KR101328158B1 - Device using rollers for coating - Google Patents

Device using rollers for coating Download PDF

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Publication number
KR101328158B1
KR101328158B1 KR1020120060919A KR20120060919A KR101328158B1 KR 101328158 B1 KR101328158 B1 KR 101328158B1 KR 1020120060919 A KR1020120060919 A KR 1020120060919A KR 20120060919 A KR20120060919 A KR 20120060919A KR 101328158 B1 KR101328158 B1 KR 101328158B1
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KR
South Korea
Prior art keywords
coating
roller
coating liquid
substrate
liquid
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KR1020120060919A
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Korean (ko)
Inventor
최영길
최규원
조현주
Original Assignee
주식회사 아라온테크
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Priority to KR1020120060919A priority Critical patent/KR101328158B1/en
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Publication of KR101328158B1 publication Critical patent/KR101328158B1/en

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

Disclosed is a device for coating substrate rollers. A transfer device transfers substrates. A coating device sprays a coating solution to the surfaces of the substrates by using a roller. Nozzles are arranged on the upper part of the coating device and drop the coating solution to the roller for processes. A driving part moves the nozzles in the length direction of the roller and drops the coating solution in a liner motion. An injection member supplies the coating solution and a cleaning solution to the nozzles by using each connection pipe. The coating device drops the cleaning solution to clean the roller.

Description

Multiple substrate roller coating equipment {Device using rollers for coating}

The present invention relates to a plurality of substrate roller coating apparatus, and more particularly, to apply a plurality of substrate surfaces using a roller, and a plurality of easy to replace the coating liquid in order to proceed to another process after the end of the process It relates to a substrate roller coating apparatus.

In the existing production process, the focus is on the size of the wafer and substrate size of the semiconductor, and the substrate production process has been mainly developed for the processing of one wafer or substrate.

However, as the circuit pattern is becoming smaller, especially in the semiconductor industry, the pattern-forming industry is gradually being used to form devices such as LCD, OLED, LED, and PCB, and to form battery patterns such as solar cells. . In addition, in recent years, as the market of smartphones and notepads is gradually expanded, the touch screen display industry is rapidly expanding, and there is a shortage of supply in a small size of the substrate. Accordingly, a variety of equipment has been developed to improve the production efficiency of the substrate.

Accordingly, in order to increase the production efficiency of the substrate production process, the process work for each process must be preceded. For example, in order to proceed with the exposure process, the coating liquid must be applied to the surface of the substrate in advance to make the exposure possible. Accordingly, in order to proceed with each process, the equipment that can quickly replace the coating liquid according to the process while applying the coating liquid to a predetermined thickness on the substrate surface in advance is required.

The present invention was created in order to solve the conventional problems as described above, a plurality of substrate roller coating apparatus using a different connection pipe each according to the coating liquid while uniformly applying a coating liquid for a plurality of substrate production process For the purpose of providing it.

It is an object of the present invention to provide a plurality of substrate roller coating apparatus for discharging the odor to the outside so that the user does not cause a headache due to harmful odor generated during the process.

It is an object of the present invention to provide a plurality of substrate roller coating apparatuses in which connectors are different from each other so that coating liquids are not mixed when different coating liquids are injected during the process.

In order to achieve the above object, according to the present invention, a plurality of substrate roller coating apparatus, a transfer apparatus for transferring a plurality of substrates and a coating machine for applying a coating liquid using a roller on the surface of the plurality of substrates; A plurality of nozzles disposed on an upper end of the coating machine to drop different coating liquids onto the rollers according to a process, and a driving part linearly moving to drop the coating liquids while constantly moving the plurality of nozzles in the longitudinal direction of the rollers; Applicator; And an injection member supplying a coating liquid or a cleaning liquid to each of the plurality of nozzles by using a respective connection pipe, wherein the applicator has a plurality of substrate roller coating apparatuses including nozzles for dropping the cleaning liquid to clean the rollers. do.

Preferably, the above-mentioned name of the invention preferably includes a support member having an inclined surface so that the coating liquid applied by the transfer device and the coating machine is gathered in one place.

In addition, it is preferable that the exhaust vent is arranged to remove the smell of the coating liquid generated during the process.

In addition, the vent exhaust port is formed in the '' 'shape so that the coating liquid is not injected, the inside is preferably formed so that the smell can escape the empty.

 According to another form of this invention, the board | substrate manufactured using the several board | substrate roller coating apparatus provided is provided.

According to still another aspect of the present invention, a method of replacing a coating liquid of a plurality of substrate roller coating apparatuses described above may include: stopping a plurality of substrate transfers; b) stopping the coating liquid introduced from the plurality of nozzles; c) dropping the cleaning liquid at one of the plurality of nozzles; d) dropping the cleaning liquid into the coater; e) provides a method of replacing a coating liquid of a plurality of substrate roller coating apparatus including the step of injecting the substrate into the transfer apparatus.

Also, a1) may further include, after step a), the transfer device is driven in a state where only the substrate is not transferred.

In addition, d1) is preferably after the step d), the cleaning solution further comprises the step of removing the coating roller of the coating roller and the coating roller of the coating machine.

A plurality of substrate roller coating apparatus according to the present invention, a plurality of substrate rollers that can be injected into the coating liquid for each process quickly by using a different connection tube according to the coating liquid while uniformly applying the coating liquid for the substrate production process It is effective to provide a coating apparatus.

In addition, there is an effect of providing a plurality of substrate roller coating apparatus is arranged with a vent exhaust port for discharging the chemical smell according to the coating liquid generated during the process to the outside.

In addition, there is an effect of providing a plurality of substrate roller coating apparatus to block the odor so that the user does not cause a headache due to the smell of the coating liquid (chemical) generated during the process.

In addition, there is an effect of providing a plurality of substrate roller coating apparatus capable of quickly replacing the coating liquid without mixing the coating liquid when the different coating liquid is injected during the process.

1 is a perspective view of a plurality of substrate roller coating apparatus in one embodiment of the present invention.
2 is a front view of the plurality of substrate roller coating apparatus shown in FIG.
3 is a cross-sectional view of C- shown in FIG.
4 is an enlarged view of A shown in FIG. 1;
5 is a cross-sectional view of the BB shown in FIG. 2.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, detailed descriptions according to related known functions or configurations will be omitted when it is determined that the detailed description may unnecessarily obscure the subject matter of the present invention. Prior to the entry, in describing the present invention, even if the embodiments are different, the same reference numerals are used for the same configuration, and the description thereof may be omitted as necessary.

1 is a perspective view of a plurality of substrate roller coating apparatus in one embodiment of the present invention, Figure 2 is a front view of a plurality of substrate roller coating apparatus shown in Figure 1, Figure 3 is a cross-sectional view of the C- shown in FIG. .

Referring to the drawings, the apparatus for roller coating a plurality of substrates according to the present invention, the transfer device 10 for transporting the substrate and the coating liquid to the coating machine 20 and the coating machine 20 for coating the substrate dropping the coating liquid The injection member 40 for injecting the coating liquid into the applicator 30 and the applicator 30 and the support member 50 which collects the coating liquid falling from the coating machine 30 into one place and the odor generated from the coating liquid are external. Vent exhaust port 60 is discharged to the.

The conveying apparatus 10 is fixed to the floor of the workplace and conveys the substrate. The conveying apparatus 10 includes a plurality of conveying rollers 110 and an alignment device (not shown) for aligning a plurality of substrates.

The transfer apparatus 10 receives the substrate and transfers it in one direction. In the conveying apparatus 10, a plurality of conveying rollers 110 are arranged at regular intervals. The feed roller 110 rotates clockwise. The transfer apparatus 10 includes a first transfer apparatus 12 for inputting a substrate to the coating machine 20 and a second transfer apparatus 14 for taking over and discharging the coated substrate.

The first transfer apparatus 12 arranges the substrate transferred in the previous process and transfers the substrate to the coater 20. The first transfer device 12 is arranged with an alignment device (not shown) for accurate coating of the substrate. The alignment device preferably aligns multiple substrates simultaneously.

The second transfer device 14 transfers the coated substrate to the next process. In some cases, the coated substrate may be aligned and discharged for rapid progress of the next process.

The coater 20 applies the coating liquid to the surface of the plurality of substrates transferred from the conveying apparatus 10. The coating machine 20 is a support roller 22 for taking over and supporting a substrate in the transfer roller 110, and a coating roller 24 for contacting and applying the substrate to the substrate and a doctor roller 26 for maintaining a constant coating liquid on the coating roller 24. ).

The supporting roller 22 takes over and feeds the substrate fed from the first transfer device 12. The support roller 22 rotates in the same direction as the feed roller 110. The supporting rollers 22 are arranged to be in close contact with each other so that the substrate does not fall from the transfer roller 110. The support roller 22 is disposed at the same height as the feed roller 110 so as not to be separated due to the impact during the movement of the substrate. The support roller 22 is disposed between the first conveying device 12 and the second conveying device 14. The support roller 22 is disposed at the same height as the feed roller in order to minimize the impact generated when the substrate is taken over by the first feed device 12.

The coating roller 24 applies a coating liquid to the surface of the substrate. The coating roller 24 is disposed spaced apart from the support roller 22 by a predetermined distance. The coating roller 24 applies a coating liquid to the surface of the substrate transferred from the feed roller 110 to the support roller 22.

The coating roller 24 contacts the substrate when the substrate is transferred to the support roller 22 in the transfer roller 110 to form an application layer. At this time, the coating roller 24 is preferably to form a coating layer by applying a coating liquid to the substrate surface. The coating roller 24 rotates in the opposite direction to the supporting roller 22. This is to keep the flow of the substrate smoothly. Both ends of the coating roller 24 is preferably formed with a groove in which the coating liquid falls. The coating roller 24 maintains a constant thickness of the coating liquid due to rotation. That is, in the coating roller 24, when the coating liquid is accumulated at a predetermined thickness or more, the coating liquid moves in the longitudinal direction of the coating roller 24 by the rotational force. The coating roller 24 maintains a certain thickness due to rotation, and when the coating roller 24 has a predetermined thickness or more, the coating liquid is pushed out at both ends to drop the coating liquid using a groove. At this time, the falling coating liquid is collected in the pedestal.

The doctor roller 26 keeps the coating liquid at a constant thickness. The doctor roller 26 is spaced apart from the coating roller 24 by a predetermined distance. The doctor roller 26 is disposed at the upper end of the feed roller 110. The doctor roller 26 rotates in the opposite direction to the coating roller 24.

FIG. 4 is an enlarged view of A shown in FIG. 1. Referring to the drawings, the applicator 30 drops the coating liquid on the coater 20. The applicator 30 includes a nozzle 32 for injecting the coating liquid into the doctor roller 26 and a driving part 34 which linearly moves by the length of the doctor roller 26 so as to uniformly inject the coating liquid into the doctor roller 26. ) And an injection member 36 for injecting a coating liquid (chemical: N-Type, P-Type, etc.) into the nozzle 32.

The nozzle 32 drops a certain amount of coating liquid onto the doctor roller 26. A plurality of nozzles 32 are arranged to receive the coating liquid from the injection member 36. The nozzle 32 is disposed in the vicinity of the contact between the coating roller 24 and the doctor roller 26. The nozzle 32 drops the coating liquid into drops at a predetermined interval where the coating roller 24 and the doctor roller 26 are disposed. This is not intended to limit the injection method of the nozzle 32, and in some cases, a method of continuously injecting a coating liquid may be used. It is preferable that a plurality of nozzles 32 be arranged. A plurality of nozzles 32 are disposed to enable injection of a coating solution for each process. For example, in the case of a process using chemicals such as N-Type and P-Type in the process liquid, a plurality of injection members supplied to the nozzle are disposed. N-Type (Nega-PR) refers to the type of chemicals in which the lighted part is formed firmly. P-Type (Posi-PR) refers to the chemicals in which the part of the lighted part disappears. Each of the injection members 40 supplied to the nozzles 32 are provided so as not to mix with each other.

The nozzle 32 supplies chemicals for cleaning the coating roller 24 and the doctor roller 26 as well as the coating liquid used in the process. Because of this, there is no need to replace the chemical to clean the coating roller 24 and the doctor roller 26. In addition, if there is only one injection member when the chemical is replaced, the coating roller is discarded at the beginning of supply. The problem of stabilizing (24) and the doctor roller (26) was also solved.

The drive part 34 makes a linear motion within the length range of the doctor roller 26. The driving unit 34 is preferably disposed at the upper end of the doctor roller 26. The drive unit 34 preferably uses a linear guide to minimize vibration during linear motion. This is not intended to limit the drive 34, and any product capable of linear motion may be used. The driving unit 34 is spaced a predetermined distance to fix the nozzle (32). The driving unit 34 uses the bracket 310 to arrange the nozzle 32 in the vicinity of the contact between the coating roller 24 and the doctor roller 26. The driving unit 34 fixes the injection member for injecting the coating liquid into the nozzle 32.

The driving part 34 is linearly spaced apart by a predetermined distance along the longitudinal direction of the doctor roller 26. This is to allow the coating liquid falling from the nozzle 32 to fall off the coating liquid at regular intervals on the coating roller 24 and the doctor roller 26 while having a predetermined interval.

The injection member 40 transfers the coating liquid to the nozzle 32 while storing the plurality of coating liquids. The injection member 40 stores a plurality of coating liquids separately and transfers the coating liquid to the nozzle 32. At this time, the injection member 40 is disposed in the connecting pipe (not shown) which is supplied to each of the plurality of nozzles 32 each coating liquid separately. It is preferable to use a Teflon hose as the connector. This is not intended to limit the material of the connector.

The injection member 40 preferably transfers the coating liquid to the nozzle 32 hydraulically by using a connecting pipe. The injection member 40 injects each different coating liquid into the plurality of nozzles 32. This solves a problem in that the existing coating liquid and the newly added coating liquid are not mixed with each other and do not generate an application layer on the surface of the substrate. In addition, the problem that the production efficiency generated during the process is reduced.

FIG. 5 is a cross-sectional view of B-B shown in FIG. 2. Referring to the drawings, the support member 50 collects the coating liquid falling from the coating roller 24 and the doctor roller 26 in one place. The supporting member 50 is disposed at the lower end of the feed roller 110. The supporting member 50 has an inclined surface in order to gather the coating liquid into one place. The supporting member 50 is formed with an inclined surface to collect the coating liquid falling from the first transfer device 12, the second transfer device 14 and the coating machine 20 into one place. Support member 50 is formed with a discharge. The discharge part is connected to the outside and collects the used coating liquid and discharges it to the outside.

Vent exhaust port 60 discharges the odor generated in the coating liquid to the outside. Vent vent 60 is disposed in the center of the support member 50 to remove the odor generated by the chemical. Vent exhaust port 60 preferably has a cover to prevent the coating liquid falling from the first conveying device 12, the second conveying device 14, the coating machine 20 and the like to enter the inside. Vent vent 60 is It is good to be formed so that the smell while leaving the shape. This is not intended to limit the shape of the vent exhaust port 60. The exhaust vent is connected to the exhaust pipe 62 at the lower end of the feed roller 110. The exhaust pipe 62 is preferably a pipe made of stainless steel pipe, PVC, aluminum bellows pipe, or the like. Exhaust pipe 62 is connected to the exhaust vent 60 on one side and the other end is connected to a fan (not shown). A fan (not shown) draws out the smell of the coating liquid to the outside using an exhaust pipe.

It will be described a method of replacing the coating liquid of the plurality of substrate roller coating apparatus according to the present invention.

The supply transfer of the plurality of substrates is stopped. Only the conveying device is driven while only the substrate is not conveyed. Dispensing of the coating liquid from the plurality of nozzles is stopped. The coating liquid used in the process at the multiple nozzles stops feeding the applicator. The cleaning liquid is injected into one of the plurality of nozzles. In this case, the injected cleaning liquid uses a separate nozzle, not a nozzle using a conventionally used coating liquid. This prevents the coating solution and the cleaning solution from mixing with each other. The cleaning liquid is dropped into the coater using a separate nozzle. The coater uses a cleaning liquid to remove the coating liquid from the coating roller and the doctor roller.

The cleaning liquid removes the coating liquid from the transfer device. It is advisable to drop the cleaning liquid when the transfer device is driven. Make sure that the cleaning solution is removed from the existing coating solution in the coating roller and doctor roller. If the existing coating solution is removed, it is determined whether the process is in progress. Once removed, fresh coating fluid is supplied through the nozzle. When the coater is stable, it feeds a plurality of substrates to the transfer device.

Hereinafter, the operation according to the embodiment of the present invention will be described in connection with the accompanying drawings.

The substrate is fed through the first transfer device 12. The inserted substrate enters the support roller 22. The entered substrate creates a coating layer on the surface of the substrate to a certain thickness by the coating roller 24. The substrate on which the coating is completed proceeds to the next step through the second transfer device 14.

At this time, the injection member 40 supplies the chemicals required for the process to the nozzle using a connection pipe. The nozzle drops a certain amount of coating liquid onto the doctor roller 26. The driving unit 34 linearly moves so that a certain amount of the coating liquid falls on the doctor roller 26 to control the position of the coating liquid dropped by the nozzle.

In order to change the coating liquid to another coating liquid, one of the plurality of nozzles 32 drops the cleaning liquid to the coating machine 20. When the cleaning of the coater 20 is completed, the required coating liquid is injected to maintain the thickness of the coater 20.

In addition, the coating liquid injected into the surface of the substrate in the coating machine 20 is collected along the inclined surface of the support member 50 and discharged to the outside through the discharge portion. Toxic gas and odor generated during the process are discharged to the outside through the exhaust vent 60.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. It is therefore to be understood that the embodiments described above are illustrative and not restrictive in every respect and that the scope of the present invention is defined by the appended claims rather than the foregoing description, And all changes or modifications derived from equivalents thereof should be construed as being included within the scope of the present invention.

1: roll coating device
10: conveying device
12: first feed device 14: second feed device 110: feed roller
20: coating machine
22: support roller 24: coating roller 26: doctor roller
30: applicator
32: nozzle 34: drive unit 310: bracket
40: injection member
50: support member
60: vent air vent

Claims (9)

A plurality of substrate roller coating apparatus,
A transfer device for transferring a plurality of substrates
A coater for coating a coating liquid made of a material reacting according to a portion of light hitting the surface of the plurality of substrates using a roller;
The inclined surface is formed so that the coating liquid falling from the transfer device and the coating liquid falling on the surface of the plurality of substrates from the coating machine are collected in one place, and the discharge part for collecting and discharging the coating liquid completed to be connected to the outside is discharged to the outside. absence;
A plurality of nozzles disposed on an upper end of the coating machine to drop different coating liquids onto the rollers according to a process, and a driving part linearly moving to drop the coating liquids while constantly moving the plurality of nozzles in the longitudinal direction of the rollers; Applicator; And
It includes a plurality of injection member for supplying each different coating liquid or cleaning liquid to the plurality of nozzles through the connection pipes respectively connected to the plurality of nozzles while storing a plurality of coating liquid, respectively,
The applicator
In order to clean the coating liquid on the roller, the coating liquid introduced from the plurality of nozzles is stopped, and then the cleaning liquid supplied through the connection pipe connected to the injection member in which the cleaning liquid is stored among the plurality of injection members is dropped on the roller. With a floating nozzle
A plurality of substrate roller coating device.
delete The method according to claim 1,
A plurality of substrate roller coating apparatus, characterized in that the vent vent is disposed to remove the smell of the coating liquid generated during the process.
The method according to claim 3,
The vent exhaust port is formed in a 'c' shape so that the coating liquid is not injected, the plurality of substrate roller coating apparatus, characterized in that the inside is formed so that the smell can escape.
delete A substrate manufactured by using a plurality of substrate roller coating apparatus of claim 1.
As a coating liquid replacement method of a plurality of substrate roller coating apparatus of claim 1,
a) stopping the transfer of the plurality of substrates;
b) stopping the addition of the coating liquid introduced from the plurality of nozzles;
c) dropping the cleaning liquid into the coater at a nozzle into which the cleaning liquid supplied through the connection pipe connected to the injection member in which the cleaning liquid is stored is introduced;
d) dropping the cleaning liquid introduced from the nozzle to which the cleaning liquid is supplied to the coating machine to wash the coating machine;
e) when the cleaning of the coating machine is completed, dropping the new coating liquid to the coating machine in the nozzle in which the new coating liquid is supplied through the connection pipe connected to the injection member is stored the new coating liquid to be replaced of the plurality of nozzles step; And
f) dropping the new coating liquid on the coating machine and putting the substrate into the transfer device when the coating machine is stabilized.
Coating liquid replacement method of a plurality of substrate roller coating apparatus comprising a.
The method of claim 7,
a1) after step a),
The coating liquid replacement method of the plurality of substrate roller coating apparatus further comprises the step of driving the conveying device in a state in which only the transfer of the plurality of substrates.
The method according to claim 7 or 8,
d1) after step d),
The cleaning solution is a coating liquid replacement method of a plurality of substrate roller coating apparatus further comprises the step of removing the coating liquid of the coating roller and the doctor roller of the coating machine.
KR1020120060919A 2012-06-07 2012-06-07 Device using rollers for coating KR101328158B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110841887A (en) * 2019-10-18 2020-02-28 合肥河钢新材料科技有限公司 Circulating roller coating process for multicolor plate

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090115353A (en) * 2008-05-02 2009-11-05 한양대학교 산학협력단 Method and apparatus of selective surface modification of black matrix for flat panel display
KR20100018684A (en) * 2008-08-07 2010-02-18 주식회사 나래나노텍 A cleaning device and a method of cleaning a cleaning unit being used for a nozzle device
KR20110001533U (en) * 2009-08-06 2011-02-14 김창원 Roller system for UV coating apparatus
KR20110070359A (en) * 2009-12-18 2011-06-24 엘지디스플레이 주식회사 Printing device and method of fabricating thin film pattern using the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090115353A (en) * 2008-05-02 2009-11-05 한양대학교 산학협력단 Method and apparatus of selective surface modification of black matrix for flat panel display
KR20100018684A (en) * 2008-08-07 2010-02-18 주식회사 나래나노텍 A cleaning device and a method of cleaning a cleaning unit being used for a nozzle device
KR20110001533U (en) * 2009-08-06 2011-02-14 김창원 Roller system for UV coating apparatus
KR20110070359A (en) * 2009-12-18 2011-06-24 엘지디스플레이 주식회사 Printing device and method of fabricating thin film pattern using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110841887A (en) * 2019-10-18 2020-02-28 合肥河钢新材料科技有限公司 Circulating roller coating process for multicolor plate

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