KR101332634B1 - Mold release composition for uv curing and method of synthetic thereof - Google Patents

Mold release composition for uv curing and method of synthetic thereof Download PDF

Info

Publication number
KR101332634B1
KR101332634B1 KR1020110043508A KR20110043508A KR101332634B1 KR 101332634 B1 KR101332634 B1 KR 101332634B1 KR 1020110043508 A KR1020110043508 A KR 1020110043508A KR 20110043508 A KR20110043508 A KR 20110043508A KR 101332634 B1 KR101332634 B1 KR 101332634B1
Authority
KR
South Korea
Prior art keywords
formula
release composition
reactant
release
present
Prior art date
Application number
KR1020110043508A
Other languages
Korean (ko)
Other versions
KR20120125826A (en
Inventor
유영은
최두선
권기환
김진상
김봉기
Original Assignee
한국기계연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한국기계연구원 filed Critical 한국기계연구원
Priority to KR1020110043508A priority Critical patent/KR101332634B1/en
Publication of KR20120125826A publication Critical patent/KR20120125826A/en
Application granted granted Critical
Publication of KR101332634B1 publication Critical patent/KR101332634B1/en

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/16Nitrogen-containing compounds
    • C08K5/34Heterocyclic compounds having nitrogen in the ring
    • C08K5/35Heterocyclic compounds having nitrogen in the ring having also oxygen in the ring
    • C08K5/357Six-membered rings
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D265/00Heterocyclic compounds containing six-membered rings having one nitrogen atom and one oxygen atom as the only ring hetero atoms
    • C07D265/041,3-Oxazines; Hydrogenated 1,3-oxazines
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/46Polymerisation initiated by wave energy or particle radiation
    • C08F2/48Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • C08F2/50Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10Esters
    • C08F220/34Esters containing nitrogen, e.g. N,N-dimethylaminoethyl (meth)acrylate
    • C08F220/36Esters containing nitrogen, e.g. N,N-dimethylaminoethyl (meth)acrylate containing oxygen in addition to the carboxy oxygen, e.g. 2-N-morpholinoethyl (meth)acrylate or 2-isocyanatoethyl (meth)acrylate
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10Esters
    • C08F220/34Esters containing nitrogen, e.g. N,N-dimethylaminoethyl (meth)acrylate
    • C08F220/36Esters containing nitrogen, e.g. N,N-dimethylaminoethyl (meth)acrylate containing oxygen in addition to the carboxy oxygen, e.g. 2-N-morpholinoethyl (meth)acrylate or 2-isocyanatoethyl (meth)acrylate
    • C08F220/365Esters containing nitrogen, e.g. N,N-dimethylaminoethyl (meth)acrylate containing oxygen in addition to the carboxy oxygen, e.g. 2-N-morpholinoethyl (meth)acrylate or 2-isocyanatoethyl (meth)acrylate containing further carboxylic moieties
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/52Amides or imides
    • C08F220/54Amides, e.g. N,N-dimethylacrylamide or N-isopropylacrylamide
    • C08F220/60Amides, e.g. N,N-dimethylacrylamide or N-isopropylacrylamide containing nitrogen in addition to the carbonamido nitrogen
    • C08F220/603Amides, e.g. N,N-dimethylacrylamide or N-isopropylacrylamide containing nitrogen in addition to the carbonamido nitrogen and containing oxygen in addition to the carbonamido oxygen and nitrogen

Abstract

본 발명은 이형제조성물 및 이를 합성하는 방법에 관한 것으로서, 하기 화학식 1(벤조옥사진) 그룹을 포함하여 이루어지는 것을 특징으로 한다.
[화학식 1]

Figure 112011034205314-pat00031

본 발명에 의하면, 벤조옥사진 그룹이 포함된 모노머들을 이형제로 사용하고, 이를 경화성수지에 첨가함으로써, 경화후에 표면에너지를 현저히 낮출 수 있으며, 표면에너지를 제어함으로써, 몰드와의 이형력을 현저히 향상시킬 수 있는 장점이 있고, 광경화 및 열경화 모두 가능할 뿐만 아니라, 용이하게 경화되어, 경화성수지의 패턴형성성능에 영향을 미치지 않는 장점이 있다.The present invention relates to a release composition and a method for synthesizing the same, characterized in that it comprises a group of the following formula (1).
[Formula 1]
Figure 112011034205314-pat00031

According to the present invention, by using a monomer containing a benzoxazine group as a release agent, by adding it to the curable resin, it is possible to significantly lower the surface energy after curing, and to significantly improve the release force with the mold by controlling the surface energy There is an advantage that can be, and both photocuring and thermal curing is possible, as well as easily cured, there is an advantage that does not affect the pattern forming performance of the curable resin.

Description

이형제조성물 및 이를 합성하는 방법 {MOLD RELEASE COMPOSITION FOR UV CURING AND METHOD OF SYNTHETIC THEREOF}Release product and method for synthesizing it {MOLD RELEASE COMPOSITION FOR UV CURING AND METHOD OF SYNTHETIC THEREOF}

본 발명은 이형제조성물 및 이를 합성하는 방법에 관한 것으로, 더욱 상세하게는 종래와 달리, 벤조옥사진(Benzoxazine)그룹을 갖는 모노머를 포함하는 이형제조성물을 제조하고, 이를 경화성수지에 첨가하여, 경화 후에 표면에너지를 현저히 낮춤으로써, 몰드와의 이형력을 현저히 향상시킨 이형제조성물 및 이를 합성하는 방법에 관한 것이다.
The present invention relates to a release composition and a method for synthesizing the same, and more particularly, to prepare a release composition comprising a monomer having a benzoxazine group, unlike the prior art, and added to the curable resin, after curing By lowering the surface energy significantly, the present invention relates to a release composition that significantly improves the release force with the mold and a method of synthesizing the same.

최근 몰드를 이용한 패턴형성공정에 있어서, 패턴의 크기는 나노스케일로 점점 작아지는 추세이다. In the recent pattern formation process using a mold, the size of the pattern is becoming smaller and smaller on the nanoscale.

이에, 몰드와 경화성수지 사이의 넓은 접촉영역때문에, 패턴전사후에 몰드제거과정에서, 패턴이 손상되거나 몰드가 패턴간에 완전히 제거되지 못 하는 문제가 발생하고 있다.Thus, due to the large contact area between the mold and the curable resin, there is a problem that the pattern is damaged during the mold removal process after the pattern transfer or the mold is not completely removed between the patterns.

이러한 문제는 몰드와 수지간에 서로 다른 물성을 가지기 때문으로, 경화전후에 경화성수지의 밀도차이와 경화성수지의 표면에너지로 인해 발생한다. This problem is due to the different physical properties between the mold and the resin, it occurs due to the density difference of the curable resin and the surface energy of the curable resin before and after curing.

따라서, 나노 패턴형성공정에서, 경화성수지의 표면에너지를 낮추고, 몰드와 경화성수지와의 이형력을 증가시킬 수 있는 이형제의 개발이 요구되고 있다.Therefore, in the nano-pattern forming process, development of a release agent capable of lowering the surface energy of the curable resin and increasing the release force between the mold and the curable resin is required.

본 발명은 상기 문제점을 해결하기 위한 것으로서, 벤조옥사진 그룹이 포함된 모노머들을 이형제로 사용하고, 이를 경화성수지에 첨가함으로써, 경화후에 표면에너지를 현저히 낮출 수 있는 이형제조성물을 제공하는 것을 목적으로 한다.An object of the present invention is to provide a release composition that can significantly lower the surface energy after curing by using a monomer containing a benzoxazine group as a release agent, and adding it to the curable resin. .

또한, 표면에너지를 제어함으로써, 몰드와의 이형력을 현저히 향상시킨 이형제조성물을 제공하는 것을 목적으로 한다.In addition, an object of the present invention is to provide a release composition that significantly improves the release force with the mold by controlling the surface energy.

또한, 광경화 및 열경화 모두 가능할 뿐만 아니라, 용이하게 경화되어, 경화성수지의 패턴형성성능에 영향을 미치지 않는 이형제조성물을 제공하는 것을 목적으로 한다.It is also an object of the present invention to provide a release composition that is not only capable of photocuring and thermal curing but also easily cured and does not affect the pattern forming performance of the curable resin.

뿐만 아니라, 간단하면서도 경제적인 공정으로 다양한 모노머를 합성함으로써, 이형제원료로 사용하기 위한 이형제조성물을 합성하는 방법을 제공하는 것을 목적으로 한다.
In addition, it is an object to provide a method for synthesizing a release preparation for use as a release agent raw material by synthesizing various monomers in a simple and economic process.

상기와 같은 목적을 달성하기 위한 본 발명에 따른 이형제조성물은, 하기 화학식 1(벤조옥사진) 그룹을 포함하여 이루어지는 것을 특징으로 한다.The release preparation according to the present invention for achieving the above object is characterized by comprising the following formula (1).

[화학식 1][Formula 1]

Figure 112011034205314-pat00001
Figure 112011034205314-pat00001

또한, 상기 이형제조성물은 하기 화학식 2, 화학식 3 또는 화학식 4 모노머 중 적어도 하나를 포함하여 이루어지는 것을 특징으로 한다. 하기 화학식의 R1는 수소기 혹은 메틸기 중에서 선택되며, R2, R3, R4는 탄소수 2 내지 20을 가지는 지방족 알칸 중에서 선택된다.In addition, the release composition is characterized in that it comprises at least one of the following formula (2), (3) or (4) monomers. R1 of the following formula is selected from hydrogen or methyl group, R2, R3, R4 is selected from aliphatic alkanes having 2 to 20 carbon atoms.

[화학식 2](2)

Figure 112011034205314-pat00002
Figure 112011034205314-pat00002

[화학식 3](3)

Figure 112011034205314-pat00003
Figure 112011034205314-pat00003

[화학식 4][Formula 4]

Figure 112011034205314-pat00004
Figure 112011034205314-pat00004

또한, 상기 이형제조성물은 광(photo) 또는 열(thermal)에 의해 경화되는 것을 특징으로 하며, 상기 광경화는 양이온 광개시제에 의하며, 상기 열경화는 100℃ 내지 300℃에서 이루어지는 것을 특징으로 한다.In addition, the release composition is characterized in that the curing by light (photo) or thermal (thermal), the photocuring is by a cationic photoinitiator, the thermal curing is characterized in that at 100 ℃ to 300 ℃.

또한, 상기 이형제조성물은, 경화되면, 표면에너지가 감소하는 것을 특징으로 한다.
In addition, the release composition is characterized in that when the cured, the surface energy is reduced.

다음으로, 본 발명에 따른 이형제조성물을 합성하는 방법은, 하기 화학식 5에 하기 화학식 6을 첨가하여 반응물을 제조하는 반응물 제조단계; 상기 반응물에 1,4-다이옥산을 환류방식으로 공급함으로써, 반응시키는 반응단계;를 포함하여 이루어지며, 상기 반응단계를 통해 하기 화학식 7이 형성되는 것을 특징으로 한다.Next, a method of synthesizing a release composition according to the present invention comprises the steps of preparing a reactant by adding the following formula (6) to formula (5); 1,4-dioxane is supplied to the reactants in a reflux manner, the reaction step of reacting, including, and characterized in that the following formula (7) is formed through the reaction step.

[화학식 5][Chemical Formula 5]

Figure 112011034205314-pat00005
Figure 112011034205314-pat00005

[화학식 6][Chemical Formula 6]

Figure 112011034205314-pat00006
Figure 112011034205314-pat00006

[화학식 7][Formula 7]

Figure 112011034205314-pat00007
Figure 112011034205314-pat00007

상기 화학식 6 내지 7에서, R은 수소기 또는 메틸기 중에서 선택된다.In Chemical Formulas 6 to 7, R is selected from a hydrogen group or a methyl group.

상기 반응단계에서, 반응시간은 40시간 내지 90시간인 것을 특징으로 한다.In the reaction step, the reaction time is characterized in that 40 to 90 hours.

또한, 상기 화학식 7에 하기 화학식 8 또는 하기 화학식 9를 첨가하여 제 2반응물을 제조하는 제 2반응물 제조단계; 상기 제 2반응물에 트리에틸아민(triethylamine)과 디클로로메탄(Dichloromethane)을 첨가함으로써, 반응시키는 제 2반응단계;를 더 포함하여 이루어지는 것을 특징으로 한다.In addition, a second reactant manufacturing step of preparing a second reactant by adding the following formula (8) or formula (9) to the formula (7); Characterized in that it further comprises; a second reaction step of reacting by adding triethylamine and dichloromethane (dichloromethane) to the second reactant.

[화학식 8][Formula 8]

Figure 112011034205314-pat00008
Figure 112011034205314-pat00008

[화학식 9][Chemical Formula 9]

Figure 112011034205314-pat00009
Figure 112011034205314-pat00009

상기 화학식 8에서, R1은 수소기 또는 메틸기 중에서 선택된다.In Formula 8, R 1 is selected from a hydrogen group or a methyl group.

또한, 상기 화학식 7에 하기 화학식 10을 첨가하여 제 3반응물을 제조하는 제 3반응물 제조단계; 상기 제 3반응물에 디부틸틴 디라우레이트(dibutyltin dilaurate)를 첨가함으로써, 반응시키는 제 3반응단계;를 더 포함하여 이루어지는 것을 특징으로 한다.In addition, the third reactant manufacturing step of preparing a third reactant by adding the following formula 10 to the formula (7); Characterized in that it further comprises; a third reaction step of reacting by adding dibutyltin dilaurate (dibutyltin dilaurate) to the third reactant.

[화학식 10][Formula 10]

Figure 112011034205314-pat00010
Figure 112011034205314-pat00010

상기 화학식 10에서, R1은 수소기 또는 메틸기 중에서 선택된다.
In Formula 10, R 1 is selected from a hydrogen group or a methyl group.

본 발명의 이형제조성물 및 이를 합성하는 방법에 따르면, 벤조옥사진 그룹이 포함된 모노머들을 이형제로 사용하고, 이를 경화성수지에 첨가함으로써, 경화후에 표면에너지를 현저히 낮출 수 있는 장점이 있다.According to the release composition of the present invention and a method for synthesizing the same, by using monomers containing a benzoxazine group as a release agent and adding it to the curable resin, there is an advantage of significantly lowering surface energy after curing.

또한, 표면에너지를 제어함으로써, 몰드와의 이형력을 현저히 향상시킬 수 있는 장점이 있다.In addition, by controlling the surface energy, there is an advantage that can significantly improve the release force with the mold.

또한, 본 발명의 이형제는 광경화 및 열경화 모두 가능할 뿐만 아니라, 용이하게 경화되어, 경화성수지의 패턴형성성능에 영향을 미치지 않는 장점이 있다.In addition, the release agent of the present invention is not only capable of photocuring and thermal curing, but also easily cured, there is an advantage that does not affect the pattern forming performance of the curable resin.

뿐만 아니라, 간단하면서도 경제적인 공정으로 다양한 모노머를 합성함으로써, 본 발명의 이형제원료를 제조할 수 있는 장점이 있다.In addition, by synthesizing a variety of monomers in a simple and economic process, there is an advantage that can be prepared the release agent raw material of the present invention.

도 1은 본 발명에 따른 이형제조성물을 합성하는 방법을 순차적으로 나타낸 순서도
도 2는 본 발명의 이형제조성물을 합성하는 방법 제 1실시예를 나타낸 반응식
도 3은 본 발명의 이형제조성물을 합성하는 방법 제 2실시예를 나타낸 반응식
도 4는 비교예의 표면접촉각 측정과정을 촬영한 사진
도 5는 본 발명의 실시예 1 내지 3의 표면접촉각 측정과정을 촬영한 사진
도 6은 본 발명의 실시예 4 내지 6의 표면접촉각 측정과정을 촬영한 사진
1 is a flow chart sequentially showing a method for synthesizing a release composition according to the present invention
Figure 2 is a reaction scheme showing a first embodiment of a method for synthesizing the release composition of the present invention
Figure 3 is a reaction scheme showing a second embodiment of the method for synthesizing the release composition of the present invention
Figure 4 is a photograph taken the surface contact angle measurement process of the comparative example
Figure 5 is a photograph taken the surface contact angle measurement process of Examples 1 to 3 of the present invention
Figure 6 is a photograph of the surface contact angle measurement process of Examples 4 to 6 of the present invention

이하, 본 발명에 의한 이형제조성물 및 이를 합성하는 방법에 대하여 본 발명의 바람직한 하나의 실시형태를 첨부된 도면을 참조하여 상세히 설명한다. 본 발명은 하기의 실시예에 의하여 보다 더 잘 이해될 수 있으며, 하기의 실시예는 본 발명의 예시목적을 위한 것이고, 첨부된 특허청구범위에 의하여 한정되는 보호범위를 제한하고자 하는 것은 아니다.Hereinafter, a release preparation according to the present invention and a method for synthesizing the same will be described in detail with reference to the accompanying drawings. The present invention may be better understood by the following examples, which are for the purpose of illustrating the present invention and are not intended to limit the scope of protection defined by the appended claims.

이하에서 설명되는 본 발명에서는, 합성된 이형제조성물을 이용하여, 범용고분자인 폴리메틸메타크릴레이트와 혼용함으로써, 이형제로서 필요한 표면에너지 제어에 대한 효과를 접촉각 측정을 통해 규명하고자 한다. In the present invention described below, by using a synthesized release composition, by mixing with a polymethyl methacrylate, which is a general-purpose polymer, the effect on the surface energy control required as a release agent through the contact angle measurement.

먼저, 본 발명에 따른 이형제조성물은, 하기 화학식 1(벤조옥사진) 그룹을 포함하여 이루어진다. 이는 본 발명자가 다양한 실험과 연구를 통해, 하기 화학식 1(벤조옥사진)그룹을 갖는 화합물을 경화성수지에 첨가하는 경우에, 경화성수지의 표면에너지가 현저히 저하됨을 밝혀냄으로써, 이를 이형제로 활용한 것이다.First, the release composition according to the present invention comprises the following general formula (1). The inventors have found that the surface energy of the curable resin is significantly lowered when the compound having the following Chemical Formula 1 (benzoxazine) group is added to the curable resin through various experiments and researches, and thus used as a release agent. .

여기서, 경화성수지는 어떠한 방식이든 경화되는 수지이면 무방하며, 열 또는 UV 중 적어도 하나에 의해 경화되는 수지이면 더 바람직하다.The curable resin may be any resin that is cured in any manner, and more preferably a resin that is cured by at least one of heat or UV.

[화학식 1][Formula 1]

Figure 112011034205314-pat00011
Figure 112011034205314-pat00011

이렇게 상기 화학식 1(벤조옥사진)그룹을 포함하는 화합물이면 이형제로서 역할을 수행할 수 있으나, 표면에너지를 더 낮춤으로써, 이형력을 극대화시키기 위해서는, 하기 화학식 2, 화학식 3 또는 화학식 4 모노머 중 적어도 하나를 포함하는 것이 바람직하다. 더욱 바람직하게는 하기 화학식 3 모노머를 단독으로 사용하는 것이 가장 효과적이다.As such, if the compound containing Formula 1 (benzoxazine) group may serve as a release agent, by lowering the surface energy further, in order to maximize the release force, at least one of the following Formula 2, Formula 3 or Formula 4 monomers: It is preferable to include one. More preferably, the following Chemical Formula 3 monomers are used alone.

이는 수차례의 합성 및 실험을 통해, 경화성수지의 표면에너지를 최대한 낮춰줌으로써, 실제 패턴형성공정에서 몰드와의 이형력을 극대화시킬 수 있는 화합물이다.
It is a compound that can maximize the release force with the mold in the actual pattern forming process by lowering the surface energy of the curable resin as much as possible through several synthesis and experiments.

[화학식 2](2)

Figure 112011034205314-pat00012
Figure 112011034205314-pat00012

[화학식 3](3)

Figure 112011034205314-pat00013
Figure 112011034205314-pat00013

[화학식 4][Formula 4]

Figure 112011034205314-pat00014
Figure 112011034205314-pat00014

상기 화학식 2 내지 화학식 4에서, R1은 수소기 또는 메틸기 중에서 선택되며, R2, R3 및 R4는 탄소수 2 내지 20을 가지는 지방족 알칸 중에서 선택된다.In Formulas 2 to 4, R 1 is selected from a hydrogen group or a methyl group, and R 2 , R 3 and R 4 are selected from aliphatic alkanes having 2 to 20 carbon atoms.

본 발명의 이형제조성물은 광(photo) 또는 열(thermal)에 의해 경화될 수 있다. 종래와 달리, 본 발명의 이형제조성물은 광과 열 둘 중 어느 것에 의하더라도 용이하게 경화되며, 경화 후에 표면에너지가 감소하게 된다.The release formulations of the present invention can be cured by photo or thermal. Unlike the prior art, the release composition of the present invention is easily cured by either light or heat, and the surface energy decreases after curing.

또한, 상기 광경화는 양이온 광개시제에 의하는 것이 바람직하며, 상기 열경화는 100℃ 내지 300℃에서 이루어지는 것이 바람직하고, 더욱 바람직하게는 150℃ 내지 250℃, 가장 바람직하게는 200℃인 것이 효과적이다. 100℃미만인 경우에는 반응이 일어나지 못 하거나 반응이 일어나더라도 충분히 경화되지 못 해 표면에너지 감소효과가 미미한 문제가 있으며, 300℃를 초과하는 경우에는 경화성수지 자체가 변질될 수 있는 문제가 있다.In addition, the photocuring is preferably by a cationic photoinitiator, the thermosetting is preferably made at 100 ℃ to 300 ℃, more preferably 150 ℃ to 250 ℃, most preferably 200 ℃ effective. . If the temperature is less than 100 ° C., the reaction may not occur or may not be sufficiently cured even if the reaction occurs, resulting in a slight surface energy reduction effect. If the temperature exceeds 300 ° C., the curable resin itself may be deteriorated.

또한, 본 발명의 이형제조성물은, 경화되면, 화학구조가 변경됨으로써, 표면에너지가 감소하는 것을 특징으로 한다. 따라서, 광 또는 열경화가 필요하며, 이는 패턴형성공정에서 몰드제거를 위해 필수적이므로, 몰드를 이용한 패턴형성과정에 최적화된 이형제로 사용될 수 있다.
In addition, the release composition of the present invention is characterized in that when the cured, the chemical structure is changed, thereby reducing the surface energy. Therefore, light or heat curing is required, and since it is essential for mold removal in the pattern forming process, it can be used as a mold release agent optimized for the pattern forming process using a mold.

다음으로, 본 발명의 이형제조성물을 합성하는 방법은, 도 1에 나타난 바와 같이, 반응물 제조단계(S10), 반응단계(S20)를 포함하여 이루어진다. Next, the method for synthesizing the release composition of the present invention, as shown in Figure 1, comprises a reactant preparation step (S10), the reaction step (S20).

이는 제 1실시예로써, 먼저, 반응물 제조단계(S10)는 하기 화학식 5에 하기 화학식 6을 첨가하여 반응물을 제조하는 단계이다. 이는 반응물을 제조하는 과정으로, 반응단계(S20)과 동시에 일어날 수도 있다.This is a first embodiment, first, the reactant preparation step (S10) is a step of preparing a reactant by adding the following formula (6) to the following formula (5). This is a process for preparing a reactant, and may occur simultaneously with the reaction step (S20).

다음으로, 반응단계(S20)는 상기 반응물에 1,4-다이옥산을 환류방식으로 공급함으로써, 반응시키는 단계이다. 이는 환류방식으로 서서히 반응을 일으킴으로써, 순도높은 반응결과물, 하기 화학식 7을 형성하기 위한 과정이다. Next, the reaction step (S20) is a step of reacting by supplying 1,4-dioxane to the reactants in a reflux manner. This is a process for forming a reaction product having a high purity, the following formula 7 by causing a reaction in a reflux mode.

상기 반응물 제조단계(S10)와 반응단계(S20)는 도 2에 나타난 바와 같다.The reactant manufacturing step (S10) and the reaction step (S20) are as shown in FIG.

[화학식 5][Chemical Formula 5]

Figure 112011034205314-pat00015
Figure 112011034205314-pat00015

[화학식 6][Chemical Formula 6]

Figure 112011034205314-pat00016
Figure 112011034205314-pat00016

[화학식 7][Formula 7]

Figure 112011034205314-pat00017
Figure 112011034205314-pat00017

상기 반응단계(S20)에서, 반응시간은 40시간 내지 90시간이 바람직하며, 더욱 바람직하게는 60시간 내지 80시간, 가장 바람직하게는 72시간인 것이 효과적이다. 40시간미만인 경우에는 반응결과물인 화학식 7이 형성되기 어려운 문제가 있으며, 90시간을 초과하는 경우에는 경제성이 저하될 뿐만 아니라, 오히려 화학식 7의 결함이 발생될 수 있는 문제가 있다.In the reaction step (S20), the reaction time is preferably 40 hours to 90 hours, more preferably 60 hours to 80 hours, most preferably 72 hours is effective. If it is less than 40 hours, there is a problem that the reaction product of Formula 7 is difficult to be formed, and if it exceeds 90 hours, not only economic efficiency is deteriorated, but there is a problem that a defect of Formula 7 may occur.

상기 화학식 7 또한 모노머로써, 이형제조성물로 사용될 수 있으나, 이하의 공정을 더 거침으로써, 상기 본 발명의 이형제조성물에서 사용된 보다 효율적인 모노머를 제조할 수 있다.Formula 7 may also be used as a release composition as a monomer, but by going through the following process, a more efficient monomer used in the release composition of the present invention may be prepared.

다음으로, 제 2실시예로써, 상기 반응단계(S20)이후에, 제 2반응물 제조단계(S30)는 상기 화학식 7에 하기 화학식 8 또는 하기 화학식 9를 첨가하여 제 2반응물을 제조하는 과정이고, 제 2반응단계(S31)는 상기 제 2반응물에 트리에탄올아민(tri-ethanolamine)와 디클로로메탄(Dichloromethane)을 첨가함으로써, 반응시키는 과정을 더 포함할 수 있다. Next, as a second embodiment, after the reaction step (S20), the second reactant manufacturing step (S30) is a process for preparing a second reactant by adding the following formula (8) or formula (9) to the formula (7), The second reaction step (S31) may further include a step of reacting by adding triethanolamine and dichloromethane to the second reactant.

제 2반응물 제조단계(S30)와 제 2반응단계(S40)는 도 3에 나타난 바와 같다.The second reactant manufacturing step (S30) and the second reaction step (S40) are as shown in FIG.

[화학식 8][Formula 8]

Figure 112011034205314-pat00018
Figure 112011034205314-pat00018

[화학식 9][Chemical Formula 9]

Figure 112011034205314-pat00019
Figure 112011034205314-pat00019

다음으로, 제 3실시예로써, 상기 반응단계(S20)이후에, 제 3반응물 제조단계(S31)는 상기 화학식 7에 하기 화학식 10을 첨가하여 제 3반응물을 제조하는 과정이고, 제 3반응단계(S41)는 상기 제 3반응물에 디부틸틴 디라우레이트(dibutyltin dilaurate)를 첨가함으로써, 반응시키는 과정이다.Next, as a third embodiment, after the reaction step (S20), the third reactant manufacturing step (S31) is a process for preparing a third reactant by adding the following formula 10 to the formula (7), the third reaction step (S41) is a process of reacting by adding dibutyltin dilaurate to the third reactant.

제 3반응물 제조단계(S31) 및 제 3반응단계(S41)는 도 3에 나타난 바와 같다.The third reactant manufacturing step (S31) and the third reaction step (S41) are as shown in FIG.

[화학식 10][Formula 10]

Figure 112011034205314-pat00020

Figure 112011034205314-pat00020

상기 본 발명에 제조된 이형제조성물의 표면에너지 감소효과에 대한 실험결과는 다음과 같다. Experimental results for the surface energy reduction effect of the release preparation prepared in the present invention are as follows.

먼저, 비교예는 범용고분자인 PMMA를 이용하여, 표면접촉각을 측정하였다.First, the comparative example measured the surface contact angle using PMMA which is a general purpose polymer.

다음으로, 실시예 1 내지 3은, 이하의 본 발명의 이형제조성물들을 각각 200℃에서 30초간 열경화시킨 후 표면접촉각을 측정하였다. 실시예 1은 본 발명의 화학식 2(R1=H, R2=C6H12), 실시예 2는 본 발명의 화학식 3(R3=C6H12), 실시예 3은 본 발명의 화학식 4(R1=CH3, R2=C6H12)를 이용하였다.Next, in Examples 1 to 3, the release compositions of the present invention were thermally cured at 200 ° C. for 30 seconds, respectively, and then measured surface contact angles. Example 1 is Formula 2 (R 1 = H, R 2 = C 6 H 12 ) of the present invention, Example 2 is Formula 3 (R 3 = C 6 H 12 ), and Example 3 of the present invention Formula 4 (R 1 = CH 3 , R 2 = C 6 H 12 ) was used.

이에 대한 결과는 이하 <표 1>, 도 5에 나타난 바와 같다.
The results are as shown in Table 1 and FIG. 5.

실시예 1Example 1 실시예 2Example 2 실시예 3Example 3 비교예Comparative Example 표면접촉각(°)Surface contact angle (°) 99.9799.97 117.68117.68 96.7496.74 6060

상기 <표 1> 및 도 5에 나타난 바와 같이, 본 발명의 범위에 속하는 이형제를 사용한 실시예 1 내지 3이, 종래 패턴형성공정에 사용되던 경화성수지인 비교예보다 표면접촉각이 50%이상 월등히 커졌음을 알 수 있으며, 이는 그만큼 본 발명의 이형제들이 몰드용 범용고분자인 PMMA보다 표면에너지가 현저히 낮다는 것을 의미한다.
As shown in Table 1 and Figure 5, Examples 1 to 3 using a release agent belonging to the scope of the present invention is significantly greater than the surface contact angle 50% or more than the comparative example of the curable resin used in the conventional pattern forming process As can be seen, this means that the release agents of the present invention have a significantly lower surface energy than PMMA, a general purpose polymer for mold.

다음으로, 상기 본 발명의 이형제조성물을 PMMA에 소량(PMMA 100중량%에 대하여, 1중량%) 첨가하여, 이를 몰드에 적용하여, 200℃에서 30초간 열경화시킨 후, 표면접촉각을 측정하였다. Next, the release composition of the present invention was added to PMMA in a small amount (1% by weight based on 100% by weight of PMMA), applied to a mold, and thermally cured at 200 ° C for 30 seconds, and then the surface contact angle was measured.

실시예 4는 상기 실시예 1의 화학식 2를 PMMA에 1중량% 첨가한 것이고, 실시예 5는 상기 실시예 2의 화학식 3을 PMMA에 1중량% 첨가한 것이며, 실시예 6은 화학식 4를 PMMA에 1중량% 첨가한 것이다. Example 4 is 1% by weight of Formula 2 of Example 1 added to PMMA, Example 5 is 1% by weight of Formula 3 of Example 2 is added to PMMA, Example 6 is PMMA Formula 4 It is added to 1 weight%.

이에 대한 결과는 이하 <표 2>, 도 6에 나타난 바와 같다.
The results are as shown in Table 2 and FIG. 6 below.

실시예 4Example 4 실시예 5Example 5 실시예 6Example 6 비교예Comparative Example 표면접촉각(°)Surface contact angle (°) 87.8787.87 103.07103.07 86.2686.26 6060

상기 <표 2> 및 도 6에 나타난 바와 같이, 본 발명의 이형제조성물을 사용한 실시예 4 내지 6이, 종래 패턴형성공정에 사용되던 경화성수지인 비교예보다 표면접촉각이 50%이상 월등히 커졌음을 알 수 있으며, 이는 그만큼 본 발명의 이형제들이 몰드용 범용고분자인 PMMA보다 표면에너지가 현저히 낮다는 것을 의미한다. As shown in Table 2 and Figure 6, Examples 4 to 6 using the release composition of the present invention is significantly larger than the surface contact angle 50% or more than the comparative example of the curable resin used in the conventional pattern forming process As can be seen, this means that the release agents of the present invention have a significantly lower surface energy than PMMA, a general purpose polymer for mold.

또한, 본 발명에서도 화학식 3을 사용한 실시예 2의 표면에너지가 가장 낮아, 이형력이 가장 뛰어남을 알 수 있었다.In addition, in the present invention, the surface energy of Example 2 using the formula (3) was the lowest, it was found that the best release force.

즉, 종래에 비해, 본 발명의 이형제가 이형력이 현저히 향상되었음을 상기 실험을 통해 확인할 수 있었다.
That is, compared to the prior art, the release agent of the present invention was confirmed that the release force is significantly improved through the experiment.

이상에서 본 발명의 바람직한 실시예를 설명하였으나, 본 발명은 다양한 변화와 변경 및 균등물을 사용할 수 있다. 본 발명은 상기 실시예를 적절히 변형하여 동일하게 응용할 수 있음이 명확하다. 따라서 상기 기재 내용은 하기 특허청구범위의 한계에 의해 정해지는 본 발명의 범위를 한정하는 것이 아니다.While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It is clear that the present invention can be suitably modified and applied in the same manner. Therefore, the above description does not limit the scope of the present invention, which is defined by the limitations of the following claims.

Claims (9)

삭제delete 하기 화학식 2, 화학식 3 또는 화학식 4 모노머 중 적어도 하나를 포함하여 이루어지는 것을 특징으로 하는 이형제조성물
[화학식 2]
Figure 112013036474811-pat00022

[화학식 3]
Figure 112013036474811-pat00023

[화학식 4]
Figure 112013036474811-pat00024

(상기 화학식 2 내지 화학식 4에서, R1은 수소기 또는 메틸기 중에서 선택되며, R2, R3 및 R4는 탄소수 2 내지 20을 가지는 지방족 알칸 중에서 선택된다)
Release formulation characterized in that it comprises at least one of the following formula (2), (3) or (4) monomers
(2)
Figure 112013036474811-pat00022

(3)
Figure 112013036474811-pat00023

[Chemical Formula 4]
Figure 112013036474811-pat00024

(In Formula 2 to Formula 4, R 1 is selected from hydrogen or methyl group, R 2 , R 3 and R 4 is selected from aliphatic alkanes having 2 to 20 carbon atoms)
제 2항에 있어서,
상기 이형제조성물은 광(photo) 또는 열(thermal)에 의해 경화되는 것을 특징으로 하는 이형제조성물
The method of claim 2,
The release composition is a release composition, characterized in that the cured by light (photo) or thermal (thermal)
제 3항에 있어서,
상기 광경화는 양이온 광개시제에 의하며, 상기 열경화는 100℃ 내지 300℃에서 이루어지는 것을 특징으로 하는 이형제조성물
The method of claim 3, wherein
The photocuring is by a cationic photoinitiator, the thermosetting is a release composition, characterized in that at 100 ℃ to 300 ℃
제 2항에 있어서,
상기 이형제조성물은, 경화되면, 표면에너지가 감소하는 것을 특징으로 하는 이형제조성물
The method of claim 2,
The release composition, when cured, release composition, characterized in that the surface energy is reduced
하기 화학식 5에 하기 화학식 6을 첨가하여 반응물을 제조하는 반응물 제조단계;
상기 반응물에 1,4-다이옥산을 환류방식으로 공급함으로써, 반응시키는 반응단계;를 포함하여 이루어지며,
상기 반응단계를 통해 하기 화학식 7이 형성되고,
[화학식 5]
Figure 112013036474811-pat00025

[화학식 6]
Figure 112013036474811-pat00026

[화학식 7]
Figure 112013036474811-pat00027

(상기 화학식 6 내지 7에서, R은 수소기 또는 메틸기 중에서 선택된다)
상기 화학식 7에 하기 화학식 8 또는 하기 화학식 9를 첨가하여 제 2반응물을 제조하는 제 2반응물 제조단계;
상기 제 2반응물에 트리에틸아민(triethylamine)과 디클로로메탄(Dichloromethane)을 첨가함으로써, 반응시키는 제 2반응단계;를 더 포함하거나,
상기 화학식 7에 하기 화학식 10을 첨가하여 제 3반응물을 제조하는 제 3반응물 제조단계;
상기 제 3반응물에 디부틸틴 디라우레이트(dibutyltin dilaurate)를 첨가함으로써, 반응시키는 제 3반응단계;를 더 포함하여 이루어지는 것을 특징으로 하는 이형제조성물을 합성하는 방법
[화학식 8]
Figure 112013036474811-pat00038

[화학식 9]
Figure 112013036474811-pat00039

[화학식 10]
Figure 112013036474811-pat00040

(상기 화학식 8에서, R1은 수소기 또는 메틸기 중에서 선택되고, 상기 화학식 10에서, R1은 수소기 또는 메틸기 중에서 선택된다)
Reactant preparation step of preparing a reactant by adding the following formula (6) to the formula (5);
It comprises a; reaction step of reacting by supplying 1,4-dioxane to the reactants in a reflux manner,
Formula 7 is formed through the reaction step,
[Chemical Formula 5]
Figure 112013036474811-pat00025

[Chemical Formula 6]
Figure 112013036474811-pat00026

(7)
Figure 112013036474811-pat00027

(In Formulas 6 to 7, wherein R is selected from a hydrogen group or a methyl group)
Preparing a second reactant by adding the following Formula 8 or the following Formula 9 to Formula 7;
A second reaction step of reacting by adding triethylamine and dichloromethane to the second reactant;
A third reactant preparing step of preparing a third reactant by adding the following Formula 10 to Formula 7;
Method for synthesizing a release composition, characterized in that further comprising; a third reaction step of reacting by adding dibutyltin dilaurate (dibutyltin dilaurate) to the third reactant
[Chemical Formula 8]
Figure 112013036474811-pat00038

[Chemical Formula 9]
Figure 112013036474811-pat00039

[Formula 10]
Figure 112013036474811-pat00040

(In Chemical Formula 8, R 1 is selected from a hydrogen group or a methyl group, and in Formula 10, R 1 is selected from a hydrogen group or a methyl group)
제 6항에 있어서,
상기 반응단계에서, 반응시간은 40시간 내지 90시간인 것을 특징으로 하는 이형제조성물을 합성하는 방법
The method according to claim 6,
In the reaction step, the reaction time is a method for synthesizing a release composition, characterized in that 40 hours to 90 hours.
삭제delete 삭제delete
KR1020110043508A 2011-05-09 2011-05-09 Mold release composition for uv curing and method of synthetic thereof KR101332634B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020110043508A KR101332634B1 (en) 2011-05-09 2011-05-09 Mold release composition for uv curing and method of synthetic thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110043508A KR101332634B1 (en) 2011-05-09 2011-05-09 Mold release composition for uv curing and method of synthetic thereof

Publications (2)

Publication Number Publication Date
KR20120125826A KR20120125826A (en) 2012-11-19
KR101332634B1 true KR101332634B1 (en) 2013-11-25

Family

ID=47511315

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110043508A KR101332634B1 (en) 2011-05-09 2011-05-09 Mold release composition for uv curing and method of synthetic thereof

Country Status (1)

Country Link
KR (1) KR101332634B1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2020175520A1 (en) * 2019-02-26 2021-04-08 ナガセケムテックス株式会社 A cured product of a curable material, a method for producing the cured product, and a polymer composition.
US20240002598A1 (en) * 2020-11-10 2024-01-04 Nanyang Technological University Polymeric products formed using polybenzoxazines suitable for use in additive manufacturing

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080236412A1 (en) * 2007-03-28 2008-10-02 National Applied Research Laboratories Nano-imprinting method using material having surface energy
US20110313080A1 (en) 2009-02-12 2011-12-22 Benzoxazine Resin Composition Benzoxazine resin composition

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080236412A1 (en) * 2007-03-28 2008-10-02 National Applied Research Laboratories Nano-imprinting method using material having surface energy
US20110313080A1 (en) 2009-02-12 2011-12-22 Benzoxazine Resin Composition Benzoxazine resin composition

Also Published As

Publication number Publication date
KR20120125826A (en) 2012-11-19

Similar Documents

Publication Publication Date Title
JP4886991B2 (en) Method for producing high melting point polyamide 12 powder
CN101848915B (en) Epoxy group-containing organosiloxane compound, curable composition for transfer material, and fine pattern forming method using the composition
CN104884487B (en) Resin combination, resin die, optical pressure impression method and the manufacture method of integrated circuit and optical element
KR101959462B1 (en) Phthalonitrile compound
EP3299404B1 (en) Phthalonitrile resin
EP3222689A1 (en) Uv curable silicone composition, cured product thereof, optical element encapsulation material comprised of the composition, and optical element encapsulated by the encapsulation material
JP2007055993A5 (en)
EP3401351B1 (en) Phthalonitrile resin
WO2016039486A1 (en) Thermosetting resin composition
KR101771542B1 (en) Hardmask composition and method of forming patterns using the hardmask composition
CN114651049A (en) Photocurable compositions containing high refractive index monomers for 3D printing applications
KR101332634B1 (en) Mold release composition for uv curing and method of synthetic thereof
US10144155B2 (en) Production method for glassy carbon mold
CN1100805C (en) Method of making polyurethane foam
KR102007121B1 (en) Method of cleaning and drying semiconductor substrate
KR101403067B1 (en) Ultraviolet-curable coating material composition and hard coating film by employing the same
CN104945968A (en) Light-cured three-dimensional printing resin composition and preparation method thereof
JP2006299022A (en) Polyurethane acrylate and its manufacture method
KR102481522B1 (en) Carbosilane Photocurable Composition and Manufacturing method of the Same
JP5769636B2 (en) Method for forming lens or lens array
KR101965194B1 (en) Fluoro monomer and oligomer compounds, photopolymerized composition, and hydrophobic film using the same
JP2022070123A (en) Photocurable resin composition and method for producing optically shaped article using the same
KR102113484B1 (en) Phthalonitrile resin
JP2009506144A5 (en)
KR102101344B1 (en) Photopolymerizable composition for roll-to-roll nanoimprint lithography replica mold, and replica mold containg the same

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20160907

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20170907

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20190909

Year of fee payment: 7