer flange can be lowered. Of course, the sub portion 312B may be added in a separate configuration so that the protrusion of the main portion 312A has the shape of a dovetail, or may be implemented together as part of another configuration.

As such, by providing the dovetail on the contact surface of the external flange, the focusing lens 250 may be linearly moved in the first direction (I-I ') or the second direction (II-II'). The 250 may be easily aligned with the center of the active region of the photoconductive antenna 240. In addition, after the focusing lens 250 is aligned, the dovetail bonding surface of the outer flange is adhered with an epoxy adhesive or fixed using a fixing bracket, thereby maintaining the aligned state.

Figure 6 is a perspective view showing the configuration of the inner flange according to an embodiment of the present invention, briefly showing the configuration of the outer flange, the inner flange and the adjustment unit.

As shown, the focusing lens aligner includes a first outer flange 310, a second outer flange 312 and a third outer flange 314, which are sequentially stacked, and are formed on an upper portion of the third outer flange 314. The barrel-type outer flange 316 and the barrel-type outer flange 316 are further inserted into the barrel-type inner flange 320 for moving the focusing lens 250 in the up and down directions.

Here, the contact surface between the barrel-type outer flange 316 and the barrel-type inner flange 320 is provided with a plurality of line grooves extending in parallel in the vertical direction, and the barrel-shaped inner flange by a metal ball inserted into the line groove. Is moved in a straight line only in the up and down direction without rotation. In the drawing, as an example, a case where a plurality of line grooves ④ is provided on the outer circumferential surface of the barrel-shaped inner flange 320 is illustrated.

In addition, the focusing lens aligner may further include an adjusting unit 330 located above the barrel-type outer flange 316. The adjusting unit 330 is in contact with the upper outer circumferential surface of the barrel-shaped inner flange 320, and has a screw groove 322 on the contact surface. Accordingly, when the adjusting unit 330 is rotated, the barrel-shaped inner flange 320 is moved in the up and down directions by the screw groove 322. At this time, it is preferable to fix the adjusting unit 330 to the upper portion of the barrel-type outer flange 316 for the convenience of operation, it is preferable that the groove (⑤) for fixing on the outer peripheral surface of the adjusting unit 330. Do.

In the drawing, the third outer flange 314 and the barrel-type outer flange 316 are presented in separate configurations, but the barrel-type outer flange 316 is formed from the upper surface of the third outer flange 314. It may also be formed in an expanded form. That is, it is also possible to comprise the 3rd external flange 314 and the barrel type external flange 316 in one body.

FIG. 7 is a view illustrating a plane of the focusing lens aligner according to the exemplary embodiment of the present invention, and illustrates the plane A-A 'of FIG. 4.

As shown, the barrel type inner flange 320 is inserted into the barrel type outer flange 316, and the line groove ④ and the barrel type outer flange 316 provided on the outer circumferential surface of the barrel type inner flange 320. The metal ball 350 is interposed therebetween. The metal ball 350 is fixed by the fixing bolt 352, the barrel-shaped inner flange 320 can be moved in the up and down direction without rotation by the induction of the line groove (④) and the metal ball 350. have.

In addition, the barrel-type outer flange 316 has ripples 382 and 384 on the sidewalls for the emission and filling of nitrogen gas or inert gas. Here, the ripples 382 and 384 are preferably inserted into the side walls of the barrel-shaped outer flange 316 by epoxy bonding.

8A and 8B are cross-sectional views of a package module for a terahertz wave transceiving device according to an embodiment of the present invention. In particular, a package module having a nitrogen gas or an inert gas purge and charge function is illustrated. Indicates.

8A is a cross-sectional view of a package module for a terahertz wave transceiving device in which nitrogen gas or inert gas is injected.

As shown, the terahertz wave transceiving device package module 300 is provided with a ripple 382 on the side wall of the barrel type external flange 316, the barrel type external flange 316 and the barrel type inner flange 320 By providing a radiation path for radiating nitrogen gas, inert gas, or a mixture of these gases to the photoconductive antenna 240, the photoconductive antenna 240 can have a local nitrogen gas or inert gas atmosphere. In addition, although not shown in the drawing, it is provided with a spinning tube (Tube) that is connected to the ripple 382 and radiates nitrogen gas, inert gas, or a mixture thereof, and through a needle valve coupled to the spinning tube. The injection pressure can be finely adjusted.

Of course, such a ripple 382, the radiation passage and the needle valve can be mounted in the outer flange.

In this manner, the photoconductive antenna 240 may have a local nitrogen gas or an inert gas atmosphere, thereby preventing the terahertz wave characteristics from being changed due to oxide film formation, corrosion, and contamination.

8B is a cross-sectional view of a package module for a terahertz wave transceiving device filled with nitrogen gas, inert gas, or a mixed gas thereof.

As shown, the terahertz wave transceiving device package module 300 has a ripple 380 inserted into the top cover 360 by epoxy bonding and a filling passage for filling nitrogen gas, inert gas or a mixture thereof. By doing so, the module 300 may be filled with nitrogen gas, inert gas, or a mixture thereof. In addition, although not shown in the figure is connected to the ripple 380 having a filling tube (Tube) for filling nitrogen gas, inert gas or a mixture thereof, by coupling a check valve (fill valve) to the filling tube, The check valve may inject nitrogen gas, inert gas, or a mixture thereof into the package module for the terahertz wave transceiving device.

Through this, the device can be stored / moved without changing the characteristics of the terahertz wave transceiving device.

FIG. 9A is a diagram illustrating an example of fabrication of a package module for terahertz wave transceiving devices according to an embodiment of the present invention. In particular, FIG.

As shown, the package module 300 ′ for the terahertz wave transceiving device includes a photoconductive antenna 240 formed on a substrate, a silicon ball lens 230 fixed to a lower portion of the substrate, and a laser pulse on the photoconductive antenna 240. A focusing lens 250 is formed on the substrate and a focusing lens 250 is mounted on the substrate, and the focusing lens 250 is mounted to align the focusing lens 250 to the center of the active region of the photoconductive antenna 240.

A lower fixing part 390 is provided below the substrate, and an upper fixing part 310 ′ is provided above the substrate. Here, the upper fixing part 310 ′ may be the first outer flange 310 described above.

In addition, the upper fixing part 310 ′ and the lower fixing part 390 have openings for opening vertical upper and lower portions of the active region of the photoconductive antenna 220, and mounting and fixing the photoconductive antenna 240 formed on the substrate therein. It is configured to be. For example, the photoconductive antenna 240 is fixed through the fastening ball and the fastening screw.

An upper cover 360 and a lower cover 370 are provided on upper and lower portions of the package module 300 ′ for the terahertz wave transceiving device to seal the openings of the upper fixing part 310 ′ and the lower fixing part 390. do.

The upper cover 360 and the lower cover 370 are formed in a cup shape in which the upper surface is open and the lower surface is closed. The upper cover 360 and the lower cover 370 are coupled to the upper fixing part 310 ′ and the lower fixing part 390, respectively. ) And the opening area of the lower fixing part 390.

Here, the upper cover 360 or the lower cover 370 may be provided with a ripple 380 for filling nitrogen gas or inert gas. In this figure, a case in which the ripple 380 is provided in the upper cover 360 is illustrated.

The focusing lens aligner is formed in such a manner as to surround the barrel-shaped inner flange 320 for mounting the focusing lens 250 therein to move the focusing lens 250 in the Z-direction. External flanges 312 and 314 for moving the X and Y directions.

FIG. 9B illustrates an exploded perspective view of a package module for a terahertz wave transceiving device, and in particular, an exploded view of the lower fixing part, the inner flange, the upper cover, and the lower cover.

As shown, the terahertz wave transmitting and receiving device package module 300 ′ includes a lower fixing part 390, an upper fixing part 310 ′, a second outer flange 312, a third outer flange 314, and a barrel. The outer flange 316 is coupled in sequence, and the barrel inner flange 320 is inserted into the barrel outer flange 316. In addition, the adjustment portion 330 which is in contact with the screw groove is coupled to the upper portion of the barrel-type inner flange 320, the upper cover 360 and the lower cover 370 are coupled to the upper and lower portions of the module 300 ', respectively. .

FIG. 9C illustrates an exploded perspective view of a package module for a terahertz wave transceiving device. In particular, FIG. 9C is an exploded view illustrating the coupling state of an external flange.

As shown, the second outer flange is composed of a main portion 312A 'and a sub portion 312B', the lower surface of which has a groove portion of a dovetail for engaging with the upper fixing portion 310 ', and the upper surface of the second outer flange. It has a protrusion of the dovetail to be coupled to the third outer flange 314.

In addition, a fixing part 312C for coupling and fixing the main part 312 'and the sub part 312B' is provided. In this drawing, the sub-part 312B 'and the fixing part 312C are separately shown, but the fixing part 312C may be configured to be combined with the sub-part 312B'. The fixing part 312C forms the protrusion of the dovetail on the upper surface of the second outer flange by coupling and fixing the main part 312A 'and the sub part 312B'.

The focusing lens aligner is surface-connected by a dovetail formed on the contact surface between the second outer flange 312A 'and the upper fixing part 310' to move the focusing lens 250 in the X direction, and the second outer flange 312B '. And a dovetail formed on the contact surface between the third external flange 314 and the focus lens 250 in the Y direction.

In addition, the barrel inner flange 320 inserted into the barrel outer flange 316 moves the focusing lens 250 in the Z direction by the fixing bolt 352 and the metal ball 350.

According to this structure, by adjusting the position in the X, Y or Z direction with the focusing lens 250 mounted on the focusing lens aligner, the center of the focusing lens 250 in the center of the active region of the photoconductive antenna 240 Can be aligned exactly.

Sidewalls of the outer flanges 312 and 314 are provided with a top cover 410 for coupling the outer flanges. Here, the top of the top cover 410 is coupled to the groove (⑤) of the adjusting unit 330 to fix the adjusting unit 330. Therefore, the adjuster 330 is coupled to the top cover 410 while moving in the fixed position in the fixed position while moving the inner flange 320 in the up, down direction.

The side wall of the barrel-type outer flange 316 is provided with a fixing bolt / metal ball inlet hole cover 400.

An o-ring 420 is provided between the adjuster 330 and the barrel inner flange 320. Of course, as shown in Fig. 9A, the O-ring may be used at a suitable position for securing space or sealing.

9D is a diagram illustrating a completed example of a package module for terahertz wave transceiving elements according to an embodiment of the present invention.

As shown, the focusing lens can be easily aligned through the package module 300 ′ for the terahertz wave transceiving device having the focusing lens aligner. In addition, by providing a package module 300 ′ for the terahertz wave transceiving device having the injection / filling function of nitrogen gas or inert gas, the photoconductive antenna 240, the silicon ball lens 230 and the focusing lens 250 may be provided. It can be stored and transported while maintaining alignment.

Therefore, not only can the stability of the device be secured, but the contamination of the internal devices by the external environment can be minimized.

It is to be noted that the technical spirit of the present invention has been specifically described in accordance with the above-described preferred embodiments, but it is to be understood that the above-described embodiments are intended to be illustrative and not restrictive. In addition, it will be understood by those of ordinary skill in the art that various embodiments are possible within the scope of the technical idea of the present invention.

100: photoconductive antenna 110: substrate
120: photoconductive thin film 130: metal parallel transmission line
200: terahertz wave transmitting and receiving element 230: silicon ball lens
240: photoconductive antenna 250: focusing lens
300: package module for terahertz wave transceiver
310: first outer flange 312: second outer flange
312A: Main part 312B: Sub part
312C: fixed part 314: third external flange
316: barrel outer flange 320: inner flange
322: screw groove 330: control unit
340: sleeve 350: metal ball
352: fixing bolt 360: top cover
370: lower cover 380,382,384: ripple
390: lower fixing part 310 ': upper fixing part
400: fixing bolt / metal ball inlet hole cover 410: top cover
500: terahertz wave generation global enclosure 600: transmission / reception module partial enclosure

Claims (11)

A photoconductive antenna having an active region for terahertz wave generation;
A silicon ball lens for focusing terahertz waves generated from the photoconductive antenna;
A focusing lens for focusing a laser pulse on the photoconductive antenna; And
A focusing lens aligner having the focusing lens therein and whose position is adjusted to align the focusing lens with the center of the active area of the photoconductive antenna.
Lt; / RTI >
The focusing lens aligner,
An outer flange having a first dovetail for moving the focusing lens in a first direction and a second dovetail for moving the focusing lens in a second direction crossing the first direction
Package module for terahertz wave transmission and reception device comprising a.
The method of claim 1,
An upper cover for sealing an upper opening region of the photoconductive antenna; And
A lower cover for sealing a lower opening area of the photoconductive antenna
Package module for a terahertz wave transmitting and receiving device further comprising.
delete The method of claim 1,
The outer flange includes a first outer flange, a second outer flange and a third outer flange stacked on top of the photoconductive antenna,
A first dovetail cut in the first direction is provided on a joining surface of the first outer flange and the second outer flange and is cut in the second direction on a joining surface of the second outer flange and the third outer flange. Equipped with a second dovetail
Package module for terahertz wave transceiver elements.
The method of claim 1,
The focusing lens aligner,
A barrel type outer flange positioned on an upper portion of the third outer flange; And
The focusing lens is built-in, the barrel-shaped inner flange is inserted into the barrel-shaped outer flange to move the focusing lens in the vertical direction
Package module for terahertz wave transmission and reception device comprising a.
The method of claim 5,
A plurality of line grooves extending in parallel in the up and down directions are provided on a contact surface between the barrel-shaped outer flange and the barrel-shaped inner flange, and the barrel-shaped inner flange is raised by a ball inserted into the line groove. Moved down
Package module for terahertz wave transceiver elements.
The method of claim 5,
The focusing lens aligner,
Adjusting unit is fixed to the upper portion of the barrel-shaped outer flange is rotated in place, and moves the inner flange up and down when rotated by the screw groove provided on the contact surface with the inner flange
Package module for a terahertz wave transmitting and receiving device further comprising.
The method of claim 1,
A radiation passage radiating nitrogen gas, inert gas, or a mixture thereof to the photoconductive antenna; And
Valve for controlling the emission of the nitrogen gas, inert gas or a mixture thereof
Package module for a terahertz wave transmitting and receiving device further comprising.
9. The method of claim 8,
A filling passage for filling a nitrogen gas, an inert gas, or a mixed gas thereof in the module; And
Valve for controlling the filling of the nitrogen gas, inert gas or mixed gas thereof
Package module for a terahertz wave transmitting and receiving device further comprising.
The method of claim 1,
The terahertz wave transceiver device package module,
In operation, nitrogen gas, inert gas, or a mixture thereof is injected into the photoconductive antenna.
Package module for terahertz wave transceiver elements.
The method of claim 1,
The terahertz wave transceiver device package module,
During storage or movement, the module is filled with nitrogen gas, inert gas, or a mixture thereof.
Package module for terahertz wave transceiver

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